Flow Dividers (e.g., Reversely Acting Controls) Patents (Class 137/101)
  • Patent number: 10844878
    Abstract: A hydraulic component includes a piston and a cylinder with a piston receiving space in which the piston is displaceably arranged while defining a chamber, via which a pressure may be applied to a first end face of the piston, from a control chamber, via which pressure may be applied to a second end face of the piston which faces away from the first end face. A first hydraulic line and a second hydraulic line open into the chamber and a control line, which branches off from the first hydraulic line, opens into the control chamber. Due to the respective pressure ratio between the pressure in the chamber and the control chamber, the piston is displaceable from a closed position, in which the first and second hydraulic lines are fluidly decoupled, into an open position, in which the first and second hydraulic lines are fluidly connected, and vice versa.
    Type: Grant
    Filed: February 3, 2017
    Date of Patent: November 24, 2020
    Assignee: BorgWarner Inc.
    Inventors: Michael Jung, Martin Hirsch, Dominik Mueller
  • Patent number: 10774850
    Abstract: A hydraulic system for a machine includes a first pump, an implement pump, a control valve, and an auxiliary circuit. The first pump is configured to supply a first fluid flow to a first circuit, such as a steering circuit. The implement pump is configured to supply a second fluid flow to an implement circuit to actuate a primary implement function. The auxiliary circuit is configured to deliver fluid flow to actuate an auxiliary implement function. The auxiliary circuit is fluidly coupled to the implement circuit. The auxiliary circuit is also coupled to the first circuit by the control valve. The control valve is located downstream, in the direction of fluid flow, of the implement pump and the first pump. The control valve is configured to allow at least a portion of the first fluid flow to enter the auxiliary circuit and be delivered to the auxiliary implement function.
    Type: Grant
    Filed: April 19, 2018
    Date of Patent: September 15, 2020
    Assignee: Caterpillar Inc.
    Inventors: Steven J. Juricak, David J. Lomax, Paul A. Rousseau
  • Patent number: 10704244
    Abstract: A fill valve with pressure chamber having an open bottom end and a diaphragm at a top end such that falling water level in the toilet tank causes the diaphragm to flex in a first direction, thereby moving a sealing member to an open position, with a venturi in the fill valve keeping the sealing member in the open position until water refilling the tank causes the diaphragm to flex in a second direction, thereby moving the sealing member back to the closed position.
    Type: Grant
    Filed: March 14, 2016
    Date of Patent: July 7, 2020
    Assignee: FLUIDMASTER, INC.
    Inventor: Tuan Le
  • Patent number: 10578221
    Abstract: Described herein is a flow divider that has two chambers defined by two diaphragms and a spool disposed through the diaphragms. The spool has two tapered nozzles that extend into outlets from each chamber. Within the spool are orifices for providing fluid communication from an inlet to each chamber and dividing the flow. The flow divider generally maintains consistent flow to each outlet even when there is downstream backpressure by being able to move away from the outlet with the increased pressure to further drive the opposite nozzle into the other outlet to reduce the flow at the other outlet to balance the pressure at each outlet.
    Type: Grant
    Filed: October 11, 2017
    Date of Patent: March 3, 2020
    Assignee: Precision Planting LLC
    Inventors: Chris Roseman, Jason Stoller, Todd Swanson, Ian Radtke
  • Patent number: 10272223
    Abstract: The invention relates to a pressure responsive respiratory valve apparatus for enabling positive pressure from a source of pressure to be applied to a user's airway, and allowing ingress of a breathable gas from an inlet port into a user's airway during inhalation and egress of expired tidal volume of air from the user's respiratory system to an exhalation port during exhalation. The invention minimizes rebreathing of expired gas and optimizes delivery of pressurized breathable gas by venting gas only during exhalation, as well as addressing important user considerations including minimizing noise, pressure swing, and size.
    Type: Grant
    Filed: November 2, 2015
    Date of Patent: April 30, 2019
    Assignee: VENTIFIC HOLDINGS PTY LTD
    Inventors: Michael David Hallett, Michael Kassipillai Gunaratnam, Allan Nils Gregersen
  • Patent number: 10094378
    Abstract: A system for measuring temporally resolved through-flow processes of a fluid. The system includes an inlet, a main line comprising a line section, an outlet fluidically connected with the inlet via the main line, a displacement device arranged in the main line, a circuitous line which branches off the main line between the inlet and the displacement device and to enter the main line between the displacement device and the outlet, a pressure difference transducer arranged in the circuitous line, an evaluation and control unit which controls the displacement device, and a bypass line comprising a pump and a sensor. The bypass line branches off from the main line or from the circuitous line and ends at a same side of the displacement device and the pressure difference transducer to bypass the line section or the circuitous line from which the bypass line branches off.
    Type: Grant
    Filed: March 21, 2016
    Date of Patent: October 9, 2018
    Assignee: AVL LIST GMBH
    Inventors: Heribert Kammerstetter, Christian Thomas Berger, Otfried Derschmidt, Manfred Pross, Martin Duerrwaechter, Herwig Breitwieser, Othmar Bernhard
  • Patent number: 10082159
    Abstract: A hydraulic system for a work machine including a first and a second hydraulic actuator, and a first and a second hydraulic machine for providing hydraulic fluid to at least one of the first and the second actuator via a first and a second priority valve, respectively. The first and second priority valves are controlled by a pressure drop ?P over the inlet valve of the first actuator such that when ?P is lower than a first threshold value T1, a flow of hydraulic fluid is allowed only to the first actuator. The second priority valve allows a flow of hydraulic fluid to both the first and second actuator for a pressure drop higher than T1. The first priority valve is further configured to allow a flow of hydraulic fluid to both of the first and second actuator for a pressure drop higher than a second threshold value T2 which is higher than T1.
    Type: Grant
    Filed: September 28, 2012
    Date of Patent: September 25, 2018
    Assignee: Volvo Construction Equipment AB
    Inventors: Bo Vigholm, Andreas Ekvall
  • Patent number: 10047502
    Abstract: A control system for a work implement of a machine having a frame is provided. The control system includes a fluid source configured to provide a supply of pressurized fluid and a pair of tilt cylinders in fluid communication with the fluid source. The tilt cylinders are configured to operatively tilt the work implement with respect to the frame of the machine. Each of the tilt cylinders has a rod end and a cap end between which a regenerative valve is disposed to selectively allow fluid communication between the rod end and the cap end of a corresponding tilt cylinder. The control system further includes a controller communicably coupled to each of the regenerative valves. The controller is configured to vary an amount of restriction in each regenerative valve to regulate an amount of fluid flowing between the rod end and the cap end of the corresponding tilt cylinder.
    Type: Grant
    Filed: December 10, 2015
    Date of Patent: August 14, 2018
    Assignee: Caterpillar Inc.
    Inventors: William N O'Neill, Michael Thomas Jackson
  • Patent number: 9909718
    Abstract: A multi-leg discharge boot can include an inlet conduit and first and second outlet conduits separated by a junction portion. The inlet conduit includes an entry segment, a transition segment and a heel portion disposed therebetween. The inlet conduit can include an inlet end and a junction end. A junction portion is disposed at the junction end of the inlet conduit between first and second junction openings. The junction portion includes a substantially planar wall region that is substantially perpendicular to a main flow discharge axis.
    Type: Grant
    Filed: October 24, 2012
    Date of Patent: March 6, 2018
    Assignee: United States Gypsum Company
    Inventors: James Wittbold, Alfred C. Li, Chris C. Lee, Cesar Chan, William Rago, Weixin D. Song
  • Patent number: 9683588
    Abstract: A hydraulic closed circuit system using a single rod type hydraulic cylinder prevents the hunting of a flushing valve due to a delay in response of the flushing valve and circuit pressure pulsations, thereby preventing a decrease in operability of the hydraulic cylinder. A single rod type hydraulic cylinder is connected to a hydraulic pump via two hydraulic lines. A flushing valve is connected between the hydraulic lines and a tank; and a control unit is configured to add a predetermined control parameter to a pressure in a lower-pressure hydraulic line of the two hydraulic lines. The magnitude of a pressure in the higher-pressure hydraulic line of the two hydraulic lines is compared with the magnitude of a compensation pressure to which the control parameter has been added, and the flushing valve is switched when the compensation pressure and the higher-pressure hydraulic line pressure are found to be reversed in magnitude.
    Type: Grant
    Filed: January 28, 2013
    Date of Patent: June 20, 2017
    Assignee: Hitachi Construction Machinery Co., Ltd.
    Inventors: Hiroyuki Sadamori, Juri Shimizu, Teppei Saitoh, Kenji Hiraku, Mariko Mizuochi
  • Patent number: 9656286
    Abstract: A fluid dispenser and method for simultaneously dispensing fluids from first and second cartridges. The fluid dispenser includes a base structure and a cartridge holding assembly mounted to the base structure. The cartridge holding assembly includes first and second cartridge holders. A linear drive mechanism is mounted to the base structure and coupled with first and second drive pistons force fluids through fluid passages. A dispensing portion is provided in first and second sections for easy cleaning.
    Type: Grant
    Filed: September 16, 2014
    Date of Patent: May 23, 2017
    Assignee: Nordson Corporation
    Inventors: Timothy D. Aigner, Jeffry J. Grana, William C. Paetow, II
  • Patent number: 9615697
    Abstract: A combined pilot valve mechanism and a shower system are applied with the combined pilot valve mechanism. By switching to close the control hole, the first water diversion hole or the second water diversion hole to control the pressures of the pressure cavity, the valve spool is driven to move to alternately close the first outlet or the second outlet, so that the inlet waterway is switched to connect to the first outlet waterway, the first water diversion hole or the second water diversion hole. As the shower system is applied with a combined pilot valve mechanism, which utilizes the control hole to switch the waterways, thus preventing the main pipe from great water pressure. The diameter of the control hole can be smaller, so that the water pressure of the button mechanism can be ignored, only friction and light elastic force of the spring exist.
    Type: Grant
    Filed: January 9, 2014
    Date of Patent: April 11, 2017
    Assignees: XIAMEN SOLEX HIGH-TECH INDUSTRIES CO., LTD.
    Inventors: Yulin Wu, Mingfu Zhang, Bin Cao, Huasong Zhou
  • Patent number: 9585526
    Abstract: A pilot valve switch mechanism of a shower system includes a fixed portion and a valve spool. The fixed portion is has an inlet waterway, a first and second outlet waterway and a control hole that can connect to the outlet waterways. The first outlet waterway has a first outlet and the second outlet waterway has a second outlet. The valve spool is slidably assembled inside the fixed portion vertically to the inlet waterway, and has a slim hole connected to the inlet waterway. The valve spool and the fixed portion form a pressure cavity. The control hole and the slim hole are connected to the pressure cavity. The pressure cavity is controlled by the control hole to drive the valve spool to move along the inlet waterway to close the first or second outlet, switching the inlet waterway to connect to the first or second outlet waterway.
    Type: Grant
    Filed: January 30, 2014
    Date of Patent: March 7, 2017
    Assignees: XIAMEN SOLEX HIGH-TECH INDUSTRIES CO., LTD.
    Inventors: Mingfu Zhang, Lei Wang, Xiaofeng Yang, Huasong Zhou
  • Patent number: 9587383
    Abstract: A pilot valve switch mechanism and combined shower applied with the pilot valve switch mechanism includes a fixed portion and a valve spool. The fixed portion includes an inlet waterway, a first outlet waterway, a second outlet waterway and a control hole capable to connect to the outlet waterways. The first outlet waterway has a first outlet. The second outlet waterway has a second outlet. The valve spool is slidably assembled inside the fixed portion along the inlet waterway, with a slim hole connected to the inlet waterway. The valve spool and the fixed portion form a pressure cavity, which is connected to the control hole and the slim hole. The control hole controls the water pressure of the pressure cavity to drive the valve spool to close the first or second outlet, connecting the inlet waterway to the first or second outlet waterway. The control hole switches the waterways.
    Type: Grant
    Filed: January 9, 2014
    Date of Patent: March 7, 2017
    Assignees: XIAMEN SOLEX HIGH-TECH INDUSTRIES CO., LTD.
    Inventors: Yulin Wu, Mingfu Zhang, Yuehua Qiu, Huasong Zhou
  • Patent number: 9488287
    Abstract: A valve includes a housing defining a flow path having three ports. A door in the flow path selectably controls a flow through the flow path in response to a rotation of a lever. Three seal flanges, each define one of the three ports. The door has three selectable closed positions including a first port closed position, a second port closed position, and a third port closed position. A resilient seal is compressed between a sealing face of the door and each of the three seal flanges respectively in turn when the door is in each of the closed positions. The door has a first pivot axis and a second pivot axis parallel to and spaced from the first pivot axis. The door is alternatively rotatable about the first pivot axis and the second pivot axis to selectably close, each individually and separately in turn, the three ports.
    Type: Grant
    Filed: September 19, 2014
    Date of Patent: November 8, 2016
    Assignee: Valeo Climate Control Corp.
    Inventor: Joseph Spryshak
  • Patent number: 9488163
    Abstract: The present invention provides a fluid system (99) comprising a source of hydraulic fluid under pressure supplying a hydraulic fluid consumer (103) together with a valve passing fluid between said source and said fluid consumer (102). A first fluid compliance (105) is situated between said source (100) and said valve (102) and a variable restrictor (110) is provided for varying the cross sectional area available for flow of fluid through said valve (102) and is movable between a first position (A) with a larger said area and a second position (B) with a smaller said area. A bias means (117) biases said restrictor (110) towards said second position while an opening means (Fa) urges said restrictor (110) against said bias (117) when fluid flows through said valve (102) and a damping means (126) damps movement of said restrictor between said first and second positions and provides a resistance which increases with the velocity of displacement of said restrictor (110).
    Type: Grant
    Filed: August 11, 2010
    Date of Patent: November 8, 2016
    Assignees: Artemis Intelligent Power Limited, Sauer-Danfoss APS
    Inventors: Niall James Caldwell, William Hugh Salvin Rampen
  • Patent number: 9435444
    Abstract: A method and apparatus for directing a flow of a fluid. The apparatus comprises a housing, an inlet port, a first outlet port, a second outlet port, and a moveable barrier. The housing has a chamber inside of the housing. The inlet port is in communication with the chamber. The first outlet port and the second outlet port are also in communication with the chamber. The moveable barrier is located in the chamber and rotatable about an axis between a closed position and an open position. The moveable barrier covers the second outlet port in the closed position. The open position allows a fluid to flow through the chamber and out of the second outlet port. The closed position reduces a flow of the fluid through the chamber and out of the second outlet port.
    Type: Grant
    Filed: April 10, 2014
    Date of Patent: September 6, 2016
    Assignee: THE BOEING COMPANY
    Inventors: Anthony Charles Ruh, Jonathan Asher Schweiger
  • Patent number: 9334975
    Abstract: A flow-through condition of a pressure fluid between first through third ports formed in a body of a residual pressure release valve is switched by a valve plug of a valve mechanism. Between an operating unit for driving the valve mechanism and the body, a converter is disposed for converting rotational movement of the operating unit into linear movement and transferring the linear movement to the valve plug. The converter includes a cylindrical shaped cam ring including a pin inserted through the valve plug, and inclined grooves for guiding the pin. The cam ring includes two divided bodies separable from each other in a radial direction.
    Type: Grant
    Filed: September 4, 2012
    Date of Patent: May 10, 2016
    Assignee: SMC KABUSHIKI KAISHA
    Inventors: Masayuki Okitsu, Kazuhiro Matsushita
  • Patent number: 9267412
    Abstract: A system includes a controller. The controller is configured to monitor a catalytic activity within an ASC assembly that converts ammonia (NH3) within a fluid received from a three-way catalyst (TWC) assembly into nitrogen (N2) to determine whether the catalytic activity in the ASC assembly has aged. The controller is configured to adjust a temperature of the fluid flowing into an inlet of the ASC assembly by controlling an amount of oxidant injected via an oxidant injection system into the fluid upstream of the inlet of the ASC assembly based on a determination that the catalytic activity in the ASC assembly has aged.
    Type: Grant
    Filed: April 15, 2014
    Date of Patent: February 23, 2016
    Assignee: GENERAL ELECTRIC COMPANY
    Inventor: Maruthi Narasinga Rao Devarakonda
  • Patent number: 8849466
    Abstract: A four channel gas delivery system comprising: an inlet channel; four outlet channels; four flow sensors; four control valves, each valve being arranged so as to control the flow from the inlet channel through a corresponding one of the outlet channels; a flow ratio control system configured so as to control the flow from the inlet channel through the corresponding outlet channels so that the following flow ratios are controlled: (a) a first ratio of flows between the outlet channels of a first pair; (b) a second ratio of flows between the outlet channels of a second pair; and (c) a third ratio of flows between the first pair of outlet channels relative to the second pair of outlet channels; wherein the third ratio is controlled by generating at least one bias signal respectively applied to at least one pair of valves, the bias signal being a function of a predetermined set point of the third ratio and measured values of the third ratio.
    Type: Grant
    Filed: October 4, 2011
    Date of Patent: September 30, 2014
    Assignee: MKS Instruments, Inc.
    Inventor: Junhua Ding
  • Patent number: 8464740
    Abstract: A flow divider assembly includes a dividing valve and a balancing valve. The dividing valve includes a dividing cavity configured to receive a flow of fuel and a piston device arranged within the dividing cavity and selectively positioned to divide the flow of fuel in the dividing cavity into the first dividing valve port and the second dividing valve port. The balancing valve is fluidly coupled to the dividing valve and configured to receive the first portion and the second portion of the flow. The balancing valve includes a balancing cavity and a balancing device arranged within the balancing cavity and selectively positioned to direct the first portion of the flow into the first balancing cavity port at a third pressure and the second portion of the flow into the second balancing cavity port at a fourth pressure such that the first pressure is approximately equal to the second pressure.
    Type: Grant
    Filed: June 13, 2011
    Date of Patent: June 18, 2013
    Assignee: Honeywell International Inc.
    Inventor: Edward Zielinski
  • Publication number: 20130085618
    Abstract: A four channel gas delivery system comprising: an inlet channel; four outlet channels; four flow sensors; four control valves, each valve being arranged so as to control the flow from the inlet channel through a corresponding one of the outlet channels; a flow ratio control system configured so as to control the flow from the inlet channel through the corresponding outlet channels so that the following flow ratios are controlled: (a) a first ratio of flows between the outlet channels of a first pair; (b) a second ratio of flows between the outlet channels of a second pair; and (c) a third ratio of flows between the first pair of outlet channels relative to the second pair of outlet channels; wherein the third ratio is controlled by generating at least one bias signal respectively applied to at least one pair of valves, the bias signal being a function of a predetermined set point of the third ratio and measured values of the third ratio.
    Type: Application
    Filed: October 4, 2011
    Publication date: April 4, 2013
    Applicant: MKS INSTRUMENTS, INC.
    Inventor: Junhua Ding
  • Patent number: 8397739
    Abstract: Embodiments of the present invention generally relate to methods of controlling gas flow in etching chambers. The methods generally include splitting a single process gas supply source into multiple inputs of separate process chambers, such that each chamber processes substrates under uniform processing conditions. The method generally includes using a mass flow controller as a reference for calibrating a flow ratio controller. A span correction factor may be determined to account for the difference between the actual flow and the measured flow through the flow ratio controller. The span correction factors may be used to determine corrected set points for each channel of the flow controller using equations provided herein. Furthermore, the set points of the flow ratio controller may be made gas-independent using additional equations provided herein.
    Type: Grant
    Filed: January 6, 2011
    Date of Patent: March 19, 2013
    Assignee: Applied Materials, Inc.
    Inventors: Mariusch Gregor, John W. Lane
  • Publication number: 20120261000
    Abstract: A flow divider valve for a gas turbine engine fuel supply system is provided. The flow divider valve is configured, whenever fuel pressure at its inlet port is between a first predetermined pressure and a second predetermined pressure, to supply the fuel to a start nozzle manifold outlet port at a substantially constant flow rate, and to direct any fuel flow in excess of the substantially constant flow rate to a run nozzle manifold outlet port.
    Type: Application
    Filed: April 12, 2011
    Publication date: October 18, 2012
    Applicant: HONEYWELL INTERNATIONAL INC.
    Inventors: Paul Futa, Brad McRoberts, Greg Lafferty
  • Publication number: 20120174990
    Abstract: The flow rate ratio controlling apparatus comprises differential pressure flow rate controllers (MFC1, MFC2) of the same type and a control processing mechanism (C) for giving commands to the flow rate controllers (MFC1, MFC2) to control them. The flow rate controllers (MFC1, MFC2) are provided with respective branched flow channels (BL1, BL2) branched from a terminal of a main flow channel (ML) in opposite directions. The flow rate controller (MFC1) arranged in the branched flow channel (BL1) is operated so that a detected pressure achieves a predetermined target pressure; a target flow rate for the flow rate controller (MFC2) arranged in the branched flow channel (BL2) is determined from the total measured flow rate and the predetermined flow rate ratio, and the flow rate controller (MFC2) is operated so as to achieve the target flow rate.
    Type: Application
    Filed: January 12, 2012
    Publication date: July 12, 2012
    Applicant: HORIBA STEC, CO., LTD.
    Inventor: Tadahiro YASUDA
  • Patent number: 7553120
    Abstract: A hydraulic grip-control unit provided with at least two gripping arms driven hydraulically to seize loads while cooperating with a striker arm of the grip with the control unit in use being connected hydraulically between a hydraulic fluid source under pressure and hydraulic cylinders each of which drives a gripping arm to form a closed supply circuit in which the source feeds fluid to the cylinders connected hydraulically in parallel and with the unit including a flow divider connected along said supply circuit between said source and said cylinders to apportion the flow of the circuit between the cylinders in parallel.
    Type: Grant
    Filed: June 26, 2006
    Date of Patent: June 30, 2009
    Assignee: Auramo Oy
    Inventor: Luciano Veneziani
  • Publication number: 20080283125
    Abstract: A vacuum divider is positioned between rotor blades of a turbo-molecular pump and a vacuum manifold formed from multiple vacuum chambers. A first coupling aperture passes through the vacuum divider and allows gas to pass from a first of the multiple vacuum chambers to the turbo-molecular pump. A second coupling aperture passes through the vacuum divider and allows gas to pass from a second of the multiple vacuum chambers to the turbo-molecular pump.
    Type: Application
    Filed: May 15, 2007
    Publication date: November 20, 2008
    Applicant: AGILENT TECHNOLOGIES, INC.
    Inventors: Alexander Mordehai, Mark Werlich
  • Patent number: 7072743
    Abstract: A system for dividing a single flow into two or more secondary flows of desired ratios, including an inlet adapted to receive the single flow, at least two secondary flow lines connected to the inlet, an input device adapted to receive at least one desired ratio of flow, at least one in-situ process monitor providing measurements of products produced by each of the flows lines, and a controller connected to the input device and the in-situ process monitor. The controller is programmed to receive the desired ratio of flow through the input device, receive the product measurements from the in-situ process monitor, and calculate a corrected ratio of flow based upon the desired ratio of flow and the product measurements. If the product measurements are not equal, then the corrected ratio of flow will be different than the desired ratio of flow.
    Type: Grant
    Filed: March 9, 2004
    Date of Patent: July 4, 2006
    Assignee: MKS Instruments, Inc.
    Inventors: Ali Shajii, Siddharth P. Nagarkatti
  • Patent number: 7063100
    Abstract: A flow regulator with pressure relief combination valve is disclosed which can include a housing and a valve assembly. The housing can have a chamber and four ports. A cage, having a plurality of cross holes, is supported by the housing. A hollow spool is slidably disposed within the cage and is biased to engage the cage. A shoulder of the cage and a counterbore of the spool cooperate to interferingly retain an insert. A poppet is slidably disposed inside of the cage. The valve assembly includes an adaptor, a spring disposed within the adaptor, a guide disposed between the spring and the poppet, and an adjuster adjustably secured to the adaptor. The spring is arranged to bias the poppet against a seat via the guide. The adjustor is movable to adjust the position of the spring.
    Type: Grant
    Filed: March 4, 2004
    Date of Patent: June 20, 2006
    Assignee: HydraForce Inc.
    Inventor: Zilek Liberfarb
  • Patent number: 6857441
    Abstract: A fluid metering device that preferably includes a substantially linear series of intermeshing gears. The fluid metering device includes an inlet port adjacent the intermeshing portion of each pair of gears within the series adjacent the point at which the pair of gears diverge. The device further includes an discharge port adjacent the intermeshing portion of each pair of gears within the series adjacent the point at which the pair of gears converge. The device is configured to convey liquid from a main inlet stream of liquid, through the inlet ports, and out the discharge ports at substantially equal rates. The device preferably includes a pressure balance inlet port and a pressure balance discharge port adjacent the exterior portion of each end gear within the series of gears for balancing forces exerted on the end gear by liquid passing through the various inlet and discharge ports.
    Type: Grant
    Filed: May 13, 2002
    Date of Patent: February 22, 2005
    Assignee: Roper Pump Company
    Inventor: William D. Flavelle
  • Publication number: 20040055636
    Abstract: The invention provides a method and apparatus to control fluids such as process gases into two or more substrate process chambers. In one aspect, the gas flow from a first supply to a first processing region is used to control the gas flow of a second supply to a second processing region where the total gas flow is about equal to the total of the gas flows into both the first and second processing regions. In another aspect, the gas flow rate from the first supply for the first processing region is about equal to the gas flow rate for the second supply to the second processing region.
    Type: Application
    Filed: July 15, 2003
    Publication date: March 25, 2004
    Applicant: APPLIED MATERIALS INC.
    Inventors: Juan Carlos Rocha-Alvarez, Chen-An Chen, Shankar Venkataraman
  • Patent number: 6662817
    Abstract: A gas-line system used for a semiconductor-manufacturing apparatus with at least two reactors, includes at least one gas source; a flow-divider means including an input port on the primary side, which receives a source gas from the gas source, and an output port on the secondary side, which outputs an inputted source gas by equally distributing it. The input port on the primary side is connected with the gas source and the output port on the secondary side is connected with the reactors; and one exhaust pump for exhausting gases within the reactors, which is connected with the reactors. It is desirable that the gas-line system is provided between the reactors and the exhaust pump, and an APC is included for controlling pressure for each reactor.
    Type: Grant
    Filed: September 28, 2001
    Date of Patent: December 16, 2003
    Assignee: ASM Japan K.K.
    Inventors: Takayuki Yamagishi, Masaei Suwada
  • Patent number: 6651688
    Abstract: A divider combiner valve using only one spool without any springs. The correct holes open and close by ball and seat type check valves although these could be a poppet or disk as well and these valves may be located in the valve body, the spool, or both. These are simple and reliable. There is no chance of the holes not being in the correct location. Since there is only one spool, contamination cannot keep the spools from shifting into their correct relationship with each other. The extra pressure drops, needed to overcome the spring forces in the earlier designs, have been eliminated all together. Also, the number of spools has been reduced from two or three down to a single spool, thus reducing the cost to manufacture the finished valve. Because there is only one spool, clearances are closer. There is less internal leakage, more accuracy while the cylinders are in motion. This closer clearance tends to lock the loads rather than transfer oil from one cylinder to the other.
    Type: Grant
    Filed: December 6, 2001
    Date of Patent: November 25, 2003
    Inventors: Glen Brand, Timmy L. Chew
  • Patent number: 6591850
    Abstract: The invention provides a method and apparatus to control fluids such as process gases into two or more substrate process chambers. In one aspect, the gas flow from a first supply to a first processing region is used to control the gas flow of a second supply to a second processing region where the total gas flow is about equal to the total of the gas flows into both the first and second processing regions. In another aspect, the gas flow rate from the first supply for the first processing region is about equal to the gas flow rate for the second supply to the second processing region.
    Type: Grant
    Filed: June 29, 2001
    Date of Patent: July 15, 2003
    Assignee: Applied Materials, Inc.
    Inventors: Juan Carlos Rocha-Alvarez, Chen-An Chen, Shankar Venkataraman
  • Patent number: 6345959
    Abstract: A fluid pump has a housing (4), a main output port (10), an auxiliary output port (14) and a priority pressure regulating valve contained with the housing (4). The priority pressure regulating valve has a spool (20) to direct fluid to one or both of the of the output ports (10,14), a force means (34,36) associated with the spool to bias the spool (20) to a position where it causes fluid to flow to the main output port (10) exclusively, and a pressure release means (40) which enables the spool (20) to move to a position where it permits fluid to flow to the auxiliary output port (14) when the pressure at the main output port (10) is at or greater than a predetermined pressure.
    Type: Grant
    Filed: August 17, 2000
    Date of Patent: February 12, 2002
    Assignee: Sauer-Danfoss (Swindon) Limited
    Inventor: Roderick Howell Spurry
  • Patent number: 6289917
    Abstract: A proportional flow divider valve is configured only as a controlled flow valve by using a first spool in a valve body or as both a free flow valve as well as control flow valve by using a second spool in the valve body. The second spool is provided with a return fluid check valve which is integral therewith and disables the control flow mode when pressure is applied to a piston surface on the return flow check valve. The return flow check valve is configured as a split sleeve which fits around a lateral inlet passage through the second spool and is urged to close the lateral inlet passage under pressure from returning hydraulic fluid. Normally, the split sleeve is axially biased by a vented coil spring to open the lateral inlet passage in the spool.
    Type: Grant
    Filed: June 30, 1999
    Date of Patent: September 18, 2001
    Inventor: Gerald Ross Gerstenberger
  • Patent number: 6164310
    Abstract: A priority type dividing valve includes a housing, a spool slidably situated inside the housing and having a damper orifice, and a damper chamber formed between the spool and the housing for providing a resistance to the movement of the spool. The damper orifice is changeable and includes a small hole and notches, by which the damping effect is changed. At the time of a steering operation, the notches do not operate to increase the damping effect to thereby provide the sufficient holding force to suppress the vibration. When the spool is moved, the notches are actuated to reduce the damping effect to reduce the dragging resistance. Thus, the quick response is obtained.
    Type: Grant
    Filed: June 8, 1999
    Date of Patent: December 26, 2000
    Assignee: Shimadzu Corporation
    Inventor: Shigeru Yamashita
  • Patent number: 5472009
    Abstract: A fluid regulator has two valve bodies (24, 25) placed opposite and cooperating with two openings (22, 23) for controlling the fluid flow from an inlet chamber to two outlet chambers. A spindle (34) interconnects the valve bodies (24, 25) at a predetermined mutual distance forming a spindle assembly. Each valve body and each opening form a passage (30, 31), the sum of the areas of the two passages being constant, but adjustable by a handle (9). The spindle assembly is freely moveable in the axial direction under the influence of the pressures across the openings acting upon the valve bodies so that the pressure drop times the area of each opening is equal for the two openings, and the fluid flow from the inlet chamber is divided into two fluid flows to the outlet chambers. The fluid regulator is intended to be used in an agricultural sprayer for distribution of a fluid composition to soil to be treated. The agricultural sprayer comprises a tank (2), a pump (6), the fluid regulator, and a plurality of nozzles.
    Type: Grant
    Filed: August 10, 1994
    Date of Patent: December 5, 1995
    Inventor: Sven Linderoth
  • Patent number: 5411050
    Abstract: An improved valve of the class referred to as capacity fuse valves which closes in response to passage of a total fluid flow volume through the valve to the valve outlet. The incoming fluid entering the valve inlet is split into a main flow that passes through a variable main flow metering port to the valve outlet and a control flow that passes through a variable control flow metering orifice and is utilized to close the valve upon passage of a predetermined main flow volume (main flow valve closure volume) through the valve. The areas of the main flow metering port and the control flow metering orifice are varied in response to the fluid inflow rate into the valve inlet and/or fluid temperature in such a way as to maintain a substantially fixed ratio between the main flow rate and the control flow rate, and thereby a substantially constant main flow valve closure volume, over a range of fluid inflow rates and/or temperatures.
    Type: Grant
    Filed: October 25, 1993
    Date of Patent: May 2, 1995
    Assignee: Pneu-Draulics, Inc.
    Inventor: Eric J. Saville
  • Patent number: 5377717
    Abstract: A hydraulic flow control valve assembly comprises an inlet port for input fluid flow from a pump, a first outlet port for output fluid flow to a power steering unit, a second-outlet port for output fluid flow to an accumulator of a braking system, and an excess flow port for output fluid flow to other services or a tank. A flow control valve controls the fluid flow from the inlet port to the outlet ports and the excess flow port, and a load sensing port communicates a load-dependent pressure signal from the power steering unit to the valve so as to provide priority fluid flow to the power steering unit. A pilot valve is provided for cutting off the load-dependent pressure signal when the pressure within the accumulator falls below a predetermined value so as to provide for fluid flow from the valve to the accumulator, and in addition a pressure difference sensing arrangement communicates the pressure difference across a restrictor to the valve so as to provide fluid flow to the accumulator.
    Type: Grant
    Filed: March 15, 1994
    Date of Patent: January 3, 1995
    Assignee: Ultra Hydraulics Limited
    Inventors: Graham J. Toogood, Michael S. Barnes
  • Patent number: 5293952
    Abstract: The steering of a motor vehicle is assisted by a power steering means including a hydraulic distributor which is supplied with pressurized fluid by a pump from a reservoir. The vehicle also has a clutch having hydraulic servo assistance supplied by a servo unit. The distributor of the power steering system and the clutch servo unit are both supplied with hydraulic fluid from the same pump and reservoir, through a distribution unit which is so arranged that the power steering system has first call at all times on the available pressurized fluid. The distributor unit includes a flow distributing valve, fed from the pump and dividing the flow between a main circuit which leads to the steering distributor, and a secondary circuit which leads to the servo unit. A pressure regulating valve is connected to both the main circuit and the secondary circuit so as to regulate the pressure in each of these circuits according to the demand of the power steering system.
    Type: Grant
    Filed: December 9, 1991
    Date of Patent: March 15, 1994
    Assignee: Valeo
    Inventors: Claude Ledamoisel, Robert Michel, Veve R. Randriazanamparany
  • Patent number: 5285641
    Abstract: A compact and light flow dividing pump is disclosed. The pump includes a housing having an end plate attached to one end thereof. The end plate has a fluid suction port and a pair of fluid discharge ports. A pump mechanism is provided in the housing for receiving fluid through the suction port and discharging the received fluid through the discharge ports. A plurality of discharge passages are formed in the end plate between the pump mechanism and the discharge ports. A control valve is also provided in the end plate to control the flow rate of fluid in the discharge passages.
    Type: Grant
    Filed: November 5, 1991
    Date of Patent: February 15, 1994
    Assignee: Kabushiki Kaisha Toyoda Jidoshokki Seisakusho
    Inventors: Kunifumi Goto, Shigeru Suzuki, Shigeki Kanzaki
  • Patent number: 5255700
    Abstract: An improved valve of the class referred to as capacity fuse valves which closes in response to passage of a total fluid flow volume through the valve to the valve outlet. The incoming fluid entering the valve inlet is split into a main flow that passes through a variable main flow metering port to the valve outlet and a control flow that passes through a variable control flow metering orifice and is utilized to close the valve upon passage of a predetermined main flow volume (main flow valve closure volume) through the valve. The areas of the main flow metering port and the control flow metering orifice are varied in response to the fluid inflow rate into the valve inlet and/or fluid temperature in such a way as to maintain a substantially fixed ratio between the main flow rate and the control flow rate, and thereby a substantially constant main flow valve closure volume, over a range of fluid inflow rates and/or temperatures.
    Type: Grant
    Filed: June 13, 1991
    Date of Patent: October 26, 1993
    Assignee: Pneu-Draulics, Inc.
    Inventor: Eric J. Saville
  • Patent number: 5165233
    Abstract: A charge pressure priority valve for supplying a flow of sufficient pressure to energize an auxiliary implement while supplying a nearly constant pressure flow to a hydrostatic fluid circuit includes a valve body having an interior bore with a pump inlet passage for communicating a flow from a hydraulic pump thereto. A main flow outlet passage extends from the interior bore for supplying fluid to the hydraulic fluid circuit and has a main flow feedback passage interconnecting the main flow outlet passage and the interior bore. An auxiliary flow outlet passage extends from the interior bore for supplying a flow of sufficient pressure to energize an auxiliary implement. A valve spool is disposed within the interior bore and defines a central chamber intermediate a pair of spaced apart end chambers in the bore, with one of the pair of end chambers being isolated from the other of the pair of end chambers.
    Type: Grant
    Filed: March 28, 1991
    Date of Patent: November 24, 1992
    Assignee: Sauer, Inc.
    Inventor: Michael A. Betz
  • Patent number: 4924900
    Abstract: An adjustable ratio mixing valve is disclosed which incorporates an automatic pressure compensating arrangement whereby the fluid pressure immediately upstream of each of the metering orifices is maintained in substantial equilibrium. This arrangement then enables the respective fluids to be intermixed in any desired volumetric ratio by merely suitably adjusting the open flow area of the metering orifices. In one embodiment the metering orifices are each externally adjustable to enable relatively easy changes in the mixing ratio to be made and may also be interconnected whereby flow volume may be changed while maintaining the desired present mixing ratio. In another embodiment, rapidly acting on/off valving is provided integral with the valve so as to render it uniquely suited for cyclic fluid flow.
    Type: Grant
    Filed: August 2, 1988
    Date of Patent: May 15, 1990
    Assignee: Systems Specialties
    Inventors: Frank A. Taube, Sr., Edward J. Rozniecki
  • Patent number: 4917138
    Abstract: A priority flow control valve for power circuits in hydraulic equipment, which is conventional in basic design, but makes use of an additional piston to impinge on the movable seat of a bias spring housed in a cylindrical chamber that connects with the constant flow passage to the priority outlet; the additional piston operates internally of a chamber having cross-sectional area greater than that of the chamber housing the spring, and is exposed to high pressure flow that can be routed into the chamber either from the priority outlet, or from the valve's main inlet, which will be connected to the high pressure line from the pump.
    Type: Grant
    Filed: June 13, 1988
    Date of Patent: April 17, 1990
    Assignee: Oleostar S.r.L.
    Inventor: Giorgio Bedogni
  • Patent number: 4877057
    Abstract: A pressure equalizing valve comprises a valve body with a longitudinally disposed bore therein, and a spool disposed in the bore for longitudinal movement to regulate fluid communication from an inlet port to outlet ports in response to a pressure differential between first and second sense ports disposed on first and second end faces of the valve body.
    Type: Grant
    Filed: November 13, 1987
    Date of Patent: October 31, 1989
    Assignee: Wormald, U.S. Inc.
    Inventor: Bruce C. Christensen
  • Patent number: 4858515
    Abstract: The invention relates to a priority valve for a hydraulic installation having a main circuit and an auxiliary circuit. The priority valve has a slide member which primarily has a controlled throttle for dividing the supply fluid between the main and auxiliary circuits in accordance with the priority demands of the main circuit. The priority valve has a flow path leading to the auxiliary circuit which has throttle elements in series which provide pressure drops in steps to minimize cavitation when there is a rapid flow of fluid in the auxiliary circuit.
    Type: Grant
    Filed: November 18, 1985
    Date of Patent: August 22, 1989
    Assignee: Danfoss A/S
    Inventor: Niels G. Karlberg
  • Patent number: 4807657
    Abstract: An automatic fluid flow regulator particularly adapted to maintain equilibrium within a cryogenic fluid system. The regulator includes a housing that has an input port and first and second output ports. A housing of the regulator contains a spool body having longitudinally extending expanding fluid channels provided on its outer periphery. The spool body cooperates with spaced flow restriction shoulders on which it is slidably disposed to bias the spool body by means of pressure differences exerted on the ends of the spool body by disturbances in the branches of the system to a position in which more fluid is supplied to one branch while less fluid is supplied to the other branch and the fluid system is brought into equilibrium.
    Type: Grant
    Filed: April 29, 1988
    Date of Patent: February 28, 1989
    Assignee: General Dynamics Corporation/Convair Div.
    Inventor: Hugo H. Van Den Bergh
  • Patent number: 4756330
    Abstract: In a flow divider valve for pressure feed to a hydraulic circuit for auxiliary power steering and to a hydraulic circuit for a power take-off the interior of a hollow regulator piston receives pressure feed for distribution to the hydraulic circuits. For one such circuit, preferably the power take-off, flow passes via multiple bores and coacting flow control grooves of the regulator piston and a housing in which it reciprocates. Accordingly, a desired flow quantity and pressure advantages are achieved, in comparison with use of a single flow control bore which would require a larger piston traverse causing delays in pressure build-up as well as oscillations and strong flow pulses and energy loss.
    Type: Grant
    Filed: March 18, 1987
    Date of Patent: July 12, 1988
    Assignee: Zahnradfabrik Friedrichshafen, AG.
    Inventor: Werner Tischer