Heat Supply Or Removal Control Patents (Class 261/130)
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Publication number: 20090315197Abstract: A constant temperature gas/liquid mixture generating system for using in wafer drying process includes: an interior tank; a first liquid supplying device for supplying liquid IPA to the interior tank; a gas supplying device for supplying nitrogen to the interior tank; an exhausting device for exhausting IPA and nitrogen mixture from said constant temperature gas/liquid mixture generating system; an exterior tank, surrounding the interior tank; a second liquid supplying device for supplying a second liquid to the exterior tank; a temperature control device for controlling the second liquid to be within a desired temperature range; and a draining device for draining the second liquid out of the exterior tank.Type: ApplicationFiled: June 11, 2009Publication date: December 24, 2009Inventors: Hung-Liang Hsieh, Pen-Hsieh Hsu, Chuan-Chang Feng, Mao-Lin Liu
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Publication number: 20090283923Abstract: A humidifier system comprising a housing having a reservoir extending therethrough for passage of liquid through the humidifier system. Liquid from a liquid receptacle is transferred to the reservoir in the housing. The flow rate of the liquid can be controlled so as to adjust the water rate within the reservoir. The housing provides at least one opening defined therein separately positioned within the housing from the reservoir but accessible thereto, and an electric heating element is inserted therein, the heating element projecting into the reservoir whereby the heating element is in direct contact with the liquid to heat it. The heating element is supplied with electrical power from a power source for enabling the heating element to heat the liquid and create steam within the housing. A safety switch is also provided, in association with the interior of the housing, wherein the safety switch is adapted to turn the heating element off when a temperature of the element exceeds a pre-determined level.Type: ApplicationFiled: May 14, 2008Publication date: November 19, 2009Inventor: Ray King
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Publication number: 20090285954Abstract: For producing an aerated confectionery mass, a raw confectionery mass is fed at a feed rate from a supply to an aeration unit for introducing gas into the confectionery mass and wherein the aerated confectionery mass is fed to a production line for the production of confectionery or tablets. The feed rate of the raw confectionery mass is controlled such that it corresponds to the demand of the production line, the amount of introduced gas is controlled in response to the feed rate of the confectionery mass so that the aeration level of the confectionery mass remains substantially constant and the temperature of the aeration mass within the aeration unit is controlled such that it remains substantially constant and independent from the feed rate.Type: ApplicationFiled: December 19, 2005Publication date: November 19, 2009Inventors: Stephan Simbuerger, Stephen Malcolm Pearson, Egidius Bizys
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Patent number: 7618027Abstract: A vaporizing device is provided for control, delivery, and purification of low vapor pressure gases in conjunction with carrier gas in micro-electronics and other critical applications.Type: GrantFiled: August 26, 2008Date of Patent: November 17, 2009Assignee: RasircInventor: Jeffrey J. Spiegelman
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Publication number: 20090224414Abstract: In the evaporative humidifier of the present invention, a desired humidity is obtained by supplying water only to a humidifying module required for humidification. Air simply passes through a humidifying module to which water is not supplied. Accordingly, air obtained by mixing humidified air passing through the humidifying module which is wet with water being supplied thereto (wet zone) and non-humidified air passing through the humidifying module to which water is not supplied (dry zone) is blown out from an outlet of the evaporative humidifier. The mixture amount (mixture ratio) is controlled by the opening and closing of the valve, so that a desired humidity is obtained. Therefore, with the evaporative humidifier of the present invention, humidity control can be accurately performed without unnecessarily operating the humidifying device and without wasting energy.Type: ApplicationFiled: March 2, 2009Publication date: September 10, 2009Applicant: HITACHI PLANT TECHNOLOGIES, LTD.Inventors: Akira YOKOYAMA, Koji SUZUKI, Kosei KAWASAKI
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Patent number: 7563360Abstract: A top temperature T1 of a distillation tower 1 is held below a liquefying temperature of a light fraction by returning a part of an exhaust gas W, which is cooled by a condenser 5, to the upper zone of the distillation tower 1. A bottom temperature T2 is raised up to 300° C. at highest by returning a part of a liquid product P from a re-boiler 3 to a lower zone of the distillation tower 1. When a liquid hydrocarbon L comes in countercurrent contact with a stripping gas G inside the distillation tower 1 with the temperature profile that an inner temperature gradually falls down along an upward direction, mercury is efficiently transferred from the liquid L to a vapor phase without effusion of the light fraction in accompaniment with the exhaust gas W.Type: GrantFiled: January 26, 2005Date of Patent: July 21, 2009Assignee: Japan Petroleum Exploration Co., Ltd.Inventors: Yoshiyuki Yamaguchi, Senichiro Kaku, Kazutoshi Chaki
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Patent number: 7494114Abstract: A system and method for producing a controlled blend of two or more fluids. Thermally-induced permeation through a permeable tube is used to mix a first fluid from outside the tube with a second fluid flowing through the tube. Mixture ratios may be controlled by adjusting the temperature of the first fluid or by adjusting the pressure drop through the permeable tube. The combination of a back pressure control valve and a differential regulator is used to control the output pressure of the blended fluid. The combination of the back pressure control valve and differential regulator provides superior flow control of the second dry gas. A valve manifold system may be used to mix multiple fluids, and to adjust the volume of blended fluid produced, and to further modify the mixture ratio.Type: GrantFiled: September 28, 2005Date of Patent: February 24, 2009Assignee: Babcock & Wilcox Technical Services Y-12, LLCInventor: Russell Louis Hallman, Jr.
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Publication number: 20090014901Abstract: A vaporizing device is provided for control, delivery, and purification of low vapor pressure gases in conjunction with carrier gas in micro-electronics and other critical applications.Type: ApplicationFiled: August 26, 2008Publication date: January 15, 2009Applicant: RASIRCInventor: Jeffrey J. Spiegelman
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Patent number: 7422198Abstract: In a liquid substance supply device, a three port two valve directional control valve is provided in a transfer line, and a substance container and the transfer line are connected together by a four port three valve directional control valve in such a way that the four port three valve directional control valve and the substance container can be removed from the transfer line as a unit. Furthermore, in a vaporizer, an orifice member is provided to surround the end portion of an internal conduit in which flows a mixture substance consisting of a gas and a liquid substance mixed therewith, and gas for atomization is spouted into a vaporization chamber through a gap defined between the internal conduit and the orifice member. Yet further, the temperature of a vaporization surface in the vaporization chamber can be controlled independently in correspondence with the nature of the liquid substance.Type: GrantFiled: November 27, 2006Date of Patent: September 9, 2008Assignees: Shimadzu Corporation, Mitsubishi Denki Kabushiki KaishaInventors: Naoki Yoshioka, Tatsushi Kawamoto, Mitsushi Kawao, Shigeru Matsuno, Akira Yamada, Shoji Miyashita, Fusaoki Uchikawa
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Publication number: 20080206362Abstract: In order to provide a device and a method for increasing blood flow and an insulin-like growth factor with use of a large amount of carbonic gas nano bubbles, the device of the present invention includes: a bathtub 1; and a nano bubble-producing section 41 for producing carbonic gas nano bubbles in bath water in the bathtub 1.Type: ApplicationFiled: February 22, 2008Publication date: August 28, 2008Inventors: Kazuyuki YAMASAKI, Takahide Miyamoto, Kazumi Chuhjoh, Masaki Kataoka
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Publication number: 20080190426Abstract: A respiration moistener (1) has an inlet (3), into which incoming gas (2) to be moistened can be fed. Vapor (21) is mixed with the incoming gas (2) in a mixing chamber (4). Moistened outgoing gas (5) flows out of an outlet (6). In cases in which the temperature of the incoming gas (2) becomes so high that the temperature of the outgoing gas (5) is above a desired value, the internal desired value is adjusted. The outgoing gas (5) can then cool to the desired value on its way through the inspiration tube (7).Type: ApplicationFiled: January 2, 2008Publication date: August 14, 2008Applicant: Dräger Medical AG & Co. KGInventor: Jochim Koch
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Patent number: 7389813Abstract: The present invention provides systems and methods of controlling local environment. In one embodiment, incoming air enters a contactor such the Direct Contact Cooler-Condenser (DCCC) where the air contacts water distributed on the contact media. After passing through the DCCC, the air is saturated at a temperature equal or close to that of the water. Depending on the state of the incoming air, in the DCCC will be humidified or dehumidified to yield saturated air at the desired humidity ratio. In one embodiment, a blower draws air through the DCCC and blows into the heater. The heater heats the air to the desired dry-bulb temperature. Before exiting, the air may pass through a filter.Type: GrantFiled: August 23, 2005Date of Patent: June 24, 2008Assignee: ASML Holding N.V.Inventors: Dikran S. Babikian, Bryan H. Wade
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Patent number: 7364139Abstract: A carburetor having a throttle valve in the form of a disc which can be rotated to control flow of an air/fuel mixture through a duct, the throttle disc having a heating element and a temperature sensor formed on at least one surface of said throttle disc; and an electric power supply, the electric power supply being controlled by the temperature sensor, to maintain the temperature of the throttle disc above a predetermined minimum temperature.Type: GrantFiled: April 21, 2006Date of Patent: April 29, 2008Inventor: Bernard Bollons
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Patent number: 7306205Abstract: Breathing assistance apparatus including humidifier (4) and heated conduit (6) adapted to deliver humidified gases at desired and accurate level of humidity to patient. Humidifier includes controller (18) that delivers flow rate, temperature and humidity of gases and then determines required power input to deliver gases as required. Need for external sensors is dispensed with providing simple and less bulky apparatus.Type: GrantFiled: August 29, 2003Date of Patent: December 11, 2007Assignee: Fisher & Paykel Healthcare LimitedInventors: Brett John Huddart, Scott Robert Mackie, Craig Karl White
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Publication number: 20070257386Abstract: A steam humidifier provided by the present invention has a tank having a reservoir section and a cover removably and sealingly secured thereto. The tank contains water during a humidifying operation in which the humidifier humidifies an indoor environment. The cover has a heating element mounted thereon and extending therefrom into the reservoir section and a steam outlet assembly mounted thereon and extending therethrough into the tank. The heating element evaporates at least a portion of the water during the humidifying operation into steam output through the steam outlet assembly to humidify the indoor environment.Type: ApplicationFiled: May 2, 2007Publication date: November 8, 2007Inventor: Cherif Menassa
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Patent number: 7261150Abstract: A method for humidifying and controlling the temperature of a process gas stream comprising the steps of super-saturating and heating the process gas stream with steam until it reaches a first pre-set temperature; cooling the process gas stream until it reaches a second pre-set temperature; removing excess condensed water from the process gas stream; and heating the process gas stream until it reaches a third pre-set temperature. An apparatus for implementing this method is also disclosed.Type: GrantFiled: February 28, 2002Date of Patent: August 28, 2007Assignee: Hydrogenics CorporationInventors: Joe Cargnelli, Ravi B. Gopal
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Patent number: 7125007Abstract: A control system for adjusting the desired air pressure provided to one or more spray nozzles disposed to receive liquid and compressed air adjusts the amount of compressed air supplied to the spray nozzle based on various sensed operating parameters of the system.Type: GrantFiled: June 25, 2003Date of Patent: October 24, 2006Assignee: Spraying Systems Co.Inventor: Lieven Wulteputte
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Patent number: 7051801Abstract: A method for humidifying and controlling the temperature of a process gas stream comprising the steps of super-saturating and heating the process gas stream with steam until it reaches a first pre-set temperature; cooling the process gas stream until it reaches a second pre-set temperature; removing excess condensed water from the process gas stream; and heating the process gas stream until it reaches a third pre-set temperature. An apparatus for implementing this method is also disclosed.Type: GrantFiled: July 28, 2000Date of Patent: May 30, 2006Assignee: Hydrogenics CorporationInventors: Joe Cargnelli, Ravi B. Gopal
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Patent number: 6997185Abstract: An adjustable air conditioning and regulation apparatus for human respiratory system includes an air treatment assembly and a host controlling assembly. The air treatment assembly has an air filter, a humidity control, a heating device for temperature control and a pressure control. The air filter removes the particles and smells from the air. The clean air is regulated by the controls that maintain the clean air at a desired level of temperature, pressure and humidity. The apparatus provides clean, fresh and comfortable air for the patients with compromised respiratory system.Type: GrantFiled: December 17, 2003Date of Patent: February 14, 2006Inventors: Tai-Kang Han, Hua Ting
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Patent number: 6988717Abstract: A method and system of near saturation gas humidification by mixing a steam and a gas flow is disclosed. The steam is generated with a heating device at a controlled rate from a liquid contained in a vessel near the point of use of the humidified gas. The controlled rate results from a feedback loop that controllably heats the liquid while measuring the steam temperature and maintaining it around a set point. The humidification delivery rate is adjustable by adjusting the temperature set point and/or the gas pressure. Undesirable components from the humidified gas are removed with an in-line filter after its point of generation. Condensation from the humidified gas before its point of use is removed with a drain pipe in combination with a drain valve triggered by a condensation level sensor.Type: GrantFiled: December 15, 2003Date of Patent: January 24, 2006Assignee: Chemflow Systems, Inc.Inventor: Leon Han
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Patent number: 6966364Abstract: The present invention provides systems and methods of controlling local environment. In one embodiment, incoming air enters a contactor such the Direct Contact Cooler-Condenser (DCCC) where the air contacts water distributed on the contact media. After passing through the DCCC, the air is saturated at a temperature equal or close to that of the water. Depending on the state of the incoming air, in the DCCC will be humidified or dehumidified to yield saturated air at the desired humidity ratio. In one embodiment, a blower draws air through the DCCC and blows into the heater. The heater heats the air to the desired dry-bulb temperature. Before exiting, the air may pass through a filter.Type: GrantFiled: February 12, 1999Date of Patent: November 22, 2005Assignee: ASML Holding N.V.Inventors: Dikran S. Babikian, Bryan H. Wade
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Patent number: 6874770Abstract: A high flow rate bubbler system and method are provided for producing a stable, easily controllable source of chemical vapors to a downstream process. The bubbler system is equipped with a vaporizer unit connected to its gas outlet tube. This vaporizer unit slows the gas velocity to enhance settling of entrained droplets and contacts the exiting gas with a high thermal mass, heated surfaces to promote heat transfer and evaporation of the entrained droplets.Type: GrantFiled: November 27, 2002Date of Patent: April 5, 2005Assignee: Aviza Technology, Inc.Inventor: Amir Torkaman
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Patent number: 6863268Abstract: A method of humidifying gases to 100% relative humidity and a humidifier to carry out such a method are provided to humidify gases for fuel cells and for other applications. The humidification of gases is thermally controlled and thermal energy is managed to provide an efficient system. A pre-humidifier accommodates a wide range of flow rates of dry gas to initially humidify and pre-heat the gas, and a boiler provides steam to mix with the effluent from the pre-humidifier to humidify the gas to saturation. A thermal insulator between the boiler and bulk water and/or pre-humidifier enhances the steam generation from the boiler and prevents direct heating of water or gases by heat from the boiler. Above the boiler, bulk water, and pre-humidifier, a mixing chamber further functions as a condenser and water separator. The mixing chamber provides a space for mixing gases and steam and separates saturated gases from condensed water.Type: GrantFiled: May 2, 2003Date of Patent: March 8, 2005Inventor: Chaojiong Zhang
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Patent number: 6841138Abstract: A system for reducing the temperature of exhaust gas in an incinerator or boiler equipment having an exceedingly small size and avoiding any difficulties caused by damage to the wall surface of a gas cooling chamber due to adherence of sprayed water droplets and deposition of dust. More specifically, pressurized thermal water with a temperature higher than a boiling point of water under atmospheric pressure is sprayed as temperature reduction water into high temperature exhaust gas Gh in a gas cooling chamber or an exhaust gas duct. The temperature reduction of exhaust gas and the removal of acidic gas in the exhaust gas are simultaneously achieved by spraying pressurized thermal water Wt containing an alkaline solution as temperature reduction water into high temperature exhaust gas Gh in the gas cooling chamber or the exhaust gas duct.Type: GrantFiled: January 14, 2004Date of Patent: January 11, 2005Assignee: Takuma Co., Ltd.Inventors: Masayuki Kumada, Keiji Mukai
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Publication number: 20040253162Abstract: A system for reducing the temperature of exhaust gas in an incinerator or boiler equipment having an exceedingly small size and avoiding any difficulties caused by damage to the wall surface of a gas cooling chamber due to adherence of sprayed water droplets and deposition of dust. More specifically, pressurized thermal water with a temperature higher than a boiling point of water under atmospheric pressure is sprayed as temperature reduction water into high temperature exhaust gas Gh in a gas cooling chamber or an exhaust gas duct. The temperature reduction of exhaust gas and the removal of acidic gas in the exhaust gas are simultaneously achieved by spraying pressurized thermal water Wt containing an alkaline solution as temperature reduction water into high temperature exhaust gas Gh in the gas cooling chamber or the exhaust gas duct.Type: ApplicationFiled: January 14, 2004Publication date: December 16, 2004Applicant: Takuma Co., Ltd.Inventors: Masayuki Kumada, Keiji Mukai
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Patent number: 6796458Abstract: An air supply apparatus includes a buffer tank for receiving and storing ultra-pure water from an ultra-pure source, a temperature/humidity controller (THC) for conditioning the air using the ultra-pure water from the buffer tank, an ultra-pure water pipe for delivering the ultra-pure water from the ultra-pure source to the buffer tank, and an air pipe for delivering the air from the THC to semiconductor device fabricating equipment. A control mechanism, including at least one valve disposed in the piping of the apparatus, allows the apparatus to be selectively operated in a normal mode in which the ultra-pure water is allowed to flow from the ultra-pure water source to the THC via the buffer tank, and a cleaning mode in which the THC runs using ultra-pure water stored in the buffer tank while the ultra-pure water pipe is being cleaned.Type: GrantFiled: July 15, 2003Date of Patent: September 28, 2004Assignee: Samsung Electronics Co., Ltd.Inventors: Dug-Kyu Choi, Yong-Won Seo
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Patent number: 6755398Abstract: A heated water mist therapy appliance generates temperature controlled therapeutic mist by applying ultrasonic vibration to temperature controlled (heated) water. The resulting heated water mist may be applied to the skin of the feet or diverted into a flexible conduit for application to other parts of the body. In some embodiments of the appliance, the user may control the temperature of the water used to make the mist, thereby controlling the temperature of the therapy. The user also controls the volume of water mist/air mixture by adjusting the speed of a fan. The appliance may include an ionizing electrode to enhance the ionic content of the water mist/air mixture.Type: GrantFiled: October 25, 2002Date of Patent: June 29, 2004Assignee: Raymond Electric (China) Ltd.Inventor: Ying Man John Wong
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Patent number: 6733735Abstract: A system for reducing the temperature of exhaust gas in an incinerator or boiler equipment having an exceedingly small size and avoiding any difficulties caused by damage to the wall surface of a gas cooling chamber due to adherence of sprayed water droplets and deposition of dust. More specifically, pressurized thermal water with a temperature higher than a boiling point of water under atmospheric pressure is sprayed as temperature reduction water into high temperature exhaust gas Gh in a gas cooling chamber or an exhaust gas duct. The temperature reduction of exhaust gas and the removal of acidic gas in the exhaust gas are simultaneously achieved by spraying pressurized thermal water Wt containing an alkaline solution as temperature reduction water into high temperature exhaust gas Gh in the gas cooling chamber or the exhaust gas duct.Type: GrantFiled: November 22, 2002Date of Patent: May 11, 2004Assignee: Takuma Co., Ltd.Inventors: Masayuki Kumada, Keiji Mukai
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Patent number: 6715743Abstract: A gas humidifier provides a continuous flow of gas through two stages of bubbling with an intermediate heating stage. Gas is introduced into an enclosure containing a quantity of bulk water by pumping the gas into a gas entry pipe or tube. The gas exits the gas entry pipe to bubble up through a bubbling evaporator. At the water surface of the bubbling evaporator, a heating element heats the gas-vapor mixture. The heated gas-vapor mixture then bubbles up through the bulk water, and the temperature of the bulk water determines the thermal cycles of the heating element. The gas-vapor mixture bubbles up through the bulk water, reaching saturation at the dew point. The saturated gas is then directed from the humidifier for use.Type: GrantFiled: April 9, 2002Date of Patent: April 6, 2004Inventor: Chaojiong Zhang
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Patent number: 6712343Abstract: A system for reducing the temperature of exhaust gas in an incinerator or boiler equipment having an exceedingly small size and avoiding any difficulties caused by damage to the wall surface of a gas cooling chamber due to adherence of sprayed water droplets and deposition of dust. More specifically, pressurized thermal water with a temperature higher than a boiling point of water under atmospheric pressure is sprayed as temperature reduction water into high temperature exhaust gas Gh in a gas cooling chamber or an exhaust gas duct. The temperature reduction of exhaust gas and the removal of acidic gas in the exhaust gas are simultaneously achieved by spraying pressurized thermal water Wt containing an alkaline solution as temperature reduction water into high temperature exhaust gas Gh in the gas cooling chamber or the exhaust gas duct.Type: GrantFiled: November 22, 2002Date of Patent: March 30, 2004Assignee: Takuma Co., Ltd.Inventors: Masayuki Kumada, Keiji Mukai
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Publication number: 20040041286Abstract: A method for supplying a source gas to a processing chamber for forming a film on a substrate in the processing chamber includes: heating a carrier gas; bubbling the heated carrier gas in a liquid source disposed in a container to form a vapor source; and supplying a source gas including the vapor source and the heated carrier gas into the processing chamber for forming the film.Type: ApplicationFiled: May 8, 2003Publication date: March 4, 2004Inventors: Jai-Dong Lee, Ki-Hyun Hwang, Chang-Hyun Ko
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Publication number: 20040020487Abstract: A breathing gas humidifier system for a patient includes a replaceable, closed water reservoir (1) with stable pressure, provided for receiving a water reserve for the breathing gas humidifier system. An intermediate storage unit (4) with water is closed from the environment and is located under the water reservoir. The water reservoir (1) and the intermediate storage unit (4) have a valve (16, 14) each, with one of the valves cooperating with the other valve, so that there is a flow connection between the water reservoir (1) and the intermediate storage unit (4) only when the water reservoir (1) is received in a connector (2) of the intermediate storage unit (4). The intermediate storage unit (4) is connected via a water connection line (5) located below the water level to a heated evaporator chamber (7), which opens above the water evaporating at the boiling point into the breathing gas line to a patient.Type: ApplicationFiled: July 3, 2003Publication date: February 5, 2004Inventors: Jochim Koch, Marco Brombacher
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Patent number: 6523811Abstract: A system for reducing the temperature of exhaust gas in an incinerator or boiler equipment having an exceedingly small size and avoiding any difficulties caused by damage to the wall surface of a gas cooling chamber due to adherence of sprayed water droplets and deposition of dust. More specifically, pressurized thermal water with a temperature higher than a boiling point of water under atmospheric pressure is sprayed as temperature reduction water into high temperature exhaust gas Gh in a gas cooling chamber or an exhaust gas duct. The temperature reduction of exhaust gas and the removal of acidic gas in the exhaust gas are simultaneously achieved by spraying pressurized thermal water Wt containing an alkaline solution as temperature reduction water into high temperature exhaust gas Gh in the gas cooling chamber or the exhaust gas duct.Type: GrantFiled: August 16, 2000Date of Patent: February 25, 2003Assignee: Takuma Co., Ltd.Inventors: Masayuki Kumada, Keiji Mukai
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Patent number: 6446941Abstract: A forced air cooling tower includes an upright casing, and elevated water distribution system disposed in an upper portion of the casing and one or more fans for drawing air through the tower. The tower also includes a catch basin for collecting the cooled air and a pump for circulating the cooled water through a condenser and back to the top of the tower and to the water distribution system. The cooling tower also includes a controller and a variable frequency device for regulating the flow of air through the tower. A first temperature sensor senses the temperature T1 of the hot process water delivered to the water distribution system and a second sensor senses the dry bulb temperature of the air leaving the tower Tdbt2. A third sensor senses the temperature of the cooled water leaving the tower. The controller such as a computer and variable frequency drive controls the speed of the fan to minimize the difference in T1 and Tdbt2.Type: GrantFiled: October 11, 2000Date of Patent: September 10, 2002Assignee: Kuwait Institute for Scientific ResearchInventors: Gopal P. Maheshwari, Eitidal Al-Bassam
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Patent number: 6398196Abstract: A steam humidifier for use with a forced air heating system includes a steam nozzle mounted in the plenum of the heating system and connected to a water feed line connected to a continuous pressurized water source. The water feed line is made of a thermal conducting material and is coiled about a heating element wherein the heating element and conductive coil are substantially surrounded by an insulation barrier. The water feed line is controlled by a solenoid operated valve that will be activated only when the heater is on and a humidistat detects that humidity is required by the area being serviced by the forced hot air system.Type: GrantFiled: March 20, 2000Date of Patent: June 4, 2002Assignee: Allied Systems Research, Inc.Inventors: Barry D. Light, Timothy W. Roberts
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Patent number: 6338474Abstract: In an air feeder for supplying air with a predetermined temperature and humidity into a cup in a resist coating unit provided in a coating and developing system, a cooling section, a by-pass, a heating section, a humidifying section, and a blower are provided. 55% of introduced air is cooled in the cooling section, 45% of the introduced air passes through the by-pass, and mixed air of the cooled air and the air from the by-pass is heated in the heating section and humidified in the humidifying section, thereby enabling energy-saving and space-saving temperature and humidity control.Type: GrantFiled: February 9, 2000Date of Patent: January 15, 2002Assignee: Tokyo Electron LimitedInventor: Norio Semba
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Publication number: 20010042930Abstract: An auxiliary gasline-heating unit is used in a chemical vapor deposition apparatus. The auxiliary gasline-heating unit serves to increase the exit temperature of the mixture of N2 gas and He-dilute gas in order to prevent TDMAT, Ti[N(CH3)2]4, from being condensed and becoming a gasline contaminant when the mixture mixes with the TDMAT and a carrier gas.Type: ApplicationFiled: July 20, 2001Publication date: November 22, 2001Inventors: Juen-Kuen Lin, Chien-Hsin Lai, Peng-Yih Peng, Fu-Yang Yu
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Patent number: 6182951Abstract: A fluid transfer system includes a permeable fluid carrier, a constant temperature source of a first fluid, and a constant pressure source of a second fluid. The fluid carrier has a length, an inlet end, and an outlet end. The constant pressure source connects to the inlet end and communicates the second fluid into the fluid carrier, and the constant temperature source surrounds a least of portion of the length. A mixture of the first fluid and the second fluid exits via the outlet end A method of making a mixture of two fluids is also disclosed.Type: GrantFiled: September 10, 1998Date of Patent: February 6, 2001Assignee: Lockheed Martin Energy Systems, Inc.Inventors: Russell L. Hallman, Jr., James C. Truett
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Patent number: 6135433Abstract: Provided are a system and method for saturating a gas with a vapor from a liquid chemical. The system includes: (a) a saturation vessel connected to receive a liquid chemical and a carrier gas; (b) a gas sparger in the saturation vessel for sparging the carrier gas into the liquid chemical; (c) means for maintaining the liquid chemical in the saturation vessel at a substantially constant level; (d) means for controlling the temperature of the liquid chemical in the saturation vessel to a desired value, comprising (I) a system for cooling the liquid chemical, and (ii) a heater inside the saturation vessel extending vertically in the liquid a distance at least half of the height of the liquid chemical level for heating the liquid chemical; and (e) means for controlling the pressure of the saturated gas to a desired value. The invention also relates to novel methods and systems for controlled delivery of a vaporized liquid chemical.Type: GrantFiled: February 18, 1999Date of Patent: October 24, 2000Assignee: Air Liquide America CorporationInventor: Douglas B. Nurmi
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Patent number: 6095505Abstract: An improved breathing gas humidifier including an evaporation module which has a contact chamber and a flash-resistant heat exchanger, a wicking layer on the heat exchanger, a liquid water flow controller, an electric resistance heater, and a breathing gas temperature controller. The contact chamber is defined by a rigid housing and in part by a flash-resistant heat exchanger. The rigid housing has a gas inlet for connection to a breathing gas source such as a ventilator, a water inlet for connection to a liquid water source by a liquid water flow passageway, and a breathing gas outlet connected to an inhalation passageway. The wicking layer is positioned in the contact chamber to receive and distribute liquid water. The breathing gas temperature controller is operably connected to the flow controller, the heater, and a temperature sensor in the breathing gas outlet.Type: GrantFiled: July 15, 1998Date of Patent: August 1, 2000Assignee: Pegasus Research CorporationInventor: Kenneth G. Miller
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Patent number: 5938984Abstract: A temperature regulating method of a humidifier regulates a temperature of water vapor ejected therefrom according to a surrounding temperature. A cool humidification mode is added to a humidification mode of the humidifier, and a temperature of a humidifying tub is detected upon being shifted into the cool humidification mode by a user. Thus, the detected temperature is compared with a temperature preset for performing the cool humidification mode to turn off the heater when the temperature of the humidifying tub is higher than the preset temperature and, turn on the heater otherwise, thereby regulating the temperature of the water vapor ejected from an ejecting slit of the humidifier according to the surrounding temperature thereof.Type: GrantFiled: March 31, 1997Date of Patent: August 17, 1999Assignee: Daewoo Electronics Co., Ltd.Inventor: Woong Jung
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Patent number: 5803938Abstract: A liquid vaporizing apparatus includes a container for holding a liquid at a constant temperature with a temperature adjustment unit and a gas that does not react with the liquid is bubbled through the liquid in the container to vaporize the liquid. The container for holding the liquid has an internal space above the liquid and a second temperature adjustment unit for controlling the temperature of the internal space separately from the temperature of the liquid in the container. Since the internal space is maintained at a constant temperature, higher than the temperature of the liquid, the quantity of the vaporized liquid produced is stable.Type: GrantFiled: May 15, 1997Date of Patent: September 8, 1998Assignees: Mitsubishi Denki Kabushiki Kaisha, Ryoden Semiconductor System Engineering CorporationInventors: Tooru Yamaguchi, Kouichirou Tsutahara, Takayuki Suenaga
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Patent number: 5785902Abstract: A liquid vaporizing apparatus includes a container for holding a liquid at a constant temperature with a temperature adjustment unit and a gas that does not react with the liquid is bubbled through the liquid in the container to vaporize the liquid. The container for holding the liquid has an internal space above the liquid and a second temperature adjustment unit for controlling the temperature of the internal space separately from the temperature of the liquid in the container. Since the internal space is maintained at a constant temperature, higher than the temperature of the liquid, the quantity of the vaporized liquid produced is stable.Type: GrantFiled: May 5, 1997Date of Patent: July 28, 1998Assignees: Mitsubishi Denki Kabushiki Kaisha, Ryoden Semiconductor System Engineering CorporationInventors: Tooru Yamaguchi, Kouichirou Tsutahara, Takayuki Suenaga
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Patent number: 5769313Abstract: A method for controlling a heating of a heater in a heating-type humidifier in which both a heating amount and a heating ON/OFF period is controlled on the basis of a present room temperature, is disclosed. A sensed present humidity is compared with an objective humidity which is set by a user. When the present humidity is greater than or equal to the objective humidity, whether or not water exists in a water tank of the humidifier is determined. When the water does not exist in the water tank, an alarm is generated. When the water exists, a humidifying operation stops. When the present humidity is less than the objective humidity, the humidifying operation is executed while increasing both a heating amount and a heating ON period of the heater in proportion to the present room temperature. As a result, the arrival times at the states of objective humidity are shortened.Type: GrantFiled: February 28, 1997Date of Patent: June 23, 1998Assignee: Daewoo Electronics Co., Ltd.Inventor: Sang-Uk You
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Patent number: 5741444Abstract: A humidor and method for high humidity, ambient temperature storage of items includes a water reservoir with a relatively large surface area which is gradually and uniformly heated in response to a humidity sensor. The temperature in the reservoir is raised at a rate of less than 1 degree Fahrenheit per 4 minutes to a maintained temperature of less than 5 degrees F. above ambient temperature until a desired humidity level is reached. The humidor enclosure includes convection heating elements which create a convection current between air inlets and outlets to draw fresh air into the humidor. A water level sensor in the water reservoir deactivates the reservoir heater and convection heating elements when the water level drops below a minimum level and simultaneously actives a water level low warning signal.Type: GrantFiled: September 11, 1996Date of Patent: April 21, 1998Assignee: Humicon CorporationInventor: Richard A. Kasuli
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Patent number: 5693189Abstract: The mixed gas of a liquid raw material is stably supplied to not only one reactor but also a plurality of reactors as maintained with high purity at a fixed concentration.Type: GrantFiled: July 28, 1995Date of Patent: December 2, 1997Assignee: Shin-Etsu Handotai Co., Ltd.Inventors: Kyoji Oguro, Yasushi Kurosawa
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Patent number: 5662838Abstract: A liquid vaporizing apparatus includes a container for holding a liquid at a constant temperature with a temperature adjustment unit and a gas that does not react with the liquid is bubbled through the liquid in the container to vaporize the liquid. The container for holding the liquid has an internal space above the liquid and a second temperature adjustment unit for controlling the temperature of the internal space separately from the temperature of the liquid in the container. Since the internal space is maintained at a constant temperature, higher than the temperature of the liquid, the quantity of the vaporized liquid produced is stable.Type: GrantFiled: January 26, 1996Date of Patent: September 2, 1997Assignees: Mitsubishi Denki Kabushiki Kaisha, Ryoden Semiconductor System Engineering CorporationInventors: Tooru Yamaguchi, Kouichirou Tsutahara, Takayuki Suenaga
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Patent number: 5620503Abstract: A humidifier system includes a spray apparatus in a housing which sprays a mist of water droplets onto a mist eliminator to intercept the mist of water droplets. The mist of droplets is captured in a liquid phase by the mist eliminator and is substantially completely converted into a vapor phase in the form of increased humidity in the air stream. A humidity sensor located downstream of the mist eliminator senses the humidity of the stream of air. A controller controls the quantity of water sprayed in response to the humidity sensed to maintain a predetermined humidity in the humidified stream of air. A second humidifier includes a heater which creates a region of intense heat to instantaneously evaporate water mist directed thereon in a stream of air. In a third embodiment, water and pressurized air are simultaneously injected into a region of intense heat.Type: GrantFiled: July 29, 1996Date of Patent: April 15, 1997Assignee: Tom Miller, Inc.Inventors: Thomas L. Miller, Joseph M. Maceri
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Patent number: 5558084Abstract: A humidifier having an ambient temperature sensor for sensing the temperature of the ambient air in the environment in which the humidifier is located. A difference temperature selector is provided to allow a user to select a difference temperature which is the difference in temperature between the sensed ambient temperature and a comfortable and efficient temperature for supply of the humidified gases provided by the humidifier to a patient or user. The humidifier controls the temperature of the humidified gases it provides to the patient to the selected difference temperature above the sensed ambient temperature, so that any change in the sensed ambient temperature results in a corresponding change in the temperature of humidified gases supplied to the patient or user. This construction prevents or minimises the condensation which occurs at low ambient temperatures in the gases supply conduit provided between the humidifier and the patient or user.Type: GrantFiled: October 2, 1992Date of Patent: September 24, 1996Assignee: Fisher & Paykel LimitedInventors: Michael G. Daniell, Andrew B. Clark
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Patent number: 5520858Abstract: A liquid vaporizing apparatus includes a container for holding a liquid at a constant temperature with a temperature adjustment unit and a gas that does not react with the liquid is bubbled through the liquid in the container to vaporize the liquid. The container for holding the liquid has an internal space above the liquid and a second temperature adjustment unit for controlling the temperature of the internal space separately from the temperature of the liquid in the container. Since the internal space is maintained at a constant temperature, higher than the temperature of the liquid, the quantity of the vaporized liquid produced is stable.Type: GrantFiled: July 25, 1994Date of Patent: May 28, 1996Assignees: Mitsubishi Denki Kabushiki Kaisha, Ryoden Semiconductor System Engineering CorporationInventors: Tooru Yamaguchi, Kouichirou Tsutahara, Takayuki Suenaga