Electrodes Immersed In Liquid Patents (Class 313/232)
  • Publication number: 20140197726
    Abstract: The present invention relates to a method for improving the wettability of a rotating electrode with a liquid medium in a discharge lamp, in particular for the production of EUV radiation or soft X-rays, and a correspondingly designed gas discharge lamp. In the method, the edge surface of the rotating electrode to which the liquid medium is applied is microstructured by means of external processing. This microstructure significantly improves the wettability of the edge surface for the liquid medium. Furthermore, the distribution of the liquid medium over the edge surface can be controlled selectively by suitable choice of the microstructure.
    Type: Application
    Filed: January 9, 2014
    Publication date: July 17, 2014
    Inventors: KLAUS BERGMANN, RALF PRUEMMER
  • Publication number: 20130113359
    Abstract: The present invention provides devices comprising an assembly of carbon nanotubes, and related methods. In some cases, the carbon nanotubes may have enhanced alignment. Devices of the invention may comprise features and/or components which may enhance the emission of electrons and may lower the operating voltage of the devices. Using methods described herein, carbon nanotube assemblies may be manufactured rapidly, at low cost, and over a large surface area. Such devices may be useful in display applications such as field emission devices, or other applications requiring high image quality, low power consumption, and stability over a wide to temperature range.
    Type: Application
    Filed: May 29, 2009
    Publication date: May 9, 2013
    Applicant: Massachusetts Institute of Technology
    Inventors: Timothy M. Swager, Hongwei Gu
  • Patent number: 7759663
    Abstract: A radiation source having self-shading electrodes is disclosed. Debris originating from the electrodes is reduced. The path from the electrodes to the EUV optics is blocked by part of the electrodes themselves (termed self-shading). This may significantly reduce the amount of electrode-generated debris.
    Type: Grant
    Filed: December 6, 2006
    Date of Patent: July 20, 2010
    Assignee: ASML Netherlands B.V.
    Inventors: Maarten Marinus Johannes Wilhelmus Van Herpen, Wouter Anthon Soer
  • Patent number: 7692169
    Abstract: A method for filtering particles out of a beam of radiation propagating from a radiation source is provided. The method includes passing the beam of radiation through a filter having a first portion within the beam of radiation and a second portion outside of the beam of radiation, capturing at least some of the particles in the beam of radiation with the first portion, and moving the filter in a direction that is transverse to the beam of radiation so that the first portion is moved outside of the beam of radiation and the second portion is moved into the beam of radiation.
    Type: Grant
    Filed: July 27, 2006
    Date of Patent: April 6, 2010
    Assignee: ASML Netherlands B.V.
    Inventors: Levinus Pieter Bakker, Derk Jan Wilfred Klunder, Maarten Marinus Johannes Wilhelmus Van Herpen
  • Patent number: 7622727
    Abstract: An EUV radiation source device with a chamber that is divided into a discharge space and a collector mirror space provided with EUV collector optics. Between them, an aperture component with an opening which is cooled is provided. First and second discharge electrodes are rotated. Sn or Li is irradiated with a laser. Pulsed power is applied between the first and second discharge electrodes to form a high density and high temperature plasma between the two electrodes so that EUV radiation with a wavelength of 13.5 nm is emitted, is focused by the EUV collector optics and is guided into the irradiation optical system of an exposure tool. There are a first pumping device and a second pumping device for pumping the discharge space and the collector mirror space. The discharge space is kept at a few Pa, and the collector mirror space is kept at a few 100 Pa.
    Type: Grant
    Filed: December 28, 2006
    Date of Patent: November 24, 2009
    Assignee: Ushiodenki Kabushiki Kaisha
    Inventors: Takahiro Shirai, Kyohei Seki
  • Patent number: 7518134
    Abstract: A radiation source is disclosed that includes an anode and a cathode that are configured and arranged to create a discharge in a substance in a discharge space between the anode and the cathode and to form a plasma so as to generate electromagnetic radiation, the anode and the cathode being rotatably mounted around an axis of rotation, the cathode being arranged to hold a liquid metal. The radiation source further includes an activation source arranged to direct an energy beam onto the liquid metal so as to vaporize part of the liquid metal and a liquid metal provider arranged to supply additional liquid metal so as to compensate for the vaporized part of the liquid metal.
    Type: Grant
    Filed: December 6, 2006
    Date of Patent: April 14, 2009
    Assignee: ASML Netherlands B.V.
    Inventors: Vladimir Vitalevitch Ivanov, Vadim Yevgenyevich Banine, Konstantin Nikolaevitch Koshelev, Vladimir Mihailovitch Krivtsun
  • Patent number: 7479646
    Abstract: An extreme ultraviolet source with wide-angle vapor containment and reflux is described. In the optical output directions radiating from the source plasma there is an array of tapered buffer gas heat pipes, with wick structures in the walls. In directions toward the insulators separating the discharge electrodes there are disc-shaped buffered gas heat pipes that prevent metal vapor from condensing on these insulators. A preferred electrode configuration has three electrode discs that operate in the star pinch mode. Another electrode configuration comprises two electrode discs and supports a pseudospark discharge. The star pinch variant of this source has efficiently generated 13.5 nm radiation with lithium vapor and helium buffer gas.
    Type: Grant
    Filed: December 11, 2006
    Date of Patent: January 20, 2009
    Assignee: PLEX LLC
    Inventor: Malcolm W. McGeoch
  • Patent number: 7462978
    Abstract: An apparatus (10) for generating ultraviolet radiation includes a pair of magnetrons (12) coupled to a longitudinally extending microwave chamber (14) for generating standing microwave energy waves within the chamber (14). Microwave energy from the magnetrons (12) is directly coupled to the microwave chamber (14) without the use of coupling slots, antennas or other coupling structures. A longitudinally extending electrodeless plasma bulb (20) is mounted within the microwave chamber (14) and is operable to emit ultraviolet radiation (24) in response to excitation by the microwave energy generated by the pair of magnetrons (12). The microwave chamber (14) includes a pair of longitudinally extending tuning walls (42) positioned on opposite sides of the plasma lamp bulb (20) and capable of overlapping the standing microwave energy waves generally along the longitudinal length of the plasma bulb (20).
    Type: Grant
    Filed: September 15, 2000
    Date of Patent: December 9, 2008
    Assignee: Nordson Corporation
    Inventors: James W. Schmitkons, James M. Borsuk
  • Patent number: 7238952
    Abstract: A metal ion emission device for emitting a metal ion by applying voltage to a molten liquid metal includes a needle-like part having an internal opening in which the liquid metal can be moved. The needle-like part has a first opening for supplying the liquid metal to the opening and a second opening for emitting the liquid metal as a metal ion.
    Type: Grant
    Filed: November 16, 2004
    Date of Patent: July 3, 2007
    Assignee: Canon Kabushiki Kaisha
    Inventor: Mitsuru Ohtsuka
  • Patent number: 5632663
    Abstract: An electroluminescent display in which a dielectric breakdown of a luminescent element is suppressed has luminescent elements disposed between first and second substrates, where the first and second substrates are deformed into a convex shape to improve breakdown characteristics.
    Type: Grant
    Filed: March 30, 1995
    Date of Patent: May 27, 1997
    Assignee: Nippondenso Co., Ltd.
    Inventors: Hajime Ishihara, Kazuhiro Inoguchi, Nobuei Ito, Tadashi Hattori
  • Patent number: 5214344
    Abstract: In order to be able in the case of UV high-power omni-directional radiators to direct the generated radiation only in a preferred direction, and to avoid shading by the inner dielectric tube (2), the outer electrodes (4) are arranged only on a part of the circumference of the outer dielectric tubes (1). In this way, the object to be irradiated or the substance to be irradiated can thus be arranged directly in the range of emission of the discharges (7).
    Type: Grant
    Filed: April 26, 1991
    Date of Patent: May 25, 1993
    Assignee: Asea Brown Boveri Ltd.
    Inventor: Ulrich Kogelschatz
  • Patent number: 5006715
    Abstract: An ion evaporation source for tin ions is prepared by coating a source element with a wettability enhancing gallium coating, and then loading the source with tin. The tin may be the naturally occurring tin, but can be an enriched tin containing a higher concentration of Sn.sup.120. The source produces a beam having a high fraction of Sn.sup.+ and Sn.sup.++ ions, and a small amount of the ionized wettability coating material. All but the desired ions are readily separated from the beam.
    Type: Grant
    Filed: May 16, 1989
    Date of Patent: April 9, 1991
    Assignee: Hughes Aircraft Company
    Inventors: Peter B. Back, Mark W. Utlaut, William M. Clark, Jr.
  • Patent number: 4866330
    Abstract: This invention relates to a device for advancing an electrode-holder elem in particular mounted on a pulse generating apparatus of the type described in U.S. Pat. No. 2,559,227 to Rieber. This advance device comprises a radially projecting element fast with the rear part of the electrode-holder element and member for controlling same, the radially projecting element being formed by a toothed wheel of fixed axial position with respect to the insulating support and controlled in rotation by two pistons mounted symmetrically on either side of the wheel to control a rotation in both directions. This device allows a greater precision of the advance of the electrodes and an increase in the efficiency of destruction of the targets.
    Type: Grant
    Filed: December 9, 1987
    Date of Patent: September 12, 1989
    Assignees: Technomed International, S.A., Institut National de la Sante et de la Recherche Medicale (INSERM)
    Inventors: Bernard Lacruche, Jean-Louis Mestas, Dominique Cathignol
  • Patent number: 4833363
    Abstract: An ignitron device is provided in which a permanent annular magnet at least partly surrounds the region between the ignitron anode and the surface of a mercury pool connected to the cathode terminal, the magnet being effective to create an axial magnetic field in the aforementioned region which tends to constrain the discharge arc of the device towards the center of the pool and away from the envelope walls of the device.
    Type: Grant
    Filed: May 16, 1986
    Date of Patent: May 23, 1989
    Assignee: English Electric Valve Company Limited
    Inventor: Barry Jennis
  • Patent number: 4752692
    Abstract: U-shaped billet (52) has a slot (54) cut therein for receipt of a slip of insulator material (56). This body is machined on its front end (64) to produce a narrow bridge (66) of controlled cross-sectional area. Emitter needle (78) is positioned in a bore through the bridge to be heated by current through the bridge. The ion emitter body is rigid and strong to hold the emitter needle in the proper location.
    Type: Grant
    Filed: April 26, 1985
    Date of Patent: June 21, 1988
    Assignee: Hughes Aircraft Company
    Inventors: Jerg B. Jergenson, Charles M. McKenna
  • Patent number: 4731562
    Abstract: A large-area liquid ion source comprises means for generating, over a large area of the surface of a liquid, an electric field of a strength sufficient to induce emission of ions from a large area of said liquid. Large areas in this context are those distinct from emitting areas in unidimensional emitters.
    Type: Grant
    Filed: May 27, 1986
    Date of Patent: March 15, 1988
    Assignee: The United States of America as represented by the Department of Energy
    Inventor: Arian L. Pregenzer
  • Patent number: 4453078
    Abstract: A reservoir, extracting electrode and circular tungsten filament are maintained at high positive D.C. potential relative to a grounded electrode. Thermal electrons emanated from the filament irradiates and heats the bottom of the reservoir. As a result, powdered CsI held in the reservoir is melted and then forms a liquid CsI cone-shaped portion below the capillary formed at the reservoir bottom. Vaporized CsI molecules are created by further heating the cone-shaped portion, and are ionized by electron beam irradiation, so that a Cs.sup.+ ion beam is obtained.
    Type: Grant
    Filed: June 7, 1982
    Date of Patent: June 5, 1984
    Assignee: JEOL Ltd.
    Inventor: Ryuichi Shimizu
  • Patent number: 4367429
    Abstract: Alloys suitable for use in liquid metal field ionization ion sources are provided. Such sources include an anode electrode for supporting an ion emitter comprising an alloy in the liquid state. The source further comprises means for generating an ionizing electric field and a reservoir for the liquid metal, ions of which are to be emitted by the source.The alloys are selected from the group consisting of (a) metal-metalloid alloys comprising about 10 to 30 atom percent of at least one metalloid element, the balance at least one transition metal element, (b) early transition-late transition alloys comprising about 30 to 85 atom percent of at least one early transition metal, the balance at least one late transition metal, and (c) Group II alloys comprising about 35 to 80 atom percent of at least one Group II element, the balance at least one metal element.Ions generated in liquid metal ion sources form a high brightness ion beam, which permits focusing a beam of emitted ions to a submicrometer spot.
    Type: Grant
    Filed: November 3, 1980
    Date of Patent: January 4, 1983
    Assignee: Hughes Aircraft Company
    Inventors: Victor Wang, Joseph A. Wysocki, Gregory L. Tangonan, Robert L. Seliger
  • Patent number: 4357557
    Abstract: A thin-film electroluminescent display panel is sealed by a pair of glass substrates for protection from the environment. A protective liquid is introduced between a counter glass substrate and a substrate for supporting the electroluminescent display unit. The protective liquid comprises silicone oil or grease which assures the thin-film electroluminescent film of preservation in the electroluminescent display panel. The counter glass substrate is bonded to the support substrate through an adhesive of, for example, photo-curing resin. A capillary tube is provided within the glass substrate for injecting the liquid under vacuum conditions. The liquid has the capability of spreading into pin holes generated on dielectric layers, and is resistant to high voltage, high humidity and high temperature and is inert to layers constituting the thin-film electroluminescent display panel and has a small vapour pressure and a small coefficient of thermal expansion.
    Type: Grant
    Filed: March 14, 1980
    Date of Patent: November 2, 1982
    Assignee: Sharp Kabushiki Kaisha
    Inventors: Akio Inohara, Kiyoshi Sawae, Masashi Kawaguchi, Kinichi Isaka
  • Patent number: 4318029
    Abstract: Liquid metal ion source has cylindrical ceramic tube 12 embraced by strip heater 20 which is held in place by ceramic bushing 26. Apex 28 of the strip heater contains the ion source fuel metal and is pierced by needle 34 having sharp tip 36. Upon heating and electrical bias with respect to a coaxial extraction electrode, tip 36 emits ions.
    Type: Grant
    Filed: May 12, 1980
    Date of Patent: March 2, 1982
    Assignee: Hughes Aircraft Company
    Inventor: Jerg B. Jergenson
  • Patent number: 4318030
    Abstract: Liquid metal ion source has cylindrical ceramic body 12 engaged by one leg of hook shaped strip heater 20 which is held in place by ceramic bushing 24. Apex 18 of the strip heater contains the ion source fuel metal and is pierced by needle 22 having sharp tip 30. Upon heating by heater current flow through needle 22 and heater leg 14 and electrical bias with an extraction electrode, tip 30 emits ions.
    Type: Grant
    Filed: May 12, 1980
    Date of Patent: March 2, 1982
    Assignee: Hughes Aircraft Company
    Inventor: Jerg B. Jergenson
  • Patent number: 4213074
    Abstract: A thin-film electroluminescent display panel is sealed by a pair of glass substrates for protecting itself from the environment. A protective liquid is introduced between a counter glass substrate and a substrate for supporting the electroluminescent display panel. The protective liquid comprises silicon oil or grease which assures the thin-film electroluminescent panel of preservation of the electroluminescent display panel. The counter glass substrate is bonded to the substrate through an adhesive of, for example, photocuring resin. A capillary tube is provided within the substrate for injecting the liquid under vacuum conditions. The counter glass substrate can be plate-shaped thereby eliminating a spacer.
    Type: Grant
    Filed: June 14, 1978
    Date of Patent: July 15, 1980
    Assignee: Sharp Kabushiki Kaisha
    Inventors: Masashi Kawaguchi, Hiroshi Kishishita, Etsuo Mizukami, Yoshiharu Kanatani
  • Patent number: 4173728
    Abstract: A metal vapor discharge lamp includes a cathode comprising a reservoir of liquid cesium. Metallic cesium which is eroded from the cathode surface by the action of the discharge is returned to the reservoir by the combined effects of gravity, evaporation, condensation, and diffusion to provide a highly stable, long-lived lamp.The intense infrared pulse output of cesium vapor discharge lamps of the present invention is well suited for triggering light-activated semiconductor switches through dielectric pipe networks and for pumping neodymium glass or neodymium-YAG lasers.
    Type: Grant
    Filed: May 19, 1978
    Date of Patent: November 6, 1979
    Assignee: General Electric Company
    Inventor: Harald L. Witting
  • Patent number: 4088919
    Abstract: An ion source comprising an electrode consisting of at least one body made of a material such as to be perfectly wetted by a liquid material ions of which are to be emitted by the source and not corrodible by that material, and having a termination the radius of curvature of which is such that a jet of the liquid material will form and be anchored to the termination of the electrode under the influence of an electric field, means for applying the ionizing electric field and a reservoir for the material ions of which are to be emitted by the source.
    Type: Grant
    Filed: April 12, 1977
    Date of Patent: May 9, 1978
    Assignee: United Kingdom Atomic Energy Authority
    Inventors: Roy Clampitt, Derek K. Jefferies