Abstract: The present invention provides a seal ring structure, which comprises a seal ring member. The seal ring member includes a first ring opening on one side and a second ring opening on the other. A periphery of the first ring opening includes a plurality of leak grooves. When the seal ring member and the valve ball squeeze each other, the plurality of leak grooves can reduce the torque required to rotate the valve ball. A leak-groove length of the plurality of leak grooves is smaller than a seal-ring-member length of the seal ring member. The plurality of leak grooves do not penetrate the seal ring member for avoiding leakage of fluid.

Abstract: In one aspect, an apparatus includes a chamber body, a blocker plate for delivering process gases into a gas mixing volume, and a face plate having holes through which the mixed gas is distributed to a substrate. In another aspect, the face plate may include a first region with a recess relative to a second region. In another aspect, the blocker plate may include a plurality of regions, each region having different hole patterns/geometries and/or flow profiles. In another aspect, the apparatus may include a radiation shield disposed below a bottom of the substrate support. A shaft or stem of the substrate support includes holes at an upper end thereof near the substrate support.

Abstract: Provided is a linear solenoid valve having at least one notch that opens on an end surface of the land of the spool on the drain chamber side and is formed on an outer peripheral surface of the land. In response to movement of the spool, a state is formed in which the end surface of the land on the drain chamber side is located inside the communication chamber and the output chamber and the drain chamber communicate with each other via the notch and the communication chamber, and a state is formed in which the end surface of the land on the drain chamber side is located inside the output chamber and the output chamber and the drain chamber communicate with each other via the communication chamber.

Abstract: A heat exchanger valve includes a housing (2) having an inlet, an outlet a valve seat (5) on a valve seat member (24) between inlet and outlet, a valve element cooperating with the valve seat (5) and having a valve element axis, and presetting mechanism having a bushing (9) which is rotatable around the valve element axis and has an opening arrangement cooperating with a counter passage in the housing (2), wherein in the region of the opening arrangement the bushing (9) has a conical form cooperating with a conical counter face (13) and a distance is provided between the bushing (9) and the valve seat member (24). Such a heat exchanger valve should allow a precise pre-setting over a large range. To this end the bushing (9) has at least two notches (14) in an edge (10) facing the valve element member (24), each of the notches (14) forming an opening (25).

Abstract: A fluid system includes a ratio controller. The ratio controller includes a housing, a nozzle, and a diffuser. The housing defines a mixing chamber, a first inlet positioned at a first end of the mixing chamber, an outlet positioned at an opposing second end of the mixing chamber, and a second inlet positioned at a location around a periphery of the mixing chamber between the first inlet and the outlet. The first fluid is configured to receive a first fluid input. The second inlet is configured to receive a second fluid input. The nozzle includes a nozzle inlet positioned proximate the first inlet and a nozzle outlet positioned within the mixing chamber. The diffuser extends from the outlet and outward from the housing. The diffuser includes a diffuser inlet positioned within the mixing chamber.

Abstract: A proportional valve is provided that comprises an input port (3) and an output port (5), with a diaphragm (19) therebetween. A diaphragm plate (21) with a pilot orifice (31) formed therethrough is mounted to the diaphragm (19). The valve has a solenoid (7) comprising an armature (15) and a field winding (17), with the armature being movable in an opening direction in response to a magnetic field generated by the field winding. A spring assembly (13) is arranged to provide a biassing force to the armature (15) in its closing direction. In its closed position, the diaphragm plate (21) sits in a main orifice (20) between the input and output ports to block flow of fluid therebetween, with the armature (15) blocking the pilot orifice (31). Opening movement of the armature (15) opens the pilot orifice (31) to allow fluid to flow therethrough, in turn allowing the diaphragm plate (21) to move out of the main orifice (20) to create a gap allowing flow of fluid from the input port (3) to the output port (5).

Abstract: A surface treatment apparatus and a surface treatment system having the same are disclosed. The surface treatment apparatus includes a process chamber in which the surface treatment process is conducted, a plasma generator for generating process radicals as a plasma state for the surface treatment process, the plasma generator being positioned outside of the process chamber and connected to the process chamber by a supply duct, a heat exchanger arranged on the supply duct and cooling down temperature of the process radicals passing through the supply duct and a flow controller controlling the process radicals to flow out of the process chamber. The flow controller is connected to a discharge duct through which the process radicals are discharged outside the process chamber. The plasma surface treatment process is conducted to the package structure having minute mounting gap without the damages to the IC chip and the board.

Abstract: A flow regulator for regulating a flow rate of water within at least a section of a water system, such as an irrigation system, includes a base member and piston member. The piston member is movable relative to the base member and includes at least one notch through which water can flow when passing through the flow regulator. Movement of the piston member towards and away from the base member, respectively, decreases and increases an area of the notch through which water can flow. An orifice member detachably coupled to the piston member and having an orifice member aperture through which all water flowing through the flow regulator must pass limits the cross-sectional area of an interior water passage within the piston member.

Abstract: A substrate processing system for selectively etching a substrate includes a first chamber and a second chamber. A first gas delivery system supplies an inert gas species to the first chamber. A plasma generating system generates plasma including ions and metastable species in the first chamber. A gas distribution device removes the ions from the plasma, blocks ultraviolet (UV) light generated by the plasma and delivers the metastable species to the second chamber. A substrate support is arranged below the gas distribution device to support the substrate. A second gas delivery system delivers a reactive gas species to one of the gas distribution device or a volume located below the gas distribution device. The metastable species transfer energy to the reactive gas species to selectively etch one exposed material of the substrate more than at least one other exposed material of the substrate.

Abstract: A control valve a body having a fluid inlet and a fluid outlet and a valve seat between the fluid inlet and the fluid outlet. A valve plug is positioned within the body and movable between a closed position, in which the valve plug sealingly engages the valve seat, and an open position, in which the valve plug is spaced away from the valve seat. A cage is disposed within the body adjacent the valve seat. The cage includes a cage wall having a throttling inlet and a throttling outlet, which are connected by a throttling passageway. The throttling passageway has a radial direction, an axial direction, and an angular direction between the throttling inlet and the throttling outlet. The passageway includes a plurality of vena contracta and a plurality of pressure recovery chambers, which form a plurality of pressure reducing stages.

Abstract: A fluid flow control device include a valve body including an inlet, an outlet, and a passageway extending between the inlet and the outlet. A valve trim is at least partially disposed in the passageway of the valve body. The valve trim includes a restrictor having a wall and a plurality of passages extending through the wall. A diffuser is coupled to the restrictor and including a porous body. The porous body is adjacent to the plurality of passages of the restrictor.

Abstract: A fluid control valve includes a housing defining a fluid inlet and a fluid outlet. A valve seat is coupled to the housing and is positioned between the inlet and the outlet. The valve seat includes an end surface, seating surface extending from the end surface toward the seat axis, and a groove surface extends from the seating surface and defines a groove extending around the seat axis. The valve seat further includes an inner surface defining a central bore extending along the seat axis. A spindle is disposed within the housing and is reciprocally moveable between closed and open positions within the central bore of the valve seat. The spindle defines a longitudinal axis and includes an outer surface and a plurality of flow passages formed in the outer surface to prescribed lengths and extending in generally parallel relation to the axis of the spindle.

Abstract: A clean room and a method for regulating an airflow of the clean room. The clean room includes: a plurality of process spaces in communication with one another, and a fan filter unit. The fan filter units is installed at a top of each one of the plurality of process spaces, and a bottom of each of the plurality of process spaces is provided with a ventilation passage. The clean room further includes: an airflow regulation device, configured to regulate an airflow in each of the process spaces; the airflow regulation device is installed inside each of the plurality of process spaces, and is arranged downstream of the respective fan filter unit.

Abstract: A flow rate trimming device is described comprising a body 12 defining a plurality of convoluted flow passages 22 extending between a first surface 16a of the body and a second surface 16b of the body 12, wherein at the first surface 16a each flow passage 22 defines an opening 24 having a lower edge and an upper edge, at least part of the lower edge of a first one of the openings 24 being at substantially the same level or lower than at least part of the upper edge of a second one of the openings 24, at least part of the upper edge of the first one of the openings 24 being higher than at least part of the upper edge of the second one of the openings 24.

Abstract: A modular damper system is configured for installation in a ductwork of a building that supplies conditioned air through a register vent of the building and includes a damper unit, a control module and a power module. The damper unit is mountable upstream of the register vent and includes a damper that is movable between a closed position and an open position. The control module includes a controller that provides control commands to the damper unit and includes a housing that is configured to be secured to the ductwork at a position between the register vent and the damper unit. A power module is electrically coupled to the control module to provide power to the control module and includes a housing that is configured to be secured to the ductwork at a position between the register vent and the damper unit.

Abstract: A proportional hydraulic valve has a valve housing, an actuating device and a valve piston axially movable in a piston chamber of the valve housing. The valve housing has at least one pressure connection and at least one connection port. The valve piston blocks a flow path between the pressure connection and the connection port or releases it proportionally by moving the valve piston proportionally to an actuating force generated by the actuating device between a closed position and an open position. The valve piston has a first and a second spool area with a circumferential recess in the axial direction after the first and before the second spool area. The recess together with the piston chamber forms a pressure chamber and the pressure connection opens into the pressure chamber. A first diameter of the first spool area is larger than a second diameter of the second spool area.

Abstract: Methods, apparatus, systems and articles of manufacture for valve trim apparatus for use with control valves are disclosed. An example valve trim apparatus for use with a fluid valve includes a cage positioned in a fluid flow passageway of a valve body, the cage including a primary valve seat and a secondary valve seat. The valve trim apparatus includes a valve plug slidably positioned within the cage, the valve plug including a primary sealing surface to sealingly engage the primary valve seat and a secondary sealing surface to sealingly engage the secondary valve seat, the primary sealing surface adjacent to a first end of the valve plug and the secondary sealing surface spaced away from the primary sealing surface along a longitudinal axis of the valve plug toward a second end of the valve plug.

Abstract: A flow control valve apparatus is provided in which a main valve adjusts the flow rate of cooling water by operating a plurality of ports and a sub-valve that operates with the main valve adjusts the flow rates of the cooling water circulating through a cylinder block and a cylinder head. The flow rate of the cooling water is variously adjusted based on the operation conditions of a vehicle.

Abstract: A device includes a regulating piston (12) guided longitudinally movably in a housing (10) and interacting with a control edge (56), at a pressure supply port (P) that supplies a utility port (A) in regulating positions of the regulating piston (12) with fluid. The pressure can be preset via a fluid connection, pulling the regulating piston towards a closed position blocking this fluid connection due to occurring flow forces. The regulating piston (12) has a change of shape (60) from its general outer basic shape in the area of the control edge (56) of the housing (10) for a flow force compensation. A flow contact surface for fluid is provided causing a compensating force acting against the flow force to be introduced into the regulating piston (12), which flow force pulls the regulating piston (12) into an open position opposite from the blocked position.

Abstract: A damper assembly is configured for placement within a duct of a ductwork system that supplies conditioned air through a register boot to a register vent. The damper assembly includes a damper that is configured to articulate from a deployment configuration, which facilitates advancement of the damper through the register boot and into the duct, to an operational configuration, in which the damper is positioned within the duct and able to selectively control how much conditioned air being supplied through the duct is permitted to pass by the damper and exit the register vent. The damper assembly includes an elongated deployment member that extends from the damper and is configured to facilitate advancement of the damper through the register boot and into the duct.

Abstract: Fluid flow control devices comprise a cylindrical body extending along a longitudinal axis and having a sidewall. The cylindrical body has a first channel extending longitudinally along the sidewall and a second channel extending longitudinally along the sidewall. At least a portion of one of the at least one first channel and the at least one second channel extends longitudinally at an oblique angle with respect to the longitudinal axis to form a pattern of channels for improving the flow characteristics of a fluid through the channels.

Abstract: The present disclosure describes an exemplary etch process in a reactor that includes a shower head and an electrostatic chuck configured to receive a radio frequency (RF) power. The shower head includes a top plate and a bottom plate with one or more gas channels that receive incoming gases. The method can include (i) rotating the top plate or the bottom plate of the shower head to a first position to allow a gas to flow through the shower head; (ii) performing a surface modification cycle that includes: applying a negative direct current (DC) bias voltage to the shower head, applying an RF power signal to the wafer chuck; and (iii) performing an etching cycle that includes: removing the negative DC bias voltage from the shower head and lowering the RF power signal applied to the wafer chuck.

Abstract: A cage for a fluid valve. The cage includes a first cage ring, a second cage ring, and a lattice structure disposed between the first cage ring and the second cage ring. The lattice structure defines a plurality of interconnected flow paths between an internal surface of the lattice structure and an external surface of the lattice structure. The lattice structure has a non-uniform density.

Abstract: A control valve trim assembly has a body having an annular first section and a longitudinally adjacent annular second section and defines an inner surface and an outer surface. A plurality of first openings are formed in the inner surface of the first section of the body and a plurality of second openings are formed in the outer surface of the first section of the body. Each of the first openings is in fluid communication with a corresponding second opening via a fluid passage formed through the body, which passes through the first section and the second section and each of the fluid passages has at least one radially extending portion and at least one longitudinally extending portion.

Abstract: A valve device is provided. In the valve device, a valve element is rotated about a support shaft, based on rotation of a valve element drive member to switch a through hole that communicates with an outlet formed in a valve seat to adjust a flow rate. The through hole opens in a bottom surface of a flow channel securing groove formed in the valve element. The flow channel securing groove has a long hole shape in which a width in a first direction being a moving direction of the valve element, is smaller than a width in a second direction orthogonal to the first direction. Thus, a region overlapping with the outlet is large as compared to a case where a perfect circular flow channel securing groove is formed.

Abstract: A liquid material discharge device and method capable of remedying the problem of liquid leakage caused by a closing failure that may occur in a negative pressure environment. The liquid material discharge device is used in a negative pressure space, and includes a storage container, a compressed-gas supply source pressurizing the storage container, a nozzle having a discharge flow path, a reciprocating valve rod, an actuator driving the valve rod, a valve seat having a communication hole that is communicated with the discharge flow path, and a discharge control device controlling the actuator to open and close the communication hole by a tip of the valve rod. The device can further include a resin film disposed at a lower end of the valve rod, or a resin film disposed on an upper surface of the valve seat and having a through-hole communicating with the communication hole.

Abstract: Rotary valves are adapted to replace traditional slide valves in fluid catalytic cracking units (FCCUs) such as regenerated catalyst valves, spent catalyst valves, cooled catalyst valves, and recirculation catalyst valves. The rotary valves as discussed herein are significantly more compact than a slide valve having a similar flow capacity. The rotary valve is better adapted to provide flow control or throttling than slide valves are. Flow control or throttling occurs with greater response and precision in response to control inputs and rotation. In addition to the size reduction achieved with the rotary valve, the required controls and/or hydraulic fluid necessary to achieve flow changes are significantly reduced, further saving costs for the valve, as hydraulic power units are not required. The omission of a hydraulic power unit also reduces the size of the valve and/or its accompanying structures within the FCCU.

Abstract: An electro hydraulic servo valve and a method of controlling pressure therein includes a first stage unit including a moveable direct drive valve, a second stage unit including a centering spring and a second stage spool valve that is fluidly connected to the moveable direct drive valve, and at least one pressure feedback fluid line fluidly connected to the first stage unit. The moveable direct drive valve selectively supplies fluid pressure to the second stage unit. Motion of the second stage unit is arrested using the centering spring and motion of the first stage unit is arrested when pressure is fed back to the first stage unit. A supply pressure or a return pressure is metered using the pressure feedback fluid line.

Abstract: Valve trim apparatus for use with fluid valves are disclosed. An example apparatus includes a cage to be positioned in a fluid flow passageway of a valve body. The cage having a first end and a second end opposite the first end. The cage including columns extending between the first end and the second end at an angle relative to a primary fluid flow path of the cage. Each of the columns includes fluid flow passageways extending through the column from an outer peripheral surface of the column to an interior surface of the column. The columns are radially spaced about a circumference of the cage body to define fluid flow passageways between the columns.

Abstract: A critical state is assumed in which a position of one end of the opening of the input port in the axial direction and a position of the other end of the groove in the axial direction accord with each other with respect to the axial direction. In the critical state, when a straight line is extended in the axial direction as well as radially outward of the spool without changing a direction of the straight line in a circumferential direction of the spool from one end of the groove bottom in the axial direction with the same inclination as the inclination of the groove bottom at the one end of the groove in the axial direction relative to the axial direction, the straight line passes through the opening of the output port to contact a wall surface of the output port.

Abstract: Provided is a substrate treating apparatus using a process gas and an adjustment plate used thereof. A substrate treating apparatus including a chamber providing a space in which a process is performed, a support member supporting a substrate in the chamber, a gas supply member supplying a process gas onto the substrate disposed on the support member, and an exhaust assembly coupled to the chamber to exhaust a gas in the chamber, wherein the exhaust assembly includes an exhaust pipe connected to the chamber, an exhaust member connected to the exhaust pipe to provide a vacuum pressure in the exhaust pipe, a valve adjusting an opening rate of the exhaust pipe, and an adjustment plate having a cover plate which is provided in the chamber to interfere with a flow of the process gas in an internal region of the chamber in a direction corresponding to, when the exhaust pipe is partially opened, an opened region of the exhaust pipe. Consequently, the process gas may be uniformly supplied onto the substrate.

Abstract: A choke controlling fluid flow in a well has a conduit with an inlet and an outlet, and a flow restrictor comprising first and second choke members, one of which rotates relative to the other to choke or promote flow. The first and second choke members are axially spaced from one another, and have mating faces that are optionally planar, and are axially stacked in the choke. The choke is operated by a shifting tool, which grips the inner surface of the rotating choke member, and rotates it relative to the other, in order to vary the flow.

Abstract: A multistage stacked disk choke includes a housing having a high pressure inlet port and a low pressure outlet port, an assembly, a cage, a seat, and a plug. The assembly includes: a tubular inlet port, a galley intersecting the tubular inlet port, a tubular outlet port, and a bore inward from the tubular outlet port. The cage has an inlet port in communication with the tubular inlet port. The seat is configured to support the assembly. The plug moves inside the assembly bore and restricts flow through the tubular outlet port and/or the tubular inlet port. Operation fluid flows from the high pressure inlet port through the cage inlet port into the tubular inlet port and is redirected into the galley and into the tubular outlet port into the bore of the assembly to a bore in the seat, and out through the low pressure outlet port.

Abstract: Embodiments of the invention provide a high-reliability, cost-effective electro-hydraulic servo-valve assembly that is not susceptible to failure caused by contaminated fluid. In particular embodiments, the electro-hydraulic servo-valve assembly includes a rotary valve that may be actuated by either a direct-coupled Limited Angle Torque (LAT) motor, a geared, brushless DC motor, or some other rotary electric actuating element with an integrated driver circuit. In particular embodiments, the rotary valve element made up of an outer sleeve element and an inner spool element, with matching ports and slots, respectively.

Abstract: A control valve includes a body having an inlet and an outlet and a valve seat positioned in a passageway between the inlet and the outlet. A valve plug is positioned within the body and is movable between an opened position and a closed position to modulate a fluid flow at the outlet. A cage is disposed within the body adjacent the valve seat and proximate the valve plug and has a circumferential wall having an outer surface and an inner surface aligned along a longitudinal axis of the cage. The outer surface of the cage defines an outer flow length and the inner surface defines an inner flow length that is less than the outer flow length.

Abstract: A fuel supply apparatus of a liquefied gas carrier includes: a compressor for compressing gas fuel into a high pressure; a compressed gas storage tank being filled with the compressed high-pressure gas fuel, for storing the gas fuel; and a decompressor for decompressing the high-pressure gas fuel drawn from the compressed gas storage tank into a pressure suitable to be used in a propulsion system, to supply fuel to the propulsion system. The gas fuel is at least one of a natural boiled-off gas which is naturally evaporated in the cargo tank, a forced boiled-off gas which is artificially evaporated, and a gas additionally supplied for the use of fuel. Further, the compressor is a multistage high-pressure compressor and the decompressor is a multistage decompressor.

Abstract: A control valve trim assembly has a solid, one-piece unitary body having an inner surface and an outer surface. A plenum is formed within the body and is spaced apart from the inner surface and the outer surface. A plurality of first openings are formed in the inner surface of the body and are in fluid communication with the plenum via a corresponding first fluid passages formed through the body. A plurality of second openings are formed in the outer surface of the body and are in fluid communication with the plenum via a corresponding second fluid passages through the body.

Abstract: A hydraulic valve including a valve housing including a longitudinal axis, a receiving opening extending along the longitudinal axis, a first flow through opening of a supply connection, a second flow through opening of an operating connection, a third flow through opening of a tank connection, wherein the first flow through opening, the second flow through opening and the third flow through opening are configured at least partially flowable by a hydraulic fluid flowing through the valve housing, and a valve piston with a control groove which valve piston is axially displaceable in the valve housing in the receiving opening along the longitudinal axis, wherein the flow forces of the hydraulic fluid imparted upon the valve piston are oriented away from a first switching position of the hydraulic valve where the hydraulic fluid flows from the first flow through opening into the second flow through opening.

Abstract: A choke controlling fluid flow in a well has a conduit with an inlet and an outlet, and a flow restrictor comprising first and second choke members (10,20), one of which (20) rotates relative to the other (10) to choke or promote flow. The first and second choke members (10,20) are axially spaced from one another, and have mating faces that are optionally planar, and are axially stacked in the choke. The choke is operated by a shifting tool (50), which grips the inner surface of the rotating choke member (20), and rotates it relative to the other (10), in order to vary the flow.

Abstract: An improvement in a valve block for use with diaphragm-based valves is disclosed. The valve block includes a fluid-transfer plate with multiple small-diameter inlet bores connecting to a common inlet channel, and multiple small-diameter outlet bores connecting to a common outlet channel. The valve block also includes a pressure plate and diaphragm aligned and connected to the fluid-transfer plate in a way that allows pressurized material in the pressure plate to control the state of the channels formed by the inlet and outlet bores. The sizing and number of bores is optimized to accommodate high fluid flow rates, control fluid pressure, and enhance reliability.

Abstract: A nozzle is disclosed for use within a filter for inputting a jetting stream into the filter media to clean the filter media. The nozzle comprises an inlet for communication with a jetting stream source, and a plurality of plates stacked parallel and abutting one another. The plurality of plates comprises at least a top plate and a bottom plate, one of the plates having an aperture through the center thereof for receiving the jetting stream, wherein between adjacent plates at least one space is provided extending from the outside edge of the plates to the interior of plates and in fluid communication with the aperture for channeling the jetting stream radially outward from and substantially parallel with the longitudinal plane of the plate.

Abstract: A fluid valve includes a valve body having a fluid inlet and a fluid outlet. A fluid passageway connects the fluid inlet and the fluid outlet. A trim assembly is located within the fluid passageway and the trim assembly cooperates with a control member to control fluid flow through the fluid passageway. The trim assembly includes a cage having a lattice structure.

Abstract: A computer with a proper program generates a phased array sequence of signals. In a pulser with delays, the signals are fed through a multiplexor into multiple water wedges that are attached to a globe valve being tested. For a sequential operation of the globe valves from the open to the closed position, ultrasonic signals are transmitted through the fluid contained in the valve and reflected back through piezo-electric crystals to the multiplexor. By summation and merger of the signals, an image can be developed of the operation of the globe valve to determine if the globe valve is operating properly. By comparing the signals received with a known standard for that globe valve, proper operation, or lack thereof, of the globe valve under test can be determined. Separation of the valve stem from the globe can also be measured.

Abstract: A plug member of a gas valve, having an axial bore, a first bore and a second bore located in a radial direction thereof to respectively communicate with the axial bore, and a first guiding slot and a second guiding slot recessed into an outer peripheral surface thereof. The first bore is larger than the second bore, and communicates with one end of the first guiding slot, while another end thereof is near the second bore. The first guiding slot becomes narrower from the first end to the second end. The second guiding slot has one end communicating with the second bore, and another end located between said first end and said second end.

Abstract: The invention refers to a cage valve comprising a valve cover (20, 42, 62) and a valve cage, which latter comprises a retaining element (28, 54, 72) and a plurality of throttle elements (30) which are designed in the form of a hollow section. The invention is characterized in that the valve cage is connected to the valve cover (20, 42, 62).

Abstract: A noise-reducing valve structure includes a unitary spindle-shaped body having a central lumen for receiving a fluid flow and a poppet member, the body having an inner diameter adjacent the central lumen and an outer diameter and a circumferentially and axially distributed plurality of radial passages adapted to be opened and closed in accordance with a guided position of the poppet member, the plurality of radial passages extending through the spindle-shaped body from the inner diameter to the outer diameter and having a gradually increasing area from the inner diameter to the outer diameter.

Abstract: A shock absorber (10) has a case (11) in which a piston rod (25) is disposed, the piston rod (25) being reciprocable in an axial direction of the case (11), and a rotation cylinder (14) is rotatably provided inside the case (11) and is movable in the axial direction of the case (11). A cylinder hole (35) is partitioned by a piston (32) provided on the piston rod (25) into a front-side chamber (35a) and a rear-side chamber (35b). A spring force of a compression coil spring (37) urges the piston rod (25) in a direction to protrude from the case (11). An orifice (42), whose communication opening degree with a fluid passage (34) varies according to a rotated position of a rotation operation portion (15), is formed on the rotation operation portion (15), and positioning recesses are formed on the case (11) and are spaced apart from each other at intervals in a circumferential direction of the case (11).

Abstract: A storage facility for semiconductor containers is provided. The storage structure has partitioning walls including a side wall portion extending along a vertical direction, and holding space partitioned off from exterior space by the partitioning walls. Inactive gas enriched air, which contains higher concentration of inactive gas than concentration of inactive gas contained in air in the exterior space, is supplied to the holding space. A first opening for allowing containers being carried into and out of the storage structure to be moved through the side wall portion is formed in the side wall portion. A first inlet opening is located at a position in the exterior space and adjacent an edge of the first opening. A first drawing-in device is provided to discharge air drawn in through the first inlet opening into discharge space which is outside the holding space and is divided off from the exterior space.

Abstract: A suction block for use in a fluid end assembly of a high pressure reciprocal pump includes a first suction bore extending from a first face of the suction block and into the interior thereof; and a second suction bore extending from a second face of the suction block and into the interior thereof to intersect the first suction bore. The second suction bore is adapted to receive a valve assembly for alternatively fluidly connecting and disconnecting the first and second suction bores. The first suction bore has a first suction bore section with a first geometry and a second suction bore section with a second geometry different from the first geometry to thereby reduce stress in the suction block during use.

Abstract: A turn down ratio (TDR) damper which controls an amount of gas and air flowing in the TDR damper and deliver the controlled gas and air to a turbo fan is disclosed. The TDR damper includes: air passages comprising a first air passage and a second air passage, the first air passage and the second air passage separately formed so that the air move through each path; gas passages comprising a first gas passage and a second gas passage, the first gas passage and the second gas passage separately formed so that the gas move through each path; and opening and closing means for opening and closing the second air passage and the second gas passage at the same time. The air passages and the gas passages may be separately formed and reached outlets connected to the turbo fan so that the air and gas may be delivered to the turbo fan through a separate path.