Abstract: A tunable optical filter apparatus and method are disclosed. The apparatus may include a filter driver, a filter device, a detector device and a controller device. The filter driver generates a filter driver signal, including a dither signal. The controller device may be coupled to the detector device, the filter device and the filter driver. The controller device may receive the detector output signal and determine a ratio of the odd order harmonic signal to the even order harmonic signal with respect to the dither frequency. The controller device may also compare the ratio to a predetermined setpoint ratio and generate a control feedback signal for generating a new filter driver signal. The control feedback signal may be based on the comparison of the ratio of the odd order harmonic signal to the even order harmonic signal, to the predetermined setpoint ratio that corresponds to a desired filter operating frequency.

Abstract: An apparatus includes a reconfigurable spatial light modulator capable of spatially modulating an incident wavefront responsive to an image formed on the modulator. A light source is configured to direct a coherent illumination light beam towards the modulator such that the modulator produces a modulated outgoing light beam therefrom. A filter is configured to spatially filter a light pattern formed by the outgoing light beam on a plane to selectively transmit light from a plurality of diffraction peaks therein.

Abstract: A quantum computer includes a unit including thin films A, B and C each containing a physical-system group A, B and C formed of physical systems A, B and C, the films A, B and C being alternately stacked in an order of A, B, C, A, . . . , each of the systems A, B and C having three-different-energy states |0>x, |1>x , |e>x, a quantum bit being expressed by a quantum-mechanical-superposition state of |0>x and |1>x , a light source generating light beams having angular frequencies ?A(E), ye, g, ?A(E), ye, e, ?x, ye, gg, ?x, ye, ge, ?x, ye, eg and ?x, ye, ee, ?A(E), ye, g, a unit controlling frequencies and intensities of the beams, and a unit measuring intensity of light emitted from or transmitted through physical-system group A(E) contained in a lowest one of the thin films A to detect a quantum state of the group A(E).

Abstract: A detection method and apparatus is provided. The detection apparatus includes at least two angular mounted lasers, a surface for receiving laser lines emitted by the angular mounted lasers, a camera for detecting a laser pattern formed by the laser lines on the surface, and a processor for analyzing the laser pattern. The lasers emit orthogonal laser lines on a surface of the device. The camera detects a laser pattern on the surface of the device and the processor analyzes the laser pattern to determine whether the position of the device is in pocket based on the analysis and position algorithms.

Abstract: Exemplary apparatus and/or method can be provided using which, it is possible to provide information associated with at least one portion of a sample. For example, at least one electro-magnetic radiation received from the at least one portion of the sample can be separated into a plurality of first radiations, one of the first radiations having a phase delay that is different from a phase delay of another of the first radiations. In addition, at least one of the first radiations can be received and separated into second radiations according to wavelengths of the received at least one of the first radiations. Further, it is possible to detect the second radiations and generate information regarding a position of the at least one portion of the sample as a function of at least one characteristic of at least one interference of the first radiations.

Abstract: An optical wavefront control pattern generating apparatus (1) relating to the present invention includes: a target image detector unit (60) configured to detect spatial information of the object (B) as a target image; a reconstructed image detector unit (40) configured to detect the reconstructed image displayed on the reconstructed image display unit (30); and an optimizer unit (50) configured to evaluate, on the basis of the target image detected by the target image detector unit (40), the reconstructed image detected by the reconstructed image detector unit (40), and to apply a modification process to the optical wavefront control pattern in a way that a result of the evaluation satisfies a predetermined condition, so as to generate the optimum optical wavefront control pattern.

Abstract: An angle-sensitive pixel (ASP) device that uses the Talbot effect to detect the local intensity and incident angle of light includes two local diffraction gratings stacked above a photodiode. When illuminated by a plane wave, the upper grating generates a self-image at a selected Talbot depth. The second grating, placed at this depth, blocks or passes light depending upon incident angle. Several such structures, tuned to different incident angles, are sufficient to extract local incident angle and intensity. Arrays of such structures are sufficient to localize light sources in three dimensions without any additional optics.

Abstract: Multiple light beams are launched into a single optical fiber, each respective light beam with a corresponding signal. Each of the respective multi-beams are separated by launching each of the light at a different incidence angle and/or input position, into the optical fiber. In this way, each light beam is able to propagate independently according to its own trajectory inside the fiber. The resultant multi light beams propagate with respective counter cyclical orbital angular momentum with respective helical paths.

Abstract: Optical apparatus includes a device package, with a radiation source contained in the package and configured to emit a beam of coherent radiation. A diffractive optical element (DOE) is mounted in the package so as to receive and diffract the radiation from the radiation source into a predefined pattern comprising multiple diffraction orders. An optical detector is positioned in the package so as to receive and sense an intensity of a selected diffraction order of the DOE.

Abstract: A hologram reconstructing apparatus is disclosed. The apparatus includes: unnecessary light removing means for causing the imaging means to receive necessary light only included in the reconstruction light; driving means for operating the hologram recording medium or a reconstruction light optical system; light detecting means for detecting the state that reconstruction light is projected to the unnecessary light removing means of the light cut by the unnecessary light removing means; and control means for obtaining the displacement of the hologram recording medium based on the information on a specific part of the projection state information detected by the light detecting means and controlling the driving means to cancel the displacement and move the hologram recording medium or the optical system.

Abstract: An apparatus is disclosed for projecting patterned electromagnetic waves onto an object. This apparatus includes: an electromagnetic-wave source; a modulating element allowing at least part of an electromagnetic wave incoming from the source to be modulated; and a selector for allowing a selected one of angular components of an electromagnetic wave outgoing from the modulating element, to pass through the selector. The modulating element is shaped to include at least one pair of two portions having different surface shapes. One of the two portions allows one of the angular components which has a radiant angle characteristic that achieves a predetermined entrance numerical aperture, to go out as a component which will be selected by the selector. The other allows one of the angular components which has a radiant angle characteristic that does not achieve the entrance numerical aperture, to go out as a component which will not be selected by the selector.

Abstract: A linearly polarized light is used to probe the detailed structure of a specimen. A reference light is also generated whose amplitude matches the amplitude of the diffracted light from the specimen. The reference light could either be generated from the light source itself as it is reflected off from a mirror through a light attenuator, or could as well be generated off from the reflected/transmitted light from/through the specimen passing through a light attenuator. The light from the specimen is retarded by a quarter-wave with respect to the reference light and the two lights are then passed through another polarizer/analyzer which allows the reference light and the diffracted light from the specimen to pass through while removing the background light. The diffracted light from the specimen, which carries the phase information of the underlying specimen's structure, is modulated by the reference light. The modulation is then recorded on an image sensor such as CCD.

Abstract: A position measuring module includes a movement mirror provided on a movable member and having a reflecting surface along a first axis direction; detection-light units which are arranged for a plurality of measuring axes disposed in the first axis direction respectively and which irradiate, onto the movement mirror, detection lights in a second axis direction intersecting the first axis direction; a reference-light unit which includes a fixed mirror fixed to a member different from the movable member and which irradiates a reference light onto the fixed mirror; a plurality of optical path combining elements which combines detection optical paths for the detection lights reflected by the movement mirror in relation to the measuring axes respectively or combines the detection optical paths for the detection lights and a reference optical path for the reference light via the reference-light unit; and a detecting section which detects an interference fringe brought about by interference between the detection ligh

Abstract: Embodiments of the invention allow the operation of confocal microscopes with relatively open pinholes (e.g. 1 Airy unit) whilst still giving a significant XY resolution improvement. In addition axial (Z) discrimination or resolution may also be improved. This is achieved by splitting the emitted light path in an interferometric fashion. One of the split beams is then directed inversion which inverts at least one coordinate in image space. The transformed beam and the non-transformed beam are then recombined in an interferometric fashion (i.e. coherently added), which provides an interference effect resulting in increased resolution of the image. Where the embodiments are being used in a confocal application, the resulting combined beam can then be subject to a spatially discriminating means, such as a pinhole, or the like.

Abstract: A quantum computer includes a unit including thin films A, B and C each containing a physical-system group A, B and C formed of physical systems A, B and C, the films A, B and C being alternately stacked in an order of A, B, C, A, . . . , each of the systems A, B and C having three-different-energy states |0>X, |1>X, |e>x, a quantum bit being expressed by a quantum-mechanical-superposition state of |0>X and |1>X, a light source generating light beams having angular frequencies ?A(E), ye, g, ?A(E), ye, e, ?x, ye, gg, ?x, ye, ge, ?x, ye, eg and ?x, ye, ee, ?A(E), ye, g, a unit controlling frequencies and intensities of the beams, and a unit measuring intensity of light emitted from or transmitted through physical-system group A(E) contained in a lowest one of the thin films A to detect a quantum state of the group A(E).

Abstract: An optical sensor comprising a light source; a sensor substrate, arranged to receive a force to be detected, the sensor substrate including an interference pattern generator, optically coupled to the light source for receiving light from the light source, and generating an interference pattern, and a detector, optically coupled to the sensor substrate for receiving the interference pattern and providing a signal which can be used to determine the force applied to the sensor substrate.

Abstract: An athermalized birefringent filter for shifts in center wavelength and in bandwidth incorporates fixed retarder elements such as quartz or film retarders, along with electrically-variable retarder elements such as liquid crystal variable retarder cells. A control mechanism determines the amount of thermal drift in the fixed retarder element and produces an equal change in the variable retarder element. The sign of the change depends on whether the variable retarder element adds its retardance with that of the fixed retarder element, or opposes it. This change compensates for the thermal drift of the fixed retarder element. Further, the variable retarder element is constructed to provide the necessary range of retardance adjustment for spectral tuning and thermal compensation over a target thermal range. The control mechanism ensures that, for any specified wavelength, the birefringent filter operates in the same order over the full target thermal range.

Abstract: Optical sensors, and methods for operating optical sensors, are disclosed. One such sensor may include: a reflector positioned a distance from a reflective diffraction grating and a light source for providing light. A first portion of the light can be reflected from the reflective diffraction grating and a second portion of the light passes through the grating to the reflector and is reflected back through the diffraction grating. The sensor may further include a detector for sensing an intensity of light in an interference pattern formed by the first portion of the light reflected from the diffraction grating and the second portion of the light reflected from the reflector. The sensor includes a controller configured to modulate an emission of the light.

Abstract: The present invention relates to an imaging system which employs the same principles as coded aperture imaging. High angular resolution coded aperture imagers require a small aperture size and relatively large spacing between the coded aperture array and the detector. At such high resolutions diffraction effects can start to dominate and can degrade image quality. The present invention provides a detector array which receives radiation from a scene via a coded diffractive mask. The coded diffractive mask is designed such that its diffraction pattern at the waveband of interest is a well conditioned coded intensity pattern having a strong autocorrelation function with low sidelobes. Thus radiation reaching the detector array is diffracted by the diffractive mask but in a defined way and it is the diffraction pattern of the mask which provides the coding.

Abstract: To perform distributed sensing with an optical fiber using Brillouin scattering, a light pulse is transmitted into the optical fiber, where the transmitted light pulse has a first frequency. Backscattered light and optical local oscillator light are combined, where the backscattered light is received from the optical fiber in response to the transmitted light pulse, and where the optical local oscillator light has a second frequency. A frequency offset is caused to be present between the first frequency of the transmitted light pulse and the second frequency of the optical local oscillator light, where the frequency offset is at least 1 GHz less than a Brillouin frequency shift of the backscattered light. Spectra representing Stokes and anti-Stokes components of the backscattered light are acquired, where the Stokes and anti-Stokes components are separated by a frequency span that is based on the frequency offset.

Abstract: Provided are a method and system for determining states of spatial light modulator (SLM) pixels in a lithography system configured to print a desired pattern. The method includes determining diffraction orders associated with an ideal mask of a pattern to be printed by the lithography system, and then configuring the states of the SLM pixels to match all the diffraction orders that are relevant in the image formation.

Abstract: A method is provided for correcting magnetic field distortions in an electron backscatter diffraction (EBSD) pattern. An EBSD pattern is firstly generated from a sample placed within an electron microscope. A predetermined representation of a magnetic field in the microscope is used to calculate the trajectories of electrons in the microscope, for different emergence angles. A corrected EBSD pattern is then calculated using the calculated trajectories, the corrected EBSD pattern representing the EBSD pattern if the microscope magnetic field were substantially absent.

Abstract: Accordingly, the present invention provides methods and apparatus for performing a darkfield inspection on a specimen having periodic structures thereon while substantially reducing or eliminating the long range ringing response, which is typically produced by a traditional Fourier filter mask used to eliminate the diffraction caused by the periodic structures. In one embodiment, an apparatus for inspecting a specimen by detecting optical beams scattered from the specimen. The apparatus includes a beam generator for providing and directing an incident beam towards a specimen and an array subtraction device for substantially subtracting a periodic component from an output beam scattered from the specimen in response to the incident beam. The periodic component corresponds to at least one periodic structure on the specimen, and the subtraction is performed so as to substantially reduce or eliminate a ringing response from the output beam.

Abstract: Systems, methods and sensors detect changes in incident optical radiation. Current is driven through one or more active areas of a detector while the incident optical radiation illuminates the active areas. Voltage is sensed across one or more of the active areas, a change in the voltage being indicative of the changes in incident optical radiation.

Abstract: An imaging system includes a wavelength dependent aperture stop, which transmits light with different ranges of wavelengths through apertures of different diameters. Thus, different colored light will have different F-stops, which can be selected based on the power transfer and image quality requirements for the different colored light. For example, a smaller F-stop may be used with a weaker light source to produce a higher throughput for a specific range of wavelengths. Accordingly, the optical system's design and optimization is wavelength and F-stop dependent.

Abstract: At least one exemplary embodiment is directed to an optical encoder which includes a first diffraction grating having a desired optical effective aperture ratio at an appropriate gap position so as to eliminate and/or reduce high-harmonic components from the light intensity distribution of interference fringes and reduce high-order spatial frequency components overlapped on a displacement signal of the interference fringes formed by the first diffraction grating.

Abstract: A star pattern recognition system (1) comprises an optical filter arrangement (10) in the form of an array (12) of independently tiltable mirrors (M1), (M2). Light from a distant starfield (2) is incident upon the mirror array (12). Each mirror (M1), (M2) reflects a respective image of the starfield, and these images are brought to a common overlapping focus at a detector (18) by a parabolic mirror (14). The mirrors M1, M2 are tilted relative to each other such that when a given star pattern to be recognised is present in the field of view of the filter, each mirror reflects the image of a different star in the pattern onto a common point on a detector (18), thereby providing a detectable output intensity peak that indicates the presence of the star pattern in the field of view of the filter arrangement.

Abstract: There is disclosed an electron microscope equipped with a magnetic microprobe. The microscope can apply a strong electric field to a local area on a specimen made of a magnetic material. The magnetic flux density per unit area of the microprobe is high. The microscope includes a biprism for producing interference between an electron beam transmitted through the specimen and an electron beam passing through a vacuum. The specimen is held to a holder. The microprobe is made of a magnetic material and has a needle-like tip. The microscope further includes a moving mechanism capable of moving the microprobe toward and away from the specimen.

Abstract: Contrast Imaging apparatus and methods with Wavefront Coding aspheric optics and post processing increase depth of field and reduce misfocus effects in imaging Phase Objects. The general Interference Contrast imaging system is modified with a special purpose optical element and image processing of the detected image to form the final image. The Wavefront Coding optical element can be fabricated as a separate component, can be constructed as an integral component of the imaging objective, tube lens, beam splitter, polarizer or any combination of such.

Abstract: An electronically tuned, wavelength-dependent optical detector is provided. The electronically tuned, wavelength-dependent optical detector is a modified metal-semiconductor-metal photodetector including a comb-like metal electrode at a common voltage and metal electrodes each supplied with a control voltage by a voltage means. The wavelength to be detected in an optical input illuminating the detector is selected based on the set of control voltages applied to the metal electrodes. In another embodiment of the invention, the wavelength to be detected with the electronically tuned, wavelength-dependent optical detector is also selected using a standing wave generator, such as an interferometer, to produce a spatially varying light intensity on the surface of the electronically tuned, wavelength-dependent optical detector. Electronic wavelength demultiplexing is also provided.

Abstract: A process for obtaining an object image of at least one object (40) is described, wherein at least two partial images of the object (40) are taken under differing object conditions which are formed on the object with spatial patterns, wherein a non-linear dependence of the light detectable from the object point on the object conditions given at the object point exists and the partial images contain different contributions of various space frequency components of the object structure, and the desired object image is determined from the partial images by reconstruction of the space frequency components. Optical systems for implementing this type of process are also described.

Abstract: A system and method for recovery of phase information from recorded intensity values is disclosed. In one aspect, a phase filter is placed in a plane, which may be the back focal plane (BFP) of a lens used for observing an object. The phase filter changes the phase of a wave front distribution in the BFP in a known manner. Amplitude stops or combinations of phase and amplitude filtering patterns can also be used to capture N different sets of intensity data in a conjugate diffraction plane. The N intensity images are used to obtain an estimate of the wave front at the first plane. This wave front estimate is then used to generate N modified estimates of the wave front at the conjugate plane, each modified estimate corresponding to one of N filtering patterns. In one implementation, the N modified IP estimates are corrected by replacing the estimated amplitudes with the actually measured ones for that image.

Abstract: A high-resolution and high-speed film thickness and thickness uniformity measurement method is disclosed in this invention. The disclosed method includes a step a) of measuring a film thickness at a single point on the top surface of the substrate using an interferometry with a measuring light beam having a range of wavelengths. The method further includes a step b) of selecting an optimal wavelength from the range of wavelengths applied for measuring the film thickness at the single point. The method further includes a step c) of measuring reflection intensities by scanning over a plurality of points with a measuring light beam of the optimal wavelength over the top surface of the substrate. The method further includes a step d) of calculating a film thickness at the plurality of points applying the optimal-wavelength reflection intensities at the plurality of points over the top surface of the substrate.

Abstract: A system and method for reading the information stored in holograms and other diffractive objects. The information is read by analyzing the diffraction pattern produced when a laser beam is focused onto a small spot on the object and scanned across the object.

Abstract: An apparatus for detecting the presence of one or more images of a known kind in a scene is disclosed which comprises a digital input means and an optical output means. The digital input means comprises a capture means which passes a capture image to a first electronic processing means to produce a scene pattern corresponding to a Fourier Transform of the scene image. This pattern is then digitally combined with one or more reference patterns corresponding to Fourier Transforms of a reference image. The resulting combined patterns are then used to modulate a beam of light which may be focused to perform an inverse Fourier Transform providing correlation information. In a preferred arrangement, the combined pattern is displayed on a spatial light modulator.

Abstract: High speed optical scanner systems and methods using optical multiplexing of wavelengths and spatial codes. In one form, a wavelength multiplexed optical scanner (W-MOS) is disclosed, wherein tuning the wavelength or selection of wavelength accomplishes a high speed, no-moving, parts scanner coupled with a wavelength dispersive element, such as a grating or a thin-film interference filter. In another form, a W-MOS employs beam expansion optics and a freespace-coupled wavelength dispersive element. In another embodiment, the invention includes a fiber-based W-MOS using an optical fiber coupled with a fiber-based wavelength division multiplexer (WDM) device to form a spatially distributed scanner for wide angular coverage in three-dimensional beam scanning. The invention also includes a code multiplexed optical scanner (C-MOS) that uses the principle of holography and spatial code multiple access optical communications.

Abstract: Disclosed are mechanisms for selectively filtering spatial portions of light emanating from a sample under inspection within an optical system. In one embodiment, a programmable spatial filter (PSF) is constructed from materials that are compatible with light in a portion of the UV wavelength range. In a specific implementation, the PSF is constructed from a UV compatible material, such as a polymer stabilized liquid crystal material. In a further aspect, the PSF also includes a pair of plates that are formed from a UV grade glass. The PSF may also include a relatively thin first and second ITO layer that results in a sheet resistance between about 100 and about 300 &OHgr; per square.

Abstract: A method and apparatus for monitoring a structure and for locating the position of an event including a light source, a waveguide, and a detector means. The waveguide receives light from the light source so that the light is caused to propagate in counter-propagating optical signals in the waveguide. The waveguide includes the counter-propagating optical signals or some characteristic of the signals modified or effected by an external parameter caused by or indicative of the event to provide modified counter-propagating optical signals. The detector means detects the modified counter-propagating optical signals effected by the parameter and determines the time delay or difference between the modified counter-propagating optical signals in order to determine the location of the event.

Abstract: A system and method for correcting automatically the distortions in electron background diffration (EBSD) patterns which result from magnetic fields produced by some scanning electron microscopes (SEMs) used for collecting such patterns from polycrystalline sample materials. The method may be implemented as a software program running on a computer which is part of a conventional system for obtaining and analyzing EBSD patterns to obtain crystallographic information about the sample material. The method includes a calibration procedure and a correction procedure. In the calibration procedure, a distorted EBSD pattern obtained from a calibration sample is displayed on an operator display and user interface. Using an input device, an operator defines segment endpoints along a Kikuchi band in the distorted EBSD pattern image. From the user defined segment endpoints, correction parameters are calculated based on a mathematical curve (e.g., cubic spline) fitting the endpoints.

Abstract: A synthetic aperture system for producing a non-periodic pattern in a region of overlap. The system includes a source of electromagnetic radiation producing a plurality of electromagnetic beams, a plurality of beam controllers positioned to receive a respective one of the plurality of electromagnetic beams and direct the respective electromagnetic beam into the region of overlap; and a system controller in electrical communication with each of the plurality of the beam controllers. Each beam controller controls at least one of the phase, amplitude and polarization of a respective one of the plurality of electromagnetic beams in response to control signals from the system controller. The result is a non-periodic pattern formed within the region of overlap by the interference of a plurality of electromagnetic beams in response to the control signals from the system controller. The invention also relates to a method for producing a non-periodic pattern in a region of overlap.

Abstract: A system and method for recovery of phase information from recorded intensity values is disclosed. In one aspect, a phase filter is placed in a plane, which may be the back focal plane (BFP) of a lens used for observing an object. The phase filter changes the phase of a wave front distribution in the BFP in a known manner. Amplitude stops or combinations of phase and amplitude filtering patterns can also be used to capture N different sets of intensity data in a conjugate diffraction plane. The N intensity images are used to obtain an estimate of the wave front at the first plane. This wave front estimate is then used to generate N modified estimates of the wave front at the conjugate plane, each modified estimate corresponding to one of N filtering patterns. In one implementation, the N modified IP estimates are corrected by replacing the estimated amplitudes with the actually measured ones for that image.

Abstract: A method of processing interferometric data relating to a sample having multiple reflective surfaces, includes the steps of: specifying a set of acceptance ranges for peaks of interest in the interferogram, based on a knowledge of the sample; determining which peaks in the interferogram fall within the acceptance ranges; identifying which peaks within the acceptance ranges represent multiple reflections and eliminating these peaks from the interferometric data; identifying acceptance ranges which do not contain peaks; and employing other peaks in the interferogram to calculate the locations of peaks in the acceptance ranges that do not contain peaks.

Abstract: Described is a device which enables toolsetting on a machine tool. The device includes a light emitting unit (10) and a light detecting unit (14). A light source (30) causes a light beam (12) to propagate from the emitting unit (10) to the detecting unit (14). A light detector (40) detects the presence or absence of the beam. A trigger signal is produced when occlusion occurs and so the position of an object can be determined by reference to the machine's coordinate readings. The beam (12) may be uncollimated and thus provide a device with an easier set-up and a greater resistance to vibration in use. The light detector (40) and/or light source may be protected from contamination by windows (34,44) or a protector having an aperture therein. The light emitting and detecting units each have an aperture for the light beam.

Abstract: A system and method for recovery of phase information from recorded intensity values is disclosed. A phase filter, such as one or more dioptric lenses, is placed in the back focal plane (BFP) of a lens used for observing an object. The phase filter changes the phase of a wave front distribution in the BFP in a known manner. The system captures N different sets of intensity data in the image plane (IP) using N different phase filters or N phase distributions generated by an electronically variable phase filter. The N intensity images are used to obtain an estimate of the wave front at the BFP of the lens. This BFP wave front estimate is then used to generate N modified estimates of the wave front at the IP, each modified estimate corresponding to one of the N phase distributions of the BFP phase filter(s). In one implementation, the N modified IP estimates are corrected by replacing the estimated amplitudes with the actually measured ones for that image.

Abstract: A cartridge for a data storage disk drive has a thin retroreflective marker. Light from a source is reflected from the marker almost exactly on its incident path. A planar light shaping optical structure such as a holographic light shaping diffuser (LSD) ruled or blazed diffraction grating, holographic diffraction grating, binary optics or holographic diffraction grating directs light to the detector. The LSD has degrees of angular diffusion in different orthogonal axes. This property makes possible unique identification of different types of cartridges.

Abstract: A dispersing medium containing plural types of particles is let to flow in a flow path formed in a flow cell. The flow cell is irradiated with interfering light to form interference fringes of a pattern of stripes. In another arrangement, light is two-dimensionally scanned at high speed so as to cross a flow in the flow path. The moving particles receive a braking force by the light gradient force whenever they pass through each irradiation light stripe. In that case, greater braking forces act on particles having larger sizes (or larger refractive indices) than on particles having smaller sizes (or smaller refractive indices). Accordingly, the particles receiving smaller braking forces pass through the irradiated position more rapidly, so that particles can be separated to flow in the order from the particles receiving smaller braking forces to the particles receiving greater braking forces.

Abstract: Thin film spatial filters are disclosed. The filters are constructed with a continuous thin film of low resistance conductor (for example with a resistance of from 10−2 to 108 Ohms-cm) with plurabilty of resistive elements defining pixels. A thin film of high resistance material is on other side of the pixels in the case of grounded filters. The conductor film provides lateral blurring for image processing.

Abstract: A synthetic aperture system for producing a non-periodic pattern in a region of overlap. The system includes a source of electromagnetic radiation producing a plurality of electromagnetic beams, a plurality of beam controllers positioned to receive a respective one of the plurality of electromagnetic beams and direct the respective electromagnetic beam into the region of overlap; and a system controller in electrical communication with each of the plurality of the beam controllers. Each beam controller controls at least one of the phase, amplitude and polarization of a respective one of the plurality of electromagnetic beams in response to control signals from the system controller. The result is a non-periodic pattern formed within the region of overlap by the interference of a plurality of electromagnetic beams in response to the control signals from the system controller.The invention also relates to a method for producing a non-periodic pattern in a region of overlap.

Abstract: An optical correlator system having a plurality of both active and passive reflective optical components between a source of electromagnetic radiation, such a visible coherent light, and an output detector array in a planar support body along a folded optical axis beam path within the body uses a ferro-electric liquid crystal spatial light modulator as the input sensor and the correlating filter to provide enhanced optical detection of an unknown object at a CCD detector array.

Abstract: The invention is a pattern defect inspection system and method for improving the inspection speed, simplifying the system, and enlarging the inspection object, in which a correlation circuit (24) selects from a plurality of reference images in reference image storing means (22) one having the highest correlation with a detection image in detection image storing means (23) and inputs it to a difference circuit (25); the difference circuit (25) forms a difference image based on a reference image from the correlation circuit (24) and a detection image from the detection image storing means (23); a defect decision circuit (26) decides the position and size of a defect in a wafer under test 41, based on the difference image from the difference circuit (25); and the result is inputted to defect information processing means (27) to output as a defect information.