Sectional Block Structure Patents (Class 137/884)
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Publication number: 20030056840Abstract: The invention relates to a block of pneumatic modules consisting of a plurality of adjacent distribution modules, juxtaposed and kept tightened against each other along parallel faces and between two end modules by assembly means passing through all the distribution modules and at least one of the end modules. The assembly means comprise, for each distribution module, a single through rod with a first externally threaded end and a second internally threaded end, the second end of each rod being shaped as a head whose external surface is not of revolution about the axis of the rod and which, in service, at least partially projects from a face of the module through which the rod passes, the face of the adjacent module turned towards the head having a recess corresponding in shape to the above mentioned head.Type: ApplicationFiled: September 5, 2002Publication date: March 27, 2003Inventors: Serge Rondreux, Jean-Luc Burban, Daniel Bouteille
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Publication number: 20030047225Abstract: A fluid-flow system includes a first plurality of substantially identical plate-like blocks. Each block has at least two fluid-flow through-passages extending between its front face and its back face. The blocks are connected to each other along their edge surfaces. A fluid component is affixed to the front face of each of the blocks, with its ports aligned and in fluid communication with the respective fluid-flow through-passages of the block to which it is affixed. A second plurality of fluid-flow block-interconnection tubes external to the blocks are affixed to the back face of a first block and to the back face of a second block. A first end of the fluid-flow block-interconnection tube is in fluid communication with one of the fluid-flow through-passages on the first block, and a second end of the fluid-flow block-interconnection tube is in fluid communication with one of the fluid-flow through-passages on the second block.Type: ApplicationFiled: September 7, 2001Publication date: March 13, 2003Inventor: Yen Chuh
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Publication number: 20030041910Abstract: An on-off device disposed at each of the inlet and the outlet of a fluid controller is one of five kinds of on-off devices, i.e., on-off device having a two-port valve, on-off device having a two-port valve and a three-port valve, on-off device having a two-port valve and two three-port valves, on-off device having two three-port valves, and on-off device having three three-port valves, The main bodies of two-port valves of all types of on-off devices are identical in configuration and each have an inlet and an outlet in a bottom face thereof. Main bodies of three-port valves of all types of on-off devices are identical in configuration and each formed in a bottom face thereof with an inlet, an outlet always in communication with the inlet, and an inlet-outlet subopening.Type: ApplicationFiled: October 22, 2002Publication date: March 6, 2003Applicant: Tadahiro Ohmi, Sendai-shi, Japan and Fujikin IncorporatedInventors: Hiroshi Morokoshi, Michio Yamaji, Shigeaki Tanaka, Keiji Hirao, Yuji Kawano, Takashi Hirose, Kosuke Yokoyama, Michio Kuramochi, Masayuki Hatano, Nobukazu Ikeda
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Patent number: 6527009Abstract: A modular gas control device for use with a compressed gas cylinder (111) comprises a primary module (152) and a secondary module (252) mounted on the primary module. The primary module comprises a first supporting body (154) having a first main gas flow path (155) through the body. The supporting body has input connecting means (156) for mounting the body on the cylinder (111) and connecting the gas flow path (155) to communicate with the gas cylinder through a first flow. path (157). Pressure reducing means (166) provides gas in the flow path at a lower pressure than in the container. Output connecting means (170) downstream of the pressure reducing means provides a low pressure outlet from the main gas flow path. A high pressure shut-off valve (164) is positioned upstream of the pressure reducing means, and filling means (161, 160) allows filling of the cylinder with compressed gas through the input connecting means (156) along a second flow path (159) separate from the input flow path (157).Type: GrantFiled: August 14, 2001Date of Patent: March 4, 2003Assignee: Air Products and Chemicals, Inc.Inventors: Dao-Hong Zheng, John Irven, Mark Allen George
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Publication number: 20030037828Abstract: An electro-hydraulic module for a vehicle transmission integrates control circuitry with a transmission valve body into a single unit. The valve body contains channels that route transmission fluid. The module includes electronic circuitry sandwiched between the valve body and a cover, eliminating the need for a separate circuit plate to support the electronic circuitry. Solenoids may also be attached to the valve body for further integration.Type: ApplicationFiled: August 8, 2002Publication date: February 27, 2003Applicant: Siemens VDO Automotive CorporationInventors: Helmut Gander, Michael Thorum
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Patent number: 6523570Abstract: A valve assembly includes a valve with a bobbin/valve body, a solenoid and a plunger. The bobbin/valve body is formed in one piece, and defines all of the valve's inlet/outlet ports and forms the entire support structure for the solenoid and the plunger. The valve may be connected to a manifold by press-fitting port nipples of the valve into corresponding channels in the manifold. The manifold is formed of a resilient, elastomeric material, and the port nipples include radial projecting barbs, which enable the valve to be fluidly-connected to the manifold without additional O-ring seals or other mechanical sealing devices. Fittings with barbs can likewise be press-fit in other channels of the manifold to connect the valve assembly with fluid lines or other components in the fluid system. The fittings can also be provided unitary with the manifold, and/or adhesively attached to the manifold and/or to the fluid lines and other components.Type: GrantFiled: March 7, 2001Date of Patent: February 25, 2003Assignee: Parker-Hannifin Corp.Inventors: Andreas A. Weiss, David P. Cross, William R. Clark, Paul D. Mercier
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Patent number: 6520202Abstract: A manifold valve in which mounting of a magnetometric sensor is easy and wiring is easy and which is easy to handle in maintenance and has a position detecting function is obtained. This valve is formed of a solenoid valve 1 and a manifold base 2 onto which the solenoid valve 1 is mounted. The solenoid valve 1 includes a magnet 20 mounted to a piston 12a to detect a position and a depression 22 in which a sensor is to be mounted and which is provided in a position corresponding to the magnet 20. The manifold base 2 includes a magnetometric sensor 21 provided to a position corresponding to the depression 22 in a projecting state and the magnetometric sensor 21 is automatically mounted in the depression 22 when the solenoid valve 1 is mounted onto the manifold base 2.Type: GrantFiled: August 13, 2001Date of Patent: February 18, 2003Assignee: SMC CorporationInventors: Shinji Miyazoe, Makoto Ishikawa
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Publication number: 20030029510Abstract: A manifold 10A is divided into a manifold main body 12 and a sub-plate 13, a plurality of branch holes 14a, 15a and 16a extending from a mounting face vertically and straightly to communicate with fluid flow passages 14, 15 and 16 are provided in the manifold main body 12, a plurality of relay holes 24, 25 and 26 which causes the respective branch holes 14a, 15a and 16a to communicate with respective ports 21, 22 and 23 of an electromagnetic valve 11 are provided in the sub-plate 13, and the relay hole and the branch hole whose positions are different to each other are caused to communicate with each other via a recessed portion 29 formed on an lower face of the sub-plate 13.Type: ApplicationFiled: July 18, 2002Publication date: February 13, 2003Applicant: SMC CorporationInventors: Shinji Miyazoe, Masaru Narita, Makoto Ishikawa
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Patent number: 6513547Abstract: Substrates, in each of which all or parts of electronic parts including IC for communication are carried in a form of bare chip, are mounted on solenoid-operated valves attached onto manifold blocks for constructing a solenoid-operated valve manifold. Accordingly, it is possible to miniaturize the solenoid-operated valve manifold.Type: GrantFiled: March 30, 2001Date of Patent: February 4, 2003Assignee: SMC Kabushiki KaishaInventors: Katsuhisa Endo, Koichiro Gemma
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Publication number: 20030010390Abstract: The present invention relates to a pressure control device, in particular for motor vehicle braking systems, with at least one valve carrier (2) accommodating a pressure control valve (1), a pressure sensor (3) for detecting the hydraulic pressure in a pressure fluid channel (4) of the valve carrier (2) as well as with an electric module (5) including electric and/or electronic structural members and being connected to the pressure control valve (1) and the pressure sensor (3) by way of electric contacts (18). The pressure sensor (3) is positioned in a space (17) interposed between the pressure control valve (1) and the electric module (5), with at least one of the contacts (18) that is connected to the pressure sensor (3) leading through a sensor carrier (16) to the electric module (5). The sensor carrier (16) is located at least in sections within the space (17).Type: ApplicationFiled: August 15, 2002Publication date: January 16, 2003Inventors: Erhard Beck, Peter Volz
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Patent number: 6505642Abstract: A manifold valve in which mounting of a magnetometric sensor is easy and wiring is easy and which is easy to handle in maintenance and has a position detecting function is obtained. This valve is formed of a solenoid valve 1, a manifold base 2, and an intermediate block 3 disposed between the solenoid valve 1 and the manifold base 2. The solenoid valve 1 includes a magnet 20 for detecting a position and moving in synchronization with a spool 8 and a depression 22 in which a sensor is to be mounted and which is provided in a position corresponding to the magnet 20. The manifold base 2 includes a first plug 28 to be connected to a controller for controlling the solenoid valve. The intermediate block 3 includes a projecting portion 37 to be fitted in the depression 22, a magnetometric sensor 21 housed in the projecting portion 37, and an insertion hole 43 through which a conductor 44 connecting the magnetometric sensor 21 and the first plug 28 is inserted.Type: GrantFiled: August 22, 2001Date of Patent: January 14, 2003Assignee: SMC CorporationInventors: Shinji Miyazoe, Makoto Ishikawa
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Patent number: 6502601Abstract: A modular manifold system is provided for interconnecting fluid components of a fluid system in a reduced area. The system is comprised of a one or more bridge fittings having an internal fluid passageway which has an inlet end in fluid communication with an outlet port of a first fluid component, and an outlet end in fluid communication with an inlet port of a second fluid component. The bridge fittings may additionally comprise two or more ports, which one of said ports may be in fluid communication with a manifold on another substrate level. The bridge fittings may be mounted within a channel of a backing plate for structural support or in channel blocks of varying sizes. An optional locator plate may be utilized which is mounted over the ends of the bridge fittings in order to align the inlet and outlet ports of the fluid components with the inlet and outlet ends of the bridge fittings. The bridge fittings may also be mounted to the locator plate in multiple directions forming multiple flow paths.Type: GrantFiled: May 23, 2002Date of Patent: January 7, 2003Assignee: Swagelok CompanyInventors: Paul G. Eidsmore, Michael J. Mohlenkamp, Benjamin J. Olechnowicz, Christine M. Schilt Deines, Douglas Nordstrom, James McCoy
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Publication number: 20020185185Abstract: A connecting layer for interconnecting fluid control devices in series and in parallel comprises an upper connecting layer 4 and a lower connecting layer 5. The upper connecting layer 4 is provided by parallel rows each comprising block couplings 41, 42, 43, 44 arranged longitudinally of the apparatus, each of the block couplings having a longitudinal channel 61 for interconnecting the adjacent fluid control devices in the row and a through channel 62 communicating with the fluid control device. The lower connecting layer 5 is provided by block coupling 56, 57, 58 each having a lateral channel 64 for interconnecting the through channels 62 of the block couplings 41, 42, 43, 44 of the upper connecting layer 4 which are arranged laterally and by block couplings 51 each adapted to cause the through channel 62 of the block coupling 41, 43, 44 of the upper connecting layer 4 to communicate with an inlet-side or outlet-side coupling 52, 53.Type: ApplicationFiled: May 21, 2002Publication date: December 12, 2002Inventors: Michio Yamaji, Kenji Tsubota, Hidenaga Hoshiyama
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Patent number: 6488315Abstract: A coupling for microcomponents has several essentially plane-parallel plates with line connections for delivering and discharging liquid or gaseous components. The line connections are mounted on a connection block which protrudes through openings in the plates with fixing segments that engage a pressure plate retained by a clip. The line connections open out in an area of line bores in the plate.Type: GrantFiled: April 27, 2000Date of Patent: December 3, 2002Assignee: Merck Patent GmbHInventors: Günter Brenner, Michael Schmelz, Hanns Wurziger, Norbert Schwesinger
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Patent number: 6488051Abstract: The present invention provides a valve assembly, comprising a multiway valve (9) with a fitting surface (10) and a fluid manifold (7) with a mounting surface (8), wherein an opening of at least one branch channel lies opposite an opening of a respective channel of the multiway valve (9) in order to provide a fluid connection between the fluid manifold (7) and the multiway valve (9), and with an elastic sealing plate (1) with a plate-like body and through holes (2a-2e, 3a-3d) for the openings disposed between the mounting surface (8) and the fitting surface (10) and covering approximately completely the fitting surface (10) of the assigned multiway valve (9), wherein each through hole (2a-2e, 3a-3d) is surrounded by an annular sealing lip (4) formed on the elastic sealing plate (1), wherein the elastic sealing plate (1) is provided with an outer hygienic sealing profile (5) formed along the edge (6) on both sides of the sealing plate (1) in order to avoid a capillary entry of dirt and bacteria into the area beType: GrantFiled: March 4, 2001Date of Patent: December 3, 2002Assignee: AB Rexroth MecmanInventor: Peter Fagerström
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Publication number: 20020174905Abstract: A stackable valve manifold arrangement including a first valve manifold adapted to operatively receive a plurality of valves. The first valve manifold having an upper surface. A second valve manifold is provided which is adapted to operatively receive a plurality of valves. The second valve manifold has a lower surface that is in opposed relationship to the upper surface of the first valve manifold, and the second valve manifold is in fluid communication with the first manifold. The first and second manifolds may each be joined to a circuit board forming a module. The modules are vertically stackable and operatively connected to each other to form a system.Type: ApplicationFiled: April 18, 2002Publication date: November 28, 2002Applicant: FESTO CORPORATIONInventors: Frank Latino, Grzegorz Bogdanowicz, Karl-Heinz Forster
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Patent number: 6485112Abstract: An assembly (20) is used with an anti-lock braking system (10) and is provided by an associated method. The assembly (20) includes a circuit board (30), a lead frame (40), and a plurality of solenoid coils (50). The lead frame (40) has a plurality of mechanical one-way connectors (42) for electrically connecting the circuit board (30) to the lead frame (40). The plurality of solenoid coils (50) is connected to the lead frame (50). Each of the plurality of solenoid coils (50) is electrically connected to the lead frame (40) such that each of the plurality of solenoid coils (50) is electrically connected to the circuit board (30).Type: GrantFiled: June 13, 2001Date of Patent: November 26, 2002Assignee: TRW Inc.Inventor: Mark D. Haller
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Publication number: 20020170609Abstract: A method for manufacturing a programmable logic controller (PLC) module includes mounting at least one valve inside the PLC module and positioning at least one outlet line in flow communication with the valve.Type: ApplicationFiled: May 17, 2001Publication date: November 21, 2002Inventor: Derald J. Herinckx
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Publication number: 20020148520Abstract: A valve arrangement, which possesses at least one valve (3), which is has a valve housing (5) provided with housing ducts. On opposite sides of the valve housing (5) there are first and second interfaces (18 and 19) for the fitting of a first and a second connection board (22 and 23). Each connection board comprises at least one connection duct communicating with a housing duct and is held on the valve housing (5) because on the one hand it is anchored by way of retaining means (36) on the valve housing (5) and on the other hand is fixed by means of attachment means (37) passing internally externally through the valve housing (5) on the oppositely placed second connection board (23).Type: ApplicationFiled: April 8, 2002Publication date: October 17, 2002Inventors: Werner Burkhardt, Jurgen Gerhartz
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Publication number: 20020134445Abstract: A modular manifold system is provided for interconnecting fluid components of a fluid system in a reduced area. The system is comprised of a one or more bridge fittings having an internal fluid passageway which has an inlet end in fluid communication with an outlet port of a first fluid component, and an outlet end in fluid communication with an inlet port of a second fluid component. The bridge fittings may additionally comprise two or more ports, which one of said ports may be in fluid communication with a manifold on another substrate level. The bridge fittings may be mounted within a channel of a backing plate for structural support or in channel blocks of varying sizes. An optional locator plate may be utilized which is mounted over the ends of the bridge fittings in order to align the inlet and outlet ports of the fluid components with the inlet and outlet ends of the bridge fittings. The bridge fittings may also be mounted to the locator plate in multiple directions forming multiple flow paths.Type: ApplicationFiled: May 23, 2002Publication date: September 26, 2002Inventors: Paul G. Eidsmore, Michael J. Mohlenkamp, Benjamin J. Olechnowicz, Christine M. Schilt Deines, Douglas Nordstrom, James McCoy
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Patent number: 6453948Abstract: A valve comprising a valve carrier on which a plurality of control units are mounted adjacent to one another. Each control unit possesses a liquid-tight casing body in which the component of a valve unit are received and is mounted on the valve carrier with a seal in between. It is in this manner that a liquid-tight, encapsulated and individual accommodation of the singular valve units is ensured.Type: GrantFiled: January 3, 2001Date of Patent: September 24, 2002Assignee: Festo AG & Co.Inventors: Frank Notz, Thomas Müller
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Publication number: 20020117221Abstract: Provide an integration unit, wherein the does not take part mutually, the reliability becomes an independent one of individual seal portions, improving the reliability than the related art.Type: ApplicationFiled: December 5, 2001Publication date: August 29, 2002Inventors: Osamu Uchizawa, Yasuhiro Chiba
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Patent number: 6435215Abstract: A gas panel for use with a tool for manufacturing a semiconductor includes a one-piece manifold body having an inlet for receiving a process gas. The manifold body has at least one lateral wall extending in the general direction of gas flow. The lateral wall includes at least one active device site having an active device thereon. The active device is in gas communication with a gas carrying path formed within the one-piece manifold. The active device may be a manual valve, a pneumatic valve, a pressure regulator, a pressure transducer, a purifier, a filter or a flow controller. The gas is received from the active device at a continuation of the gas flow path in the manifold body and is conveyed to a manifold outlet for ultimate to the tool.Type: GrantFiled: August 23, 2001Date of Patent: August 20, 2002Assignee: Unit Instruments, Inc.Inventors: Eric J. Redemann, Kim N. Vu
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Patent number: 6431209Abstract: A high-pressure primary fluid control valve and a multi-pressure selector fluid control valve are disclosed for operating a fluid-actuated device. Preferably a spherical ball-poppet and frusto-conical valve seat adapted for substantially line-contact therebetween are provided with an upstream flow area adjacent the line-contact in order to substantially minimize sonic flow damage to the actual sealing surface of the valve seat by shifting it away from such line-contact seating. Preferably, the ball-poppet is movable within a poppet guide that is allowed to float radially in order to allow the ball-poppet to be substantially self-centering with respect to the valve seat. In addition, cross-over leakage is preferably negated by closing an exhaust ball-poppet just prior to opening a supply ball-poppet. These principles and features are equally applicable to either or both of the primary or the multi-pressure selector fluid control valves.Type: GrantFiled: September 27, 2000Date of Patent: August 13, 2002Assignee: Ross Operating Valve CompanyInventor: Charles A. Weiler, Jr.
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Patent number: 6431207Abstract: A high-pressure fluid control valve is disclosed for operating a fluid-actuated device. Preferably a ball-poppet and frusto-conical valve seat adapted for substantially line-type contact therebetween are provided with an upstream restricted flow area in order to substantially minimize sonic flow damage to the actual sealing surface of the valve seat. Preferably, the ball-poppet is movable within a poppet guide that is allowed to float radially in order to allow the ball-poppet to be substantially self-centering with respect to the valve seat. In addition, cross-over leakage is preferably negated by closing an exhaust ball-poppet just prior to opening a supply ball-poppet.Type: GrantFiled: March 16, 2000Date of Patent: August 13, 2002Assignee: Ross Operating Valve CompanyInventor: Charles A. Weiler, Jr.
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Patent number: 6427723Abstract: A valve arrangement having an integral rail-like valve carrier body fitted with a plurality of valve units placed in a row or in-line. Each valve unit comprises a valve and at least one valve drive, the latter making electrical contact by way of a plug contact with electrical connector. Each valve is provided with its own connection module having the associated electrical connector, all connection modules being placed in a row free of mutual electrical control connection in sequence. Electrical conductors extend from each connection module and are in the form of flexible wire conductors.Type: GrantFiled: March 14, 2001Date of Patent: August 6, 2002Assignee: Festo AG & Co.Inventors: Grzegorz Bogdanowicz, Siegfried Becker, Richard Harscher
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Publication number: 20020100513Abstract: A hot melt adhesive applicator of a slot die type or other type having an air supply to an adhesive service block through solenoids controlling the ON-OFF of the pneumatic adhesive applicator valves is disclosed. One or more air valves are directly mounted to the service block through an intervening air supply manifold base plate positioned atop an insulation plate to significantly decrease the air path length and decrease the response time of the air valve. In the preferred embodiment, the insulation element is mounted within an elongate recess formed in the top surface of the service block. The insulation element is formed with cutouts to reduce the mass of the insulation element and provide better air insulation exposure between the bottom surface of the valve base manifold and the bottom of the recess exposed by the cutouts. Other improvements are also disclosed for use with or without the direct mounting of the air valve to the service block.Type: ApplicationFiled: January 26, 2001Publication date: August 1, 2002Inventor: Jon C. Zook
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Patent number: 6425416Abstract: A directional control apparatus for a solenoid valve assembly, including a solenoid valve assembly including a supply/exhaust device and solenoid valves connected together, and a manual directional control valve. The supply/exhaust device is configured to supply to and exhaust from the solenoid valve assembly pressure fluids, and includes a supply-side connection port for connecting to a fluid supply tube and an exhaust-side connection port for connecting to a fluid exhaust tube. The manual directional control valve is configured to be connected between the supply/exhaust device and the fluid supply and exhaust tubes. The manual directional control valve has a supply channel for communicating the supply-side connection port and the fluid supply tube and an exhaust channel for communicating the exhaust-side connection port and the fluid exhaust tube. The manual directional control valve is configured to manually divert the pressure fluids between the supply and exhaust channels.Type: GrantFiled: September 26, 2000Date of Patent: July 30, 2002Assignee: SMC CorporationInventors: Masaru Narita, Bunya Hayashi, Makoto Ishikawa
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Patent number: 6425409Abstract: A valve includes a bobbin/valve body, a solenoid and a plunger. The bobbin/valve body is formed in one piece, defines all of the valve's inlet/outlet ports and forms the entire support structure for the solenoid and the plunger. To assemble the valve, a plunger body is inserted into the bobbin/valve body through an end opening into a longitudinal bore and a spring positioned to bias the plunger body to a normally closed position. A pole piece is then inserted through the end opening into the longitudinal bore and attached to the bobbin/valve body. A solenoid coil is wound around a central cylindrical section of the bobbin/valve body, and terminal pins and a flux conductor are attached to the bobbin/valve body. The attachment of the pole piece, the terminal pins, and/or the flux conductor may be accomplished by press-fit and/or swage coupling techniques.Type: GrantFiled: May 4, 2000Date of Patent: July 30, 2002Assignee: Parker Hannifin Corp.Inventors: David P. Cross, Andreas A. Weiss, Andrew Farkas, Robert Irwin
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Patent number: 6418960Abstract: The present invention generally provides an apparatus and method for improving the process of purging a liquid delivery system used in integrated circuit manufacturing. The liquid delivery system comprises ultrasonic transducers mounted to various components of a liquid delivery system. The transducers may be mounted on housings, isolation valves, fuel injectors, pump assemblies, fluid lines, and/or liquid flow meters. The ultrasonic transducers launch ultrasonic energy that enhance the removal of processing liquids and particulate material from components of the system. The present invention provides for a purge process where a purge fluid, preferably a liquid solvent, is flowed into the liquid delivery system and ultrasonic energy is launched into the purge fluid to enhance dissolution of residual processing liquids and particulate matter in the liquid delivery system, including from cracks and crevices in valves and other complex mechanical devices before being pumped from the liquid delivery system.Type: GrantFiled: October 6, 1999Date of Patent: July 16, 2002Assignee: Applied Materials, Inc.Inventors: Donald M. Mintz, Ted G. Yoshidome
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Patent number: 6415822Abstract: A modular chemical delivery block is presented. In an embodiment, the modular chemical delivery block is a top-accessible modular block. A top-accessible modular block is one that may be coupled to or decoupled from an adjacent modular block using access from directly above the top-accessible modular block. The top-accessible modular chemical delivery block preferably includes an axial connection location configured to allow the modular block to be coupled to a laterally adjacent modular block. The interior surface of the axial connection location is preferably substantially parallel to the exterior surface of the axial connection location and unobstructed by other portions of the modular block from the top surface of the modular block. Another embodiment involves a unified modular block configured to direct multi-directional fluid flow therethrough. The unified modular block preferably includes first and second fluid flow paths having first and second axial bore holes.Type: GrantFiled: July 14, 1999Date of Patent: July 9, 2002Inventor: J. Gregory Hollingshead
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Publication number: 20020081167Abstract: A machine tool fluid distribution apparatus comprising a housing, a pump, a fluid distribution system, and a controller. The pump is mounted in the housing. The pump is adapted for discharging, from a discharge end of the pump, fluid at a different pressure than a fluid pressure available in a machine tool. The fluid distribution system is connected to the discharge end of the pump, the fluid distribution system distributes fluid from the pump to workstations of the machine tool. The fluid distribution system has at least one pair of outlets at the housing for distributing fluid to the workstations of the machine tool. The controller is controllably connected to the fluid distribution system for controlling the fluid distribution system. The controller controls fluid to at least one of the at least one pair of outlets independently from fluid to another one of the at least one pair of outlets of the fluid distribution system.Type: ApplicationFiled: March 20, 2001Publication date: June 27, 2002Inventor: L. James Sasanecki
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Patent number: 6394130Abstract: A control valve device controls the movement of at least one hydraulic user. Relative movement of a control spool valve of a control valve with respect to a housing controls the connection of at least one hydraulic connection that is in communication with the user with a delivery connection and with a reservoir connection. The control spool valve can be moved relative to the housing by an actuator device. The housing has a multi-layer construction consisting of plates connected with one another by soldering or another adhesive, which plates comprise intermediate plates that are located between two end plates. The thickness (D) of the end plates is greater than the thickness (d) of the intermediate plates, whereby the end plates are provided with a fastening device for the actuator device and/or of connection devices for the hydraulic lines.Type: GrantFiled: March 2, 2000Date of Patent: May 28, 2002Assignee: Linde AktiengesellschaftInventor: Horst Deininger
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Patent number: 6394138Abstract: A manifold system for enabling a distribution of fluids includes a plurality of individual manifold blocks that can be joined together to form a gas stick. Each manifold block will have a fluid passage way with an entrance port and exit port accessing a common surface. An active component can be mounted to one manifold block, while extending across a port of an adjacent manifold block. An alignment system can be provided to ensure that the entrance and exit ports are positioned in a plane containing the common surface to facilitate sealing.Type: GrantFiled: January 13, 1999Date of Patent: May 28, 2002Assignee: Unit Instruments, Inc.Inventors: Kim N. Vu, Eric J. Redemann, David P. Sherriff
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Patent number: 6382257Abstract: A modular fluid control system, comprising: a control module for receiving parallel electronic control signals as a plurality of data streams, the control module including a control unit configured to convert the data streams of the parallel electronic control signals to serial electronic control signals, each including a plurality of data pulses as control instruction signals, and an electrical connector; a plurality of valve modules, each valve module including at least one valve operable to control the flow of pressurized fluid; and a plurality of manifold modules connectable in series to the control module and connected to respective ones of the valve modules, each manifold module including a fluid supply conduit to provide a common manifold for receiving pressurized fluid, first and second electrical connectors for connection with ones of the connectors of adjacent manifold modules and the connector of the control module to provide an electrical bus for transmission of the serial control signals and poweType: GrantFiled: June 21, 2001Date of Patent: May 7, 2002Assignee: Parker-Hannifin PLCInventors: Marcus Mead, Gary Alan Shaw, Alan Paul Ross
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Patent number: 6382238Abstract: Lower members of each of lines A, B, C, D, E, P are mounted on a subbase panel 3 with screws, upper members 11, 12, 13, 14, 15, 16, 17, 18, 19 of each line are mounted on the lower members with screws, and the subbase panels 3 is mounted on a single main base panel 2. Channel connecting element 50 is removable upward.Type: GrantFiled: March 9, 2001Date of Patent: May 7, 2002Assignees: Tokyo Electron Limited, Fujikin IncorporatedInventors: Ken Ishii, Tsuneyuki Okabe, Yuji Kawano, Michio Yamaji
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Publication number: 20020050299Abstract: A fluid delivery apparatus for transporting a fluid to one or more fluid handling components. The fluid delivery apparatus includes one or more modular subassemblies having an upper module, a lower module, and a base block. The upper module includes a passageway for coupling with a fluid handling component such that the upper passageway is in fluid communication with the fluid handling component. The lower module includes a lower passageway for coupling with the upper module such that the passageways are in fluid communication. The lower module includes a flow channel having a lower passageway. The base block includes a receptacle and a channel. The upper module is received within the receptacle and the lower module extends through the channel. The modular subassembly can include a spacer having a plurality of alignment apertures for aligning fluid coupling ports of the upper and lower modules. A method of using the fluid delivery apparatus is also disclosed.Type: ApplicationFiled: March 6, 2001Publication date: May 2, 2002Inventor: Nhan Nguyen
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Publication number: 20020046775Abstract: A gas panel for use with a tool for manufacturing a semiconductor includes a one-piece manifold body having an inlet for receiving a process gas. The manifold body has at least one lateral wall- extending in the general direction of gas flow. The lateral wall includes at least one active device site having an active device thereon. The active device is in gas communication with a gas carrying path formed within the one-piece manifold. The active device may be a manual valve, a pneumatic valve, a pressure regulator, a pressure transducer, a purifier, a filter or a flow controller. The gas is received from the active device at a continuation of the gas flow path in the manifold body and is conveyed to a manifold outlet for ultimate to the tool.Type: ApplicationFiled: August 23, 2001Publication date: April 25, 2002Inventors: Eric J. Redemann, Kim N. Vu
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Patent number: 6374859Abstract: A manifold system for incorporation in a gas panel distribution system for semi-conductor manufacturing includes a plurality of individual manifold blocks with each manifold block having a fluid passageway with an entrance and exit port accessing a common surface. Adjacent manifold blocks are removably interconnected to permit the respective fluid passageways to be in position for interconnection. A plurality of active components can be sealingly fastened to the individual manifold blocks to complete the interconnection of the respective fluid passageways. Each active component can bridge over a pair of adjacent individual manifold blocks and form with the individual manifold blocks an operative gas stick for delivering gas to a semiconductor tool. The individual manifold blocks can be identical in configuration and can include a first upper flange on one side and a second lower flange on an opposite side to enable an interlocking of adjacent manifold blocks.Type: GrantFiled: July 8, 1998Date of Patent: April 23, 2002Assignee: Unit Instruments, Inc.Inventors: Kim N. Vu, Eric J. Redemann, David P. Sheriff
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Patent number: 6374861Abstract: A fluid handling port array includes at least one fluid conduction bore, a plurality of insert bores each intersecting at least one fluid conduction bore and being adapted to receive a configuration insert, a plurality of port bores each intersecting at least one of the fluid conduction bores for providing fluid access to the fluid conduction bores. The port array is configured by fixing configuration inserts in the insert bores. In a particular embodiment, the configuration inserts comprise device seats and are adapted to receive configuration devices such as a valves, caps or plugs. Alternatively, the configuration inserts, themselves, embody configuration devices.Type: GrantFiled: November 21, 2000Date of Patent: April 23, 2002Assignee: Chenand CorporationInventor: Kenneth Alan Johnson
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Patent number: 6374860Abstract: A gas chromatograph with multiple valves is disclosed. An embodiment of the multi-valve gas chromatograph includes multiple valves, multiple thermal conductivity detectors (TCD's), and a manifold. This allows separation and measurement of a gas sample in one compact integrated unit. The unit is particularly desirable because the solenoids associated with the valves are attached directly to the underneath of the manifold, thus eliminating the need for tubing between the solenoids and the valves. Other features may also be present. For example, a leak free multi-valve block may include a first temperature zone heating the valves and detectors and a second temperature zone heating the columns. The leak free feature may be achieved by placement of tightening screws through the center of each valve. Carrier gas insertion areas may be provided in the multi-valve block to improve performance.Type: GrantFiled: October 16, 1998Date of Patent: April 23, 2002Assignee: Daniel Industries, Inc.Inventors: Yang Xu, Teresa Lechner-Fish
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Patent number: 6371166Abstract: In a solenoid valve device in which connection terminals, each of which is connected to one of a plurality of solenoid valves fixed in a mounting block, are placed inside a common coupler, a coupler assembly integrally comprising the coupler is detachably mounted on the mounting block at a position which is spaced back from each of the solenoid parts, and elastic connecting members made from an electrically conductive metal are provided between each of a plurality of first flat terminals which are fixedly positioned on the side of the coupler assembly facing the mounting block so as to connect to the corresponding electrically conductive lead members arranged in the coupler assembly and second flat terminals, each of which is arranged at the rear end of each of the solenoid parts so as to be individually opposite the first flat terminals.Type: GrantFiled: November 30, 2000Date of Patent: April 16, 2002Assignee: Keihin CorporationInventors: Hiroshi Yoshizawa, Katsumi Shirai, Akira Nagasaki, Shigeto Ryuen, Masayuki Shibata
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Patent number: 6367507Abstract: A fluid-flow module comprising a support plate having two parallel opposite edges and at least one body fixed to the support plate, the body having a main duct extending substantially parallel to the support plate and having first and second ends respectively provided with a quick coupling and with a connection endpiece for engaging such a quick coupling, the quick coupling and the connection endpiece extending parallel to said opposite edges of the support plate and at least one of the quick coupling and the connection endpiece extending at least in part beyond the support plate.Type: GrantFiled: July 20, 2000Date of Patent: April 9, 2002Assignee: Legris SAInventor: Patrick Legeai
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Publication number: 20020038671Abstract: A fluid handling port array includes at least one fluid conduction bore, a plurality of insert bores each intersecting at least one fluid conduction bore and being adapted to receive a configuration insert, a plurality of port bores each intersecting at least one of the fluid conduction bores for providing fluid access to the fluid conduction bores. The port array is configured by fixing configuration inserts in the insert bores. In a particular embodiment, the configuration inserts comprise device seats and are adapted to receive configuration devices such as a valves, caps or plugs. Alternatively, the configuration inserts, themselves, embody configuration devices.Type: ApplicationFiled: October 30, 2001Publication date: April 4, 2002Inventor: Kenneth Alan Johnson
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Publication number: 20020038673Abstract: A system and method for integrating gas components that combines together, either in an in-line or modular fashion, at least two gas components used in a gas stick for flowing a gas from a first point to an end point. In one embodiment, the present invention can be used to combine a pressure transducer, a filter, and a display into a single unit that will reduce the gas stick size along the gas flow axis of the gas stick. The gas components can be integrated using VCR connections for an in-line use of the present invention. In the modular form, the present invention can use a number of different connections to connect the gas components vertically on a modular base block (i.e., stacked approximately perpendicular to the modular base block). Thus, the gas components will stack vertically with respect to the traditional horizontal gas flow path axis.Type: ApplicationFiled: November 5, 2001Publication date: April 4, 2002Inventor: Christ A. Tsourides
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Publication number: 20020038672Abstract: A system and method for integrating gas components that combines together, either in an in-line or modular fashion, at least two gas components used in a gas stick for flowing a gas from a first point to an end point. In one embodiment, the present invention can be used to combine a pressure transducer, a filter, and a display into a single unit that will reduce the gas stick size along the gas flow axis of the gas stick. The gas components can be integrated using VCR connections for an in-line use of the present invention. In the modular form, the present invention can use a number of different connections to connect the gas components vertically on a modular base block (i.e., stacked approximately perpendicular to the modular base block). Thus, the gas components will stack vertically with respect to the traditional horizontal gas flow path axis.Type: ApplicationFiled: November 5, 2001Publication date: April 4, 2002Inventor: Christ A. Tsourides
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Patent number: 6363970Abstract: A valve means having at least one valve whose housing is longitudinally divided and comprises housing bodies arranged together alongside one another in a parting region. Cavities in the parting region are defined by mutually complementary recesses in the housing bodies placed against each other. The cavities in part form valve ducts and in part are fitted with functional elements. The funcional elements include at least one valve member and at least two electrically operable valve drives serving for the actuation thereof.Type: GrantFiled: August 8, 2000Date of Patent: April 2, 2002Assignee: Festo AG & Co.Inventor: Eberhard Wolter
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Publication number: 20020033195Abstract: A fluid control apparatus comprises lines A1, A2, A3, A4, A5, B1, B2, B3 each removably attached to a substrate 1 by a plurality of brackets 8, 9, 18, 19, 20, and channel communication means 47, 48 which are removable upward.Type: ApplicationFiled: September 7, 2001Publication date: March 21, 2002Inventors: Hideki Fujimoto, Noboru Uzawa, Naoyuki Sato, Michio Yamaji, Shigeaki Tanaka, Yuji Kawano, Yasuyuki Omata, Masakazu Fukui
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Patent number: 6354329Abstract: The invention relates to a maintenance device (1) in which the individual functional modules (3-6) are aligned in a vertical direction and the compressed air flows through them in a vertical direction.Type: GrantFiled: November 29, 2000Date of Patent: March 12, 2002Assignee: J. Lorch Gesellschaft & Co. GmbHInventors: Ludwig Küther, Horst Schöllkopf
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Patent number: RE38034Abstract: A valve manifold having a manifold body with a first face, an opposed, substantially planar second face, and a peripheral wall, a first inlet, a second inlet, a first drain port, and a second drain port being formed in the first face, a first outlet and a second outlet being formed in the second face, there being a first, fluid communication pathway/valve for controlling fluid flow between the first outlet and the second outlet, a second, fluid communication pathway/valve for controlling fluid flow between the first inlet and the first outlet, a third, fluid communication pathway/valve for controlling fluid flow between said first drain port and said first outlet, a fourth, fluid communication pathway/valve for controlling fluid flow between the second inlet and the second outlet, a fifth, fluid communication pathway/valve for controlling fluid flow between the second drain port and the second outlet, flow paths opening into the outlets sloping away from said second face.Type: GrantFiled: October 20, 2000Date of Patent: March 18, 2003Assignee: Keystone International Holding Corp. Tyco Flow Control, Inc. Successor in InterestInventor: Alan F. Chou