Abstract: An apparatus for dispersing a fluent material has an initial disperser for breaking a stream of fluent material into discontinuous parts. The apparatus has an electrode supply device that provides free electrons that impart a net charge on the discontinuous parts to disperse the discontinuous parts. A method is also disclosed in which electrons are directed at a flow of droplets of fluent material to disperse the fluent material.

Abstract: A method is provided for joining a microchip device to a capillary tube. The microchip device has a capillary channel opening onto an edge surface of the device. A short hole is drilled into the edge surface, aligned with the capillary channel. The drilling is done with a flat bottom, preferably by a two-step drilling process. Then, the end of the capillary can be inserted into the hole so that its end is substantially flush with the flat bottom of the hole, thereby eliminating dead volume. Testing has shown that this connection provides very little band broadening of samples transported through the capillary channel into the capillary tube. The tip of the capillary tube can be tapered, so that it is suitable for use as an electrospray source for a mass spectrometer.

Abstract: A process for purifying a dense dielectric fluid containing a contaminant comprising applying a plasma to a dense dielectric fluid containing a contaminant at a pressure, temperature, and for a time sufficient to oxidize the contaminant.

Abstract: The multimedia and scent storage medium described herein comprises a multimedia storage region for storing multimedia information; a scent storage region for storing multiple scents; scent identification information for identifying which scents are stored in the scent storage region; and scent recovery information stored in the multimedia storage region for sequencing recovery of scents stored in the scent storage region to coincide with audio and/or video information stored in the multimedia region. Variants of the multimedia and scent-bearing medium described herein can have electrostatic scent release systems and/or capillary tube scent release systems. The integrated system described herein comprises a multimedia and scent storage medium and a multimedia player and scent recovery system for use in conjunction with the multimedia and scent-bearing medium.

Abstract: A dust collector for collecting dust, in which the rarefaction of a dielectric at the rear part of electric field forming apparatus is prevented, whereby the collecting efficiency can be increased. The dust collector includes a charging device for charging a substance to be collected, such as dust and mist, contained in a gas; a sprayer device for spraying a dielectric on the substance to be collected which is charged by the charging device; an electric field forming device, having first and second electrodes and which form a direct current electric field and dielectrically polarize the dielectric sprayed by the spray device; and a dielectric collecting device for collecting the dielectric which has arrested the substance to be collected. The spray device includes grounding device and for electrically grounding the dielectric before being sprayed to let a charge of the dielectric escape.

Abstract: In a powder spray device for the electrostatic coating of workpieces with powder at least partly comprising electrically conductive particles and having a powder channel (10) for delivering the powder to an outlet directed towards the workpiece the powder channel contains a local cross-sectional reduction. The cross-sectional reduction brings about a velocity increase of the powder in the powder channel, thereby preventing an adhesion of the powder to the inner wall of the powder channel.

Abstract: The invention relates to an electrospray emitter (1′; 1″; 1′″), comprising an essentially tubular member (2; 5; 7) having an inlet end and an outlet end. There is provided a spray aperture (4) in the outlet end, having an inner diameter suitable for the generation of electrospray usable in mass spectrometry. At least a surface portion of the emitter comprises a conductive polymer composition that is stable in conditions prevailing during electrospray.

Abstract: An object of the present invention is to provide an improved electrostatic painting device wherein spray coating may be carried out by keeping a spray distance of the electrostatic painting machine within an optimum distance range which provides a good coating efficiency and to prevent the coating worker from extending unconsciously the spray distance out of the optimum distance range.

Abstract: A supply pipe (33) supplies a liquid to a comminution site (40) at which the liquid is subjected to an electric field so as to produce charged comminuted material. An electrical discharge electrode (5) produces ions to at least partially electrically discharge the comminuted material. A further electrode (60) spaced from the comminution site (40) by the electrical discharge electrode (50) electrically attracts ions produced by the electrical discharge electrode (50) away from the comminution site (40) until sufficient space charge is built up to divert the ions towards the charged comminuted material to enable the ions at least partially to discharge the comminuted material.

Abstract: An improved method of counteracting or neutralizing airborne malodour comprising directing at the source of the malodour liquid droplets from a spray device containing a malodour counteracting composition, the improved method comprising imparting a unipolar charge to the said liquid droplets by double layer charging during the spraying of the liquid droplets by the spray device, the unipolar charge being at a level such that the said droplets have a charge to mass ratio of at least ±1×10−4C/kg.

Abstract: A spindle for an electrostatic painting machine has a main spindle and a rotor coupled to the rear end of the main spindle. The main spindle and the rotor are rotatably supported through bearing gaps of externally pressurized gas bearing portions, and a paint spray head is mounted to one end of the main spindle. A current-carrying member having conductivity with the housing is brought into contact with the main spindle and floated off it via a small gap due to dynamic pressure produced by the rotation of the main spindle. With this arrangement, it is ensured that discharge occurs at gaps of externally pressurized gas bearing portions, sputtering is suppressed, and the life of the spindle is prolonged.

Abstract: A rotary atomizer including a bell element having a paint tube, a deflector having a conical distribution surface opposite the paint tube outlet, including a tip portion within the paint tube, directing paint to a paint overflow surface through an annular conical channel adjacent the outer edge of a nonconductive end face, an annular electrostatically charged surface surrounding the outer edge of the end face generating an annular electrostatic field and an axial electrode having a sharp distal end in the plane of the annular electrostatically charged surface generating a second axial electrostatic field.

Abstract: A power supply apparatus for electrostatic charging sprayed liquids from a spraying apparatus and method for same, the apparatus including a rotor having a magnet and magnetic poles, a booster coil assembly facing the rotor, for inducing high voltage AC pulses during the rotation of the rotor, and a rectifier for rectifying the high voltage AC pulses induced by the booster coil assembly to high voltage DC pulses and for supplying the high voltage DC pulses to a charging electrode. The power supply apparatus provides a compact and lightweight power generator system, thus eliminating cumbersome operations such as replacement or recharging of a large battery. In addition, a lighter weight and simplified operation reduces the burden on users and facilitates more efficient spraying.

Abstract: A rotating powder bell cup electrostatic spray assembly is provided. This assembly includes a bell cup body removably mated coaxially by screw threads to a first deflector, the assembly rotatably affixed to an air powder supply. Preferably, the bell cup and first deflector are constructed from an insulative, non-stick material. The assembly includes unique, streamlined, preferably teardrop shaped, paddle deflectors. All corners around which powder passes are rounded, thereby achieving streamlined flow and little or no powder accumulation, as well as improved efficiency, ease of assembly and disassembly, and ease of cleaning for such devices. A preferred non-stick material of construction of the bell cup and first deflector is polytetrafluoroethylene.

Abstract: A manual spray-coating gun comprising at least one manual setting/operating element (40, 42) to manually change operational values and transmitting the desired operational values to a control unit (4) situated outside the gun.

Abstract: An electrostatic spray gun apparatus includes a spray gun housing and a nozzle attached to a spray end of the housing, and a powder path that extends in a substantially straight line along an axis of the housing from the powder inlet to the powder outlet. The powder path is in the form of an enclosed smooth powder passage that is substantially continuous and uninterrupted from the powder inlet to the powder outlet to eliminate substantially all recesses or gaps that could capture or trap powder. The powder passage is formed by a plurality of tubular segments that are aligned along the housing axis and abut end to end. that when assembled in the housing axially compress the segments together to substantially eliminate dead spots or recesses to form the continuous smooth powder path. A gun purge function is provided that allows a purge line to be installed on the gun assembly. A cartridge valve and conductor assembly is provided between the gun electrode in the nozzle and the output of the voltage multiplier.

Abstract: A spraycoating apparatus with a tubular, hollow affixation element (16) to affix an adapter (8) to a casing (2), a coating-material tube (14) running through the hollow affixation element (16) into the casing (2).

Abstract: A powder spraycoating apparatus comprising at least one compressed-air outlet (8) connected to a source (14) of compressed air from which it receives compressed air (15) at such a rate and such pressure that the compressed air at the compressed-air outlet (8) shall detach the powder's boundary layer from the powder duct (4) and shall concentrate the powder flow toward the radial flow center and make it swirl, at a site near the downstream end (6) of the powder duct (4).

Abstract: A waterborne paint bell applicator is movable to and from a docking position and includes a paint receptacle connected to a paint canister. A paint filling station has a plurality of paint injectors each connected to a different color paint supply and being movable to the docking position for engagement with the paint receptacle for filling the paint canister with paint. A servomotor drives a piston in the canister.

Abstract: A plurality of unconventional negative tribo-charging materials are described for use as the powder contact surfaces in tribocharging and corona powder spray guns, gun components, and powder delivery system components. The invention also provides a short barrel tribo-charging powder spray gun having an interchangeable powder contact insert and nozzle, with turbulence inducing air jets. The invention further provides novel tribocharging and corona gun designs. Improved powder coating systems are made possible wherein, for example, negative tribo guns can be utilized with negative corona guns to coat different parts of the same workpiece in a powder coating system. Also provided is an inside-out configuration in which pressurized air directs powder coating material outward towards a charging surface. Additional configurations provide air jet induced tribocharging and conventional tribocharging portions combined in a single gun.

Abstract: The present invention is directed to a flow splitter that includes an outer fluid conduit for receiving an incoming fluid flow that is the bulk flow of effluent from a liquid chromatographic column, flowing at an input flow rate. The flow splitter further includes an inner fluid conduit coaxially mounted within the outer fluid conduit so that a portion of the incoming fluid is split off into the inner fluid conduit and flows into the input end thereof. The inner fluid conduit extends beyond the exterior of the outer fluid conduit to provide an output fluid flow having an output flow rate that is less than the input flow rate. The outer fluid conduit further includes a fluid outlet that provides an outlet for the portion of the incoming fluid that is not split by the inner fluid conduit. A restriction valve can be coupled to the fluid outlet to finely adjust the output flow rate. The input end of the inner fluid conduit is positioned so as to be substantially free of turbulence from the fluid outlet.

Abstract: A remote low voltage power source for electrostatic paint applicators used in hazardous locations. A low voltage generator and voltage conditioning and regulating circuitry are mounted in a small explosion proof housing. A generator shaft and a shaft on a voltage level adjusting potentiometer extend through and projects from the housing. The flamepath and the flame gap for the shafts meet explosion proof standards while permitting shaft rotation. An air driven turbine is mounted on the exterior of the housing and is connected to the projecting generator shaft to drive the generator. The low voltage is applied to a spray gun which includes circuitry for increasing the voltage to a high level for electrostatic charging sprayed paint.

Abstract: A plurality of unconventional negative tribo-charging materials are described for use as the powder contact surfaces in tribocharging and corona powder spray guns, gun components, and powder delivery system components. The invention also provides a short barrel tribo-charging powder spray gun having an interchangeable powder contact insert and nozzle, with turbulence inducing air jets. The invention further provides novel tribocharging and corona gun designs. Improved powder coating systems are made possible wherein, for example, negative tribo guns can be utilized with negative corona guns to coat different parts of the same workpiece in a powder coating system. Also provided is an inside-out configuration in which pressurized air directs powder coating material outward towards a charging surface. Additional configurations provide air jet induced tribocharging and conventional tribocharging portions combined in a single gun.

Abstract: An electrostatic atomizer includes a body defining an interior space and a discharge orifice communicating with the interior space. An emitting electrode or electron gun is disposed inside the body so as to apply charges to the fluid passing through the interior space. A counter electrode is disposed outside the body. The exposed surfaces on the interior of the body are formed from a dielectric material so that there is no substantial electric field between exposed conductive elements on the inside of the body. This arrangement minimizes soot buildup and plugging of the orifice. The device may include a single element defining numerous orifices and formed by micro-machining techniques such as those used in fabrication of semiconductor devices. Orifice sizes as small as a few micrometers can use successfully to provide controllable atomization at extremely low flow rates.

Abstract: A power supply for an electrostatic powder spray gun is formed in the shape of a hollow cylinder with a central passageway therethrough. A powder tube is slideably inserted through the central passageway of the power supply thus providing a more compact and symmetric spray gun profile. The power supply may be a voltage multiplier, for example.

Abstract: A composition used in combination with an electrohydrodynamic device capable of delivering an active ingredient to the aerodigestive system of the user. The composition comprises three or optionally four basic components: an active ingredient; a carrier material in which the active ingredient may be dissolved, suspended, or emulsified; an aerosol properties adjusting material which provides the composition with the physical characteristics required to create an aerosol cloud by electrostatic or electrohydrodynamic means; and optionally at least one excipient that further adjusts, preserves, stabilizes, or enhances the overall performance of the composition.

Abstract: A flexible charged powder particle application device consisting of a resistor unit in contact with a power source on one side thereof and with wiring on a second side thereof, the resistor being found within an electrode block unit with a centerhole and connected to an electrode block extension unit with a centerhole all within housing and with the wiring being insulated within flexible tubing material being attached at one end to splines on an end of the extension unit such that the tubing is amenable to carriage within it of the wiring as well as accommodating within it, a flow of powder particles introduced under pressure into the centerholes such that charge from the power source via the wiring and the powder particles under pressure are amenable to concomitant expulsion from the tubing held at a second end by splines on an electrode hub holding an electrode base and electrode and adapter nozzle via a held base bushing and adapter screw lock into and about the housed electrode out through the hub for ult

Abstract: A dust collector for collecting dust, in which the rarefaction of a dielectric at the rear part of electric field forming apparatus is prevented, whereby the collecting efficiency can be increased. The dust collector includes a charging device (1) for charging a substance (9) to be collected, such as dust and mist, contained in a gas; a sprayer device (2) for spraying a dielectric (10) on the substance (9) to be collected which is charged by the charging device (1); an electric field forming device (3), having first and second electrodes (11) and (12) which form a direct current electric field and dielectrically polarize the dielectric (10) sprayed by the spray device (2); and a dielectric collecting device (16) for collecting the dielectric (10) which has arrested the substance (9) to be collected. The spray device (2) includes grounding device (17) and (18) for electrically grounding the dielectric (10) before being sprayed to let a charge of the dielectric (10) escape.

Abstract: An improved method of denaturing or deactivating an airborne allergen comprising directing at the airborne source of the allergen liquid droplets from a spray device containing a liquid composition which includes an allergen denaturant or allergen deactivant, the improved method comprising imparting a unipolar charge to the said liquid droplets by double layer charging during the spraying of the liquid droplets by the spray device, the unipolar charge being at a level such that the said droplets have a charge to mass ratio of at leaset ±1×10−4 C/kg.

Abstract: A laboratory microchip includes a carrier with a micro spray tip projecting vertically out of a plane of the carrier. The carrier and spray tip are designed as a monolithic or single unit. The spray tip includes a passage channel which conveys the substances to be sprayed from a channel to a spray tip aperture. The channel is a part of a channel structure which is enclosed to the outside by a cover plate. The spray tip includes, on the sides of the spray aperture, an area which tapers conically inwards. Connected to this tapered area is a constant cross-section drill hole forming an annular internal step formation at the transition between the two areas. The outer diameter of the conically tapering tip is locally reduced in proximity to the aperture to provide a finer tip to the spray tip. The finer tip increases the electrical fields occurring at the tip, to further increase the forces which act on the substances and for dispersion spraying.

Abstract: An electrostatic spray gun apparatus includes a spray gun housing and a nozzle attached to a spray end of the housing, and a powder path that extends in a substantially straight line along an axis of the housing from the powder inlet to the powder outlet. The powder path is in the form of an enclosed smooth powder passage that is substantially continuous and uninterrupted from the powder inlet to the powder outlet to eliminate substantially all recesses or gaps that could capture or trap powder. The powder passage is formed by a plurality of tubular segments that are aligned along the housing axis and abut end to end. that when assembled in the housing axially compress the segments together to substantially eliminate dead spots or recesses to form the continuous smooth powder path. A gun purge function is provided that allows a purge line to be installed on the gun assembly. A cartridge valve and conductor assembly is provided between the gun electrode in the nozzle and the output of the voltage multiplier.

Abstract: An electrostatic atomizer includes a body defining an interior space and a discharge orifice communicating with the interior space. An emitting electrode or electron gun is disposed inside the body so as to apply charges to the fluid passing through the interior space. A counter electrode is disposed outside the body. The exposed surfaces on the interior of the body are formed from a dielectric material so that there are no substantial electric field between exposed conductive elements on the inside of the body. This arrangement minimizes soot buildup and plugging of the orifice. The device may include a single element defining numerous orifices and formed by micro-machining techniques such as those used in fabrication of semiconductor devices. Orifice sizes as small as a few micrometers can use successfully to provide controllable atomization at extremely low flow rates.

Abstract: A spraying device for dispensing electrostatic liquid droplets includes a container holding a liquid at one end, and having a nozzle assembly with an aperture at another end. The nozzle assembly includes a longitudinal hollow tube terminating in a metallic structure. The metallic structure includes a metallic base plate having at least one aperture formed therein for fluid communication with the hollow tube. The longitudinal hollow tube includes an end inserted in the liquid. A charge accumulator disposed in the liquid accumulates electrostatic charges. A wire conductor between the base plate and the charge accumulator transfers the electrostatic charges from the liquid to the nozzle assembly.

Abstract: An electrospray device, a liquid chromatography device and an electrospray-liquid chromatography system are disclosed. The electrospray device comprises a substrate defining a channel between an entrance orifice on an injection surface and an exit orifice on an ejection surface, a nozzle defined by a portion recessed from the ejection surface surrounding the exit orifice, and an electrode for application of an electric potential to the substrate to optimize and generate an electrospray; and, optionally, additional electrode(s) to further modify the electrospray.

Abstract: A gas turbine engine includes a combustion main chamber into which opens one end of an upstream combustion pre-chamber having a burner face at its opposite end. A swirler assembly has a plurality of generally tangentially extending swirler vanes circumferentially spaced by passages disposed about a center and along which combustion air follows radially inward paths into the pre-chamber. Each passage is provided with a respective liquid fuel injection nozzle including an electrode to be electrostatically charged so each injection nozzle can impart electrostatic charge to droplets of fuel emerging from the nozzles to travel with the combustion air into the pre-chamber. Walls of the passages comprise electrodes which can be charged to the same polarity as the charged fuel.

Abstract: An electrostatic coating system for dispensing multi-component waterborne coating materials from a coating material supply container having an insulated outer portion and a coating material supply line coupled to a dispenser, a metal tube disposed in the container in contact with coating material therein, a first non-conductive fitting coupling a first end portion of the tube to a first opening of the container, a second non-conductive fitting coupling a second end portion of the tube to a second opening of the container, and a cooling fluid supply device coupled to the tube.

Abstract: The invention provides a gun for spraying a powder onto a work piece to form a coating and includes a pistol-grip housing having an air valve coupled to a source of pressurized air. The housing also supports a source of variable electrical potential. A powder container is disposed in fluid communication with the air valve so that powder within the container may be fluidized by air from the source of pressurized air when the valve is opened. A nozzle is positioned within the housing and includes a central passageway having an open end and disposed in fluid communication with the powder container. The central passageway frictionally imparts a net electrical charge of a first polarity to a first portion of the powder when the first portion of the powder contacts the surface during the spraying.

Abstract: An inhaler for enabling inhaled administration, has a housing having an outlet duct defining a passageway through which air can be drawn by inhalation on the part of a user. The housing contains a capillary nozzle; a container for containing a quantity of liquid to be supplied to the capillary nozzle; and an electric field controller for applying a voltage to the liquid prior to issue from the container via the capillary nozzle to expose the liquid to an electric field to cause comminution of the liquid emerging from the capillary nozzle to product a spray of electrically charged droplets such that upon inhalation by the user, electrically charged droplets for the deposition in the user's airways.

Abstract: A electrohydrodynamic aerosol sprayer wherein a gas flow deflector is used for creating a gas flow past the spray nozzle to stabilize the Taylor cone and to transport at least a portion of the aerosol away from the region downstream of the spray nozzle. This stabilization of the cone and transport of aerosol improves the droplet size and distribution and may also reduce the deposit of droplets on the internal components of the device.

Abstract: The present invention is directed to methods and apparatus that use electrostatic and/or electromagnetic fields to enhance the process of spray forming preforms or powders. The present invention also describes methods and apparatus for atomization and heat transfer with non-equilibrium plasmas. The present invention is also directed to articles, particularly for use in gas turbine engines, produced by the methods of the invention.

Abstract: There is a wear-type of static eliminator which comprises a static eliminator body attachable to the human body, and a discharge section disposed within said remover body to issue ions toward the human body, Also there is a static potential measuring instrument which comprises: a plus discharge needle for use in plus ion discharge, a minus discharge needle for use in minus ion discharge, a current source for generating a current supplied to said plus discharge and minus discharge needles, a plus current ammeter for measuring a current flowing from said current source to said plus discharge needle, a minus current ammeter for measuring a current flowing from said current source to said minus discharge needle, means of calculating the difference between absolute values of currents obtained by said ammeters, the ratio of one absolute value of current obtained by one of said ammeter to the other absolute value of current obtained by the other of said ammeter or both the difference and the ratio, and a measuring t

Abstract: An ultrasonic fuel injector for injecting a pressurized liquid fuel into the combustion chamber of an internal combustion engine that uses an overhead cam for actuating the injector, includes an injector body and an injector needle. The injector needle is disposed within the body and includes a magnetostrictive portion disposed in the region of the body defined by a ceramic wall, which is transparent to magnetic fields changing at ultrasonic frequencies. A wire coil is wound around the outside surface of the ceramic wall and connected to a source of electric power that is controlled to oscillate at ultrasonic frequencies during predetermined intervals of operation of the injector. A sensor is configured to signal when the overhead cam is actuating the injector to inject fuel into the combustion chamber of the engine.

Abstract: A method and a configuration are provided for transporting electrically conductive paint from a point at earth potential to at least one paint application device which is at a high voltage potential. A needed quantity of paint is filled into a cartridge at a point at earth potential. The filled cartridge is conveyed by a first conveying device to a second conveying device. The cartridges are then allocated to workpieces to be painted. The filled cartridge is transported by the second conveying device to the at least one paint application device. At the paint application device, the cartridge is connected to at least one spray head. The emptied cartridge is transported by the second conveying device to a third conveying device, and the third conveying device transports the cartridge back to the loading station, while a further cartridge is filled there and conveyed by the first conveying device.

Abstract: A spray head for a spraying apparatus comprising a body formed as a conduit leading from an inlet end to a discharge end at which it forms a discharge pattern. A high velocity stream of air is injected into the head at its inlet end and flows through the conduit to its discharge end. Adjacent to the discharge end, a rank of injection nozzles injects liquid into the air stream, and adjacent to the nozzles, a rank of electrodes is formed as ports in the wall of the conduit.

Abstract: A wear resistance coated bell atomizer (32) and method for making same. The coating applied to the outer surface of a bell cup (36) of the bell atomizer (32) is preferably a silicon-doped amorphous carbon coating. This silicon-doped amorphous carbon coating significantly increases the usable life of a bell cup (36) in a bell atomizer paint system (10) by limiting the effects of abrasive materials on the wearable surfaces of the bell cup (36), including the top serrated edges (46), which may negatively affect the performance of uncoated bell atomizer spray equipment.

Abstract: A device and method for atomizing a liquid medium, including an electrically conductive nozzle body with an internal volume for holding the liquid medium, at least one nozzle opening as well as a high-voltage electrode arranged inside the internal volume coaxially to a longitudinal axis of the nozzle body. The high-voltage electrode is provided in the area of its greatest lateral expansion with a circumferential, sharp edge that extends at a small distance to the nozzle body in order to be able to bring about the electrostatic charging of the passing liquid medium. This construction enables the electrostatic atomization in a simple manner even for multi-hole nozzles, so that the electrostatic atomization also can be used in the field of gas turbine technology for improving the injection in the start-up and partial load range.

Abstract: This invention relates to an inhalation apparatus for dispensing an inhalable substance and, in particular, but not exclusively, to an apparatus for use in the delivery of therapeutic substances to the human lung. There is provided and apparatus for dispensing an aerosol of electrostatically charged droplets including a housing having an open end duct in which are located a first electrode having an upper surface lying in a generally longitudinal plane of the duct and a second electrode spaced from the first electrode. The apparatus further includes means for delivering a metered quantity of liquid to the upper surface of the first electrode for atomization, and charging means for applying a higher potential to the second electrode with respect to the first electrode to effect atomization.

Abstract: A dispensing device has a liquid supplier having a liquid outlet; an electrical charger for generating an electrical field to cause liquid issuing from the liquid outlet to be comminuted to provide electrically charged comminuted matter; an electrical discharger for providing ions for at least partially electrically discharging the comminuted matter; and an ion attracter for attracting ions generated by the electrical discharger away from the electrical charger until a spray cloud of electrically charged comminuted matter has been established by the electrical charger.

Abstract: In an electrostatic sprayer, a pulsating voltage developed using a battery or a generator as a power supply is stepped up using a step-up transformer. A resultant high-voltage pulse is rectified and applied to an electrostatic electrode. A spray jetted from a spray nozzle is thus electrified. Herein, the step-up transformer is located near the spray nozzle. Owing to this structure, a high voltage produced by the step-up transformer can be applied to the electrostatic electrode with a loss minimized.

Abstract: There is provided an apparatus for spin-coating a semiconductor substrate, including (a) a rotary table rotatable in opposite directions, (b) a nozzle dropping coating material onto a semiconductor substrate lying on the rotary table, (c) an electrode having a ring-shaped cross-section and disposed around the rotary table, and (d) a power source applying a voltage to the electrode, the voltage having an electric polarity opposite to an electric polarity of the coating material. Coating material dropped onto the semiconductor substrate is attracted to an electric field generated by the electrode around the semiconductor substrate. Hence, the coating material is not concentrated around a center of the semiconductor substrate, but is facilitated to uniformly spread over the semiconductor substrate, ensuring formation of a coating layer having a uniform thickness.