Abstract: A purging station with a substrate container receiving zone having at least one upwardly extending purging nozzle. The nozzle has a circular engaging lip. The substrate container has support means for at least one substrate and a purge port assembly that includes an externally facing sealing flange facing downward from the container. The sealing flange has a central aperture and a cantilevered flange portion that engages with the circular engaging lip of the nozzle. The weight of the substrate container on the nozzle carried by the canilevered portion of the flange causes bending of the flange for a resilient soft seal.

Abstract: A substrate container has a container main body to contain a substrate and a check valve which has a cylindrical housing and a valve disc installed in the housing and controls gas flowing from and to the interior and the exterior of the container main body, and is formed by inserting the housing into a through-hole of the container main body. When an end of the valve located inside the container main body is defined as a front end, a check valve has a fixing ring that is mounted on the rear end side in the manner of being rotatable relative to the housing and fixes the housing to the container main body from rearward, and the housing has a first housing installed on the front end side and a second housing inserted into the first housing at the front end and attached to the first housing.

Abstract: A curtain nozzle is located above an opening portion (10) in a FIMS. A gas curtain formed of inert gas for closing the opening portion is formed. A cover is so provided as to cover a part of the curtain nozzle so as to prevent peripheral gas around an opening of the curtain nozzle from being involved in the gas curtain of the inert gas emitted from the curtain nozzle.

Abstract: A fuel filling kit 10 includes a filling nozzle capable of being inserted into an opening of a fuel cartridge, a filling vessel capable of filling liquid fuel reserved in the inside thereof into the fuel cartridge through the filling nozzle, and an opening sealing sheet for sealing the opening. The opening sealing sheet has a methanol blocking portion having a resisting property to liquid fuel and a sticking portion capable of being attached to the fuel cartridge.

Abstract: A carrier comprises an enclosure, a cabinet and at least one substrate holder. The enclosure comprises a door. The cabinet is coupled to the carrier. The cabinet comprises at least one valve and contains at least one reduction fluid. The substrate holder is disposed within the enclosure to support at least one substrate.

Abstract: A ventilation assembly for a machine for the preparation of radiopharmaceuticals. The ventilation assembly includes a suction apparatus and release apparatus for generating a circulation of air within a vacuum dispensing chamber, a product filling calibrator accommodated in the dispensing chamber and presenting a cavity accommodating a container to be filled with radiopharmaceutical, and a suction conduit adapted to connect a bottom portion of the accommodating cavity to the suction apparatus for creating a one-way flow in the accommodating cavity. Also, a machine that includes the ventilation assembly.

Abstract: A gas filling apparatus used to fill a photomask box with gas such as nitrogen or other inert gas. The gas filling apparatus of the present invention has a gas filling chamber provided with a plurality of first pillared elements, a plurality of second pillared elements, at least one gas inlet, at least one gas outlet, and a plurality of clamping elements; wherein the first pillared elements are used to couple with the recesses on a cover member of the photomask box, the second pillared elements are used to prop against the peripheral of a cover member of the photomask box, and the clamping elements respectively prop against two opposite sides of the cover member of photomask box, whereby the gas inlets and the gas outlets are respectively coupled with the through holes formed on the lower cover member of the photomask box and the gas can be filled into and exhausted from the photomask box.

Abstract: A curtain nozzle is located above an opening portion (10) in a FIMS. A gas curtain formed of inert gas for closing the opening portion is formed. A cover is so provided as to cover a part of the curtain nozzle so as to prevent peripheral gas around an opening of the curtain nozzle from being involved in the gas curtain of the inert gas emitted from the curtain nozzle.

Abstract: The gas fill device for multiple pane windows includes a tube installed through the peripheral spacer bar between two glass panes in an insulated glass assembly for a window, door glass, skylight, or the like. An elbow is pivotally attached to the external end of the tube. A supply of an inert, insulating gas may be attached to the elbow to refill the space between the two panes with the insulating gas, as needed. Two such tubes may be installed in each multiple pane window assembly, one to refill the space with insulating gas and the other to vent air from the space to the atmosphere as the space is refilled with the insulating gas. When the multiple pane window has more than two panes, the tube may be branched and supplied through a common elbow.

Abstract: A shoe ventilation system for footwear that includes a shoe and a shoe ventilation device. The shoe includes a fitting for connecting to a pressurized air or gas source, such as refrigerated air from a refrigeration source, and the shoe ventilation device includes a fitting to connect to the shoe and a user-actuated valve for controlling the flow of air or gas.

Abstract: A curtain nozzle is located above an opening portion (10) in a FIMS. A gas curtain formed of inert gas for closing the opening portion is formed. A cover is so provided as to cover a part of the curtain nozzle so as to prevent peripheral gas around an opening of the curtain nozzle from being involved in the gas curtain of the inert gas emitted from the curtain nozzle.

Abstract: An enclosure is filled with a filling gas according to the disclosed method. An enclosure is provided having an interior, a width, a height, a thickness, and fluid filling and exit holes fluidly communicating with the interior. Filling of the enclosure is commenced by directing a flow of the filling gas at a filling flow rate into the fluid filling hole. An oxygen concentration of gas exiting the fluid exit hole is sensed. The filling of the enclosure is stopped when the sensed oxygen concentration reaches a threshold concentration, wherein the threshold oxygen concentration and/or the filling flow rate are selected by a Decision Support Tool based upon the width, height, and/or the thickness.

Abstract: A curtain nozzle is located above an opening portion (10) in a FIMS. A gas curtain formed of inert gas for closing the opening portion is formed, and at the same time, the inert gas is also supplied to an inside of a FOUP. Here, the direction of supply of the inert gas supplied to the inside of the FOUP is such that it does not have a flow component directing toward the gas flow forming the gas curtain. The above-mentioned structure prevents increase over time in a partial pressure of oxidizing gas in the FOUP fixed by a FIMS system in an open state.

Abstract: The invention relates to a device for minimizing the oxygen content in containers to be filled, wherein the containers can he provided with a displacement medium by means of a feed unit (20), the displacement medium displacing oxygen from said container before closing the same, wherein the feed device (20) comprises at least one medium feed channel, by means of which the displacement medium can be introduced into the respective container and which is at least partially a component of a filling device (26), by means of which the respective container can be filled. The filling device (26) has a filling mandrel (17) comprising a filling channel (28), from which the respective media feed channel extends in a separated manner, and the filling mandrel (17) has at least one further medium transport channel.

Abstract: A method and apparatus for recharging depleted tennis balls that uses compressed carbon dioxide. A recharge pressure vessel including a cylinder with a closed end and a spaced apart open end with a connecting wall forming a charging chamber. A pressure port proximate the open end permits gas entry and exit for charging. The chamber may be filled with any number of discharged tennis balls and then is sealed and charged with high pressure heavy molecular weight gas such as carbon dioxide. The vessel is then agitated to jostle the inserted balls and within 4 to 5 days, the balls will become fully pressurized and the pressure may be released and the recharged balls remove from the vessel.

Abstract: It is an object of the present invention to easily and securely perform the removal operation of contaminant or the like from a wafer housed in a FOUP. To achieve the object, a purging apparatus of the present invention removes contaminant or the like from a wafer by moving a gas supply nozzle along a direction in which wafers are superimposed at the front of an opening while a lid of the FOUP is separated from a body and spraying clean gas on each wafer from the gas supply nozzle.

Abstract: An in-vehicle hydrogen storage apparatus has a hydrogen gas filling passage connected from a hydrogen gas filling port up to the storage device that stores a hydrogen gas to be supplied to a fuel cell, and an odorizing agent supplying device that supplies an odorizing agent to hydrogen gas in at least one of the inside of the storage device and the inside of the hydrogen gas filling passage.

Abstract: A method and system for cleaning containers being transposed through a container cleaning line, including an open-ended housing, a predetermined container flow path defined by the line of moving containers traversing the enclosure defined by the housing longitudinally, a first set of ionizing air nozzles mounted within the housing for directing ionized compressed air toward the containers in the container flow path, with at least one of the nozzles directing air flow into an open side of each container as it passes the nozzle and a second set of high velocity air nozzles mounted within the housing for directing high velocity compressed air toward the container flow path, the second set of high velocity nozzles being disposed along a direction essentially parallel to the container flow path with at least one of the nozzles flows directing high velocity air flow into the open side of each container as it passes the nozzle. Nozzle guards are provided to prevent contact between the containers and the nozzles.

Abstract: A substrate container has a container main body to contain a substrate and a check valve which has a cylindrical housing and a valve disc installed in the housing and controls gas flowing from and to the interior and the exterior of the container main body, and is formed by inserting the housing into a through-hole of the container main body.

Abstract: An air separation system and method wherein the outlet of a primary air separation module (one or more modules or bundles of fiber membranes) is split into two flow paths, a low flow path and a high flow path. The outlet of a secondary air separation module (one or more modules or bundles of fiber membranes) is split into two flow paths, a mid flow path and a high flow path, the latter being joined with the high flow of the primary air separation module. Flow along the primary low flow passes through a low-flow orifice, flow along the secondary mid-flow path passes through a mid-flow orifice, and flow along the high flow paths of both the primary and secondary air separation modules is joined together for passage through a shutoff valve and a high flow orifice. This configuration allows for three different flow modes of operation.

Abstract: A device and a method for filling with a gas other than air an insulating glazing unit composed of at least two glass panes and at least one spacer frame, comprising a movable and a fixed bed. The fixed bed is provided with retractable suckers suitable to capture a lower flap of a glass pane and move therewith with a motion of retraction with respect to the movable bed, such as to provide straightening of the lower flap of the glass pane.

Abstract: A method and apparatus to remove vapor from a storage tank comprising introducing a stream of gas into the storage tank to cause mixing of the vapor within the tank. The stream of gas is preferably introduced into the storage tank through a gas nozzle that increases the velocity of the gas. Furthermore, the gas nozzle may have a fixed or variable orientation that introduces the stream of gas to flow into a region of the storage tank to prevent retention of the vapor in that region. A mixture of the vapor and the gas is withdrawn from the storage tank through an outlet port and provided to an abatement unit, such as a condenser or burner. Where the abatement device is a condenser, the gas and any uncondensed vapor may be returned to the storage tank through the gas nozzle, or through a second gas nozzle.

Abstract: The present invention is directed to an apparatus for transferring a liquid from a source container to a destination container including a liquid transfer mechanism; at least one unidirectional valve preventing backflow into the source container; a source needle, inserted into a sealed closure of the source container, withdrawing the liquid from the source container; a destination needle, inserted into a sealed closure of the destination container, depositing the liquid into the destination container; an inert gas container supplying an inert gas to the source container; and at least one vent check valve releasing pressure from at least one of the containers when the pressure in the container exceeds a predetermined pressure limit. The present invention transfers liquids such as wine from an original sealed container into various new containers under controlled conditions without compromising the original composition of the liquids.

Abstract: In order to easily and surely remove contaminants or the like from wafers stored in a pod (FOUP), a gas supply pipe is located above an opening portion in a FIMS system. A clean gas is blown to the upper surfaces of the wafers stored in the inner portion of the pod through the gas supply pipe to remove the contaminants or the like from wafers.

Abstract: A container filling plant for filling containers comprising a plastic material with a filling material and a method of operation thereof. The container filling plant has at least one treatment device having a source of a treatment agent, wherein at least one pulse of the treatment agent is configured to be heated to treat the inside surface of a container without destructive effects on the container.

Abstract: A shoe ventilation system for footwear that includes a shoe and a shoe ventilation device. The shoe includes a fitting for connecting to a pressurized air or gas source, such as refrigerated air from a refrigeration source, and the shoe ventilation device includes a fitting to connect to the shoe and a user-actuated valve for controlling the flow of air or gas.

Abstract: A source liquid supply apparatus and method that avoids leaving source liquid-and/or cleaning fluid-derived residues in the vicinity of the connection region between the source liquid feed conduit and the source tank. A flow-switching mechanism is attached to the source tank of a source liquid supply apparatus. This flow-switching mechanism has a first port connected to the discharge port conduit of the source tank, a second port connected to a feed conduit, and a third port connected to an exhaust conduit. The first port can be closed by a valve member on a diaphragm disposed within a common compartment while communication is maintained between the second and third ports. A cleaning fluid source and a purge gas source are connected to the feed conduit. Purge gas and cleaning fluid fed into the feed conduit are discharged from the second and third ports and through the exhaust conduit.

Abstract: A carrier comprises an enclosure, a cabinet and at least one substrate holder. The enclosure comprises a door. The cabinet is coupled to the carrier. The cabinet comprises at least one valve and contains at least one reduction fluid. The substrate holder is disposed within the enclosure to support at least one substrate.

Abstract: An inerting system and method characterized by a primary air separation module configured to communicate with an upstream source of pressurized air at elevated temperature for production of a primary downstream flow of nitrogen-enriched air to be delivered to a space to be inerted; a secondary air separation module configured to communicate with the upstream source of pressurized air at elevated temperature for production of a supplemental downstream flow of nitrogen-enriched air to be delivered to a space to be inerted when high nitrogen-enriched airflow is desired during a high flow period; and a flow controller configured to provide a warming flow through the secondary air separation module to heat the secondary air separation module to above ambient temperature during a warming period other than the high flow period.

Abstract: A substrate container includes an enclosure and an access structure formed in the enclosure and providing fluid access through the enclosure to an interior of the substrate container. The access structure includes an opening and an inner surface. A grommet is situated against the inner surface of the access structure.

Abstract: A device and method is provided for the inline storage of water during pressurized use. The device provides a one-way valve associated with an incoming attachment point of a water tank assuring that water does not flow back through the incoming attachment point. The tank is constructed with two hemispherical caps at the ends connected by a tubular body providing structure when pressurized. The incoming attachment point is connected with the tank near the top preventing backpressure. An outgoing attachment point is connected with the tank as well.

Abstract: A purgeable manifold system for the movement of low vapor pressure chemicals that may be embodied in a variety of forms. In one embodiment, a container for storing the low vapor pressure chemical has a plurality of ports; a first manifold detachably connects a first port to a source of gas, vent, or vacuum by flow communication through a first diaphragm valve; a second manifold detachably connects a second port to a source of gas, vent, vacuum, or low vapor pressure chemical, or to a process tool by flow communication through a second and a third diaphragm valve, or alternatively detachably connects a third port to the same source by flow communication through a fourth and the third diaphragm valve; and a third manifold, detachably connects a fourth port to a source of gas, vent, or vacuum by flow communication through a fifth diaphragm valve.

Abstract: An apparatus and method for prevention of corrosion with the cooling system of an internal combustion engine is disclosed. The apparatus includes a pressurized inert gas source and a fluid delivery system whereby the gas is dispersed within the cooling system to expel corrosion inducing fluids such as oxygen and water vapor. Methods of use are also disclosed.

Abstract: A system for automatically purifying solvents has a solvent holding portion having at least one solvent stored therein, a filter holding portion having at least one filter tube located therein, a peripheral device, and a computer. The computer has a memory and a processor, and the processor is configured by the memory to perform the steps of: receiving an electronic selection of a solvent to be automatically purified; automatically causing the flow of the electronically selected solvent from the solvent holding portion to the at least one filter tube; and automatically filling a collection vessel with the purified solvent.

Abstract: A container having two ports; first block valve having two diaphragm valves, each valve having a valve seat side and a diaphragm side, each valve seat side faces the other valve seat side, and connected to the first end of a dispense conduit, one diaphragm side connected to a first port, and another diaphragm side connected to vent and or vacuum; a second valve connected to a push gas conduit and a second port.

Abstract: A substrate holding part in a substrate processing apparatus includes a fixing table having a suction pipe and a supply pipe, and a holding member having atmosphere flow passages for vacuum-holding a substrate. The holding member is placed on the fixing table. The suction pipe is connected through a pipe to a compressor, and the supply pipe is connected through a pipe and a solenoid valve to a gas supply part. When the substrate holding part holds a substrate, the compressor sucks an atmosphere through the suction pipe to cause the holding member to vacuum-hold the substrate. When the substrate holding part releases the substrate, a gas is supplied from the gas supply part through the supply pipe by opening the solenoid valve while the suction through the suction pipe continues. The substrate holding device and the substrate processing apparatus suppress the deposition of particles on the substrate.

Abstract: In a fuel tank installation including a fuel tank with an expansion volume, a filler neck connected to the fuel tank for refueling, a fill vent line for venting the fuel tank during refueling and an operating vent line for venting the expansion volume of the tank, electrically operable valve means for blocking the operating vent line are arranged in a penetration area of the fuel tank where the operating vent line extends through the fuel tank.

Abstract: The invention provides methods of producing and servicing insulating glass units. Methods are provided for reducing the pressure differential on an IG unit, for changing the interior pressure within an IG unit, and for changing the gaseous interior composition within an IG. These methods can be practiced by forming a hole through at least one of the panes of an IG unit, and flowing gas through the hole. One method includes forming a hole through one of the panes of an IG unit, flowing gas through the hole, and sealing the hole with an optically clear sealant (e.g., a transparent resin). A number of methods for producing IG units are also provided. Further, several kits are provided for servicing IG units. There is also provided a method for detecting leaks in an IG unit by flowing an opaque gas into the unit and observing the unit to detect leaks of the opaque gas therefrom.

Abstract: A system for strengthening containers in a high-speed filling operation is disclosed. The system includes a solenoid-driven injector apparatus positioned at an angle to the containers being filled. The injector apparatus includes a chamber connected via an intake line to a supply tank. A solenoid is adapted to open an injector valve, allowing liquefied gas within a chamber to forcibly flow through an outflow line into the container. The solenoid is also adapted to close the injector valve, thereby blocking the liquefied gas within the chamber from entering the outflow line. The injector apparatus also includes a heater positioned adjacent to the outflow line and an adjustment device for the injector valve.

Abstract: A canister guard for preventing liquid contamination of an oulet to a canister containing liquid. The canister guard may include baffles extending from a sidewall. Additionally, the canister guard may be configured to be replacable or for retrofitting to conventional liquid chemical containing canisters.

Abstract: A FOUP having semiconductor wafers received therein is transferred to a loading port and then the door of the FOUP is fixed and removed by a FIMS door and then the semiconductor wafers are taken out of the shell of the FOUP and then a predetermined manufacturing processing is performed to the semiconductor wafers. After performing the manufacturing processing, the semiconductor wafers are returned into the shell and the FIMS door is returned to a closed position and the shell is retracted about 50 mm to 65 mm to form a gap between the FIMS door and the shell. Then, purge gas is introduced from a gas introduction pipe arranged above the loading port on the left and right sides in a slanting forward direction of the FIMS door into the shell to replace the atmosphere in the shell with the purge gas.

Abstract: A fuel storage and dispensing system reduces the emission of harmful volatile organic compounds. The system includes at least one storage tank, an air exhaust port, at least one fuel dispenser, a fuel dispensing nozzle, a rigid, fuel dispensing spout, a boot, a pressure relief chamber, a filter system, and at least one pump. The rigid, fuel dispensing spout further defines a non-coaxial fuel tube. The boot is configured to maintain a sufficient level of vacuum within the fuel storage and dispensing system. The boot is further configured to prevent fresh air from entering the fuel dispensing nozzle. The system may further include a pressure relief chamber that is effective in compensating for high temperature pressure build up in a vapor assist hose, a fuel dispensing nozzle and spout assembly, a vapor recovery boot assembly, and a Venturi shut-off assembly for a fuel dispensing nozzle and spout.

Abstract: A liquid passage 4 for filling which communicates with a liquid supply piping 6 for filling is formed within a valve housing 2 and carries a filling nozzle 31 at its lower end. The liquid passage 4 is opened or closed by a liquid valve. A packing 38 which seals the mouth of a vessel B, a cylinder 42 which elevates the packing 38, a flow meter 33 which detects a filled content of the liquid which is filled into the vessel B, and an exhaust passage 44 formed in the valve housing 2 are provided. The exhaust passage 44 has an opening disposed toward the vessel which is disposed outside an opening of the filling nozzle 31, and the opening of the filling nozzle 31 is maintained above the elevation of the liquid level which is filled into the vessel B during the filling operation. The filling valve assures a sanitary excellence and is usable with vessels B of differing sizes and shapes.

Abstract: According to certain embodiments of the present invention, there is disclosed herein a method and system of recovering concrete which includes admitting a concrete slurry to a tank, pressurizing the tank with a fluid under pressure, discharging through a discharge line the pressurized fluid-slurry from the tank, cleaning the tank by admitting a cleaning liquid into the tank after discharging fluid-slurry therefrom, and discharging the cleaning liquid from the tank through the discharge line for cleaning purposes.

Abstract: A system for strengthening containers in a high-speed filling operation is disclosed. The system includes a solenoid-driven injector apparatus positioned at an angle to the containers being filled. The injector apparatus includes a chamber connected via an intake line to a supply tank. A solenoid is adapted to open an injector valve, allowing liquefied gas within a chamber to forcibly flow through an outflow line into the container. The solenoid is also adapted to close the injector valve, thereby blocking the liquefied gas within the chamber from entering the outflow line. The injector apparatus also includes a heater positioned adjacent to the outflow line and an adjustment device for the injector valve.

Abstract: A load port of a semiconductor manufacturing apparatus includes a plurality of kinematic coupling pins and a plurality of sensors integrated with the pins. The contacts of the sensors have upper portions that protrude from the pins. Thus, when a cassette is place on the load port, the sensors can reliably sense whether the cassette is resting properly and/or can determine whether the cassette contains wafers. Once such determinations are made in the positive, a command signal is issued that serves to load the wafers into a chamber of the manufacturing apparatus.

Abstract: A container for use in a processing chamber to lessen the amount of contaminant particles found within the chamber after processing. The container fits closely within the chamber and includes ports for a gas conduit and a vacuum conduit. The container may be locked to the chamber through a locking mechanism and a recess in the container. The container may be guided into the chamber with a plurality of chamfers. The container may be used in inductively coupled plasma chambers, electron cyclotron resonance chambers, and chambers capable of receiving microwaves.

Abstract: A cylinder containing gas has a valve and is connected to a delivery side through a filling pipe, a primary pipe, a first air-operated valve, a pressure reducing valve, a secondary pipe, and a second air-operated valve. Inert gas flows into the primary pipe through an air-operated valve. The primary pipe is connected to a vacuum generator through an air-operated valve and a pipe. Gas remaining in the primary pipe is purged as exhaust gas by automatically repeating leaving-pipe-in-pressurized-state purge for pressurizing the inside of the primary pipe by the inert gas and leaving the pipe in this state for 2 to 10 minutes and evacuating the pipe for 20 seconds. Gas remaining in the primary pipe is purged with high-efficiency, and the vacuum generator is stopped while the inside of the primary pipe is pressurized in the leaving-pipe-in-pressurized-state purge and the just-before-replacement purge.

Abstract: A system for strengthening containers in a high-speed filling operation is disclosed. The system includes a solenoid-driven injector apparatus positioned at an angle to the containers being filled. The injector apparatus includes a chamber connected via an intake line to a supply tank. A solenoid is adapted to open an injector valve, allowing liquefied gas within a chamber to forcibly flow through an outflow line into the container. The solenoid is also adapted to close the injector valve, thereby blocking the liquefied gas within the chamber from entering the outflow line. The injector apparatus also includes a heater positioned adjacent to the outflow line and an adjustment device for the injector valve.

Abstract: A system and method for evacuating potential wafer-corroding and contaminating residual process gases from the interior of a semiconductor wafer pod before, after or both before and after a process is performed on the wafers. The residual process gases are first evacuated from the wafer pod, which is next charged with a fresh supply of inert gas. The system is adapted to evacuate and charge the wafer pod as the wafer pod typically rests on a load port of a SMIF prior to transfer of the pod to another destination in the semiconductor fabrication facility, prior to internalization of the wafers into a processing tool, or both.