With Rotation Of Material Patents (Class 250/559.14)
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Patent number: 11371830Abstract: A method for assessing the profile of a tool using a non-contact tool setting apparatus that includes a transmitter for emitting a light beam and a receiver for receiving the beam. The receiver generates a beam intensity signal describing the intensity of received light. The setting apparatus is mounted to a coordinate positioning apparatus that allows the tool to be moved relative to the setting apparatus. The method includes using the coordinate positioning apparatus to move the tool relative to the setting apparatus along a tool inspection path, the tool inspection path being selected so that the light beam is traced substantially along a periphery of the tool to be inspected. Beam intensity data is collected describing the beam intensity signal that is generated by the receiver as the tool inspection path is traversed and analysis of the collected beam intensity data is used to assess the tool profile.Type: GrantFiled: August 31, 2018Date of Patent: June 28, 2022Assignee: RENISHAW PLCInventors: William Ernest Lee, Paul Maxted
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Patent number: 11145526Abstract: A method of monitoring or analyzing a manufacturing of a semiconductor structure includes providing a semiconductor structure; providing a camera disposed around the semiconductor structure; disposing a liquid substance over the semiconductor structure; removing a portion of the semiconductor structure; removing the liquid substance from the semiconductor structure; capturing a plurality of first images of the semiconductor structure by the camera; analyzing the plurality of first images; identifying a region of the semiconductor structure where a residue of the liquid substance is disposed based on the analysis of the plurality of first images; and performing a response based on the identification of the region of the semiconductor structure.Type: GrantFiled: March 29, 2019Date of Patent: October 12, 2021Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.Inventor: Chih-Yu Wang
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Patent number: 10403156Abstract: Improving automated package delivery to mobile delivery receptacles to allow accurate and reliable package deliveries comprises a delivery receptacle for an automated package delivery via an unmanned aerial delivery device. The delivery receptacle is notified of a pending delivery and travels to a receiving location. The delivery receptacle emits infrared (“IR”) beacons from one or more IR beacon transmitters. An aerial delivery device detects the IR beacon and uses the beacons to navigate to the delivery receptacle. The delivery receptacle receives IR beacon responses from the aerial delivery device and continually or periodically directs the IR beacons in the direction of the aerial delivery device. The aerial delivery device deposits the package in the delivery receptacle. After receiving the package, the delivery receptacle transports the package to a secure location, such as into a garage.Type: GrantFiled: November 27, 2017Date of Patent: September 3, 2019Assignee: GOOGLE LLCInventors: Varun Soundararajan, Anurag Agrawal
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Patent number: 10259091Abstract: A contactlessly measuring system having a contactlessly measuring device, with a light transmitter portion and a light receiver portion, for determining the position of a tool or for determining the longest cutting edge of a rotating tool in a tool machine. A light barrier system is formed by the light transmitter portion and the light receiver portion, each being associated with a leg of an essentially U-shaped support structure of the measuring device. A fluid blowing device, associated with the measuring device, is provided for cleaning a tool to be measured, and/or a sealing air feed is provided in the area of a measuring beam of the measuring device designed as a light barrier measuring system, and/or a protective/closing device is provided at the light transmitter portion and/or the light receiver portion of the measuring device designed as a light barrier measuring system.Type: GrantFiled: October 23, 2017Date of Patent: April 16, 2019Assignee: BLUM-NOVOTEST GmbHInventors: Martin Klugger, Andreas Hildebrand, Norbert Moersch
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Patent number: 9911341Abstract: Improving automated package delivery to mobile delivery receptacles to allow accurate and reliable package deliveries comprises a delivery receptacle for an automated package delivery via an unmanned aerial delivery device. The delivery receptacle is notified of a pending delivery and travels to a receiving location. The delivery receptacle emits infrared (“IR”) beacons from one or more IR beacon transmitters. An aerial delivery device detects the IR beacon and uses the beacons to navigate to the delivery receptacle. The delivery receptacle receives IR beacon responses from the aerial delivery device and continually or periodically directs the IR beacons in the direction of the aerial delivery device. The aerial delivery device deposits the package in the delivery receptacle. After receiving the package, the delivery receptacle transports the package to a secure location, such as into a garage.Type: GrantFiled: December 19, 2016Date of Patent: March 6, 2018Assignee: GOOGLE LLCInventors: Varun Soundararajan, Anurag Agrawal
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Patent number: 9558673Abstract: Improving automated package delivery to mobile delivery receptacles to allow accurate and reliable package deliveries comprises a delivery receptacle for an automated package delivery via an unmanned aerial delivery device. The delivery receptacle is notified of a pending delivery and travels to a receiving location. The delivery receptacle emits infrared (“IR”) beacons from one or more IR beacon transmitters. An aerial delivery device detects the IR beacon and uses the beacons to navigate to the delivery receptacle. The delivery receptacle receives IR beacon responses from the aerial delivery device and continually or periodically directs the IR beacons in the direction of the aerial delivery device. The aerial delivery device deposits the package in the delivery receptacle. After receiving the package, the delivery receptacle transports the package to a secure location, such as into a garage.Type: GrantFiled: December 11, 2015Date of Patent: January 31, 2017Assignee: GOOGLE INC.Inventors: Varun Soundararajan, Anurag Agrawal
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Patent number: 9205617Abstract: A contour of an outer diameter dimension of a dried ceramic honeycomb body is measured in a first measuring portion Q1 and a second measuring portion Q2 of the surface of an outer wall of the dried ceramic honeycomb body; a total of absolute values of differences between respective values of four contours C1x, C1y, C2x and C1y measured at a first measurement point P1x and a second measurement point P1y of the first measuring portion Q1 and a third measurement point P2x and a fourth measurement point P2y of the second measuring portion Q2 is obtained; and one end surface and the other end surface are subjected to finishing step in a state where four measurement points of the outer wall, at which the total of the absolute values is minimum, are fixed by a first fixture and a second fixture.Type: GrantFiled: June 10, 2013Date of Patent: December 8, 2015Assignee: NGK Insulators, Ltd.Inventor: Shigeki Kato
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Patent number: 8686383Abstract: In order to enable high accuracy positioning and strong pressing of a substrate, the present invention provides a substrate holding apparatus including: a rotating bed having an inclined surface supporting a lower side of an outer circumferential side surface of the substrate, which bed rotates on a normal line of the substrate as the rotation axis together with the substrate; a position restriction unit rotating together with the rotating bed and restricting the substrate in a predetermined position on the rotating bed by pressing a plurality of points on the circumference on an upper side of the outer circumferential side surface of the substrate prior to the rotation; and a pressing unit rotating together with the rotating bed and pressing the substrate against the inclined surface by pressing a plurality of points on the upper side of the outer circumferential side surface of the substrate during the rotation.Type: GrantFiled: April 24, 2012Date of Patent: April 1, 2014Assignee: Hitachi High-Technologies CorporationInventors: Kazuhiro Zama, Koichi Asami, Yusuke Miyazaki
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Patent number: 8183549Abstract: In order to enable high accuracy positioning and strong pressing of a substrate, the present invention provides a substrate holding apparatus including: a rotating bed having an inclined surface supporting a lower side of an outer circumferential side surface of the substrate, which bed rotates on a normal line of the substrate as the rotation axis together with the substrate; a position restriction unit rotating together with the rotating bed and restricting the substrate in a predetermined position on the rotating bed by pressing a plurality of points on the circumference on an upper side of the outer circumferential side surface of the substrate prior to the rotation; and a pressing unit rotating together with the rotating bed and pressing the substrate against the inclined surface by pressing a plurality of points on the upper side of the outer circumferential side surface of the substrate during the rotation.Type: GrantFiled: July 1, 2011Date of Patent: May 22, 2012Assignee: Hitachi High-Technologies CorporationInventors: Kazuhiro Zama, Koichi Asami, Yusuke Miyazaki
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Publication number: 20110260080Abstract: In order to enable high accuracy positioning and strong pressing of a substrate, the present invention provides a substrate holding apparatus including: a rotating bed having an inclined surface supporting a lower side of an outer circumferential side surface of the substrate, which bed rotates on a normal line of the substrate as the rotation axis together with the substrate; a position restriction unit rotating together with the rotating bed and restricting the substrate in a predetermined position on the rotating bed by pressing a plurality of points on the circumference on an upper side of the outer circumferential side surface of the substrate prior to the rotation; and a pressing unit rotating together with the rotating bed and pressing the substrate against the inclined surface by pressing a plurality of points on the upper side of the outer circumferential side surface of the substrate during the rotation.Type: ApplicationFiled: July 1, 2011Publication date: October 27, 2011Applicant: HITACHI HIGH-TECHNOLOGIES CORPORATIONInventors: Kazuhiro ZAMA, Koichi Asami, Yusuke Miyazaki
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Patent number: 7999242Abstract: In order to enable high accuracy positioning and strong pressing of a substrate, the present invention provides a substrate holding apparatus including: a rotating bed having an inclined surface supporting a lower side of an outer circumferential side surface of the substrate, which bed rotates on a normal line of the substrate as the rotation axis together with the substrate; a position restriction unit rotating together with the rotating bed and restricting the substrate in a predetermined position on the rotating bed by pressing a plurality of points on the circumference on an upper side of the outer circumferential side surface of the substrate prior to the rotation; and a pressing unit rotating together with the rotating bed and pressing the substrate against the inclined surface by pressing a plurality of points on the upper side of the outer circumferential side surface of the substrate during the rotation.Type: GrantFiled: April 6, 2010Date of Patent: August 16, 2011Assignee: Hitachi High-Technologies CorporationInventors: Kazuhiro Zama, Koichi Asami, Yusuke Miyazaki
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Patent number: 7948642Abstract: An optical measuring apparatus includes a light transmission unit, a light reception unit, a measurement value calculation unit, and a correction unit. The light transmission unit forms a beam of light that focuses in a measurement area where a measurement target object is placed and scans the measurement area with the beam of light. The light reception unit receives the beam of light that has passed through the measurement area and outputs a received-light signal on the basis of the received beam of light. The measurement value calculation unit calculates a measurement value that represents the dimension of the measurement target object on the basis of the received-light signal. The correction unit corrects the measurement value on the basis of the amount of change in the strength of the received-light signal per unit of time of scanning the beam of light.Type: GrantFiled: April 13, 2010Date of Patent: May 24, 2011Assignee: Mitutoyo CorporationInventor: Masanobu Kataoka
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Patent number: 7732797Abstract: A device and method for detecting the presence or absence of an object which has repetitive motion are disclosed comprising, a receiver for receiving a signal from the object, and circuitry for determining the presence or absence of the object to be detected, wherein the circuitry records the signal from the receiver as a pattern of data during at least part of the repetitive motion of the object, compares the data with a previously recorded data pattern and, produces an output signal based on the comparison. The signal may be received during discrete time intervals, and may be light which can be transmitted with varying intensity. The circuitry may determine the value of signal received at a receiver and produce a binary value. The signal received at the receiver can be reflected from the object to be detected.Type: GrantFiled: September 7, 2005Date of Patent: June 8, 2010Assignee: Renishaw PLCInventors: Victor Gordon Stimpson, Colin Timothy Bell, William Kenneth Davies, Paul Maxted
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Patent number: 7723709Abstract: In order to enable high accuracy positioning and strong pressing of a substrate, the present invention provides a substrate holding apparatus including: a rotating bed having an inclined surface supporting a lower side of an outer circumferential side surface of the substrate, which bed rotates on a normal line of the substrate as the rotation axis together with the substrate; a position restriction unit rotating together with the rotating bed and restricting the substrate in a predetermined position on the rotating bed by pressing a plurality of points on the circumference on an upper side of the outer circumferential side surface of the substrate prior to the rotation; and a pressing unit rotating together with the rotating bed and pressing the substrate against the inclined surface by pressing a plurality of points on the upper side of the outer circumferential side surface of the substrate during the rotation.Type: GrantFiled: August 30, 2007Date of Patent: May 25, 2010Assignee: Hitachi High Technologies CorporationInventors: Kazuhiro Zama, Koichi Asami, Yusuke Miyazaki
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Patent number: 7688435Abstract: Scratches, pits and particles which are smaller or larger than the beam size may be measured and identified by a single and dual multiple beam techniques. In one embodiment, this the invention uses a pair of orthogonally oriented white light beams, one in the radial and one in the circumferential direction. The scattered light from the radial and circumferential beams allows the detection and classification of particles, pits and scratches. In other embodiments, single beam techniques are used to classify radial and circumferential defects.Type: GrantFiled: July 13, 2006Date of Patent: March 30, 2010Assignee: KLA-Tencor CorporationInventor: Steven W. Meeks
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Patent number: 7053392Abstract: The present invention teaches a method and apparatus for making measurement of an object on a machine, such as a machine tool, using an optical measuring apparatus which includes a light source for generating a beam of light which is incident on a detector. A detection signal is generated within the detector each time the beam is interrupted. The duration and/or frequency of the detection signals are evaluated and an output signal is emitted from the detection only if a further detection signal is present within the detector in a specified time interval from the generation of an earlier detection signal.Type: GrantFiled: September 23, 2004Date of Patent: May 30, 2006Assignee: Renishaw, PLCInventors: Victor G. Stimpson, Jon P. Fuge, William K. Davies, Norman J. Leete, Colin T. Bell
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Patent number: 7027640Abstract: The present invention provides an apparatus and method for detecting or inspecting defects on a polishing pad for use in performing chemical mechanical polishing of a wafer. The apparatus for detecting the defects on the pad comprises a pad driving device for loading the pad thereon and moving the pad, at least one camera installed to face the pad for converting an image of the pad into an electrical signal and outputting the converted electrical signal, a digital image data acquisition device for converting the electrical signal transmitted from the camera into a digital signal, and an image data processing unit for processing the image data and detecting the defects on the pad.Type: GrantFiled: August 23, 2002Date of Patent: April 11, 2006Assignee: Nanometrics IncorporatedInventors: Sung-Jin Park, Chan-Ho Ryu
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Patent number: 6878953Abstract: The present invention teaches a method and apparatus for making measurement of an object on a machine, such as a machine tool, using an optical measuring apparatus which includes a light source for generating a beam of light which is incident on a detector. A detection signal is generated within the detector each time the beam is interrupted. The duration and/or frequency of the detection signals are evaluated and an output signal is emitted from the detection only if a further detection signal is present within the detector in a specified time interval from the generation of an earlier detection signal.Type: GrantFiled: October 6, 2003Date of Patent: April 12, 2005Assignee: Renishaw PLCInventors: Victor G Stimpson, Jon P Fuge, William K Davies, Norman J Leete, Colin T Bell
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Patent number: 6606403Abstract: An automatic system for illuminating, inspecting and measuring stents and other precision cut tubes and components made of a: a linear array electronic camera with a lens, a light source to provide necessary illumination to create an image on said linear array camera, mandrel onto which the tube is mounted during inspection, a rotary stage for rotating the mandrel, and a computer based electronic imaging system that creates a line-by-line image of stent as it rotates under said camera.Type: GrantFiled: April 26, 2001Date of Patent: August 12, 2003Inventor: Daniel Freifeld
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Patent number: 6496273Abstract: Described is a device which enables toolsetting on a machine tool. The device includes a light emitting unit (10) and a light detecting unit (14). A light source (30) causes a light beam (12) to propagate from the emitting unit (10) to the detecting unit (14). A light detector (40) detects the presence or absence of the beam. A trigger signal is produced when occlusion occurs and so the position of an object can be determined by reference to the machine's coordinate readings. The beam (12) may be uncollimated and thus provide a device with an easier set-up and a greater resistance to vibration in use. The light detector (40) and/or light source may be protected from contamination by windows (34,44) or a protector having an aperture therein. The light emitting and detecting units each have an aperture for the light beam.Type: GrantFiled: May 2, 2000Date of Patent: December 17, 2002Assignee: Renishaw PLCInventors: Victor G Stimpson, Jonathan P Fuge, Benjamin J Merrifield, David R McMurtry
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Patent number: 6462822Abstract: This invention relates to a method and apparatus for detecting overhead transparencies (OHT), such as a dual OHT. Dual overhead transparencies, preferably, have a coating on one side that is compatible with ink jet-type printers and a coating on the other side that is compatible with laser jet-type printers. Such structures of this type, inform the user of the type of OHT.Type: GrantFiled: April 2, 2001Date of Patent: October 8, 2002Assignee: Hewlett-Packard CompanyInventors: Robert E. Haines, Jeffrey S. Weaver
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Patent number: 6266142Abstract: A noncontact position and orientation measurement system includes at least four beacons disposed on a first object. Each beacon is operable to generate an optical signal. The system also includes a beacon controller operable to sequentially activate and deactivate each of the beacons. The system also includes an electro-optical sensor disposed on a second object. The electro-optical sensor is operable to generate an output signal for each optical signal received from the beacons. The system further includes a signal con-roller coupled to the electro-optical sensor. The signal controller is operable to determine a position and an orientation of the second object relative to the first object using the output signals generated by the electro-optical sensor.Type: GrantFiled: September 20, 1999Date of Patent: July 24, 2001Assignee: The Texas A&M University SystemInventors: John L. Junkins, Delcan Hughes, Hanspeter Schaub