Abstract: A bridging member extending across a cavity in a semiconductor substrate (e.g. signal crystal silicon) has successive layers--a masking layer, an electrically conductive layer (e.g. polysilicon) and an insulating layer (e.g. SiO.sub.2). A first electrical contact (e.g. gold coated with ruthenium) extends on the insulating layer in a direction perpendicular to the extension of the bridging member across the cavity. A pair of bumps (e.g. gold) are on the insulating layer each between the contact and one of the cavity ends. Initially the bridging member and then the contact and the bumps are formed on the substrate and then the cavity is etched in the substrate through holes in the bridging member. A pair of second electrical contacts (e.g. gold coated with ruthenium) are on the surface of an insulating substrate (e.g. pyrex glass) adjacent the semiconductor substrate. The two substrates are bonded after the contacts are cleaned.

Abstract: A bridging member extending across a cavity in a semiconductor substrate (e.g. single crystal silicon) has successive layers--a masking layer, an electrically conductive layer (e.g. polysilicon) and an insulating layer (e.g. SiO.sub.2). A first electrical contact (e.g. gold coated with ruthenium) extends on the insulating layer in a direction perpendicular to the extension of the bridging member across the cavity. A pair of bumps (e.g. gold) are on the insulating layer each between the contact and one of the cavity ends. Initially the bridging member and then the contact and the bumps are formed on the substrate and then the cavity is etched in the substrate through holes in the bridging member. A pair of second electrical contacts (e.g. gold coated with ruthenium) are on the surface of an insulating substrate (e.g. pyrex glass) adjacent the semiconductor substrate. The two substrates are bonded after the contacts are cleaned.

Abstract: A semiconductor transducer or actuator is disclosed. The transducer and actuator each include a deflecting member with corrugations producing increased vertical travel which is a linear function of applied force. An accurate and easily controlled method that is insensitive to front-to-back alignment is also disclosed for forming uniform corrugations of precise thickness; independent of the thickness of the deflecting member. The cross-sectional shape of the corrugations is not limited by the etching technique, so that any configuration thereof is enabled.

Abstract: A differential pressure switch assembly for low pressure applications permitting accurate "in field" set pointing of same, comprising a capsulized instrument that includes housing high and low pressure sections defining in assembled relation a pressure cavity across which such sections mount a flexible diaphragm separating high and low pressure chambers, with the low pressure section mounting at a site on the low pressure section a snap switch unit of a size appropriate for such assembly, which unit has a projecting plunger therefor that has an end portion disposed in the low pressure chamber of the unit, with the assembly further comprising a pressure differential sensor disposed for effecting electrical switching of the snap switch unit when the pressure of the assembly high pressure chamber exceeds that of the low pressure chamber by a predetermined differential.

Abstract: A microminiature switch for digitizing different-valued external conditions, such as pressure, temperature of acceleration, is disclosed. The switch includes a silicon wafer having a deflectable, reduced-thickness membrane adapted to move from a relaxed position toward increasingly flexed or bulged positions in response to greater-value changes in such external condition. Movement of the membrane from its relaxed position to more strained positions establishes electrical contact between a common terminal and first one and then progressively more switch-state terminals in the switch, wherein the number of switch states which are closed corresponds to the external condition acting on the switch.

Abstract: A unit for dispensing water from a bottle. The parts of the unit include an air pump for pressurizing the bottle, a microswitch having a control button connected in circuit with the pump, a small pressure chamber with a distensible diaphragm for a top, a branched air line connecting the pump with the bottle and the pressure chamber, and a cabinet with rollers that can be rolled to a position of use around the upright bottle. Additionally, the unit includes a water line positioned to extend upwardly away from the bottle. A rubber cap encloses the bottle opening and the water line and a branch of the air line are in communication with the interior of the bottle by means of metal tubes passing through the cap. Fastened to the lower end of the metal tube for the water line is a section of flexible tubing long enough to reach to the bottom of the bottle. The microswitch is normally closed and the pressure chamber is positioned with its diaphragm close to the control button of the switch.

Abstract: An air pressure instrument embodying a base receptacle adapted to be mounted to an instrument panel and to be connected to air and electric lines at the panel and a plug-in receptacle containing a pressure-responsive element and switch operable thereby adapted by plugging into the base receptacle to automatically connect the pressure-responsive element to the pressure line and the switch to the electric line.