Abstract: Mobile water filtration enables on-site recycling of wastewater for reuse in mechanical decoking operations of fired-heaters, furnaces, boilers, or systems prone to build up of deposits, residue, or scale and enables on-site disposal of wastewater in a safe and environmentally conscious manner. In batch operations, a coagulant, a flocculant, and a plurality of cascaded filters of increasingly fine pitch may be used to treat wastewater and remove particulate matter, such as, for example, coke, for reuse or safe disposal. In continuous operations, a plurality of cascaded filters of increasingly fine pitch may be used. A control system may be used to automate the operation of a mobile water filtration system for use with a decoking system, such that it does not require human intervention exception for maintenance operations related to filters. The filtered water may be disposed of on-site, eliminating the need for further treatment or transport off site.

Abstract: A method and system of providing ultrapure water for semiconductor fabrication operations is provided. The water is treated by utilizing a free radical scavenging system and a free radical removal system. The free radical scavenging system can utilize actinic radiation with a free radical precursor compound, such as ammonium persulfate. The free radical removal system can comprise use of a reducing agent. The ultrapure water may be further treated by utilizing ion exchange media and degasification apparatus. A control system can be utilized to regulate addition of the precursor compound, the intensity of the actinic radiation, and addition of the reducing agent to the water.

Abstract: A water treatment method and a method for producing ultrapure water are provided in which urea in raw water is sufficiently decomposed, and an organism (bacterial cells) in biological treatment is prevented from flowing downstream. In a water treatment method for performing biological treatment of raw water containing urea, a carbon source is added to the raw water, and the raw water is then supplied to biological treatment means 1 and 2 having a fixed bed formed of an organism-supporting carrier to perform the biological treatment. The biological treatment after the addition of the carbon source to the raw water improves the efficiency of decomposition and removal of urea. The biological treatment means using a fixed bed formed of an organism-supporting carrier decreases the number of bacterial cells flowing downstream.

Abstract: Raw water is made to pass through a raw water supply pipe by opening on-off valves, and by closing on-off valves. Oxygen is supplied to the raw water in the raw water supply pipe by opening an on-off valve of an oxygen supply pipe. The resulting raw water containing organic matter and oxygen passes through the raw water supply pipe and enters a catalyst-packed column, thereby contacting a platinum-group metal catalyst onto which hydrogen is adsorbed. This causes the organic matter in the raw water to contact the platinum-group metal catalyst under the presence of dissolved oxygen and hydrogen which is adsorbed onto the metal catalyst. Accordingly, the organic matter in the water to be treated can be easily removed at high efficiency and with low energy consumption.

Abstract: High purity water produced by reverse osmosis. A feedwater is pretreated to remove hardness and non-hydroxide alkalinity, and the pH is raised to 8.5 or more to ionize solute species such as boron that are sparingly ionized when in neutral or near neutral pH aqueous solution. Ultrapure water resulting is suitable for industrial use.

Abstract: A method and system of providing ultrapure water for semiconductor fabrication operations is provided. The water is treated by utilizing a free radical scavenging system and a free radical removal system. The free radical scavenging system can utilize actinic radiation with a free radical precursor compound, such as ammonium persulfate. The free radical removal system can comprise use of a reducing agent. The ultrapure water may be further treated by utilizing ion exchange media and degasification apparatus. A control system can be utilized to regulate addition of the precursor compound, the intensity of the actinic radiation, and addition of the reducing agent to the water.

Abstract: A method and system of providing ultrapure water for semiconductor fabrication operations is provided. The water is treated by utilizing a free radical scavenging system and a free radical removal system. The free radical scavenging system can utilize actinic radiation with a free radical precursor compound, such as ammonium persulfate. The free radical removal system can comprise use of a reducing agent. The ultrapure water may be further treated by utilizing ion exchange media and degasification apparatus. A control system can be utilized to regulate addition of the precursor compound, the intensity of the actinic radiation, and addition of the reducing agent to the water.

Abstract: A process for treatment of water. Hardness and non-hydroxide alkalinity are removed from feedwaters to an extent sufficient to avoid scaling when concentrated. Sparingly ionizable components in the feedwater are urged toward increased ionization by increasing the pH of the feedwater. In this manner, species such as silica become highly ionized, and (a) their rejection by membranes used in the process is significantly increased, and (b) their solubility in the reject stream from the membrane process is significantly increased. Sparingly ionized species such as boron, silica, and TOC are highly rejected. Recovery ratios of ninety percent (90%) or higher are achievable with many feedwaters, while simultaneously achieving a substantial reduction in cleaning frequency of membranes used in the process.

Abstract: The present invention provides a new and improved system for on-site and on-demand production of sterile water for injection (SWFI) from potable water or water that meets the EPA drinking water quality upon preconditioning, in conjunction with reconstitution of IV fluids using dry chemicals or concentrate pre-filled bags, suitable for use at a site under non-clean room environment conditions, and capable of adjusting feed water temperatures. The present invention includes a water temperature conditioning module, a water preconditioning module, a hydrothermal processor, a fluid staging compartment, and combinations and variations thereof.

Abstract: In production of ultrapure water by purifying primary pure water with a secondary pure water manufacturing apparatus and a tertiary pure water manufacturing apparatus, high-purity ultrapure water is produced, wherein generation of hydrogen peroxide is minimized and the concentrations of TOC, DO, and hydrogen peroxide are reduced to the limit. In an ultrapure water manufacturing system, each of the secondary pure water manufacturing apparatus and the tertiary pure water manufacturing apparatus includes an ultraviolet oxidation device and a deionization device, downstream therefrom, by using an ion exchange resin. UV light control is performed in such a way that the hydrogen peroxide concentration results in 1 to 30 ?g/L and the TOC concentration results in 1 to 10 ?g/L at the outlet of the ultraviolet oxidation apparatus of the secondary pure water manufacturing apparatus and, in addition, the TOC concentration results in 0.

Abstract: The invention is directed to a process for the production of ultra pure water, comprising feeding water containing ions and optionally other impurities to one side of a membrane based on hydroxy sodalite (H-SOD), and recovering ultra pure water from the other side of the membrane.

Abstract: A method for filtering a fluid to obtain a fluid having a known purity is described. The fluid is filtered with a filtration system, and upstream of a final filtration stage of the filtration system, a purity of the fluid is measured. A purity of the fluid filtered by the filtration system is determined by correcting the measured purity with a filtration behavior of the final filtration stage. In an embodiment, the fluid comprises an ultra pure water for use as an immersion liquid in a lithographic apparatus.

Abstract: A system for the management of fluid, such as saline solution for medical procedures, is provided. The system generally includes a water purification station and a portable fluid station, which is dockable to the water purification station. The portable fluid station is capable of combining purified water from the water purification station with a concentrate in powder or liquid form to create a usable solution. A method of using such a system is also provided.

Abstract: Disclosed is a method of purifying fluid, typically an aqueous fluid steam, with the method involving at least two reverse osmosis stages with retentate from a first reverse osmosis stage being subjected to the second reverse osmosis stage, and with intermediate treatment of retentate from the first reverse osmosis stage by exposure to an electric field. The intermediate treatment may involve electrocoagulation to remove sparingly-soluble compounds and permit enhanced reverse osmosis recovery. Additional treatment may be performed prior to the first reverse osmosis stage, between the first reverse osmosis stage and the intermediate treatment with an electric field, between such intermediate treatment and the second reverse osmosis stage, or after the second reverse osmosis stage.

Abstract: A method for filtering a fluid to obtain a fluid having a known purity is described. The fluid is filtered with a filtration system, and upstream of a final filtration stage of the filtration system, a purity of the fluid is measured. A purity of the fluid filtered by the filtration system is determined by correcting the measured purity with a filtration behavior of the final filtration stage. In an embodiment, the fluid comprises an ultra pure water for use as an immersion liquid in a lithographic apparatus.

Abstract: A water purifying unit generates pure water by eliminating impurity ions from dielectric fluid. A corrosion-protection-ion generating unit generates corrosion protection ions, substitutes predetermined cations for impurity cations contained in the dielectric fluid, and substitutes the corrosion protection ions for impurity anions contained in the dielectric fluid. A switching unit switches a supply of the dielectric fluid between the water purifying unit and the corrosion-protection-ion generating unit. A switching control unit controls the switching unit based on a conductivity of the dielectric fluid measured by a conductivity measuring unit.

Abstract: A method of producing safe drinking water from virtually any water source utilizing a water purification system is disclosed. The method includes a combination of water purification methods with a control system that evaluates water quality and functional processing parameters, such as pressure and flow. The control system determines what water processing methods to utilize and how most efficiently to operate them. The system is capable of treating highly contaminated water to the necessary degree to produce safe drinking water. Furthermore, the system regulates and cleans itself to maintain functionality despite receiving high concentrations of various contaminants from the feed water source.

Abstract: A water purification apparatus having an inlet and an outlet, and at least one water purification device thereinbetween, wherein the outlet includes at least a first and second water release valve, the first release valve being operable at a first flow rate, and the second release valve being operable at a second flow, is described. Preferably, at least one water release valve is operable at a relatively slow flow rate of generally up to 0.1 liter per minute, and at least one other water release valve is operable at a relatively fast flow rate of, for example, up to 2 liters per minute. The present water purification apparatus provides the operator with the ability to very accurately obtain an exact volume of water desired.

Abstract: A system for recovering and purifying water from a gas stream may include, a gas stream purification unit for purifying the gas stream, a water separation unit for separating water from the purified gas stream, and a water purification unit for purifying the water separated by the water separation unit. The gas stream purification unit may include comprise a soot reactor and a catalytic oxidation reactor or both. The water separation unit may include a condenser, a water extractor and a cyclic reverse osmosis system.

Abstract: A method for filtering a fluid to obtain a fluid having a known purity is described. The fluid is filtered with a filtration system, and upstream of a final filtration stage of the filtration system, a purity of the fluid is measured. A purity of the fluid filtered by the filtration system is determined by correcting the measured purity with a filtration behavior of the final filtration stage. In an embodiment, the fluid comprises an ultra pure water for use as an immersion liquid in a lithographic apparatus.

Abstract: A process for treatment of water via membrane separation equipment. A feedwater is maintained or adjusted to a pH of 4.3 or lower, and fed to a membrane separation system. In this manner, species such as TOC become more ionized, and (a) their rejection by the membrane separation process is significantly increased, and (b) their solubility in the reject stream from the membrane process is significantly increased. Passage TOC through the membrane is significantly reduced. A recovery ratio of eighty percent (80%) or higher is achievable with most feedwaters, while simultaneously achieving a substantial reduction in cleaning frequency of the membrane separation equipment. The method is particularly useful for the preparation of high purity water.

Abstract: In a small scaled plant intended for flexible manufacturing, a pure water supply system is provided at a low cost without reducing a production efficiency. A pure water system produces a plurality of grades of pure water which are supplied through pipes connected to points of use for cleaning, CMP, lithography, and the like. Upon receipt of a request signal from each point of use for starting to use a certain grade of pure water, a controller determines whether or not a required amount exceeds the capacity of the grade of pure water which can be supplied by the pure water system. If not, the controller sends a use permission signal to the point of use for permitting the same to use the pure water. When a certain use point is using the requested grade of pure water, the controller may not permit the requesting point of use to use the pure water until a use end signal is sent from the use point which is using the pure water.

Abstract: A system and method are provided for reducing DI water consumption by delivering the DI water at an elevated processing temperature when demanded. The DI water is passed through a heater for heating the DI water to a processing temperature in a single pass. The DI water is circulated through a recirculation loop, including the heater, until demanded. The DI water is monitored for contaminants and bubbles or voids. Detected contaminants or voids are discharged through vents of the system. Turbulence or biocides can be introduced into the recirculated DI water for inhibiting biological contamination.

Abstract: A fluid processor, suitable for the production of sterile water for injection, having a processor assembly and a process control system comprising a pump, a flow splitter, flow restrictors and a pressure relief valve. In a preferred embodiment, the processor assembly comprises a heat exchanger, a reactor and a heater arranged in a nested configuration. The preferred embodiment of the present invention also include a treatment assembly having a combination of filter, reverse osmosis and ion exchange devices and further incorporates an assembly and method allowing for the in situ sanitization of the fluid processor during cold start and shutdown to prevent bacteria growth during storage of the fluid processor. The fluid processor may include an electronic control system comprising a touch screen operator interface, a programmable logic controller and sensors for measuring temperature, pressure, flow rate, conductivity and endotoxin level.

Abstract: A portable ultraviolet water purifier is disclosed which has an outer housing defining a water chamber with a coupling for attachment to a faucet an inlet and an outlet with an ultraviolet light source therein.

Abstract: The ultrapure water producing system produces ultrapure water with high purity and remarkably low content of metals even just after restart of operation thereof. Water sent through the pump 3 or 4 into a line 8 flows through a heat exchanger 10, a line 12, a UV oxidation apparatus 20, a line 22, an ion exchange device 30, a line 32 and a membrane filtering device 40 and is treated in each device in this order to be ultrapure water. The devices 10, 20, 30, 40 have bypass lines 11, 21, 31, 41, respectively. In the sterilizing process, bactericide water is fed only to the membrane filtering device 40 via the bypass lines 11, 21 and 31. In the following sterilizing process of the heat exchanger 10 and the UV oxidation apparatus 20, the bactericide water flows the line 41 bypassing around the membrane filtering device 40.

Abstract: In order to reduce a total organic carbon (TOC) in ultrapure water to a level less than 1 ppb, several cycles of ozone contact/UV irradiation treatments are carried out in sequence. Preferably, the first cycle further includes an ion exchange treatment which is applied to the resulting UV irradiation water.

Abstract: A method is provided for manufacturing pharmaceutical water by means of distillation and sanitizing the equipment used in said manufacturing. The method comprises the removal of suspended solids from chlorine-containing water by means of a multimedia filter, followed by a water-softening step and a dechlorination step. Ammonia is then removed from the dechlorinated water before subjecting the water to distillation in a mechanical vapor compression distillation unit. A portion of the generated low-pressure-steam is used to sanitize the manufacturing equipment at certain prescribed locations, and the distilled water, exhibiting United States Pharmacopoeia purified water quality, is withdrawn from the still and stored as pharmaceutical water product. No reverse osmosis operation is required. A system for carrying out the process is also provided. Sanitization is carried out while the system is in a standby mode.

Abstract: A module filled with an organic porous ion exchanger is placed midway on a pipe for transporting high-purity water to be supplied to a point-of-use. As the organic porous ion exchanger is used an organic porous ion exchanger having a three-dimensional mesh structure with mesopores, having an average diameter of 1 ?m to 1000 ?m, in a wall between interconnected macropores and in which an ion exchange group is uniformly distributed and an ion exchange capacity is 0.5 mg equivalent weight/gram of dried porous body or greater.

Abstract: An improved water purification system for production of USP purified water and/or USP water for injection include backwashable, chlorine tolerant microfilter or ultrafilter for initial filtration of the feed water (10). The filtrate from the filter (18) is provided to a dechlorinator (18) prior to being subjected to an optional, reverse osmosis membrane unit (60) and then to a still (66) which discharges purified water at USP standards for purified water or water for injection.

Abstract: A method of water purification including the steps of passing source water through at least one reverse osmosis unit to produce a product water and reject water, directing the product water from a reverse osmosis unit into the dilution stream of a continuous electrodeionization unit, directing the reject water from the first pass reverse osmosis unit through a softening unit to produce softening unit output water with fewer hardness elements than the reject water from the first pass reverse osmosis unit, directing the softening unit output water into a concentrate stream of the continuous electrodeionization unit, and wherein the continuous electrodeionization unit further purifies the water from the dilution stream to produce purified water.

Abstract: Methods and apparatus (50) are disclosed for accurately measuring low concentrations of boron in deionized water utilizing the chemical reaction of boric acid with a polyol by injecting very small plugs of concentrated polyol into streams of boron containing and non-boron containing water samples to produce an ionized acids product, and then measuring the conductivity difference (delta conductivity), corrected for interfering or extraneous factors which can effect conductivity, between such boron containing and non-boron containing samples using a conductivity and temperature detector (23).

Abstract: An apparatus for controlling the resistivity of ultra pure water, including a housing to house a gas permeable membrane, an inlet for untreated ultra pure water which communicates with an ultra pure water path, and an outlet for resistivity-controlled ultra pure water which communicates with the ultra pure water path. The gas permeable membrane divides the interior of the housing into the ultra pure water path and a mixed gas path. A mixed gas is selected from the group consisting of a mixed gas including carbon dioxide and a gas having a lower resistivity controlling ability than carbon dioxide and a mixed gas including ammonia and a gas having a lower resistivity controlling ability than ammonia. The gas permeable membrane is capable of supplying carbon dioxide or ammonia to the untreated ultra pure water at a concentration equal to or more than 90% of the equilibrium concentration.

Abstract: A degassing device (10), a hydrogen dissolving device (12), and a palladium catalyst column (17) are provided in that order downstream of a high-purity water production device (1), and an impurity removal device (19) is connected to the exit side of treated water of the palladium catalyst column (17). The impurity removal device (19) removes impurity ions which are eluted into the water to be treated or impurity particulates which mix in with the water to be treated during the treatment in the palladium catalyst column (17). The impurity removal device (19) comprises an ion exchange device (20) and a membrane treatment device (21) such as a ultrafiltration membrane device, a reverse osmosis membrane device or the like. By providing an impurity removal device (19) in this manner, it is possible to remove impurities generated during hydrogen peroxide removal treatment by the palladium catalyst and to prevent degradation in quality of hydrogen-dissolved water.

Abstract: The present invention consists of an apparatus and method for supplying purified water to a faucet or other apparatus for use from a purification loop maintaining water in constant motion. The apparatus allows the user to select and withdraw the amount of water needed in a closely controlled fashion while any unused water remains in the loop where it is continually purified. A control valve with a manually rotatable spool permits the purified water to be adjustably tapped or withdrawn for various end uses.

Abstract: An apparatus for removing charged contaminants from a water stream. The apparatus can be figured to provide the decontaminated water stream to an analytical system. Methods of use of the same are also disclosed.

Abstract: A cleaning method is provided for an ultrapure water supply system having an ultrapure water production apparatus connected to a point of use of ultrapure water via a passage. In the cleaning method, a basic solution, for example, is circulated through the system to change the surface potential of fine particles in the system from an opposite to the same polarity as that of elements constituting the system, thereby facilitating the removal of the fine particles, and the fine particles are then discharged from the system to outside together with the basic solution. The cleaning method has excellent cleaning capability and also makes it possible to shorten the rinsing time required for removing the residual constituent of the cleaning solution.

Abstract: It is an object of the present invention to provide an ultrapure water producing apparatus with reduced problems resulting from impurities generated after replacement of unit apparatuses. A TOC-UV (1), a CP (2) and a UF film (3) are provided in this order from the upstream side of a pure water supply route. Ultrapure water flowing through the UF film (3) is supplied to a use point. A branch route branched from the pure water supply route is provided downstream of the UF film (3). A dissolved oxygen concentration meter (M1) is interposed in the branch route for measuring dissolved oxygen concentration in ultrapure water passed through the UF film (3). The branch route is connected to an oxidant decomposition unit (11). Oxidants included in ultrapure water flowing through the branch route are all converted into DO at the oxidant decomposition unit (11).

Abstract: An apparatus and methods are disclosed for purifying fluid, such as potable water, to quality levels suitable for medical application, particularly to applications involving injection of the fluid into a human body. The apparatus comprises a portable purification pack constructed for a single use. The pack houses depth filtration, activated carbon, mixed bed ion exchange resins and terminal filtration stages in series. The terminal filter comprises a fine (microfiltration or ultrafiltration), permeable membrane, treated with an endotoxin-binding chemistry. In contrast with semi-permeable osmotic membranes, the permeable membrane produces high flow rates at relatively low pressures, while still safely purifying fluid to injection quality.

Abstract: The invention encompasses polishing systems for polishing semiconductive material substrates, and encompasses methods of cleaning polishing slurry from semiconductive substrate surfaces. In one aspect, the invention includes a method of cleaning a polishing slurry from a substrate surface comprising: a) providing a substrate surface having a polishing slurry in contact therewith; b) providing a liquid; c) injecting a gas into the liquid to increase a total dissolved gas concentration in the liquid; and d) after the injecting, providing the liquid against the substrate surface to displace the polishing slurry from the substrate surface.

Abstract: An improved water purification system for production of USP purified water and/or USP water for injection include backwashable, chlorine tolerant microfilter or ultrafilter for initial filtration of the feed water (10). The filtrate from the filter (18) is provided to a dechlorinator (18) prior to being subjected to an optional, reverse osmosis membrane unit (60) and then to a still (66) which discharges purified water at USP standards for purified water or water for injection.

Abstract: To provide a novel and effective cleaning method which can give a cleaned fluorine-containing rubber molded article for semiconductor production apparatuses. The method of cleaning the fluorine-containing rubber molded article for semiconductor production apparatuses, which comprises washing the fluorine-containing rubber molded article at least once with ultra pure water which has a metal content of not more than 1.0 ppm and does not contain fine particles of not less than 0.2 &mgr;m in an amount of more than 300 per 1 ml.

Abstract: A system and method are provided which removes bromine biocide used in effluent process streams without the use of chemicals or complex mechanical systems. In particular, the system and method of the present invention remove bromine biocide by photodissociating the bromine, thereby forming innocuous salts. Ultraviolet energy may be used to provide the energy for photodissociation, in particular ultraviolet energy supplied by medium pressure Hg vapor lamps.

Abstract: A method for increasing the quantity of a gas, e.g., ozone, dissolved in a liquid, e.g., ultrapure deionized water, is provided. The gas to be dissolved is introduced to the liquid under pressure and the resulting admixture delivered to the end-use station under pressure. Thus, the method and system of the present invention are able to provide, e.g., ozonated water, continuously, efficiently and without cooling, thus providing a simple, cost efficient method of producing high concentration ozonated water for application to an in-process semiconductor wafer.

Abstract: By treating potable water at a temperature of at least 230° C. (446° C.) and at a pressure at least equal to the pressure of saturated steam at said temperature, can produce pyrogen-free water using treatment times of 0.05 to 5 seconds or less. The addition of an oxidant, in the form of a gas, a liquid, or a solid, further decreases the required treatment time to less than 0.05 second. The reduction in equipment size achieved with this rapid treatment time allows the utilization of treatment units small enough to be easily transported to remote locations or installed in the restricted space environment existing in ships and submarines.

Abstract: A method for the recovery and purification of water from the exhaust gases of an internal combustion engine is disclosed. An apparatus for carrying out that method is also disclosed. In this method, the water is condensed out from the vehicle's exhaust (for example, by using a countercurrent flow heat exchanger in combination with a chiller), and the condensed water is then purified. The purification typically includes passing the water through one or more particulate filters; passing the water through one or more activated carbon filter beds, and passing the water through one or more ion exchange resin filter beds.

Abstract: A hemofiltration system is provided in which ultrafiltrate is purified by reverse osmosis for reinfusion. Non-sterile infusate concentrate is dialyzed into the purified ultrafiltrate and combined with cleared blood which is returned to the patient. In another system, a hemofilter is used to sterilize essentially pure, non-sterile water for dilution of sterile infusate concentrate, then the hemofilter is used to filter blood, the infusate concentrate being combined with cleared blood for return to the patient.

Abstract: There is disclosed a system capable of purifying water to a laboratory grade level that uses redox media, high energy catalytic activated carbon, ultraviolet radiation and high purity ion exchange media in series filtration. The system produces purified water having a specific resistance of at least 18.2 megohm·cm at 25° C. with low organic carbon content. The system is designed to be fabricated on a sufficiently small scale to fit on a lab bench top.

Abstract: A high-temperature ultrapure water production apparatus comprises an evaporator 22 for treating pretreated water obtained by a pretreating system or primary pure water obtained by a primary pure water system 21 to prepare ultrapure water having a high temperature, an ion exchanger 23 for removing trace metal ions from the ultrapure water obtained by the evaporator 22, a product water heat exchanger 24 made of titanium for subjecting to heat exchange the high-temperature ultrapure water obtained by the evaporator 22 and containing the trace metal ions unremoved therefrom and the ultrapure water having ordinary temperature and having its trace metal ions removed by treatment by the ion exchanger 23, a cooling heat exchanger 25 made of SUS for cooling to not higher than 40° C. the ultrapure water containing the unremoved trace metal ions and cooled by the product water heat exchanger 24 for use as feed water for the ion exchanger 23.

Abstract: A process for treatment of water via membrane separation to remove hardness and non-hydroxide alkalinity by simultaneous removal in a weak acid cation exchange resin. The process includes ionization of sparingly ionizable components, such as silica, by adjusting the pH up to about 10.5 or higher. Their separation by the membrane is significantly increased. The passage of boron, silica and TOC is reduced by a factor of ten or more. Recovery of 90% or higher is achievable with most brackish feedwaters, while substantial reduction in cleaning frequency is simultaneously achieved. The apparatus used for the water treatment process includes reverse osmosis membrane(s) (30), mixed bed ion exchange unit (44, 46), micron filter (48), ultraviolet sterilization unit (49), decarbonation unit (20), and electrodeionization unit (150).