Tubular Or Hollow Sleeve Patents (Class 313/356)
  • Patent number: 11371960
    Abstract: A microscale gas breakdown device includes a first surface and a second surface. The first surface and the second surface define a gap distance. The device includes a perturbation on the first surface or the second surface. The perturbation is defined by a height value and a radius value. The device includes a current source or a voltage source configured to apply a current or a voltage across the first surface and the second surface. In response to the current or the voltage being applied, a resulting discharge travels along a first discharge path in response to being exposed to a high pressure and a second discharge path in response to being exposed to a low pressure.
    Type: Grant
    Filed: July 26, 2019
    Date of Patent: June 28, 2022
    Assignee: Board of Trustees of Michigan State University
    Inventors: Yangyang Fu, Peng Zhang, John P. Verboncoeur
  • Patent number: 9390894
    Abstract: A preferred modular microplasma microchannel reactor device includes a microchannel array arranged with respect to electrodes for generation of plasma and isolated by dielectric from the electrodes. A cover covers a central portion of the microchannel array, while leaving end portions of the microchannel array exposed. A gas inlet and product outlet are arranged to permit flow into, through and out of the microchannel array. Reactor modules of the invention include pluralities of the modular reactor devices. The reactors devices can be arranged by a housing or a frame to be in fluid communication. A system of the invention arranges pluralities of modules. Preferred module housings, frames and reactors include structural features to create alignments and connections. Preferred modules include fans to circulate feedstock and reaction product. Other reactor devices provide plasma actuation for flow.
    Type: Grant
    Filed: September 24, 2014
    Date of Patent: July 12, 2016
    Assignee: THE BOARD OF TRUSTEES OF THE UNIVERSITY OF ILLINOIS
    Inventors: J. Gary Eden, Min Hwan Kim, Jin Hoon Cho, Sung-Jin Park
  • Publication number: 20150115791
    Abstract: An electrode for dielectric barrier discharge treatment of a substrate includes a tubular housing that is made of electrically insulating material and has a bottom wall facing the substrate, two side walls extending away from the substrate, and a top wall connecting the distal ends of the side walls. The electrode further includes an electrically conductive electrode member disposed inside the housing and having a plate that engages an internal surface of the bottom wall of the housing. The electrode has two wings formed in one piece with the plate and engaging internal surfaces of the side walls of the housing.
    Type: Application
    Filed: October 23, 2014
    Publication date: April 30, 2015
    Applicant: OCE-TECHNOLOGIES B.V.
    Inventor: Herman KUYPERS
  • Patent number: 8946662
    Abstract: A light source, with electrodes of alternating polarity attached to a substrate in an excimer ultraviolet (UV) lamp, for generating a plasma discharge between each of the electrodes. The shape of the substrate can shape and control the plasma discharge to reduce exposure of materials susceptible to attack by the halogens. The electrodes can be located such that the plasma discharge occurs in a region where it produces less contact of the halogens with the vulnerable areas of the lamp enclosure. The materials, such as the electrodes, substrate, and envelope, can be selected to withstand corrosive materials. In another embodiment, a plurality of sealed tubes, at least some of which contain an excimer gas are positioned between two electrodes.
    Type: Grant
    Filed: September 28, 2011
    Date of Patent: February 3, 2015
    Assignee: Ultraviolet Sciences, Inc.
    Inventors: James Randall Cooper, Ronald W. Chaffee
  • Publication number: 20140210337
    Abstract: A radio-frequency antenna includes a linear antenna conductor, a dielectric protective pipe provided around the antenna conductor, and a deposit shield provided around the protective pipe, the deposit shield covering at least one portion of the protective pipe and having at least one opening on any line extending along the length of the antenna conductor. Although the thin-film material adheres to the surfaces of the protective pipe and the deposit shield, the deposited substance has at least one discontinuous portion in the longitudinal direction of the antenna conductor. Therefore, in the case where the thin-film material is electrically conductive, the blocking of the radio-frequency induction electric field is prevented. In the case where the thin-film material is not electrically conductive, an attenuation in the intensity of the radio-frequency induction electric field is suppressed.
    Type: Application
    Filed: August 30, 2011
    Publication date: July 31, 2014
    Applicant: EMD CORPORATION
    Inventors: Yuichi Setsuhara, Akinori Ebe
  • Patent number: 8698384
    Abstract: This invention provides a sintered electrode for a cold cathode tube in a cylindrical form having a bottom part on one end and an opening part on the other end, characterized in that a lead-in wire is joined integrally to the bottom part and a requirement of d2/d1>1 is satisfied wherein d1 represents the density of the sintered electrode; and d2 represents the density of the lead-in wire. According to the sintered electrode for a cold cathode tube, the bonding strength between the sintered electrode and the lead-in wire is high, and the handleability is good. The main component of the sintered electrode is particularly preferably identical to the main component of the lead-in wire. Enhancing the density of the lead-in wire can contribute to a further improvement, for example, in reliability.
    Type: Grant
    Filed: March 16, 2007
    Date of Patent: April 15, 2014
    Assignees: Kabushiki Kaisha Toshiba, Toshiba Materials Co., Ltd.
    Inventors: Tsutomu Morioka, Fumihiko Yoshimura, Toshiaki Suto
  • Patent number: 8610343
    Abstract: Components for use in vacuum electron devices are fabricated from highly oriented pyrolytic graphite (HOPG) and exhibit excellent thermal conductivity, low sputtering rates, and low ion erosion rates as compared to conventional components made from copper or molybdenum. HOPG can be reliably brazed by carefully controlling tolerances, calculating braze joint material volume, and applying appropriate compression during furnace operations. The resulting components exhibit superior thermal performance and enhanced resistance to ion erosion and pitting.
    Type: Grant
    Filed: June 8, 2012
    Date of Patent: December 17, 2013
    Assignee: L-3 Communications Corporation
    Inventor: John Charles Cipolla
  • Publication number: 20130300289
    Abstract: Electrode assemblies for plasma reactors include a structure or device for constraining an arc endpoint to a selected area or region on an electrode. In some embodiments, the structure or device may comprise one or more insulating members covering a portion of an electrode. In additional embodiments, the structure or device may provide a magnetic field configured to control a location of an arc endpoint on the electrode. Plasma generating modules, apparatus, and systems include such electrode assemblies. Methods for generating a plasma include covering at least a portion of a surface of an electrode with an electrically insulating member to constrain a location of an arc endpoint on the electrode. Additional methods for generating a plasma include generating a magnetic field to constrain a location of an arc endpoint on an electrode.
    Type: Application
    Filed: July 16, 2013
    Publication date: November 14, 2013
    Inventors: Peter C. Kong, Jon D. Grandy, Brent A. Detering, Larry D. Zuck
  • Publication number: 20130234597
    Abstract: The plasma shield device (13) comprises a hollow structure (40) made of monocrystal body of silicon carbide and having an inside space (40a) and a first and second openings (40b,40c) which are opposed to each other across the inside space. During operation of the plasma generation apparatus, the internal space of the hollow structure forms a discharge zone in which the plasma is generated. Discharge gas is supplied to the internal space of the hollow structure through the first opening and the EUV radiation is mainly emitted through the second opening.
    Type: Application
    Filed: March 7, 2013
    Publication date: September 12, 2013
    Applicant: LASERTEC CORPORATION
    Inventors: Haruhiko KUSUNOSE, Kiwamu TAKEHISA, Tomohiro SUZUKI, Hiroki MIYAI
  • Publication number: 20120280610
    Abstract: Systems and methods presented herein are generally directed to enhancing electrical discharge. A hollow conical electrode may be provided to discharge electrical energy in a directed manner. The conical electrode has two openings: a larger entrance opening; and a smaller exit opening. These openings are configured to allow radiated energy to pass therethrough and form a preferential path of electrical conduction. The larger entrance opening has a surface with a radius of curvature that is larger than that of the second smaller exit opening. The smaller exit opening directs electrical energy to the path because of stronger electric fields. In one embodiment, a protruding electrode element is configured with the smaller exit opening to further enhance electrical discharge by focusing electric fields in the vicinity of the protruding electrode.
    Type: Application
    Filed: May 9, 2005
    Publication date: November 8, 2012
    Inventors: Paul B. Lundquist, Stephen William McCahon
  • Patent number: 8040035
    Abstract: A method of producing a cathode for use in an x-ray tube assembly is provided including machining an emission aperture into a cup emission surface portion of a cup structure. The cup structure is comprised of a cup base portion opposite the cup emissions surface portion. Electro-discharge machining is used to form an electro-discharge machining slot into the cup structure to provide access to the interior of the cup structure. Electro-discharge machining is used to form a transverse coil chamber within the interior by way of the electro-discharge machining slot such that the transverse coil chamber is formed between the cup base portion and the cup emissions surface portion while retaining an essentially contiguous emissions surface perimeter surrounding the emission aperture.
    Type: Grant
    Filed: July 1, 2009
    Date of Patent: October 18, 2011
    Assignee: General Electric Company
    Inventor: Sergio Lemaitre
  • Patent number: 8018129
    Abstract: An entire length of a fluorescent lamp is made short to allow the fluorescent lamp to be downsized and the part other than the fluorescent lamp to be shortened so as to advantageously improve the design potentials and enhance the lighting effect. A fluorescent lamp to be fitted to a feeding side member, or a hook ceiling, having a pair of retaining holes and a pair of feeding side terminals arranged at corresponding positions, comprises a fluorescent lamp main body, an inverter-containing case arranged at a proximal end side of the fluorescent lamp main body and a pair of terminals arranged at the side of the case opposite to the fluorescent lamp main body. The pair of terminals have the tip ends bent so as to be retained by the feeding side member and establish electric connection to the feeding side terminals as they are respectively inserted into the pair of retaining holes of the feeding side member and displaced in the rotating direction around the center of the fluorescent lamp.
    Type: Grant
    Filed: February 20, 2007
    Date of Patent: September 13, 2011
    Assignees: Monoco Technologies Corp.
    Inventor: Namio Nakazawa
  • Patent number: 7938707
    Abstract: Methods are disclosed for batch fabrication of vacuum switch tubes that reduce manufacturing costs and improve tube to tube uniformity. The disclosed methods comprise creating a stacked assembly of layers containing a plurality of adjacently spaced switch tube sub-assemblies aligned and registered through common layers. The layers include trigger electrode layer, cathode layer including a metallic support/contact with graphite cathode inserts, trigger probe sub-assembly layer, ceramic (e.g. tube body) insulator layer, and metallic anode sub-assembly layer. Braze alloy layers are incorporated into the stacked assembly of layers, and can include active metal braze alloys or direct braze alloys, to eliminate costs associated with traditional metallization of the ceramic insulator layers. The entire stacked assembly is then heated to braze/join/bond the stack-up into a cohesive body, after which individual switch tubes are singulated by methods such as sawing.
    Type: Grant
    Filed: July 7, 2008
    Date of Patent: May 10, 2011
    Assignee: Sandia Corporation
    Inventors: Charles A. Walker, Frank R. Trowbridge
  • Patent number: 7868530
    Abstract: The disclosed subject matter includes a filament electrode that can include a filament coil connected with a pair of lead wires with confidence. It is possible for a fluorescent lamp using the filament electrode to emit light with a wider range while located in a thin tube. The filament electrode can include a pair of connecting pipes, a pair of lead wires located parallel to each other, and a filament coil including two connecting parts. Each of the two connecting parts of the filament coil can attach to respective ends of the pair of lead wires via the pair of connecting pipes via pressure bonding so as not to contact the connecting parts of the filament coil with the ends of the pair of lead wires located in the pair of connecting pipes and so as to align the structures. Thus, the filament electrode can be used even in a thin glass or quartz tube and can provide an effective heat-shield operation.
    Type: Grant
    Filed: December 27, 2007
    Date of Patent: January 11, 2011
    Assignee: Stanley Electric Co., Ltd.
    Inventors: Toshiyuki Nagahara, Koji Kikuchihara, Masayuki Kanechika
  • Publication number: 20100117514
    Abstract: An electrode (1) for cold cathode tube of the present invention includes a cylindrical sidewall portion (2), a bottom portion (3) provided at one end of the cylindrical sidewall portion, and an opening portion (4) provided at the other end of the cylindrical sidewall portion. The electrode is formed of a sintered body of a high melting point metal (W, Nb, Ta, Mo or Re). When an overall length of the electrode is L, an inside diameter of the cylindrical sidewall portion at a position of L/2 is d1, an inside diameter of the bottom portion is d2, and an arc of an inner surface (5) of the cylindrical sidewall portion connecting a portion of the inside diameter d1 and a portion of the inside diameter d2 is R, the electrode satisfies the following condition; L?6 [mm], d2>d1, R?20 [mm].
    Type: Application
    Filed: October 10, 2007
    Publication date: May 13, 2010
    Inventors: Tsutomu Morioka, Toshiaki Suto, Fumihiko Yoshimura
  • Publication number: 20100045159
    Abstract: A micro discharge device (MDD) capable of low voltage discharges in a variety of carrier gases for detection and/or ionization includes a sample introduction capillary having a first open end connected to a gas system and a second open end connected to a cylinder comprising a high dielectric constant material. A high voltage electrode can be placed in close proximity to the outer diameter of the cylinder and at a close linear distance to the second open end of the sample introduction capillary. A region can be formed inside the cylinder between the second end of the sample introduction capillary and the high voltage electrode wherein discharge can be located. An optical emission collector can be located through the flow manifold to a receiving location near the high voltage electrode within a region from inside the cylinder between the high voltage electrode and the manifold.
    Type: Application
    Filed: October 30, 2008
    Publication date: February 25, 2010
    Inventors: Adam Dewey McBrady, Fouad Nusseibeh, Terry M. Marta, Robert Higashi
  • Publication number: 20090278436
    Abstract: An ionization vacuum gauge includes a cathode, an anode and an ion collector. The anode is surrounding the cathode. The ion collector is surrounding the anode. The cathode, the anode and the ion collector are concentrically aligned and arranged in that order. The anode comprises a carbon nanotube structure including a plurality of carbon nanotubes.
    Type: Application
    Filed: April 30, 2009
    Publication date: November 12, 2009
    Applicants: Tsinghua University, HON HAI Precision Industry Co., LTD.
    Inventors: Lin Xiao, Liang Liu, Kai-Li Jiang, Shou-Shan Fan
  • Publication number: 20090224647
    Abstract: There are provided electrode emission source components (105) and electrical apparatus comprising the same. In one embodiment an electrode emission source component comprises a tubular metal body (107) having first and second open ends (140, 150). Also provided are methods of forming electrode components.
    Type: Application
    Filed: November 17, 2006
    Publication date: September 10, 2009
    Inventors: David Steven Barratt, Derek John Holden
  • Patent number: 7576481
    Abstract: A method of producing a cathode for use in an x-ray tube assembly is provided including machining an emission aperture into a cup emission surface portion of a cup structure. The cup structure is comprised of a cup base portion opposite the cup emissions surface portion. Electro-discharge machining is used to form an electro-discharge machining slot into the cup structure to provide access to the interior of the cup structure. Electro-discharge machining is used to form a transverse coil chamber within the interior by way of the electro-discharge machining slot such that the transverse coil chamber is formed between the cup base portion and the cup emissions surface portion while retaining an essentially contiguous emissions surface perimeter surrounding the emission aperture.
    Type: Grant
    Filed: June 30, 2005
    Date of Patent: August 18, 2009
    Assignee: General Electric Co.
    Inventor: Sergio Lemaitre
  • Publication number: 20090051260
    Abstract: This invention provides a sintered electrode for a cold cathode tube in a cylindrical form having a bottom part on one end and an opening part on the other end, characterized in that a lead-in wire is joined integrally to the bottom part and a requirement of d2/d1>1 is satisfied wherein d1 represents the density of the sintered electrode; and d2 represents the density of the lead-in wire. According to the sintered electrode for a cold cathode tube, the bonding strength between the sintered electrode and the lead-in wire is high, and the handleability is good. The main component of the sintered electrode is particularly preferably identical to the main component of the lead-in wire. Enhancing the density of the lead-in wire can contribute to a further improvement, for example, in reliability.
    Type: Application
    Filed: March 16, 2007
    Publication date: February 26, 2009
    Applicants: Kabushiki Kaisha Toshiba, Toshiba Materials Co., Ltd
    Inventors: Tsutomu Morioka, Fumihiko Yoshimura, Toshiaki Suto
  • Patent number: 7439663
    Abstract: A high pressure gas discharge device and methods of using the device as a UV gas discharge light source are disclosed. The device has a cathode covered partially with a dielectric layer which separates the cathode from an anode. A discharge device utilizes one or more microhollows in the uncovered part of the cathode. Methods of utilizing the discharge devise as a gas discharge light source for producing ultrapure water.
    Type: Grant
    Filed: December 29, 2003
    Date of Patent: October 21, 2008
    Assignee: Ultraviolet Sciences, Inc.
    Inventors: James Randall Cooper, Karl H. Schoenbach
  • Publication number: 20080231191
    Abstract: The invention relates to an electrode for a high intensity discharge lamp, at least consisting of an electrode head (2), which has a spherical shape, and an electrode base (1), wherein, in the direction perpendicular to the longitudinal axis of the electrode, the electrode head (2) has a greater dimension than the electrode base (1) at the transition between electrode head (2) and electrode base (1), and a spherical electrode tip (3) is arranged on the electrode head (2), which electrode tip, in the direction perpendicular to the longitudinal axis of the electrode, has a smaller maximum dimension than the electrode head (2). A cylindrical protrusion (4) is arranged on the electrode tip (3), which cylindrical protrusion, in the direction perpendicular to the longitudinal axis of the electrode, has a smaller maximum dimension than the adjoining electrode tip (3). The electrode can be produced from a one-piece blank.
    Type: Application
    Filed: May 8, 2006
    Publication date: September 25, 2008
    Applicant: KONINKLIJKE PHILIPS ELECTRONICS, N.V.
    Inventor: Pavel Pekarski
  • Publication number: 20080157676
    Abstract: The disclosed subject matter includes a filament electrode that can include a filament coil connected with a pair of lead wires with confidence. It is possible for a fluorescent lamp using the filament electrode to emit light with a wider range while located in a thin tube. The filament electrode can include a pair of connecting pipes, a pair of lead wires located parallel to each other, and a filament coil including two connecting parts. Each of the two connecting parts of the filament coil can attach to respective ends of the pair of lead wires via the pair of connecting pipes via pressure bonding so as not to contact the connecting parts of the filament coil with the ends of the pair of lead wires located in the pair of connecting pipes and so as to align the structures. Thus, the filament electrode can be used even in a thin glass or quartz tube and can provide an effective heat-shield operation.
    Type: Application
    Filed: December 27, 2007
    Publication date: July 3, 2008
    Inventors: Toshiyuki Nagahara, Koji Kikuchihara, Masayuki Kanechika
  • Publication number: 20080129181
    Abstract: There is provided apparatus (100) for forming a tube (9) by bending a metal sheet (11). The apparatus (100) comprises a forming station (102) comprising a forming pin (101) around which a metal sheet (11) can be wrapped and a plurality of form fingers (110, 120, 130, 140) radially spaced around the forming pin (101) and moveable relative thereto. Also provided are electrode emission source components (1) The components (1) comprise an open ended tube (9) and a-cap (13), wherein the tube (9) is formed from* a metal sheet (11) which is formed into a tubular configuration. Further provided are electrodes, electrical apparatus and methods of forming tubes.
    Type: Application
    Filed: November 17, 2005
    Publication date: June 5, 2008
    Applicant: BLACKBURN MICROTECH SOLUTIONS LIMITED
    Inventors: David Steven Barratt, Derek John Holden
  • Patent number: 7298075
    Abstract: The present invention relates to a discharge electrode (1) for use in an electrostatic precipitator in combination with one or more collecting electrodes, wherein the discharge electrode (1) has the form of a tubular element (2). The discharge electrode (1) includes electrode elements (3) that consist of tongues (4) bent out from the wall (5) of said tubular element, said tongues also be bent upwards. The invention also relates to a method of producing the discharge electrode.
    Type: Grant
    Filed: November 27, 2002
    Date of Patent: November 20, 2007
    Assignee: BACT System I Skelleftea AB
    Inventor: Harry Johansson
  • Patent number: 7112918
    Abstract: A microdischarge device has a semiconductor layer, an intermediate layer, and a conductive layer. A tapered cavity is disposed in at least the semiconductor layer.
    Type: Grant
    Filed: January 15, 2002
    Date of Patent: September 26, 2006
    Assignee: The Board of Trustees of the University of Illinois
    Inventors: J. Gary Eden, Sung-Jin Park, Jack Chen, Chang Liu
  • Patent number: 7025646
    Abstract: A microcavity discharge device generates radiation with wavelengths in the range of from 11 to 14 nanometers. The device has a semiconductor plug, a dielectric layer, and an anode layer. A microcavity extends completely through the anode and dielectric layers and partially into the semiconductor plug. According to one aspect of the invention, a substrate layer has an aperture aligned with the microcavity. The microcavity is filled with a discharge gas under pressure which is excited by a combination of constant DC current and a pulsed current to produce radiation of the desired wavelength. The radiation is emitted through the base of the microcavity. A second embodiment has a metal layer which transmits radiation with wavelengths in the range of from 11 to 12 nanometers, and which excludes longer wavelengths from the emitted beam.
    Type: Grant
    Filed: June 13, 2005
    Date of Patent: April 11, 2006
    Assignee: Micron Technology, Inc.
    Inventor: Joseph E. Geusic
  • Patent number: 6989629
    Abstract: Method and apparatus for mitigating the transport of debris generated and dispersed from electric discharge sources by thermophoretic and electrostatic deposition. A member is positioned adjacent the front electrode of an electric discharge source and used to establish a temperature difference between it and the front electrode. By flowing a gas between the member and the front electrode a temperature gradient is established that can be used for thermophoretic deposition of particulate debris on either the member or front electrode depending upon the direction of the thermal gradient. Establishing an electric field between the member and front electrode can aid in particle deposition by electrostatic deposition.
    Type: Grant
    Filed: January 21, 2005
    Date of Patent: January 24, 2006
    Assignee: EUV LLC
    Inventors: Leonard E. Klebanoff, Daniel J. Rader, William T. Silfvast
  • Patent number: 6936956
    Abstract: A discharge lamp with a high output power in which an increase of the current to be supplied to the discharge lamp can be enabled without the need to enlarge the discharge lamp and the surrounding system. The discharge lamp includes an arc tube having a pair of opposed electrodes, at least one of the electrodes having an electrode body in which a hermetically sealed interior space is formed, and a heat conductor partially filling the hermetically sealed interior space. This heat conductor consists of metal that has a higher thermal conductivity or a lower melting point than the metal comprising the electrode body.
    Type: Grant
    Filed: April 23, 2003
    Date of Patent: August 30, 2005
    Assignee: Ushiodenki Kabushiki Kaisha
    Inventors: Mitsuru Ikeuchi, Katsumi Shojo, Yoichi Kono
  • Patent number: 6888297
    Abstract: Method and apparatus for mitigating the transport of debris generated and dispersed from electric discharge sources by thermophoretic and electrostatic deposition. A member is positioned adjacent the front electrode of an electric discharge source and used to establish a temperature difference between it and the front electrode. By flowing a gas between the member and the front electrode a temperature gradient is established that can be used for thermophoretic deposition of particulate debris on either the member or front electrode depending upon the direction of the thermal gradient. Establishing an electric field between the member and front electrode can aid in particle deposition by electrostatic deposition.
    Type: Grant
    Filed: December 19, 2002
    Date of Patent: May 3, 2005
    Assignee: EUV LLC
    Inventors: Leonard E. Klebanoff, William T. Silfvast, Daniel J. Rader
  • Patent number: 6815891
    Abstract: A discharge device has a diode with a depletion region, a channel extending through a surface of the diode, and a gas within the channel. The gas is excited and a discharge formed by reverse biasing the diode and establishing an electric field in the depletion region of the diode.
    Type: Grant
    Filed: October 26, 2001
    Date of Patent: November 9, 2004
    Assignee: Board of Trustees of the University of Illinois
    Inventors: J. Gary Eden, Sung-Jin Park, Clark J. Wagner
  • Publication number: 20040164680
    Abstract: A hollow cathode having at least a portion of the inner, outer or both surfaces coated with a layer of a getter material is described. Some methods for the production of the hollow cathode of the invention are also described, which include cathodic and electrophoretic deposition of the getter layer onto the hollow cathode.
    Type: Application
    Filed: March 18, 2004
    Publication date: August 26, 2004
    Applicant: SAES Getters S.p.A.
    Inventors: Alessandro Gallitognotta, Claudio Boffito, Alessio Corazza
  • Publication number: 20040119394
    Abstract: Method and apparatus for mitigating the transport of debris generated and dispersed from electric discharge sources by thermophoretic and electrostatic deposition. A member is positioned adjacent the front electrode of an electric discharge source and used to establish a temperature difference between it and the front electrode. By flowing a gas between the member and the front electrode a temperature gradient is established that can be used for thermophoretic deposition of particulate debris on either the member or front electrode depending upon the direction of the thermal gradient. Establishing an electric field between the member and front electrode can aid in particle deposition by electrostatic deposition.
    Type: Application
    Filed: December 19, 2002
    Publication date: June 24, 2004
    Inventors: Leonard E. Klebanoff, William T. Silfvast, Daniel J. Rader
  • Publication number: 20040046503
    Abstract: A microcavity discharge device generates radiation with wavelengths in the range of from 11 to 14 nanometers. The device has a semiconductor plug, a dielectric layer, and an anode layer. A microcavity extends completely through the anode and dielectric layers and partially into the semiconductor plug. According to one aspect of the invention, a substrate layer has an aperture aligned with the microcavity. The microcavity is filled with a discharge gas under pressure which is excited by a combination of constant DC current and a pulsed current to produce radiation of the desired wavelength. The radiation is emitted through the base of the microcavity. A second embodiment has a metal layer which transmits radiation with wavelengths in the range of from 11 to 12 nanometers, and which excludes longer wavelengths from the emitted beam.
    Type: Application
    Filed: August 26, 2003
    Publication date: March 11, 2004
    Inventor: Joseph E. Geusic
  • Patent number: 6657370
    Abstract: A microcavity discharge device generates radiation with wavelengths in the range of from 11 to 14 nanometers. The device has a semiconductor plug, a dielectric layer, and an anode layer. A microcavity extends completely through the anode and dielectric layers and partially into the semiconductor plug. According to one aspect of the invention, a substrate layer has an aperture aligned with the microcavity. The microcavity is filled with a discharge gas under pressure which is excited by a combination of constant DC current and a pulsed current to produce radiation of the desired wavelength. The radiation is emitted through the base of the microcavity. A second embodiment has a metal layer which transmits radiation with wavelengths in the range of from 11 to 12 nanometers, and which excludes longer wavelengths from the emitted beam.
    Type: Grant
    Filed: August 21, 2000
    Date of Patent: December 2, 2003
    Assignee: Micron Technology, Inc.
    Inventor: Joseph E. Geusic
  • Publication number: 20030178928
    Abstract: A light source with a sealed, light-transmissive tube filled with high pressure gases or high pressure gas mixtures and a microhollow cathode (MHC) discharge capable of excimer production are provided.
    Type: Application
    Filed: June 7, 2001
    Publication date: September 25, 2003
    Inventors: Kurt F. Becker, Peter F. Kurunczi, Karl H. Schoenbach
  • Publication number: 20030132693
    Abstract: A microdischarge device has a semiconductor layer, an intermediate layer, and a conductive layer. A tapered cavity is disposed in at least the semiconductor layer.
    Type: Application
    Filed: January 15, 2002
    Publication date: July 17, 2003
    Inventors: J. Gary Eden, Sung-Jin Park, Jack Chen, Chang Liu
  • Patent number: 6563257
    Abstract: A discharge device of the invention includes multiple bonded ceramic layers with electrodes formed between the layers. It can be combined with the various MCIC technologies to produce myriad useful devices. Contacts are made to the electrodes, which may be grouped in different arrangements. The electrodes contact a hole through some or all of the ceramic layers to define a discharge cavity. Different groupings of the electrodes will produce different types of discharge. Alternating the electrodes in interdigitated pairs permits an arbitrary extension of the discharge cavity length. Having consecutive anodes or cathodes permits formation of regions where electrons may cool. Another device of the invention includes a multilayer ceramic structure having a hole formed in a least one outer layer through an electrode on the outer side of the layer and in contact with an electrode between two layers. A contact is formed to the electrode between layers through any remaining layers in the multilayer ceramic structure.
    Type: Grant
    Filed: December 29, 2000
    Date of Patent: May 13, 2003
    Assignee: The Board of Trustees of the University of Illinois
    Inventors: Bruce A. Vojak, J. Gary Eden, Sung-Jin Park, Clark Wagner
  • Publication number: 20030080664
    Abstract: A discharge device has a diode with a depletion region, a channel extending through a surface of the diode, and a gas within the channel. The gas is excited and a discharge formed by reverse biasing the diode and establishing an electric field in the depletion region of the diode.
    Type: Application
    Filed: October 26, 2001
    Publication date: May 1, 2003
    Inventors: J. Gary Eden, Sung-Jin Park, Clark J. Wagner
  • Patent number: 6524459
    Abstract: An electron-emitting device has a primary and a secondary coil wound on an I-core, an E-core combined with the I-core and a single output terminal extended from one end of the secondary coil. An electron-emitting electrode includes a stainless steel pipe, an insulator-coated conductor inserted in a pipe, and tourmaline powder filling the gap between the pipe and the conductor. The stainless steel pipe is enclosed in a polyethylene pipe, and the openings of the stainless steel pipe and polyethylene pipe are sealed by silicon resin. The electron-emitting electrode is connected to the output terminal of the electron-emitting device and is submerged in an object to be processed, which is in turn charged negatively and activated by high electrostatic potential.
    Type: Grant
    Filed: December 14, 2000
    Date of Patent: February 25, 2003
    Assignee: Jem Co., Ltd.
    Inventor: Katsuyuki Niidome
  • Patent number: 6518692
    Abstract: A discharge device for operation in a gas at a prescribed pressure includes a cathode having a plurality of micro hollows therein, and an anode spaced from the cathode. Each of the micro hollows has dimensions selected to produce a micro hollow discharge at the prescribed pressure. Preferably, each of the micro hollows has a cross-sectional dimension that is on the order of the mean free path of electrons in the gas. Electrical energy is coupled to the cathode and the anode at a voltage and current for producing micro hollow discharges in each of the micro hollows in the cathode. The discharge device may include a discharge chamber for maintaining the prescribed pressure. A dielectric layer may be disposed on the cathode when the spacing between the cathode and the anode is greater than about the mean free path of electrons in the gas. Applications of the discharge device include fluorescent lamps, excimer lamps, flat fluorescent light sources, miniature gas lasers, electron sources and ion sources.
    Type: Grant
    Filed: October 31, 2001
    Date of Patent: February 11, 2003
    Assignees: Old Dominion University, OSRAM Sylvania, Inc.
    Inventors: Karl H. Schoenbach, Wojciech W. Byszewski, Frank E. Peterkin, Amin N. Dharami
  • Patent number: 6465950
    Abstract: The microtips of charge emitting material, which define the cathode of the flat FED screen and face the grid of the screen, are tubular and have portions with a small radius of curvature. The microtips are obtained by forming openings in the dielectric layer separating the cathode connection layer from the grid layer, depositing a conducting material layer to cover the walls of the openings, and anisotropically etching the layer of conducting material to form inwardly-inclined surfaces with emitting tips. Subsequently, the portions of the dielectric layer surrounding the microtips are removed.
    Type: Grant
    Filed: January 13, 2000
    Date of Patent: October 15, 2002
    Assignee: SGS-Thomson Microelectronics S.r.l.
    Inventors: Livio Baldi, Maria Santina Marangon
  • Patent number: 6356015
    Abstract: The invention is directed to an improved hollow cathode lamp (15). In the preferred embodiment, the lamp is comprised of a stem (23), a cathode lead (18) which passes through the stem, and a getter (26). The improvement includes a flash shield (28) positioned between the getter and the stem, whereby the flash shield will limit the deposit of getter metal on the stem when the getter flashes. The flash shield may be a circular disk and composed of nickel. The flash shield may include an evacuation passage (46). The flash shield may also be capable of being heated to about 1000° C. during flashing, whereby the flash shield may be heated so as to convectionally repel the getter metal when the getter flashes.
    Type: Grant
    Filed: June 19, 2001
    Date of Patent: March 12, 2002
    Assignee: Imaging & Sensing Technology Corporation
    Inventor: Eric P Davenport
  • Patent number: 6346770
    Abstract: A discharge device for operation in a gas at a prescribed pressure includes a cathode having a plurality of micro hollows therein, and an anode spaced from the cathode. Each of the micro hollows has dimensions selected to produce a micro hollow discharge at the prescribed pressure. Preferably, each of the micro hollows has a cross-sectional dimension that is on the order of the mean free path of electrons in the gas. Electrical energy is coupled to the cathode and the anode at a voltage and current for producing micro hollow discharges in each of the micro hollows in the cathode. The discharge device may include a discharge chamber for maintaining the prescribed pressure. A dielectric layer may be disposed on the cathode when the spacing between the cathode and the anode is greater than about the mean free path of electrons in the gas. Applications of the discharge device include fluorescent lamps, excimer lamps, flat fluorescent light sources, miniature gas lasers, electron sources and ion sources.
    Type: Grant
    Filed: March 22, 2000
    Date of Patent: February 12, 2002
    Assignees: Osram Sylvania, Inc., Old Dominion University
    Inventors: Karl H. Schoenbach, Wojciech W. Byszewski, Frank E. Peterkin, Amin N. Dharamsi
  • Patent number: 6337537
    Abstract: A vacuum diode with a high saturation current density and a rapid response time for the detection of electromagnetic radiation. This diode comprises a grid (6) in the shape of a cylinder and a photo-cathode (4) which extends along the axis (X) of the cylinder. The photo-cathode includes a part of the internal conductor of a coaxial cable (8), the external conductor and the electrically insulating material of the coaxial cable being removed opposite this part, and the grid is electrically connected to the external conductor of this coaxial cable, the internal and external conductors being coaxial. Application to the detection of visible, infra-red, ultra-violet and X radiation.
    Type: Grant
    Filed: October 19, 1999
    Date of Patent: January 8, 2002
    Assignee: Commissariat a l'Energie Atomique
    Inventors: Jean-Luc Bourgade, Dominique Gontier
  • Patent number: 6242854
    Abstract: In an indirectly heated cathode comprising a heater having an alumina electrical insulating layer formed by layering and sintering alumina particles on a surface of a metal wire and an electron-emitting part that receives heat from the heater and emits thermoelectrons, and a cathode-ray tube comprising the indirectly heated cathode, the alumina particles contained in the alumina electrical insulating layer have a purity of at least 99.7 wt % and the alumina particles used for forming the alumina electrical insulating layer have a Na content of 20 ppm or less or a Si content of 100 ppm or less, thus enabling stable production, avoiding the occurrence of cracks in the alumina electrical insulating layer and heater deformation even in the practical operation of the cathode-ray tube, and lengthening the life of the heater.
    Type: Grant
    Filed: January 11, 1999
    Date of Patent: June 5, 2001
    Assignee: Matsushita Electronics Corporation
    Inventors: Yoji Yamamoto, Masaki Kawasaki, Hideo Koshino, Junya Nakai, Tetsuya Shimizu
  • Patent number: 6194833
    Abstract: A microdischarge device having a gas or vapor contained in a microcavity and in electrical contact with a semiconductor substrate, preferably a silicon wafer. A preferred structure includes successive cathode substrate or film, dielectric, and conductive anode layers with the anode and dielectric layers penetrated by a plurality of microcavities to allow electrical contact between the discharge medium and the substrate cathode layer. A hollow cathode structure includes a microcavity that penetrates the cathode. An optical waveguide network may be used in addition to collect and concentrate emission from groups of individual microcavities. The small aperture of the cavity area, of about 1 to 400 micrometers in diameter, enable the electrons in the discharge to be ballistic under certain conditions and permit the gas pressure to exceed one atmosphere. In addition, the small dimensions permit resonance radiation, such as the 254 nm line of atomic mercury, to be extracted efficiently from the discharge volume.
    Type: Grant
    Filed: October 22, 1998
    Date of Patent: February 27, 2001
    Assignee: The Board of Trustees of the University of Illinois
    Inventors: Thomas A. DeTemple, James Frame, David J. Wheeler, J. Gary Eden
  • Patent number: 6016027
    Abstract: A microdischarge lamp formed in a one piece integral substrate, preferably a silicon wafer, via micromachining techniques commonly used in integrated circuit manufacture. The lamp includes a micromachined cavity area for enclosing discharge filler, such as mercury vapor. The one piece substrate includes one or more semiconductor regions which act as electrodes for the lamp. A light transmissive cap seals the cavity area. Selection of particular aperture to length ratios for the cavity area permits the lamp to be operated either as a positive column or hollow cathode discharge. Hollow cathode discharge has been demonstrated at pressures of up to about 200 Torr. The small aperture of the cavity area, of about 1 to 400 micrometers, enable the electrons in the discharge to be ballistic. In addition, the small dimensions permit discharges based upon resonance radiation, such as the 253 nm line of atomic mercury.
    Type: Grant
    Filed: May 19, 1997
    Date of Patent: January 18, 2000
    Assignee: The Board of Trustees of the University of Illinois
    Inventors: Thomas A. DeTemple, James Frame, David J. Wheeler, J. Gary Eden
  • Patent number: 5856726
    Abstract: An electric discharge lamp with an internally threaded electrode is disclosed. The lamp includes an envelope, a support rod, and an electrode can with an interior surface having a multiplicity of peaks, points, of sharp edge regions. These equal height prominences evenly extended around the inside wall of the electrode can. The threaded electrode yields a highly emissive electrode with no emissive material to be eroded.
    Type: Grant
    Filed: March 15, 1996
    Date of Patent: January 5, 1999
    Assignee: Osram Sylvania Inc.
    Inventors: Jean M. Evans, Harold L. Rothwell, Jr.
  • Patent number: 5675214
    Abstract: The low-pressure discharge lamp is discolsed having a lamp vessel into which hollow cylindrical electrodes enter, between which a discharge path extends. At least one of the electrodes has a tube at a distance from an end thereof, the tube extending in the discharge path. The tube is connected to the electrode by electrically conductive means and is coated with electron emissive material. The surface area of the material of the means in cross-section is at most 25% of the surface area of the material of the electrode in cross-section.
    Type: Grant
    Filed: September 19, 1995
    Date of Patent: October 7, 1997
    Assignee: U.S. Philips Corporation
    Inventors: Andreas S. G. Geven, Jeroen C. Langevoort, Henricus L. A. A. Vogels, Patricius W. M. Lepelaars, Hui-Meng Chow