Abstract: A sealing part that is inexpensive and enable excellent durability to be secured without the need for a predetermined sealing space as would be required for a double sealing structure. A sealing part seals an inside of a reduced pressure vessel from an outside, in which a high-elasticity polymeric material-eroding eroding substance is present and which is comprised of a substrate processing apparatus carrying out predetermined processing on a substrate housed in the reduced pressure vessel. The sealing part has a radical sealing member and a vacuum sealing member. The radical sealing member is disposed on an inside side of the reduced pressure vessel and is resistant to the eroding substance. The vacuum sealing member is made of the high-elasticity polymeric material and is disposed on an outside side of the reduced pressure vessel. At least one refuge space is formed through at least part of the radical sealing member and at least part of the vacuum sealing member being separated from one another.

Abstract: A fluorine-containing elastomer having a copolymer composition, which comprises (a) 50-85 mol. % of vinylidene fluoride, (b) 0-25 mol. % of tetrafluoroethylene, (c) 7-20 mol. % of perfluoro(methyl vinyl ether), (d) 2.5-15 mol. % of CF2?CFO[CF2CF(CF3)O]nCF3 (n: 2-6), (e) 0.1-2 mol. % of CF2?CFO[CF2CF(CF3)O]mCF2CF3 (m: 2-6), and (f) 0.1-2 mol. % of RfX (Rf: an unsaturated fluorohydrocarbon group having 2-8 carbon atoms, which can contain at least one ether bond, X: bromine or iodine), can provide a fluorine-containing elastomer composition, which comprises 100 parts by weight of the fluorine-containing elastomer, 0.1-10 parts by weight of an organic peroxide, 0.1-10 parts by weight of a polyfunctional unsaturated compound, and at least 2 parts by weight of an acid acceptor. The composition can give vulcanizates having a distinguished elongation at break at high temperatures such as 100° C., and distinguished compression set characteristics at low temperatures such as 0° C.

Abstract: A seal arrangement for providing a seal between a nuclear reactor in-core instrument housing and an instrument contained within the housing includes a lower seal assembly surrounding an outer portion of the in-core instrument housing, an upper seal assembly surrounding an outer portion of the in-core instrument, a seal housing enclosing the lower and upper seal assemblies, and lower and upper compression assemblies positioned on respective ends of the seal housing. The compression assemblies each include a drive nut and a compression collar. The compression collars engage and apply an axial load on the seal assemblies to maintain a reliable seal between the seal housing and the outer portion of the in-core instrument housing, and between the seal housing and the outer portion of the in-core instrument.

Abstract: A seal arrangement for providing a seal between a nuclear reactor in-core instrument housing and an instrument contained within the housing includes a lower seal assembly surrounding an outer portion of the in-core instrument housing, an upper seal assembly surrounding an outer portion of the in-core instrument, a seal housing enclosing the lower and upper seal assemblies, and lower and upper compression assemblies positioned on respective ends of the seal housing. The compression assemblies each include a drive nut and a compression collar. The compression collars engage and apply an axial load on the seal assemblies to maintain a reliable seal between the seal housing and the outer portion of the in-core instrument housing, and between the seal housing and the outer portion of the in-core instrument.

Abstract: A method and assembly for utilizing a gasket to protect an exposed die from damage, such as chipping and cracking, caused by external forces such as shock, vibrations, installation and/or handling, as well as to prevent electromagnetic interference (EMI) emissions from the exposed die.

Abstract: A method for providing a seal between two pipes of the type in which one circumferential end portion of one pipe has an enlargement to provide an internal circumferential channel into which the unenlarged end of the other pipe can be telescoped, the space between the interior of this channel and the exterior of the inner pipe end containing an annular seal ring of the type having a K cross-section in which the oblique arms of the K constitute sealing lips facing radially and obliquely inwardly of the channel, one canted axially inwardly and the other canted axially outwardly of the channel.