Abstract: Embodiments of a gas distribution plate for distributing gas in a processing chamber are provided. In one embodiment, a gas distribution plate includes a diffuser plate having an upstream side and a downstream side, and a plurality of gas passages passing between the upstream and downstream sides of the diffuser plate. At least one of the gas passages has a cylindrical shape for a portion of its length extending from the upstream side and a coaxial conical shape for the remainder length of the diffuser plate, the upstream end of the conical portion having substantially the same diameter as the cylindrical portion and the downstream end of the conical portion having a larger diameter.

Abstract: A slinger device for use in a humidifier liquid dispersion system includes blades having a main sloping section tilted in two planes relative to the rotational axis of the assembly and provided with flange means substantially co-extensive with at least one side edge whereby the outer edge of the flange means extends a constant distance from the axis of rotation.