Abstract: An active electroadhesive cleaning device or system includes electrode(s) that produce electroadhesive forces from an input voltage to adhere dust or other foreign objects against an interactive surface, from which the foreign objects are removed when the forces are controllably altered. User inputs control the input voltage and/or designate the size of foreign objects to be cleaned. An active power source provides the input voltage, and the interactive surface can be a continuous track across one or more rollers to move the device across a dirty foreign surface. Electrodes can be arranged in an interdigitated pattern having differing pitches that can be actuated selectively to clean foreign objects of different sizes. Sensors can detect the amount of foreign particles adhered to the interactive surface, and reversed polarity pulses can help repel items away from the interactive surface in a timely and controlled manner.

Abstract: A cleaning device with electrostatic sheet auto rolling, comprising: a frame; a power gear set; a roller set, having a first roller, a second roller, a paper feeder roller; and a paper collector roller, arranged axially parallel with each other; and a drive shaft; wherein, the paper feeder roller is coaxially received inside a roller of paper; the first, the second and the paper collector rollers are driven to rotate by the power gear set; the paper collector roller is disposed radial to the paper feeder roller at a side thereof while enabling the first and the second rollers to be arranged therebetween; the drive shaft is enabled to move relative to the frame and perpendicular to the axial direction of the drive shaft; the drive shaft is arranged protruding out of the frame; and the drive shaft, the first and the second rollers are arranged parallel to each other.

Abstract: A system for cleaning a fiber cap including a first fixture configured to hold the fiber cap, the fiber cap having an internal cavity with an opening therein. The fiber cap also includes a first axis generally aligned with the central axis of the fiber cap and internal cavity, a second axis orthogonal to the first axis, and a third axis orthogonal to the first and second axes. The system further includes a second fixture configured to hold a particulate collecting member (1) to receive and hold an electrical charge and (2) for insertion into the opening of the fiber cap.

Abstract: When the electrically driven fan (14) of a vacuum cleaner is driven, air containing dust is drawn into the cleaner main body (1) through a hose (7) connected to a hose socket (8) and is exhausted into the outside of the cleaner main body (1) through an exhaust port (1b) via first and second suction passageways (10, 13). Disposed outside the first suction passageway (10) is an ion generator (23), it being arranged that plus and minus ions generated in the ion generator (23) are fed to the air stream flowing in the first suction passageway (10). Since the plus and minus ions kill floating germs in the air stream, the exhaust can be purified.

Abstract: The present invention relates to a separating apparatus for separating particles from a fluid flow. Particularly, but not exclusively, the invention relates to a vacuum cleaner having such a separating apparatus for removing dust particles from a dust laden airstream. The separating apparatus includes a first cyclonic cleaning stage including at least one cyclone, and an electrostatic filter located downstream of and in fluid communication with the at least one cyclone, wherein at least a portion of the electrostatic filter is located longitudinally through the separating apparatus, at least a portion of the first cyclonic cleaning stage being arranged around the electrostatic filter.

Abstract: The steering and cleaning mechanism for reflector arrays includes at least one fixed rail and a movable rail slidably movable along the at least one fixed rail. The at least one fixed rail is disposed adjacent a plurality of reflectors arranged in an array. A positioning/cleaning carriage is disposed on the movable rail and slidably movable thereon. The positioning/cleaning carriage includes a positioning module and a cleaning module. The positioning/cleaning carriage is positioned over a select reflector by the combined movement of the movable rail and the carriage along the movable rail, Once positioned, the positioning module and the cleaning module are selectively actuated to both orient the target reflector in the desired position and to clean the same.

Abstract: An electroadhesive cleaning device or system includes electrode(s) that produce electroadhesive forces from an input voltage to adhere debris against an electroadhesive surface, from which the debris is removed when the forces are controllably modified. Controlling the input voltage may designate the size of debris to be cleaned. A power source provides the input voltage, and the electroadhesive surface can be a continuous track across one or more rollers to move the device across a dirty foreign surface. Electrodes can be arranged in an interdigitated pattern having differing pitches that can be actuated selectively to clean debris of different sizes. Sensors can detect the amount of debris adhered to the electroadhesive surface, and reversed polarity pulses can help repel items away from the electroadhesive surface in a controlled manner.

Abstract: An aspect of the invention provides a defect inspection apparatus being able to accurately inspect a micro foreign matter or defect at a high speed for an inspection target substrate in which a repetitive pattern and a non-repetitive pattern are mixed. In a foreign matter anti-adhesive means 180, a transparent plate 187 is placed on a placement table 34 through a frame 185. In the foreign matter anti-adhesive means 180, a shaft 181 which is rotatably supported by two columnar supports 184 fixed onto a base 186 is coupled to a motor 182 by a coupling 183. The shaft 181 is inserted into a part of a frame 185 between the two columnar supports 184 such that the frame 185 and the transparent plate 187 are turnable about the shaft 181. Therefore, the whole of the frame 185 is opened and closed in a Z-direction about the shaft 181, and a wafer 1 on the placement table 34 can be covered with the frame 185 and the transparent plate 187.

Abstract: A transparent electrodynamic screen (EDS) enables automatic removal of dust to protect and enhance performance of solar collectors and similar components. A pattern of transparent conductive electrodes are deposited over a glass or polymer outer surface of a solar collector, and embedded under a thin, transparent dielectric fluoropolymer film or silicon dioxide coating. When energized by three-phase voltages at frequencies in the range 5 to 20 Hz, the electrodes produce an oscillating electric field and a traveling electrodynamic wave that charges the particles on the surface and exerts coulomb and dielectrophoretic forces to lift the dust from the surface and transport it to an edge of the collector, thereby clearing the screen. The EDS can be incorporated in the collector in an integrated way during manufacture or retrofitted to existing conventional collectors.

Abstract: A getter layer is deposited on an electrode layer on one side of a substrate. The electrode layer is configured to provide a first electrode to hold charges in the getter layer positioned between the first electrode and a second electrode. The getter layer may include a polymer. In one embodiment, an optically dark layer in a reflection mode or in a transmission mode is deposited on other side of the substrate. In one embodiment, one or more optically reflective films are deposited on a second side of the substrate. In one embodiment, a getter reticle having a getter layer on an electrode layer on a substrate is moved toward a surface. The getter layer of the getter reticle is attached to the surface by an electrostatic force. Contaminants are transferred from the surface to the getter layer by the electrostatic force.

Abstract: A cleaning device includes a cleaning unit including a shaft portion and contactors, the shaft portion being rotatably provided, the contactors being provided along an outer periphery of the shaft portion so as to contact a member to be cleaned, the contactors being formed of conductive fiber, the cleaning unit cleaning the member to be cleaned by rotating and by electrostatically attracting dirt adhered to the member to be cleaned. The contactors satisfy the following condition: 0<fiber density (kF/inch2)×interference (mm) with respect to the member to be cleaned/fineness (denier)<48.

Abstract: A plate with a static charge on a surface is used to clean a brush. The plate uses both static charge and mechanical force to remove particles from the surface of the brush to increase the useful life of the brush.

Abstract: A device includes a jig having a plate with through-holes formed therein and also having a frame formed on the plate so as to be able to accommodate a plurality of semiconductor chips in spaced relationship, a foreign matter capture member having a first charge section with a first flat surface and a second charge section with a second flat surface, the second charge section being insulated from the first charge section, charging means for positively charging the first flat surface and negatively charging the second flat surface, and sliding means for causing either the jig or the foreign matter capture member to slide relative to the other in such a manner that the through-holes of the jig face and are spaced a predetermined distance from the first and second flat surfaces. The through-holes are formed in different regions defined and surrounded by the frame.

Abstract: Provided is a cleaning device having a compact structure. A recovery unit (17) is configured such that dust collection boxes (76, 77) are disposed with respect to a cleaning brush (6) and a metallic roller (7), respectively. A cleaning blade (9) is fixed to a blade holder (79) via a bolt (78). When the recovery unit (17) is incorporated in a frame unit, the recovery unit (17) is moved in a predetermined direction so as to be brought into contact with a positioning section (14Bbb) of a side plate 14B of the frame unit (11). When the recovery unit (17) is moved, a fixing bolt (85) is loosened so that a straight portion (86a) of a fixed washer (86) is aligned with the vertical direction, and then, the fixing bolt (85) is tightened so that the recovery unit is fixed.

Abstract: A web cleaning system includes one or more conductive electrostatic cleaning members that may be grounded or electrically biased, and form an electric field. The conductive cleaning member opposes a conductive backing member that may be grounded or electrically biased. The conductive cleaning member contacts the web as it translates through the cleaning system, and charged debris on the web is affected by the electric field formed by the cleaning member.

Abstract: Provided is a static eliminator with dust removal feature. The static eliminator includes an ion generator, a dust-removing main body and a dust-collecting device. The dust-removing main body has a workpiece-passing channel passing through the dust-removing main body. A dust-scraping member is disposed on a sidewall of the workpiece-passing channel. A blow vent of the ion generator communicates with said workpiece-passing channel and faces to the dust-scraping member. An inlet end of the dust-collecting device communicates with the workpiece-passing channel.

Abstract: The present invention relates to a cleaning device (100) for dry cleaning, in particular dust removal, in particular of irregular objects (150) such as miniature models, drinking vessels and the like, comprising a hollow body (110) having a first opening (120) for introducing the object (200) into the hollow body, wherein the hollow body (110) is equipped on an inner face (111-114) with dry cleaning means (130).

Abstract: Provided is a cleaning device having a compact structure. A recovery unit (17) is configured such that dust collection boxes (76, 77) are disposed with respect to a cleaning brush (6) and a metallic roller (7), respectively. A cleaning blade (9) is fixed to a blade holder (79) via a bolt (78). When the recovery unit (17) is incorporated in a frame unit, the recovery unit (17) is moved in a predetermined direction so as to be brought into contact with a positioning section (14Bbb) of a side plate 14B of the frame unit (11). When the recovery unit (17) is moved, a fixing bolt (85) is loosened so that a straight portion (86a) of a fixed washer (86) is aligned with the vertical direction, and then, the fixing bolt (85) is tightened so that the recovery unit is fixed.

Abstract: The invention relates to textiles, reservoirs, or films which may be switchably rendered hydrophilic or hydrophobic for liquid wicking, repelling, moving, holding, absorbing, drying, wetting, dispensing, and other means of electrically manipulation of liquids.

Abstract: Described is an auxiliary cleaning tool assembly of a cleaning apparatus, the auxiliary cleaning tool assembly including a body part connected to a house and having at least one passage, a brush unit rotatably provided on the body part, a nozzle part configured to remove dust attached on the brush unit, and a power transferring part configured to convert an air flow of air passing through the at least one passage of the body part to a rotary force of the brush unit.

Abstract: A method for cleaning a component in a substrate processing apparatus including a processing chamber, foreign materials being attached to the component, at least a part of the component being exposed inside the processing chamber, and the substrate processing apparatus being adapted to load and unload a foreign material adsorbing member into and from the processing chamber. The method includes loading the foreign material adsorbing member into the processing chamber; generating a plasma nearer the component than the foreign material adsorbing member; extinguishing the plasma; and unloading the foreign material adsorbing member from the processing chamber, wherein the generation and the extinguishment of the plasma are repeated alternately and the foreign material adsorbing member has a positive potential at least during the extinguishment of the plasma.

Abstract: A cleaning device with electrostatic sheet auto rolling, comprising: a frame; a power gear set; a roller set, having a first roller, a second roller, a paper feeder roller; and a paper collector roller, arranged axially parallel with each other; and a drive shaft; wherein, the paper feeder roller is coaxially received inside a roller of paper; the first, the second and the paper collector rollers are driven to rotate by the power gear set; the paper collector roller is disposed radial to the paper feeder roller at a side thereof while enabling the first and the second rollers to be arranged therebetween; the drive shaft is enabled to move relative to the frame and perpendicular to the axial direction of the drive shaft; the drive shaft is arranged protruding out of the frame; and the drive shaft, the first and the second rollers are arranged parallel to each other.

Abstract: Macroscopic volumes of fluid can be moved across a surface, including windshields, without mechanical assistance. Insulated electrodes, which for windshields and windows are preferably transparent, are embedded in the surface of the windshield. Varying voltages are supplied to the electrodes to generate intense surface fringe electric fields moving in a given direction across the surface. The intense surface fringe electric fields exert strong electrical forces on the polar molecules of the fluid. These forces move the fluid in specific directions dependent on the geometry of the electrode array and the manner in which voltage is applied to each electrode within an array of electrodes.

Abstract: A walk-up, user accessible cleaning workstation having a sensor and ionization nozzle arranged on a frame. The frame mounts the sensor in a fixed position to the nozzle in operative proximity to a cleaning area. The frame partially encloses the nozzle's electrode. The sensor detects manual workpiece placement into the cleaning area to open the gas valve and activate the power supply. The panel deflects dust flying off the workpiece from reaching the user's face. The workstation improves safety in the cleaning and destaticizing of ophthalmic lenses.

Abstract: An imaging device for automatic dust removal is provided. The imaging device may include a glass layer and an electrostatic particle removal system associated with the glass layer. The electrostatic particle removal system may include an induction layer configured to induce a charge to a particle located between the glass layer and the electrostatic particle removal system, a field grid layer configured to provide an electric field for moving the charged particle, and a collector configured to collect the charged particle moved by the electric field.

Abstract: A system for semiconductor wafer manufacturing, comprises a chamber process path for processing the wafer, and a device operable to remove particles from the wafer by electrostatic and electromagnetic methodologies wherein the device is installed in the chamber process path.

Abstract: A cleaning method using a cleaning apparatus having an adhesive sheet, a conductive sheet in contact with a base material of the adhesive sheet, and a pressing member for pressing the conductive sheet onto the adhesive sheet. The pressing member includes a voltage applier, and a pressing force controller which presses the adhesive sheet onto a curved surface of a portion to be cleaned of a vacuum processing apparatus from above the conductive sheet. The method includes pressing the pressing member by a pressing force controlled via the pressing force controller to press the conductive sheet and the adhesive sheet to adhere an adhesive surface of the adhesive sheet to the curved surface of the portion to be cleaned, and applying a voltage to the conductive sheet or applying a voltage having a temporally changed polarity.

Abstract: The invention provides a cleaning apparatus for removing particles attached to the fine roughness on the surface of an insulating body coated on the metal surface of a vacuum processing apparatus.

Abstract: A protective material block including a metal soap, wherein the surface of the protective material block has an X-ray diffraction pattern wherein a ratio (P2/P1) of a maximum peak height (P2) on a surface separation of from 3.6 to 5.0 ? to a maximum peak height (P1) on a surface separation of from 11 to 16 ? not greater than 0.5.

Abstract: An image pickup apparatus which can remove a dust stuck to a surface of an optical member such as a cover glass or an optical filter without damaging the surface of the optical member, and which can take a good image without imaging shadows of the dust stuck to the surface of the optical member. An image pickup apparatus comprises an optical element, an image pickup device, and a drive unit. The drive unit applies voltage to a non-uniform electric field generating device and moving the non-uniform electric field generating device to scan an optical incidence plane of the optical element.

Abstract: There is provided a substrate processing apparatus cleaning method for removing contaminants adhered on a transfer arm. The cleaning method for the transfer arm that transfers a substrate and has an electrostatic chuck includes a voltage applying process for applying, when electrically charged contaminants are adhered on the transfer arm and the substrate is not mounted on the transfer arm, a voltage of the same polarity as that of the electrically charged contaminants to each electrode of the electrostatic chuck, to thereby remove the contaminants adhered on the transfer arm.

Abstract: An image removing method including heating a recording material having thereon an image to a temperature so that the image has a plasticity; pressure-contacting an uppermost stream peeling member with the recording material while the image maintains a plasticity; separating the uppermost stream peeling member from the recording material to transfer at least a portion of the image to the uppermost stream peeling member; and repeating the heating, pressure-contacting and separating steps at least one more time using at least one downstream peeling member, wherein the uppermost stream peeling member has a first outermost layer which does not have a plasticity when being pressure-contacted with the recording material, and at least one of the at least one downstream peeling member has a second outermost layer which has a plasticity when being pressure-contacted with the recording material.

Abstract: A system for semiconductor wafer manufacturing, comprises a chamber process path for processing the wafer, and a device operable to remove particles from the wafer by electrostatic and electromagnetic methodologies wherein the device is installed in the chamber process path.

Abstract: Systems and methods for debris extraction reduce the lifting force on the workpiece through a supply air feature. The supply air feature can be implemented through an extraction nozzle, which has an outer supply duct surrounding an inner exhaust duct. Further reduction of the lifting force can be realized through the use of multiple extraction nozzles which limit exhaust airflow to areas of the workpiece with active laser scribing.

Abstract: The method and apparatus of the embodiments of the present invention employ an in-situ particle decontamination technique that allows for such decontamination while a wafer is a vacuum tool or deposition chamber, thereby eliminating the need for another device for performing decontamination. This in-situ decontamination is effective for particle contamination resulting, for example, from tool resident mechanical component. Furthermore, particle decontamination is performed in the presence of plasma, having a potential for helping to maximize a “self bias” voltage, under RF conditions, and is integrated into the vacuum process.

Abstract: A cleaning method for cleaning a powder container by introducing a cleaning medium into the powder container from a first opening part of the powder container for attaching powder in the powder container to the cleaning medium and discharging the cleaning medium together with the powder from a second opening part situated opposite from the first opening part is disclosed. The method includes a step of releasing the cleaning medium from a position higher than the first opening part of the powder container.

Abstract: A motion picture camera is provided having a film magazine inside of which a film supply reel, from which a motion picture film to be exposed having a supporting layer and a light-sensitive emulsion layer is unwound and moved over a film conveying path past a picture window for picture exposure and a film winding reel are placed, onto which the exposed motion picture film is wound. A device, which serves to remove foreign bodies located on one or both surfaces of the motion picture film, is placed in the film conveying path between the film supply reel inside the film magazine and the picture window.

Abstract: A dust remover for container comprises a holder for holding a plurality of cup-like containers in a stacked state, and air blower for blowing air to the containers in the direction perpendicular to the axis of stacked containers. Furthermore, it is preferable that the air blown from the air blowing means includes ions.

Abstract: The invention provides a cleaning apparatus for removing particles attached to the fine roughness on the surface of an insulating body coated on the metal surface of a vacuum processing apparatus.

Abstract: A walk-up, user accessible cleaning workstation having a sensor and ionization nozzle arranged on a frame. The frame mounts the sensor in a fixed position to the nozzle in operative proximity to a cleaning area. The frame partially encloses the nozzle's electrode. The sensor detects manual workpiece placement into the cleaning area to open the gas valve and activate the power supply. The panel deflects dust flying off the workpiece from reaching the user's face. The workstation improves safety in the cleaning and destaticizing of ophthalmic lenses.

Abstract: Provided are an apparatus for and a method of removing foreign materials from a substrate which reliably remove the foreign materials, eliminate a chance of redeposition of the foreign materials, and are applicable even to large-size substrates. The apparatus for removing foreign materials includes electrostatic chucks (2, 3) forming a substrate chucking surface (4) to which the substrate (1) is attracted; a resin sheet supplying means (9) for supplying a resin sheet (5) to the substrate chucking surface (4); resin sheet collecting means (13) for collecting the supplied resin sheet (5); and a substrate transfer means for transferring the substrate (1). The substrate (1) supplied to the electrostatic chucks (2, 3) by the substrate transfer means is attracted to the substrate chucking surface (4) through the resin sheet (5), and a foreign material (22) deposited on a side of the substrate chucking surface (4) of the substrate (1) is transferred onto the resin sheet (5) and removed.

Abstract: Provided is a method of removing particles on a photomask. The method includes fabricating a photomask formed with a thin film pattern over a transparent substrate; identifying positions of particles on the photomask by inspecting the photomask; and removing the particles using a nanotweezer.

Abstract: When the electrically driven fan (14) of a vacuum cleaner is driven, air containing dust is drawn into the cleaner main body (1) through a hose (7) connected to a hose socket (8) and is exhausted into the outside of the cleaner main body (1) through an exhaust port (1b) via first and second suction passageways (10, 13). Disposed outside the first suction passageway (10) is an ion generator (23), it being arranged that plus and minus ions generated in the ion generator (23) are fed to the air stream flowing in the first suction passageway (10). Since the plus and minus ions kill floating germs in the air stream, the exhaust can be purified.

Abstract: Embodiments of the present invention generally provide apparatus and methods for cleaning a substrate, such as a mask. One embodiment of the present invention provides an apparatus for cleaning a substrate comprising a substrate support configured to receive and support the substrate, a collecting tip connected with an electrostatic power source, wherein the collecting tip is configured to pickup particles on a surface of the substrate using electrostatic force, and an indexing mechanism configured to provide relative movement between the collecting tip and the substrate support.

Abstract: This static electricity and dust removing apparatus has a base box (11) provided with an airflow inlet port (16), and a processing head (23) attached to the base box (11) through a support column (21), wherein a processing space (24) is formed between the airflow inlet port (16) and the processing head (23). Air curtains for isolating the processing space (24) from the outside due to air from a spout of an air spout pipe (33) are formed at a front opening portion (29) and right and left side opening portions (28) of the apparatus. Ionized air generated by an ion generator (42) is spouted into the processing space (24), so that the ionized air is sprayed on matters to be processed which are disposed in the processing space (24) and dust is removed from the matters to be processed.

Abstract: Apparatuses and methods for cleaning test probes used in a semiconductor testing machine of the type having a plurality of test probes configured to contact the surface of a semiconductor wafer to test one or more dies formed thereon. In one embodiment, the apparatus includes a roller-support arm and a cylindrical roller supported by the roller-support arm. The roller has an outer surface comprising a sticky material. Debris on the probes will adhere to the sticky material as roller is rolled across tips of the probes. The probes are thereby cleaned.

Abstract: The present invention provides a cleaning member which can be produced at low cost and which maintains excellent cleaning performance for a long period of time. The cleaning member includes a core member, a lower layer formed through winding a cord member around the core member at the surface thereof, and an upper layer provided on the outer surface of the lower layer. The upper layer is formed of at least one fiber layer made of woven fabric or knitted fabric.

Abstract: A cleaning head for a vacuum sweeper that incorporates a magnetic flux generator that bathes the area of carpet being engaged by the rotating brush beater in the cleaning head with a pulsing magnetic field. The magnetic flux generator disrupts the static attraction between opposing charged small particles and the carpet fibers to which the small particles are attached to allow the brush beater apparatus in the cleaning head to separate the small particles from the carpet fibers. The dislodged small particles, including allergens, bacteria and mold spores, are removed from the carpet in the air stream created by the vacuum sweeper and captured by a micro-filter filtration system. The magnetic flux field is created with the conventional household current that powers the operation of the vacuum cleaner without requiring the generation of high voltages or an electrostatic discharge from the cleaning head.

Abstract: A dust remover which comprises a power supply and an electrode applied with voltage by said power supply. The dust attached to the object of dust removal is removed therefrom by bringing the electrode into contact with the object of dust removal or approaching toward the object of dust removal. The object of dust removal is a conductor and/or an insulator. The voltage applied to said electrode is a pulsed voltage of plus and minus or an AC voltage of plus and minus. Or the voltage is a DC voltage having the same polarity with that of electricity with which the dust is charged, or the voltage is a DC voltage having an opposite polarity to that of electricity with which the dust is charged. The object of dust removal includes at least a ball for “Pachinko”, a car body, a printed board, a metal box or a part thereof, a frame for glasses, a plastic lens, a plastic box or a part thereof, a fiber, a wood, a paper box or a part thereof.

Abstract: A suction unit for use in an electric vacuum cleaner and an electric vacuum cleaner includes a floor nozzle and a mini nozzle detachably secured to the floor nozzle. When a suction head of the mini nozzle is secured to the floor nozzle, an air communication is provided therebetween. Further, the mini nozzle is provided with an ion generating unit.