With Temperature Control Patents (Class 250/429)
  • Patent number: 12154763
    Abstract: An ion source has an arc chamber defining an arc chamber volume. A reservoir is coupled to the arc chamber, defining a reservoir volume. The reservoir receives a source species to define a liquid within the reservoir volume. A conduit fluidly couples the reservoir volume to the arc chamber volume. First and second openings of the conduit are open to the respective reservoir and arc chamber volume. A heat source selectively heats the reservoir to melt the source species at a predetermined temperature. A liquid control apparatus controls a first volume of the liquid within the reservoir volume to define a predetermined supply of the liquid to the arc chamber volume. The liquid control apparatus is a pressurized gas source fluidly coupled to the reservoir to supply a gas to the reservoir and provide a predetermined amount of liquid to the arc chamber.
    Type: Grant
    Filed: June 16, 2023
    Date of Patent: November 26, 2024
    Assignee: Axcelis Technologies, Inc.
    Inventors: Neil J. Bassom, Joshua Abeshaus, David Sporleder, Neil Colvin, Joseph Valinski, Michael Cristoforo, Vladimir Romanov, Pradeepa Kowrikan Subrahmnya
  • Patent number: 11898946
    Abstract: A gas sampling device is disclosed. The gas sampling device includes a first block having at least a first opening. The first block includes at least a first passageway terminating at the first opening. The first opening may be in an exterior face of the first block. The gas sampling device includes a second block having at least a second opening. The second block includes at least a second passageway terminating at the first opening. The second opening may be in the exterior face of the second block. The first block and the second block may be adjacent and in contact with each other. The first passageway and the second passageway form a flow path, wherein the first block and the second block abut and contact each other, and the first opening and the second opening are aligned.
    Type: Grant
    Filed: November 8, 2019
    Date of Patent: February 13, 2024
    Assignee: ADVANCED MICRO INSTRUMENTS, INC.
    Inventor: Steven Kirchnavy
  • Patent number: 11307138
    Abstract: A method and system for testing a liquid sample for an organic compound is disclosed, the method including the steps of collecting the liquid sample from a liquid source; transmitting light having a wavelength of between about 190 nanometers and about 310 nanometers into the liquid sample; measuring absorption/transmission of the light by the organic compound in the liquid sample; and determining a concentration of the organic compound within the liquid sample based on the absorption/transmission of the light by the organic compound. The system can include a spectrophotometer for measuring the absorption of UV light by the organic compound, an ion exchange column for removing ion contaminants from the liquid sample, and a vacuum degasser unit for removing gases and other impurities from the liquid sample.
    Type: Grant
    Filed: March 12, 2020
    Date of Patent: April 19, 2022
    Inventor: Paul Hattingh
  • Patent number: 11029292
    Abstract: A method and system for detecting siloxanes using thermal desorption tubes and FTIR spectrometers with intervening gas chromatography systems.
    Type: Grant
    Filed: April 7, 2017
    Date of Patent: June 8, 2021
    Assignee: MLS ACQ, INC.
    Inventors: Martin L. Spartz, Charles Mark Phillips, Peter P. Behnke, Anthony S. Bonanno
  • Patent number: 10968116
    Abstract: A liquid treatment system comprising at least one ultra-violet light treatment lamp arranged within an elongated protective UV-transparent sleeve provided along a central longitudinal axis A, said sleeve having an outer surface and an essentially circular cross-sectional shape; and an elongated reactor configured to receive said sleeve, whereby an elongated liquid treatment chamber for receiving liquid to be treated, is provided between an inner surface of the reactor and the outer surface of the sleeve; wherein said liquid treatment system further comprises at least one elongated cleaning device provided side by side with the sleeve within the liquid treatment chamber and along at least a part of the length of the elongated sleeve, wherein said at least one cleaning device is compressed towards the outer surface of the sleeve by the reactor, and wherein at least one of the sleeve and the reactor is configured to rotate around the longitudinal axis A such that the at least one cleaning device will be touching
    Type: Grant
    Filed: February 16, 2018
    Date of Patent: April 6, 2021
    Assignee: Wallenius Water Innovation AB
    Inventors: Johan Bergqvist, David Skantze
  • Patent number: 10466170
    Abstract: A system and method for measuring a concentration of a gas in a container having at least one flexible or variable side or wall. The system and method comprising creating a determinable optical path length through the container having a shape. Positioning a light source head and a detector head against at least one of the least one flexible or variable side or wall. Transmitting a light signal between the light source head and the detector head through the determinable optical path length. Determining the concentration of the gas in the container based on detected light and the determinable optical path length.
    Type: Grant
    Filed: October 5, 2017
    Date of Patent: November 5, 2019
    Assignee: GasPorOx AB
    Inventors: Märta Lewander Xu, Johannes Swartling, Daniel Karlsson, Patrik Lundin, Joan Sandberg
  • Patent number: 9841374
    Abstract: A system and method for measuring a concentration of a gas in a container having at least one flexible or variable side or wall. The system and method comprising creating a determinable optical path length through the container having a shape. Positioning a light source head and a detector head against at least one of the least one flexible or variable side or wall. Transmitting a light signal between the light source head and the detector head through the determinable optical path length. Determining the concentration of the gas in the container based on detected light and the determinable optical path length.
    Type: Grant
    Filed: May 27, 2014
    Date of Patent: December 12, 2017
    Assignee: GasPorOx AB
    Inventors: Märta Lewander Xu, Johannes Swartling, Daniel Karlsson, Patrik Lundin, Joan Sandberg
  • Patent number: 9776218
    Abstract: A fluid is directed toward a surface of an optical element based on a first flow pattern, the surface of the optical element including debris and the fluid directed based on the first flow pattern moving at least some of the debris to a first stagnation region at the surface of the optical element; and the fluid is directed toward the optical element based on a second flow pattern, the fluid directed based on the second flow pattern moving at least some of the debris to a second stagnation region on the surface of the optical element, the second stagnation region and the first stagnation region being different locations at the surface of the optical element. Directing the fluid toward the surface of the optical element based on the second flow pattern removes at least some of the debris from the first stagnation region.
    Type: Grant
    Filed: November 11, 2015
    Date of Patent: October 3, 2017
    Assignee: ASML Netherlands B.V.
    Inventors: Silvia De Dea, Chunguang Xia, Gregory James Wilson, Brandon Wilson Verhoff
  • Patent number: 9470621
    Abstract: A measuring cuvette (1), for the spectroscopic analysis of a gas sample in a ray path between a radiation source and a detector, preferably suitable for use in a gas-measuring device (19), has a vessel wall (2) that at least partially encloses a sample space (3) for receiving a process gas. At least one window element (4), through which electromagnetic radiation can be coupled into the sample space (3) from the outside, is indirectly or directly connected with the vessel wall (2). An inlet as well as an outlet (5) are included, through which the process gas can be introduced into the sample space (3) and can be removed from the sample space (3). At least one fastening element (6) makes possible both secure fastening of the window element (4) on the vessel wall (2) and separation of the window element (4) from the vessel wall (2) without destruction.
    Type: Grant
    Filed: January 12, 2015
    Date of Patent: October 18, 2016
    Assignee: Dräger Safety AG & Co. KGaA
    Inventors: Andreas Moldt, Andrea Baumeister
  • Patent number: 9297737
    Abstract: Method and apparatus are described for improving measurements of scattered light from particles by controlling multiple scattering and coincidence count levels. The scatter path in the particle dispersion and particle concentration are adjusted to reduce multiple scattering in ensemble particle scattering measurement. And the particle dispersion volume and particle concentration are adjusted to reduce coincidence counts in single particle scattering measurements. Alignment of the optical system, for measuring scattered light, is maintained by a reflection apparatus.
    Type: Grant
    Filed: January 17, 2014
    Date of Patent: March 29, 2016
    Inventor: Michael Trainer
  • Patent number: 9239285
    Abstract: A flow-through measuring cell having one inlet opening for entry of the fluid, and one outlet opening for exit of the fluid. A single measurement space is located between the inlet opening and outlet opening. A radiation measurement region is provided for measuring the interaction of the fluid in the measuring cell with electromagnetic radiation from outside the measuring cell. The radiation measurement region is bordered by two opposite windows of which one is intended for inlet and the other for exit of the electromagnetic radiation. The measuring cell has a positioning range with several operating positions with a different distance A, A? between the windows into which the measuring cell can be set without rotation.
    Type: Grant
    Filed: February 27, 2012
    Date of Patent: January 19, 2016
    Assignee: Optek-Danulat GmbH
    Inventors: Daniel Platte, Peter Schroeren, Jürgen Danulat, Andreas Reese
  • Patent number: 9169134
    Abstract: A sealing arrangement for sealing a quartz tube with a UV lamp therein and electrical cable extending therefrom through the lid of a pressurized fluid purification vessel. In one version, a tubular fitting, threaded on opposite ends, is received over an end of the quartz tube and threadedly engaged in an aperture in the lid and sealed with a first annular seal, a second annular seal in the tubular fitting seals about the quartz tube. A compression nut with an axial extension threadedly engages the opposite end of the tubular fitting and a strain/flexure relief is threaded into the axial extension. In a second version, the second annular seal comprises a flexible sleeve with a member having resilient radially deflectable fingers compressed thereon by a compression nut; and, duplicates of these parts employed to seal about the electrical cable.
    Type: Grant
    Filed: April 8, 2013
    Date of Patent: October 27, 2015
    Assignee: Eaton Corporation
    Inventors: David Kan Yee, Mark Anthony Quintel
  • Patent number: 9119279
    Abstract: A radiation source is provided for generating short-wavelength radiation from plasma in which a molten liquid metal is used as a source material. In the radiation source having a revolving element for providing the source material, unused source material exiting from the plasma zone has to be reliably collected to prevent impairments of the radiation source through unused source material. This aim is met in that a receptacle for the unused source material is constructed as a catch trough having a trough opening below the plasma zone and the molten bath in direction of gravity force as well as an inclined side wall to catch the source material and concentrate it in a deepest catch trough area. A heating element and at least one temperature sensor are fastened to the catch trough for heating the source material and controlling its temperature above its melting temperature.
    Type: Grant
    Filed: September 29, 2014
    Date of Patent: August 25, 2015
    Assignee: USHIO Denki Kabushiki Kaisha
    Inventors: Zbigniew Pawlowski, Jozef Antonius Willem Maria Corver, Roy Mohede, Zenon Zajaczkowski, Marcel Kennis
  • Publication number: 20150115170
    Abstract: This invention controls the temperature of the critical spot of the UV lamps and on the critical spots having a deposit of mercury or amalgam containing mercury by directing a uniform flow of air on and around the critical spots having amalgam or be other means to remove heat from the critical spots
    Type: Application
    Filed: July 7, 2014
    Publication date: April 30, 2015
    Inventors: Aleksandr Shostak, Ashish Mathur, Richard Hayes, Peter Veloz, David Witham, Filiberto Betancourt, Lev Rotkop
  • Publication number: 20150108365
    Abstract: An arrangements and methods for cooling a plasma-based radiation source having a revolving element which is to be cooled, particularly for application in EUV radiation sources, is disclosed. The revolving element is immersed in the metal coolant in a first vessel of a primary cooling circuit, and a secondary cooling circuit with a cooling liquid evaporating at the desired operating temperature of the metal coolant has a control unit for controlling at least one atomizing arrangement in a differentiated manner and for selectively controlling a heater in case the determined temperature falls below a minimum operating temperature of the metal coolant. The at least one atomizing arrangement in a cooling section selectively sprays individual wall regions of the first vessel with the cooling liquid depending on the determined temperature of the metal coolant.
    Type: Application
    Filed: October 20, 2014
    Publication date: April 23, 2015
    Inventors: Gota NIIMI, Dominik Marcel VAUDREVANGE, Ralf Gordon CONRADS, Maghiel Jan KOLE, Wilhelmus V. J. VAN NUNSPEET, Johannes W. J. L. CUIJPERS, Andre Matthias PRINZ
  • Publication number: 20140271352
    Abstract: An apparatus for disinfecting furniture, having a main member including an inner surface configured for receiving the furniture. The main member includes a plurality of apertures disposed along the inner surface. The apparatus has at least one temperature controller and at least one air source to the controller for heated blowing air. The apertures are in communication with at least the air source, and UV light from the light source and air from the air source can at least partially pass through the inner surface.
    Type: Application
    Filed: March 18, 2014
    Publication date: September 18, 2014
    Inventor: Michael Stewart
  • Publication number: 20140231659
    Abstract: An apparatus for use with extreme ultraviolet (EUV) light comprising A) a duct having a first end opening, a second end opening and an intermediate opening intermediate the first end opening the second end opening, B) an optical component disposed to receive EUV light from the second end opening or to send light through the second end opening, and C) a source of low pressure gas at a first pressure to flow through the duct, the gas having a high transmission of EUV light, fluidly coupled to the intermediate opening. In addition to or rather than gas flow the apparatus may have A) a low pressure gas with a heat control unit thermally coupled. to at least one of the duct and the optical component and/or B) a voltage device to generate voltage between a first portion and a second portion of the duet with a grounded insulative portion therebetween.
    Type: Application
    Filed: February 10, 2014
    Publication date: August 21, 2014
    Inventors: Frank Chilese, John R. Torczynski, Rudy Garcia, Leonard E. Klebanoff, Gildardo R. Delgado, Daniel J. Rader, Anthony S. Geller, Michail A. Gallis
  • Publication number: 20140197334
    Abstract: A sample cell for IR spectrophotometric analysis of a liquid sample is provided. The sample cell comprises two substantially parallel transparent plates enclosing a cavity for holding the liquid sample, and a temperature control loop for controlling a temperature of the liquid sample in the cavity. The temperature control loop comprises at least one temperature sensor for measuring a temperature in or close to the cavity, at least one heating element for increasing a temperature of the liquid sample, and control means, coupled to the temperature sensor and the heating element for controlling the heating element in dependence of the temperature in or close to the cavity. The heating element comprises at least one heating foil which is attached to or thermally coupled to a first one of the transparent plates in such a way to allow an IR light beam to pass through the transparent plates and the cavity without being hindered by the heating foil.
    Type: Application
    Filed: August 3, 2012
    Publication date: July 17, 2014
    Applicant: DELTA INSTRUMENTS B.V.
    Inventor: Anne Gerben Terpstra
  • Patent number: 8779384
    Abstract: A clean water dispensing device is disclosed. The device includes a pure water tank (10), a sterilization tube (20), a sterilization lamp (30) and a transit tube (32). The pure water tank is fitted into a cold water tank (5) in such a way that a closed space is defined between the cold water tank and the pure water tank. Drinking water is drawn into an inlet port of the sterilization tube and passes through the transit tube before being stored in the cold water tank through an outlet port of the sterilization tube. The closed space is prevented from making contact with outside air, and only drinking water that has been sterilized by the sterilization tube is supplied into the closed space. Therefore, even if cold water is stored in the closed space for a long period of time, there is little possibility of the propagation of bacteria.
    Type: Grant
    Filed: April 23, 2012
    Date of Patent: July 15, 2014
    Assignee: Banpo Distribution Co., Ltd
    Inventor: Yeon Seok Lee
  • Patent number: 8696993
    Abstract: The present invention relates to an analyzing apparatus (1) for analyzing a sample using a container (2) accommodating reagents sealed therein, while raising the temperature of the reagents up to a predetermined temperature. The analyzing apparatus (1) comprises a first temperature measuring means (31) for measuring temperature of the container (2), a second temperature measuring means (32) for measuring temperature around the container (2), a heater (4) for supplying heat energy to the container (2), and a controller for controlling the heater (4) based on a measurement result at the first and second measuring means (31, 32).
    Type: Grant
    Filed: December 24, 2004
    Date of Patent: April 15, 2014
    Assignee: ARKRAY, Inc.
    Inventors: Yasuhito Murata, Junichi Oka
  • Publication number: 20140084179
    Abstract: An exposure chamber for reducing pathogens in a biological fluid such as whole blood or blood-derived products includes a serpentine-shaped UV-transparent flow path and closely positioned ultraviolet light emitting diodes configured for emanating UV irradiation towards the biological fluid at peak wavelength of 250 nm to 270 nm. The control system is provided to energize UV LEDs using various novel modes of modulating pulse width and current amplitude for LEDs so as to deliver higher UV intensity to the biological fluid but without overheating thereof or the LEDs.
    Type: Application
    Filed: August 26, 2013
    Publication date: March 27, 2014
    Applicant: Hemalux Technologies LLC
    Inventors: Ehud Ben-Hur, Heather Balji
  • Publication number: 20140048719
    Abstract: Methods and apparatus may permit the generation of consistent output synthesis gas from highly variable input feedstock solids carbonaceous materials. A stoichiometric objectivistic chemic environment may be established to stoichiometrically control carbon content in a solid carbonaceous materials gasifier system. Processing of carbonaceous materials may include dominative pyrolytic decomposition and multiple coil carbonaceous reformation. Dynamically adjustable process determinative parameters may be utilized to refine processing, including process utilization of negatively electrostatically enhanced water species, process utilization of flue gas, and adjustment of process flow rate characteristics. Recycling may be employed for internal reuse of process materials, including recycled negatively electrostatically enhanced water species, recycled flue gas, and recycled contaminants.
    Type: Application
    Filed: October 17, 2013
    Publication date: February 20, 2014
    Applicant: Thermo Technologies, LLC
    Inventors: Dennis E.J. Johnson, Grigori A. Abramov, Richard A. Kleinke, Marcus A. Wiley
  • Publication number: 20130327955
    Abstract: A radiation source is configured to produce extreme ultraviolet radiation. The radiation source includes a chamber in which, in use, a plasma is generated, and an evaporation surface configured to evaporate a material formed as a by-product from the plasma and that is emitted to the evaporation surface. A method for removing a by-product material in or from a plasma radiation source of a lithographic apparatus includes evaporating a material which, in use, is emitted to that surface from the plasma.
    Type: Application
    Filed: November 27, 2012
    Publication date: December 12, 2013
    Applicant: ASML NETHERLANDS B.V.
    Inventors: Erik Roelof Loopstra, Gerardus Hubertus Petrus Maria Swinkels, Vadim Yevgenyevich Banine, Johannes Hubertus Josephina Moors
  • Patent number: 8604446
    Abstract: Cryogenic manipulation of a material sample with an in situ probe is enabled with a novel cooled probe design. A material sample mounted on a cryo-stage in a vacuum chamber is cooled to a cryogenic temperature. In addition, a nano-manipulator probe inside the sample chamber is also cooled to cryogenic temperature. A specific sample site is milled in the chamber using a focused ion beam and attached to the cooled probe by vapor deposition. After releasing the sample, the sample site is attached to a destination surface such as a transmission electron microscope (TEM) grid and the probe is then detached from the sample using the focused ion beam.
    Type: Grant
    Filed: August 8, 2012
    Date of Patent: December 10, 2013
    Assignee: The State of Oregon Acting by and through the State Board of Higher Education on Behalf of the University of Oregon
    Inventor: Jeffrey J. Ditto
  • Patent number: 8604451
    Abstract: A target supply apparatus controls a gas pressure inside a tank storing a liquid target material to be outputted from a nozzle by a pressure of gas supplied from a gas supply having a pressure regulator. The target supply apparatus comprises a gas passage introducing gas supplied from the gas supply into the tank, and a high-precision pressure regulator arranged on the gas passage and regulating a pressure of gas flowing the gas passage. The high-precision pressure regulator is able to regulate pressure with accuracy higher than the pressure regulator.
    Type: Grant
    Filed: December 18, 2009
    Date of Patent: December 10, 2013
    Assignee: Gigaphoton Inc.
    Inventors: Takayuki Yabu, Masaki Nakano, Hitoshi Nagano, Takanobu Ishihara
  • Patent number: 8586943
    Abstract: A novel application of a cold-stage coupled to a laser ablation-ICP-MS system is disclosed herein. The novel system of the present invention offers significant advantages over other systems employed for cooling samples prior to LA-ICP-MS analysis. The system discloses herein has multiple applications, including detection of one or more metal contaminants in an oil sample.
    Type: Grant
    Filed: November 2, 2011
    Date of Patent: November 19, 2013
    Assignee: University of North Texas
    Inventors: Guido Fridolin Verbeck, IV, William D. Hoffman
  • Publication number: 20130264493
    Abstract: A system and method for mass spectrometry including a curtain gas chamber defined by a curtain plate having an aperture for receiving ions from an ion source and an orifice plate having an inlet into a mass spectrometer. At least one barrier separates the curtain chamber into a first curtain gas chamber region and a second curtain gas chamber region. At least one gas source provides a gas inflow into the second curtain gas chamber region and a gas outflow into the first curtain gas chamber region, a portion of the gas outflow directed out of the aperture. A heating element heats the gas inflow, a portion of the heated gas inflow directed into the inlet of the mass spectrometer wherein the portion of the heated gas inflow can be at a substantially higher temperature than the portion of the gas outflow.
    Type: Application
    Filed: September 14, 2011
    Publication date: October 10, 2013
    Applicant: DH TECHNOLOGIES DEVELOPMENT PTE. LTD.
    Inventors: Thomas R. Covey, Stanislaw Potyrala, Bradley B. Schneider
  • Patent number: 8536522
    Abstract: A detachable and replaceable ion source for a mass spectrometer. The ion source comprises a housing which defines an ion source chamber, an ion source mounting means complementary to mounting means on the mass spectrometer to detachably couple with the mass spectrometer. This allows movement of the housing to bring the ion source chamber into a position of use at the inlet of said mass spectrometer and to take the ion source chamber from said position of use into a retracted position. Sealing means is provided to create an air tight seal between the housing and the mass spectrometer when the ion source chamber is in its position of use. A release mechanism is provided which cooperates with the mass spectrometer to allow the said movement of said housing.
    Type: Grant
    Filed: May 29, 2009
    Date of Patent: September 17, 2013
    Assignee: Micromass UK Limited
    Inventors: Kevin R. Howes, Ian Trivett, Paul Anthony Read, Richard B. Moulds
  • Patent number: 8492712
    Abstract: Various embodiments of a multi-dimensional ion mobility analyzer are disclosed that have more than one drift chamber and can acquire multi-dimensional ion mobility profiles of substances. The drift chambers of this device can, for example, be operated under independent operational conditions to separate charged particles based on their distinguishable chemical/physical properties. The first dimension drift chamber of this device can be used either as a storage device, a reaction chamber, and/or a drift chamber according to the operational mode of the analyzer. Also presented are various methods of operating an ion mobility spectrometer including, but not limited to, a continuous first dimension ionization methods that can enable ionization of all chemical components in the sample regardless their charge affinity.
    Type: Grant
    Filed: January 29, 2012
    Date of Patent: July 23, 2013
    Assignee: Excellims Corporation
    Inventor: Ching Wu
  • Publication number: 20130126731
    Abstract: In order to provide a safe and environmentally-friendly charged gas particle microscope that exhibits a superior ionized gas-utilization efficiency and economic efficiency, the gas field ion source of a charged particle microscope is equipped with a vacuum chamber in which are provided a vacuum chamber evacuation mechanism, an acicular emitter tip, an extraction electrode disposed facing the emitter tip, and a mechanism for supplying a gas to the vicinity of the emitter tip, and is configured so that the gas in the region around the tip of acicular ion emitter is ionized and extracted as an ion beam. Therein, the evacuation mechanism and the gas supply mechanism are connected, and a material for adhering the gas to be ionized is disposed between the evacuation mechanism and the gas supply mechanism.
    Type: Application
    Filed: February 4, 2011
    Publication date: May 23, 2013
    Applicant: Hitachi High-Technologies Corporation
    Inventors: Hiroyasu Shichi, Shinichi Matsubara, Yoichi Ose, Yoshimi Kawanami
  • Patent number: 8288736
    Abstract: The present invention is related to an irradiation cell for producing a radioisotope of interest through the irradiation of a target material by a particle beam, comprising a metallic insert forming a cavity designed to house the target material and to be closed by an irradiation window, wherein said metallic insert comprises at least two separate metallic parts of different materials, being composed of at least a first part comprising said cavity.
    Type: Grant
    Filed: February 18, 2005
    Date of Patent: October 16, 2012
    Assignee: Ion Beam Applications SA
    Inventors: Jean-Claude Amelia, Michel Ghyoot
  • Publication number: 20120161031
    Abstract: The output wavelengths of an electrodeless lamp are controlled by passing a fluid over the surface of the lamp to control its temperature. The stabilized temperature prevents thermal runaway of the lamp and stabilizes the output wavelengths of the lamp. When the fluid passing over the lamp is water, the lamp can be used for sanitary treatment of the water. The treatment can be enhanced by shaping the electrodeless lamp to provide maximally effective water treatment.
    Type: Application
    Filed: June 23, 2011
    Publication date: June 28, 2012
    Inventor: David Richard NeCamp
  • Patent number: 8198615
    Abstract: Devices and corresponding methods of use are described herein which may comprise an enclosing structure defining a closed loop flow path and a system generating a plasma at a plasma site, e.g. laser produced plasma system, where the plasma site may be in fluid communication with the flow path. For the device, a gas may be disposed in the enclosing structure which may include an ion-stopping buffer gas and/or an etchant. A pump may be provided to force the gas through the closed loop flow path. One or more heat exchangers removing heat from gas flowing in the flow path may be provided. In some arrangements, a filter may be used to remove at least a portion of a target species from gas flowing in the flow path.
    Type: Grant
    Filed: February 2, 2010
    Date of Patent: June 12, 2012
    Assignee: Cymer, Inc.
    Inventors: Alexander N. Bykanov, Alexander I. Ershov, Igor V. Fomenkov, David C. Brandt
  • Publication number: 20110312071
    Abstract: A microfluidic device for molecular diagnostic analysis of a biological sample containing cells, the microfluidic device having a supporting substrate, a plurality of microsystems technology (MST) channels each with a cross-sectional area between 1 square micron and 400 square microns for biochemical processing of constituents within the biological sample, and, a plurality of cell transport channels, each with a cross-sectional area greater than 400 square microns for receiving the biological sample and transporting cells within the biological sample to predetermined sites in the MST channels.
    Type: Application
    Filed: June 1, 2011
    Publication date: December 22, 2011
    Inventors: Kia Silverbrook, Mehdi Azimi
  • Publication number: 20110260076
    Abstract: A polarizing apparatus has a thermally conductive partitioning system in a polarizing cell. In the polarizing region, this thermally conductive partitioning system serves to prevent the elevation of the temperature of the polarizing cell where laser light is maximally absorbed to perform the polarizing process. By employing this partitioning system, increases in laser power of factors of ten or more can be beneficially utilized to polarize xenon. Accordingly, the polarizing apparatus and the method of polarizing 129Xe achieves higher rates of production.
    Type: Application
    Filed: April 7, 2011
    Publication date: October 27, 2011
    Inventor: F. William Hersman
  • Patent number: 8013293
    Abstract: A shift of mass axis that occurs when the temperature of a vacuum container consisting of a vacuum chamber (15) and IT block (16) or that of a TOF power unit (20) for applying an ion acceleration voltage is changed, is respectively measured beforehand, and parameters expressing a transfer function based on its response are stored in a transfer function memory (24). During an analysis, a mass shift predicting operation section (25) estimates the current shift length of the mass axis from the current temperatures of the IT block (16) and TOF power unit (20) obtained by first and second temperature sensors (34 and 35) as well as from the two transfer functions stored in the memory (24). A mass shift correcting section (29) corrects the mass axis of the mass spectrum according to the estimated shift length.
    Type: Grant
    Filed: April 14, 2008
    Date of Patent: September 6, 2011
    Assignee: Shimadzu Corporation
    Inventors: Kazuo Yamauchi, Takao Okado
  • Publication number: 20110147610
    Abstract: An automated analyzer for performing multiple diagnostic assays simultaneously includes multiple stations in which discrete aspects of the assay are performed on fluid samples contained in sample vessels. The analyzer includes stations for automatically preparing a sample, incubating the sample, preforming an analyte isolation procedure, ascertaining the presence of a target analyte, and analyzing the amount of a target analyte. An automated receptacle transporting system moves the sample vessels from one station to the next. A method for performing an automated diagnostic assay includes an automated process for isolating and amplifying a target analyte, and, in one embodiment, a method for real-time monitoring of the amplification process.
    Type: Application
    Filed: February 22, 2011
    Publication date: June 23, 2011
    Applicant: GEN-PROBE INCORPORATED
    Inventors: Jerzy A. MACIOSZEK, Christopher B. DAVIS, Gary D. LAIR, Thanh N. NGUYEN, Haitao LI, Florence F. LI, Byron J. KNIGHT, Robert F. SCALESE, Robert E. HEINZ
  • Patent number: 7939810
    Abstract: An electrically conductive heat-blocking plate 11 with an opening 12 for allowing thermions to pass through is provided between a filament 3, whose temperature can be as high as 2000° to 3000° C., and an ionization chamber 2. The heat-blocking plate 11 is thermally connected via an aluminum block 10 to a heater for maintaining the ionization chamber 2 within a range temperature from 200° to 300° C., and also electrically set at a ground potential, which is approximately equal to the potential of the ionization chamber 2. The heat-blocking plate 11 blocks the radiation heat that the filament 3 emits when energized. Thus, the wall of the ionization chamber 2 is prevented from being locally heated to an abnormally high temperature. As a result, the inner space of the ionization chamber 2 is maintained at an approximately uniform temperature, and the noise due to the decomposition of a metallic material by abnormal heating is prevented.
    Type: Grant
    Filed: March 9, 2006
    Date of Patent: May 10, 2011
    Assignee: Shimadzu Corporation
    Inventors: Shuichi Kawana, Manabu Shimomura
  • Patent number: 7928359
    Abstract: A polarizing apparatus has a thermally conductive partitioning system in a polarizing cell. In the polarizing region, this thermally conductive partitioning system serves to prevent the elevation of the temperature of the polarizing cell where laser light is maximally absorbed to perform the polarizing process. By employing this partitioning system, increases in laser power of factors of ten or more can be beneficially utilized to polarize xenon. Accordingly, the polarizing apparatus and the method of polarizing 129Xe achieves higher rates of production.
    Type: Grant
    Filed: September 20, 2007
    Date of Patent: April 19, 2011
    Assignee: University of New Hampshire
    Inventor: F. William Hersman
  • Patent number: 7772566
    Abstract: Disclosed is a power-saving type safe drinking water discharge device to treat cold water from a cooling reservoir (110), in which water is temporarily stored and cooled, prior to discharging the water to the outside through a tap valve (120). A connecting tube (10), provided around an outer circumference thereof with a coolant tube (40), is provided between the cooling reservoir and the tap valve, such that the water, which is primarily cooled to a predetermined temperature in the cooling reservoir, is secondarily cooled while passing through the connecting tube, prior to being discharged through the tap valve. The discharge device is used to sterilize and cool water in a public or domestic drinking water appliance, thereby minimizing contamination of water and allowing a user to always drink cold water.
    Type: Grant
    Filed: November 6, 2008
    Date of Patent: August 10, 2010
    Assignee: Banpo Distribution Co., Ltd.
    Inventor: Yoen Seok Lee
  • Publication number: 20100182606
    Abstract: An apparatus and method are provided for optically measuring multiple parameters of a test sample at a regulated temperature. The test sample is held in a cuvette within a sample chamber or a fluidic channel on a fluidic chip. The temperature is sensed and modulated within a desired range. Either excitation light is directed through the test sample, and the emitted light is detected by a detector which converts the detected emission light into an output signal; or a probe light is directed to the test sample and at a detector. The output signal is transmitted to the control system which converts the output signal into output data representative of the fluorescence intensity, optical density and/or refractive index of the test sample.
    Type: Application
    Filed: January 15, 2010
    Publication date: July 22, 2010
    Applicant: INNOVISION INC
    Inventors: Elmar Prenner, Kirat Singh
  • Patent number: 7728309
    Abstract: The present invention discloses a high throughput screening method and system, which can be used to screen a plurality of fluid samples to ascertain their corresponding information. For example, a polymer solution sample is screened to ascertain information about its micro structure character such as including its crystallinity property. The high throughput screen system comprises a plurality of sampling passages and one or more screening devices for screening multiple samples simultaneously or almost simultaneously to get their corresponding information so as to meet research requirement of the relevant field.
    Type: Grant
    Filed: May 11, 2006
    Date of Patent: June 1, 2010
    Assignee: Yashentech Corporation
    Inventors: Peijun Cong, Zhuo Wang, Youqi Wang
  • Patent number: 7723700
    Abstract: A vapor delivery system for delivering a steady flow of sublimated vapor to a vacuum chamber comprises a vaporizer of solid material, a mechanical throttling valve, and a pressure gauge, followed by a vapor conduit to the vacuum chamber. The vapor flow rate is determined by both the temperature of the vaporizer and the setting of the conductance of the mechanical throttle valve located between the vaporizer and the vacuum chamber. The temperature of the vaporizer is determined by closed-loop control to a set-point temperature. The mechanical throttle valve is electrically controlled, e.g. the valve position is under closed-loop control to the output of the pressure gauge. In this way the vapor flow rate can be generally proportional to the pressure gauge output. All surfaces exposed to the vapor from the vaporizer to the vacuum chamber are heated to prevent condensation.
    Type: Grant
    Filed: December 9, 2004
    Date of Patent: May 25, 2010
    Assignee: Semequip, Inc.
    Inventors: Thomas N. Horsky, Robert W. Milgate, III
  • Patent number: 7659522
    Abstract: A method of purifying the used O-18 enriched cyclotron target water contaminated by the various organic compounds, the method including: supplying gaseous oxygen into the target water to be purified; irradiating UV rays having wavelengths of 254 nm and 185 nm on the target water; and releasing the gases generated during the purification oxidation process.
    Type: Grant
    Filed: May 31, 2007
    Date of Patent: February 9, 2010
    Assignee: Korea Atomic Energy Research Institute
    Inventors: Jae Woo Kim, Taek Soo Kim, Se Won Bae, Sang Wook Kim
  • Patent number: 7642522
    Abstract: The invention relates to a device for irradiating an absorbing liquid, for example waste water to be disinfected, in a throughflow. Said device comprises at least two radiator units having one cylindrical UV radiation source and three concentric sheaths. A cooling medium for carrying off heat from the UV radiation source flows in a hollow space between the inner and the center sheath. The inventive device allows to use high-performance UV radiation sources and to evenly irradiate the zones of irradiation and prevents floating particles from settling down on the radiator units.
    Type: Grant
    Filed: December 2, 2005
    Date of Patent: January 5, 2010
    Assignee: Delta UV Service Systeme
    Inventor: Gerhard Egberts
  • Publication number: 20090206281
    Abstract: Vapor delivery systems and methods that control the heating and flow of vapors from solid feed material, especially material that comprises cluster molecules for semiconductor manufacture. The systems and methods safely and effectively conduct the vapor to a point of utilization, especially to an ion source for ion implantation. Ion beam implantation is shown employing ions from the cluster materials. The vapor delivery system includes reactive gas cleaning of the ion source, control systems and protocols, wide dynamic range flow-control systems and vaporizer selections that are efficient and safe. Borane, decarborane, carboranes, carbon clusters and other large molecules are vaporized for ion implantation. Such systems are shown cooperating with novel vaporizers, ion sources, and reactive cleaning systems.
    Type: Application
    Filed: June 12, 2007
    Publication date: August 20, 2009
    Inventors: Dror Oved, Thomas N. Horsky, Douglas R. Adams
  • Publication number: 20090057567
    Abstract: Devices and corresponding methods of use are described herein which may comprise an enclosing structure defining a closed loop flow path and a system generating a plasma at a plasma site, e.g. laser produced plasma system, where the plasma site may be in fluid communication with the flow path. For the device, a gas may be disposed in the enclosing structure which may include an ion-stopping buffer gas and/or an etchant. A pump may be provided to force the gas through the closed loop flow path. One or more heat exchangers removing heat from gas flowing in the flow path may be provided. In some arrangements, a filter may be used to remove at least a portion of a target species from gas flowing in the flow path.
    Type: Application
    Filed: August 31, 2007
    Publication date: March 5, 2009
    Applicant: Cymer, Inc.
    Inventors: Alexander N. Bykanov, Alexander I. Ershov, Igor V. Fomenkov, David C. Brandt
  • Patent number: 7470916
    Abstract: A collector is disclosed that is constructed to receive radiation from a radiation source and to transmit radiation to an illumination system, the collector comprising a reflective element which is internally provided with a fluid channel.
    Type: Grant
    Filed: June 20, 2006
    Date of Patent: December 30, 2008
    Assignee: ASML Netherlands B.V.
    Inventors: Wilhelmus Josephus Box, Harm-Jan Voorma, Olav Waldemar Vladimir Frijns, Maurice Piërre Marie Arthur Limpens
  • Patent number: 7456412
    Abstract: One embodiment includes an electromagnetic sensor which includes a header, an anode connected to a first terminal extending through the header, the anode in electrical isolation from the header, a cathode connected to a second terminal extending through the header, the cathode in electrical isolation from the header, a conductive case including a window transparent to electromagnetic energy, the conductive case enclosing the anode and the cathode and hermetically sealed to the header and an insulative sleeve disposed between the anode and the case and between the cathode and the conductive case.
    Type: Grant
    Filed: April 11, 2007
    Date of Patent: November 25, 2008
    Assignee: Honeywell International Inc.
    Inventors: Barrett E. Cole, Khanh Q. Nguyen
  • Patent number: RE44147
    Abstract: An electrically conductive heat-blocking plate 11 with an opening 12 for allowing thermions to pass through is provided between a filament 3, whose temperature can be as high as 2000° to 3000° C., and an ionization chamber 2. The heat-blocking plate 11 is thermally connected via an aluminum block 10 to a heater for maintaining the ionization chamber 2 within a range temperature from 200° to 300° C., and also electrically set at a ground potential, which is approximately equal to the potential of the ionization chamber 2. The heat-blocking plate 11 blocks the radiation heat that the filament 3 emits when energized. Thus, the wall of the ionization chamber 2 is prevented from being locally heated to an abnormally high temperature. As a result, the inner space of the ionization chamber 2 is maintained at an approximately uniform temperature, and the noise due to the decomposition of a metallic material by abnormal heating is prevented.
    Type: Grant
    Filed: March 9, 2006
    Date of Patent: April 16, 2013
    Assignee: Shimadzu Corporation
    Inventors: Shuichi Kawana, Manabu Shimomura