Product Mover Patents (Class 269/14)
  • Patent number: 9718164
    Abstract: A polishing system for polishing a semiconductor wafer includes a wafer support for holding the semiconductor wafer, and a first polishing pad for polishing a region of the semiconductor wafer. The semiconductor wafer has a first diameter, and the first polishing pad has a second diameter shorter than the first diameter.
    Type: Grant
    Filed: December 6, 2012
    Date of Patent: August 1, 2017
    Inventors: Shih-Chi Lin, Kun-Tai Wu, You-Hua Chou, Chih-Tsung Lee, Min Hao Hong, Chih-Jen Wu, Chen-Ming Huang, Soon-Kang Huang, Chin-Hsiang Chang, Chih-Yuan Yang
  • Publication number: 20150017898
    Abstract: A workpiece positioning system integrated with a fume extraction device is provided. The system comprises a movable work surface assembly and a manifold. The work surface assembly includes a plurality of work surfaces and a plurality of ventilation ports. Each of the plurality of ventilation ports is disposed on each of the plurality of work surfaces to ventilate the corresponding work zone. The manifold is disposed below the work surface assembly and coupled to a duct system through which fumes produced during welding or cutting are to be transported to the fume extraction device. When a workpiece placed on a work surface is positioned for welding or cutting, the manifold is aligned and in fluid communication with the ventilation port corresponding to the work surface.
    Type: Application
    Filed: July 10, 2014
    Publication date: January 15, 2015
    Inventors: Christopher AGOSTI, David MATE
  • Publication number: 20140319746
    Abstract: A machine tool includes a machine bed, a processing machine mounted on the machine bed to perform mechanical processing on a workpiece, a covering unit configured to enclose a processing station, and a shroud support member configured to support the covering unit in a non-contact relation with the machine bed. The machine tool also includes a loader configured to travel along a rail while holding the workpiece, and configured to selectively load and unload the workpiece relative to the processing machine.
    Type: Application
    Filed: November 26, 2012
    Publication date: October 30, 2014
    Inventor: Haruaki Kozawa
  • Publication number: 20140269826
    Abstract: Disclosed are method and apparatus for treating a substrate. The apparatus is a dual-function process chamber that may perform both a material process and a thermal process on a substrate. The chamber has an annular radiant source disposed between a processing location and a transportation location of the chamber. Lift pins have length sufficient to maintain the substrate at the processing location while the substrate support is lowered below the radiant source plane to afford radiant heating of the substrate. One or more lift pins has a light pipe disposed therein to collect radiation emitted or transmitted by the substrate when the lift pin contacts the substrate surface.
    Type: Application
    Filed: February 25, 2014
    Publication date: September 18, 2014
    Inventors: Hanbing WU, Anantha K. SUBRAMANI, Wei W. WANG, Aaron Muir HUNTER
  • Publication number: 20140265090
    Abstract: In one embodiment, a substrate support bushing for a lift pin used in a semiconductor processing chamber is provided. The bushing includes an elongated housing sized to guide the lift pin in a substrate support pedestal. The housing has a longitudinal bore formed through the housing. The housing includes at least one passageway slot extending and open to substantially the entire length of the bore. In another embodiment, a method for transferring a substrate from a substrate support pedestal is provided. The method includes displacing a lift pin through a central bore toward a substrate disposed on a substrate support pedestal. The bore has at least one slot extending substantially along and open to the central bore. The method further includes spacing the substrate from the substrate support pedestal on the lift pin.
    Type: Application
    Filed: February 22, 2014
    Publication date: September 18, 2014
    Inventor: Tao HOU
  • Publication number: 20140265091
    Abstract: Apparatus for supporting a substrate are provided herein. In some embodiments, a substrate support includes a susceptor plate having a top surface; a recess formed within the top surface, wherein the recess is defined by an edge; and a plurality of angled support elements disposed within the recess and along the edge of the recess, wherein each angled support element comprises a first surface downwardly sloped toward a center of the recess.
    Type: Application
    Filed: March 5, 2014
    Publication date: September 18, 2014
  • Publication number: 20140265089
    Abstract: Embodiments of the present invention generally provide an apparatus with a recess and a cavity formed therein for future hardware retrofit and uniformity enhancement and methods for controlling the same. In one embodiment, a substrate support includes a supporting body having an outer wall, a ground path disposed against and bounding the outer wall of the supporting body, a mounting plate coupled to a lower surface of the supporting body, wherein the mounting plate includes a lip extending outward from the mounting plate defining an upper surface; and a recess formed at a perimeter of the supporting body above the upper surface of the lip of the mounting plate, the recess lining on the ground path extending at least partially to the mounting plate.
    Type: Application
    Filed: March 14, 2013
    Publication date: September 18, 2014
    Inventors: Kyle TANTIWONG, Samer BANNA
  • Publication number: 20140265088
    Abstract: A cutting board according to various embodiments of this invention includes a body having top and bottom surfaces, first and second ends, and first and second sides with the top surface being a cutting surface adapted to have a food item such as a piece of meat placed thereon for cutting, slicing or carving. The cutting board may have a plurality of channels recessed in the top surface of the body with each of the channels having a variable-depth and being positioned perpendicular to and between the first and second ends of the cutting board. The variable-depth of each of the channels may increase between the first end and the second end of the body. A reservoir may be included proximate the second end of the body and in fluid communication with each of the channels.
    Type: Application
    Filed: March 14, 2013
    Publication date: September 18, 2014
    Inventor: Thomas Dean Arvan
  • Publication number: 20140252709
    Abstract: A cutting board assembly including a drip tray having a receptacle and a cutting board removably associated with the receptacle of the drip tray whereby liquid that flows over the edge of the cutting board will flow info and be retained in the receptacle of the drip tray. The cutting board may include a plurality of slots extending through the cutting board that are in fluid communication with the receptacle of the drip tray and/or a plurality of grooves that are in communication with the edge of the cutting board.
    Type: Application
    Filed: March 5, 2013
    Publication date: September 11, 2014
    Inventor: Robert Allen Crimmins
  • Publication number: 20140238959
    Abstract: A processing system includes a rotary stage, at least one shaft, a rotation driver, a plurality of loading platforms, and a plurality of processing devices. The rotary stage includes two opposite end surfaces and a plurality of loading surfaces between the end surfaces. The shaft connects the end surfaces of the rotary stage. The rotation driver connects the shaft. The loading platforms are respectively disposed on the loading surfaces of the rotary stage. The processing devices are respectively disposed corresponding to the loading platforms.
    Type: Application
    Filed: November 13, 2013
    Publication date: August 28, 2014
    Applicant: AU Optronics Corporation
    Inventors: Yu-Hung TAI, Meng-Chuan WEN, Yi-Jung CHIU, Chung-Wei LEE, Shan-Lung CHU
  • Publication number: 20140225320
    Abstract: The present disclosure provides for a cutting board and food preparation and waste removal system. The cutting board has a top cutting surface with a storage area underneath. In this storage area, trays are kept that may be slid in or out. Additionally, the trays are removable. The trays can be used to hold and facilitate the removal of food waste or may be used to hold cut or chopped food. Further included is a swiper which can be used to clean the cutting surface by using a blade to direct food and food waste into the trays. A portion of the handle of the swiper detaches to expose a cutting blade which can be used to chop, cut, and mince food items. Once the food has been cut and the food waste has been cleaned and removed, the entire device can be placed into the dishwasher for thorough cleaning.
    Type: Application
    Filed: February 12, 2014
    Publication date: August 14, 2014
    Inventor: ANGELO GOTSIS
  • Publication number: 20140166482
    Abstract: A system and method for receiving and ejecting a test strip of a fluid testing device. The system includes parallel first and second guide rails defining a rail cavity between the guide rails. A sled includes a sled post and opposed first and second side leg sets each having at least one deflectable leg. Each of the deflectable legs is externally slidably engaged to one of the guide rails limiting the sled to only sliding motion in either a loading direction or an opposite ejection direction. An actuator arm is rotatably connected to a mechanism assembly. The sled post is received in an actuator arm slot. Actuator arm rotation in a loading rotational direction displaces the sled in the loading direction in a sliding motion. Subsequent opposite rotation of the actuator arm in an ejection rotational direction displaces the sled in the ejection direction and ejects the test strip.
    Type: Application
    Filed: February 19, 2014
    Publication date: June 19, 2014
    Applicant: Roche Diagnostics Operations, Inc.
    Inventors: James R. Hanson, Derek C. Lotarski, Matthew C. Sauers, Anthony J. Uberta, III
  • Publication number: 20140077431
    Abstract: A carrier capable of holding one or more workpieces is disclosed. The carrier includes movable projections located along the sides of each cell in the carrier. This carrier, in conjunction with a separate alignment apparatus, aligns each workpiece within its respective cell against several alignment pins, using a multiple step alignment process to guarantee proper positioning of the workpiece in the cell. First, the workpieces are moved toward one side of the cell. Once the workpieces have been aligned against this side, the workpieces are then moved toward an adjacent orthogonal side such that the workpieces are aligned to two sides of the cell. Once aligned, the workpiece is held in place by the projections located along each side of each cell. In addition, the alignment pins are also used to align the associated mask, thereby guaranteeing that the mask is properly aligned to the workpiece.
    Type: Application
    Filed: September 20, 2012
    Publication date: March 20, 2014
    Inventors: William T. Weaver, Charles T. Carlson, Scott A. Smith, Michael A. Beck, Aaron P. Webb, James D. Strassner, Lawrence R. Gravell, Michael C. Simmons
  • Publication number: 20140073070
    Abstract: A method for fabricating a semiconductor device comprising: a first process for attaching a first supporting substrate having a plurality of through holes to a semiconductor substrate having a first surface and a second surface, so that each of the through holes is opposed to a semiconductor device formed in the semiconductor substrate; a second process for contacting probes of an electric characteristic inspection apparatus with a first electrode formed on the first surface, and a second electrode formed on the second surface via the through hole; and a third process for measuring electric characteristic of the semiconductor device.
    Type: Application
    Filed: September 5, 2013
    Publication date: March 13, 2014
    Inventor: Hiroshi TSUJII
  • Publication number: 20130287529
    Abstract: A substrate processing system with independent substrate placement capability to two or more substrate support assemblies is provided. Two different sets of fixed-length lift pins are disposed on two or more substrate support lift pin assemblies of two or more process chambers, where the length of each lift pin in one process chamber is different from the length of each lift pin in another process chamber. The substrate processing system includes simplified mechanical substrate support lift pin mechanisms and minimum accessory parts cooperating with a substrate transfer mechanism (e.g., a transfer robot) for efficient and independent loading, unloading, and transfer of one or more substrates between two or more processing regions in a twin chamber or between two or more process chambers. A method for positioning one or more substrates to be loaded, unloaded, or processed independently or simultaneously in two or more processing regions or process chambers is provided.
    Type: Application
    Filed: March 15, 2013
    Publication date: October 31, 2013
    Inventors: Yao-Hung YANG, Jeonghoon OH, Frank F. HOOSHDARAN, Tom K. CHO, Tao HOU, Yuanhung GUO
  • Publication number: 20130214466
    Abstract: An apparatus for treating food substances, includes a cutting plate defining a longitudinal axis and having at least one cutting surface for supporting food substances and a collecting tray mounted with respect to the cutting plate. The collecting tray is dimensioned and adapted to transition between a first stored condition to facilitate storage or transport thereof and a second operative condition to provide a reservoir for collecting food substances cut on the cutting surface.
    Type: Application
    Filed: February 7, 2013
    Publication date: August 22, 2013
    Inventor: Keith Young
  • Publication number: 20130049275
    Abstract: A cutting board for capturing and draining liquids from food items. Projection(s) extend from the bottom side of the board for supporting the board above a work surface. A drain port for draining liquid has an inlet in a channel defined on the top side of the board and an outlet below the bottom side of board and above the bottom(s) of the projection(s). The outlet is defined on an outlet portion configured for causing liquid from the outlet to collect away from the bottom(s) of the projection(s).
    Type: Application
    Filed: August 23, 2012
    Publication date: February 28, 2013
    Applicant: SPOS Specialty Products Online Store Ltd.
    Inventor: Phillip Morgan
  • Publication number: 20130032980
    Abstract: To provide an installation for cleaning and/or deburring workpieces, comprising a treatment region configured to enable a cleaning treatment and/or a deburring treatment to be performed on a workpiece therein, a loading device for transferring the workpiece from an outer area of the installation into the treatment region and an unloading device for transferring the workpiece from the treatment region into the outer area of the installation, with which installation there is achieved a high workpiece throughput with a favourable cleaning and/or deburring result, it is proposed that the loading device and/or the unloading device comprises at least one treatment device configured to enable the workpiece to be treated during the transfer between the outer area of the installation and the treatment region of the installation.
    Type: Application
    Filed: October 9, 2012
    Publication date: February 7, 2013
    Applicant: Dürr Ecoclean GmbH
    Inventor: Dürr Ecoclean GmbH
  • Publication number: 20120320357
    Abstract: A clamping device is constructed and arranged to clamp two parts together. The clamping device includes an aligner constructed and arranged to bring the two parts in an aligned position with respect to each other, a clamp constructed and arranged to maintain the two parts in the aligned position, a disconnect constructed and arranged to guide the two parts away from the aligned position to a disconnected position, and an actuator constructed and arranged to convert an electrical current to kinetic energy. The aligner, the clamp, and the disconnect are constructed and arranged to be driven by the actuator.
    Type: Application
    Filed: June 14, 2012
    Publication date: December 20, 2012
    Applicant: ASML NETHERLANDS B.V.
    Inventors: Robertus Wilhelmus VELTMAN, Dennis Jozef Maria PAULUSSEN, Maarten Kees Jan BOON
  • Patent number: 8256752
    Abstract: A machine tool is provided for processing a workpiece, e.g., a metal sheet. The machine tool comprises at least one support configured to, in a support position, support a part of the workpiece on an upper surface, the part being completely separated from the workpiece, and a motion unit for moving the support downwards out of the support position into a discharge position located underneath the support. The motion unit is configured to accelerate the support, at least in a region of the part lying thereon, out of the support position along a gravitational direction with an acceleration which is greater than an acceleration of the part in the gravitational direction, and to move the accelerated support into an open position located outside a path of movement of the part at a speed such that the workpiece part attains the discharge position in free fall.
    Type: Grant
    Filed: June 25, 2008
    Date of Patent: September 4, 2012
    Assignee: TRUMPF Werkzeugmaschinen GmbH + Co. KG
    Inventors: Friedrich Kilian, Frank Schmauder, Rainer Kraemer
  • Patent number: 8191233
    Abstract: According to one embodiment, a head stack assembly incorporating device connects a head stack assembly to the base of a magnetic disk device by screwing a connector on the bottom surface of the rotational shaft of the head stack assembly and a connector on the base of the magnetic device together. The head stack assembly incorporating device includes a chuck and a driving-force transmitter. The chuck pinches the rotational shaft of the head stack assembly from the upper surface of the head stack assembly to be fixed to the rotational shaft. The chuck is rotatable around the central axis of the rotational shaft. The driving-force transmitter transmits a rotational force to the chuck.
    Type: Grant
    Filed: March 18, 2010
    Date of Patent: June 5, 2012
    Assignee: Kabushiki Kaisha Toshiba
    Inventors: Ryousuke Naide, Takeshi Kurumizawa
  • Publication number: 20120104673
    Abstract: The present invention relates to a stage apparatus for placing a substrate to be surface-processed thereon. A substrate 9 is placed on a placing surface 22 of a stage 21. The substrate 9 is surface processed. After the surface processing, the substrate 9 is lifted by an up/down mechanism 30. During the lifting of the substrate, gas g2 is ejected from an ejection hole 46 of a nozzle 42 toward a gap between the substrate 9 and the placing surface 22. The ejection hole 46 is disposed outside of the placing surface 22 in plan view.
    Type: Application
    Filed: November 3, 2010
    Publication date: May 3, 2012
    Inventors: Yoshinori NAKANO, Satoshi MAYUMI, Kenichiro MIYASATO, Takashi YOSHIZAWA, Yutaka MIYAJIMA
  • Publication number: 20120007297
    Abstract: A machine tool for processing workpieces includes a processing device from which processed products to be discharged can be produced from a workpiece; and a discharge device including a discharge flap that can be pivoted into a discharge position inclined downwards relative to a horizontal position in order to discharge processed products and which defines a discharge direction in the discharge position, the discharge flap comprising a part support disposed along the upper side of the discharge flap along which the processed products move during discharge in the discharge direction, where the part support has at least two support regions which extend in the discharge direction and which are configured to accommodate different types of processed products.
    Type: Application
    Filed: July 8, 2011
    Publication date: January 12, 2012
    Inventors: Detlef Breitling, Andreas Bunz
  • Publication number: 20110200414
    Abstract: An organic light-emitting (OLED) display panel cell transfer apparatus that includes: a base; a scribing table to cut OLED display panel sticks into cells; a cell transfer unit disposed above the base, to transfer the cells from the scribing table to a loading location; a first shuttle to receive the cells from the cell transfer unit, at the loading location, and to transfer the cells from the loading location to a testing location; and a second shuttle to receive the cells from the cell transfer unit, at the loading location, and to transfer the cells from the loading location to the testing location.
    Type: Application
    Filed: September 15, 2010
    Publication date: August 18, 2011
    Applicant: Samsung Mobile Display Co., Ltd
    Inventor: Jae-Pil LEE
  • Publication number: 20100314814
    Abstract: A corralling utensil with associated cutting board (10). The corralling utensil (40) quickly, easily and accurately gathers and moves food or other items around and off the cutting board (20) to another location, and may be used separately from the cutting board (20) on other surfaces such as tables, counters, butcher blocks and chopping mats. The corralling utensil (40) may be rotated and/or change shape to facilitate better focusing of cut food into small containers. The corralling utensil (40) may be removably stored in, on, or to a designated area of the associated cutting board (20) for convenient storage and use.
    Type: Application
    Filed: June 6, 2010
    Publication date: December 16, 2010
    Inventor: Eric S. Zeitlin
  • Patent number: 7578897
    Abstract: Provided is a rubber member sticking device which prevents a sheet material held from becoming deformed and stretching during a separation operation, thus suppressing loss of energy and eliminating traces of vacuum holes. When an unvulcanized rubber sheet 12 is stuck, the unvulcanized rubber sheet 12 is supported by a separating surface 14A of a flat plate 14 and fitting surfaces 19A of a lifting member 16 without a difference in level being created therebetween. In this state, the unvulcanized rubber sheet 12 is in close contact with the fitting surfaces 19A of the lifting member 16. When the unvulcanized rubber sheet 12 is separated, a hydraulic jack 20 lowers the lifting member 16 to create a difference in level between the separating surface 14A of the flat plate 14 and the fitting surfaces 19A of the lifting member 16 so that the unvulcanized rubber sheet 12 is supported only by the separating surface 14A of the flat plate 14.
    Type: Grant
    Filed: February 28, 2003
    Date of Patent: August 25, 2009
    Assignee: Bridgestone Corporation
    Inventor: Shoju Suzuki
  • Publication number: 20080068812
    Abstract: A printed board includes a printed board body and throwaway boards provided on opposite sides of the printed board body through joining portions spaced away from each other in a longitudinal direction. Bores are provided in areas bridging the joining portions and throwaway boards. The bores can receive guide pins on a conveying unit for carrying the printed board to an electronic element mounting apparatus. The joining portions and throwaway boards can be removed from the printed board body after mounting the electronic elements on the printed board. This structure can minimize a width of a throwaway board and reduce total costs without lowering mounting efficiency of electronic elements in an electronic element mounting step.
    Type: Application
    Filed: September 19, 2007
    Publication date: March 20, 2008
    Inventors: Masahiro Tagano, Teruyuki Kitahara
  • Patent number: 7165317
    Abstract: The present invention is an object to provide an apparatus or a method making it possible to easily effect connection between additional electrodes, etc. and lead electrodes when performing a processing for achieving a predetermined throat height value or crown processing or the like and making it possible to measure the requisite lapping amount. For achieving the object, a flexible electrode extension sheet is used which consists of a portion for retaining a ceramic bar in which element portions are formed and a portion where there are formed wirings respectively in correspondence with the elements and adapted to be connected to these elements, in which these wirings, which can be easily connected to an external measurement system, are electrically connected to the elements, whereby the lapping amount is easily obtained from the characteristic amount of the elements in the lapping process.
    Type: Grant
    Filed: June 15, 2001
    Date of Patent: January 23, 2007
    Assignee: TDK Corporation
    Inventors: Hiroshi Shindo, Akio Ogawa, Kazushige Tohta
  • Patent number: 6578257
    Abstract: A media rework tool for discs and/or a spindle motor carrying a disc pack is disclosed that has a slider plate mounted on a base for lateral movement between a retracted position and an extended position. The slider plate holds a spindle motor with a disc pack mounted on it, and moves between the two positions. The tool includes a gripper assembly having a plurality of opposing arms for grasping predetermined discs within a disc pack on the spindle motor when the slider plate is in the retracted position. The gripper assembly raises the predetermined discs and any intermediate spacer rings upward for temporary storage on a media guide to allow the remainder of the disc pack to be reworked, such as for replacement of a defective disc or spindle motor when the slider plate is laterally moved to the extended position. Following reworking of the remainder of the disc pack, the spindle motor is returned to its centered position relative to the media guide and the gripper assembly.
    Type: Grant
    Filed: December 30, 1999
    Date of Patent: June 17, 2003
    Assignee: Seagate Technology LLC
    Inventor: Keng Meng Albert Wang
  • Patent number: 6467157
    Abstract: An apparatus is provided for constructing a segmented annular permanent magnet from a predetermined number of previously magnetized segments of predetermined shape and size comprising a rotateable carrousel, at least two of a plurality of removable ferromagnetic segments, an introducing means and a removing means.
    Type: Grant
    Filed: January 26, 2000
    Date of Patent: October 22, 2002
    Assignee: Odin Technologies, Ltd.
    Inventors: Avinoam Livni, Yoav Katz
  • Patent number: 6183188
    Abstract: A manually operated pallet changer system for use with automatic machine tools includes a pallet changer and a compatible machine tool mounted pallet receiver. The pallet changer includes a massive, floor supported base to which a cantilevered first platform is pivotally attached for rotation between a pallet-exchange position and a work-setup position. A second platform rests atop the first platform and supports a pair of work pallet guides. The two platforms are rotatably attached near their centers so that the pallet guides can be interchanged by rotating the upper platform about its center by 180°. The configuration permits the platforms to be rotated as a unit away from a machine tool to the work-setup position. Work pallets are assembled and then the platforms are rotated together into the pallet-exchange position in which one of the pallet guides is aligned for transferring a work pallet to the machine tool mounted pallet receiver.
    Type: Grant
    Filed: April 21, 1997
    Date of Patent: February 6, 2001
    Inventors: Steven J. Randazzo, Mario F. Solorio, Hao Wu
  • Patent number: 5901624
    Abstract: An apparatus for transferring workpieces to and from the chuck of a machine tool. A gripper arm is mounted to the machine frame for selectively axial and rotational movement on a shaft having helical and longitudinal threads on the surface thereof. A first nut is rotatably mounted to the machine frame for axial advancement of the shaft and a second nut is rotatably mounted for rotational advancement. The apparatus may also include a panel mounted to the machine frame between a transfer station and the chuck. An opening in the panel adjacent the transfer station has surfaces which mate with corresponding surfaces of the gripper arm so as to preclude the passage of debris to the transfer station. The apparatus may also include an apparatus for sequentially transferring a series of workpieces. The apparatus has a two gripper jaws and a compressible pusher plate therebetween which is compressed as it is moved towards an opening in an input chute so that a workpiece may roll between the jaws of the gripper.
    Type: Grant
    Filed: February 13, 1998
    Date of Patent: May 11, 1999
    Assignee: Kitagawa Iron Works Co., Ltd.
    Inventor: Yoshio Shiramasa
  • Patent number: 5355575
    Abstract: Method for transfer of a pallet from the slant table upon which it is made to a stacker or other location by using dual arms with endless chains thereon for moving the pallet after lifting the arms from a storage position just below an angled table surface to a horizontal position such that the upstream end of the pallet is raised. The pallet may be transferred by the chains to a starting position and raised and locked in a stack of pallets before another pallet begins the same cycle. The process may be made automatic by providing an air cylinder supplied by an air compressor both for lifting the upstream end of the pallet and raising the pallet into a stack of pallets and providing a duly connected limit switch for stopping the pallet where it is to be stacked.
    Type: Grant
    Filed: February 4, 1993
    Date of Patent: October 18, 1994
    Inventor: M. L. Self
  • Patent number: 4566837
    Abstract: An automatic work exchanging apparatus for transferring works between a transport truck running in front of plural machine tools and the plural machine tools. The automatic work exchanging apparatus is made to run along the row of the machine tools, and a working face of the apparatus is made vertically movable so that the working face is adjustable according to the height of the table of each machine tool.
    Type: Grant
    Filed: October 12, 1984
    Date of Patent: January 28, 1986
    Assignee: Murata Kikai Kabushiki Kaisha
    Inventors: Tadataka Shiomi, Kouichi Nabika, Takashi Kawagoe
  • Patent number: 4494282
    Abstract: A jig table apparatus for a machine tool is provided. The apparatus comprises first and second jig tables for holding workpieces thereon. A base for positioning adjacent a machine tool and elevating table are provided at a work station for supporting and raising and lowering one of the jig tables at the work station. Also provided is a turntable, a work attaching and detaching station for supporting one of the jig tables and for moving the jig tables to a position for removing a workpiece therefrom and for placing a workpiece thereon, and a transfer device is mounted on the base for moving the first and second jig tables between the working station and the work attaching and detaching stations. The transfer device includes claw members which are coupled to the elevating table and are responsive to the movement thereof, such that the claw members are moved to an engaging position when the elevating table is raised and to a disengaging position when the table is lowered.
    Type: Grant
    Filed: February 1, 1982
    Date of Patent: January 22, 1985
    Assignee: Honda Giken Kogyo Kabushiki Kaisha
    Inventors: Jinsei Ida, Yosio Hagimoto, Masao Takahashi, Saburo Azuma
  • Patent number: 4433835
    Abstract: A wafer chuck and a wafer loading and unloading system wherein a flat support surface of the chuck has a plurality of peaks and valleys, with the peaks minimizing contact with the wafer, yet having sufficient contact area for wafer support without deformation. The peaks are provided with a top edge serving to dislodge particles from a wafer surface when loading the wafer onto the chuck. The loading system includes wafer pushing members for bringing a wafer to a desired position on the support surface.
    Type: Grant
    Filed: November 30, 1981
    Date of Patent: February 28, 1984
    Assignee: Tencor Instruments
    Inventor: William R. Wheeler