Abstract: Ultrasensitive optical detector with high resolution in time, using a waveguide, and processes for manufacturing this detector This detector, designed to detect at least one photon, comprises a dielectric substrate (2) and at least one detection element on this substrate, designed to generate an electrical signal starting from the energy of the photon(s) received, and a guide element to guide this or these photons the energy of which is then absorbed by the detection element (4) at an absorption zone which is less than 100 nm thick. The detection element is substantially straight on the substrate and is short, and the guide element comprises a single mode light waveguide with strong confinement (6), placed on the detection element. The invention is applicable particularly to detection and localisation of operating defects in a semiconducting circuit.

Abstract: A cryogenic detector device includes a sensor based on a low-temperature effect and measures the temperature increase produced by the introduction of energy, such as an X-ray quantum. The smaller the thermal capacity of the sensor, the greater the temperature increase resulting from the introduction of energy and the higher the energy resolution of the sensor. Because the thermal capacity is temperature dependent, the sensor is operated in the range of comparatively small thermal capacities, i.e., in a range between 50 and 400 mK. Contrary to conventional assumptions, it was found that by keeping the three-dimensional size of the individual sensors sufficiently small and by increasing the effective sensor area, acceptable measurement results were achieved even at higher operating temperatures of the sensors in a range between 2.4 and 4.2 degrees Kelvin.

Abstract: A practical semiconductor radiation detector capable of collecting electrons rapidly with a large volume is disclosed. A multiple layers of grid electrodes around an anode formed on a semiconductor element limits the generation of the induced charge signal for the anode to the space in the neighborhood of the anode, while at the same time making it possible to collect the electrons rapidly. As a result of limiting the space for generating the induced charge by the grid electrodes, the energy resolution is improved even for a thick semiconductor element. Also, the capability of rapidly collecting the electrons due to the high field strength generated by the grid electrodes makes a sensitive volume of the whole semiconductor and thus achieves a high radiation detection efficiency.

Abstract: A method of controlling the coordinate sensitivity in a superconducting microbolometer employs localized light, heating or magnetic field effects to form normal or mixed state regions on a superconducting film and to control the spatial location. Electron beam lithography and wet chemical etching were applied as pattern transfer processes in epitaxial Y—Ba—Cu—O films. Two different sensor designs were tested: (i) a 3 millimeter long and 40 micrometer wide stripe and (ii) a 1.25 millimeters long, and 50 micron wide meandering-like structure. Scanning the laser beam along the stripe leads to physical displacement of the sensitive area, and, therefore, may be used as a basis for imaging over a broad spectral range. Forming the superconducting film as a meandering structure provides the equivalent of a two-dimensional detector array. Advantages of this approach are simplicity of detector fabrication, and simplicity of the read-out process requiring only two electrical terminals.

Abstract: A superconducting X-ray detection apparatus has a refrigerator, a cooling head cooled by the refrigerator, and a stacked structure connected to an end portion of the cooling head. The stacked structure comprises a sensor holder, a low-temperature first-stage amplifier connected to the sensor holder, and a superconducting X-ray detector mounted on the low-temperature first-stage amplifier.

Abstract: Prospective readout architecture with Transition Edge Sensor (TES) electrical biasing from the warm readout is introduced. The architecture allows building of large imaging detector arrays with TES. The invention allows an unprecedented combination of imaging and spectrometry features in one radiation detector.

Abstract: A radiation sensor (20) has a substrate (34); an antenna (24) coupled to the substrate (34), a thermal detector unit TDU (22) spaced from the antenna (24) and the substrate (34); and a multi-layered conductive lead (30). The conductive lead (30) physically contacts the antenna (24) and the TDU (22). The conductive lead (30) defines a support layer (44) adjacent to the substrate (34) for structurally supporting the TDU (22) over a cavity defined by the substrate (34), a buffer layer (46) disposed on the support layer (44), and a superconductive layer (48) disposed on the buffer layer (46). The buffer layer has a crystalline structure to facilitate bonding with other layers. A method for making the sensor (20) is disclosed wherein the superconductive layer (48) and the buffer layer (46) are deposited using laser deposit, the buffer layer (46) with ion beam assist for alignment.

Abstract: An antenna-coupled microbolometer structure comprises a substrate (301), an antenna (102, 103) supported by the substrate, and a thermally sensitive element (101, 305) connected to the antenna and arranged to dissipate electric currents induced into the antenna. Both the antenna (102, 103) and the thermally sensitive element (101, 305) comprise material that is susceptible to achieving a superconductive state below a certain critical temperature. The thermally sensitive element (101, 305) is supported at a distance from the substrate (301) leaving an empty gap (306) between the thermally sensitive element (101, 305) and a surface of the substrate (301).

Abstract: A system and method for providing spatial, temporal, energy-resolving detection of single photons using superconducting transmission lines.

Abstract: A particle detector assembly includes a substrate on which are mounted at least two superconducting quasiparticle detectors. A processing system is connected to the detectors and distinguishes between events detected simultaneously in each detector and non-simultaneous events.

Abstract: A single-photon detector includes a superconductor strip biased near its critical current. The superconductor strip provides a discernible output signal upon absorption of a single incident photon. In one example, the superconductor is a strip of NbN (niobium nitride). In another example, the superconductor strip meanders to increase its probability of receiving a photon from a light source. The single-photon detector is suitable for a variety of applications including free-space and satellite communications, quantum communications, quantum cryptography, weak luminescence, and semiconductor device testing.

Abstract: In the improved neutron image detector, MgB2 enriched in a constituent element 10B of wide energy gap is used as a neutron detection plate, which is provided at the center and the four corners with a phonon sensor comprising an insulation layer overlaid with Mg11B2 enriched in 11B of narrow energy gap in order to detect phonons resulting from the generation of ?-rays which occurs in the detection plate upon incidence of neutrons, and sensor's signal intensity and signal propagation time are used to detect the incident position of neutrons.

Abstract: A PET scanner includes a scintillator block and a plurality of photodetectors, each of which has a field of view that includes a portion of the scintillator block. An optical element is disposed between the scintillator block and the plurality of photodetectors. The optical element has a first layer and a second layer. The first layer has a central region and a peripheral region separated by a first gap. The second layer has at least a first region and a second region separated by a second gap.

Abstract: A radiation detector comprises an energy/electricity converter having a detection area for detecting incident radiation, and electrodes connecting the converter to an external driving circuit for driving the converter to convert energy of the incident radiation detected by the detection area of the converter into an electric signal. A collimator is integrally connected to the converter and has an opening for transmitting radiation to irradiate the detection area of the converter and portions for preventing radiation from irradiating a part of the converter other than the detection area. A spacer is integrally connected to the collimator and the converter for maintaining a preselected distance between the collimator and the detection area of the converter.

Abstract: A method and apparatus for measuring doses of electron beams that are absorbed by an object subjected to e-beam irradiation. The absorbed dose can be continuously measured during an irradiation process, and adjustment can be made to system parameters in accordance with the measured absorbed dose.

Abstract: A superconducting radiation detector relies upon the abruptness of a superconducting transition edge to converts a slight heat generated by an X-ray into a high signal current and uses an electrothermal self-feedback mechanism to provide a high energy resolution and a high counting rate. A calorimeter incorporating such a radiation detector has an absorber for absorbing X-rays, a resistor formed of a superconductor provided under the absorber and having a resistance value that varies with heat generated in the absorber, superconducting wires for connecting the resistor to an external current detector, a membrane on which the resistor is provided, and an insulating film provided between the resistor and the absorber and having at least one hole penetrating therethrough, the resistor and the absorber being in contact through the hole.

Abstract: In the improved neutron image detector, MgB2 enriched in a constituent element 10B of wide energy gap is used as a neutron detection plate, which is provided at the center and the four corners with a phonon sensor comprising an insulation layer overlaid with Mg11B2 enriched in 11B of narrow energy gap in order to detect phonons resulting from the generation of ?-rays which occurs in the detection plate upon incidence of neutrons, and sensor's signal intensity and signal propagation time are used to detect the incident position of neutrons.

Abstract: A bolometer thin film having a high temperature coefficient of resistance (|TCR|) is produced in a simple and easy production process to provide a highly sensitive infrared sensing element. The invention provides a bolometer using a thin film of an oxide represented by ZyCuOx, wherein Z is one or more alkaline earth metals, one or more rare earth element selected from yttrium and lanthanide elements, one or more elements belonging to Period 5 or Period 6 of the Periodic Table selected from bismuth, lead, thallium, mercury, and cadmium, or potassium or sodium, y is a number satisfying 0≦y≦2, and x is a number satisfying 0.5y<x≦1.5+2y. The bolometer has a temperature coefficient of resistance (|TCR|) higher than that of conventional bolometers.

Abstract: An optic superconducting circuit element (10) is disclosed that is operable to transmit and receive on an identical chip an electromagnetic wave having frequencies in an extended frequency band ranging from microwave to THz frequency bands and with high sensitivity. The optic superconducting circuit element (10) includes the chip (3), and a superconducting electromagnetic wave oscillating (generating and transmitting) source (16) and a superconducting Josephson junction device (14) disposed in close vicinity to each other on the chip (3), the superconducting Josephson junction device (14) detecting the electromagnetic wave transmitted from the superconducting electromagnetic wave oscillating (generating and transmitting) source (16).

Abstract: A single photon detector includes a superconductor strip biased near its critical current. The superconductor strip provides a discernible output signal upon absorption of a single incident photon. In one example, the superconductor is a strip of NbN (niobium nitride). In another example, the superconductor strip meanders to increase its probability of receiving a photon from a light source. The single-photon detector is suitable for a variety of applications including free-space and satellite communications, quantum communications, quantum cryptography, weak luminescence, and semiconductor device testing.

Abstract: An apparatus and method for electrically connecting semi-conductor devices is disclosed. The apparatus and method employs a vacuum chamber and first and second semi-conductor components. The first and second semi-conductor components are coupled to a vacuum chamber and free space electron transmitters and receivers. The transmitters are configured to transmit a signals between the semi-conductor components.

Abstract: A method of producing a transition edge sensor comprises depositing a sensing material upon a substrate to form a sensing layer having an associated transition temperature. The transition temperature for the sensing layer is selected as desired. The desired transition temperature is produced by controlling the temperature of the substrate for the deposition process.

Abstract: A system and method for providing spatial, temporal, energy-resolving detection of single photons using superconducting transmission lines.

Abstract: There is provided a radiation detector that allows accurate irradiation to a detection area and has a high detection efficiency. A collimator that has an opening for transmitting radiation to irradiate the detection area and a function as a shielding plate for preventing radiation from irradiating a part other than the detection area is installed on the same board that forms an energy/electricity converter (radiation detector). The radiation detector is constructed such that the alignment of the opening of the collimator and the detection area is easy, and the detection area and the opening of the collimator are close so that the detection efficiency is increased.

Abstract: An antenna-coupled microbolometer structure comprises a substrate (301), an antenna (102, 103) supported by the substrate, and a thermally sensitive element (101, 305) connected to the antenna and arranged to dissipate electric currents induced into the antenna. Both the antenna (102, 103) and the thermally sensitive element (101, 305) comprise material that is susceptible to achieving a superconductive state below a certain critical temperature. The thermally sensitive element (101, 305) is supported at a distance from the substrate (301) leaving an empty gap (306) between the thermally sensitive element (101, 305) and a surface of the substrate (301).

Abstract: A particle detector assembly comprises a substrate on which are mounted at least two superconducting quasiparticle detectors. A processing system is connected to the detectors and adapted to distinguish between events detected substantially simultaneously in each detector and non-simultaneous events.

Abstract: An accelerator (10) generates an electron beam (22) of selected energy that is swept (16) up and down. A conveyor (32) moves items (30) through the electron beam for irradiation treatment. An array (40a) of inductive electron beam strength detectors is disposed on a down stream side of the item to detect the energy of the electron beam exiting the item at the plurality of altitudes. The electron beam strength entering and leaving the item are communicated to a processor (54) which determines the absorbed dose of radiation absorbed by the item. The dose information is archived (56) or compared by a parameter adjustment processor (58) with target doses and deviations are used to control one or more of MeV or beam current of the electron beam, the sweep rate, and the conveying speed of the items. Each of the detectors includes a vacuum chamber in which two current transformers (60, 62) disposed on either side of a metal foil layer (64).

Abstract: In the improved neutron image detector, MgB2 enriched in a constituent element 10B of wide energy gap is used as a neutron detection plate, which is provided at the center and the four corners with a phonon sensor comprising an insulation layer overlaid with Mg11B2 enriched in 11B of narrow energy gap in order to detect phonons resulting from the generation of &agr;-rays which occurs in the detection plate upon incidence of neutrons, and sensor's signal intensity and signal propagation time are used to detect the incident position of neutrons.

Abstract: A method of producing a transition edge sensor comprises depositing a sensing material upon a substrate to form a sensing layer having an associated transition temperature. The transition temperature for the sensing layer is selected as desired. The desired transition temperature is produced by controlling the temperature of the substrate for the deposition process.

Abstract: Multi-layer transition-edge sensors (TES) having improved performance, a method for preparing them and methods of using them. Specifically, the improvement lies in providing normal metal strips along the edges of the superconducting and normal metal layers parallel to the current flow in the TES during operation. These strips (referred to as “banks”) provide for both improved detector performance and improved detector robustness against corrosion. This improvement is an important advance particularly for TES-based microcalorimeter detectors. The improved TESs also have many other applications based on the very precise thermometer function achieved by the TES.

Abstract: A defect inspection apparatus enabling more reliable and quicker detection of a defect present in the surface of a stacked film formed on a wafer and enabling reliable and quicker detection of a minute defect even if there is unevenness in the surface of the wafer, including a light source, a light frequency shifter unit for converting light from the light source to a plurality of beams of inspection light and a beam of reference light having close frequencies, an object lens upon which the beams of inspection light are incident and focusing the beams of light on the wafer to form a plurality of different focal points corresponding to the beams of inspection light, a laser scanning unit for making the beams of inspection light scan the wafer, a light detection unit and cofocal pinhole plate 13 for detecting an intensity of a superposed light of the beams of reflected light and the beam of reference light at a cofocal point, and an analyzing unit serving as a contrast waveform generating means for generating a

Abstract: A radioactive ray detecting device comprises a superconductor element formed without an underlying substrate, an oxide film formed on a surface of the superconductor element, and a superconductor thin film formed on the oxide film. The oxide film and the superconductor thin film cover substantially an entire periphery of the surface of the superconductor element. The semiconductor element may be formed of a polycrystalline material such as aluminum, or a single crystal superconductor such as one containing tin, lead, niobium or tantalum, and may have a circular cross section or a rectangular cross section.

Abstract: A system and method for using one or more localized weak-link structures, and damping on the electrical bias circuit, to improve the performance of superconducting transition-edge sensors (TES). The weak links generally consist of an area or areas having a reduction in cross-sectional geometry in an otherwise uniform bilayer TES applied to a substrate. The weak links control the dissipation of power in the sensor, making it quieter and making its electrical response smoother and less hysteretic. The TES response is also made smoother by implementing a damping circuit on the electrical output of the TES.

Abstract: A superconducting transition-edge sensor with an electrothermal-feedback circuit, a heat sink thermally coupled thereto, a bias-feedback circuit electrically coupled with the electrothermal feedback circuit, and a current sensor electrically coupled with the bias-feedback circuit and inductively coupled with the electrothermal-feedback circuit.