Abstract: An assembly, more particularly a turbomachine, includes a shaft, which extends along an axis, a shaft seal device for sealing an annular gap between the shaft and a stator in order to seal a process fluid chamber in relation to the environment. The shaft seal device has a ferrofluid shaft seal. At the process fluid chamber, the shaft seal device includes, in addition to the ferrofluid shaft seal, an additional shaft seal. The ferrofluid shaft seal is arranged at the annular gap axially between the first shaft seal and the environment. A pressure sink is provided at the annular gap axially between the additional shaft seal and the ferrofluid shaft seal.

Abstract: Methods of fabricating a manhole insert gasket on a manhole insert flange of a manhole insert may include inverting a manhole insert having a manhole insert flange; forming a manhole insert gasket by dispensing a liquid gasket material onto the manhole insert flange along at least one circular dispensing path, the liquid gasket material including a synthetic silicone elastomer; and curing the gasket material.

Abstract: Disclosed herein is a flat panel display (FPD) manufacturing apparatus for performing a desired process for a substrate positioned in a chamber after establishing a vacuum atmosphere in the chamber. The vacuum chamber is divided into a chamber body and an upper cover to ensure easy opening/closing operations of the upper cover.

Abstract: Provided is a degassing container for a refrigerator in which a portion of air within a storage space is forcedly discharged to allow the storage space to become a low pressure state. The degassing container includes a case, a door, a gasket, a pressing part, and a degassing adjustment part. The case has an opened side. The door selectively shields the opened side of the case. The gasket is interposed between the door and the case and elastically deformed and closely attached when the door is shielded. The pressing part is provided in the door and the case and selectively closely attaches the door by a rotation operation. The degassing adjustment part selectively enters and exits air within the case by operating the pressing part. Therefore, the refrigerator has improved storage performance.

Abstract: A sealing part that is inexpensive and enable excellent durability to be secured without the need for a predetermined sealing space as would be required for a double sealing structure. A sealing part seals an inside of a reduced pressure vessel from an outside, in which a high-elasticity polymeric material-eroding eroding substance is present and which is comprised of a substrate processing apparatus carrying out predetermined processing on a substrate housed in the reduced pressure vessel. The sealing part has a radical sealing member and a vacuum sealing member. The radical sealing member is disposed on an inside side of the reduced pressure vessel and is resistant to the eroding substance. The vacuum sealing member is made of the high-elasticity polymeric material and is disposed on an outside side of the reduced pressure vessel. At least one refuge space is formed through at least part of the radical sealing member and at least part of the vacuum sealing member being separated from one another.

Abstract: The invention relates to an improved O-ring seal for use as a high vacuum seal. A limitation of standard O-ring seals is the permeation of water through the O-ring. Especially for instruments in which parts are kept at a cryogenic temperature, such as a cryogenic electron microscope, the presence of water in the vacuum is a problem, as this results in ice growth on the cryogenic parts. As a solution often a double O-ring seal is used, or a metal seal. Both of these solutions have severe draw-backs. The invention proposes to place the O-ring in a channel in which dry gas, such as dry nitrogen, is blown. In this way no water can permeate through the O-ring, resulting in a reduced base pressure and highly reduced ice growth.

Abstract: Rotating pressure distributor (I) for a carousel-type machine for treating hollow bodies in a plurality of identical treatment stations, comprising two rings, (2) fixed and (3) rotating, in sealing contact, the ring (3) having orifices (6) each adapted for being connected to a station and opening onto the contact face (5) thereof, the ring (2) having at least one aperture (7) which may be connected to a pressure source and opening onto the contact face (4) thereof by being on the trajectory of the orifices (6); grease is spread between the contact faces (4, 5) of the two rings (2, 3) to provide the seal; at least one annular channel (13) covers the annular opening (19) of the joint plane (P) and is connected to the atmosphere; in the channel respective flanges (14) are mutually interlaced without contact with one another, forming chicanes; the channel is filled with grease.

Abstract: A vacuum apparatus of rotary motion entry is disclosed, which comprises: a shaft sleeve, disposed on a cavity wall of a vacuum system; a rotary shaft, ensheathed by the shaft sleeve; and a transmission set, connected to the rotary shaft for driving the same; wherein, the rotary shaft is disposed passing through a hole formed on the base of the shaft sleeve while there are a first bearing, a second bearing, a sealing ring and a shaft seal being arranged separately inside the hole. Moreover, the shaft seal has a flake-like lip flange formed extending toward the center of the hole, that is capable of being extended away from the vacuum system by the inserting of the rotary shaft into the hole, and thereby, enabling the lip flange to engage with the rotary shaft tightly by the atmospheric pressure and thus isolating the outside world from the vacuum system.

Abstract: A process chamber 10 comprising a container (12), a lid (14), and a sealed interface (16) therebetween. The container's interface surface (30) and/or the lid's interface surface (32) includes at least one groove (36) in which a seal (40) is situated. The seal (40) comprises an elastomeric element (50) and a metallic element (60). The elastomeric element (50) and the metallic element (60) can be arranged and adapted to seal the chamber's interface (16) sequentially during its conversion to a sealed condition. And/or the elastomeric element (50) and the metallic element (60) can be arranged and adapted to seal the chamber's interface in series once the lid (14) is in its sealed condition.

Abstract: The present invention is a compound sliding seal unit of markedly reduced size and height dimensions which is employed as a discrete assembly for both the passage across and the at-will height adjustment of a mounted, rotatable shaft which extends from the atmospheric environment portion into the vacuum environmental portion of an ion implanter apparatus. The extended, rotatable shaft is typically fashioned as either a rotatable hollow tube or conduit (suitable for the passage of electrical components) and/or as a rotatable support suitable for the mounting of a pivotal scanning radial arm translation system. The manner of construction and the substantially reduced height dimensions of the compound sliding seal unit permits on-demand changes of height for the mounted, rotatable shaft which extends from the atmospheric environment and extends through the compound unit into the confined and limited spatial volume of a vacuum environment within a conventional ion implantation apparatus.

Abstract: A sealing system is disclosed. One such sealing system includes a first vacuum chamber and a second vacuum chamber. The sealing system includes a first sealing unit having a proximal end and a distal end, the proximal end of the first sealing unit disposed on the first vacuum chamber. The sealing system includes a second sealing unit having a distal end and a proximal end, the distal end of the second sealing unit disposed on the distal end of the first sealing unit and the proximal end of the second sealing unit disposed on the second vacuum chamber. One of the sealing units is concave, while the other is convex. The sealing system also includes a first o-ring, a second o-ring, and a third o-ring.

Abstract: A charged particle beam examination equipment for examining and measuring a semiconductor wafer, comprising a wafer exchange portion for exchanging an unexamined wafer and an examiner wafer with each other, which has a first arm longitudinally sliding for reciprocation, a first wafer gripping part provided to the distal end of the first arm, for gripping/releasing the wafer, a second arm longitudinally sliding for reciprocation, and a second wafer gripping part provided to the distal end of the second arm, for gripping/releasing the wafer. The apparatus may shorten the time required for exchange of the wafers so as to enhance the throughput during examination and measurement of the wafers.

Abstract: A sealing mechanism comprises a support member forming part of the semiconductor producing apparatus which has a vacuum chamber, a rotation shaft rotatably received in the support member, and at least three seal rings axially spaced apart from each other between the support member and the rotation shaft to form a first fluid chamber close to the atmosphere and a second fluid chamber close to the vacuum chamber. The first fluid chamber is vacuumized to have a first pressure, and the second fluid chamber is also vacuumized to have a second pressure which is lower than the first pressure. The first and second fluid chambers work together to enhance the sealing performance of the sealing mechanism.

Abstract: A seal member internally seals a depressurized chamber constructed by joining a plurality of plates. The seal member includes a linear portion for sealing a linear joint of the depressurized chamber and a loop portion for sealing around a corner of the depressurized chamber by being pressed against internal walls of the plates forming the corner. The loop portion is arranged to enclose the corner of the depressurized chamber. The loop portion is fixed by using a support block held at the corner and a corner pressing member joined to the plates forming the corner. The loop portion is secured between a support surface of the support block and the corner pressing member.

Abstract: A sealing mechanism comprises a support member forming part of the semiconductor producing apparatus which has a vacuum chamber, a rotation shaft rotatably received in the support member, and at least three seal rings axially spaced apart from each other between the support member and the rotation shaft to form a first fluid chamber close to the atmosphere and a second fluid chamber close to the vacuum chamber. The first fluid chamber is vacuumized to have a first pressure, and the second fluid chamber is also vacuumized to have a second pressure which is lower than the first pressure. The first and second fluid chambers work together to enhance the sealing performance of the sealing mechanism.

Abstract: A shaft sealing module is proposed for sealing a shaft which extends driving rotationally from a normal pressure chamber into a high vacuum chamber. It is essential for the shaft sealing module according to the invention that the dynamic seal of the shaft takes place not on the shaft itself but on a bushing mounted rotatably in a housing through which is guided a shaft and which is held on the shaft in friction connection, statically sealed, by elastic rings so that the bushing rotates with the shaft. The dynamic seal between the bushing and the housing is achieved by several radial shaft sealing rings which are preferably arranged so that between them is provided a prevacuum chamber with intermediate evacuation so that a two-stage dynamic seal is provided, where the prevacuum acts on the static seal between the bushing and the shaft in the sense of a gas penetration barrier towards the high vacuum chamber.

Abstract: Herein disclosed is a shaft sealing apparatus which comprises a vacuum casing formed with a vacuum chamber, a driving shaft having an outer cylindrical surface and movably extending in the vacuum chamber of the vacuum casing, and a sealing ring in the form of an annular ring shape and including a sealing lip held in contact with the outer cylindrical surface of the driving shaft, an annular spring member operative to impart a force to the sealing lip to ensure that the sealing lip is held in tight contact with the outer cylindrical surface of the driving shaft, and a peripheral portion radially outwardly extending from the sealing lip, in which the outer cylindrical surface of the driving shaft is smaller in surface roughness Ra than 0.1 (?m).

Abstract: Very low moisture o-rings are prepared by placing standard o-rings under vacuum in an inert atmosphere for a period of time sufficient to achieve a desired outgassing rate. Heat is not applied. While the o-rings are under vacuum, moisture is removed from the o-rings via diffusion transport.

Abstract: A holder driving device has: a holder holding a substrate, a shaft supporting the holder, a driver for driving the shaft reciprocatingly and linearly in the direction along the shaft, a bearing unit having mechanical linear motion bearings for supporting the shaft thereon and having one or more stages of exhaust chambers surrounding the shaft; a vacuum pump for vacuum-pumping the exhaust chambers of the bearing unit; and a gas replacement mechanism for supplying dry gas, the humidity of which is lower than that of at least the surrounding atmosphere and the pressure of which is positive, from the outside of the bearing unit to at least the neighborhood of an atmosphere-side entrance portion of a gap between an end portion of the bearing unit one the side opposite to the vacuum vessel and the shaft passing the end portion, so as to replace the atmosphere near the entrance portion by the dry gas.

Abstract: A sealing mechanism comprises a support member forming part of the semiconductor producing apparatus which has a vacuum chamber, a rotation shaft rotatably received in the support member, and at least three seal rings axially spaced apart from each other between the support member and the rotation shaft to form a first fluid chamber close to the atmosphere and a second fluid chamber close to the vacuum chamber. The first fluid chamber is vacuumized to have a first pressure, and the second fluid chamber is also vacuumized to have a second pressure which is lower than the first pressure. The first and second fluid chambers work together to enhance the sealing performance of the sealing mechanism.

Abstract: The invention relates to a fluid connector for sealing an interface between first and second fluid passages in a plasma processing apparatus. The fluid connector includes a first end member having a first geometry. The first geometry is arranged to substantially seal a first mating region of the first fluid passage. The fluid connector further includes a second end member having a second geometry. The second geometry is arranged to substantially seal a second mating region of the second fluid passage and the second geometry is configured differently than the first geometry. The fluid connector additionally includes an opening that extends through the first end member and the second end member through which a fluid may pass for use by the, semiconductor processing apparatus so as to fluidly couple the first fluid passage to the second fluid passage.

Abstract: A method and apparatus for maintaining the pressure in an overclad tube at a reduced level despite axial movement of the tube during performance of an RIT overcladding operation. The overcladding tube is held by means of the lathe chuck, and a tubular extension of a rotary union member extends into the tube. The distal end of the extension has a sealing member replaceably mounted thereon which forms a seal with the interior wall of the tube. A vacuum source thus is enabled to connect to the interior of the overcladding tube through the rotary union, the extension tube, and the seal.

Abstract: A particulate free air bearing and seal is formed between a slide and an air bearing body. Pressurized gas is supplied to an air bearing region between the slide and the air bearing body. The pressurized gas causes the slide to float on the air bearing body thus avoiding particulate generation due to friction between the slide and the air bearing body. Vacuum is simultaneously supplied to a collector. The collector captures the pressurized gas and any particulates entrained within the pressurized gas preventing the particulates from entering and contaminating a clean area.

Abstract: A vacuum seal and fluid bearing apparatus for reducing the distortion of the bearing surfaces of a gas bearing is described. The apparatus includes a stator attached around an aperture in a vacuum housing and having a first planar fluid bearing surface. A movable member for closing the vacuum housing aperture having a second fluid bearing surface extending parallel to the first bearing surface is adapted to be supported spaced from the first bearing surface by a bearing fluid. A vacuum seal is provided between the movable member and the stator. In use, a force due to atmospheric pressure acts on the movable member in a direction normal to the bearing surfaces and a movable member includes a pressure relief structure to reduce any bending moment produced in the movable member by the force.

Abstract: A sealing mechanism comprises a support member forming part of the semiconductor producing apparatus which has a vacuum chamber, a rotation shaft rotatably received in the support member, and at least three seal rings axially spaced apart from each other between the support member and the rotation shaft to form a first fluid chamber close to the atmosphere and a second fluid chamber close to the vacuum chamber. The first fluid chamber is vacuumized to have a first pressure, and the second fluid chamber is also vacuumized to have a second pressure which is lower than the first pressure. The first and second fluid chambers work together to enhance the sealing performance of the sealing mechanism.

Abstract: A fluid bearing vacuum seal assembly comprises an annular stator with first and second opposed surfaces, at least part of the first surface defining a first bearing surface. The stator also defines an aperture having a wall extending between the first and second surfaces. The assembly also comprises a rotor with first and second opposed surfaces, the second surface defining in part a second bearing surface which is supported relative to the first bearing surface in use so that the rotor is rotatable relative to the stator. A cylindrical wall projects axially from the second surface of the rotor through the aperture in the stator. An annular flange projects radially outwardly from the cylindrical wall adjacent to the second surface of the stator. At least one annular differential pumping channel is defined in each of the first and second surfaces of the stator and the wall which connects the first and second surfaces.

Abstract: A fluid bearing and seal for an ion implanter is disclosed. The fluid bearing has a stator attached to a base and a moving member provided over the stator so that a fluid bearing can be formed between the opposing surfaces of the stator and the moving member. Either the base or the stator has a locating member extending normal to the bearing surface and the other one of either the base or the stator has a recess shaped to receive the locating member. A fluid seal enables the member to slide in the recess in the normal direction to seal off an enclosed volume between the member and the other one of either the stator or the base. A plurality of fixtures are distributed at points in a plane parallel to the bearing surface to fix the locating member and the other one of either the stator or the base together at these points to form the enclosed volume. The number of the fixtures is the minimum necessary so that the bearing surface of the stator remains undistorted.

Abstract: A sealing construction for loading a seal against a suction roll in a paper machine includes a seal having a wear surface, side surfaces and a lower surface. The seal is fitted from its holder to the structure of a suction box which is inside the suction roll. The seal essentially covers the whole operating length of the suction roll, extending from its wear surface to the inner face of the mantle of the suction roll. The seal is moveable in the direction of the radius of the suction roll in the holder by a pressure effect that is applied directly onto the lower surface of the seal. Negative pressure or vacuum can be applied during operation to draw the seal into its holder to reduce seal wear.

Abstract: A honeycomb structure seal is provided for the casing of a turbine, particularly a gas turbine, having a base plate facing the casing wall as well as a brush-against section facing the tips of the turbine rotor blades. The seal includes a multi-layered construction such that the base plate is adjoined by an air-evacuated honeycomb structure section which is therefore insulating in partial areas by a vacuum and which is covered by an intermediate plate, on whose side facing away from the honeycomb structure section the brush-against section is arranged. The intermediate plate is soldered to the honeycomb structure section under vacuum conditions. The brush-against section can also be constructed as a honeycomb seal, in which case the honeycomb cells of the honeycomb structure section have a significantly larger partial surface than the honeycomb cells of the brush-against section.

Abstract: Gas purification resins are encapsulated in deformable, permeable polymer sheaths to form purification rings, gaskets or seals. A primary source of contaminants in advanced vacuum processors equipped with vacuum load-lock systems and process gas purifiers is from the leakage of outside ambient contaminants around O-ring seals. Using gas purification rings, gaskets or seals properly placed inside or outside of the outer O-ring seal, the level of contaminants (particularly hydrocarbons, oxygen and moisture) may be significantly reduced or eliminated. The gas purification ring is preferably a hydrocarbon and/or oxygen and/or moisture absorbing and/or adsorbing material encased within a contaminant permeable casing. The gas purification ring can be round or flattened and is preferably more resilient than the O-rings adjacent thereto which form the seal. An adhesive can be placed around the casing holding the purification resin to prevent movement from its purifying location.

Abstract: An anti-freezing seal for vehicle compartments, doors, trunks, etc. In cold climates, one of the problems is freezing shut of vehicle doors, for example, due to the moisture which accumulates on the seals during the daytime and then freezes at night. This is a problem for all vehicle compartment lids using seals to prevent leakage of moisture or dust into the compartment and can be resolved by heated or vacuum actuated seals. A heated anti-icing seal may be similar in construction with various existing compartment lid or door seals, which include a bulb or compression section, means for attaching the bulb to a compartment flange, a reflective shield, heat strip, and electrical wires or electric clips adapted to be connected to a DC or AC power supply via, for example, a switch, thermostat, and timer. The attaching means may be an adhesive or a seal setting flange compartment having grippers.

Abstract: An arrangement is provided for sealing the opening of a rotor housing under a low pressure, through which opening a shaft for a spinning rotor extends, which shaft is supported outside of the rotor housing. This arrangement comprises a sealing disk, which is supported floating relative to the opening and which is pressed against a bearing surface by means of a spring element. The floating sealing disk comprises a through bore hole having a narrow tolerance relative to the shaft. The spring element presses against the effect of the low pressure.

Abstract: A surface maintenance machine has a body, wheels for supporting the body, a source of cleaning solution on the body and a conduit for applying the cleaning solution to a surface to be cleaned. There are scrub brushes on the body and there is a squeegee carried by the body. A container for used cleaning solution is located on the body and there is a vacuum system, including a vacuum fan, for removing used cleaning solution from adjacent the squeegee and conveying it to the used cleaning solution container. The vacuum system includes a conduit between the used cleaning solution container and the vacuum fan. There is a seal extending about this conduit, with the exterior of the seal being exposed to atmospheric pressure and the interior being exposed to the less than atmospheric pressure of the vacuum system.