Source With Charged Plate-type Detector Patents (Class 250/315.3)
  • Patent number: 9878485
    Abstract: For the production of embossed microstructures in radiation-curing materials, use is made of a micro embossing form fixed to a reflective or scattering cylinder surface. Via a press nip, the micro embossing form comes into contact with the substrate guided over a cylinder or a deflection roller. The radiation-curing material is acted on in one or both pockets, before or after the press nip, with radiation which penetrates into the press nip by reflection or scattering.
    Type: Grant
    Filed: September 5, 2013
    Date of Patent: January 30, 2018
    Assignee: Heidelberger Druckmaschinen AG
    Inventors: Edgar Doersam, Thorsten Euler, Immanuel Fergen, Martin Haas, Evgeny Kurmakaev, Martin Schmitt-Lewen, Joachim Sonnenschein
  • Patent number: 9846930
    Abstract: Methods and systems for detecting defects on a wafer using defect-specific and multi-channel information are provided. One method includes acquiring information for a target on a wafer. The target includes a pattern of interest (POI) formed on the wafer and a known defect of interest (DOI) occurring proximate to or in the POI. The method also includes detecting the known DOI in target candidates by identifying potential DOI locations based on images of the target candidates acquired by a first channel of an inspection system and applying one or more detection parameters to images of the potential DOI locations acquired by a second channel of the inspection system. Therefore, the image(s) used for locating potential DOI locations and the image(s) used for detecting defects can be different.
    Type: Grant
    Filed: December 12, 2016
    Date of Patent: December 19, 2017
    Assignee: KLA-Tencor Corp.
    Inventors: Kenong Wu, Lisheng Gao, Grace Hsiu-Ling Chen, David W. Shortt
  • Patent number: 9500978
    Abstract: An image forming apparatus includes a first electric charging unit having an electric discharge wire to uniformly electrify a surface of the electrostatic latent image bearer, a second electric charging unit having a second electric discharge wire to execute a pre-electric charge removal electric charging process by electrifying the surface of the electrostatic latent image bearer subsequent to a transfer process to transfer a toner image, and a first electric charge removing device to diselectrify the surface of the electrostatic latent image bearer by irradiating it with electric charge removing light subsequent to the pre-electric charge removal electric charging process. The first electric charge removing device is disposed within an electric discharge region of the second electric discharge wire on a downstream side of an extreme upstream edge of the electric discharge region of the second electric discharge wire in a rotational direction of the electrostatic latent image bearer.
    Type: Grant
    Filed: July 8, 2015
    Date of Patent: November 22, 2016
    Assignee: RICOH COMPANY, LTD.
    Inventors: Masayoshi Nakayama, Takuma Higa, Hiroyuki Kunil, Masaki Sukesako, Kazuaki Kamihara, Masakazu Terao, Yuichi Aizawa, Masahiro Katoh, Kohei Matsumoto, Toshihiro Sugiyama
  • Patent number: 9423359
    Abstract: An electromagnetic inspection tool which includes a stage configured to support a wafer having a first surface and an emitter configured to emit electromagnetic waves to be incident on the first surface. The electromagnetic inspection tool further includes a detector configured to detect electromagnetic waves returned from the first surface and a charging mechanism configured to charge the first surface. A method of electromagnetically inspecting a wafer which includes loading a wafer having a first surface onto a stage and emitting electromagnetic waves to be incident on the first surface. The method further includes detecting electromagnetic waves returned from the first surface and charging the first surface prior to detecting the electromagnetic waves returned from the first surface.
    Type: Grant
    Filed: June 26, 2013
    Date of Patent: August 23, 2016
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Ming-Sung Kuo, Chiun-Chieh Su, Chih-Shun Chu, To-Yu Chen
  • Patent number: 9110127
    Abstract: The present disclosure provides methods and apparatus that enable characterization of an electrical property of a semiconductor specimen, e.g., dopant concentration of a near-surface region of the specimen. In exemplary method, a target depth for measurement is selected. This thickness may, for example, correspond to a nominal production thickness of a thin active device region of the specimen. A light is adjusted to an intensity selected to characterize a target region of the specimen having a thickness no greater than the target depth and a surface of the specimen is illuminated with the light. An AC voltage signal induced in the specimen by the light is measured and this AC voltage may be used to quantify an aspect of the electrical property, e.g., to determine dopant concentration, of the target region.
    Type: Grant
    Filed: July 3, 2012
    Date of Patent: August 18, 2015
    Assignee: Nanometrics Incorporated
    Inventor: Emil Kamieniecki
  • Patent number: 9069023
    Abstract: A latent-image measuring device that measures the state of a photoconductor. The latent-image measuring device emits a charged-particle beam to the photoconductor to detects a charged-particle signal obtained through the emission of the charged-particle beam. The latent-image measuring device then exposes the photoconductor a plurality of times to form electrostatic latent images on the photoconductor, and measures an amount of change in latent-image depth while changing a time interval between a plurality of exposures.
    Type: Grant
    Filed: August 22, 2012
    Date of Patent: June 30, 2015
    Assignee: RICOH COMPANMY, LIMITED
    Inventor: Hiroyuki Suhara
  • Patent number: 8049168
    Abstract: This measurement device is used to determine energy for charged particles. The measurement device includes two segments and a plate that define two thresholds or gaps. The current as a charged particle passes through these thresholds or gaps is measured. The measurement device then calculates the energy of the charged particles. Energy contamination also may be determined.
    Type: Grant
    Filed: November 13, 2009
    Date of Patent: November 1, 2011
    Assignee: Varian Semiconductor Equipment Associates, Inc.
    Inventor: Frank Sinclair
  • Publication number: 20080305444
    Abstract: The teachings as provided herein relate to a watermark embedded in an image that has the property of being relatively indecipherable under normal light, and yet decipherable under infrared illumination when viewed by a suitable infrared sensitive device. This infrared mark entails in combination with at least one distraction pattern, a substrate reflective to infrared radiation, and a first colorant mixture and second colorant mixture printed as an image upon the substrate. The first colorant mixture layer in connection with the substrate has a property of strongly reflecting infrared illumination, as well as a property of low contrast under normal illumination against a second colorant mixture as printed in close spatial proximity to the first colorant mixture pattern, such that the resultant image rendered substrate suitably exposed to an infrared illumination, will yield a discernable image evident as a infrared mark to a suitable infrared sensitive device.
    Type: Application
    Filed: June 5, 2007
    Publication date: December 11, 2008
    Applicant: XEROX CORPORATION
    Inventors: Reiner Eschbach, Raja Bala, Martin S. Maltz
  • Publication number: 20080197283
    Abstract: Disclosed herein are toner compositions and developers particularly suitable for use in xerographic devices having oil-less fuser systems. The disclosed toner composition is substantially free of crystalline resin.
    Type: Application
    Filed: February 16, 2007
    Publication date: August 21, 2008
    Applicant: XEROX CORPORATION
    Inventors: Richard P.N. VEREGIN, Eric M. STROHM, Eric ROTBERG, Michael S. HAWKINS, Edward G. ZWARTZ, Guerino G. SACRIPANTE
  • Patent number: 6861650
    Abstract: In an electron beam detector, a light guide optically couples a fluorescence emitting surface of the compound semiconductor substrate to a light incident surface of the photodetector, and physically connects the compound semiconductor substrate with the photodetector, thereby integrating the compound semiconductor substrate with the photodetector. When the compound semiconductor substrate converts incident electrons to fluorescent light, the light guide guides the fluorescent light to the photodetector, and the photodetector detects the fluorescent light, thereby detecting the incident electrons.
    Type: Grant
    Filed: January 30, 2002
    Date of Patent: March 1, 2005
    Assignee: Hamamatsu Photonics K.K.
    Inventors: Minoru Kondo, Toshimitsu Nagai, Atsushi Kibune
  • Patent number: 6851609
    Abstract: An image reading apparatus includes a line sensor for reading an image of an original, a scanning optical system that has a light source and scans the original, a reference reflection member provided in such a position as to reflect a light emitted from the light source, a buffer memory for storing data of the image, an intermittent reading part interrupting and restarting scanning performed by the scanning optical system based on a residual storage capacity of the buffer memory, and a light amount variation correction part correcting a variation in an amount of light of the light source during an interruption of the scanning based on an amount of reflected light from the reference reflection member.
    Type: Grant
    Filed: October 26, 2001
    Date of Patent: February 8, 2005
    Assignee: Ricoh Company, Ltd.
    Inventors: Kazuhiro Ando, Yukio Noguchi, Koichi Ichihara, Youji Mouri, Fumihiro Kitahara, Kazuhiko Nakaya, Shigefumi Soga, Hisatsugu Niki
  • Patent number: 6717146
    Abstract: A compact detector for secondary and backscattered electrons in a scanning electron beam system includes a microchannel plate detector and a solid state detector connected in a tandem manner. The detector offers large bandwidth and high dynamic range. The detector can be used for article inspection, lithography, metrology, and other related applications. The compactness of the detector makes it ideally suited for utilization in a miniature electron beam column, such as a microcolumn.
    Type: Grant
    Filed: May 24, 2001
    Date of Patent: April 6, 2004
    Assignee: Applied Materials, Inc.
    Inventors: Tai-Hon Philip Chang, Stuart L. Friedman, Ming L. Yu
  • Patent number: 6677606
    Abstract: A method is provided for selective binding and detecting target molecules, and a method for detecting biological molecules, the method comprising supplying a semi-conductor capable of charge pair separation, and juxtaposing affinity moieties to the semi-conductor so as to effect changes in the charge pair separation characteristics when the affinity molecules are bound to the target molecules.
    Type: Grant
    Filed: June 28, 2000
    Date of Patent: January 13, 2004
    Assignee: University of Chicago
    Inventors: Tijana Rajh, Tatjana Paunesku, Gayle E. Woloschak, Marion C. Thurnauer
  • Patent number: 6593567
    Abstract: An ion mobility spectrometer is disclosed which includes a sample input port, an ion generator, an ionization chamber receiving and ionizing samples, an ion gate for causing the ionized samples to travel in a direction, and a drift region for receiving the directed ionized samples and for subjecting the ionized samples to an electric potential. The ionized samples then separate according to their electric charge and mass and are detected by a sensor having an output with linear, non-linear, and logarithmic characteristics. The ion mobility spectrometer further includes circuitry coupled to the sensor for linearizing the output such that the non-linear and logarithmic characteristics are linearized while preserving the linear characteristics.
    Type: Grant
    Filed: May 9, 2000
    Date of Patent: July 15, 2003
    Assignee: Agilent Technologies, Inc.
    Inventor: Mahmoud F. Abdel-Rahman
  • Publication number: 20030015661
    Abstract: The present invention relates to a radioactive electron emitting microchannel plate. More particularly, to a radioactive electron generating microchannel plate comprising (a) a pair of parallel substrates; (b) at least one radioactive material layer deposited on an inner surface of the substrates; and (c) at least one electron ray-amplifying layer deposited on the surface of the radioactive material layer. The emitted electron ray is amplified by penetrating into the cavity formed by a pair of parallel substrates and is further amplified by reflecting from the electron ray-amplifying layer. As the substrate in the microchannel plate, use can be made of a capillary tube or a thin plate. The microchannel plate of the present invention can be applied as an electron ray source in an electron ray-generating device, an image display device, and electron ray-etching device.
    Type: Application
    Filed: July 2, 2002
    Publication date: January 23, 2003
    Inventors: Minsoo Lee, Hongsuk Chung, Jae Hyung Yoo, Hyun-Soo Park
  • Publication number: 20020175283
    Abstract: A compact detector for secondary and backscattered electrons in a scanning electron beam system includes a microchannel plate detector and a solid state detector connected in a tandem manner. The detector offers large bandwidth and high dynamic range. The detector can be used for article inspection, lithography, metrology, and other related applications. The compactness of the detector makes it ideally suited for utilization in a miniature electron beam column, such as a microcolumn.
    Type: Application
    Filed: May 24, 2001
    Publication date: November 28, 2002
    Applicant: ETEC SYSTEMS, INC.
    Inventors: Tai-Hon Philip Chang, Stuart L. Friedman, Ming L. Yu
  • Patent number: 6477217
    Abstract: Flow of mercury from a liquid-heavy-metal inflow port toward an inner forward end of a container body is rectified by a plurality of incoming-passage guide vanes in a liquid-heavy-metal incoming passage. Flow of the mercury from the forward end of the container body toward a liquid-heavy-metal outflow port is rectified by a plurality of return-passage guide vanes in a liquid-heavy-metal return passage. As a result, occurrence of stagnation and/or recirculation flows of the mercury in the container body is suppressed and a steady and highly uniform stream of the mercury is formed throughout in the container body. The container body is covered with a container outer shell to prevent any leakage of the mercury to outside due to a damage of the container body.
    Type: Grant
    Filed: February 8, 2000
    Date of Patent: November 5, 2002
    Assignees: Agency of Industrial Science and Technology Japan Atomic Energy Research Institute, Ishikawajima-Harima Jukogyo Kabushiki Kaisha
    Inventors: Ryutaro Hino, Masanori Kaminaga, Hidetaka Kinoshita, Noriaki Anbo, Atsuhiko Terada, Hiroyuki Uchida
  • Patent number: 6437359
    Abstract: A computed radiography (CR) reader comprising: an image plate loading and unloading station for receiving in a vertical orientation a CR cassette including a light tight cassette shell and an image plate supported by an extrusion closing off said shell, said image plate storing a latent radiographic image, a scanning station located below said loading and unloading station at which said image plate is scanned, and an image plate transport assembly for removing said image plate from said cassette shell and for vertically transporting said image plate past said scanning station while said image plate is being removed from said cassette.
    Type: Grant
    Filed: November 19, 1999
    Date of Patent: August 20, 2002
    Assignee: Eastman Kodak Company
    Inventors: Douglas O. Hall, Michael K. Rogers, Michael J. Poccia