Abstract: The present invention provides a hybrid material and a method for forming a hybrid material comprising actuator made from a stimuli responsive polymer mounted in a porous framework. The present invention also provides devices employing the actuator of the present invention.

Abstract: A valve where the valve membrane is made from silicone rubber. Preferably the valve is a microelectromechanical systems (MEMS) thermopneumatic valve. Because of the advantageous physical properties of silicone rubber, the valve provides desirable performance with reasonable power consumption.

Abstract: A micro valve and a method for setting or actuating a micro valve for use in fluidic applications includes cooling an array of actuating members made of Shape Memory Alloy (SMA) material. The SMA material is cooled to a temperature equal to or below the temperature at which a transformation from austenitic to martensitic state occurs so that the entire array of SMA actuating members is either fully or partially in the martensitic state. At least one of the actuating member is selected to correspond to a pre-determined opening pressure or flow resistance. Each of the actuating members are heated individually, except the previously selected one, to a temperature equal to or above the temperature at which a transformation from the martensitic state to the austensitic state occurs.

Abstract: An improved microvalve device is configured to provide a more robust and durable operation to withstand the demands of various operating environments. The microvalve may comprise a valve seat and a diaphragm, with the diaphragm operated by an external actuator device, such as a bladder, through various mechanisms of actuation, such as direct and indirect mechanisms, that are separate from the microvalve. Through use of the various mechanisms of actuation, the actuator device is configured to apply forces on the diaphragm to suitably move the diaphragm to open and close the microvalve. The valve seat and diaphragm can be configured to provide the microvalve with a plurality of openings configured to permit flow thereinbetween. In addition, the microvalve may be configured to facilitate uni-directional or bi-directional flow.

Abstract: A valve for preventing the flow of fluid when the temperature of the fluid is above a predetermined threshold, the valve including: a body having at least one opening for allowing the fluid to pass when the temperature of the fluid is below the predetermined threshold; and a shape memory or bi-metal actuator for substantially closing the at least one opening when the temperature of the fluid is above the predetermined threshold to prevent the fluid from passing.

Abstract: An active micromechanical air valve for pressure control in a disk drive and method for making the same is disclosed. A first layer having a first thermal coefficient of expansion and a second layer having a second thermal coefficient of expansion are formed. The first layer and the second layer are configured to form a membrane. The first and second layer engage in a closed state to prevent air flow there between in a first thermal state and open to allow air flow there between in a second thermal state.

Abstract: A variable valve with an actuator that elongates upon application of an electrically-derived field. The valve includes an actuator comprising an actuator member made of a material that is elongated by an electrically-derived field. A coil surrounding the actuator member selectively applies an electrically-derived field to the actuator member. The valve further comprises a fluid flow path, an opening in the fluid flow path defining a flow area, and a closure member movable by the actuator member from a closed or more closed position in which it is restricting some or all of the flow area, to an open or more open position in which it is restricting less of the flow area, to selectively alter the fluid flow rate through the opening.

Abstract: The present invention relates to a valve for use in a microfluidic system. The valve includes a substrate defining an upstream channel and a downstream channel joined by a passage, wherein the passage comprises a first opposed wall disposed at an angle to a central axis of the upstream channel. A thermally responsive substance (TRS) obstructs the passage. At least a portion of the TRS that obstructs the passage abuts the first opposed wall. Upon the actuation of the heat source in thermal contact with the TRS an opening motion of the TRS opens the passage.

Abstract: A bistable microvalve of shape memory material is operatively connected to a microcatheter. The bistable microvalve includes a tip that can be closed off until it is in the desired position. Once it is in position it can opened and closed. The system uses heat and pressure to open and close the microvalve. The shape memory material will change stiffness and shape when heated above a transition temperature. The shape memory material is adapted to move from a first shape to a second shape, either open or closed, where it can perform a desired function.

Abstract: An actuator assembly and method for making and using an actuator assembly. In one embodiment, the assembly includes an actuator body having an actuator channel with a first region and a second region. An actuator is disposed in the actuator channel and is movable when in a flowable state between a first position and a second position. A heater is positioned proximate to the actuator channel to heat the actuator from a solid state to a flowable state. A source of gas or other propellant is positioned proximate to the actuator channel to drive the actuator from the first position to the second position. The actuator has a higher surface tension when engaged with the second region of the channel than when engaged with the first region. Accordingly, the actuator can halt upon reaching the second region of the channel due to the increased surface tension between the actuator and the second region of the channel.

Abstract: An actuator assembly and method for making and using an actuator assembly. In one embodiment, the assembly includes an actuator body having an actuator channel with a first region and a second region. An actuator is disposed in the actuator channel and is movable when in a flowable state between a first position and a second position. A heater is positioned proximate to the actuator channel to heat the actuator from a solid state to a flowable state. A source of gas or other propellant is positioned proximate to the actuator channel to drive the actuator from the first position to the second position. The actuator has a higher surface tension when engaged with the second region of the channel than when engaged with the first region. Accordingly, the actuator can halt upon reaching the second region of the channel due to the increased surface tension between the actuator and the second region of the channel.

Abstract: An actuator assembly and method for making and using an actuator assembly. In one embodiment, the assembly includes an actuator body having an actuator channel with a first region and a second region. An actuator is disposed in the actuator channel and is movable when in a flowable state between a first position and a second position. A heater is positioned proximate to the actuator channel to heat the actuator from a solid state to a flowable state. A source of gas or other propellant is positioned proximate to the actuator channel to drive the actuator from the first position to the second position. The actuator has a higher surface tension when engaged with the second region of the channel than when engaged with the first region. Accordingly, the actuator can halt upon reaching the second region of the channel due to the increased surface tension between the actuator and the second region of the channel.

Abstract: A gas control valve includes a first element, a second element, a mediate element, a sleeve, a rod and a control element. The first element defines a first path. The second element defines a second path and a hole in communication with the second path. The mediate clement defines a passage. The mediate clement is sandwiched between the first and second elements so that the first path is in communication with the second path through the passage. The sleeve includes a first end and a second end. The first end of the sleeve is inserted into the hole. The rod includes a first and a second end. The rod is inserted into the sleeve so that the first end of the rod is inserted into the second path and that the second end of the rod is exposed through the second end of the sleeve. The control element is connected between the second end of the sleeve and the second end of rod. Normally, the control element keeps the rod in a first position wherein the first end of the rod opens the passage.

Abstract: A pressure-variable valve device which is adapted to be embedded in the human body and which is capable of changing a difference in pressure between an inlet-side and an outlet-side duct, the valve device including a rotating member capable of rotating around a central axis in directions to vary a set pressure for a valve, and a rotation control mechanism for controlling the rotation of the rotating member,wherein the rotation control mechanism includes permanent magnet structures supported by the valve-device main body so as to be capable of making a linear reciprocal translation in directions, and displacement transmission mechanisms, for rotating the rotating member in the direction corresponding to the direction of the translation of the permanent magnet structures. A set-pressure adjusting device includes a magnetic field generating mechanism which generates a magnetic field in which the permanent magnet structures cause the rotating member to rotate in the same direction.

Abstract: Low power integrated pumping and valving arrays which provide a revolutionary approach for performing pumping and valving approach for performing pumping and valving operations in microfabricated fluidic systems for applications such as medical diagnostic microchips. Traditional methods rely on external, large pressure sources that defeat the advantages of miniaturization. Previously demonstrated microfabrication devices are power and voltage intensive, only function at sufficient pressure to be broadly applicable. This approach integrates a lower power, high-pressure source with a polymer, ceramic, or metal plug enclosed within a microchannel, analogous to a microsyringe. When the pressure source is activated, the polymer plug slides within the microchannel, pumping the fluid on the opposite side of the plug without allowing fluid to leak around the plug. The plugs also can serve as microvalves.

Abstract: Hydraulic or electro-hydraulic braking systems which include at least one wheel braking device and micro-machined technology, such as microvalves, are described herein. The use of the microvalves helps to eliminate audible noise produced in the hydraulic systems as well as allows for reduced package size of the system. In particular, many of the braking systems described herein have Anti-lock Braking System (ABS) capabilities, and as such employ apply microvalves, dump microvalves and changeover microvalves. The microvalves may be digitally or proportionally controlled for selectively controlling the pressure supplied to the wheel brake cylinders.

Abstract: A simple micro valve actuator is disclosed. The micro valve actuator of this invention comprises a sealed vacuum chamber. The micro valve is actuated by providing a current to a thin film heater, which in turn weakens and, under the atmospheric pressure differential, breaks a diaphragm sealing said vacuum chamber whereby the vacuum inside the chamber is released. By applying the micro valve actuator of this invention to a microfluidic channel with a micro valve, the resulting pressure differential deforms the section of the microchannel at the micro valve area and adjacent to the vacuum chamber so to change the flow inside the microchannel. In the preferred embodiments of this invention, the chamber may be prepared in a silicon, glass, or plastic substrate and a diaphragm is vacuum bonded to seal the chamber. The diaphragm may comprise a metallic gas-impermeable film. A releasing member comprising a thin-film metallic heater is then microfabricated on the diaphragm.

Abstract: Disclosed is a microvalve suitable for use in high pressure applications such as refriigeration. The microvalve has a displaceable member that slides across an inlet port, thereby creating an orifice. A pressure-equalizing contour is positioned beneath the displaceable member and is in fluid contact with the inlet port. The pressure on the displaceable member from the inlet port is equalized by the pressure from the pressure-equalizing contour. Consequently, the microvalve can be configured with its inlet port and outlet port on opposite sides of the microvalve. Pressures in the x and y direction are also equalized because of recesses that permit fluid from the inlet to contact all faces of the displaceable member.

Abstract: This invention is directed to a microelectromechanical valve having two or more diaphragms containing non-aligned holes to control the flow of fluids. Fluid flows through the holes in the first diaphragm and then must flow between the first and second diaphragm to reach the holes in the second diaphragm, whereupon the fluid is free to flow past the second diaphragm.

Abstract: A valve for automatically modulating fluid flow includes a flexible flow adjustment member having a variable diameter passage therethrough and an outer surface and a shell surrounding at least a portion of the outer surface and creating a void between the shell and the outer surface. The shell is in contact with the flow of fluid. A thermally reactive material that expands when heated and contracts when cooled is a substantially non-volatile heat transfer liquid that does not undergo a phase change in use and contains inert particulate filler within the void and is in contact with the outer surface of the flexible flow adjustment member. The thermally reactive material exerts pressure on the adjustment member in response to heating the thermally reactive material to cause the passage to narrow and relieves pressure thereon in response to cooling the thermally reactive material to permit the passage to widen.

Abstract: A gas control valve includes two blocks with a mediate plate located therebetween. Each of the two parts has a gas path facing the mediate plate which has a passage which communicates with the two gas paths. A sleeve is engaged with a hole in one of the two parts and a rod is movably received in said sleeve. A first end of said rod is movably inserted in said second gas path and can be lowered to seal the passage in the mediate plate. A memory member or bi-metal has a first plate fixedly connected on a top of said sleeve and a second plate fixedly mounted to said second end of said rod. The memory member or bi-metal is located in the gas combustion chamber and can be deformed according to the temperature to lower the rod to obtain less gas flow.

Abstract: A flow rate control valve includes a second substrate having a flexible thin film and interposed between a first substrate having a heating mechanism and a third substrate having a sealing section. The first substrate and the second substrate close an internal space formed adjacent to the heating mechanism and filled with an expandable material. The sealing section and the flexible thin film function together as a valve. The heating mechanism heats and expands the expandable material whose pressure is detected by pressure-detecting sensors. The detected pressure value is fed back to a control mechanism of the heating mechanism for opening/closing a fluid flow passage and controlling the valve opening degree.

Abstract: A valve can varied in operating pressure and stopped in opening and closing by an efficiently movable actuator due to feeding of electric power without malfunction due to disturbance of magnetism, impact or temperature. A variable pressure valve is provided with a shape memory alloy spring. The shape memory alloy spring is raised in temperature and varied in length by a secondary coil that is electromagnetically given power from a primary coil of a control probe. When the shape memory alloy spring varies in length, a feed ratchet performs linear movement to rotate a cam wheel. The cam wheel has a cam with which an urge spring and a rectifying lever at its one end is engaged. The urge spring and rectifying lever at their other ends engage a ball valve to vary an urge force on the ball valve due to rotation of the cam wheel.

Abstract: A valve for the control of fluid flow in microsize systems, such as for transfer of small samples of blood for processing. An actuator beam comprised of a microribbon formed of a shape memory alloy is in a normally closed position where inlet and outlet ports of the valve are closed. In this position a compliant member presses against and holds the microribbon, together with a compliant tape carried below the microribbon, against the ports. The valve is actuated by heating the alloy through its crystalline phase change transition temperature. The resulting change of the microribbon to its memory shape moves the microribbon and tape away from the ports, enabling fluid flow through between the ports in a valve-open mode. The microribbon and tape are held in the valve-open mode when the alloy cools below the transition temperature by a force applied from a heat-shrinkable layer carried on the upper side of the microribbon.

Abstract: A proportional flow control valve having at least one pinch jaw that is movable between open and closed positions for engaging a fluid flow line passing through the valve. The valve includes a valve actuator generally formed from a shape memory alloy that engages and moves at least one movable pinch jaw. As an electrical current is applied to the shape memory alloy, the shape memory alloy exerts a moving force on the pinch jaw so as to move the pinch jaw into or out of engagement with a flow tube for controlling the opening and closing of the valve.

Abstract: The invention relates to a control element for media, for instance, a pneumatic valve or a hydraulic valve, comprising a valve body in which one or several channels are arranged, at least one moving element arranged in a channel and means for carrying out a relative movement of and/or deforming the moving element. The means are directly arranged on and/or directly act upon the moving element.

Abstract: A microfluidic device adapted for use with a power source is disclosed. The device includes a substrate and a heater member. The substrate and heater member form a first portion. A second portion is formed adjacent to the first portion. The second portion includes a high activating power polymer portion, at least one resin layer and a shield member. The second portion is selectively shaped to form a thermal expansion portion. A diaphragm member encapsulates the thermal expansion portion so that when power is applied to the heater portion, the high activating power polymer expands against the diaphragm member, causing the diaphragm member to deflect. This device is adapted for use as a microactuator or a blocking microvalve.

Abstract: The present invention provides a hybrid material and a method for forming a hybrid material comprising actuator made from a stimuli responsive polymer mounted in a porous framework. The present invention also provides devices employing the actuator of the present invention.

Abstract: An SMA actuated miniature latching valve for on and off control of fluid flow. A valve closure includes a poppet for opening and closing the fluid flow path. The poppet is operated responsive to an actuator mechanism which has SMA wires arranged to be actuated by electric resistant heating. Actuation causes different ones of the wires to contract and pull the poppet either toward or away from a valve seat. A latching mechanism comprising a conical spring operates between two bistable positions which hold the poppet either fully open or fully closed without further application of power to the actuators. A method of forming a secure mechanical and electrical connection between an SMA wire end and its support includes the steps of swaging a metal cone between a cone-shaped hole in the support and the wire end.

Abstract: A variable pressure valve apparatus has a case having a fluid inlet port and a fluid discharge port, a valve element for closing the fluid inlet port, a spring member disposed in the case for biasing the valve element to close the fluid inlet port, and a cam wheel for undergoing rotation to deform the spring member and thereby vary a biasing force applied to the valve element by the spring member. A feed ratchet is disposed in the case for undergoing movement to rotate the cam wheel. A shape memory alloy or a piezoelectric element undergoes extension movement to move the feed ratchet to thereby rotate the cam wheel to deform the spring member.

Abstract: An electrically controlled fluid control valve comprises an electrical position controller governed by a signal proportional to the position of a movable element of the valve to regulate current to a shape memory alloy (SMA) valve actuator to position the movable element to a desired position. The control valve may also include a temperature controller governed by a signal provided by a temperature-sensing element in proximity to the valve actuator to activate a cooling device for reducing the surrounding temperature. A digital selector switch may be used for generating a digital code of a selected heating rate which may govern the electrical controller to regulate current to the SMA drive element. The electrical controller may also be governed by both position measurement and a temperature signals to regulate current to the SMA valve actuator and to control the cooling device to position the movable element to a desired position.

Abstract: An actuator for a device such as a tappet of a valve. The actuator having a thermostatic operating element electrically heated by an electrical heating element, and including an operating piston. A proportional piston stroke regulator detects and controls the position of the operating piston. The proportional piston stroke regulator includes a piston travel detection device, that detects the actual position of the operating piston, connected to a conventional closed-loop controller which compares the measured piston position to a predetermined piston control position entered into the closed-loop controller. Based on the comparison, the closed-loop controller regulates the electrical supply to the electrical heating element.

Abstract: An actuator for controlling the flow of a fluid stream through a valve comprising a shape memory alloy element that positions a valve element to a first position when said SMA element is in an ambient temperature state and a second position when said SMA element is in an elevated temperature state, and a flow plate situated in the fluid stream in a position upstream of the SMA element and having a through-hole pattern to increase the velocity of fluid around the SMA element while it is in its elevated temperature state so as to cool the SMA element by fluid controlled by said valve and return the SMA element to its ambient temperature state.

Abstract: A fluid mass flow control apparatus, particularly adapted for use in controlling fluid flow to semiconductor fabrication processes, comprises a tubular body part having inlet and outlet fittings and a bore extending therethrough and supporting a valve seat in the bore. A closure member is connected to an arm which extends laterally through a tubular spigot portion of the body part. The body part has a reduced thickness wall at the spigot portion to allow elastic deflection of the wall and movement of the arm to control the position of the closure member. An elongated tube or rod actuator on which a resistance heating coil is supported is operably connected to a control system for heating the actuator to move the arm to control flow of fluid through the apparatus. A flow restrictor is mounted upstream of the valve seat and a mass flow sensor is in communication with the passage to provide a mass flow rate signal to the control system.

Abstract: An electrostrictive micro-valve is provided for modulating a fluid flow through a cannula or other narrow liquid conduit. The micro-valve includes a valve body having a passageway for conducting a flow of fluid, a valve element formed from a piece of viscoelastic material and disposed in the passageway, and a control assembly coupled to the viscoelastic material for electrostatically controlling the shape of the material to open or close the passageway. The valve element has a flat lower side connected to an inner wall of the passage of the valve body, and an upper side which faces an opposing wall within the passageway. The control assembly includes a pair of electrodes disposed over the upper and lower sides of the valve element. The electrode facing the lower side of the element is patterned so that localized electrostatic forces are generated across the viscoelastic material when a voltage is applied across both electrodes.

Abstract: A valve for automatically modulating a flow of fluid. The valve includes a flexible flow adjustment member having a variable diameter passage therethrough and an outer surface and a shell surrounding at least a portion of the outer surface and creating a void between the shell and the outer surface. The shell is in contact with the flow of fluid. The valve further includes a thermally reactive material that expands when heated and contracts when cooled. The thermally reactive material is within the void and is in contact with the outer surface of the flexible flow adjustment member. The thermally reactive material exerts pressure on the flexible flow adjustment member in response to a heating of the thermally reactive material to cause the variable diameter passage to close and to relieve pressure thereon in response to a cooling of the thermally reactive material to permit the variable diameter passage to open.

Abstract: An improved housing for a thermostatic valve has a nonconducting cover that features a projection into the interior of the valve housing. Mounted on the projection is a thermostatic operating element, which operates to control the valve when wax inside the thermostatic operating element is heated. A pair of electrical leads, connectable to an exterior power source, are embedded within the cover, extending through the projection and connecting to a heating element within the thermostatic operating element. When electrical current is applied to the heating element through the embedded electrical leads, the wax is heated, thereby expanding, driving a work piston of the thermostatic operating element, and opening the valve.

Abstract: An improved snap action valve construction is disclosed in which a compensator blade has deflection resisting ribs positioned along a weld line defined between an active blade and the compensator blade. Additionally, the compensator blade may have a recessed tab for securing a spring between the compensator blade and a snap blade. In one embodiment, the snap blade includes one or more longitudinal recesses to increase the deflection of the snap blade in the area of the recesses. In another embodiment, the snap blade has an arc-shaped rib surrounding a portion of a valve member opening. The arc-shaped rib resists flexing of the snap blade in the area of the opening.

Abstract: A microelectromechanical (MEMS) device is provided that includes a microelectronic substrate and a thermally actuated microactuator and associated components disposed on the substrate and formed as a unitary structure from a single crystalline material, wherein the associated components are actuated by the microactuator upon thermal actuation thereof. For example, the MEMS device may be a valve. As such, the valve may include at least one valve plate that is controllably brought into engagement with at least one valve opening in the microelectronic substrate by selective actuation of the microactuator. While the MEMS device can include various microactuators, the microactuator advantageously includes a pair of spaced apart supports disposed on the substrate and at least one arched beam extending therebetween.

Abstract: A microfluidic valve for controlling the flow of a material through a microfluidic channel comprising: a) a microfluidic channel comprising a passageway, b) a heater in contact with at least a portion of the microfluidic channel, c) a carrier fluid comprising the material and an amount of thermally-responsive material so that the carrier fluid can be thickened by heat from the heater to cause a reduction in flow of the carrier fluid through the microfluidic channel.

Abstract: An improved microvalve device is configured to provide a more robust and durable operation to withstand the demands of various operating environments. The microvalve may comprise a valve seat and a diaphragm, with the diaphragm operated by an external actuator device, such as a bladder, through various mechanisms of actuation, such as direct and indirect mechanisms, that are separate from the microvalve. Through use of the various mechanisms of actuation, the actuator device is configured to apply forces on the diaphragm to suitably move the diaphragm to open and close the microvalve. The valve seat and diaphragm can be configured to provide the microvalve with a plurality of openings configured to permit flow thereinbetween. In addition, the microvalve may be configured to facilitate uni-directional or bi-directional flow.

Abstract: A dynamic alloy wire valve for a multimedia linked scent delivery system consists of a hollow body with one flapper valve inlet which comes directly from a compressor and multiple flapper outlets, each of which feeds a separate fragrance air inlet. Inside the hollow body there is gang of flapper valves, which are arranged radially around a center spindle. At the other end of the flapper valve is valve tip, which fits snugly into a flapper valve seat. The flat metal leaf that forms the body of this flapper valve has an inherent spring tension much like a leaf spring. This spring tension normally keeps the valve tip pressed snugly against the valve seat, in the normally closed position. On the other side of the valve tip, there is attached a valve opener made from a dynamic alloy wire.

Abstract: A valve for automatically modulating a flow of a stream of fluid, the valve including a housing having a wall defining an interior cavity. The interior cavity is in fluid communication with the stream of fluid. A modulator is mounted within the interior cavity and includes a shell in fluid communication with the stream of fluid and a flexible flow adjustment member within the shell. The flexible flow adjustment member has a variable diameter passage therethrough which is also in fluid communication with the stream of fluid. A circumferential void is located between the flexible flow adjustment member and the shell and a thermally reactive material is within the void and in contact with the shell for thermal communication therebetween. A tool is used to assemble the valve. The tool includes a base plate, and a receiver adjacent to the base plate. The receiver has an internal passage therethrough for receiving a segmented cone having at least one radial cut therethrough.

Abstract: The present invention discloses and teaches a unique, remote optically controlled micro actuator particularly suitable for aerospace vehicle applications wherein hot gas, or in the alternative optical energy, is employed as the medium by which shape memory alloy elements are activated. In gas turbine powered aircraft the source of the hot gas may be the turbine engine compressor or turbine sections.

Abstract: A drainage control device for washing machines is disclosed. This device controls the drain port, provided at the bottom of a washing tub, thus draining water from the washing tub in accordance with an operational mode of a washing machine. This drainage control device includes a first drive means containing a working fluid and operated in response to a change in volume of the working fluid, and a second drive means connected to the first drive means and controlling inflow and outflow of the working fluid relative to the first drive means. The first drive means comprises a first cylinder containing the working fluid, a first piston reciprocating within the first cylinder, a heating means used for heating the first piston, and an actuation rod operated in conjunction with both the first piston and the heating means to open or close the drain port.

Abstract: A precision controller of the movement of at least a first fluid, includes a precision motor. Valve apparatus is operably coupled to the precision motor. Orifice apparatus is fluidly coupled to a source of fluid and to the valve apparatus, whereby actuation of the valve apparatus by the precision motor acts to selectively expose and cover the orifice to implement fluid valving.

Abstract: A shape memory alloy actuator assembly for a fuel injector, having a small package integral design, wherein the response times of the shape memory alloy element is decreased to less than about 1 millisecond by forced, convective heat transfer from the SMA element or elements. The forced, convective heat transfer is provided by the circulation of fluid across the SMA element by a metering orifice plate, which directs a fluid flow across the SMA element so as to maximize the area of contact between the fuel and the SMA element, regardless of whether the fuel injection valve is opened or closed. Use of forced convective heat transfer in accordance with the present invention allows greater power input levels than previously possible without resulting in an over-temperature condition of the SMA alloy, as well as constant response times.

Abstract: The present invention provides an apparatus having at least one pair of opposing surfaces formed on a support structure for movement relative to one another and an actuator operably engaging the support structure for driving the at least one pair of opposing surfaces relative to one another in response to an electrical activation of the actuator. Preferably, the actuator is a piezoelectric device. The apparatus can be adapted for clamping and/or valving applications.

Abstract: A Micro-Electro Mechanical device includes a movable mechanical structure and a bias mechanism. A bubble confinement region is defined by at least a portion of the movable mechanical structure. A bubble generation mechanism produces a bubble within the bubble confinement region. The bubble displaces the movable structure and alters the configuration of the bias mechanism, thereby producing useful work.

Abstract: A proportional flow control valve having at least one pinch jaw that is movable between open and closed positions for engaging a fluid flow line passing through the valve. The valve includes a valve actuator generally formed from a shape memory alloy that engages and moves at least one movable pinch jaw. As an electrical current is applied to the shape memory alloy, the shape memory alloy exerts a moving force on the pinch jaw so as to move the pinch jaw into or out of engagement with a flow tube for controlling the opening and closing of the valve.