Chamber Patents (Class 219/121.21)
  • Patent number: 11712850
    Abstract: The disclosed invention resolves the problem of manufacturing three-dimensional objects by stacking two-dimensional layers of material in the third direction z. Described are a machine and a method for additive manufacturing of three-dimensional objects in which a predetermined final object is fabricated using the steps of the printing process (100) of individual curved three-dimensional print volumes (1, 2, 3 . . . Z) in a sequence (51). Powdered material (102) is melted in a melting volume (280) which is inside an intersection volume (28) and in which the energy exerted by at least two particle clusters (160,170) emitted from at least two spatially positioned sources (11, 12) of particles with mass adds up and exceeds the threshold required for melting of the powdered material. Machine and method according to the disclosed invention enable the fabrication in multiple different printing directions simultaneously.
    Type: Grant
    Filed: June 12, 2018
    Date of Patent: August 1, 2023
    Inventor: Nata{hacek over (s)}a Mu{hacek over (s)}ević
  • Patent number: 10377002
    Abstract: A manufacturing machine is capable of subtractive manufacturing and additive manufacturing for a workpiece. The manufacturing machine includes: a first headstock and a second headstock disposed in a first processing area and configured to hold a workpiece; a lower tool rest and a tool spindle disposed in the first processing area and configured to hold a tool to be used for subtractive manufacturing for the workpiece; an additive manufacturing head disposed in a second processing area; and a robot arm configured to hold a workpiece and transport the workpiece between the first processing area and the second processing area. The additive manufacturing head is configured to discharge a material toward the workpiece held by the robot arm during additive manufacturing for the workpiece. Accordingly, the manufacturing machine configured simply to be capable of subtractive manufacturing and additive manufacturing is provided.
    Type: Grant
    Filed: April 7, 2016
    Date of Patent: August 13, 2019
    Assignee: DMG MORI CO., LTD.
    Inventors: Masahiko Mori, Yuhei Mezawa, Shigeyuki Takashima, Shigetsugu Sakai, Makoto Fujishima, Eiichiro Gomi
  • Patent number: 9627170
    Abstract: An electrode for use in an ion implantation system includes a body portion and a penetration portion. The penetration portion includes penetration holes which are closely and regularly arranged. The penetration holes have the shape of a circle or a regular polygon with at least four sides. The electrode has an increased aperture ratio which, in turn, increases the density of the ion beam, thereby improving the efficiency of the ion implantation process.
    Type: Grant
    Filed: September 29, 2014
    Date of Patent: April 18, 2017
    Assignees: Boe Technology Group Co., Ltd., Ordos Yuansheng Optoelectronics Co., Ltd.
    Inventors: Zhiqiang Wang, Feng Kang, Bo Yang, Jingyi Xu
  • Patent number: 9170295
    Abstract: An apparatus for detecting an arc in a plasma chamber is designed to detect the respective voltage and current values of RF power supplied to the plasma chamber and calculate the ratio of the voltage and current values to accomplish a required control of the supplying of the power. When it is determined that the arc is generated, the apparatus rapidly controls the supplying of the power to prevent damages on the plasma chamber and contaminations on the materials to be processed due to the generation of the arc.
    Type: Grant
    Filed: February 27, 2013
    Date of Patent: October 27, 2015
    Assignee: NEW POWER PLASMA CO., LTD.
    Inventor: Sang-Don Choi
  • Patent number: 8872057
    Abstract: An electrode of an inductive output tube (IOT) is provided with channels for guiding cooling fluid. In one aspect of the invention, the channels are in a confronting relationship with a jacket surrounding the electrode and spaced from the electrode so as to define an interior region. Cooling fluid such as oil is circulated in the channels in fluid communication with the interior region, providing an escape mechanism for trapped bubbles in order to prevent localized heating of the electrode. In another aspect of the invention, the channels form multiple intersecting helical patterns of different pitches, with the steeper-pitched channels providing a more direct escape route for the bubbles.
    Type: Grant
    Filed: March 15, 2006
    Date of Patent: October 28, 2014
    Assignee: Communications & Power Industries LLC
    Inventors: Paul A. Krzeminski, Gordon R. Lavering
  • Patent number: 8500909
    Abstract: An apparatus for processing coating material includes a crucible having a cylindrical receptacle for receiving coating material, a drive member having a drive shaft, and a cover coupled to the drive shaft. The cover has a flat surface. The drive shaft is configured to drive the cover to rotate thereabout between a closed position where the cover covers the receptacle and the flat surface presses against the coating material to flatten the coating material, and an open position where the cover is moved away from the receptacle.
    Type: Grant
    Filed: November 11, 2010
    Date of Patent: August 6, 2013
    Assignee: Hon Hai Precision Industry Co., Ltd.
    Inventor: Shao-Kai Pei
  • Patent number: 8450631
    Abstract: A preserving apparatus for preserving welded joint portions 7, 8 by deposit welding on the inner surface of the welded joint portions 7, 8, in which a nozzle 4 and a pipe 5 supported under water are joined, the apparatus having: a seal member 9 that is disposed in front and behind the welded joint portions 7, 8 to be deposit welded within the nozzle 4 and pipe 5, and serves to demarcate and form a closed operation area A within the nozzle 4 and pipe 5; water drainage means 12 for draining the inside of the operation area A demarcated and formed by the seal member 9 and obtaining a gas atmosphere therein; and welding means 13 for deposit welding on the inner surface of the welded joint portions 7, 8 within the operation area A in which the gas atmosphere has been created.
    Type: Grant
    Filed: April 11, 2006
    Date of Patent: May 28, 2013
    Assignee: IHI Corporation
    Inventor: Seiichi Sato
  • Publication number: 20130098883
    Abstract: A plasma reactor employs an e-beam source to generate plasma, and the e-beam source has a configurable magnetic shield.
    Type: Application
    Filed: August 27, 2012
    Publication date: April 25, 2013
    Applicant: Applied Materials, Inc.
    Inventors: Kallol Bera, Shahid Rauf, Leonid Dorf, Kenneth S. Collins, Ajit Balakrishna, Gary Leray
  • Publication number: 20130098882
    Abstract: A plasma reactor that generates plasma in a workpiece processing chamber by an electron beam, has an electron beam source and segmented beam dump that is profiled to promote uniformity in the electron beam-produced plasma.
    Type: Application
    Filed: August 27, 2012
    Publication date: April 25, 2013
    Applicant: Applied Materials, Inc.
    Inventors: Leonid Dorf, Shahid Rauf, Kenneth S. Collins, Nipun Misra, James D. Carducci, Gary Leray, Kartik Ramaswamy
  • Publication number: 20130011582
    Abstract: A crucible includes a hollow main body defining an opening, a heat body, and a cover. The heat body is received in and connected with the main body. The heat body includes a heat end extending out of the main body through the opening. The heat end can be heated by an electro-beam. The cover is supported by the main body and covers the opening and defines a center hole and a number of gas holes. The heat end passes through the center hole. The main body, the heat body, and the cover are made of thermal conductive refractory material.
    Type: Application
    Filed: September 29, 2011
    Publication date: January 10, 2013
    Applicant: HON HAI PRECISION INDUSTRY CO., LTD.
    Inventor: JUIN-HONG LIN
  • Publication number: 20130000253
    Abstract: An assembly of a support plate and an exit window foil for use in an electron beam device. The support plate is designed to reduce wrinkles in said foil, which wrinkles may arise due to surplus foil arising in the assembly process. The foil is being bonded to the support plate along a closed bonding line bounding a substantially circular area in which the support plate is provided with apertures and foil support portions and in which area the foil is adapted to serve as a portion of a wall of a vacuum tight housing of the electron beam device. Another aspect involves a method for using the assembly in a filling machine, as well as a method of reducing wrinkles.
    Type: Application
    Filed: February 1, 2011
    Publication date: January 3, 2013
    Applicant: TETRA LAVAL HOLDINGS & FINANCE S.A.
    Inventors: Andreas Åberg, Ulrika Linné, Urs Hostettler
  • Patent number: 7815847
    Abstract: A process for mass production of three-dimensional articles made of intermetallic compounds based on titanium and aluminium by an electron beam melting technology. The articles are produced in successive sections from powders of the intermetallic compound with which the articles are to be produced. For each section, melting of the powders preceded by a preheating step is performed.
    Type: Grant
    Filed: July 7, 2007
    Date of Patent: October 19, 2010
    Assignees: Avio Investments S.p.A., Avioprop S.r.l.
    Inventors: Paolo Gennaro, Giovanni Paolo Zanon, Giuseppe Pasquero
  • Patent number: 7576337
    Abstract: A power supply system for an ion implantation system. In one particular exemplary embodiment, the system may be realized as a power supply system that includes a low frequency power inverter, a stack driver and a high voltage power generation unit that receives source power from the power inverter. The high voltage generation unit may include a high voltage transformer for providing an output power that is multiplied to a desired output level and delivered to an input terminal of an ion beam accelerator. The power supply system may also include a dielectric enclosure that encases at least a portion of the high voltage power generation unit, thereby preventing variation in the break down strength of the internal components.
    Type: Grant
    Filed: January 5, 2007
    Date of Patent: August 18, 2009
    Assignee: Varian Semiconductor Equipment Associates, Inc.
    Inventors: Piotr Lubicki, Russell Low, Steve Krause, Eric Hermanson
  • Publication number: 20090134127
    Abstract: An electron beam heating system includes a cathode, an anode, a CNT string and a chamber. The CNT string includes an end portion and an emission portion, and the end portion is contacted with and electrically connected to the cathode. The cathode, the anode and CNT string are arranged in the chamber. The CNT string is composed of a plurality of CNT bundles packed closely, each of the CNT bundles comprises a plurality of CNTs, the CNTs are substantially parallel to each other and are joined by van der Waals attractive force. Electron beams emitted from the emission portion bombard and heat a predetermined point on the anode. The heating efficiency of the electron beam heating system is high.
    Type: Application
    Filed: December 29, 2007
    Publication date: May 28, 2009
    Inventors: Yang Wei, Liang Liu, Shou-Shan Fan
  • Publication number: 20080014457
    Abstract: A process for mass production of three-dimensional articles made of intermetallic compounds based on titanium and aluminium by an electron beam melting technology. The articles are produced in successive sections from powders of the intermetallic compound with which the articles are to be produced. For each section, melting of the powders preceded by a preheating step is performed.
    Type: Application
    Filed: July 7, 2007
    Publication date: January 17, 2008
    Inventors: Paolo Gennaro, Giovanni Paolo Zanon, Giuseppe Pasquero
  • Patent number: 7312416
    Abstract: A lower housing having a lower chamber and a welding opening is fixed about an underwater weld site. The lower housing includes an upper opening, the lower housing being filled with water upon installation. A transport housing containing a welding unit in a dry state is lowered such that a bottom opening, closed by a closure element, registers with an upper opening of the lower chamber. Upon clamping the housings together, the lower chamber is at least partially evacuated. The closure element is then moved to an open position and the welding unit is lowered into the evacuated lower chamber to weld a patch to the vessel wall to overlay the damaged area.
    Type: Grant
    Filed: June 7, 2004
    Date of Patent: December 25, 2007
    Assignee: General Electric Company
    Inventors: Frank Ortega, John Edward Maslakowski, Hsueh-Wen Pao
  • Patent number: 7168935
    Abstract: An apparatus for formation of a three dimensional object comprising a sealed container; an electron beam subsystem capable of directing energy within said container; a positioning subsystem contained within said container; a wire feed subsystem contained within said container; an instrumentation subsystem electronically connected to said electron beam subsystem, positioning subsystem, and wire feed subsystem; and a power distribution subsystem electrically connected to said electron beam subsystem, positioning subsystem, wire feed subsystem, and said instrumentation subsystem.
    Type: Grant
    Filed: August 1, 2003
    Date of Patent: January 30, 2007
    Assignee: The United States of America as represented by the Administrator of the National Aeronautics and Space Administration
    Inventors: Karen M. Taminger, J. Kevin Watson, Robert A. Hafley, Daniel D. Petersen
  • Patent number: 7049539
    Abstract: Method for surface treating a die made of metal in which a low energy, pulsed electron beam, which does not scatter, performs a treatment over a wide area due to presence of anode plasma in a chamber in which the electron beam is formed to smooth and gloss a surface of the die and increase a surface hardness and corrosion resistance of the die. The irradiation may be performed with an energy density not less than 1 J/cm2 per pulse, at least 5 pulse irradiations and a pulse duration of at least 1 ?s. A die subjected to the surface treatment method exhibits improved surface smoothness and glossiness, as well as high corrosion resistance.
    Type: Grant
    Filed: March 27, 2003
    Date of Patent: May 23, 2006
    Assignee: Nagata Seiki Kabushiki Kaisha
    Inventors: Yoshiyuki Uno, Akira Okada, Kensuke Uemura, Raharjo Purwadi
  • Patent number: 6649859
    Abstract: In a partial-vacuum-type, electron-beam irradiation system having a construction such that a static-pressure floating pad is connected to a vacuum chamber incorporating an electron-beam column, and an electron-beam passes through an electron-beam passage of the static-pressure floating pad to impinge on a body to be irradiated in the condition where the static-pressure floating pad is contactlessly attracted to the body to be irradiated, a vacuum-seal valve for opening and closing the electron-beam passage is provided inside the static-pressure floating pad, and when the static-pressure floating pad is separated away from the body to be irradiated, the vacuum-seal valve is actuated to close the electron-beam passage, whereby the atmospheric air is prevented from flowing into the vacuum chamber.
    Type: Grant
    Filed: February 27, 2002
    Date of Patent: November 18, 2003
    Assignee: Sony Corporation
    Inventors: Yoshihisa Miura, Yuichi Aki
  • Patent number: 6530317
    Abstract: In accordance with the present invention a gravure cylinder is engraved by means of an electron beam which is modulated to create upon the surface of the gravure cylinder the desired gravure cells, the required vacuum being maintained only in a limited volume around the electron gun by the use of a conformal high vacuum ferrofluid seal that is substantially free of mechanical friction.
    Type: Grant
    Filed: December 5, 2000
    Date of Patent: March 11, 2003
    Assignee: Creo Srl
    Inventor: Daniel Gelbart
  • Patent number: 6469273
    Abstract: To achieve uniform heating of metal components in all their regions, a method and device for heating metal components using electron irradiation in a vacuum chamber includes multilayer holding elements having an outer layer facing the electron radiation. The outer layer is resistant to heat and exhibits good heat-absorption properties. The holding elements also have an inner layer facing the respective metal component and exhibiting good heat-radiating properties. The holding elements are used to hold the metal components in the vacuum chamber during heating.
    Type: Grant
    Filed: March 30, 2001
    Date of Patent: October 22, 2002
    Assignee: Siemens Aktiengesellschaft
    Inventors: Peter Botzler, Carsten Deus, Ekkehart Reinhold, Hans-Jochen Student, Lutz Wolkers
  • Patent number: 6314686
    Abstract: A light seal for use with robotic equipment includes a window having a divider panel rotatably mounted therein. Flexible sealing flaps at the opposite sides of the window opening engage the divider panel when the divider panel is in a sealed position to provide a light seal between the edges of the divider panel and the edges of the window opening.
    Type: Grant
    Filed: January 27, 2000
    Date of Patent: November 13, 2001
    Assignee: Genesis Systems Group, Ltd.
    Inventors: Timothy A. Scherer, Douglas H. Juhl
  • Publication number: 20010030177
    Abstract: To achieve uniform heating of metal components in all their regions, a method and device for heating metal components using electron irradiation in a vacuum chamber includes multilayer holding elements having an outer layer facing the electron radiation. The outer layer is resistant to heat and exhibits good heat-absorption properties. The holding elements also have an inner layer facing the respective metal component and exhibiting good heat-radiating properties. The holding elements are used to hold the metal components in the vacuum chamber during heating.
    Type: Application
    Filed: March 30, 2001
    Publication date: October 18, 2001
    Inventors: Peter Botzler, Carsten Deus, Ekkehart Reinhold, Hans-Jochen Student, Lutz Wolkers
  • Patent number: 6175585
    Abstract: Apparatus and methods for limiting interaction of electron beams produced by adjacent electron bean guns mounted within a vacuum chamber of a furnace. The apparatus may include one or more barriers that are suspended within the vacuum chamber between adjacent electron beam guns. The methods may include suspending one or more vertically extending barriers with the vacuum chamber between adjacent electron beam guns.
    Type: Grant
    Filed: July 15, 1999
    Date of Patent: January 16, 2001
    Assignee: Oregon Metallurgical Corporation
    Inventors: Ingo A. Grosse, Leonard C. Hainz, II, Mark A. Hall
  • Patent number: RE38273
    Abstract: An RF probe for a plasma chamber picks up current and voltage samples of the RF power applied to an RF plasma chamber, and the RF voltage and current waveforms are supplied to respective mixers. A local oscillator supplies both mixers with a local oscillator signal at the RF frequency plus or minus about 15 KHz, so that the mixers provide respective voltage and current baseband signals that are frequency shifted down to the audio range. The phase relation to the applied current and voltage is preserved in the baseband signals. These baseband signals are then applied to a stereo, two-channel A/D converter, which provides a serial digital signal to a digital signal processor or DSP. A local oscillator interface brings a feedback signal from the DSP to the local oscillator. The DSP can be suitably programmed to obtain complex Fast Fourier Transforms of the voltage and current baseband samples.
    Type: Grant
    Filed: June 22, 2000
    Date of Patent: October 14, 2003
    Assignee: ENI Technology, Inc.
    Inventors: Kevin S. Gerrish, Daniel F. Vona, Jr.