Electromagnetic Or Electric Control (e.g., Digital Control, Bistable Electro Control, Etc.) Patents (Class 137/599.07)
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Patent number: 11906985Abstract: A valve assembly includes a proportional valve having an opening cross section that can be continuously varied by an actuator; a sensor for sensing the valve output pressure; a digital regulating device; and a switching valve disposed parallel to the proportional valve. The opening cross section of the switching valve is smaller than the maximum opening cross section of the proportional valve. The regulating device is programmed (i) to automatically calculate, at runtime, using the currently given valve output pressure and the current position of the actuator, the maximum working pressure achievable at the maximum opening of the proportional valve with the valve, (ii) and to additionally open the switching valve when the computed maximum achievable working pressure falls below a predefinable target working pressure by a definable deviation value.Type: GrantFiled: December 11, 2020Date of Patent: February 20, 2024Assignee: Aventics GmbHInventors: Christian Busch, Stefan Tadje
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Patent number: 10961110Abstract: An electromechanically operated fuel nozzle having continuously adjustable flow rate settings between a closed position and maximum flow. The fuel nozzle includes a fuel dispensing pipe for dispensing fuel; an electromechanical valve device to control a flow of fuel in the fuel dispensing pipe, comprising an inlet pipe and an outlet pipe. The electromechanical valve device comprises at least one continuously variable flow electromechanical valve to control the flow of fuel; an electronic board for operating the at least one continuously variable flow electromechanical valve; and electric accumulator means for electrically powering the at least one variable flow electromechanical valve and the electronic board such that the predetermined portions provide the particular one of the flow rate settings. The electromechanical valve preferably comprises a servomotor controlled ball valve.Type: GrantFiled: August 5, 2016Date of Patent: March 30, 2021Assignee: SHELL OIL COMPANYInventors: William Moyne, Hector Padilla
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Patent number: 10773271Abstract: Embodiments include a sprayer system having dynamic pre-sets to control spray nozzles that each individually operates continuously or under a time-modulated or a frequency-modulated electronic signal control to release the liquid droplets. Collectively, adjacent or near neighboring nozzles are also controlled by time-sequencing through different modes of operation or physical configurations on each spray nozzle. The spray nozzles are mounted on a variety of implements including agricultural or industrial spray booms.Type: GrantFiled: September 3, 2015Date of Patent: September 15, 2020Assignee: Deere & CompanyInventors: Travis G. Funseth, Richard A. Humpal, Stacy L. Bullock
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Patent number: 10739294Abstract: The present disclosure relates to a modular measuring system including a sensor element designed to be inserted into a process connection arranged in a pipe wall or container wall, and a transmitter unit that serves to process and/or transmit electronic and/or electrical signals representing the measured variable and generated by the sensor element, wherein the transmitter unit can be connected mechanically to the process connection by a coupling unit, wherein the coupling unit is arranged on an end region facing the process connection of the transmitter unit, and wherein the coupling unit can be mechanically connected to the process connection and mechanically disconnected from the process connection such that a latching element of the coupling unit arranged inside the coupling unit carries out a relative movement in relation to a counter body that can be connected mechanically to the latching element and that is arranged in the process connection.Type: GrantFiled: July 18, 2018Date of Patent: August 11, 2020Assignee: Endress+Hauser Conducta GmbH+Co. KGInventors: Stefan Robl, Michael Dieterich
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Patent number: 10731568Abstract: A turbine system may include several air lines that extend from a compressor to a turbine, and the air lines may have valves. Additionally, the turbine system may also include several sensors that are coupled to the valves, several actuators that are coupled to the valves, and a controller that can send a command to set a valve position of one of the valves based at least partially on a valve position of another valve.Type: GrantFiled: November 23, 2016Date of Patent: August 4, 2020Assignee: General Electric CompanyInventors: Chad Ernest Findlay, Ampili Kishore Kumar, Sal Albert Leone
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Patent number: 10288191Abstract: A strained bilayer film with reinforcing members is used to open and close gas flow outlets in a microvalve array. The bottom layer of the bilayer film is compressive and the top layer is tensile. Reinforcing members are made from compressive material that accomplishes the dual objectives of reducing potential defects at the interface between the anchor region and the free region of the actuator, and controlling the stresses along the edges of the strained bilayer to avoid curling as the actuator unrolls from its normal coiled configuration in response to an applied voltage. Because of the configuration, the strained bilayer film occupies a minimal amount of space compared to other systems when the valve is opened, and it permits a higher density of microvalves to be utilized. Optional supports are provided over gas flow channel openings to increase the area over which the voltage is applied, increasing electrostatic stability of the actuators in maintaining their unrolled state for a variety of uses.Type: GrantFiled: December 22, 2016Date of Patent: May 14, 2019Assignee: UNIVERSITY OF LOUISVILLE RESEARCH FOUNDATION, INC.Inventors: Shamus McNamara, Joseph Devin Schneider
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Patent number: 10202035Abstract: A fuel shutoff valve is attached to the upper portion of a fuel tank and shuts off the communication between the inside of the fuel tank and a canister by opening and closing a vapor passage for communicating between the fuel tank and the canister. The fuel shutoff valve is configured with a first valve mechanism having a coil disposed on the inner periphery of a cylindrical valve chamber and a movable core, which enables to communicate between the fuel tank and the canister by lowering the level of the movable core, and a second valve mechanism which enables to communicate between the fuel tank and the outside thereof by shifting the level of the valve body which is disposed inside the movable core due to the pressure from the inside of the fuel tank or the outside thereof.Type: GrantFiled: September 13, 2016Date of Patent: February 12, 2019Assignee: HONDA MOTOR CO., LTD.Inventors: Naoki Ogiwara, Yusuke Sakaguchi, Hiroaki Watanabe
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Patent number: 9884330Abstract: An individual spray nozzle contains two or more valves that are actuated by time or frequency modulated signals such as pulse width modulated (PWM) signals. The PWM signals are interleaved to open and close each of the respective valves that enable fluid to flow from an input to a combined output. The opening and closing positions of two or more different valves are interleaved to increase the range of performance, such as to increase the frequency of fluid flow from the input to the combined output. Additional embodiments are described.Type: GrantFiled: October 3, 2014Date of Patent: February 6, 2018Assignee: DEERE & COMPANYInventors: Richard A. Humpal, Travis G. Funseth
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Patent number: 9859047Abstract: An electromagnetic solenoid actuator includes a ferromagnetic core body defining an axis, a winding supported by the core body, and a ferromagnetic plunger body translatable within the core body along the axis. The core body has a fixed height gap that extends about the axis and the plunger body and core body define between one another a variable height gap that extends about the axis. A first flux bypass extends through the fixed height gap and a second flux bypass extends through the variable height gap that cooperate with one another to correct the attraction force between the plunger and core body as height of the variable height gap changes.Type: GrantFiled: August 10, 2015Date of Patent: January 2, 2018Assignee: Hamilton Sundstrand CorporationInventors: Jacek F. Gieras, Gregory I. Rozman
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Patent number: 9631521Abstract: Method for operating a combined-cycle power plant is provided. The plant includes at least a gas turbine and at least a steam power generation system. The plant activates at least one electric generator connectable to an electric grid, wherein the gas turbine includes a compressor. The steam power generation system includes a steam turbine, a heat recovery steam generator and a bypass line. The method is such that the gas turbine de-loads to a condition, where the compressor operates at its nominal speed. The method is such that the steam turbine de-loads in coordination with the de-load of the gas turbine, to a condition where the total load exported by the plant to the grid is substantially equal to zero, being both the gas turbine and the steam power generation system connected.Type: GrantFiled: March 6, 2014Date of Patent: April 25, 2017Assignee: GENERAL ELECTRIC TECHNOLOGY GMBHInventors: Hamid Olia, Jan Schlesier, Michael Breitfeld, Philipp Brunner
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Patent number: 9513040Abstract: An electronic expansion valve includes a valve body, a valve seat, and a stepping motor. A valve portion is formed at a forward end of the valve body. The valve seat forms a variable throttle portion between the valve portion and the valve seat by allowing the valve body to move in an axial direction. The stepping motor moves the valve portion in accordance with a pulse number. At least one part of a side surface of the valve portion is shaped so that an opening degree ratio becomes constant.Type: GrantFiled: November 13, 2012Date of Patent: December 6, 2016Assignee: DAIKIN INDUSTRIES, LTD.Inventors: Shigetaka Wakisaka, Masahiro Oka
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Patent number: 9157461Abstract: A digital hydraulics valve includes a plurality of digitally switchable individual valves, which are connected in parallel with respect to a load, and at least one equalizing valve for generating intermediate values between the opening cross-section stages that can be implemented by the digitally switchable individual valves. The equalizing valve is a poppet valve, which provides a partial opening cross-section smaller than the nominal opening cross-section thereof by actuation using a time switching pattern. The time switching pattern is preferably based on the principle of a pulse width modulation. The equalizing valve is further preferably a valve selected from the plurality of individual valves of the digital hydraulics valve.Type: GrantFiled: November 4, 2010Date of Patent: October 13, 2015Assignee: Robert Bosch GmbHInventors: Hermann Mehling, Daniel Weiler
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Patent number: 9010369Abstract: A pressure type flow rate control apparatus is provided wherein flow rate of fluid passing through an orifice is computed as Qc=KP1 (where K is a proportionality constant) or as Qc=KP2m (P1?P2)n (where K is a proportionality constant, m and n constants) by using orifice upstream side pressure P1 and/or orifice downstream side pressure P2. A fluid passage between the downstream side of a control valve and a fluid supply pipe of the pressure type flow rate control apparatus comprises at least 2 fluid passages in parallel, and orifices having different flow rate characteristics are provided for each of these fluid passages, wherein fluid in a small flow quantity area flows to one orifice for flow control of fluid in the small flow quantity area, while fluid in a large flow quantity area flows to the other orifice for flow control of fluid in the large flow quantity area.Type: GrantFiled: February 8, 2013Date of Patent: April 21, 2015Assignees: Fujikin Incorporated, National University Corporation Tohoku University, Tokyo Electron Ltd.Inventors: Tadahiro Ohmi, Masahito Saito, Shoichi Hino, Tsuyoshi Shimazu, Kazuyuki Miura, Kouji Nishino, Masaaki Nagase, Katsuyuki Sugita, Kaoru Hirata, Ryousuke Dohi, Takashi Hirose, Tsutomu Shinohara, Nobukazu Ikeda, Tomokazu Imai, Toshihide Yoshida, Hisashi Tanaka
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Patent number: 8997784Abstract: In various embodiments, a flow selector of a fluid flow control system may be used to select a flow rate of a fluid. When the system is in an electronic mode, an encoder may electronically encode the fluid flow selection. A controller may receive the electronically encoded flow selection and transmit a corresponding control signal to an electronic valve to allow the fluid to flow at the selected flow rate. An engagement device, such as a clutch, may disengage the flow selector from a mechanical valve when the fluid flow control system enters a manual mode. When the system is in a manual mode, the engagement device may engage the flow selector with the mechanical valve, allowing the flow selector to directly control the flow rate of the fluid through the mechanical valve. Applications to gases and anesthesia delivery are disclosed herein. Various alternative components and embodiments are described herein.Type: GrantFiled: November 14, 2012Date of Patent: April 7, 2015Assignee: Shenzhen Mindray Bio-Medical Electronics Co. Ltd.Inventors: Richard G. Cipolli, David Gibson
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Patent number: 8973606Abstract: The present invention is one that prevents standard gas from remaining in a standard gas line to prevent a concentration of standard gas from being reduced due to adsorption, modification, or the like, and has: a diluent gas line provided with a diluent gas flow rate controlling mechanism; a standard gas line provided with a standard gas flow rate controlling mechanism; an output gas line joined by the diluent gas line and standard gas line and outputs the standard gas having a predetermined concentration; an exhaust gas line connected to an upstream side of the standard gas flow rate controlling mechanism in the standard gas line and provided with an on/off valve and a flow rate control part; and a control part that, depending on a flow rate of the standard gas flowing through the standard gas line or the type of the standard gas, switches on/off the on/off valve.Type: GrantFiled: December 15, 2011Date of Patent: March 10, 2015Assignee: HORIBA STEC, Co., Ltd.Inventors: Yuichiro Hashimoto, Junichi Miyaji
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Patent number: 8863773Abstract: A fluid metering device may meter the flow of fluid. The device may have a main chamber and a piston configured and oriented to reciprocate within the main chamber. The piston may be configured and oriented to define a first and a second sub-chamber whose volumes vary inversely as a function of the position of the piston during its reciprocation. The fluid metering device may have a first inlet valve configured to controllably regulate the flow of fluid into the first sub-chamber, a first outlet valve configured to controllably regulate the flow of fluid out of the first sub-chamber, a second inlet valve configured to controllably regulate the flow of fluid into the second sub-chamber, and a second outlet valve configured to controllably regulate the flow of fluid out of the second sub-chamber.Type: GrantFiled: November 3, 2009Date of Patent: October 21, 2014Assignee: University of Southern CaliforniaInventor: Behrokh Khoshnevis
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Patent number: 8807167Abstract: A method for regulating water output is presented. The method includes receiving an input at a plurality of sensors, transmitting a signal to a control unit in response to receiving the input, controlling, via the control unit, a first plurality of solenoid valves to regulate hot water controlling, via the control unit, a second plurality of solenoid valves to regulate cold water in response to the signal, creating a water mixture comprising at least hot water output from at least one of the first plurality of solenoid valves or cold water output from at least one of the second plurality of solenoid valves, and outputting the water mixture to a water output unit.Type: GrantFiled: April 11, 2012Date of Patent: August 19, 2014Assignee: Muirsis IncorporatedInventor: Su Yong Song
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Patent number: 8783027Abstract: A pressure regulation circuit delivers pressurized fluid into a generator. The circuit includes pressure regulator structure and a primary valve. The pressure regulator structure outputs pressurized fluid at a predetermined output pressure that is greater than a desired operating pressure of the generator and less than a predetermined upper alarm pressure. The primary valve is downstream from the pressure regulator structure and is selectively opened and closed by a controller based on the pressure within the generator. The controller opens the primary valve to allow the pressurized fluid outputted from the pressure regulator structure to flow into the generator upon the pressure within the generator being at or below a predetermined lower limit. The controller closes the primary valve to prevent the pressurized fluid outputted from the pressure regulator structure from flowing into the generator upon the pressure within the generator being at or above a predetermined upper limit.Type: GrantFiled: September 18, 2009Date of Patent: July 22, 2014Assignee: Siemens Energy, Inc.Inventor: Owen R. Snuttjer
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Patent number: 8651135Abstract: According to one embodiment, a flow rate adjusting unit is disposed on a gas passageway and includes a valve that adjusts the flow rate of a gas and an actuator that controls the displacement amount of the valve. A displacement amount storage unit stores displacement amount information in which a displacement amount of the valve, used when a gas flows into the gas passageway at a flow rate defined according to a process procedure before performing the process procedure, is obtained in advance for each process procedure. A setting circuit acquires the displacement amount corresponding to the process procedure from the displacement amount storage unit, and controls the actuator on the basis of the acquired displacement amount.Type: GrantFiled: June 30, 2011Date of Patent: February 18, 2014Assignee: Kabushiki Kaisha ToshibaInventors: Hideo Eto, Makoto Saito, Nobuyasu Nishiyama
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Patent number: 8622073Abstract: The liquid flow rate control apparatus includes a first flow rate control unit which includes a first flow rate control valve for a small flow rate with a first controlled flow rate range, and a second flow rate control unit which includes a second flow rate control valve for a large flow rate with a second controlled flow rate range. In particular, an overlapped range is present between the first and second controlled flow rate ranges and a liquid flows on either any one or both of the first and second flow rate control units depending on variation of a required value of a total rate. The flow rate on any one of the first and second flow rate control units is maintained and the flow rate on the other one increases while increasing the total flow rate of the liquids.Type: GrantFiled: October 26, 2011Date of Patent: January 7, 2014Assignee: Tokyo Electron LimitedInventor: Keigo Satake
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Patent number: 8555920Abstract: A flow rate ratio variable type fluid supply apparatus includes a flow rate control system supplying gas of flow rate Q that is diverted to first flow diverting pipe passage and second flow diverting pipe passage with prescribed flow rates Q1/Q0 so gas is supplied to a chamber, and a first orifice having opening area S1 is installed on the first flow diverting passage, and the second flow diverting passage is connected to a plurality of branch pipe passages connected in parallel, orifices having opening area installed on the branch passages, and open/close valves installed on all, or some of, the branch passages so gas is diverted to flow diverting passages with flow rate ratio Q1/Q0 equivalent to the ratio of the first orifice and the total opening area S2o of flow passable orifices of the second flow diverting passage by regulating total opening area of the flow passable orifices.Type: GrantFiled: June 13, 2007Date of Patent: October 15, 2013Assignee: Fujikin IncorporatedInventors: Kaoru Hirata, Yohei Sawada, Ryousuke Dohi, Kouji Nishino, Nobukazu Ikeda
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Patent number: 8528314Abstract: A combined cycle power plant startup system is provided. The system includes a steam turbine, a HRSG, a condenser, and a bypass system. The steam turbine may include a turbine section. The HRSG may be operably connected to the steam turbine for providing steam to the steam turbine. The HRSG may include a reheater. The bypass system may be configured to adjust the steam pressure downstream of the reheater by routing steam downstream of the reheater to the condenser. The bypass system may include at least one bypass line, at least one control valve operably connected to the at least one bypass line, a pressure gauge configured to monitor the steam pressure downstream of the reheater, and a controller configured to communicate with the pressure gauge and operate the at least one control valve.Type: GrantFiled: February 2, 2010Date of Patent: September 10, 2013Assignee: General Electric CompanyInventors: Leslie Yung-Min Tong, Diego Fernando Rancruel, Tailai Hu, Joel Donnell Holt
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Patent number: 8454126Abstract: A print head includes a fluid cavity and nozzle in fluid communication with the fluid cavity. A stopper is positioned adjacent the nozzle and adapted to control flow of fluid through the nozzle. An arm supports the stopper and is configured to pivotally move the stopper with respect to the nozzle. An electromagnet is positioned adjacent the arm and configured to move the arm toward the electromagnet to open the nozzle.Type: GrantFiled: December 3, 2010Date of Patent: June 4, 2013Inventor: Martin McNestry
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Publication number: 20130042839Abstract: A tubular flow path 18 of a first electromagnetic valve 10 and a tubular flow path 28 of a second electromagnetic valve 20 are inserted into a chamber 5 to communicate with a suction port 31 and a discharge port 32 to reduce a pulsating sound. The suction port 31 is arranged between the tubular flow paths 18 and 28 to reduce the air flow resistance.Type: ApplicationFiled: August 25, 2010Publication date: February 21, 2013Applicant: MITSUBISHI ELECTRIC CORPORATIONInventors: Masaji Takahashi, Takayuki Ito
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Patent number: 8327874Abstract: A high integrity protection system (HIPS) for protection of a pipe downstream of a wellhead includes: an inlet connected to the wellhead; outlet connected to the downstream pipe; two sets of two series-connected surface safety valves (SSVs) in fluid communication with the inlet and outlet, the two sets being in parallel fluid flow relation to each other, either one or both of the sets of SSVs operable as a flowpath for fluids entering the inlet and passing through the outlet to the downstream pipe; two vent control valves (VCVs), each connected to piping intermediate one set of series-connected SSVs, the VCVs being in fluid communication with a vent line, whereby, upon opening of a VCV, process pressure between the two SSVs is vented; a signal-generating safety logic solver, in accordance with preprogrammed safety and operational protocols; and pressure sensing transmitters attached to piping upstream of the HIPS outlet.Type: GrantFiled: November 15, 2010Date of Patent: December 11, 2012Assignee: Saudi Arabian Oil CompanyInventor: Patrick S. Flanders
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Patent number: 8051875Abstract: A protection apparatus detects and reduces overpressure in a fluid pipeline. First and second pipeline valves are connected in series along the pipeline and are independently switchable between open and closed positions. A pressure transducer determines the fluid pressure in the pipeline at a point intermediate the first and second pipeline valves. A bypass line has a first end connected to the pipeline between the input end and the first pipeline valve and a second end connected to the pipeline between the first and second pipeline valves. A bypass valve is connected along the bypass line. A vent line is connected to the bypass line between the bypass valve and the second end of the bypass line. A vent valve is connected along the vent line.Type: GrantFiled: May 21, 2007Date of Patent: November 8, 2011Assignee: Vetco Gray Controls LimitedInventor: Jeremy Paul Lawrence Edwards
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Patent number: 7673645Abstract: The multiple antisymmetric optimal (MAO) control algorithm is disclosed for a gas delivery system including a flow ratio controller for dividing a single mass flow into multiple flow lines. In the MAO control algorithm, each flow line is provided with a flow sensor and a valve actively controlled by a SISO feedback controller combined with a linear saturator to achieve the targeted flow ratio set point. For optimal control performance, these SISO controller and linear saturators are substantial identical. It is proved that each valve control command is multiple antisymmetric to the summation of all other valve control commands. Therefore, the MAO control algorithm guarantees that there exists at least one valve at the allowable maximum open position at any moment, which achieves the optimal solution in terms of the maximum total valve conductance for a given set of flow ratio set points.Type: GrantFiled: February 20, 2007Date of Patent: March 9, 2010Assignee: MKS Instruments, Inc.Inventors: Junhua Ding, Kaveh H. Zarkar
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Patent number: 7665305Abstract: A valve assembly is disclosed for modulating the flow of fuel to a fuel nozzle at a high frequency or in a stepped manner to actively control combustion in a gas turbine engine which includes a valve housing defining an inlet portion for receiving fuel from a fuel source at an initial flow rate and an outlet portion for delivering fuel to a fuel nozzle at the initial flow rate or a modulated flow rate depending upon a detected combustion condition, and a mechanism disposed within the valve housing for modulating the flow rate of fuel to the outlet portion in response to a detected combustion condition.Type: GrantFiled: December 29, 2005Date of Patent: February 23, 2010Assignee: Delavan IncInventors: Michael D. Cornwell, Randy C. Baxter, Michael Forst, Jerry L. Goeke
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Patent number: 7426932Abstract: A spray fill device for delivering water to a washing machine is provided. The spray fill device includes a body defining an inlet, an outlet port, a mounting port, and a plurality of outlet apertures in flow communication with the inlet. The spray fill device also includes a first valve coupled to the inlet, the valve configured to control a flow rate of water into the inlet. The spray fill device also includes a pressure relief mechanism coupled to the mounting port, the pressure relief mechanism inhibiting flow through the outlet port when a pressure within the body is less than a predetermined pressure.Type: GrantFiled: September 23, 2005Date of Patent: September 23, 2008Assignee: General Electric CompanyInventor: Mark Zaccone
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Patent number: 7293581Abstract: A latching microregulator for regulating liquid flow on micro-scale levels comprises a substrate having an inlet port and an outlet port, a valve element defining a valve chamber for opening and closing the inlet port, and an actuator assembly for actuating the valve element. The valve chamber is configured to contain a volume of fluid, and the inlet port and the outlet port are in fluid communication with the valve chamber to provide a liquid flow path through the chamber. The actuator assembly comprises a cantilever beam for moving the valve element between an open position and a closed position, an actuator, such as a piezoelectric element, for moving the cantilever beam, and a latch, such as a permanent magnet, for securing the cantilever beam in the closed position. A flow regulation system comprises a plurality of fluid channels of varied flow conductance and a plurality of latching microregulators for selectively blocking or allowing flow through each of the fluid channels.Type: GrantFiled: November 1, 2006Date of Patent: November 13, 2007Assignee: Cytonome, Inc.Inventors: John R. Gilbert, Bernard Bunner, Sebastian Böhm, Manish Deshpande
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Patent number: 7194863Abstract: One embodiment of the invention provides a turbine control system that adjusts the control thresholds of two-position valves, which provide propellant to the turbine, based on turbine load so as to compensate for increased turbine speed overshoot at low load and the increased turbine speed undershoot at high load. These two-position on-off modulated valves are used in a bang-bang (fully open or fully closed) regulation scheme to eliminate or minimize speed droop by using variable speed bounds implemented as a function of load.Type: GrantFiled: September 1, 2004Date of Patent: March 27, 2007Assignee: Honeywell International, Inc.Inventors: Evgeni Ganev, Mike S. Koerner, Chung Y. Liu
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Patent number: 7140384Abstract: A mass flow controller includes a base having a first passage, an inlet portion for introducing fluid into the first passage, an outlet portion for releasing the fluid from the first passage, and a second passage branched from a first upstream portion of the first passage and connected to a second downstream portion of the first passage A mass flow sensor is connected to the first passage between the inlet portion of the base and the first portion of the first passage; A first valve is disposed in-line with the first passage between the first and second portions. The first valve controls the mass flow of the fluid passing through the first passage;. A second valve is disposed in-line with the second passage to opens/close the second passage. A valve controller compares the mass flow measured by the mass flow sensor to a standard flow, and then positions the first valve such that the measured mass flow corresponds to the standard flow.Type: GrantFiled: June 18, 2004Date of Patent: November 28, 2006Assignee: Samsung Electronics Co., Ltd.Inventors: Sung-Ho Kang, Seog-Min Lee, Sung-Wook Jung, Yong-Suk Kim
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Patent number: 6981518Abstract: A latching microregulator for regulating liquid flow on micro-scale levels comprises a substrate having an inlet port and an outlet port, a valve element defining a valve chamber for opening and closing the inlet port, and an actuator assembly for actuating the valve element. The valve chamber is configured to contain a volume of fluid, and the inlet port and the outlet port are in fluid communication with the valve chamber to provide a liquid flow path through the chamber. The actuator assembly comprises a cantilever beam for moving the valve element between an open position and a closed position, an actuator, such as a piezoelectric element, for moving the cantilever beam, and a latch, such as a permanent magnet, for securing the cantilever beam in the closed position. A flow regulation system comprises a plurality of fluid channels of varied flow conductance and a plurality of latching microregulators for selectively blocking or allowing flow through each of the fluid channels.Type: GrantFiled: June 24, 2002Date of Patent: January 3, 2006Assignee: Cytonome, Inc.Inventors: John Richard Gilbert, Bernard Bunner, Sebastian Böhm, Manish Deshpande
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Patent number: 6705345Abstract: An array of micro valves, and the process for its formation, used for control of a fluid flow and having a substrate with a plurality of apertures for directing the fluid to flow from one side to another. A micromechanically formed fluid seal surrounds each aperture along with a valve diaphragm associated with each seal and micromechanically formed to selectively open and close the aperture by making contact with the seal. Electrical contact is made to the valve diaphragms and substrate for selective valve closure or opening. A conduit leads a fluid flow to the underside of the array and a further conduit leads it away from the array after passing through the selectively opened diaphragms.Type: GrantFiled: November 8, 2000Date of Patent: March 16, 2004Assignee: The Trustees of Boston UniversityInventor: Thomas Bifano
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Publication number: 20030172975Abstract: A latching microregulator for regulating liquid flow on micro-scale levels comprises a substrate having an inlet port and an outlet port, a valve element defining a valve chamber for opening and closing the inlet port, and an actuator assembly for actuating the valve element. The valve chamber is configured to contain a volume of fluid, and the inlet port and the outlet port are in fluid communication with the valve chamber to provide a liquid flow path through the chamber. The actuator assembly comprises a cantilever beam for moving the valve element between an open position and a closed position, an actuator, such as a piezoelectric element, for moving the cantilever beam, and a latch, such as a permanent magnet, for securing the cantilever beam in the closed position. A flow regulation system comprises a plurality of fluid channels of varied flow conductance and a plurality of latching microregulators for selectively blocking or allowing flow through each of the fluid channels.Type: ApplicationFiled: June 24, 2002Publication date: September 18, 2003Applicant: Coventor, Inc.Inventors: John Richard Gilbert, Bernard Bunner, Sebastian Bohm, Manish Deshpande
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Patent number: 6534003Abstract: A valve is provided which includes a valve body, a first valve member, and a second valve member. The valve body has a first flow passage formed therethrough and a second flow passage formed therein. The second flow passage has a smaller cross-sectional area than the first flow passage so that the valve can be used interchangeable between systems requiring different flow rates through the valve, and so that flow through the valve can be more accurately controlled than through the first flow passage alone.Type: GrantFiled: April 2, 1999Date of Patent: March 18, 2003Assignee: Ethicon, Inc.Inventor: Nick N. Nguyen
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Patent number: 6360762Abstract: An apparatus for feeding gases for use in semiconductor manufacturing reduced in size and manufacturing costs and facilitating maintenance and operation of the gas supply system. The apparatus comprises a plurality of gas supply sources, gas source valves provided on the gas lead-out pipes from the respective gas supply sources, flow rate controllers provided on main gas feed pipes into which the lead-out pipes converge, and gas supply valves provided on the outlet side of the flow rate controllers.Type: GrantFiled: January 22, 2001Date of Patent: March 26, 2002Assignees: Fujikin Incorporated, Tokyo Electron Ltd.Inventors: Hirofumi Kitayama, Yoichi Kurono, Nobukazu Ikeda, Naoya Masuda
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Patent number: 6240944Abstract: A device for controlling the proportional pressure or flow of fluids over a range of source pressure. An addressable array is interposed between a source pressure and an exit pressure chamber. The array comprises a plurality of valves, the total open area of which define the opening between the source pressure and the exit pressure. Also provided is an actuator for separately actuating each valve of the array between an open and a closed condition, whereby the total number of open valves determines the flow between the source pressure and the exit pressure. The preferred valves are electrostatically actuated valves including upper and lower electrodes addressable by a conductor, and are fabricated monolithically on a single substrate. The array is formed so that actuation actuates a number of valves ranging from one valve to all the valves in the array. The device may be used to control flow between the source pressure and the exit pressure chamber.Type: GrantFiled: September 23, 1999Date of Patent: June 5, 2001Assignee: Honeywell International Inc.Inventors: Thomas R. Ohnstein, Eugen I. Cabuz
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Patent number: 6234204Abstract: A flow control valve has a supply line connection, and at least one discharge line connection, and is characterized by at least one fine-control valve whose flow rate is continuously or semicontinuously variable and at least one two-position valve having a minimum flow rate in one stable position and a maximum flow rate in another stable position. The inlet of the or each tow-position valve and the or each fine-control valve is in fluid communication with the supply line connection, and the outlet of the or each two-position valve and the or each fine-control valve is in fluid communication with the or each discharge line connection. In accordance with a further elaboration, the flow control valve may comprise a series of two-position valves, with the maximum flow rate of the successive two-position valves in the series doubling in each case, and the minimum flow rate of each two-position valve being zero.Type: GrantFiled: July 6, 1999Date of Patent: May 22, 2001Inventor: Adrianus Martinus van den Wildenberg