Abstract: The present invention relates to a method and apparatus for delivery of reactants to a substrate processing chamber. An electronically controlled valve assembly is provided for rapid delivery of pulses of reactants to the chamber. The valve assembly comprises a valve body having a valve seat, and at least one gas inlet and one gas outlet below the seat. The piston is selectively movable within the valve body to open and close the valve. In order to actuate the valve assembly, current is sent to a solenoid coil within the valve body. The solenoid coil generates a magnetic field that acts on an adjacent magnetic member. The solenoid coil, magnetic member and piston are arranged such that relative movement of the coil and magnetic member cause the piston to be moved relative to the valve seat.

Abstract: A valve device comprises a pipe, a first closing element, mobile between a first position in which it leaves the pipe open and a second position in which it seals the pipe closed, a second closing element, mobile between a first position in which it leaves the pipe open and a second position in which it seals the pipe closed; the first and the second closing elements, in their respective second closed positions, form a chamber and the valve device also comprises an orbital head for supporting at least one nozzle which dispenses a washing fluid, for cleaning the chamber.

Abstract: Complex fluidic micro electromechanical systems (MEMS) are incorporated into high purity chemical delivery systems, while maintaining valve sealing integrity, quality and performance of the system. In particular, fluidic MEMS systems are incorporated into high purity chemical delivery systems for semiconductor fabrication processes.

Abstract: A connector apparatus designed for use in a bioprocessing assembly, and a method for coupling a piece of bioprocessing equipment to a media source in a sterilized environment. The connector apparatus includes a coupler including an end and at least one outlet, and a connector valve connectable at a first end to a fluid source, the connector valve including a valve member, the valve member being partially disposed within the coupler. The connector apparatus further includes a flow passage being actuatable from a closed configuration to an open configuration when the coupler and the connector valve are engaged, as well as being actuatable from an open configuration to a closed configuration. A clip member attached to the coupler allows the valve member to be moved from the closed configuration to the open configuration, and from the open configuration to the closed configuration.

Abstract: A product fill system and method uses a mode valve. The mode valve is a shuttle valve that allows the shock tube to communicate with the filler valve during a fill operation corresponding to fill mode of the mode valve. If the filler valve is shut off, any overpressure can pass through the mode valve and be absorbed by the shock tube. The mode valve can be switched into a clean mode in which the shock tube is connected more directly in the circuit between the upstream side of the mode valve and the filler valve. In other words, the shock tube is on a side circuit of the main circuit used for product feeding during the fill operation. However, during the clean operation, the shock tube is in the circuit such that cleaning material travels completely throughout the shock tube. The method of the present invention involves the use of the product fill system so as to accommodate cleaning without disassembly of parts.

Abstract: Specifically, the present invention is a flush cartridge apparatus used in the controlled removal of accumulated debris from a water distribution system used within a residential and/or commercial structure. The flush cartridge apparatus is generally cylindrically shaped and is designed for sealed engagement within a plumbing valve housing, including pressure balance valves and mixing valves, to provide a long, sustained and complete flushing of water and debris from the water distribution system, while generally preventing water damage, and the occurrence of mold and/or mildew, within the structure. The flush cartridge apparatus can be used alone or in combination with other plumbing tools depending upon the specific need. The flush cartridge apparatus includes alignment and mating features for improved control and safety while using the apparatus.

Abstract: A gas cabinet including an enclosure containing at least one gas supply vessel and flow circuitry coupled to the gas supply vessel(s). The flow circuitry is constructed and arranged to flow dispensed gas from an on-stream gas supply vessel to multiple sticks of the flow circuitry, with each of the multiple sticks being joined in gas flow communication to a respective gas-utilizing process unit. The flow circuitry is valved to enable sections of the flow circuitry associated with respective ones of the multiple sticks to be isolated from other sections of the flow circuitry, so that process gas can be flowed to one or more of the sticks, while other sticks are being evacuated and purged, or otherwise are closed to dispensed gas flow therethrough.

Abstract: A clean check is performed on a gearbox by flushing an oil-based fluid through the gearbox and then through a filter. The filter is then weighed to determine the weight of contaminants collected in the filter. The contaminant weight is compared to a predetermined level, wherein the gearbox is acceptable if the contaminant weight is below the predetermined level. This method is carried out on a system that includes a source of the oil-based fluid fluidly connected to an inlet of the gearbox and a filter fluidly connected to an outlet of the gearbox. A device such as a pump is provided for causing the oil-based fluid to flow through the gearbox and the filter.

Abstract: The present invention is an apparatus for storing and delivering a low vapor pressure process chemical to a process tool for semiconductor fabrication, comprising: a) a bulk container for storing the process chemical; b) a process container for delivering the process chemical to the process tool; c) a first manifold for delivering process chemical from the bulk container to the process container; d) a solvent container containing a quantity of solvent, and; e) a second manifold for delivering the process chemical from the process container to a process tool. A process for using the apparatus is also contemplated.

Abstract: A gas-circulating processing apparatus which comprises a processing chamber, a gas feeding piping, a gas supply piping, a first exhaust mechanism discharging a gas from the processing chamber, a second exhaust mechanism discharging a portion of a gas discharged from the first exhaust mechanism, a back pressure adjusting mechanism interposed between the first exhaust mechanism and the second exhaust mechanism to adjust a back pressure of the first exhaust mechanism, and a gas circulating piping which is configured to combine another portion of the gas that has been discharged from the first exhaust mechanism with a processing gas supplied from the gas supply piping, wherein the gas feeding piping has a larger inner diameter than that of the gas supply, or the processing gas is introduced into the first exhaust mechanism, or a first heater is provided to heat at least part of the circulating route.

Abstract: An exhaust adaptor and method which includes attachment of an exhaust bellow or conduit to a process chamber to facilitate vacuum-induced evacuation of residual toxic gases from the chamber during cleaning and/or maintenance of the chamber. A throttle valve of the chamber is first removed from a throttle valve housing, and one end of the exhaust adaptor is next attached to the throttle valve housing. An exhaust bellow or conduit is attached to the opposite end of the adaptor. As a down flow of air is directed into the open chamber, vacuum pressure is induced in the chamber interior through the exhaust bellow or conduit, the adaptor and the valve housing, respectively. Air disturbances in the chamber interior are thus eliminated, and toxic residual gases generated in the chamber interior are therefore incapable of diffusing to the exterior of the chamber.

Abstract: A vessel for the storage and transportation of bulk volumes of a fluid is described herein and a method for using same. The vessel contains a plurality of dividers that apportion the internal volume into a number of sections. The dividers within the vessel aid in minimizing sloshing of the fluid contained therein during transport. In addition, the dividers optimize the fluid flow pattern thereby allowing for the continuous purge of the vessel without the need for the application of a partial or full vacuum.

Abstract: A two-handle cleaning lance includes a pair of switches which must be held closed by an operator to allow high pressure water to be directed to a discharge nozzle. A dump valve is selectively actuated to dump the high pressure water to a dump nozzle at which it will enter the environment at a much reduced pressure. The dump valve is operated by a control which monitors that the two switches are both held closed. If either switch is released, then the dump valve is moved to a dump position. The present invention ensures that an operator does not disable one of the two switches such as by taping it closed. The dump valve will not move back to its actuated position until both switches have been released and have moved to an open position.

Abstract: Method of cleaning valves or lines through which hydrolysable polymers are transported at the operating temperature, in which, after the polymer stream has been shut off and the polymer has been evacuated as far as possible, steam is passed through the valves or lines to be cleaned while the operating temperature is maintained at plus/minus 10° C., with the steam being introduced via hydrolysis valves set in the wall of the valve housing or the lines and discharged via emptying apertures.

Abstract: Apparatus and method for dispensing a gas using a gas source coupled in selective flow relationship with a gas manifold. The gas manifold includes flow circuitry for discharging gas to a gas-using zone, and the gas source includes a pressure-regulated gas source vessel containing the gas at superatmospheric pressure. The pressure-regulated gas source vessel can be arranged with a pressure regulator at or within the vessel and a flow control valve coupled in flow relationship to the vessel, so that gas dispensed from the vessel flows through the regulator prior to flow through the flow control valve, and into the gas manifold. The apparatus and method permit an enhancement of the safety of storage and dispensing of toxic or otherwise hazardous gases used in semiconductor processes.

Abstract: A product fill system and method uses a mode valve. The mode valve is a shuttle valve that allows the shock tube to communicate with the filler valve during a fill operation corresponding to fill mode of the mode valve. If the filler valve is shut off, any overpressure can pass through the mode valve and be absorbed by the shock tube. The mode valve can be switched into a clean mode in which the shock tube is connected more directly in the circuit between the upstream side of the mode valve and the filler valve. In other words, the shock tube is on a side circuit of the main circuit used for product feeding during the fill operation. However, during the clean operation, the shock tube is in the circuit such that cleaning material travels completely throughout the shock tube. The method of the present invention involves the use of the product fill system so as to accommodate cleaning without disassembly of parts.

Abstract: To provide a process gas supply mechanism for ALCVD systems that enables the high speed switching of process gases without accompanying particulate contamination of the treatment substrate. The ALCVD system is provided with a CVD treatment section and a process gas supply section. The process gas supply section contains a reactant gas line and a carrier gas line; these are combined to form a joint flow line. A vent line is connected to the reactant gas line upstream from the joint flow position. A stop valve SV and a needle valve NV are disposed in the vent line. This needle valve NV functions as a setting means in order to set the flow rate of the gas flowing in the vent line. The stop valve SV is driven through repetitive switching operations by a drive control element, thereby effecting supply and nonsupply of the reactant gas.

Abstract: A method of introducing a fiber optic conduit into a pressurized gas pipeline includes the step of introducing a translating member into the pressurized gas pipeline via an entry port in a first drilling nipple attached to the pressurized gas pipeline. Tools are deployed within a first pressure lock housing attached to the first drilling nipple by using a first manipulator located in the first air lock housing. The duct rod is advanced within pressurized gas pipeline by a driving mechanism, until a second drilling nipple is reached. The translating member is attached to a fiber optic conduit. The duct rod and fiber optic conduit are then pulled back or pulled forward through the pressurized gas pipeline by the driving mechanism. A conduit is installed in a gas service line, to line the cable or conduit in a natural gas main pipeline to a telecommunications panel in a building.

Abstract: The present invention relates to a rotary valve assembly for a pressure swing adsorption system. The rotary valve assembly includes a first valve member and a second valve member relatively rotatable about a common center of rotation to provide valving action for selectively transferring fluids therethrough. The second valve member has a first fluid section with at least one aperture adapted for transferring a first fluid of a first pressure and composition therethrough and a second fluid section with at least one aperture adapted for transferring a second fluid of a second pressure and composition therethrough. The first valve member has a first fluid section with at least one passage for transferring the first fluid in the valve assembly and a second fluid section with at least one passage for transferring the second fluid in the valve assembly.

Abstract: Disclosed is a method for removing sludge in a crude oil storage tank by use of thermal oil discharged from a distillation tower of an oil refinery, such as atmospheric residue, vacuum residue, or vacuum gas oil, and recovering oil having various applications by separating inorganics therefrom. The method is advantageous in terms of minimizing air pollution because of utilizing a closed system, drastically reduced washing time of crude oil storage tank, and continuous removal of the sludge. Additionally, the recovered oil can be provided as fuel oil, marine oil or a feed for secondary treatment processes, such as up-grading processes of heavy oil.

Abstract: A modular gas control device for use with a compressed gas cylinder (111) comprises a primary module (152) and a secondary module (252) mounted on the primary module. The primary module comprises a first supporting body (154) having a first main gas flow path (155) through the body. The supporting body has input connecting means (156) for mounting the body on the cylinder (111) and connecting the gas flow path (155) to communicate with the gas cylinder through a first flow path (157). Pressure reducing means (166) provides gas in the flow path at a lower pressure than in the container. Output connecting means (170) downstream of the pressure reducing means provides a low pressure outlet from the main gas flow path. A high pressure shut-off valve (164) is positioned upstream of the pressure reducing means, and filling means (161, 160) allows filling of the cylinder with compressed gas through the input connecting means (156) along a second flow path (159) separate from the input flow path (157).

Abstract: Valve (1) with a through-going axial bore (4), a first spindle (5) axially displaceable in the bore (4), an elastic/flexible seal (10) placed at the one end surface (6) of the first spindle (5), at least two hollow connection branches (7, 8), each of which connects the valve to an outer coupling, said first spindle (5) in a first position forming a first annular sealing surface (9) between the outer surface of the seal (10) and the inner bottom (11) of the valve body which contains the outlet opening (29), and where the first spindle (5) lies coaxially inside a second axially displaceable and hollow spindle (12) lying in the bore (4), the end surface of which or parts thereof (13) form a second annular sealing surface (14) between the outer surface of the seal (10) and the inner bottom (11) of the valve body at a second position radially from the first annular sealing surface (9).

Abstract: A product fill system and method uses a mode valve. The mode valve is a shuttle valve that allows the shock tube to communicate with the filler valve during a fill operation corresponding to fill mode of the mode valve. If the filler valve is shut off, any overpressure can pass through the mode valve and be absorbed by the shock tube. The mode valve can be switched into a clean mode in which the shock tube is connected more directly in the circuit between the upstream side of the mode valve and the filler valve. In other words, the shock tube is on a side circuit of the main circuit used for product feeding during the fill operation. However, during the clean operation, the shock tube is in the circuit such that cleaning material travels completely throughout the shock tube. The method of the present invention involves the use of the product fill system so as to accommodate cleaning without disassembly of parts.

Abstract: A method of treating fluids in an annulus (18), comprising the steps of: providing a fluid-circulation annulus (18) between a host tubular (10) and a liner (17) therein; and manipulating fluids in the annulus (18) so that the relative proportions of fluid components in the annular fluid correspond to the relative permeation rates of the fluid components from the bore to the annulus (18). The method may further comprise the steps of: detecting an undesired fluid in the annulus (18); and manipulating the annular fluids in response to the undesired fluid, so that the relative proportions of fluid components in the annular fluid, including the undesired fluid, correspond to the relative permeation rates of the fluid components from the bore to the annulus (18). In a case where the undesired fluid has potential for harm to the host tubular (10), the manipulating step may reduce the potential for harm.

Abstract: The liquid supply system comprises a pump for delivering a liquid under high pressure and a vaporizer for vaporizing the liquid delivered from the pump. The liquid vaporized in the vaporizer is supplied to a reaction chamber. A pressure gage is provided in a passage extending from the pump to the vaporizer. A monitor device is provided so as to indicate a pressure, based on an output of the pressure gage.

Abstract: A product fill system and method uses a mode valve. The mode valve is a shuttle valve that allows the shock tube to communicate with the filler valve during a fill operation corresponding to fill mode of the mode valve. If the filler valve is shut off, any overpressure can pass through the mode valve and be absorbed by the shock tube. The mode valve can be switched into a clean mode in which the shock tube is connected more directly in the circuit between the upstream side of the mode valve and the filler valve. In other words, the shock tube is on a side circuit of the main circuit used for product feeding during the fill operation. However, during the clean operation, the shock tube is in the circuit such that cleaning material travels completely throughout the shock tube. The method of the present invention involves the use of the product fill system so as to accommodate cleaning without disassembly of parts.

Abstract: A method of purging a fuel processing system comprising a steam reformer having a catalyst comprising nickel is provided. In one embodiment, the present method comprises supplying a purge gas to the steam reformer, the purge gas comprising an inert gas and hydrogen. A fuel processing system is also provided, the present system comprising: a steam reformer having a catalyst comprising nickel; means for supplying a purge gas at least to the reformer; and, a hydrogen supply for supplying hydrogen to the purge gas.

Abstract: A method and apparatus for servicing a pressurized system is described. A purge fitting can be used to vent the pressurized system. Venting can release a gas, such as air, from the system. The pressurized system can be a climate control system (e.g., an air conditioning or refrigeration system), a brake system, a hydraulic system, or a service device for servicing a climate control system. The purge fitting allows air that may be trapped in the pressurized system to be vented by depressing a purge actuator, such as a purge button attached to the fitting. The air can be vented from an opening adjacent to the actuator or other orifice. By purging air directly from the system, the amount of air introduced into the system during servicing can be minimized. The invention also features a coupling member that can be compact in size.

Abstract: Method and system for purging a process line of a process gas used in a semiconductor wafer fabrication process. Inert gas (e.g., nitrogen gas) is repeatedly charged from an inert gas source into the process line and evacuated using a vacuum system. The vacuum system is preferably supplied with inert gas having a pressure in excess of 30 psig from the inert gas source. The inert gas is introduced into the process line from an inert gas conduit at a predetermined pressure to prevent process gas from liquefying in the process line. A set pressure regulator or an absolute pressure regulator may be used to reduce he pressure of the inert gas to below the vapor pressure of the process gas.

Abstract: A modular gas control device for use with a compressed gas cylinder (111) comprises a primary module (152) and a secondary module (252) mounted on the primary module. The primary module comprises a first supporting body (154) having a first main gas flow path (155) through the body. The supporting body has input connecting means (156) for mounting the body on the cylinder (111) and connecting the gas flow path (155) to communicate with the gas cylinder through a first flow. path (157). Pressure reducing means (166) provides gas in the flow path at a lower pressure than in the container. Output connecting means (170) downstream of the pressure reducing means provides a low pressure outlet from the main gas flow path. A high pressure shut-off valve (164) is positioned upstream of the pressure reducing means, and filling means (161, 160) allows filling of the cylinder with compressed gas through the input connecting means (156) along a second flow path (159) separate from the input flow path (157).

Abstract: The subject of the present invention is a method and a device for filling a distribution line (20) with corrosive gas. The said method is a method for filling with gas, with passivation, a line (20) for distributing corrosive gas, which line is intended to distribute the said corrosive gas to a system (3) located immediately downstream of the said line (20); the said method comprising: prior conditioning of the said line (20); the actual filling of the said line (20) with the said corrosive gas known as an active gas. Characteristically, the said actual filling with gas comprises: at least one cycle of filling the said line (20) with active gas as far as immediately upstream of the system (3) and of removing the said active gas thus introduced into the said line (20); the said removal being performed without the said active gas passing through the said system (3); followed by the final filling of the said line (20) with gas so as to make the said gas available to the said system (3).

Abstract: Microfluidic devices and methods for metering discrete plugs of fluid are provided. The microfluidic devices include a trunk channel and a branch channel having an impedance region. A fluid is supplied to the trunk channel and fills the branch channel to the impedance region. The fluid is then flushed from the trunk channel leaving the branch channel filled. Because the branch channel has a volume, a discrete plug of the fluid having a volume substantially equal to that of the branch channel is formed.

Abstract: The present invention generally provides an apparatus and method for improving the process of purging a liquid delivery system used in integrated circuit manufacturing. The liquid delivery system comprises ultrasonic transducers mounted to various components of a liquid delivery system. The transducers may be mounted on housings, isolation valves, fuel injectors, pump assemblies, fluid lines, and/or liquid flow meters. The ultrasonic transducers launch ultrasonic energy that enhance the removal of processing liquids and particulate material from components of the system. The present invention provides for a purge process where a purge fluid, preferably a liquid solvent, is flowed into the liquid delivery system and ultrasonic energy is launched into the purge fluid to enhance dissolution of residual processing liquids and particulate matter in the liquid delivery system, including from cracks and crevices in valves and other complex mechanical devices before being pumped from the liquid delivery system.

Abstract: A valve arrangement is provided that more effectively purges processing liquid from a processing liquid delivery system. With the valve arrangement only a small portion of the processing liquid path having a small wetting perimeter must be purged to affect replacement of a dysfunctional injection valve or any other component within the processing liquid delivery system. The valve arrangement comprises a first and a second isolation valve, a pump valve and purge valve configured to reduce the wetting perimeter defined by the four valves. The valve arrangement allows a dysfunctional injection valve or any other component to be replaced without health risk to humans or damage risk to a processing liquid delivery system employing the valve arrangement. During component replacement, the first and the second isolation valves are closed and the pump and the purge valves are opened so as to purge processing liquid from the isolated volume defined by the four valves.

Abstract: An overall valving system is situated generally between a source of water and a habitable structure; a main valve is selectively openable and closable to permit and terminate flow from such source of water to the habitable structure; a conduit is provided for supplying pressurized air to an area downstream of the main valve when the main valve is closed.

Abstract: Process and device for connecting at least one supply reservoir (A), such as a storage reservoir, to at least one receiving reservoir (B), such as a tank truck, for the transfer of a fluid from the at least one supply reservoir (A) to the least one receiving reservoir (B) comprising at least one transfer line (2) for fluid comprising at least one first member (3) for connection to the receiving reservoir (B); a valve (V2) for connection to the atmosphere connected to the transfer line (2); and an analyzer (10) connected to the transfer line (2) particularly to monitor continuously during the transfer the purity of the transferred fluid.

Abstract: An aseptic product discharge valve and related methods for injecting steam into a sterile fluid delivery system used to transport a sterile fluid food product. The aseptic product discharge valve includes a tubular member having a longitudinal passageway and an outlet for discharging the flow of food product. The valve also includes a chamber disposed radially outward of the passageway. The chamber receives steam that is exhausted through an opening disposed adjacent to the valve. A valve member is disposed within the longitudinal passageway and fluid food product must flow about the valve member. The diverted flow of fluid food product may be intersected by the flow of injected steam. The tubular body further includes a valve seat which is bathed with the injected steam to promote sterility at the discharge location.

Abstract: An auto-switching sub-atmospheric pressure gas delivery system, for dispensing gas to a gas-consuming process unit, e.g., a semiconductor manufacturing tool. The gas delivery system uses a multiplicity of gas panels, wherein one panel is in active gas dispensing mode and supplying gas from a sub-atmospheric pressure gas source coupled to the flow circuitry of the panel. During the active gas dispensing operation in such panel, a second gas panel of the system undergoes purge, evacuation and fill transition to active gas dispensing condition, to permit switching to the second panel upon exhaustion of the sub-atmospheric pressure gas source coupled to the first gas panel without the occurrence of pressure spikes or flow perturbations.

Abstract: A method of removing graphite from metal molds used in the glass fabrication industry, the method including placing a metal glass-fabricating mold with graphite bonded thereto in a chamber, providing an oxygen rich mixture of combustible gases in the chamber, said oxygen rich mixture containing from about 10 to about 25% stoichiometric excess of oxygen, and igniting the oxygen rich mixture of combustible gases in the chamber to produce a temperature of at least about 6,000° F. and a pressure wave. A high temperature wave front and the pressure wave thereby produced remove graphite from the metal mold by ablation of the graphite.

Abstract: A system and method ensures that the wet lines of a bottom loading petroleum cargo tank remain free of hazardous liquid during transit. The system and method continuously monitor and automatically purge liquid that collects in the wet lines during transit, for example from a leaking emergency valve. The system includes a liquid sensor positioned at a low point in the wet line, a low pressure purge controller in electrical communication with the liquid sensor and a solenoid valve in electrical communication with the purge controller. The system further includes a one-way flow valve in flow communication with the solenoid valve and the wet line. The solenoid valve is also in flow communication with an external source of compressed gas, such as the air system of the cargo tank or an auxiliary air supply. Preferably, the system further includes a remote warning indicator for indicating to the operator of the cargo tank that a particular wet line is leaking excessively.

Abstract: A submerged, valve assembly for controlling flow of fluid (e.g. ballast water) to and from a reservoir (e.g. a ballast tank of a ship. The valve assembly is comprised of a valve which is controlled by a hydraulic valve actuator. A fluid-tight housing encloses the actuator so that any leaking hydraulic fluid will be contained within the housing and will not pollute the surrounding fluid in the tank. The assembly includes a means for detecting any hydraulic fluid which may leak into the housing.