Abstract: Distillation system having an evaporator/condenser core with heat transfer plates welded together along their edges to form alternate boiling and condensing chambers. Feed liquid is supplied to the boiling chambers through a pair of heat exchangers which preheats the liquid and a steam stripper utilizing ceramic pieces to remove gasses from the liquid. Vapor from the boiling chambers is compressed and delivered to the condensing chambers where it is condensed and gives up its heat to the liquid in the boiling chambers. Pumps positioned between the two heat exchangers draw the condensed product and unvaporized feed liquid containing dissolved solids from the evaporator/condenser and circulate them through the heat exchangers to transfer heat to the feed liquid.

Abstract: A method of concentrating chemicals for semiconductor devices, which includes the steps of heating a sample container by using a high-energy light source, vaporizing the chemicals by injecting a high-temperature gas into the sample container through an injection opening in the sample container and discharging the vaporized chemicals by the pressure of the gas through a gas outlet formed on the sample container. An apparatus of concentrating chemicals for semiconductor devices includes a sample container having a sample-supply window, a gas-injection opening and a gas outlet. A high-energy light source heats the sample container and a gas-supply source supplies the gas through a gas-injection opening in the sample container. A gas-heating device located between the sample container and the gas-supply source heats the gas provided by the gas-supply source.