Pivoted Jaw Patents (Class 279/106)
  • Patent number: 11292098
    Abstract: A hub chuck, includes a clamping center shaft, a top cover plate, a middle step gear and a tapered bottom plate. In a three-layer structure of the cover plate, the step gear and the tapered bottom plate of the chuck, the maximum outer ring diameter of the cover plate is smaller than that of the step gear, the minimum outer ring diameter of the step gear is smaller than that of the tapered bottom plate, the lower part of the step gear and the upper surface of the tapered bottom plate form a ring groove, a lower rim of a hub can be caught in the ring groove, and tapered teeth at the upper part of the step gear can be pressed to an inner wheel lip.
    Type: Grant
    Filed: March 9, 2020
    Date of Patent: April 5, 2022
    Assignee: CITIC DICASTAL CO., LTD.
    Inventors: Xinghua Liu, Zhiliang Zhang, Zhiqiang Lu, Rui Liu, Di Cao
  • Patent number: 11192190
    Abstract: A blade attachment-detachment assisting apparatus includes a nut rotating part having an engagement pin that engages with an engagement hole of a nut, a nut grip part that grips an annular groove of the nut, a housing that supports the nut rotating part rotatably by a predetermined angle, and a lock mechanism. The nut rotating part is capable of advancing and retreating, relative to the housing, to a protrusion position and a fixing position at which engagement between the nut grip part and the nut is kept, and is fixed to the housing with the intermediary of a spring. The lock mechanism includes an inside surface by which advancing and retreating of the nut rotating part are restricted through engagement of the nut rotating part with the housing when the housing is rotated in one direction at the fixing position to which the nut rotating part has been pushed.
    Type: Grant
    Filed: May 12, 2020
    Date of Patent: December 7, 2021
    Assignee: DISCO CORPORATION
    Inventor: Zhibo Su
  • Patent number: 11000347
    Abstract: A subassembly for a dental care or surgical handpiece comprises a push button (16) comprising a contact surface (23) adapted to receive a manual pressure able to actuate the push button (16) slidably in a sliding direction. This subassembly further comprises a piece (21) for retaining the push button (16), as well as a bayonet device (28a, 33, 35) able to keep assembled the push button (16) and the retaining piece (21).
    Type: Grant
    Filed: July 13, 2018
    Date of Patent: May 11, 2021
    Assignee: Bien-Air Holding SA
    Inventor: Sebastien Juillerat
  • Patent number: 10612539
    Abstract: A rod clamp assembly including a first clamp member pivotally connected to a second clamp member, a handle pivotally connected to the first clamp member, and a lock bolt pivotally connected to the handle. The first and second clamp members each include a semi-cylindrical groove. A lock end of the lock bolt is configured to engage a receptacle of the second clamp member to pull the first and second clamp members together. An elongated portion of the handle is rotated to a locked position in which the first and second clamp members are secured together. A base of the handle, which engages the first clamp member, may include a notch for providing a quick close and quick open. Optionally, the rod clamp assembly includes a safety lock assembly, which engages the elongated portion of the handle to secure the handle in the locked position.
    Type: Grant
    Filed: April 18, 2018
    Date of Patent: April 7, 2020
    Assignee: NEO Design Group, LLC
    Inventors: Alberto Zubia, Daniel Robert Vasquez
  • Patent number: 10577181
    Abstract: The adjustable diameter pipe grabber is configured for use with a pipe. The adjustable diameter pipe grabber is a mechanical device. The adjustable diameter pipe grabber captures the pipe for transport. The adjustable diameter pipe grabber engages the pipe from the interior surface of the pipe. The adjustable diameter pipe grabber comprises a tube and a capture structure. The tube contains the capture structure. The tube inserts into the pipe. The capture structure is a spring-loaded device. The capture structure applies pressure to the interior surface of the pipe such that the friction between the capture structure and the interior surface of the pipe allows the adjustable diameter pipe grabber to capture and move the pipe.
    Type: Grant
    Filed: May 21, 2019
    Date of Patent: March 3, 2020
    Inventor: Shannon Williams
  • Patent number: 10434625
    Abstract: A latching mechanism for a tool spindle or mandrel that latches by pivotally extending a plurality of tensioned arms from a tensioned seated state to a tensioned locked state through rotation of a lock ring pivotally deploying the arms from their nested seated state into a blade engaging position of a larger radius than the radius of the lock ring with the arms in their nested position.
    Type: Grant
    Filed: September 4, 2016
    Date of Patent: October 8, 2019
    Inventors: Marjan Majcen, Beverly Majcen, Robert Vreznik
  • Patent number: 10252348
    Abstract: A compensating chuck for concentrically clamping workpieces. The chuck has a drive unit having two pairs of entrainment members, wherein the entrainment members are preferably slidingly mounted, are respectively movable in paired relationship, and are so coupled to a respective one of the main jaws that a relative movement of a respective pair causes a synchronous movement of adjacent main jaws and that both a relative movement relative to each other with respectively different movement components and also a synchronous movement of the adjacent entrainment members in the same direction respectively causes a relative movement of adjacent main jaws.
    Type: Grant
    Filed: November 14, 2013
    Date of Patent: April 9, 2019
    Assignee: HVM Technology GmbH
    Inventor: Volker Henke
  • Patent number: 10179397
    Abstract: The present invention provides an apparatus, system and method for replacing seats utilizing J-shaped hooks on a puller shaft that may be compressed to pass through the seat and expand back to engage the seat from below for pulling upward and removal.
    Type: Grant
    Filed: May 24, 2016
    Date of Patent: January 15, 2019
    Inventor: Jacob Hunter
  • Patent number: 10166610
    Abstract: A compensation chuck for centrically clamping workpieces includes a housing, two pairs of mutually diametrally opposite base jaws for receiving corresponding clamping jaws, and a drive unit which is moveable preferably by power clamping having two pairs of drivable entrainment members. Two adjacent entrainment members are respectively coupled together by a first rocker and two further adjacent entrainment members are coupled together by a second rocker. There is also provided a coupling ring which guides a first entrainment member and a diametrally opposite second entrainment member in the peripheral direction tangentially relative to the clamping axis, such that a motion play is provided between the entrainment members and the coupling ring in the radial direction.
    Type: Grant
    Filed: February 18, 2016
    Date of Patent: January 1, 2019
    Assignee: HVM Technology GmbH
    Inventor: Volker Henke
  • Patent number: 10081063
    Abstract: An expanding locating pin assembly configured to locate and hold a part includes a housing, a locating pin, an actuating mechanism, and a controller. The housing is configured with a plurality of radial jaw guides and a part rest face. The locating pin has a plurality of jaws connected to and radially movable in the radial jaw guides and extending past the part rest face. The actuating mechanism synchronously moves the jaws to a radial position and applies a holding force to the part. The controller controls the radial position and the holding force of the jaws. The part rest face of the housing and the jaws of the locating pin are configured to receive the part in a located position. The jaws of the locating pin are configured to hold the part in the located position via the holding force and a friction force resulting from the holding force.
    Type: Grant
    Filed: August 19, 2015
    Date of Patent: September 25, 2018
    Assignee: GM Global Technology Operations LLC
    Inventors: Jianying Shi, Scott A. McLeod, Justin Jay Hackett, John Patrick Spicer
  • Patent number: 9782224
    Abstract: A device for selectively grasping a part of a separate elongated body extending through the device, includes at least three partially mobile jaw members defining between them a through hole of variable diameter depending on their mutual relative positioning, supporting and driving elements to which the jaw members are mounted and which are adapted to provide a coordinated motion to the members around the elongated body situated in the variable through hole, resulting in a closing or opening of the through hole. The jaw members have an elongated shape with two opposed ends and the supporting and driving elements include a circular or annular support body to which a first end of each jaw member is connected and a mobile annular driving body to which a second opposed end of each jaw member is connected.
    Type: Grant
    Filed: August 9, 2013
    Date of Patent: October 10, 2017
    Assignees: UNIVERSITE DE STRASBOURG (ETABLISSEMENT PUBLIC NATIONAL A CARACTERE SCIENTIFIQUE, CULTUREL ET PROFESSIONNEL), CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE (ETABLISSEMENT PUBLIC NATIONAL A CARACTERE SCIENTIFIQUE ET TECHNOLOGIQUE), INSTITUT HOSPITALO-UNIVERSITAIRE DE CHIRURGIE MINI-INVASIVE (GUIDEE PAR L'IMAGE), INSTITUT NATIONAL DES SCIENCES APPLIQUEES (ESTABLISSEMENT PUBLIC NATIONAL A CARACTERE SCIENTIFIQUE, CULTUREL ET PROFESSIONNEL)
    Inventors: Olivier Piccin, Nitish Kumar, Laurence Meylheuc, Laurent Barbe, Bernard Bayle, Francois Schmitt
  • Patent number: 9533355
    Abstract: The invention relates to a machine (1) for machining pipe ends. At least one centering device (8; 35) is associated to said machine, which centering device centers a tubular workpiece (5, 5?) in relation to an axis of rotation (D) of the machine for machining pipe ends extending in the center of the machine, the tubular workpiece either being stationary in the case of a rotating tool head (4) or rotating in the case in which the tubular workpiece is fastened in the machine chuck (9).
    Type: Grant
    Filed: July 31, 2013
    Date of Patent: January 3, 2017
    Assignee: SMS MEER GMBH
    Inventor: Karl-Josef Esser
  • Patent number: 9500574
    Abstract: A rock sample fixing device with a three-jaw chuck for cyclic tension and compression testing including: a lower clamp and an upper clamp; the lower clamp including a lower connector connected to a loading base at a bottom of a testing machine, a lower end cap for fixing samples, a lower chain connecting the lower connector and the lower end cap, a first central position-limit mechanism, a second central position-limit mechanism, and a first hydraulic mechanism; the upper clamp including an upper connector connected to a loading base at a top of the testing machine, an upper end cap for fixing samples, an upper chain connecting the upper connector and the upper end cap, a third central position-limit mechanism, a fourth central position-limit mechanism, and a second hydraulic mechanism.
    Type: Grant
    Filed: February 4, 2016
    Date of Patent: November 22, 2016
    Assignee: SICHUAN UNIVERSITY
    Inventors: Jianfeng Liu, Yang Ju, Jianliang Pei, Huining Xu, Lu Wang, Yangmengdi Xu, Hang Zou
  • Patent number: 9463514
    Abstract: A device for supplying and positioning fixing elements which includes, a chuck provided with two spring loaded clamping jaws that hold one fixing element therebetween for further processing, wherein the clamping jaws are operatively associated with an actuating element that extends between the clamping jaws, the actuating element being provided in an axial direction with a narrow section and two neighboring extension sections. The actuation element is connected to an axial slide for axially moving the actuation element and to open and close the chuck by forcing the camping jaws apart, releasing the fixing element for processing when the chuck is opened.
    Type: Grant
    Filed: October 25, 2011
    Date of Patent: October 11, 2016
    Assignee: EJOT GMBH & CO. KG
    Inventors: Mario Maiwald, Joerg Thiem, Gerhard Dubiel, Marco Mielisch, Sebastian Zebisch, Marco Werkmeister, Nico Oschmann
  • Patent number: 9458049
    Abstract: An apparatus for manufacturing an optical fiber is provided. The apparatus includes a spindle having a bore for receiving a preform of the optical fiber along a longitudinal axis defined by the spindle. A plurality of work holding devices are positioned apart from each other along the longitudinal axis of the spindle and configured to secure the preform against the spindle at two or more distinct positions when the preform is spinning The plurality of work holding devices comprises any combination of chucks, collets, cams, set screws, or shims. A position of at least one of the work holding device is adjustable to shift the preform away from the longitudinal axis.
    Type: Grant
    Filed: August 13, 2015
    Date of Patent: October 4, 2016
    Assignee: OFS FITEL, LLC
    Inventor: Roy M Ortiz
  • Patent number: 9321109
    Abstract: A chuck assembly for supporting cylindrically shaped workpieces to be machined at their ends, the assembly comprising a body having a passage in its lengthways axis, a driving for providing an actuation force absorbed by an actuating pin axially movable in the body, a guide hole in the body having the actuating pin therein, and centring jaws, mounted in a guide groove in the chuck body and moveable radially toward the workpiece, each in a driving arrangement an actuating pin. A roller provided on the driving means facing the actuating pin, a contact surface is on a free end of the pin at right angles to the lengthways axis of the chuck body. The contact surface and the roller interacting such that forces of driving means transfer onto the contact surface axially, and simultaneously a movement at right angles to the lengthways axis of the chuck body is released between the contact surface of the actuating pin and the roller.
    Type: Grant
    Filed: June 7, 2013
    Date of Patent: April 26, 2016
    Assignee: SMW-AUTOBLOK Spannsysteme GmbH
    Inventors: Peter Helm, Harald Deininger
  • Patent number: 9162918
    Abstract: An apparatus for manufacturing an optical fiber is provided. The apparatus includes a spindle having a bore for receiving a preform of the optical fiber along a longitudinal axis defined by the spindle. A plurality of work holding devices are positioned apart from each other along the longitudinal axis of the spindle and configured to secure the preform against the spindle at two or more distinct positions when the preform is spinning. The plurality of work holding devices comprises any combination of chucks, collets, cams, set screws, or shims. A position of at least one of the work holding device is adjustable to shift the preform away from the longitudinal axis.
    Type: Grant
    Filed: February 13, 2013
    Date of Patent: October 20, 2015
    Assignee: OFS FITEL, LLC
    Inventor: Roy M. Ortiz
  • Patent number: 9117869
    Abstract: A chucking device is provided, the chucking device having low dusting characteristics and high detergent properties, and being capable of vacuum-sucking even a substrate having a large warpage, and a chucking method using the chucking device is also provided. The chucking device vacuum-sucks and holds a wafer. The chucking device includes a perforated plate having a plurality of through-holes and being mounted with a wafer, the through-holes penetrating through both sides of the perforated plate; a porous plate that supports a surface other than a mounting surface of the perforated plate, on which the wafer is mounted, transmits a vacuum state to the wafer through the plurality of through-holes, and has a pore to limit a flow rate; and a vacuum pump that exhausts an air through the pore of the porous plate.
    Type: Grant
    Filed: January 6, 2014
    Date of Patent: August 25, 2015
    Assignee: LASERTEC CORPORATION
    Inventor: Haruhiko Kusunose
  • Patent number: 8833773
    Abstract: A workholding apparatus comprising a chuck body, first jaw members and second jaw members wherein the second jaw members are shaped to grip a workpiece of a particular geometry. The first and second jaw members are constructed to enable easy, quick and manual replacement of the second jaw members with other second jaw members having different grip shapes so as to enable gripping of workpieces with different geometries.
    Type: Grant
    Filed: September 7, 2011
    Date of Patent: September 16, 2014
    Assignee: The Gleason Works
    Inventors: Donald L. Allis, Richard N. Russell
  • Patent number: 8764026
    Abstract: A device for centering circular wafers includes a support chuck for supporting a circular wafer to be centered upon its top surface, left, right and middle centering linkage rods and a cam plate synchronizing the rectilinear motion of the left, right and middle centering linkage rods. The left centering linkage rod includes a first rotating arm at a first end and rectilinear motion of the left centering linkage rod translates into rotational motion of the first rotating arm. The right centering linkage rod comprises a second rotating arm at a first end, and rectilinear motion of the right centering linkage rod translates into rotational motion of the second rotating arm. The first and second rotating arms are rotatable around an axis perpendicular to the top surface of the support chuck and comprise a curved edge surface configured to roll against the curved edge of the circular wafer. The middle centering linkage rod includes a third alignment arm at a first end.
    Type: Grant
    Filed: April 15, 2010
    Date of Patent: July 1, 2014
    Assignee: Suss Microtec Lithography, GmbH
    Inventors: Gregory George, Hale Johnson, Dennis Patricio
  • Patent number: 8578588
    Abstract: A system pendulum apparatus (13) is provided for a chuck and a method is provided for the clamping of workpieces with a pendulum element (16) and a basal element (30). An axially swivelable connection is provided between the pendulum element and the basal element by way of an element connection device. A swivel range a of the pendulum element can be restricted by a restriction device (39), and the pendulum element can be returned by a return device to a central position of the swivel range. The pendulum element can be fixed within the swivel range by a fixing device (23). The basal element can be joined by a joining device to one jaw of a chuck (10). The pendulum element has a clamping device with two exchangeable clamping elements (20), which are displaceable and fixable.
    Type: Grant
    Filed: August 30, 2007
    Date of Patent: November 12, 2013
    Inventor: Eugen Karlein
  • Publication number: 20130264783
    Abstract: The invention relates to a device for supplying and positioning fixing elements (8), comprising a chuck (18) that is provided with two spring-loaded stopper parts (1, 2) and that holds one fixing element (8) respectively for further processing. The invention is characterised in that the stopper parts are design as clamping jaws (1, 2) with which an actuation element (3) is associated that reaches between these jaws and that is provided with a narrow section (6) and two neighbouring extensions (4, 5) in an axial direction. Said actuation element is connected to an axial slide (21) for axially moving said actuation element (3), and is used to open and close the chuck (18) by forcing the clamping jaws (1, 2) apart, releasing the fixing element (8) for processing when the chuck (18) is opened.
    Type: Application
    Filed: October 25, 2011
    Publication date: October 10, 2013
    Applicant: EJOT GMBH & CO. KG
    Inventors: Mario Maiwald, Jörg Thiem, Gerhard Dubiel, Marco Mielisch, Sebastian Zebisch, Marco Werkmeister, Nico Oschmann
  • Publication number: 20130219693
    Abstract: The present invention discloses a device for holding disk-shaped articles and a method thereof. The device comprises a rotatable chuck body and at least two groups of clamping elements arranged at the edge of the chuck body. Each of the clamping elements is mounted to a pivot with the chuck body respectively by means of the rotation of the clamping element with respect to the chuck body. A radial compression spring is connected between the bottom of the clamping element and the chuck body to provide a clamping force for the clamping element. The clamping elements in the same group are provided with magnets with the same polarity, while the clamping elements in different groups are provided with magnets with the opposite polarity. Two sets of electromagnets are arranged on the chuck body and spaced apart evenly.
    Type: Application
    Filed: June 13, 2012
    Publication date: August 29, 2013
    Applicant: BEIJING SEVENSTAR ELECTRONICS CO.,LTD.
    Inventors: Yi Wu, Hao Wang, Wei Li, Ruiting Wang, Bao Zhang
  • Patent number: 8459659
    Abstract: A system, in certain embodiments, includes a cutting tool, a drive, and a chuck rotatable by the drive. The chuck includes a body having a core disposed in a shell, wherein the shell is made of a metal and the core is made of a composite material. The chuck also includes a set of jaws coupled to the body, wherein the jaws are configured to hold a work piece adjacent the cutting tool.
    Type: Grant
    Filed: September 5, 2008
    Date of Patent: June 11, 2013
    Assignee: Illinois Tool Works Inc.
    Inventors: Madhav S. Puppala, Thomas M. Grobbel
  • Publication number: 20120325275
    Abstract: A rotary chuck adapted to hold a substrate. The rotary chuck has a rotatable chuck portion and an edge grip having a movable grip member movably mounted to the rotatable chuck portion, the moveable grip member being substantially free moving so that rotation of the rotating chuck portion causes the moveable grip member to move in a plane substantially aligned with a surface of the substrate to engage the substrate in a engaged position. A resilient element is coupled to the moveable grip member, the resilient member biasing the grip member to a disengaged position.
    Type: Application
    Filed: January 23, 2012
    Publication date: December 27, 2012
    Applicant: NEXX Systems, Inc.
    Inventors: Daniel Goodman, Arthur Keigler, David G. Guarnaccia
  • Patent number: 8256774
    Abstract: A chucking member configured to chuck the edge of a substrate includes a chucking pin which is eccentric from the rotation center. The chucking pin has a streamline shape and includes a first front-end portion disposed at the front end relative to the flow of an air current generated by the rotation of the substrate and a first back-end portion disposed at the back end relative to the flow of the air current. The first front-end portion includes a first tip, and the first front-end portion has a round shape.
    Type: Grant
    Filed: August 31, 2007
    Date of Patent: September 4, 2012
    Assignee: Semes Co., Ltd.
    Inventors: Jung Keun Cho, Kyo-Woog Koo, Bo Ram Chan Sung
  • Patent number: 8251374
    Abstract: In a power-operated chuck (1) with radially adjustable clamping jaws (5) that are attached so as to swivel and be axially adjustable on an articulation lever arranged in a chuck body (2), each of the articulation levers (10) is pivotably mounted on an articulation pin (21) that passes through the articulation levers (10) and the articulation pins (21) are supported in the chuck body (2) so as to prevent rotation and are guided to permit limited axial movement. This embodiment makes it possible not only to carry out precise clampings of workpieces (W) over a long period with a consistently high level of rigidity, but also to avoid wear to a large extent. As a result, workpieces can always be clamped precisely whilst a high level of repeat accuracy is provided.
    Type: Grant
    Filed: September 12, 2008
    Date of Patent: August 28, 2012
    Assignee: SMW-Autoblok Spannsysteme GmbH
    Inventors: Walter Bronzino, Pier Mauro Bronzino
  • Patent number: 8214985
    Abstract: A rectangular parallelepipedic (cuboidal) work is fixed by clamping the opposing two edges between clamp jaws attached to a pair of clamps. With the work fixed, at least one surface of the work is machined. Then, the position of the work is changed by rotating the clamps and the work all together around the rotating axis, and the other surface is machined. The foregoing step is repeated to machine all the six surfaces of the work, during which the work is kept fixed by clamping.
    Type: Grant
    Filed: August 8, 2011
    Date of Patent: July 10, 2012
    Assignee: Kitamura Machinery Co., Ltd.
    Inventor: Akihiro Kitamura
  • Patent number: 8172646
    Abstract: Provided are magnetically actuated wafer chucks that permit a wafer to be clamped or unclamped at any time during a process and at any rotational speed, as desired. Such wafer chucks may include constraining members that are movable between open and closed positions. In a closed position, a constraining member aligns the wafer after wafer handoff and/or clamps the wafer during rotation to prevent it from flying off the chuck. In an open position, the constraining member moves away from the wafer to allow liquid etchant to flow from the wafer edge without obstruction. The constraining members may be, for example, cams, attached to arms or links of the chuck. The cams or other constraining members move between open and closed positions by self-balancing forces including a first force, such as a spring force, that acts to move a cam in a first direction, and a non-contact actuate-able force, such as a magnetic force, that acts to move the cam in the opposite direction.
    Type: Grant
    Filed: February 27, 2009
    Date of Patent: May 8, 2012
    Assignee: Novellus Systems, Inc.
    Inventors: Jingbin Feng, Aaron LaBrie, Kousik Ganesan
  • Publication number: 20110266759
    Abstract: A clamp arrangement for securing first and second accessories to an oscillating power tool can include a tool body including a motor that drives the first accessory. A clamp assembly can include a first clamp member that moves relative to the accessory between a closed position wherein the clamp assembly retains the first accessory and an open position wherein the first clamp member of the clamp assembly is offset from the first accessory permitting removal of the first accessory while the first clamp member remains coupled to the clamp assembly. The clamp assembly further includes a second clamp member that cooperates with the first clamp member to clamp the first accessory between the first and second clamp members. An auxiliary attachment surface is configured on the second clamp member and selectively connects with the second accessory while the first accessory is concurrently retained by the clamp assembly.
    Type: Application
    Filed: March 10, 2011
    Publication date: November 3, 2011
    Applicant: Black & Decker Inc.
    Inventor: David A. Goldman
  • Publication number: 20110266758
    Abstract: A clamp arrangement for releasably securing an accessory to an oscillating power tool can include a tool body including a motor that drives an output member. A clamp assembly can include a first clamp member that moves relative to the accessory between a closed position wherein the clamp assembly retains the accessory and an open position wherein the first clamp member of the clamp assembly is offset from the accessory permitting removal of the accessory from the clamp assembly. A lever can have a user engagement portion and a pivot portion including a pivot axle. The lever can be pivotally coupled to the tool body about the pivot axle between a first position, wherein the clamp assembly is in the closed position and a second position wherein movement of the user engagement portion of the lever causes the clamp assembly to be moved to the open position.
    Type: Application
    Filed: November 9, 2010
    Publication date: November 3, 2011
    Inventors: Oleksiy P. Sergyeyenko, Brent A. Kuehne, Kevin W. Covell, David A. Goldman, Mark D. Miller, Derek P. Vlcko
  • Patent number: 8042254
    Abstract: An edge-handling chuck, a system for holding and rotating a test substrate at a high speed and a method for chucking a rotating substrate are disclosed. The Chuck includes a plate having a central axis, a fluid opening and a top surface with a varied topography characterized by symmetry about the central axis. The topography is such that a volume flow rate of fluid between the fluid opening and a periphery of the top surface sufficient to counteract substrate sagging is significantly less than a volume flow rate needed for a similar but flat-surfaced chuck to similarly counteract such sagging. The system may further include a spindle motor and a gas system that supplies gas through the fluid opening to a gap between the top surface and a back surface of the substrate. A radial velocity of the fluid through the gap is approximately constant.
    Type: Grant
    Filed: December 21, 2007
    Date of Patent: October 25, 2011
    Assignee: KLA-Tencor Corporation
    Inventors: Alexander Belyaev, Christian H. Wolters, Aleksey Petrenko, Paul Doyle
  • Patent number: 7810419
    Abstract: A rotating log saw clamp for clamping a product roll to be sawn. The rotating log saw clamp includes a first portion disposed for rotation about an axis and a second portion disposed for rotation with the first portion and movable relative to the first portion between an open position and a clamping position. The second portion is rotatable from the clamping position to the open position by relative rotation of the first and second rotating portions in a common direction.
    Type: Grant
    Filed: February 5, 2003
    Date of Patent: October 12, 2010
    Assignee: C.G. Bretting Manufacturing Co., Inc.
    Inventors: Wayne G. Rundell, Eric J. Lumberg, Mark A. Stackley
  • Publication number: 20090108545
    Abstract: The present invention is directed to a spin chuck for use in a process, such as a cleaning process and an etching process, performed while rotating a substrate. The spin chuck includes a spin head on which a substrate is placed, a driving part configured to rotate the spin head, and a fix bracket installed on the spin head and having a contact surface that is in contact with a flat surface of a flat zone of the substrate at a position corresponding to the flat zone to prevent a vortex caused by the flat zone. Since the fix bracket has the same shape as the flat zone of the substrate, an air current unbalance resulting from the flat zone is suppressed to uniformly inject etchants to a rear surface of the substrate.
    Type: Application
    Filed: October 26, 2006
    Publication date: April 30, 2009
    Inventors: Oh-Jin Kwon, Jeong-Yong Bae, Jeong-Yeol Choi
  • Publication number: 20080224426
    Abstract: A chuck with triaxial construction comprises a receiving surface for a test substrate and arranged below the receiving surface: an electrically conductive first surface element, an electrically conductive second surface element electrically insulated therefrom, and an electrically conductive third surface element electrically insulated therefrom, and, between the first and the second surface element, a first insulation element and, between the second and the third surface element, a second insulation element.
    Type: Application
    Filed: March 14, 2008
    Publication date: September 18, 2008
    Applicant: SUSS MicroTec Test Systems GmbH
    Inventors: Michael TEICH, Karsten STOLL, Axel SCHMIDT, Stojan KANEV, Jorg KIESEWETTER
  • Patent number: 7424776
    Abstract: A method for machining a workpiece in which a machine tool comprising a first and a second chuck devices is employed to machine the workpiece, the machine tool being used in which the first and the second chuck devices comprise a chuck main body, plural chuck jaws, a chuck jaw drive body, and a pressing member, the method comprising: machining a clamp part of the other end part of the workpiece in a state where one end part of the workpiece is clamped by the first chuck device; machining a clamp part of the one end part of the workpiece in a state where the clamp part of the other end part of the workpiece is clamped by the second chuck device; and executing desired machining on the workpiece in a state where each of the clamp parts are clamped by each of the chuck devices.
    Type: Grant
    Filed: March 13, 2007
    Date of Patent: September 16, 2008
    Assignee: Komatsu Machinery Corporation
    Inventors: Masahiro Shoji, Masumi Shimomura
  • Patent number: 7354481
    Abstract: A substrate holding and rotating apparatus includes: a spin base connected to a rotary shaft and rotatable therearound; holding members attached to the spin base and displaceable between holding positions at which the holding members come in contact with the peripheral edge of the substrate such that the holding members are capable of holding the substrate, and retreat positions at which the holding members are retreated from the holding positions; a holding members drive mechanism for driving the holding members between the holding positions and the retreat positions; and a rotation regulating mechanism arranged to be brought, in association with the operation of the holding-member drive mechanism, into a rotation allowing state where the spin base is allowed to be rotated and into a rotation regulating state where the rotation of the spin base is regulated.
    Type: Grant
    Filed: August 3, 2005
    Date of Patent: April 8, 2008
    Assignee: Dainippon Screen Mfg. Co., Ltd.
    Inventors: Eiji Okuno, Takeshi Yoshida
  • Publication number: 20080061519
    Abstract: A chucking member configured to chuck the edge of a substrate includes a chucking pin which is eccentric from the rotation center. The chucking pin has a streamline shape and includes a first front-end portion disposed at the front end relative to the flow of an air current generated by the rotation of the substrate and a first back-end portion disposed at the back end relative to the flow of the air current. The first front-end portion includes a first tip, and the first front-end portion has a round shape.
    Type: Application
    Filed: August 31, 2007
    Publication date: March 13, 2008
    Inventors: Jung Keun Cho, Kyo-Woog Koo, Bo Ram Chan Sung
  • Publication number: 20070284833
    Abstract: An electric chuck includes a base, a fixed disk fixed under the base, a moving disk between the base and the fixed disk, and clamping jaws; a rotating shaft with outer threads is arranged under the fixed disk; the moving disk has a middle hole, through which the rotating shaft is threadedly passed; the clamping jaws is connected to the fixed disk and the moving disk in a movable manner; an electric motor is provided whose power is transmitted to rotate the rotating shaft; the clamping jaws will be moved to an inwardly pivoted position to hold a work piece positioned on the fixed disk when the rotating shaft is rotated to move the moving disk to its lower position; the clamping jaws will be moved to an outwardly pivoted position to release the work piece when the shaft is rotated to move the moving disk to it upper position.
    Type: Application
    Filed: June 9, 2006
    Publication date: December 13, 2007
    Inventors: Yung-Hsiang Lu, Po-Cheng Su, Ping-Shuo Lin
  • Publication number: 20070273108
    Abstract: A wheel chuck configured to accommodate various wheel diameters and styles, without time consuming changeovers. In some cases, the wheel chuck accommodates various wheel sizes using a mechanism that is less susceptible to clogging. The wheel chuck may include a sensor for detecting the presence of a wheel, which moves in conjunction with the wheel chuck's clamp assembly.
    Type: Application
    Filed: May 16, 2007
    Publication date: November 29, 2007
    Applicant: LOGANSPORT MATSUMOTO COMPANY, INC.
    Inventors: Toru Kitatsuru, Andrew T. Wilcox
  • Patent number: 7284760
    Abstract: Semiconductor technology requires the use of object holders, which are capable of holding wafers securely, also during rotation. In order to save time and expense, such holders should be suitable for integration directly into a processing facility, wherever possible. According to the invention it is proposed to provide centrally mounted holders which comprise support surfaces for the wafer and pivotable gripper fingers, in which the gripper fingers are pretensioned by means of at least one pretension element in the holding position and are actuated through one opening mechanism, in which at least one opening mechanism and at least one pretension element are integrated in the central clamping arm fixture and/or in the clamping arms.
    Type: Grant
    Filed: August 6, 2004
    Date of Patent: October 23, 2007
    Assignee: Nanophotonics AG
    Inventors: Sönke Siebert, Michael Schweiger, Andreas Lang
  • Patent number: 7275749
    Abstract: A substrate supporting apparatus for supporting a substrate or wafer in a non-contact state by Bernoulli theorem is disclosed. The substrate supporting apparatus 1 comprises a housing 2, a rotatable chuck 3 which is disposed in the housing 2, which is provided at its central portion with a hollow 12 and which supports a substrate 6, and a cylindrical nozzle member 4 which is disposed in the housing 2, which has a nozzle hole 7 and which can vertically move in the hollow 12. A nozzle hole 7 is formed in a central portion of the nozzle member 4. Gas is discharged from a gas source 8 through the nozzle hole 7, thereby holding the substrate 6 by an upper surface of the chuck 3 in a non-contact state. When the substrate 6 is to be detached, the nozzle member 4 is moved upward while discharging gas from the nozzle hole 7, thereby floating the substrate 6.
    Type: Grant
    Filed: January 6, 2004
    Date of Patent: October 2, 2007
    Assignee: Sipec Corporation
    Inventors: Minoru Matsuzawa, Tatsuro Yoshida
  • Patent number: 7258515
    Abstract: The invention is based on a tool holder for a power tool (i0), in particular for a hand-guided power angle grinder, having a slaving device (12) by way of which an inserted tool (14), which has a disklike hub (64), can be operatively connected to a drive shaft (16), and having a fastening device (18) which has a holding position and a release position. It is proposed that with the fastening device (18), the inserted tool (14) can be connected by positive engagement to the slaving device (12) in the circumferential direction (20, 22) in the release position and additionally in the axial direction (24, 26) in the holding position.
    Type: Grant
    Filed: April 11, 2003
    Date of Patent: August 21, 2007
    Assignees: Robert Bosch GmbH, Tyrolit Schleifmittelwerke Swarovski K.G.
    Inventor: Harald Krondorfer
  • Patent number: 7226055
    Abstract: A substrate holding apparatus is provided. The substrate holding apparatus includes a chuck yoke, a plurality of arm assemblies, and a plurality of gripper assemblies. A first end of each of the arm assemblies is connected to the chuck yoke and each of the arm assemblies has a spring. A second end of each of the arm assemblies is connected to a respective one of the plurality of grippers. The chuck yoke is capable of rotating so as to move each of the plurality of arm assemblies and respective plurality of gripper assemblies into either a closed position or an open position. A compression force from each of the springs is applied to a substrate when the grippers are moved to the closed position.
    Type: Grant
    Filed: June 30, 2003
    Date of Patent: June 5, 2007
    Assignee: Lam Research Corporation
    Inventors: Gregory R. Bettencourt, Anthony de la Llera, Xuyen N. Pham
  • Patent number: 7204493
    Abstract: A chuck for mounting wheel castings having different diameters upon a wheel lathe for machining the casting to final shape is provided. The chuck includes stepped jaw inserts that cooperate with corresponding stepped part supports to securely mount the wheel castings upon the chuck.
    Type: Grant
    Filed: June 3, 2004
    Date of Patent: April 17, 2007
    Assignee: Hayes Lemmerz International, Inc.
    Inventor: Geoffrey L. Gatton
  • Patent number: 7143801
    Abstract: A spindle for fastening rims of vehicle wheels on repair shop machines, which comprises a frame that can be associated rotationally about a working axis with a repair shop machine, six or more movable arms that are associated with the frame, are distributed around the working axis and can rotate about respective rotation axes that lie on a plane that is substantially perpendicular to the working axis, and claws for gripping the rim of a vehicle wheel, which are associated with the arms and on which it is possible to fit the internal cylindrical portion of the rim.
    Type: Grant
    Filed: March 24, 2005
    Date of Patent: December 5, 2006
    Assignee: Sicam S.R.L.
    Inventor: Marco Matteucci
  • Patent number: 7131245
    Abstract: An over-center self adjusting cap chuck adapted for operative attachment to a high-speed capping machine includes a housing having an outer peripheral surface defining an inner annular periphery with an interior face. A plurality of independent engagement jaws are aligned along an annular area of, or within a pocket area of, the interior face. Each engagement jaw has a fastener to connect the engagement jaw to the housing and establish a pivot point to support a limited axial rotational movement thereof to a first open axial position and a second closed axial position for receiving and gripping a work piece respectively. Either a singular bias spring or a pair of bias springs pre-dispose the engagement jaws to the first open axial position.
    Type: Grant
    Filed: January 12, 2005
    Date of Patent: November 7, 2006
    Assignee: Diamond Machine Werks, Inc.
    Inventors: Andreas Wilhelm Joerg, Thomas Alan Wilke
  • Patent number: 6997656
    Abstract: A device for holding an object, and an assembly for holding and rotating an object. The device includes a base, a series of posts, each of which is equidistant from a center point of reference and further pivotably holds a follower rotationally linked to all other followers. Each follower has a gripping portion dimensioned to hold an object. An actuator serves to displace the followers radially about the post holding it creating a motion that causes the gripping portions to move either towards or away from the center reference point, dependent upon the displacement of the actuator. As all followers are rotationally linked, each follower of the device rotates to a substantially equal degree.
    Type: Grant
    Filed: July 18, 2003
    Date of Patent: February 14, 2006
    Assignees: Bengston Tool + Die Co., Inc., The Hermann Schmidt Company Inc.
    Inventors: Richard C. Bengston, Peter Schmidt, Robert Michael Dickson
  • Patent number: 6964419
    Abstract: A design for chuck rollers and a design for chuck pins for a wafer cleaning and drying system is disclosed. Each of the chuck rollers includes a roller head which ensures proper engagement of a wafer with the chuck rollers for rotation of the wafer during a wafer scrubbing process. Each of the chuck pins is provided with an extending flange or salient to prevent upward movement of and disengagement of the wafer from the chuck pins as the wafer is rotated during a wafer scrubbing and drying process. Each chuck pin may also present a wafer support surface of enhanced surface area for supporting the wafer on the chuck pin.
    Type: Grant
    Filed: April 2, 2003
    Date of Patent: November 15, 2005
    Assignee: Taiwan Seminconductor Manufacturing Co., Ltd.
    Inventor: Chin-Tsan Jan
  • Patent number: 6935638
    Abstract: A universal substrate holder of the invention for treating wafer substrates in liquids is provided with a shaft and a rod slidingly inserted into the central opening of the shaft. The end of the shaft that protrudes into the bowl supports a base platform for the substrate, while the end of the rod that protrudes into the bowl has radial arms that rigidly support an annular plate with pins that can pass through the opening of the base platform so that they can support the substrate above the surface of the platform. The annular plate supports clamping jaws made in the form of two-arm levers with shorter arms and longer arms. The longer arms are heavier and therefore in the stationary state of the holder keep the jaws turned into an open position. When the shaft begins to rotate, the jaws are turned under the effect of centrifugal forces into positions of clamping the substrate with the shorter arms.
    Type: Grant
    Filed: February 21, 2003
    Date of Patent: August 30, 2005
    Assignee: Blue29, LLC
    Inventors: Igor C. Ivanov, Jonathan Weiguo Zhang