Heat Supply Or Removal Control Patents (Class 261/130)
  • Publication number: 20090315197
    Abstract: A constant temperature gas/liquid mixture generating system for using in wafer drying process includes: an interior tank; a first liquid supplying device for supplying liquid IPA to the interior tank; a gas supplying device for supplying nitrogen to the interior tank; an exhausting device for exhausting IPA and nitrogen mixture from said constant temperature gas/liquid mixture generating system; an exterior tank, surrounding the interior tank; a second liquid supplying device for supplying a second liquid to the exterior tank; a temperature control device for controlling the second liquid to be within a desired temperature range; and a draining device for draining the second liquid out of the exterior tank.
    Type: Application
    Filed: June 11, 2009
    Publication date: December 24, 2009
    Inventors: Hung-Liang Hsieh, Pen-Hsieh Hsu, Chuan-Chang Feng, Mao-Lin Liu
  • Publication number: 20090283923
    Abstract: A humidifier system comprising a housing having a reservoir extending therethrough for passage of liquid through the humidifier system. Liquid from a liquid receptacle is transferred to the reservoir in the housing. The flow rate of the liquid can be controlled so as to adjust the water rate within the reservoir. The housing provides at least one opening defined therein separately positioned within the housing from the reservoir but accessible thereto, and an electric heating element is inserted therein, the heating element projecting into the reservoir whereby the heating element is in direct contact with the liquid to heat it. The heating element is supplied with electrical power from a power source for enabling the heating element to heat the liquid and create steam within the housing. A safety switch is also provided, in association with the interior of the housing, wherein the safety switch is adapted to turn the heating element off when a temperature of the element exceeds a pre-determined level.
    Type: Application
    Filed: May 14, 2008
    Publication date: November 19, 2009
    Inventor: Ray King
  • Publication number: 20090285954
    Abstract: For producing an aerated confectionery mass, a raw confectionery mass is fed at a feed rate from a supply to an aeration unit for introducing gas into the confectionery mass and wherein the aerated confectionery mass is fed to a production line for the production of confectionery or tablets. The feed rate of the raw confectionery mass is controlled such that it corresponds to the demand of the production line, the amount of introduced gas is controlled in response to the feed rate of the confectionery mass so that the aeration level of the confectionery mass remains substantially constant and the temperature of the aeration mass within the aeration unit is controlled such that it remains substantially constant and independent from the feed rate.
    Type: Application
    Filed: December 19, 2005
    Publication date: November 19, 2009
    Inventors: Stephan Simbuerger, Stephen Malcolm Pearson, Egidius Bizys
  • Patent number: 7618027
    Abstract: A vaporizing device is provided for control, delivery, and purification of low vapor pressure gases in conjunction with carrier gas in micro-electronics and other critical applications.
    Type: Grant
    Filed: August 26, 2008
    Date of Patent: November 17, 2009
    Assignee: Rasirc
    Inventor: Jeffrey J. Spiegelman
  • Publication number: 20090224414
    Abstract: In the evaporative humidifier of the present invention, a desired humidity is obtained by supplying water only to a humidifying module required for humidification. Air simply passes through a humidifying module to which water is not supplied. Accordingly, air obtained by mixing humidified air passing through the humidifying module which is wet with water being supplied thereto (wet zone) and non-humidified air passing through the humidifying module to which water is not supplied (dry zone) is blown out from an outlet of the evaporative humidifier. The mixture amount (mixture ratio) is controlled by the opening and closing of the valve, so that a desired humidity is obtained. Therefore, with the evaporative humidifier of the present invention, humidity control can be accurately performed without unnecessarily operating the humidifying device and without wasting energy.
    Type: Application
    Filed: March 2, 2009
    Publication date: September 10, 2009
    Applicant: HITACHI PLANT TECHNOLOGIES, LTD.
    Inventors: Akira YOKOYAMA, Koji SUZUKI, Kosei KAWASAKI
  • Patent number: 7563360
    Abstract: A top temperature T1 of a distillation tower 1 is held below a liquefying temperature of a light fraction by returning a part of an exhaust gas W, which is cooled by a condenser 5, to the upper zone of the distillation tower 1. A bottom temperature T2 is raised up to 300° C. at highest by returning a part of a liquid product P from a re-boiler 3 to a lower zone of the distillation tower 1. When a liquid hydrocarbon L comes in countercurrent contact with a stripping gas G inside the distillation tower 1 with the temperature profile that an inner temperature gradually falls down along an upward direction, mercury is efficiently transferred from the liquid L to a vapor phase without effusion of the light fraction in accompaniment with the exhaust gas W.
    Type: Grant
    Filed: January 26, 2005
    Date of Patent: July 21, 2009
    Assignee: Japan Petroleum Exploration Co., Ltd.
    Inventors: Yoshiyuki Yamaguchi, Senichiro Kaku, Kazutoshi Chaki
  • Patent number: 7494114
    Abstract: A system and method for producing a controlled blend of two or more fluids. Thermally-induced permeation through a permeable tube is used to mix a first fluid from outside the tube with a second fluid flowing through the tube. Mixture ratios may be controlled by adjusting the temperature of the first fluid or by adjusting the pressure drop through the permeable tube. The combination of a back pressure control valve and a differential regulator is used to control the output pressure of the blended fluid. The combination of the back pressure control valve and differential regulator provides superior flow control of the second dry gas. A valve manifold system may be used to mix multiple fluids, and to adjust the volume of blended fluid produced, and to further modify the mixture ratio.
    Type: Grant
    Filed: September 28, 2005
    Date of Patent: February 24, 2009
    Assignee: Babcock & Wilcox Technical Services Y-12, LLC
    Inventor: Russell Louis Hallman, Jr.
  • Publication number: 20090014901
    Abstract: A vaporizing device is provided for control, delivery, and purification of low vapor pressure gases in conjunction with carrier gas in micro-electronics and other critical applications.
    Type: Application
    Filed: August 26, 2008
    Publication date: January 15, 2009
    Applicant: RASIRC
    Inventor: Jeffrey J. Spiegelman
  • Patent number: 7422198
    Abstract: In a liquid substance supply device, a three port two valve directional control valve is provided in a transfer line, and a substance container and the transfer line are connected together by a four port three valve directional control valve in such a way that the four port three valve directional control valve and the substance container can be removed from the transfer line as a unit. Furthermore, in a vaporizer, an orifice member is provided to surround the end portion of an internal conduit in which flows a mixture substance consisting of a gas and a liquid substance mixed therewith, and gas for atomization is spouted into a vaporization chamber through a gap defined between the internal conduit and the orifice member. Yet further, the temperature of a vaporization surface in the vaporization chamber can be controlled independently in correspondence with the nature of the liquid substance.
    Type: Grant
    Filed: November 27, 2006
    Date of Patent: September 9, 2008
    Assignees: Shimadzu Corporation, Mitsubishi Denki Kabushiki Kaisha
    Inventors: Naoki Yoshioka, Tatsushi Kawamoto, Mitsushi Kawao, Shigeru Matsuno, Akira Yamada, Shoji Miyashita, Fusaoki Uchikawa
  • Publication number: 20080206362
    Abstract: In order to provide a device and a method for increasing blood flow and an insulin-like growth factor with use of a large amount of carbonic gas nano bubbles, the device of the present invention includes: a bathtub 1; and a nano bubble-producing section 41 for producing carbonic gas nano bubbles in bath water in the bathtub 1.
    Type: Application
    Filed: February 22, 2008
    Publication date: August 28, 2008
    Inventors: Kazuyuki YAMASAKI, Takahide Miyamoto, Kazumi Chuhjoh, Masaki Kataoka
  • Publication number: 20080190426
    Abstract: A respiration moistener (1) has an inlet (3), into which incoming gas (2) to be moistened can be fed. Vapor (21) is mixed with the incoming gas (2) in a mixing chamber (4). Moistened outgoing gas (5) flows out of an outlet (6). In cases in which the temperature of the incoming gas (2) becomes so high that the temperature of the outgoing gas (5) is above a desired value, the internal desired value is adjusted. The outgoing gas (5) can then cool to the desired value on its way through the inspiration tube (7).
    Type: Application
    Filed: January 2, 2008
    Publication date: August 14, 2008
    Applicant: Dräger Medical AG & Co. KG
    Inventor: Jochim Koch
  • Patent number: 7389813
    Abstract: The present invention provides systems and methods of controlling local environment. In one embodiment, incoming air enters a contactor such the Direct Contact Cooler-Condenser (DCCC) where the air contacts water distributed on the contact media. After passing through the DCCC, the air is saturated at a temperature equal or close to that of the water. Depending on the state of the incoming air, in the DCCC will be humidified or dehumidified to yield saturated air at the desired humidity ratio. In one embodiment, a blower draws air through the DCCC and blows into the heater. The heater heats the air to the desired dry-bulb temperature. Before exiting, the air may pass through a filter.
    Type: Grant
    Filed: August 23, 2005
    Date of Patent: June 24, 2008
    Assignee: ASML Holding N.V.
    Inventors: Dikran S. Babikian, Bryan H. Wade
  • Patent number: 7364139
    Abstract: A carburetor having a throttle valve in the form of a disc which can be rotated to control flow of an air/fuel mixture through a duct, the throttle disc having a heating element and a temperature sensor formed on at least one surface of said throttle disc; and an electric power supply, the electric power supply being controlled by the temperature sensor, to maintain the temperature of the throttle disc above a predetermined minimum temperature.
    Type: Grant
    Filed: April 21, 2006
    Date of Patent: April 29, 2008
    Inventor: Bernard Bollons
  • Patent number: 7306205
    Abstract: Breathing assistance apparatus including humidifier (4) and heated conduit (6) adapted to deliver humidified gases at desired and accurate level of humidity to patient. Humidifier includes controller (18) that delivers flow rate, temperature and humidity of gases and then determines required power input to deliver gases as required. Need for external sensors is dispensed with providing simple and less bulky apparatus.
    Type: Grant
    Filed: August 29, 2003
    Date of Patent: December 11, 2007
    Assignee: Fisher & Paykel Healthcare Limited
    Inventors: Brett John Huddart, Scott Robert Mackie, Craig Karl White
  • Publication number: 20070257386
    Abstract: A steam humidifier provided by the present invention has a tank having a reservoir section and a cover removably and sealingly secured thereto. The tank contains water during a humidifying operation in which the humidifier humidifies an indoor environment. The cover has a heating element mounted thereon and extending therefrom into the reservoir section and a steam outlet assembly mounted thereon and extending therethrough into the tank. The heating element evaporates at least a portion of the water during the humidifying operation into steam output through the steam outlet assembly to humidify the indoor environment.
    Type: Application
    Filed: May 2, 2007
    Publication date: November 8, 2007
    Inventor: Cherif Menassa
  • Patent number: 7261150
    Abstract: A method for humidifying and controlling the temperature of a process gas stream comprising the steps of super-saturating and heating the process gas stream with steam until it reaches a first pre-set temperature; cooling the process gas stream until it reaches a second pre-set temperature; removing excess condensed water from the process gas stream; and heating the process gas stream until it reaches a third pre-set temperature. An apparatus for implementing this method is also disclosed.
    Type: Grant
    Filed: February 28, 2002
    Date of Patent: August 28, 2007
    Assignee: Hydrogenics Corporation
    Inventors: Joe Cargnelli, Ravi B. Gopal
  • Patent number: 7125007
    Abstract: A control system for adjusting the desired air pressure provided to one or more spray nozzles disposed to receive liquid and compressed air adjusts the amount of compressed air supplied to the spray nozzle based on various sensed operating parameters of the system.
    Type: Grant
    Filed: June 25, 2003
    Date of Patent: October 24, 2006
    Assignee: Spraying Systems Co.
    Inventor: Lieven Wulteputte
  • Patent number: 7051801
    Abstract: A method for humidifying and controlling the temperature of a process gas stream comprising the steps of super-saturating and heating the process gas stream with steam until it reaches a first pre-set temperature; cooling the process gas stream until it reaches a second pre-set temperature; removing excess condensed water from the process gas stream; and heating the process gas stream until it reaches a third pre-set temperature. An apparatus for implementing this method is also disclosed.
    Type: Grant
    Filed: July 28, 2000
    Date of Patent: May 30, 2006
    Assignee: Hydrogenics Corporation
    Inventors: Joe Cargnelli, Ravi B. Gopal
  • Patent number: 6997185
    Abstract: An adjustable air conditioning and regulation apparatus for human respiratory system includes an air treatment assembly and a host controlling assembly. The air treatment assembly has an air filter, a humidity control, a heating device for temperature control and a pressure control. The air filter removes the particles and smells from the air. The clean air is regulated by the controls that maintain the clean air at a desired level of temperature, pressure and humidity. The apparatus provides clean, fresh and comfortable air for the patients with compromised respiratory system.
    Type: Grant
    Filed: December 17, 2003
    Date of Patent: February 14, 2006
    Inventors: Tai-Kang Han, Hua Ting
  • Patent number: 6988717
    Abstract: A method and system of near saturation gas humidification by mixing a steam and a gas flow is disclosed. The steam is generated with a heating device at a controlled rate from a liquid contained in a vessel near the point of use of the humidified gas. The controlled rate results from a feedback loop that controllably heats the liquid while measuring the steam temperature and maintaining it around a set point. The humidification delivery rate is adjustable by adjusting the temperature set point and/or the gas pressure. Undesirable components from the humidified gas are removed with an in-line filter after its point of generation. Condensation from the humidified gas before its point of use is removed with a drain pipe in combination with a drain valve triggered by a condensation level sensor.
    Type: Grant
    Filed: December 15, 2003
    Date of Patent: January 24, 2006
    Assignee: Chemflow Systems, Inc.
    Inventor: Leon Han
  • Patent number: 6966364
    Abstract: The present invention provides systems and methods of controlling local environment. In one embodiment, incoming air enters a contactor such the Direct Contact Cooler-Condenser (DCCC) where the air contacts water distributed on the contact media. After passing through the DCCC, the air is saturated at a temperature equal or close to that of the water. Depending on the state of the incoming air, in the DCCC will be humidified or dehumidified to yield saturated air at the desired humidity ratio. In one embodiment, a blower draws air through the DCCC and blows into the heater. The heater heats the air to the desired dry-bulb temperature. Before exiting, the air may pass through a filter.
    Type: Grant
    Filed: February 12, 1999
    Date of Patent: November 22, 2005
    Assignee: ASML Holding N.V.
    Inventors: Dikran S. Babikian, Bryan H. Wade
  • Patent number: 6874770
    Abstract: A high flow rate bubbler system and method are provided for producing a stable, easily controllable source of chemical vapors to a downstream process. The bubbler system is equipped with a vaporizer unit connected to its gas outlet tube. This vaporizer unit slows the gas velocity to enhance settling of entrained droplets and contacts the exiting gas with a high thermal mass, heated surfaces to promote heat transfer and evaporation of the entrained droplets.
    Type: Grant
    Filed: November 27, 2002
    Date of Patent: April 5, 2005
    Assignee: Aviza Technology, Inc.
    Inventor: Amir Torkaman
  • Patent number: 6863268
    Abstract: A method of humidifying gases to 100% relative humidity and a humidifier to carry out such a method are provided to humidify gases for fuel cells and for other applications. The humidification of gases is thermally controlled and thermal energy is managed to provide an efficient system. A pre-humidifier accommodates a wide range of flow rates of dry gas to initially humidify and pre-heat the gas, and a boiler provides steam to mix with the effluent from the pre-humidifier to humidify the gas to saturation. A thermal insulator between the boiler and bulk water and/or pre-humidifier enhances the steam generation from the boiler and prevents direct heating of water or gases by heat from the boiler. Above the boiler, bulk water, and pre-humidifier, a mixing chamber further functions as a condenser and water separator. The mixing chamber provides a space for mixing gases and steam and separates saturated gases from condensed water.
    Type: Grant
    Filed: May 2, 2003
    Date of Patent: March 8, 2005
    Inventor: Chaojiong Zhang
  • Patent number: 6841138
    Abstract: A system for reducing the temperature of exhaust gas in an incinerator or boiler equipment having an exceedingly small size and avoiding any difficulties caused by damage to the wall surface of a gas cooling chamber due to adherence of sprayed water droplets and deposition of dust. More specifically, pressurized thermal water with a temperature higher than a boiling point of water under atmospheric pressure is sprayed as temperature reduction water into high temperature exhaust gas Gh in a gas cooling chamber or an exhaust gas duct. The temperature reduction of exhaust gas and the removal of acidic gas in the exhaust gas are simultaneously achieved by spraying pressurized thermal water Wt containing an alkaline solution as temperature reduction water into high temperature exhaust gas Gh in the gas cooling chamber or the exhaust gas duct.
    Type: Grant
    Filed: January 14, 2004
    Date of Patent: January 11, 2005
    Assignee: Takuma Co., Ltd.
    Inventors: Masayuki Kumada, Keiji Mukai
  • Publication number: 20040253162
    Abstract: A system for reducing the temperature of exhaust gas in an incinerator or boiler equipment having an exceedingly small size and avoiding any difficulties caused by damage to the wall surface of a gas cooling chamber due to adherence of sprayed water droplets and deposition of dust. More specifically, pressurized thermal water with a temperature higher than a boiling point of water under atmospheric pressure is sprayed as temperature reduction water into high temperature exhaust gas Gh in a gas cooling chamber or an exhaust gas duct. The temperature reduction of exhaust gas and the removal of acidic gas in the exhaust gas are simultaneously achieved by spraying pressurized thermal water Wt containing an alkaline solution as temperature reduction water into high temperature exhaust gas Gh in the gas cooling chamber or the exhaust gas duct.
    Type: Application
    Filed: January 14, 2004
    Publication date: December 16, 2004
    Applicant: Takuma Co., Ltd.
    Inventors: Masayuki Kumada, Keiji Mukai
  • Patent number: 6796458
    Abstract: An air supply apparatus includes a buffer tank for receiving and storing ultra-pure water from an ultra-pure source, a temperature/humidity controller (THC) for conditioning the air using the ultra-pure water from the buffer tank, an ultra-pure water pipe for delivering the ultra-pure water from the ultra-pure source to the buffer tank, and an air pipe for delivering the air from the THC to semiconductor device fabricating equipment. A control mechanism, including at least one valve disposed in the piping of the apparatus, allows the apparatus to be selectively operated in a normal mode in which the ultra-pure water is allowed to flow from the ultra-pure water source to the THC via the buffer tank, and a cleaning mode in which the THC runs using ultra-pure water stored in the buffer tank while the ultra-pure water pipe is being cleaned.
    Type: Grant
    Filed: July 15, 2003
    Date of Patent: September 28, 2004
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Dug-Kyu Choi, Yong-Won Seo
  • Patent number: 6755398
    Abstract: A heated water mist therapy appliance generates temperature controlled therapeutic mist by applying ultrasonic vibration to temperature controlled (heated) water. The resulting heated water mist may be applied to the skin of the feet or diverted into a flexible conduit for application to other parts of the body. In some embodiments of the appliance, the user may control the temperature of the water used to make the mist, thereby controlling the temperature of the therapy. The user also controls the volume of water mist/air mixture by adjusting the speed of a fan. The appliance may include an ionizing electrode to enhance the ionic content of the water mist/air mixture.
    Type: Grant
    Filed: October 25, 2002
    Date of Patent: June 29, 2004
    Assignee: Raymond Electric (China) Ltd.
    Inventor: Ying Man John Wong
  • Patent number: 6733735
    Abstract: A system for reducing the temperature of exhaust gas in an incinerator or boiler equipment having an exceedingly small size and avoiding any difficulties caused by damage to the wall surface of a gas cooling chamber due to adherence of sprayed water droplets and deposition of dust. More specifically, pressurized thermal water with a temperature higher than a boiling point of water under atmospheric pressure is sprayed as temperature reduction water into high temperature exhaust gas Gh in a gas cooling chamber or an exhaust gas duct. The temperature reduction of exhaust gas and the removal of acidic gas in the exhaust gas are simultaneously achieved by spraying pressurized thermal water Wt containing an alkaline solution as temperature reduction water into high temperature exhaust gas Gh in the gas cooling chamber or the exhaust gas duct.
    Type: Grant
    Filed: November 22, 2002
    Date of Patent: May 11, 2004
    Assignee: Takuma Co., Ltd.
    Inventors: Masayuki Kumada, Keiji Mukai
  • Patent number: 6715743
    Abstract: A gas humidifier provides a continuous flow of gas through two stages of bubbling with an intermediate heating stage. Gas is introduced into an enclosure containing a quantity of bulk water by pumping the gas into a gas entry pipe or tube. The gas exits the gas entry pipe to bubble up through a bubbling evaporator. At the water surface of the bubbling evaporator, a heating element heats the gas-vapor mixture. The heated gas-vapor mixture then bubbles up through the bulk water, and the temperature of the bulk water determines the thermal cycles of the heating element. The gas-vapor mixture bubbles up through the bulk water, reaching saturation at the dew point. The saturated gas is then directed from the humidifier for use.
    Type: Grant
    Filed: April 9, 2002
    Date of Patent: April 6, 2004
    Inventor: Chaojiong Zhang
  • Patent number: 6712343
    Abstract: A system for reducing the temperature of exhaust gas in an incinerator or boiler equipment having an exceedingly small size and avoiding any difficulties caused by damage to the wall surface of a gas cooling chamber due to adherence of sprayed water droplets and deposition of dust. More specifically, pressurized thermal water with a temperature higher than a boiling point of water under atmospheric pressure is sprayed as temperature reduction water into high temperature exhaust gas Gh in a gas cooling chamber or an exhaust gas duct. The temperature reduction of exhaust gas and the removal of acidic gas in the exhaust gas are simultaneously achieved by spraying pressurized thermal water Wt containing an alkaline solution as temperature reduction water into high temperature exhaust gas Gh in the gas cooling chamber or the exhaust gas duct.
    Type: Grant
    Filed: November 22, 2002
    Date of Patent: March 30, 2004
    Assignee: Takuma Co., Ltd.
    Inventors: Masayuki Kumada, Keiji Mukai
  • Publication number: 20040041286
    Abstract: A method for supplying a source gas to a processing chamber for forming a film on a substrate in the processing chamber includes: heating a carrier gas; bubbling the heated carrier gas in a liquid source disposed in a container to form a vapor source; and supplying a source gas including the vapor source and the heated carrier gas into the processing chamber for forming the film.
    Type: Application
    Filed: May 8, 2003
    Publication date: March 4, 2004
    Inventors: Jai-Dong Lee, Ki-Hyun Hwang, Chang-Hyun Ko
  • Publication number: 20040020487
    Abstract: A breathing gas humidifier system for a patient includes a replaceable, closed water reservoir (1) with stable pressure, provided for receiving a water reserve for the breathing gas humidifier system. An intermediate storage unit (4) with water is closed from the environment and is located under the water reservoir. The water reservoir (1) and the intermediate storage unit (4) have a valve (16, 14) each, with one of the valves cooperating with the other valve, so that there is a flow connection between the water reservoir (1) and the intermediate storage unit (4) only when the water reservoir (1) is received in a connector (2) of the intermediate storage unit (4). The intermediate storage unit (4) is connected via a water connection line (5) located below the water level to a heated evaporator chamber (7), which opens above the water evaporating at the boiling point into the breathing gas line to a patient.
    Type: Application
    Filed: July 3, 2003
    Publication date: February 5, 2004
    Inventors: Jochim Koch, Marco Brombacher
  • Patent number: 6523811
    Abstract: A system for reducing the temperature of exhaust gas in an incinerator or boiler equipment having an exceedingly small size and avoiding any difficulties caused by damage to the wall surface of a gas cooling chamber due to adherence of sprayed water droplets and deposition of dust. More specifically, pressurized thermal water with a temperature higher than a boiling point of water under atmospheric pressure is sprayed as temperature reduction water into high temperature exhaust gas Gh in a gas cooling chamber or an exhaust gas duct. The temperature reduction of exhaust gas and the removal of acidic gas in the exhaust gas are simultaneously achieved by spraying pressurized thermal water Wt containing an alkaline solution as temperature reduction water into high temperature exhaust gas Gh in the gas cooling chamber or the exhaust gas duct.
    Type: Grant
    Filed: August 16, 2000
    Date of Patent: February 25, 2003
    Assignee: Takuma Co., Ltd.
    Inventors: Masayuki Kumada, Keiji Mukai
  • Patent number: 6446941
    Abstract: A forced air cooling tower includes an upright casing, and elevated water distribution system disposed in an upper portion of the casing and one or more fans for drawing air through the tower. The tower also includes a catch basin for collecting the cooled air and a pump for circulating the cooled water through a condenser and back to the top of the tower and to the water distribution system. The cooling tower also includes a controller and a variable frequency device for regulating the flow of air through the tower. A first temperature sensor senses the temperature T1 of the hot process water delivered to the water distribution system and a second sensor senses the dry bulb temperature of the air leaving the tower Tdbt2. A third sensor senses the temperature of the cooled water leaving the tower. The controller such as a computer and variable frequency drive controls the speed of the fan to minimize the difference in T1 and Tdbt2.
    Type: Grant
    Filed: October 11, 2000
    Date of Patent: September 10, 2002
    Assignee: Kuwait Institute for Scientific Research
    Inventors: Gopal P. Maheshwari, Eitidal Al-Bassam
  • Patent number: 6398196
    Abstract: A steam humidifier for use with a forced air heating system includes a steam nozzle mounted in the plenum of the heating system and connected to a water feed line connected to a continuous pressurized water source. The water feed line is made of a thermal conducting material and is coiled about a heating element wherein the heating element and conductive coil are substantially surrounded by an insulation barrier. The water feed line is controlled by a solenoid operated valve that will be activated only when the heater is on and a humidistat detects that humidity is required by the area being serviced by the forced hot air system.
    Type: Grant
    Filed: March 20, 2000
    Date of Patent: June 4, 2002
    Assignee: Allied Systems Research, Inc.
    Inventors: Barry D. Light, Timothy W. Roberts
  • Patent number: 6338474
    Abstract: In an air feeder for supplying air with a predetermined temperature and humidity into a cup in a resist coating unit provided in a coating and developing system, a cooling section, a by-pass, a heating section, a humidifying section, and a blower are provided. 55% of introduced air is cooled in the cooling section, 45% of the introduced air passes through the by-pass, and mixed air of the cooled air and the air from the by-pass is heated in the heating section and humidified in the humidifying section, thereby enabling energy-saving and space-saving temperature and humidity control.
    Type: Grant
    Filed: February 9, 2000
    Date of Patent: January 15, 2002
    Assignee: Tokyo Electron Limited
    Inventor: Norio Semba
  • Publication number: 20010042930
    Abstract: An auxiliary gasline-heating unit is used in a chemical vapor deposition apparatus. The auxiliary gasline-heating unit serves to increase the exit temperature of the mixture of N2 gas and He-dilute gas in order to prevent TDMAT, Ti[N(CH3)2]4, from being condensed and becoming a gasline contaminant when the mixture mixes with the TDMAT and a carrier gas.
    Type: Application
    Filed: July 20, 2001
    Publication date: November 22, 2001
    Inventors: Juen-Kuen Lin, Chien-Hsin Lai, Peng-Yih Peng, Fu-Yang Yu
  • Patent number: 6182951
    Abstract: A fluid transfer system includes a permeable fluid carrier, a constant temperature source of a first fluid, and a constant pressure source of a second fluid. The fluid carrier has a length, an inlet end, and an outlet end. The constant pressure source connects to the inlet end and communicates the second fluid into the fluid carrier, and the constant temperature source surrounds a least of portion of the length. A mixture of the first fluid and the second fluid exits via the outlet end A method of making a mixture of two fluids is also disclosed.
    Type: Grant
    Filed: September 10, 1998
    Date of Patent: February 6, 2001
    Assignee: Lockheed Martin Energy Systems, Inc.
    Inventors: Russell L. Hallman, Jr., James C. Truett
  • Patent number: 6135433
    Abstract: Provided are a system and method for saturating a gas with a vapor from a liquid chemical. The system includes: (a) a saturation vessel connected to receive a liquid chemical and a carrier gas; (b) a gas sparger in the saturation vessel for sparging the carrier gas into the liquid chemical; (c) means for maintaining the liquid chemical in the saturation vessel at a substantially constant level; (d) means for controlling the temperature of the liquid chemical in the saturation vessel to a desired value, comprising (I) a system for cooling the liquid chemical, and (ii) a heater inside the saturation vessel extending vertically in the liquid a distance at least half of the height of the liquid chemical level for heating the liquid chemical; and (e) means for controlling the pressure of the saturated gas to a desired value. The invention also relates to novel methods and systems for controlled delivery of a vaporized liquid chemical.
    Type: Grant
    Filed: February 18, 1999
    Date of Patent: October 24, 2000
    Assignee: Air Liquide America Corporation
    Inventor: Douglas B. Nurmi
  • Patent number: 6095505
    Abstract: An improved breathing gas humidifier including an evaporation module which has a contact chamber and a flash-resistant heat exchanger, a wicking layer on the heat exchanger, a liquid water flow controller, an electric resistance heater, and a breathing gas temperature controller. The contact chamber is defined by a rigid housing and in part by a flash-resistant heat exchanger. The rigid housing has a gas inlet for connection to a breathing gas source such as a ventilator, a water inlet for connection to a liquid water source by a liquid water flow passageway, and a breathing gas outlet connected to an inhalation passageway. The wicking layer is positioned in the contact chamber to receive and distribute liquid water. The breathing gas temperature controller is operably connected to the flow controller, the heater, and a temperature sensor in the breathing gas outlet.
    Type: Grant
    Filed: July 15, 1998
    Date of Patent: August 1, 2000
    Assignee: Pegasus Research Corporation
    Inventor: Kenneth G. Miller
  • Patent number: 5938984
    Abstract: A temperature regulating method of a humidifier regulates a temperature of water vapor ejected therefrom according to a surrounding temperature. A cool humidification mode is added to a humidification mode of the humidifier, and a temperature of a humidifying tub is detected upon being shifted into the cool humidification mode by a user. Thus, the detected temperature is compared with a temperature preset for performing the cool humidification mode to turn off the heater when the temperature of the humidifying tub is higher than the preset temperature and, turn on the heater otherwise, thereby regulating the temperature of the water vapor ejected from an ejecting slit of the humidifier according to the surrounding temperature thereof.
    Type: Grant
    Filed: March 31, 1997
    Date of Patent: August 17, 1999
    Assignee: Daewoo Electronics Co., Ltd.
    Inventor: Woong Jung
  • Patent number: 5803938
    Abstract: A liquid vaporizing apparatus includes a container for holding a liquid at a constant temperature with a temperature adjustment unit and a gas that does not react with the liquid is bubbled through the liquid in the container to vaporize the liquid. The container for holding the liquid has an internal space above the liquid and a second temperature adjustment unit for controlling the temperature of the internal space separately from the temperature of the liquid in the container. Since the internal space is maintained at a constant temperature, higher than the temperature of the liquid, the quantity of the vaporized liquid produced is stable.
    Type: Grant
    Filed: May 15, 1997
    Date of Patent: September 8, 1998
    Assignees: Mitsubishi Denki Kabushiki Kaisha, Ryoden Semiconductor System Engineering Corporation
    Inventors: Tooru Yamaguchi, Kouichirou Tsutahara, Takayuki Suenaga
  • Patent number: 5785902
    Abstract: A liquid vaporizing apparatus includes a container for holding a liquid at a constant temperature with a temperature adjustment unit and a gas that does not react with the liquid is bubbled through the liquid in the container to vaporize the liquid. The container for holding the liquid has an internal space above the liquid and a second temperature adjustment unit for controlling the temperature of the internal space separately from the temperature of the liquid in the container. Since the internal space is maintained at a constant temperature, higher than the temperature of the liquid, the quantity of the vaporized liquid produced is stable.
    Type: Grant
    Filed: May 5, 1997
    Date of Patent: July 28, 1998
    Assignees: Mitsubishi Denki Kabushiki Kaisha, Ryoden Semiconductor System Engineering Corporation
    Inventors: Tooru Yamaguchi, Kouichirou Tsutahara, Takayuki Suenaga
  • Patent number: 5769313
    Abstract: A method for controlling a heating of a heater in a heating-type humidifier in which both a heating amount and a heating ON/OFF period is controlled on the basis of a present room temperature, is disclosed. A sensed present humidity is compared with an objective humidity which is set by a user. When the present humidity is greater than or equal to the objective humidity, whether or not water exists in a water tank of the humidifier is determined. When the water does not exist in the water tank, an alarm is generated. When the water exists, a humidifying operation stops. When the present humidity is less than the objective humidity, the humidifying operation is executed while increasing both a heating amount and a heating ON period of the heater in proportion to the present room temperature. As a result, the arrival times at the states of objective humidity are shortened.
    Type: Grant
    Filed: February 28, 1997
    Date of Patent: June 23, 1998
    Assignee: Daewoo Electronics Co., Ltd.
    Inventor: Sang-Uk You
  • Patent number: 5741444
    Abstract: A humidor and method for high humidity, ambient temperature storage of items includes a water reservoir with a relatively large surface area which is gradually and uniformly heated in response to a humidity sensor. The temperature in the reservoir is raised at a rate of less than 1 degree Fahrenheit per 4 minutes to a maintained temperature of less than 5 degrees F. above ambient temperature until a desired humidity level is reached. The humidor enclosure includes convection heating elements which create a convection current between air inlets and outlets to draw fresh air into the humidor. A water level sensor in the water reservoir deactivates the reservoir heater and convection heating elements when the water level drops below a minimum level and simultaneously actives a water level low warning signal.
    Type: Grant
    Filed: September 11, 1996
    Date of Patent: April 21, 1998
    Assignee: Humicon Corporation
    Inventor: Richard A. Kasuli
  • Patent number: 5693189
    Abstract: The mixed gas of a liquid raw material is stably supplied to not only one reactor but also a plurality of reactors as maintained with high purity at a fixed concentration.
    Type: Grant
    Filed: July 28, 1995
    Date of Patent: December 2, 1997
    Assignee: Shin-Etsu Handotai Co., Ltd.
    Inventors: Kyoji Oguro, Yasushi Kurosawa
  • Patent number: 5662838
    Abstract: A liquid vaporizing apparatus includes a container for holding a liquid at a constant temperature with a temperature adjustment unit and a gas that does not react with the liquid is bubbled through the liquid in the container to vaporize the liquid. The container for holding the liquid has an internal space above the liquid and a second temperature adjustment unit for controlling the temperature of the internal space separately from the temperature of the liquid in the container. Since the internal space is maintained at a constant temperature, higher than the temperature of the liquid, the quantity of the vaporized liquid produced is stable.
    Type: Grant
    Filed: January 26, 1996
    Date of Patent: September 2, 1997
    Assignees: Mitsubishi Denki Kabushiki Kaisha, Ryoden Semiconductor System Engineering Corporation
    Inventors: Tooru Yamaguchi, Kouichirou Tsutahara, Takayuki Suenaga
  • Patent number: 5620503
    Abstract: A humidifier system includes a spray apparatus in a housing which sprays a mist of water droplets onto a mist eliminator to intercept the mist of water droplets. The mist of droplets is captured in a liquid phase by the mist eliminator and is substantially completely converted into a vapor phase in the form of increased humidity in the air stream. A humidity sensor located downstream of the mist eliminator senses the humidity of the stream of air. A controller controls the quantity of water sprayed in response to the humidity sensed to maintain a predetermined humidity in the humidified stream of air. A second humidifier includes a heater which creates a region of intense heat to instantaneously evaporate water mist directed thereon in a stream of air. In a third embodiment, water and pressurized air are simultaneously injected into a region of intense heat.
    Type: Grant
    Filed: July 29, 1996
    Date of Patent: April 15, 1997
    Assignee: Tom Miller, Inc.
    Inventors: Thomas L. Miller, Joseph M. Maceri
  • Patent number: 5558084
    Abstract: A humidifier having an ambient temperature sensor for sensing the temperature of the ambient air in the environment in which the humidifier is located. A difference temperature selector is provided to allow a user to select a difference temperature which is the difference in temperature between the sensed ambient temperature and a comfortable and efficient temperature for supply of the humidified gases provided by the humidifier to a patient or user. The humidifier controls the temperature of the humidified gases it provides to the patient to the selected difference temperature above the sensed ambient temperature, so that any change in the sensed ambient temperature results in a corresponding change in the temperature of humidified gases supplied to the patient or user. This construction prevents or minimises the condensation which occurs at low ambient temperatures in the gases supply conduit provided between the humidifier and the patient or user.
    Type: Grant
    Filed: October 2, 1992
    Date of Patent: September 24, 1996
    Assignee: Fisher & Paykel Limited
    Inventors: Michael G. Daniell, Andrew B. Clark
  • Patent number: 5520858
    Abstract: A liquid vaporizing apparatus includes a container for holding a liquid at a constant temperature with a temperature adjustment unit and a gas that does not react with the liquid is bubbled through the liquid in the container to vaporize the liquid. The container for holding the liquid has an internal space above the liquid and a second temperature adjustment unit for controlling the temperature of the internal space separately from the temperature of the liquid in the container. Since the internal space is maintained at a constant temperature, higher than the temperature of the liquid, the quantity of the vaporized liquid produced is stable.
    Type: Grant
    Filed: July 25, 1994
    Date of Patent: May 28, 1996
    Assignees: Mitsubishi Denki Kabushiki Kaisha, Ryoden Semiconductor System Engineering Corporation
    Inventors: Tooru Yamaguchi, Kouichirou Tsutahara, Takayuki Suenaga