Abstract: The present invention relates to a portable device for spraying a liquid at low pressure, said device comprising a spray arm (220), and characterized in that the spray arm comprises at least one flat fan spray nozzle (230). Preferably, the liquid is a cleaning composition for treatment of carpets and other large fabric coverings, more preferably, a composition comprising surfactants. Also preferably, the portable device is electrically driven, and/or the spray arm is extendible and/or detachable from the device's main unit.

Abstract: There is provided a reversible spray tip unit for an airless spray gun having an axially rotatable cylindrically shaped turret member with the spray tip nozzle arranged in a diametric fluid bore therein, the turret member being disposed in a complementary shaped bore of a housing and arranged transverse to the flow of paint, and a saddle seal received axially in the housing and having a cylindrically shaped sealing face mating with the cylindrical shape of the turret member at the diametric fluid bore housing the spray tip nozzle. Upon assembly of the disassembled reversible spray tip unit, the saddle seal is quickly inserted into the housing and accurately oriented so that its sealing face is aligned with the cylindrically shaped bore in the housing for the turret member by means of an insertion/orientation tool which is adapted to be keyed to the fluid bore of the saddle seal.

Abstract: The present invention provides a nozzle capable of easily removing an aspiration object (residual solidified object) and an aspirator equipped with such a nozzle. This nozzle is connected to the aspirator and is used to aspirate the aspiration object. The nozzle comprises: a nozzle body including an opening, which can be opposed to a surface with the residual aspiration object, and a suction port for aspirating the aspiration object; and a liquid injection mechanism, which is provided at the nozzle body, for ejecting liquid toward the aspiration object.

Abstract: Reversible spray head, including a reversible element or key (5) placed in a central body and through which is a channel (9) with a spray insert (10, 11) on each end; rotating the element or key 180° allows changing from one spray hole to the other.

Abstract: A fuel system having an ecology valve controlling liquid flow through a retention passage when pressurized liquid is passed through the valve is presented. The retention passage winds between the valve outlet and a cavity such that no matter which way the valve is oriented gravity alone is unable to drain liquid from the cavity to the outlet. The ecology valve serves to suction fuel from fuel nozzle passages upon engine shutdown. Fuel is temporarily stored in the cavity and the retention passage. The ecology valve also provides a fuel splitting function for providing a port geometry determined split between fuel nozzles in the fuel system.

Abstract: Spray head 1 especially for a high-pressure spray gun, comprising a rotary element 3, which is placed in a central body 2 and through which passes a spray nozzle 37, and a seal 4 ensuring leak-tightness between the rotary element 3 and the gun, the rotary element 3 having a circular central part 31 comprising the nozzle 37 and introduced into a lateral aperture 21 of the central body 2, the circular central part 31 being brought, by means of an upward translational movement of the central body 2, into a working position against an inner abutment located at the top of the central body 2, the nozzle 37 placed in the circular part 31 of the rotary element 3 being in the working position above the top of the central body 2.

Abstract: Reversible spray head, including a reversible element or key (5) placed in a central body and through which is a channel (9) with a spray insert (10, 11) on each end; rotating the element or key 180° allows changing from one spray hole to the other.

Abstract: A gas sprayer mounted on an edge removing robotic arm is disclosed, wherein the edge removing robotic arm circles around along the edges of a substrate and sprays a chemical solvent over the edge surface of the substrate to dissolve photoresist materials attached to the edges of the substrate; the edge removing robotic arm has a pumping conduit for sucking out the chemical solvent sprayed over the surface of the substrate and dissolved photoresist particles; the gas sprayer is mounted on the top of the edge removing robotic arm and comprises a hooked nozzle extending forward around the front end of the edge removing robotic arm and facing an opening of the pumping conduit to spray gas out so as to prevent the chemical solvent sprayed out from the edge removing robotic arm from splashing onto the interior of the substrate.

Abstract: The invention relates to a fluid or beverage dispensing device having self-cleaning dispensing nozzle. The device includes a body provided with a conduit having a first end to which a dispensing nozzle is connected, and a second end to which a fluid inlet line is intended to be connected. The device further includes a collector member that can move relative to the body between a first dispensing position in which the outlet of the nozzle is released from the collector member and a second cleaning position in which the collector member is placed in front of the nozzle outlet to collect any fluid that exits the outlet.

Abstract: A suck back valve has a volume-varying mechanism including a cylindrical flexible member which has a flow chamber formed therein for communicating with a fluid passage having a first port and a fluid passage having a second port, a fixing member which fixes a part of the outer circumferential surface of the cylindrical flexible member to a joint section, and a hook member which increases the volume of the flow chamber by expanding and deforming the outer circumferential surface of the cylindrical flexible member.

Abstract: The present invention relates to a method for cleaning a clogged or contaminated spray nozzle (10) or the filter (14) of such a spray nozzle used in coating a web of paper or paperboard. Herein, into at least of portion of the coating mix flow channel (24) of the spray nozzle (10) to be cleaned is formed a cleaning medium flow running reverse to the normal flow direction of the coating mix. The invention also relates to an apparatus suited for implementing the method.

Abstract: The invention concerns a spray head for high pressure spray gun comprising a rotary element located in a central body and traversed by a channel with a spray orifice and a sealing joint between the rotary element and the gun, the rotary element having in its central part a spherical shape cooperating with the joint located inside the central body and two circular seats located on either side of the spherical part supported by the seats located on either side of the body.

Abstract: The present invention prevents coolant from leaking out of a valve (23) after a feed pump (4) stops feeding the coolant, and diminishes a time-lag between the onset of feeding the coolant and mist generation, when the feed pump (4) starts feeding the coolant again. In the machine tool of this invention, the coolant is fed from a feed pump (4) into a mist generating device (13) provided on the tip of a spindle (8) by way of a feed line (7), and a valve (23) is provided at an inflow part for coolant of the mist generating device (13) to be closed when the coolant pressure within the feed line (7) lowers below a fixed level. A coolant sucking and delivering (2) sucks a fixed amount of coolant in the feed line (7), when the feed pump (4) stops feeding the coolant. On the other hand, the device (2) feeds a fixed amount of coolant into the feed line (7), when the feed pump (4) begins feeding the coolant.

Abstract: A reversible airless spray tip is provided with a housing for mounting to the front of a spray gun, a sealing saddle insertable into the housing, a seal associated with the saddle and a rotatable cylinder having a handle and containing an airless tip. The cylinder is insertable in the housing and has a protrusion on said cylinder for engaging and releasably retaining said seal for insertion into said housing.

Abstract: The comestible fluid dispensing system of the present invention preferably employs a pump or valve operable to control movement of comestible fluid from a comestible fluid source to a tap provided with a draw-back valve. The draw-back valve is preferably capable of drawing comestible fluid in an upstream direction in the tap during closure of the draw-back valve. Preferably, suction generated by closure of the draw-back valve is employed for one or more purposes including: to remove comestible fluid dangling from the tap, to draw comestible fluid into the tap away from view and from exposure to the environment, to reduce comestible fluid buildup on and near the tap outlet, to enclose or at least partially enclose comestible fluid downstream of the draw-back valve, and to operate a downstream cutoff valve in the tap. A damper is employed in some embodiments to control valve movement.

Abstract: A die for dispensing a fluid onto a substrate, wherein the die has an movable lip adjacent a fixed lip to form a die opening therebetween. An actuator is mechanically connected to the movable lip and is operable to automatically move the movable lip with respect to the fixed lip in association with a fluid dispensing process, thereby changing a volume of the die opening. The adjustable die is often a slot die and is used with a fluid dispensing valve having an upstream valve ball. The actuator can be an electromechanical actuator such as a piezoelectric actuator or a fluid operated actuator.

Abstract: The invention relates to a system made of an oil pump and of a magnet valve for preventing oil from dripping when the oil burner is switched off. The inventive system is provided with an oil pump (23) and a magnet valve (10) which has a closing body (16) that comprises an oil flow borehole (17). The closing body (16) is displaceably located in a borehole (12). An oil line (11) goes through the borehole (12). The oil flow borehole (17) of the closing body (16) complements the oil line (11) in a first position of the inventive magnet valve (10). The oil flow is thus released. The closing body (16) interrupts the oil line (11) in a second position of the magnet valve (10). A vacuum is simultaneously generated in said second position. The vacuum reverses the direction of oil flow in an end section (15) of the oil line (11). The oil is thus prevented from dripping.

Abstract: A spray tip assembly for airless paint sprayer guns incorporates a tip having multiple nozzles, each of which may be used independently. For a first embodiment of the invention the shaft of the spray tip assembly incorporates multiple spaced apart nozzles and a handle at one end thereof. The shaft also incorporates a spring-loaded detent ball which, in combination with a plurality of spaced-apart annular or semi-annular grooves in the housing bore, serves as a shaft locator for each of the nozzles. The grooves permit positioning of each of the nozzles in either a normal spraying position or in a reversed, unclogging position. For a second embodiment of the invention, the tip housing incorporates three spaced-apart annular channels, all three of which are interconnected by a tab-receiving slot shaped to admit a stop tab attached to the shaft.

Abstract: The invention relates to a dispenser for foamable liquids which has been improved with regard to the aspects of hygiene and reliability. According to the method, in addition to the pneumatic and hydraulic parts of the dispenser having a configuration which is to a great extent isolated from the external atmosphere, said dispenser has an air chamber (82) which subjects a nozzle/expansion body (74) first to an excess pressure and then to a negative pressure during the return stroke (HB) of an air piston (42) via a lateral bore (89). As a result, the outlet (80) is first cleared and any remaining foam in the nozzle/expansion body (74) is subsequently removed by suction and coagulated into soap solution. During the next working stroke, this minimal quantity of soap-solution is foamed again and expelled.

Abstract: A suck back valve has a volume-varying mechanism including a cylindrical flexible member which has a flow chamber formed therein for communicating with a fluid passage having a first port and a fluid passage having a second port, a fixing member which fixes a part of the outer circumferential surface of the cylindrical flexible member to a joint section, and a hook member which increases the volume of the flow chamber by expanding and deforming the outer circumferential surface of the cylindrical flexible member.

Abstract: The present invention is directed toward an ecology valve that drains working fuel to the sump chamber of the ecology valve upon engine shut down. The ecology valve has a piston slidable in the piston chamber between shut-off and run positions. The piston divides the piston chamber into a sump chamber and an actuation chamber. Upon engine shut down, the piston slides toward the shut-off position and suctions sufficient fuel from the fuel manifold into the sump chamber to prevent coking of the nozzles. Upon the next engine start up, the actuation chamber is pressurized which drives the piston toward the run position and returns fuel contained in sump chamber to the fuel manifold. A drain passageway opens and fluidically connects the actuation chamber to sump chamber when the piston is sliding toward the shut-off position which allows fuel contained in the actuation chamber to drain to the sump chamber.

Abstract: A spraying method of a dispense system for preventing residue, wherein a precise amount of stream fluid is supplied from a fluid supply through a main tube to a nozzle, and the precise amount of stream fluid is sprayed onto a surface of a wafer. A sub-tube system, which comprises a bypass valve and a pin hole is utilized to refill the fluid to a void. A metering valve is used as a suck-back system to retrieve the remaining fluid in the main tube and prevent residue from occurring.

Abstract: The present invention relates to a packaged product (1) comprising a package having a liquid reservoir (2) for containing a product, preferably a cleaning product, and a means for delivering the product (4) in a labour efficient way and in a uniform manner. This is achieved by a packaged product (1) in which the means (4) for delivering the product preferably comprises an electrically driven pump (5), and further comprises a spray arm (220), the spray arm (220) having at least one dispensing opening (225), the spray arm (220) being preferably either extended or extendible.

Abstract: The invention relates to a nozzle device including a housing (1) having an inlet for a fluid and an orifice for spraying out a firm jet of fluid (38), which orifice is delimited by two or more members, at least one of which is movable relative to the other one between a first position in which the orifice has a minimal cross-section area in order to spray out the fluid in a firm jet in a forward direction from the housing, and a second position in which the orifice is widened in order to be flushed clean by means of a coarse stream of fluid. According to the invention, a cap (2) is arranged in front of the orifice, said cap having two or more shield walls (16, 17) in which there are holes (20, 21) through which the firm jet of fluid (38), but not the coarse stream of flushing fluid, may pass.

Abstract: A spray tip assembly for airless paint sprayer guns incorporates a tip having multiple nozzles, each of which may be used independently. For one embodiment of the invention, the shaft of the spray tip assembly incorporates a pair of spaced apart nozzles and a handle at each end, one of which is removable for insertion into a bore of a spray tip assembly housing. The bore that extends through the housing so as to permit the shaft to axially slide between first and second positions, each of which is limited by one of the handles. For a second embodiment of the invention the shaft of the spray tip assembly incorporates multiple spaced apart nozzles and a handle at one end thereof. The shaft also incorporates a spring-loaded detent ball which, in combination with a plurality of spaced-apart annular or semi-annular grooves in the housing bore, serves as a shaft locator for each of the nozzles. The nozzles may be unclogged by reversing them.

Abstract: The present invention provides a removable reversible spray tip member for use with a variety of airless spray systems, wherein the spray tip comprises multiple orifice members.

Abstract: A cleaning attachment for a spray gun for effectively and efficiently cleaning a paint spray gun after use. The cleaning attachment for a spray gun includes a hose having a first end and a second end; and also includes a lid assembly including a lid having a wall for securely closing a top of a paint container mounted to a spray gun with the lid assembly further having a hose fitting disposed through the wall of said lid and being connected to the hose and with the lid assembly also having a ventilation assembly being securely disposed through the wall of said lid; and further includes hose connectors being securely attached to the first and second ends of the hose.

Abstract: A positive control fill valve for dispensing fillable materials which eliminates dripping, splashing, sloshing and contamination of fill materials is provided with a fluid activiated fill piston having a substantially cylindrical piston sealing head cooperating with a tapered seat for receiving the piston filling head in combination with a leak detection port for positively detecting potential leaks between the fluid activated fill piston and the product fill chamber. The novel fill valve preferably includes at one end, a pneumatic means for opening and closing the fill valve piston and at the other end, a fill chamber having a tapered seat for positively seating the sealing head of the pneumatically activated piston with a product inlet means disposed therebetween and a two seal arrangement separating the pneumatic chamber at one end from the product dispensing chamber at the other end and a leak detection port disposed intermediate the two seals.

Abstract: A saddle seal and washer insertion tool for airless paint spray tip assemblies having a housing containing a reversible tip holder of the type having cylindrical barrel with a handle formed of a polymer, located on and positioned generally transversely of the barrel, the housing having a longitudinal through bore for permitting delivery of paint, and a transverse bore for receiving the barrel of the tip holder, the insertion tool formed integrally with an end of the handle, the tool having a first portion with a width conforming to an internal diameter of the washer and a second portion extending beyond the first portion with a width conforming to a diameter of a bore in the saddle seal such that the washer can be received on the first portion and the saddle seal received on the second portion for alignment and installation into the housing.

Abstract: A spraying method of a dispense system for preventing residue, wherein a precise amount of stream fluid is supplied from a fluid supply through a main tube to a nozzle, and the precise amount of stream fluid is sprayed onto a surface of a wafer. A sub-tube system, which comprises a bypass valve and a pin hole is utilized to refill the fluid to a void. A metering valve is used as a suck-back system to retrieve the remaining fluid in the main tube and prevent residue from occurring.

Abstract: To provide a coating apparatus which is capable of making short a lag time up to action of a valve and making operate a discharging pump and a valve with the best timing. By employing electric-air regulators ER1 and ER2 of small size and high response speed as a speed controller for controlling a switching speed of a switching valve AV or a suck-back valve SV, total flowing course is made short, thereby a time lag up to operation of a valve is made short. Further, by detecting the pressure of a resist liquid being discharged from a discharging pump 120 by a pressure sensor 123, and by controlling the operation of each device of a discharging pump 120, a switching valve AV, and a suck-back valve SV through a controller 180, a discharging pump 120, a switching valve AV, and a suck-back valve SV can be operated with the best timings, and generation of particles due to dripping of a resist liquid at a tip end of a resist nozzle 60 is prevented from occurring.

Abstract: An improved reversible airless spray tip inhibits dripping, spitting, and undesirable paint accumulation on the spray guard, while improving safety. A positioning detent on the spray tip carrier handle snaps positively into place when a nozzle carrier is rotated into spray position, indicating that the tip is properly positioned for spraying. A spray guard with airfoil-like cross-members protects the user from injury while they inhibit turbulence and prevent paint accumulation. An improved piston seal has a slot-like fluid passage, which is preferably substantially rectangular in cross section. A rearward end of the piston seal is sealed by a resilient ring compressed directly against the face of an attached spray gun. An improved tip retainer is expanded by swaging after insertion, which forces a lip into a mating slot. The tip retainer also has an expanded chamber which diffuses reverse fluid flow for safety.

Abstract: An improved reversible airless spray tip inhibits dripping, spitting, and undesirable paint accumulation on the spray guard, while improving safety. A positioning detent on the spray tip carrier handle snaps positively into place when a nozzle carrier is rotated into spray position, indicating that the tip is properly positioned for spraying. A spray guard with airfoil-like cross-members protects the user from injury while they inhibit turbulence and prevent paint accumulation. An improved piston seal has a slot-like fluid passage, which is preferably substantially rectangular in cross section. A rearward end of the piston seal is sealed by a resilient ring compressed directly against the face of an attached spray gun. An improved tip retainer is expanded by swaging after insertion, which forces a lip into a mating slot. The tip retainer also has an expanded chamber which diffuses reverse fluid flow for safety.

Abstract: A photoresist dispensing device for use in applying a metered amount of photoresist on a wafer comprises, a photoresist storage tank, a nozzle for spraying the photoresist on the wafer, a feeder unit for drawing a metered amount of the photoresist out of the storage tank and discharging it through the nozzle, a pneumatic control unit for controlling the operation of the feeder unit with the use of pressurized air; and a filter disposed in between the storage tank and the feeder unit for removing alien matters present the photoresist.

Abstract: A system for flushing an airless sprayer essentially reverses operation such that the spray gun is immersed in a container of water or other solvent and that fluid is pulled through the pump and flushed through the normal inlet tube. The preferred embodiment attaches a fluid bar to the front of the spray gun to redirect the fluid for flushing. This reverse flushing action allows quicker flushing using less fluid.

Abstract: A fuel control system for supplying metered quantities of fuel from a fuel supply (11), through a fuel pump (13), a metering valve (15) and a pressurizing valve (17) to a plurality of engine fuel manifolds (31a, 31b, 33) includes an ecology valve (43) for withdrawing fuel from the engine fuel manifolds (31a, 31b, 33) during cessation of engine operation and for returning fuel to the engine fuel manifolds (31a, 31b, 33) to be burned during normal engine operation. The ecology valve (43) includes a valve housing (44) having a plurality of ecology ports (50, 52, 54) adapted to be coupled to corresponding ones of the engine fuel manifolds (31a, 31b, 33) and a control port (46) adapted to be connected to a corresponding control port (45) of the fuel pressurizing valve (17).

Abstract: A reversible airless spray tip is provided with a housing for mounting to the front of a spray gun, a sealing saddle insertable into the housing, a seal associated with the saddle and a rotatable cylinder having a handle and containing an airless tip. The cylinder is insertable in the housing and has a protrusion on said cylinder for engaging and releasably retaining said seal for insertion into said housing.

Abstract: An improved reversible airless spray tip inhibits dripping, spitting, and undesirable paint accumulation on the spray guard, while improving safety. A positioning detent on the spray tip carrier handle snaps positively into place when a nozzle carrier is rotated into spray position, indicating that the tip is properly positioned for spraying. A spray guard with airfoil-like cross-members protects the user from injury while they inhibit turbulence and prevent paint accumulation. An improved piston seal has a slot-like fluid passage, which is preferably substantially rectangular in cross section. A rearward end of the piston seal is sealed by a resilient ring compressed directly against the face of an attached spray gun. An improved tip retainer is expanded by swaging after insertion, which forces a lip into a mating slot. The tip retainer also has an expanded chamber which diffuses reverse fluid flow for safety.

Abstract: A reversible spray nozzle for use in a fluid dispersing system which consists of a nozzle portion defining a cylindrical channel therewithin, the nozzle portion having opposing ends, the opposing ends threaded for communicating with the fluid dispersing system, the cylindrical channel extending the length of the nozzle portion, the cylindrical channel for receiving a cylindrical flow tube; and the flow tube defining a delivery channel, the delivery channel extending the length of the flow tube, the delivery channel for providing a flow path for a fluid. The spray nozzle can be configured such that the flow tube is slideably disposed within the nozzle portion, and where the length of the flow tube is less than half of the length of the cylindrical channel of the nozzle portion.

Abstract: A lift amount of a valve plug is controlled with respect to a period of time from valve-closing operation instruction time for an electric opening/closing valve to arrival at a preset quick valve-closing operation position at which a flow line of a fluid discharged from a discharge port of a nozzle is in a constricted state, in accordance with a driving action of an electric actuator. The valve plug of the electric opening/closing valve is controlled to be at a closed position after the arrival at the quick valve-closing operation position. Accordingly, it is possible to prevent the incontinent liquid drip from the nozzle during the valve-closing operation of the electric opening/closing valve.

Abstract: In a device (1) for delivering liquid or paste-like media to a coating unit (2) by a delivery pump (3) which is connected to a supply reservoir (7) via a suction line (5) and is connected to the coating unit (2) via a delivery line (6), the device can be connected directly or via the coating machine (2) to the suction line (5) in order to clean the delivery pump (3), the suction line (5) and/or the delivery line (6). Using the delivery pump (3), this design allows the suction line (5) also to be cleaned in a simple manner, so that deposits in the suction line (5) can be reliably removed.

Abstract: A suck back valve comprises an ON/OFF valve, a suck back mechanism, a first sensor for detecting a displacement amount of a first diaphragm of the ON/OFF valve, and a second sensor for detecting a displacement amount of a second diaphragm corresponding to a suction amount of a coating liquid. The suck back valve further comprises a control unit for feedback-controlling the valve displacement speed of the ON/OFF valve and the suction amount of the coating liquid on the basis of detection signals obtained by the first sensor and the second sensor respectively.

Abstract: Disclosed is an oil burning system that is capable of burning oils of varying viscosities, including high viscosity waste oils and low viscosity heating oils. Suitable as a new installation or a retrofit modification, the present invention incorporates the use of a variable rate, high-pressure oil delivery system, along with an oil pre-heater, in conjunction with a modified high-pressure atomizing nozzle. Installed in a sliding drawer burner arrangement that allows for quick and easy access, the oil burning system also includes a means by which particulate matter and carbonization build-ups are removed from the burner nozzle automatically, thereby eliminating the need for frequent cleaning.

Abstract: A row of openings on the same axis are located on a rotary fitting mounted on a front face of a cylindrical nozzle body having a longitudinal bore. A nozzle retainer is mounted within the longitudinal bore and has a tapered seal within an inner channel. A passageway within the tapered seal aligns with a channel in the rotary fitting leading to the row of openings. A filled resin is pumped through the nozzle openings via a standard resin gun. When the nozzle openings plug with resin, the rotary fitting is turned 180 degrees and the plug material is evacuated by a pressurized fluid.

Abstract: It is therefore an object of the present invention to provide a valve assembly of the general class aforedescribed having the capability of drawing-back the flow of product from the nozzle after valve closing, in a more accurate and precise manner, requiring few moving parts, without the need of external sources for moving any of the parts, and in a manner which automatically closes the discharge and thereafter creates the suck-back flow.

Abstract: A opening and closing valve comprises ROM in which a plurality of valve-closing program control patterns are stored in order to avoid liquid drip when the valve is closed. The valve further comprises a control unit for controlling a valve plug lift position in a direction to close the valve by controlling an amount of electric power application to a linear voice coil type driving unit in accordance with the valve-closing program control pattern.

Abstract: An apparatus and method for painting a workpiece while switching paint colors between successive painting cycles includes a paint supply switching device, a paint feed line connected to the paint supply switching device, a separating element adapted to move back and forth in at least a portion of the paint feed line, first and second receiver stations adapted to receive the separating element at the end positions of its travel in the paint feed line, and a paint spray nozzle at a terminal end of the paint feed line. The separating element is actively held in the first receiver station while paint of a first color is supplied through the paint feed line and sprayed from the nozzle onto a workpiece.

Abstract: A photoresist suck-back device is shown for a photoresist supply apparatus in a semiconductor device manufacturing system which prevents the accumulation of photoresist inside a photoresist spray line. The suck-back device is composed of a suck-back valve which is installed on a photoresist spray line connected to a photoresist supply line of a photoresist supply apparatus. The suck-back valve is constructed of a suction chamber for sucking the photoresist remaining within the photoresist spray line. The suction chamber is shrinkable and has a shape such that the sucked photoresist is not accumulated therein. A control part controls the size of the suction chamber of the suck-back valve through an air line. A cut-off valve is disposed between the photoresist supply line and the photoresist spray line which opens and closes the photoresist supply line under control of the control part through the air line.

Abstract: To prevent dripping of liquid from an outlet opening of a line, a drip suon device is assigned to the end of the line; the drip suction device has a housing which surrounds the end of the line with the formation of a chamber connected to the interior of the line via through openings and negative pressure can be applied to it via another line to suck up liquid residues which remain in the area of outlet opening after the liquid flow through the line is shut off, and a circuit to activate the drip suction device to apply negative pressure to the chamber when the liquid flow through the line is interrupted by a shutoff element assigned to the line.

Abstract: A suck back valve is equipped with a coupling having a fluid passage with a first port formed in one end, and a second port formed in another end thereof, a suck back mechanism for sucking a pressurized fluid inside the fluid passage under a displacement action of a second diaphragm which is displaced by a pilot pressure, and an ON/OFF valve disposed coaxially with the second diaphragm for opening and closing the fluid passage by displacement and movement thereof with the second diaphragm.