Abstract: A vaporizer includes an outer tube configured to receive a flow of heated gas and an inner tube disposed at least partially within the outer tube. The inner tube is spaced apart from the outer tube such that the flow of heated gas is channeled through an annular space therebetween. The vaporizer also includes a crucible disposed at least partially within the inner tube. The crucible is extendable and retractable relative to the inner tube and within the outer tube. The crucible is configured to hold a molten metal such that a surface area of the molten metal exposed to the flow of heated gas is adjustable based on the position of the crucible relative to the inner tube. A heater is configured to vaporize the molten material and the vapor mixes with the flow of heated gas.

Abstract: In some embodiments, a humidification system includes a heater base having a heater plate, a humidification chamber, and circuit. The circuit can include various conduits, including an inspiratory conduit, expiratory conduit, Y-piece, patient conduit, and/or dry conduit. In use, the chamber contains a quantity of liquid. The heater base heats the heater plate, which in turn heats the liquid to a temperature that causes at least some of the liquid to become vapor, thereby humidifying the gases within the chamber. The gas is delivered to the patient via the inspiratory conduit. Various features can help control the system and ensure the patient receives gases having the desired conditions. These features can be used individually or in various combinations and subcombinations both in existing humidification systems and improved systems for respiratory humidification, laparoscopy, and other purposes.

Abstract: The present invention is a pressure monitoring panel apparatus with a panel housing that contains a programmable logic controller. Pressure transducers transmit the pressures from an aeration basin diffuser head and an aeration basin airline to a programmable logic controller. The programmable logic controller uses the pressures from the aeration basin diffuser head and aeration basin airline to determine the airflow rate through the aeration basin diffuser and the pressure drop across the aeration basin diffuser. Those values are then displayed on a viewable interface.

Abstract: A water level sensor is closely adhered to a storage tank, and a heat exchanger sterilizing and humidifying apparatus allows the water level sensor to be mounted at the outside of the storage tank, thus having a simple configuration. The water level sensor may include a holder, a cap connected to the holder so as to reciprocate within the holder, a case connected to the cap so as to reciprocate within the holder, a sensor part attached to the case to sense the water level in the storage tank, and a spring located between the holder and the cap, wherein the sensor part mounted at the outside of the storage tank and attached to the case by restoring force of the spring when the storage tank contacts the case may be closely adhered to the storage tank and thus may sense a level of water stored in the storage tank.

Abstract: The present invention relates to a humidifier for humidifying medical gases, comprising a humidification module including a control unit, wherein the humidification module is adapted for receiving a humidification chamber. Furthermore, the humidification module is further adapted to sense and/or receive information upon connection of the humidification chamber and/or additional equipment such as hoses, power supply pack.

Abstract: An evaporation supply apparatus for raw material used in semiconductor manufacturing includes a source tank in which a raw material is pooled; a flow rate control device that supplies carrier gas at a regulated flow rate into the source tank; a primary piping path for feeding mixed gas G0, made up of raw material vapor G4 and carrier gas G1, an automatic pressure regulating device that regulates a control valve based on the detected values of the pressure and temperature of mixed gas G0 to regulate the cross-sectional area of the passage through which the mixed gas G0 is distributed so as to hold the pressure of the mixed gas G0 inside the source tank constant; and a constant-temperature heating unit for heating the source tank to a set temperature, in which mixed gas G0 is supplied to a process chamber while controlling the pressure inside the source tank.

Abstract: A blower type chemical diffusing apparatus is disclosed which can be of service for an extended period of time and does not give rise to refuse disposal problems. The blower type chemical diffusing apparatus of the invention has an air blower, a chemical retainer and a fuel cell included in the apparatus body whereby powering the air blower to drive it with the fuel cell causes chemical from the chemical retainer to be emitted into an environmental atmosphere.

Abstract: For the reliable condensation of steam on condensation nuclei in an aerosol flow and therefore for enlarging the particles in the aerosol, the invention provides a method which is characterized in that condensation nuclei are passed through an inner area of an evaporating zone forming a flow area, the liquid to be evaporated is contacted with the flow area and evaporated therein and the thus produced steam is condensed on the condensation nuclei. the invention also provides an apparatus for condensing steam on condensation nuclei with an inlet for condensation nuclei and an evaporating zone constructed in such a way that a flow area for the condensation nuclei has a heated liquid duct open thereto and that a condensation flue is connected to the flow area. The invention also provides methods and apparatuses for counting particles, for producing monodisperse aerosols using the aforementioned method or the aforementioned apparatus.

Abstract: For the reliable condensation of steam on condensation nuclei in an aerosol flow and therefore for enlarging the particles in the aerosol, the invention provides a method which is characterized in that condensation nuclei are passed through an inner area of an evaporating zone forming a flow area, the liquid to be evaporated is contacted with the flow area and evaporated therein and the thus produced steam is condensed on the condensation nuclei. The invention also provides an apparatus for condensing steam on condensation nuclei with an inlet for condensation nuclei and an evaporating zone constructed in such a way that a flow area for the condensation nuclei has a heated liquid duct open thereto and that a condensation flue is connected to the flow area. The invention also provides methods and apparatuses for counting particles, for producing monodisperse aerosols using the aforementioned method or the aforementioned apparatus.

Abstract: A method and apparatus for providing a precursor to a process chamber is described. The apparatus comprises an ampoule capable of receiving either a liquid precursor source material or a solid precursor source material. The ampoule is capable of delivering either a liquid precursor material to a vaporizer coupled to the process chamber, or a vaporized or gaseous precursor material to the process chamber. The ampoule also includes a continuous level sensor to accurately monitor the level of precursor source material within the ampoule.

Abstract: For the reliable condensation of steam on condensation nuclei in an aerosol flow and therefore for enlarging the particles in the aerosol, the invention provides a method which is characterized in that condensation nuclei are passed through an inner area of an evaporating zone forming a flow area, the liquid to be evaporated is contacted with the flow area and evaporated therein and the thus produced steam is condensed on the condensation nuclei. the invention also provides an apparatus for condensing steam on condensation nuclei with an inlet for condensation nuclei and an evaporating zone constructed in such a way that a flow area for the condensation nuclei has a heated liquid duct open thereto and that a condensation flue is connected to the flow area. The invention also provides methods and apparatuses for counting particles, for producing monodisperse aerosols using the aforementioned method or the aforementioned apparatus.

Abstract: This invention relates to a vapor or liquid phase reagent dispensing apparatus having a: metal seal aligned and in contact with hardened opposing flat surfaces of a top wall member and a protuberance on a side wall member, wherein the hardened opposing flat surfaces of the top wall member and the protuberance have a hardness greater than the hardness of the metal seal. The apparatus also has a temperature sensor and a source chemical level sensor extending through a centrally located portion of the top wall member and generally vertically downwardly to a sump cavity centrally located on a bottom wall member. The dispensing apparatus may be used for dispensing of reagents such as precursors for deposition of materials in the manufacture of semiconductor materials and devices.

Abstract: A device for creating a reference humidity that includes a saturation chamber and a condensate cooler in fluid communication with the saturation chamber and arranged downstream of the saturation chamber, wherein the condensate cooler is a fin-type condenser whose arrangement is such that substantially horizontal gas flow through the condensation cooler results. A measuring chamber connected with the condensate cooler, in which a desired reference humidity is definitely set by varying pressures and/or temperatures.

Abstract: A vaporization chamber for a substrate processing system includes a main body, a cover member and a transition member. The main body is made of aluminum and defines a first inner surface, which defines, at least in part, a cavity. The cover member is also made of aluminum. The cover member defines a second inner surface, which also defines, at least in part, the cavity. The cover member includes a carrier gas cover inlet, a liquid source cover inlet, a source cover outlet which extends from a first outer surface through the cover member to the second inner surface. The transition member is made of stainless steel and has a transition outer surface and a transition inner surface. The transition inner surface is aluminum cladded. The cover member including a carrier gas cover inlet, a liquid source cover inlet, a source cover outlet which extend from a first outer surface through the cover member to second inner surface. The transition inner surface and the cover outer surface are welded together.

Abstract: A vaporization chamber for a substrate processing system includes a main body, a cover member and a transition member. The main body is made of aluminum and defines a first inner surface, which defines, at least in part, a cavity. The cover member is also made of aluminum. The cover member defines a second inner surface, which also defines, at least in part, the cavity. The cover member includes a carrier gas cover inlet, a liquid source cover inlet, a source cover outlet which extends from a first outer surface through the cover member to the second inner surface. The transition member is made of stainless steel and has a transition outer surface and a transition inner surface. The transition inner surface is aluminum cladded. The cover member includes a carrier gas cover inlet, a liquid source cover inlet, a source cover outlet which extend from a first outer surface through the cover member to second inner surface. The transition inner surface and the cover outer surface are welded together.

Abstract: Disclosed is a raw material-providing device for a chemical-vapor deposition process and includes: a bubbler for vaporizing liquid raw material and providing the vaporized raw material to a deposition unit; and a raw material tank for providing liquid raw material to the bubbler, wherein the raw material tank preserves liquid raw material to be provided to the bubbler in advance and preheats the liquid raw material, and the raw material inside the raw material tank is provided to the bubbler through a plurality of hollow micro tubes, and wherein as the raw material inside the bubbler is gradually consumed, the internal pressure of the raw material tank is adjusted to change the amount of the raw material to be provided to the bubbler, thereby adjusting the amount of the raw material inside the bubbler and the vapor pressure inside the bubbler.

Abstract: A method of manufacturing synthetic silica glass includes the steps of pressurizing a liquid storage tank including a liquid silicon compound therein, generating bubbles in the liquid silicon compound using a foamer, removing the bubbles using a degassed, displacing the liquid silicon compound into a vaporizer while controlling an amount of the liquid silicon compound displaced by a liquid mass flow meter, mixing the displaced liquid silicon compound with a carrier gas to generate a gaseous silicon compound, injecting the gaseous silicon compound into a synthesis furnace, and forming synthetic silica glass by hydrolyzing the gaseous silicon compound in the synthesis furnace.

Abstract: A device is provided for generating a defined relative humidity in a gas. This device includes a saturator chamber connected by at least one connecting line to a measuring chamber. The relative humidity in the measuring chamber can be adjusted by varying the pressures in the saturator chamber and in the measuring chamber. A valve unit is arranged in the connecting line. The valve unit and the portion of the connecting line located between the valve unit and the saturator chamber are in thermal contact with a heating device.

Abstract: A method of manufacturing synthetic silica glass includes the steps of pressurizing a liquid storage tank including a liquid silicon compound therein, generating bubbles in the liquid silicon compound using a foamer, removing the bubbles using a degasser, displacing the liquid silicon compound into a vaporizer while controlling an amount of the liquid silicon compound displaced by a liquid mass flow meter, mixing the displaced liquid silicon compound with a carrier gas to generate a gaseous silicon compound, injecting the gaseous silicon compound into a synthesis furnace, and forming synthetic silica glass by hydrolyzing the gaseous silicon compound in the synthesis furnace.

Abstract: An apparatus for supplying a treating material to a treating device has a tank containing a liquid treating material and a heat exchanger formed by a spiral pipe and provided in the tank. A nitrogen gas (N.sub.2 gas) is introduced into the tank and evaporates the liquid treating material. Water is supplied from a fluid inlet pipe connected to the lower portion of the exchanger to a fluid outlet pipe connected to the upper portion of the exchanger through the spiral pipe of the exchanger. In the heat exchange, heat exchange between the water and the liquid treating material is performed very efficiently. No use of electric power provides high safety. The temperature of the liquid treating material which is changed into a gas state by a bubbling process is controlled efficiently and the density of the vaporized treating material in the tank is made stable.

Abstract: A fabrication method for an improved structure of a rubber keypad, particularly such a keypad used in a calculator, a telephone set, or another control module. The process first forms several protruding blocks arranged appropriately on a transparent, thin rubber plate. The protruding blocks are then marked with selected characters by painting, and the third rubber plate is then placed inside an upper and a lower mold for high-temperature, high-pressure pressing and punching. The mold is also provided with several rubber members to form a second rubber plate. The protruding blocks provided on the thin rubber plate are integrated with corresponding protruding blocks formed on the second rubber plate by the lower mold. Thus, the protruding blocks formed with characters and symbols, and the corresponding protruding blocks are combined, forming a keypad with layered character pads. Since the keypad structure has its characters printed between the layers, the discoloring of the keypads can be prevented.

Abstract: Improvements are disclosed in liquid level sensing apparatus having a liquid replenishment line so that as liquid is expended more may be added to keep the liquid at a desired predetermined level. The apparatus is contemplated for use in the humidification of gases, particularly for the administration of oxygen and the like to a patient.

Abstract: A humidifier for conditioning fluid for delivery to a test chamber, such as an incubator, includes means for automatically regulating the quantity, level and temperature of a body of water through which mixed gases, such as air and CO.sub.2, are bubbled to entrain moisture in the gases. The water is heated to below its boiling point. The relative humidity of the saturated mixture delivered to the test chamber is usually at least 90% at temperatures between about 30.degree. - 60.degree.C.