Abstract: A tire repair and inflation device having a housing, a cavity for receiving and removably retaining a disposable self-contained aerosol container as a source of sealant, a disposable self-contained aerosol container containing sealant under pressure and a release valve. The device also includes a compressor and a multi-way valve, the multi-way valve having a first inlet for receiving sealant from the disposable self-contained aerosol container upon actuation of the release valve and a second inlet for receiving air under pressure from the compressor and an outlet for selectively discharging sealant and compressed air to a tire under repair, wherein the sealant being delivered to the multi-way valve and the compressed air being delivered to the multi-way valve act independently of one another.

Abstract: A method for pathogen destruction in dilute sewage sludge or other dilute streams containing pathogens, including Helminth ova, while minimizing vapor generation and atmospheric emissions. In addition to conventional waste treatment steps, including grit removal, clarification, and concentration of waste material, vaporized waste treatment compounds are recycled to treat divert untreated waste in a scrubber. In the scrubber, waste material is treated while also acting as a reactive agent to scrub potentially hazardous or noxious gas, particularly gaseous MITC, from the treatment system. Recycling of vaporized treatment compounds provides a reduction of potentially toxic emissions and increased efficiency during treatment.

Abstract: A chromatography system includes a separation column that separates a sample carried by a compressible mobile phase flow into analytes and a splitter in fluidic communication with the separation column to receive and divide the compressible mobile phase flow into first and second mobile phase streams in accordance with a split ratio. A thermally modulated variable restrictor is coupled between the splitter and a detector. The restrictor receives the first mobile phase stream from the splitter and has a temperature element in thermal communication with the first mobile phase stream to exchange heat therewith. A controller, in communication with the restrictor, dynamically adjusts a temperature setting of the temperature element of the restrictor to adjust the heat exchange between the thermally modulated variable restrictor and the first mobile phase stream in order to keep the split ratio constant throughout a chromatographic run.

Abstract: An embodiment of the invention relates to a fluidic system (200) in which a first channel (210) and a second channel (230) are separated by a fluidic stop (220), for example a region with a hydrophobic coating and/or a structure (220) with non-capillary internal dimensions. Moreover, it comprises a flexible element (240) that is deformable to enable a flow of a medium across the fluidic stop.

Abstract: A sanitary fitting having a housing with at least one mixing unit for mixing a cold water and a hot water into a mixed water, wherein the mixed water can be directed through a first flow path and a second flow path to a spout of the housing, and wherein the first flow path can be at least partially closed by a first valve and the second flow path can be at least partially closed by a second valve, so that an outflow of the mixed water from the spout can be controlled by means of the first valve and the second valve independently from one another.

Abstract: A fluid control and processing system comprising a cartridge and an instrument for operating the cartridge. The cartridge comprises a cylinder body comprising a cylinder and a fluid port. It further comprises dispensing ports to drive a fluid flow, each dispensing port being positioned to be connectable, when the instrument is operating the cartridge, with at least a fluid port by rotation of the cylinder body. The instrument comprises a piston driver for driving the piston. The system further comprises: reversible fastening means for fastening the piston when the piston driver is rotated with respect to the piston, so that the movement of the piston is controlled by the piston driver; and rotating means comprising a cylinder driver constitutive of the instrument for rotating the cylinder body around the axis A.

Abstract: The present disclosure provides methods for packaging a chip and packaged chips in which the chip and packaging are co-planar and gap-less. In certain instances, the packaged chip has electrodes or fluidics integrated with the chip.

Abstract: A connector which couples to an outlet conduit to decrease an outlet conduit passageway pressure differential between outlet conduit opposing first and second ends, whereby the connector includes a mixing chamber having a first inlet port in fluidic communication with a connector first open end and the mixing chamber; an outlet port in fluidic communication with the mixing chamber and a connector second open end; and a second inlet port in fluidic communication with the connector second open end and the mixing chamber. Additionally, a connector including a connector internal surface defining a connector passageway which communicates between connector first and second open ends; and a sensor module operatively coupled to the connector passageway to sense a parameter of a first fluid flowing in a first fluid flow path through the connector passageway.

Abstract: Apparatus and associated methods relate to generating a signal indicative of a differential pressure using a first absolute pressure sensor and a second absolute pressure sensor, each having a positive relation transducer configured to generate an electrical signal that increases in response to increasing pressure and a negative relation transducer configured to generate an electrical signal that decreases in response to increasing pressure. The first and second positive relation transducers of the first and second absolute pressure sensors, respectively, are electrically connected as a first leg of a Wheatstone bridge at a first output node. The first and second negative relation transducers of the first and second absolute pressure sensors, respectively, are electrically connected as a second leg of a Wheatstone bridge at a second output node. Both positive and both negative relation transducers are connected to a first and a second bias node of the Wheatstone bridge, respectively.

Abstract: An exemplary compounding system and method can include a transfer set that includes a manifold for assisting in transferring a plurality of ingredients from supply container(s) to a final container. The manifold can include a first channel in fluid communication with at least one primary ingredient, and a second channel in fluid communication with a plurality of secondary ingredients. The first channel and second channel can be in fluid isolation from each other such that the at least one primary ingredient does not mix with the plurality of secondary ingredients within the manifold. The transfer set can include a plurality of inlet lines in fluid communication with the manifold and two outlet lines configured for connection to two separate pumps and eventually being in fluid communication with the final container.

Abstract: Apparatus and associated methods relate to generating a signal indicative of a differential pressure using a first absolute pressure sensor and a second absolute pressure sensor, each having a positive relation transducer configured to generate an electrical signal that increases in response to increasing pressure and a negative relation transducer configured to generate an electrical signal that decreases in response to increasing pressure. The first and second positive relation transducers of the first and second absolute pressure sensors, respectively, are electrically connected as a first leg of a Wheatstone bridge at a first output node. The first and second negative relation transducers of the first and second absolute pressure sensors, respectively, are electrically connected as a second leg of a Wheatstone bridge at a second output node. Both positive and both negative relation transducers are connected to a first and a second bias node of the Wheatstone bridge, respectively.

Abstract: A ceramic control valve may include a control shaft bolt, an upper ceramic piece, and a lower ceramic piece secured in a valve shell, and a valve base formed on a bottom of the ceramic control valve connects with the valve shell to prevent the components from falling out of valve shell. The ceramic control valve of the faucet can control the tap water and the filtered water, and also provides hot water, cold water, or different mixing ratios of hot water and cold water without installing another ceramic control valve. Therefore, the design of the present invention simplifies the complexity in structure, and it is convenient for a user to control the filtered water and the tap water with the different mixing ratios of hot water and cold water by a single ceramic control valve.

Abstract: The invention concerns a discharge valve (17) intended to be fitted in a discharge duct of an apparatus designed to be driven by a fluid, in particular a turbocharger driven by the exhaust gases from an engine. The discharge valve (17) comprises a cavity (83) having a first (85), a second (87) and a third aperture (89), each intended to be connected to a respective duct, the discharge valve (17) also comprising first (91) and second (93) means for closing the first (85) and second (87) apertures, respectively, in order to control communication between the ducts.

Abstract: A sealant dispenser is disclosed, which can cooperate with an air compressor for repairing punctured tires. The sealant dispenser generally includes a bottle with a top opening being filled with a chemical sealant, a cap capable of covering the top opening of the bottle, a control element that normally closes an air input connection tube and a sealant output connection tube provided at the cap, and a swing element. In use, the air input connection tube is connected to an air compressor, and the sealant output connection tube is connected to a punctured tire. The serving element is operated to conduct a semicircle swing to allow the compressed air of the air compressor to flow into the bottle to force the chemical sealant to flow into the interior of the punctured tire for repairing the tire.

Abstract: A valve assembly for a shower/tub system is provided. The assembly includes a valve body assembly having a molded base, a first inlet connection fitting configured to fluidly attach a first fluid source to the molded base, a second inlet connection fitting configured to fluidly attach a second fluid source to the molded base, a first outlet connection fitting configured to fluidly attach a shower fixture to the molded base, and a second outlet connection fitting configured to fluidly attach a tub nozzle to the molded base.

Abstract: A valve having a valve cap with a plurality of process conduits extending therethrough, each one of the plurality of process conduits ending in a process port at a valve cap interface. The valve also has a valve body defining a valve body interface facing the valve cap interface, a diaphragm positioned between the valve cap interface and the valve body interface, across the process ports, and a purge line provided through one of the valve cap and the valve body. The valve further comprises a sealing assembly located in the valve body. The sealing assembly is configured and positioned to block fluid leaked through the diaphragm such that the fluid leaked through the diaphragm is discharged via and exit of the purge line of the valve. A chromatographic system including the valve and a method of operation thereof are also provided.

Abstract: A valve manifold has a housing with a central mixing chamber and a shell surface. The shell surface of the valve manifold has at least two valve ports, with each valve port being associated with one valve. A first valve port has three openings, and additional valve ports each having three openings. A respective first opening of the valve ports is in direct fluid communication with the central mixing chamber, and the second and third openings of the valve ports are each in fluid communication with an inflow or outflow via a duct. A bottom of the mixing chamber, in relation to a plane arranged perpendicularly to a vertical longitudinal axis of the housing, has a slope towards the first opening of the first.

Abstract: A flow reversing device for performing blood treatment can include a flow reversing actuator. The flow reversing actuator can receive and engage a disposable tubing set with multiple branches that form forward and reverse blood flow paths respectively when blood the flow reversing actuator is selectively changed between forward and reverse configurations. The shape of the tubing can be such that during forward operation, dead regions of non-flowing blood are defined. The flow reversing actuator can have a controller configured to operate generally in forward mode. At first times, the controller can cause the flow reversing actuator to clear the dead regions. At second times, the controller can cause the flow reversing actuator to test for leaks by reversing the flow of blood for a period of time sufficient to cause air to be drawn into the tubing set and conveyed to an air sensor.

Abstract: A self-protecting valve assembly for use in conjunction with a sump pump test and monitoring system having a test control module which generates a valve control signal for opening the valve to initiate a test cycle. The valve assembly includes an electrically-actuated valve which is responsive only to a valve-actuating signal and not to the valve control signal. A conversion circuit in the valve assembly converts the valve control signal to a valve actuating signal to actuate the valve. This protects the valve from receiving a false actuating signal in the event of a failure in the test control module.

Abstract: Disclosed is a dual-purpose faucet comprising a faucet pipe, a ball valve for gradually blocking and unblocking the faucet pipe at the free end thereof, and a fountain check valve extending through the upper surface of the faucet pipe from within the faucet pipe. When a fluid is being discharged from the faucet pipe, and, at which point, as the control means is operated so as to block the faucet pipe, the backpressure created as a result thereof, upon reaching a threshold pressure, causes the fountain check valve to open allowing the fluid to pass therethrough resulting in the discharge of a fluid jet therefrom; the trajectory of the fluid jet adjustable by adjusting the control means as adjusting the control means regulates the backpressure.

Abstract: Disclosed is a valve device capable of washing an internal pipe in a hot water boiler wherein an operating part is not brought into contact with a body made of a metal material, and even though the valve device is not used for a long period of time, the operating part does not adhere to the body, and wherein the valve device is simple in configuration so that it can be easily mounted on a restricted installation area.

Abstract: A method of hydraulic fracturing of an oil producing formation includes the provision of a heating apparatus which is transportable and that has a vessel for containing water. A water stream of cool or cold water is transmitted from a source to a mixer, the cool or cold water stream being at ambient temperature. The mixer has an inlet that receives cool or cold water from the source and an outlet that enables a discharge of a mix of cool or cold water and the hot water. After mixing in the mixer, the water assumes a temperature that is suitable for mixing with chemicals that are used in the fracturing process, such as a temperature of about 40°-120° F.+(4.4-48.9 C+). An outlet discharges a mix of the cool and hot water to surge tanks or to mixing tanks In the mixing tanks, a proppant and an optional selected chemical or chemicals are added to the water which has been warmed.

Abstract: A control mechanism for manually adjusting a plurality of control parameters, the control mechanism including a mechanical multiple axis handle movable about a plurality of axes of rotation for operating an operated device, wherein each of the axes of rotation pass through the handle, and a movement transformation assembly to transform rotational movements of the handle to control commands to the operated device.

Abstract: Provided are gas distribution apparatus with a delivery channel having an inlet end, an outlet end and a plurality of apertures spaced along the length. The inlet end is connectable to an inlet gas source and the outlet end is connectible with a vacuum source. Also provided are gas distribution apparatus with spiral delivery channels, intertwined spiral delivery channels, splitting delivery channels, merging delivery channels and shaped delivery channels in which an inlet end and outlet end are configured for rapid exchange of gas within the delivery channels.

Abstract: A system and method for a fluid manifold with a sensor inlet and sensor outlet located on the same side of the body of the fluid manifold.

Abstract: A fluid draw-off block joint includes an inlet channel, an outlet channel, and a closure portion. The inlet channel has a first end communicating with an outlet channel of a single-line block joint, and a second end communicating with an inlet channel of an outlet on-off valve. The outlet channel has a first end communicating with an outlet channel of the outlet on-off valve, and a second end being open through a side surface in a line exit direction. The closure portion closes an opening of a bifurcated channel of a plural-line block joint.

Abstract: In various embodiments, an electronic flow selector of a fluid flow control system may be used to select a flow rate of a fluid. When the system is in an electronic mode, an encoder may electronically encode the fluid flow selection. A controller may receive the electronically encoded flow selection and transmit a corresponding control signal to an electronic valve to allow the fluid to flow at the selected flow rate. When the system is in a manual mode, backup manual flow selectors may be used to directly control the flow rate of a fluid. When the system is in a manual mode, the mechanical backup flow selectors may be in a deployed position. When the system is in an electronic mode, the mechanical backup flow selectors may be in a retracted position. Particular applications to gases and anesthesia delivery are disclosed herein.

Abstract: A modular mounting and connection or interconnection system for microfluidic devices (20) includes a plurality of end-butting compression-sealing fluid connectors or adapters (32), and one or more clamping structures (54, 56) each structured to hold one of the fluid connectors (32) in compression against a planar surface of a microfluidic device (20), and to press against the device, on another directly opposing planar surface thereof, either a contact pad (48) or another of the fluid connectors (32), with each clamping structure (54,56) including an individually moveable compression-providing element such as a compression screw (36) structured to provide a controlled amount of compression.

Abstract: Method and devices are provided that integrate various internal channels and inlet and outlet ports, configured to operate with air or fluidics, with electrical circuitry. The devices comprise internal channels and outlet/inlet ports that are integrated into multiple layers of printed circuit boards. A multi-layer printed circuit board assembly is produced by laminating the plurality of layers together. The multi-layer printed circuit board assembly can accommodate a variety of off-the-shelf components, as well as electrical circuits and electronic components.

Abstract: The present invention is one that prevents standard gas from remaining in a standard gas line to prevent a concentration of standard gas from being reduced due to adsorption, modification, or the like, and has: a diluent gas line provided with a diluent gas flow rate controlling mechanism; a standard gas line provided with a standard gas flow rate controlling mechanism; an output gas line joined by the diluent gas line and standard gas line and outputs the standard gas having a predetermined concentration; an exhaust gas line connected to an upstream side of the standard gas flow rate controlling mechanism in the standard gas line and provided with an on/off valve and a flow rate control part; and a control part that, depending on a flow rate of the standard gas flowing through the standard gas line or the type of the standard gas, switches on/off the on/off valve.

Abstract: A valve manifold has a housing including a central mixing chamber and a shell surface. The shell surface has at least two valve ports that are each associated with one valve. A first valve port has three openings and the additional valve ports each have at least two, preferably three openings. A respective first opening of the valve ports is in direct fluid communication with the central mixing chamber, and the second and third openings of the valve ports are each in fluid communication with an inflow or outflow via a duct. An external port is provided which is in direct fluid communication with the mixing chamber via a duct.

Abstract: The invention relates to a multi-ports extracorporeal medical device (1) having a selector body (19) which can be linearly displaced within the housing (16) in order to create different flow paths and connection among the ports. The device can for instance be used for reversing the flow in an extracorporeal blood circuit.

Abstract: A device to enhance sealing is provided. The device includes a body and a pressure cup. The pressure cup includes a channel, a first pressure channel, and a second pressure channel. The channel is formed in a surface of the body to surround a first portion of the surface. The channel is configured to hold an o-ring. The first pressure channel extends through the body and opens into the first portion of the surface. The second pressure channel extends through the body and opens into the channel. Pneumatic pressure within the second pressure channel is controlled to hold the o-ring in the channel when a second pressure within the first pressure channel changes.

Abstract: A valve assembly has a valve manifold which includes a housing having a central mixing chamber and a shell surface, and further has at least two diaphragm valves which are each adapted to be attached to a valve port provided on the shell surface. A first valve port has three openings, and the further valve ports each have at least two openings. A respective first opening of the valve ports is in direct fluid communication with the central mixing chamber and the second and third openings of the valve ports are each in fluid communication with an inflow or outflow via a duct. Each valve includes inlets or outlets which correspond with the openings of the valve ports and which are each in fluid communication with an opening. Each valve is adapted to shut or open the flow path between the first opening of a valve port and the second or third opening.

Abstract: A hydraulic manifold for a hydraulic heating and/or cooling system includes a feed conduit (212) and a return conduit (216). The feed conduit (212) includes at least one feed connection (258), and the return conduit (216) includes at least one return connection (260), for the connection of a load circuit (228). A load module (204), in which a section of the feed conduit (212) with the feed connection (258), and a section of the return conduit (216) with the return section (260) are formed, includes at least one mixing device with a pump (232) and with a regulating valve (230), to admix fluid from the return connection (260) to a fluid flow from the feed conduit (212) to the feed connection (258). The section of the feed conduit (212) and the return conduit (216) in each case include an additional contact for connection with a further load module.

Abstract: A trim manifold assembly is utilized to facilitate control of the control valve in a fire protection system. The trim manifold assembly utilizes a manifold block with numerous passageways to provide desired flow communication between various components, such as automatic and manual valves, check valves, inlet and exit ports, and sensor ports, by way of non-limiting example. The trim manifold assembly can be cost-effectively manufactured and may require less assembly steps. The trim manifold assembly can facilitate the assembly of a fire protection system and the attachment of the trim manifold assembly to the control valve for operation thereof.

Abstract: The invention relates to a fluid flow valve, particularly for a motor vehicle. Said fluid flow valve comprises a body (2), capable of having said fluid pass therethrough; and a sealing means (3), placed in said body, capable of occupying different angular positions by rotation of said sealing means (3) relative to said body (2). Said sealing means (3) is configured so as to enable, in a first angular position, the fluid to pass from a first inlet (6) to a first outlet (21) of the valve and from a second inlet (22) to a second outlet (7) of the valve, and, in a second angular position, to enable the fluid to pass from the first inlet (6) to the second outlet (7) through the body (2). Said sealing means (3) is also configured so as to ensure a gradual closing of the first inlet (6).

Abstract: Embodiments of the invention provide a control valve assembly and method of fault detection that includes adjusting a valve between an operating position and a fault position in response to various fault conditions. The control valve assembly is adjustable to accommodate fault conditions encountered in a variety of electrochemical deionization systems.

Abstract: A flow passage switching unit includes side-by-side arranged rotary valve parts. The valve part includes a casing, side walls, a peripheral wall, first fluid ports, a second fluid port, a rotary shaft, and a valving element. A flow passage, through which the first fluid ports and the second fluid port selectively communicate, is formed by rotation of the valving element. The unit includes a driving mechanism driving each valving element by its corresponding predetermined rotation angle. The driving mechanism includes one driving source, and a motive power transmission member transmitting rotation motive power of the driving source respectively to the valve parts. Motive power of the driving source is transmitted to each rotary shaft of the valve parts to drive each valving element to a position, which position of the valving element relative to the first and second fluid ports is different from one another among the valve parts.

Abstract: An apparatus for preventing backflow and contamination, and detecting by-pass leaks in a flow control arrangement is disclosed. The apparatus includes a vent line connecting a sweep gas source and a vent. Constant process-inert gas flows from the source through the vent line into the vent. The vent line is connected with the flow control arrangement. Any leakage in the flow control arrangement is channeled to the vent line and swept into the vent along with the sweep gas. As a result, pressure in the flow control arrangement cannot build up and leakage backflow is prevented. A flow switch may be disposed on the vent line for detecting leakage. The sweep gas flow rate is controlled at a constant level that is inadequate to actuate the flow switch and keeps the flow switch ready to actuate by any superimposed leakage. The flow switch detects a leakage when it actuates.

Abstract: Fuel interface modules that can be used in automotive vehicle fuel systems can include a body that defines a fuel channel and a plurality of ports through which fluid communication with the fuel channel can be established. Some modules include a check valve, a shutoff valve, and a coalescing filter assembly that are each coupled with a separate port. The fuel modules can be quickly installed and can eliminate many of the installing materials typically associated with automotive vehicle fuel systems.

Abstract: A tap group comprising a tap body provided with at least one dispensing exit, an operating lever or knob, a regulation member of the parameters of the flow of water to be dispensed (the parameters including the temperature and/or the flow of water and/or the direction of the flow), and a transmission including gears which operatively connect the operating lever or knob to said regulation member of the flow of water. Advantageously, the gears create a gear ratio between the operating lever or knob and a control rod of the regulation member of the parameters of the flow of water, so as to reduce the rotation of the control rod of the regulation member for the same rotation of the operating lever or knob. The tap group also includes a ring-nut provided with at least one indicator and/or a reference index of the parameters of the flow to be dispensed.

Abstract: A ceramic control valve has a valve shell that orderly has a control shaft, an upper ceramic piece, a lower ceramic piece and a valve base connected underneath to avoid the abovementioned components from falling out. The ceramic control valve can change the water output style of the faucet without an additional handle, and the water output can be switched between front portion of the faucet and showerhead to effectively reduce the components of the faucets and simplify the assembly process.

Abstract: A point-of-use valve (POU valve) manifold is provided that allows for multiple precursors to be delivered to a semiconductor processing chamber through a common outlet. The manifold may have a plurality of precursor inlets and a purge gas inlet. The manifold may be configured such that there are zero dead legs in the manifold when the purge gas is routed through the manifold, and may provide mounting location for the POU valves that alternate sides. One or more internal flow path volumes may include elbow features.

Abstract: A ceramic control valve has a valve shell that orderly has a water control unit, an upper ceramic piece, a lower ceramic piece and a valve base connected underneath to avoid the abovementioned components from falling out. The ceramic control valve can change the water output style of the faucet without an additional handle, and the water output can be switched between front and top portions to effectively reduce the components of the faucets and simplify the assembly process.

Abstract: The present invention is one that prevents standard gas from remaining in a standard gas line to prevent a concentration of standard gas from being reduced due to adsorption, modification, or the like, and has: a diluent gas line provided with a diluent gas flow rate controlling mechanism; a standard gas line provided with a standard gas flow rate controlling mechanism; an output gas line joined by the diluent gas line and standard gas line and outputs the standard gas having a predetermined concentration; an exhaust gas line connected to an upstream side of the standard gas flow rate controlling mechanism in the standard gas line and provided with an on/off valve and a flow rate control part; and a control part that, depending on a flow rate of the standard gas flowing through the standard gas line or the type of the standard gas, switches on/off the on/off valve.

Abstract: An ER fluid valve includes a housing and a plurality of parallel flow passages through the housing each defined by spaced electrodes at least one of which is controllable independently of other flow passages electrodes. A controller is configured to selectively establish electrical fields for all of the independently controllable electrodes to close all of the flow passages to ER fluid flowing through the housing. By removing the fields from all of the independently controllable electrodes, all the flow passages are open to the ER fluid flowing through the housing. By establishing fields for select independently controllable electrodes to close their associated flow passages and by leaving other flow passages open, restricted flow of the ER fluid through the housing is accomplished to vary the flow rate through the housing.

Abstract: Provided are gas distribution apparatus with a delivery channel having an inlet end, an outlet end and a plurality of apertures spaced along the length. The inlet end is connectable to an inlet gas source and the outlet end is connectible with a vacuum source. Also provided are gas distribution apparatus with spiral delivery channels, intertwined spiral delivery channels, splitting delivery channels, merging delivery channels and shaped delivery channels in which an inlet end and outlet end are configured for rapid exchange of gas within the delivery channels.

Abstract: A combined fuel and purge air valve for a turbine engine has an onboard residual fuel reservoir to relieve pressure transients in the fuel circuit during purge air mode operation. The fuel reservoir also operates to effectively seal the fuel circuit with fuel present in the valve chamber by venting any purge air that should happen to leak past the primary seals. A 3-way spool valve controls the transition between start-up and sustained fuel operation modes as well as the purge air operation mode. A movable shuttle controls the communication of the fuel circuit with the fuel reservoir and ensures that the fuel reservoir is open in the purge air mode and closed off in the fuel modes. Pilot air activates the shuttle and spool valve and fuel pressure provides biasing forces. Fuel is distributed through an array of outlet ports, and the valve is cooled by an integral coolant jacket.

Abstract: There is provided a gas supply apparatus 10 which does not necessitate installation of a pressure type flow controller for each processing reactor and which enables a compact construction of the flow controller. The gas supply apparatus 10 includes gas supply sources 11a, 11b, gas introduction pipes 13a, 13b, a main gas pipe 15, and branch pipes 21a, 21b. A pressure type flow controller 30 is provided for the main gas pipe 15 and the branch pipes 21a, 21b. The pressure type flow controller 30 includes a pressure detector 17 provided in the main gas pipe 15, and control valves 23a, 23b and orifices 22a, 22b, both provided in the branch pipes 21a, 21b. An arithmetic circuit 40 determines a flow rate Qc based on a detected pressure P1 from the pressure detector 17, and an arithmetic control circuit 58 controls the control valves 23a, 23b based on a set flow rate signal Qs from a flow rate setting circuit 52 and on the flow rate Qc from the arithmetic circuit 40.