For Controlling Waveform Supplied To Working Electrode Patents (Class 204/229.3)
  • Patent number: 9960312
    Abstract: The invention relates generally to electrodeposition apparatus and methods. When depositing films via electrodeposition, where the substrate has an inherent resistivity, for example, sheet resistance in a thin film, methods and apparatus of the invention are used to electrodeposit materials onto the substrate by forming a plurality of ohmic contacts to the substrate surface and thereby overcome the inherent resistance and electrodeposit uniform films. Methods and apparatus of the invention find particular use in solar cell fabrication.
    Type: Grant
    Filed: April 6, 2011
    Date of Patent: May 1, 2018
    Inventors: Kurt H. Weiner, Gaurav Verma
  • Patent number: 9689084
    Abstract: Disclosed are electrodeposition systems and methods wherein at least three electrodes are placed in a container containing a plating solution. The electrodes are connected to a polarity-switching unit and include a first electrode, a second electrode and a third electrode. The polarity-switching unit establishes a constant polarity state between the first and second electrodes in the solution during an active plating mode, wherein the first electrode has a negative polarity and the second electrode has a positive polarity, thereby allowing a plated layer to form on a workpiece at the first electrode. The polarity-switching unit further establishes an oscillating polarity state between the second and third electrodes during a non-plating mode (i.e.
    Type: Grant
    Filed: May 22, 2014
    Date of Patent: June 27, 2017
    Assignee: GLOBALFOUNRIES INC.
    Inventors: Charles L. Arvin, Harry D. Cox, Eric D. Perfecto
  • Publication number: 20140367270
    Abstract: A system is disclosed for controlling an electrochemical process. The system has a power source that is coupled to a power amplifier. The power amplifier is configured to provide an electromotive force (emf) signal, and a plurality of electrodes apply the emf signal to an electrochemical solution. A control element is configured to control the power amplifier such that the emf signal exhibits a predetermined frequency, amplitude, and duty cycle for reducing a thickness of the Nernst diffusion layer such that an operational parameter is set to a predetermined value.
    Type: Application
    Filed: December 23, 2013
    Publication date: December 18, 2014
    Inventor: Floyd L. Williamson
  • Patent number: 8585875
    Abstract: A system for electroplating a substrate includes one or more controllers, with each controller having an FPGA with one or more output channels. A bulk power supply is connected to each controller. One or more transistors are associated with each output channel. An electroplating chamber has one or more electrodes, with each electrode connected to at least one output channel. The system may include a waveform capture and viewing circuit providing built-in process verification and diagnostic tools. The system may also have a throttle back mode which attempts to maintain proper anode current ratios by reducing setpoints of all anodes by the same percentage, if a fault condition causes a reduction in current to one of the anodes. Blackbox logging may also optionally be used for recording selected data values into a circular buffer having a selected amount of memory.
    Type: Grant
    Filed: September 23, 2011
    Date of Patent: November 19, 2013
    Assignee: Applied Materials, Inc.
    Inventors: Charles A. Cummings, Mikael R. Borjesson
  • Publication number: 20120175247
    Abstract: A pulse generator includes a wave generator connected to a power source, the wave generator having an output signal; a de-multiplexer having a single input for receiving the output signal of the wave generator and splitting the signal into a plurality of channels carrying corresponding DeMux output signals; and a multiplexer electrically connected to each of the DeMux output signals and including means for alternately advancing or retarding the time interval between pulses of each the DeMux output signals and for combining at least two of the advanced or retarded output signals together and outputting the at least two advanced or retarded output signals as a single circuit output signal having a diverse pulse train. Pulse control means for controlling at least one of the pulse width and pulse amplitude of the circuit output signal is also provided.
    Type: Application
    Filed: January 9, 2012
    Publication date: July 12, 2012
    Inventor: Fletcher Darrel
  • Publication number: 20120091010
    Abstract: The invention relates to an electrolysis method, an electrolysis electrode, an electrolysis vessel, an electrolysis device, and a system for use of electrolysis gasses for combustion, in particular for combustion engines, for example piston or turbine engines, wherein an electrolysis electrode is artificially vibrated with a vibration frequency and said electric voltage of the electrolysis electrode oscillates with a lower harmonic frequency of said vibration frequency.
    Type: Application
    Filed: January 18, 2010
    Publication date: April 19, 2012
    Inventors: Paul Verdaasdonk, Peter Van Den Brande
  • Patent number: 7914650
    Abstract: In an air filtering apparatus in which power is supplied from a power supply to electrodes in an electrolytic bath to electrolyze water in the electrolytic bath and thus generate electrolytic water and the generated electrolytic water and air are supplied to a gas-liquid contact member to filter the air, a voltage varying unit varies the voltage applied between the electrodes, and includes a voltage switching unit for switching a power supply voltage, a voltage adjusting unit for adjusting the power supply voltage switched by the voltage switching unit and applying the adjusted voltage between the electrodes and a controller for controlling the voltage switching unit so that the power supply voltage is adjusted to a voltage nearest to the adjusted power supply voltage by the voltage adjusting unit.
    Type: Grant
    Filed: September 25, 2007
    Date of Patent: March 29, 2011
    Assignee: Sanyo Electric Co., Ltd.
    Inventors: Masanori Kobayashi, Mitsuhiro Dobashi
  • Patent number: 7231266
    Abstract: A digital control device for tracking a sine wave according to the present invention has a compensator, a control object and a feedback gain. An input into the compensator is a signal obtained by subtracting a control quantity from a reference value. An input into the control object is a signal obtained by subtracting an output of the feedback gain from an output of the compensator. A transfer function of the compensator is (k2z+k1)/(z2?2z cos ?T+1), where ? is an angular frequency, T is a sampling period, z is a z operator, and k1 and k2 are constants. Thus, a second-order compensator can be configured, with which a sinusoidal reference waveform can be tracked simply and with high accuracy.
    Type: Grant
    Filed: March 5, 2003
    Date of Patent: June 12, 2007
    Inventor: Toshiji Kato
  • Patent number: 6689269
    Abstract: The invention relates to a method for electrochemically processing a workpiece (61) in which a pulsating or alternating electrical voltage is applied between the workpiece and a workpiece electrode (62) which are arranged at a distance from one another in an electrolyte. A distance range is defined by precisely dimensioning the mean value of the applied pulsating voltage and of the voltage amplitudes measured with regard to this mean value. A double layer charge reversal on the workpiece which is sufficient for bringing about the desired electrochemical reaction results within said distance range, whereas workpiece areas situated at further distances do not experience a sufficient double layer charge reversal. The dimensions of the space between the workpiece and the workpiece electrode are proportioned in such a way that only points of the area of the workpiece to be processed lie within said distance range.
    Type: Grant
    Filed: June 26, 2001
    Date of Patent: February 10, 2004
    Assignee: Max-Planck-Gesellschaft zur Forderung der Wissenschaften E.V.
    Inventors: Rolf Schuster, Viola Kirchner