Abstract: A robotic end effector system and method having a plurality of end effectors which are selectively suitable for particular applications on a workpiece. The end effectors include a resident controller adapted to execute tasks specific to the end effector and are rapidly attachable and removable from the robot for easy change over to different workpieces.

Abstract: A robot hand (10) comprises an outside section that is not adapted for entry into a high-temperature area and an entry section adapted for entering the high-temperature area includes a frame (15) extending from the base unit and covering intermediate portions of the shafts; a distal end support (30) provided in the frame and adapted to support near distal end portions of the shafts; and holding units (13, 14) each attached to corresponding each of the shafts for holding a workpiece. The proximal end support is adapted to support the shafts via a bearing. The distal end support includes support holes larger than the outer diameters of the shafts such that the shafts are inserted into the support holes, respectively.

Abstract: The present disclosure relates to a wafer transfer robot having a robot blade that can be used to handle substrates that are patterned on both sides without causing warpage of the substrates. In some embodiments, the wafer transfer robot has a robot blade coupled to a transfer arm that varies a position of the robot blade. The robot blade has a wafer reception area that receives a substrate. Two or more spatially distinct contact points are located at positions along a perimeter of the wafer reception area that provide support to opposing edges of the substrate. The two or more contact points are separated by a cavity in the robot blade. The cavity mitigates contact between a backside of the substrate and the robot blade, while providing support to opposing sides of the substrate to prevent warpage of the substrate.

Abstract: This robot hand includes a first finger portion and a second finger portion being relatively movable in a direction in which an object to be grasped is grasped and bar-shaped claw members fixed to the first finger portion and the second finger portion. A plurality of claw members are fixed in parallel to at least either the first finger portion or the second finger portion.

Abstract: A device for use in the semiconductor industry includes a robotic arm whose end effector includes electromagnetic means to hold a substrate carrier. A pushing member can move independently of a flat, spatula-like portion of the device and is configured to exert force against the substrate carrier while the spatula-like portion is retracted from the substrate carrier, after the substrate carrier has been brought to its intended position. In this manner, the position of the substrate carrier is maintained at its intended position as the spatula-like portion is retracted.

Abstract: An aspect of the invention provides a robot hand that performs an action for gripping an object between plural finger sections provided to be capable of changing a distance between the finger sections. Between the plural finger sections, a palm section movable along a direction in which a base side of the plural finger sections and a distal end side of the plural finger sections are connected is provided.

Abstract: An end effector for use on a robotic arm includes a clamping assembly for clamping a workpiece, and a tool such as a drill for performing an operation on the clamped workpiece. The clamping assembly is slidably mounted on the robotic arm and self adjusts its position relative to the workpiece before a clamping operation is performed. Linear actuators independently control the movements of the clamping members. The actuators are operated by a controller, based in part on position information produced by sensors that sense the position of the clamping members.

Abstract: A substrate support apparatus which can support a substrate having a center hole, comprises a support portion which can support the substrate. The support portion includes a support groove with a cross-sectional shape in which a groove width gradually increases in a counter-gravitational direction, and a width of the support groove between two end portions is larger than a width of the support groove at the center thereof.

Abstract: A robotic accessory mounting assembly used in connection with a robot to attach an accessory to the robot, the mounting assembly including a cable connected to an implement mounted on the robot; the cable having a cable length; the implement including a first component having a first length, wherein the implement with the first component has an implement length that corresponds to the cable length; and a second component adapted to replace the first component, the second component having a length less than the first component, wherein replacement of the first component with the second component reduces the implement length defining a clearance relative to the cable length to receive an accessory mount in-line with the implement.

Abstract: A piezoelectric actuator includes a frequency controller that controls the frequency and power of the driving signal, wherein when the phase difference falls within a predetermined range, the control unit stores the value of the frequency of the driving signal as a first frequency memory value, sets a voltage to a upper limit voltage value, and performs control of adjusting the frequency of the driving signal so that the phase difference is maintained to be within a predetermined range, and when the frequency of the driving signal is changed from the first frequency memory value by an amount exceeding a first value determined in advance, the control unit stores the value of the frequency of the driving signal as a second frequency memory value and sets the voltage to a lower limit voltage value lower than the upper limit voltage value.

Abstract: An adsorbent in a board conveying hand includes: a pad for adsorbing a board in contact with the board; and an elastic member interposed between the fork and the pad and provided with an adsorption passage for allowing an adsorbing fluid to pass between the fork and the pad, wherein a part of the elastic member is deformed, thus arbitrarily varying a projection amount of the pad from the fork.

Abstract: An aspect of the invention provides a robot hand that performs an action for gripping an object between plural finger sections provided to be capable of changing a distance between the finger sections. Between the plural finger sections, a palm section movable along a direction in which a base side of the plural finger sections and a distal end side of the plural finger sections are connected is provided.

Abstract: A robot hand is provided. The robot hand includes a plurality of holding parts provided to be holdable of a plurality of workpieces, respectively, and a pneumatic drive for protruding one of the holding parts, when the holding part holds one of the workpieces, toward the workpiece with respect to one or more remaining holding parts by pneumatic pressure.

Abstract: An industrial robot may include a hand having an object-mounting section; an arm structured to hold said hand at the front side thereof; a main body section structured to hold the base end of said arm; and a covering member structured to cover at least the top surface of said object-mounting section. The radiant heat reflectance at said covering member may be higher than that at said object-mounting section. The heat conductivity of said covering member may be lower than that of said object-mounting section. The specific gravity of said object-mounting section may be smaller than that of said covering member.

Abstract: An end effector is disclosed for use in substrate processing. The end effector includes a effector body portion, a contact pad pocket formed in the end effector body, a spring retaining pocket formed in the end effector body adjacent the contact pad pocket and extending to an edge of the end effector body, and a pair of through-holes extending from the spring retaining pocket to the contact pad pocket. The end effector can include a contact pad seated within the contact pad pocket, the contact pad having at least one retaining channel formed therein, and a retaining spring having a pair of retaining arms extending from the retaining spring pocket through the through-holes and into the contact pad pocket. The retaining arms may extend at least partially into the at least one retaining channel of the contact pad and may thereby restrict movement of the contact pad.

Abstract: An end effector is disclosed for use in substrate processing. The end effector includes a effector body portion, a contact pad pocket formed in the end effector body, a spring retaining pocket formed in the end effector body adjacent the contact pad pocket and extending to an edge of the end effector body, and a pair of through-holes extending from the spring retaining pocket to the contact pad pocket. The end effector can include a contact pad seated within the contact pad pocket, the contact pad having at least one retaining channel formed therein, and a retaining spring having a pair of retaining arms extending from the retaining spring pocket through the through-holes and into the contact pad pocket. The retaining arms may extend at least partially into the at least one retaining channel of the contact pad and may thereby restrict movement of the contact pad.

Abstract: A mechanism for adjusting the orientation of an end effector (e.g., a non-destructive inspection sensor) during movement over a contoured surface, comprising: (1) a pneumatic or spring-loaded plunger shaft that facilitates positioning of an end effector onto a highly contoured surface by allowing a wide range of vertical motion; (2) a rocker pivotably coupled to a distal end of the plunger shaft, the rocker being pivotable about a horizontal axis to allow a pair of follower wheels coupled to distal ends of the rocker arms to follow the contoured surface and keep the end effector oriented correctly relative to the surface without tipping over; and (3) a hozzle (i.e., an end effector holder) attached to the rocker for rotation therewith, the end effector being coupled to the hozzle by an elastomeric gasket or a plurality of springs which allow the orientation of the end effector relative to the hozzle to change in response to contact forces.

Abstract: A system for separately handling different size FOUPs includes an end effector having a surface thereon for supporting a FOUP. The end effector and surface is configured to support different size FOUPs. A fixture or means for engaging and maintaining a FOUP, of different size FOUPs, included to position and maintain each of a different size FOUP on the end effector during transport thereof. A shelf is configured to receive each of said different size FOUPs. The end effector is thus capable of transporting either a first size FOUP or a second, smaller size FOUP.

Abstract: Fingers for holding a target project from shift members, and shift in accordance with the movement of the shift members shifted in predetermined axial directions by a shift mechanism to hold the target. Sliding members for shifting the shift members in the predetermined axial directions project from the shift members, and guide the shift members by sliding. According to this structure, a robot hand becomes smaller in size by decreasing the clearances between the fingers (moving the shift members closer to each other). Thus, the robot hand can hold a small target object within a small work space even though the robot hand conducts a parallel shift of the fingers.

Abstract: A reconfigurable end-effector attachable to a robotic arm, includes a master boom, a first branch assembly and a second branch assembly, a dual articulation mechanism. The dual articulation mechanism includes a first clutch attached to the first branch assembly and is configured to articulate the first branch assembly relative to the second branch assembly. The dual articulation mechanism further includes a second clutch attached to the master boom, the second branch assembly and the first clutch and is configured to simultaneously articulate the first and second branch assemblies relative to the master boom. The first and second branch assemblies each have limbs connected to branches supporting a plurality of tool modules. Each tool module includes an end element configurable to interact with a workpiece.

Abstract: A system is provided in which a robot may be used having a robotic arm with a camera and gripper assembly, that enables the use of tools while also allowing use of a gripper assembly located at the end of the robotic arm. Mounting rails may be secured to the gripper assembly to provide a system that is easily adaptable to allow the relatively fast exchange of different tools. Tools may be secured to the mounting rails to allow for both the use of the tools and the existing gripper assembly on the robotic arm. The accessories may be configured to allow enhanced viewing of the accessory through a camera mounted to the robotic arm.

Abstract: An end effector that includes: a flexible container which contains a filler, wherein the filler is switchable between a flowable or deformable state and a rigid or dimensionally stable state, and one or more working elements for gripping, temperature regulation and/or compaction.

Abstract: The present invention relates to modular system for micro-nano manipulation of samples. The modular system of the present invention comprises changeable tool tips which may be provided in an array, and a tool body. Each changeable tool tip comprises an end effector connected to a base having mating structures. The tool body includes an arm having slits having dimensions and being disposed on the arm so as to detachably couple with the mating structures of the tool tip. The slits may include an opening with rounded corners for receiving the mating structures, and tapered side walls for frictionally fitting the mating structures. The present invention relates also to a connection system for connecting a micro-dimensional tool body to a changeable micro-dimensional tool tip and to a manipulation tool for use with changeable tool tips of the present invention.

Abstract: A second member having an elongated shape is attached to a first member via a connecting member. The connecting member is rotatable around a first shaft in a direction intersecting with a longitudinal direction of the second member with respect to the first member and rotatable around a second shaft intersecting both the longitudinal direction and a direction along the first shaft with respect to the second member. Further, a first drive part that rotationally drives the connecting member around the first shaft is provided in the first member and a second drive part that rotationally drives the connecting member around the second shaft is provided in the second member. In this manner, a robot hand that can rotate the first member and the second member not only around the first shaft but also around the second shaft may be realized with a simpler and smaller structure.

Abstract: Robotic hands and finger modules include an underactuated finger with multiple joints including a distal joint, an intermediate joint, and a proximal joint. A brake subsystem in communication with each of the joints selectively locks and unlocks the joints individually. A robotic hand can selectively lock the joints of a finger individually such that one or more joints are locked while one or more joints are unlocked. In addition, the finger module can drive a tendon coupled to the joints to flex the underactuated finger in a manner determined by which of the joints is locked and which of the joints is unlocked. A robotic hand can move an underactuated finger with its distal and proximal joints unlocked until the finger makes contact with an object, and lock the proximal joint, in response to contact made with the object, while the distal joint remains unlocked.

Abstract: In a robot hand, holding units have bases, and a plurality of curved rod-shaped members that are installed at the bases and are rotatable around rotation axes. The plurality of curved rod-shaped members rotate from a virtual plane including a plurality of the rotation axes by a reaction force from the object to be pinched that is caused by the holding units pinching the object to be pinched, and portions of the curved rod-shaped members hold the object to be pinched.

Abstract: This disclosure discloses a robot hand of underactuated mechanism. The robot hand includes a plurality of actuators, a plurality of joints where the number of the joints is more than the number of the actuators, a palm portion, three finger portions each including a plurality of links having bases coupled to the palm portion and coupled being capable of flexion, and a shape-fitting mechanism which is provided in at the finger portion, and which enables to grasp an object to be grasped in an enclosing manner with the finger portions by performing providing torsional displacement to the links.

Abstract: A robot hand having an attachment portion that is held when incorporated into a robot includes CFRP laminated to each other and a vibration-damping elastic layer that is disposed between the CFRP layer and the CFRP layer. The vibration-damping elastic layer includes viscoelastic resin regions including a viscoelastic resin and a high-rigidity resin region including high-rigidity resin. The viscoelastic resin regions and the high-rigidity resin region are alternately arranged along the direction intersecting the longitudinal direction of the CFRP layer in the attachment portion. The viscoelastic resin regions improve vibration-damping properties on the robot hand. As the viscoelastic resin regions and the high-rigidity resin region having relatively higher rigidity are alternately arranged along the direction intersecting the longitudinal direction of the CFRP layers, flexural rigidity along the longitudinal direction of the CFRP layer is improved.

Abstract: A robot hand according to embodiments includes a holding unit, a bottom end, an optical sensor, and a reflecting member. The holding unit holds a thin-plate-shaped workpiece. In the bottom end, its leading part is coupled to the holding unit and its tail part is rotatably coupled to an arm. The optical sensor is provided in the bottom end and has a projector and a photoreceiver. The reflecting member is provided in the holding unit. The reflecting member reflects light from the projector, makes it pass through the holding area of the workpiece, and makes it reach the photoreceiver to form an optical path.

Abstract: A robot hand, which has an arbitrary object grasping function in the same manner as a human hand and a high precision and stable grasping function in the same manner as an industrial gripper and performs a pose similar to a human hand while having complete opposability without any increase in complexity or degree of freedom. The robot hand includes a base part, and a plurality of finger connection parts, and a plurality of finger modules connected to the plurality of finger connection parts. The finger connection parts connected to the base part are connected to adjacent finger connection parts by roll joints such that each pair the finger connection parts connected by the roll joints is driven together, and the finger connection parts adjacent to the finger connection parts connected to the base part are driven separately from the finger connection parts connected to the base part.

Abstract: Techniques for handling media arrays are disclosed. The techniques may be realized as a system for handling a plurality of substrates. The system may comprise a plurality of row elements for supporting the plurality of substrates, wherein the plurality of row elements may be operable to change configuration of the substrates from open configuration to a high-density configuration, where a distance between adjacent substrates in the open configuration may be greater than a distance between the adjacent substrates in the high-density configuration.

Abstract: A robot hand includes a mounting surface to which a work unit is mounted with some freedom of horizontal movement. A pair of anti-fall hooks is formed at a tip portion of the mounting surface to support a front edge portion of the work unit so as to prevent the work unit from falling off the mounting surface. A pair of support section is provided at a rear edge portion of the mounting surface to support a rear edge portion of the work unit. If, during placement of the work unit into a cassette, the work unit collides with the cassette, the work unit comes into contact with one of the support sections, and the work unit is rotated on the mounting surface about the contact point as a fulcrum so as to correct the misalignment of the work unit.

Abstract: A wafer transfer blade including a body including metal oxide and configured to support a wafer, and an adsorbing part on the body, the adsorbing part having at least one therein and configured to apply vacuum pressure to attach the wafer on the body may be provided. The body may include metal oxide to prevent static electricity.

Abstract: An apparatus for gripping a substrate on its peripheral edge including a substrate support having proximate and distal ends, at least one distal rest pad disposed at the distal end, the at least one distal rest pad includes a back stop portion and is configured to support the peripheral edge of the substrate, at least one proximate rest pad disposed at the proximate end, the at least one proximate rest pad being configured to support the peripheral edge of the substrate, and an active contact member assembly disposed at the proximate end, the active contact member assembly including a pusher member, a contact member and a rotatable coupling member that are reciprocably movable towards the distal end for urging the substrate against the back stop portion, the contact member being rotatably secured to the pusher member and free to rotate about an axis of the rotatable coupling member.

Abstract: A robot hand includes a palm section provided between a plurality of finger sections. The palm section may be brought into contact with an object while the object is gripped by the finger sections. The robot hand also includes a contact member that is detachably mounted on the palm section. The contact member may be brought into contact with the object instead of the palm section. Accordingly, even if an object is too small to be contacted by the palm section, it is possible to stably grip the small object since the contact member can be brought into contact with the object gripped by the finger sections instead of the palm section.

Abstract: An end effector device attached to a tip end portion of a robot arm includes a plurality of support units provided on a blade. Each of the support units includes: a plurality of nail pieces configured to support peripheral portions of a plurality of semiconductor wafers such that the semiconductor wafers are parallel to one another and spaced apart from one another; and a pitch changing mechanism configured to change upper-lower intervals of the nail pieces. The pitch changing mechanism includes: a coil spring configured to support the plurality of nail pieces such that the plurality of nail pieces are spaced apart from one another in an upper-lower direction and elastically deform in the upper-lower direction; and an operating mechanism configured to cause the coil spring to elastically deform in the upper-lower direction. The operating mechanism includes a piston pin fitted in the coil spring to move up and down.

Abstract: A robot hand is provided. The robot hand includes a plurality of holding parts provided to be holdable of a plurality of workpieces, respectively, and a pneumatic drive for protruding one of the holding parts, when the holding part holds one of the workpieces, toward the workpiece with respect to one or more remaining holding parts by pneumatic pressure.

Abstract: A visually controlled end effector is disclosed. The end effector comprises two or more operational members capable of picking up one or more randomly placed items. A crank is capable of actuation by a robot to orient a first one of said two or more operational members to pick up a first one of said one or more randomly placed items. The crank is further capable of actuation by the robot to orient a second one of said two or more operational members to pick up a second one of said one or more randomly placed items. The crank is further capable of orienting the first and second ones of the said two or more operational members for placement of the first and second ones of said randomly placed items into a desired oriented condition. A time savings of three robot transfers is thus made over prior art systems that transferred each individual product one by one.

Abstract: A robot hand having a suction holding unit on one face side holds a plate-shaped work by suction. An outer circumferential edge of the plate-shaped work is held, without contact with a surface of the plate-shaped work, by an outer circumference holding unit provided on the other face side. The robot hand can be used to hold the plate-shaped work yet to be worked by the suction holding unit, and to hold the plate-shaped work having been worked by the outer circumference holding unit. This prevents working debris from being deposited on the plate-shaped work yet to be worked and prevents defective working from occurring. In addition, since the plate-shaped work having been worked is held by the outer circumference holding unit, the robot hand does not make contact with surfaces of the worked plate-shaped work, and, accordingly, no contact marks are formed on the surfaces of the work.

Abstract: A substrate support apparatus has a substrate holding portion to be inserted into a center hole formed in a substrate to support the substrate in a vertical orientation, and includes a first connecting plate connected to the substrate holding portion and a second connecting plate which faces the first connecting plate and is connectable to a transport robot that transports the substrate to a substrate holder. In addition, a shock absorbing member is arranged between the first connecting plate and the second connecting plate so as to allow a movement of the first connecting plate relative to the second connecting plate in horizontal and vertical directions. Support members are configured to connect the first connecting plate to the second connecting plate while allowing the movement of the first connecting plate relative to the second connecting plate.

Abstract: A clamping device comprising: a distal end side stationary blocks which are provided on a side of a distal end of a workpiece retaining base, and in which stationary tilt faces tilting downwardly to a central direction of the workpiece are formed; a proximal end side stationary blocks which are provided on a side of a proximal end of the workpiece retaining base, and in which upward stationary tilt faces tilting downward toward the central direction of the workpiece are formed; and a movable block which is arranged at a position proximal to the proximal end side stationary blocks, and is capable of advancing to or retracting from a side of the distal end side stationary blocks with the workpiece being held between the blocks, and in which a downward movable tilt face tilting upwardly toward the central direction of the workpiece is formed.

Abstract: A hand includes: a pair of supporters; first and second gripping claws which are supported inside of the pair of supporters, respectively, so as to grip a bolt; an oscillating mechanism which oscillates the first and second gripping claws on an oscillatory axis crossing a longitudinal direction of each of the supporters, so as to change the orientation of a tip of each of the first and second gripping claws; and a bolt rotating mechanism for rotating, on the axis of the bolt, the bolt gripped by the first and second gripping claws.

Abstract: A prosthetic finger, comprising: a first axis of movement comprising a moving magnet; a second axis of movement comprising a moving coil, wherein the second axis is generally orthogonal to the first axis; and a third axis of movement comprising a moving magnet, wherein the third axis of movement is generally oriented in the same direction as the first axis of movement.

Abstract: A robotic finger, comprising: a first axis of movement comprising a moving magnet; a second axis of movement comprising a moving coil, wherein the second axis is generally orthogonal to the first axis; and a third axis of movement comprising a moving magnet, wherein the third axis of movement is generally oriented in the same direction as the first axis of movement.

Abstract: A robot hand and a robot according to an embodiment include supporting units. The supporting units are arranged on a base and contact the peripheral border of a board to grip the board. At least one of the supporting units rotates while abutting on the peripheral border of the board.

Abstract: A robot hand (10) comprises an outside section that is not adapted for entry into a high-temperature area and an entry section adapted for entering the high-temperature area includes a frame (15) extending from the base unit and covering intermediate portions of the shafts; a distal end support (30) provided in the frame and adapted to support near distal end portions of the shafts; and holding units (13, 14) each attached to corresponding each of the shafts for holding a workpiece. The proximal end support is adapted to support the shafts via a bearing. The distal end support includes support holes larger than the outer diameters of the shafts such that the shafts are inserted into the support holes, respectively.

Abstract: An end effector includes a holding unit that holds a screw member to be rotatable around the axis line of the screw member, and a rotary unit that is provided on the axis line, moves linearly along the axis line in a condition of being in contact with the head portion of the screw member held by the holding unit, and rotates the screw member around the axis line by rotation accompanying the linear motion.

Abstract: Handling device for handling of a wafer in the processing of the wafer with the following features: a carrier with a flat receiving side for holding the wafer, an especially lattice-like grid structure which is raised on the receiving side relative to the receiving side, a flexible cover which covers the grid structure relative to the carrier, sealing it, for fixing of the wafer on the carrier, and a grid space which is bordered by the cover and the carrier can be exposed to negative pressure, characterized in that the grid structure and the cover with the receiving side form an especially trough-shaped receiving space for holding of receiving structures which are provided on the wafer and which are raised relative to the wafer receiving side.

Abstract: A grip mechanism for an end effector includes a grip member configured to be coupled to an effector body. A gripper of the grip member is movable based on movement of the grip member such that the gripper is movable along an engagement path to an engagement position where an object such as a substrate can be retained within a retaining region adjacent to the effector body. End effectors for handling objects incorporating one or more grip mechanisms, and methods of handling an object such as a substrate, are also disclosed.

Abstract: A robot hand includes a pair of bits and holds a microtube by causing the pair of bits to perform an opening-closing operation. The pair of bits has a lug that comes into contact with an outer peripheral surface of a container body or a cap portion of the microtube, and a rectangular recess in which parts of the cap portion and a flange of the microtube are inserted while the lug is in contact with an outer peripheral surface of the microtube. The rectangular recess includes surfaces between which the cap portion and the flange are disposed. The pair of bits is closed while a corner of the rectangular recess is in contact with the outer peripheral surface of the container body to retain the microtube in an orientation different from that in the state in which the cap portion is inserted in the rectangular recess.