Electron Permeable Window Patents (Class 313/420)
  • Patent number: 10546990
    Abstract: A thermionic energy converter, preferably including an anode and a cathode. An anode of a thermionic energy converter, preferably including an n-type semiconductor, one or more supplemental layers, and an electrical contact. A method for work function reduction and/or thermionic energy conversion, preferably including inputting thermal energy to a thermionic energy converter, illuminating an anode of the thermionic energy converter, thereby preferably reducing a work function of the anode, and extracting electrical power from the system.
    Type: Grant
    Filed: December 12, 2018
    Date of Patent: January 28, 2020
    Assignee: Spark Thermonics, Inc.
    Inventors: Jared William Schwede, Lucas Heinrich Hess
  • Patent number: 10546742
    Abstract: The present disclosure provides an interconnect formed on a substrate and methods for forming the interconnect on the substrate. In one embodiment, the method for forming an interconnect on a substrate includes depositing a barrier layer on the substrate, depositing a transition layer on the barrier layer, and depositing an etch-stop layer on the transition layer, wherein the transition layer shares a common element with the barrier layer, and wherein the transition layer shares a common element with the etch-stop layer.
    Type: Grant
    Filed: December 31, 2018
    Date of Patent: January 28, 2020
    Assignee: APPLIED MATERIALS, INC.
    Inventors: He Ren, Mehul B. Naik, Yong Cao, Yana Cheng, Weifeng Ye
  • Patent number: 9891327
    Abstract: The present invention relates to a method for manufacturing a structure, including the steps of forming a recessed section in a first surface of a substrate; filling the recessed section with metal to form a metal structure; exposing the metal structure from the substrate; and applying resin onto the exposed metal structure and solidifying the resin to form a resin layer.
    Type: Grant
    Filed: July 11, 2012
    Date of Patent: February 13, 2018
    Assignee: Canon Kabushiki Kaisha
    Inventors: Takayuki Teshima, Yutaka Setomoto
  • Patent number: 9715990
    Abstract: Window tiles for electron beam systems are provided. The window tiles can comprise a first surface and a second surface, and one or more features extending from the first surface to the second surface. The one or more features can have a non-uniform or tapered cross-section between the first surface and the second surface. The first surface can be configured to be exposed to vacuum conditions and can be configured to receive electrons accelerated from an electron beam generator. The second surface can be configured to allow electrons to pass through to a foil. The window tiles can improve electron beam processing systems for example by increasing electron throughput, lowering power consumption, reducing heat absorption to the foil, improving and increasing foil life, and potentially allowing for use of smaller and cheaper machines in electron beam processing.
    Type: Grant
    Filed: December 18, 2015
    Date of Patent: July 25, 2017
    Assignee: Energy Sciences Inc.
    Inventors: Rich Alexy, Imtiaz Rangwalla, Jonathan Baroud
  • Patent number: 9437389
    Abstract: An assembly of a support plate and an exit window foil for use in an electron beam device. The support plate is designed to reduce wrinkles in said foil, which wrinkles may arise due to surplus foil arising in the assembly process. The foil is being bonded to the support plate along a closed bonding line bounding a substantially circular area in which the support plate is provided with apertures and foil support portions and in which area the foil is adapted to serve as a portion of a wall of a vacuum tight housing of the electron beam device. Another aspect involves a method for using the assembly in a filling machine, as well as a method of reducing wrinkles.
    Type: Grant
    Filed: February 1, 2011
    Date of Patent: September 6, 2016
    Assignee: TETRA LAVAL HOLDINGS & FINANCE S.A.
    Inventors: Andreas Åberg, Ulrika Linné, Urs Hostettler
  • Patent number: 9214326
    Abstract: An ion source for chemical ionization of analytes at atmospheric pressure with a non-radioactive electron source in a vacuum chamber, includes, a reaction chamber at atmospheric pressure, and a window with an electron-permeable and essentially gas-impermeable membrane in between. The window may be a structured window membrane, i.e. a window membrane with a structured form comprising a multitude of structural elements, between the reaction chamber and the vacuum chamber.
    Type: Grant
    Filed: October 15, 2008
    Date of Patent: December 15, 2015
    Assignee: Bruker Daltonik GmbH
    Inventors: Hans-Rüdiger Döring, Klaus Zimmer, Joachim Zajadacz
  • Patent number: 9183963
    Abstract: The present invention refers to a method for arranging a window foil to an electron exit window assembly of an electron beam generating device, comprises the steps of: arranging a foil support plate on a housing of the electron beam generating device, bonding a window foil to the foil support plate along a continuous bonding line, attaching a skirt of said window foil extending radially outside of the bonding line to the housing along a continuous attachment line. The invention also relates to an electron exit window assembly of an electron beam generating device.
    Type: Grant
    Filed: January 27, 2010
    Date of Patent: November 10, 2015
    Assignee: TETRA LAVAL HOLDINGS & FINANCE S.A.
    Inventors: Anders Kristiansson, Krister Kristiansson, Luca Poppi, Lars-Åke Näslund, Werner Haag, Kurt Holm, Toni Waber
  • Patent number: 9159522
    Abstract: The present invention refers to a method for assembling an electron exit window of an electron beam generating device, comprising the steps of: arranging a foil support plate on a housing of the electron beam generating device, bonding a window foil to a frame along at least one continuous bonding line, thus creating an exit window sub-assembly, and attaching the exit window sub-assembly onto the housing. The invention also relates to an electron exit window assembly.
    Type: Grant
    Filed: September 8, 2011
    Date of Patent: October 13, 2015
    Assignee: TETRA LAVAL HOLDINGS & FINANCE S.A.
    Inventors: Luca Poppi, Paolo Benedetti
  • Patent number: 9101040
    Abstract: A DC voltage-operated particle accelerator for accelerating a charged particle from a source to a target includes a first electrode arrangement and a separate second electrode arrangement. The first electrode arrangement and the second electrode arrangement are disposed in such a way that the particle successively runs through the first electrode arrangement and the second electrode arrangement. Each of the electrode arrangements is designed as a high-voltage cascade.
    Type: Grant
    Filed: May 20, 2011
    Date of Patent: August 4, 2015
    Assignee: SIEMENS AKTIENGESELLSCHAFT
    Inventor: Oliver Heid
  • Publication number: 20150028220
    Abstract: An electron exit window foil for use with a high performance electron beam generator operating in a corrosive environment is provided. The electron exit window foil comprises a sandwich structure having a film of Ti, a first layer of a material having a higher thermal conductivity than Ti, and a flexible second layer of a material being able to protect said film from said corrosive environment, wherein the second layer is facing the corrosive environment.
    Type: Application
    Filed: November 9, 2011
    Publication date: January 29, 2015
    Applicant: Tetra Laval Holdings & Finance S.A.
    Inventor: Krister KRISTIANSSON
  • Patent number: 8907554
    Abstract: An assembly of a support plate and an exit window foil for use in an electron beam generating device. The support plate is designed to reduce wrinkles in the foil. The foil is bonded to the support plate along a closed bonding line bounding an area in which the support plate is provided with a pattern of apertures and foil support portions alternately. When vacuum is created in the housing the pattern is adapted to form a topographical profile of the foil substantially absorbing any surplus foil. Another aspect involves a method in a filling machine for sterilizing a packaging material web.
    Type: Grant
    Filed: February 1, 2011
    Date of Patent: December 9, 2014
    Assignee: Tetra Laval Holdings & Finance S.A.
    Inventors: Ulrika Linné, Werner Haag, Toni Waber, Mattias Henriksson, Kurt Holm, Krister Kristiansson
  • Patent number: 8766523
    Abstract: An exit window can include an exit window foil, and a support grid contacting and supporting the exit window foil. The support grid can have first and second grids, each having respective first and second grid portions that are positioned in an alignment and thermally isolated from each other. The first and second grid portions can each have a series of apertures that are aligned for allowing the passage of a beam therethrough to reach and pass through the exit window foil. The second grid portion can contact the exit window foil. The first grid portion can mask the second grid portion and the exit window foil from heat caused by the beam striking the first grid portion.
    Type: Grant
    Filed: September 14, 2012
    Date of Patent: July 1, 2014
    Assignee: Hitachi Zosen Corporation
    Inventors: Steven R. Walther, Gerald M. Friedman, Michael L. Bufano
  • Publication number: 20140117838
    Abstract: In order to improve the performance of an electron-beam device, the ends of the cathode housing is provided with dome-shaped structures.
    Type: Application
    Filed: June 27, 2012
    Publication date: May 1, 2014
    Applicant: Tetra Laval Holdings & Finance S.A.
    Inventors: Hans Reusser, Toni Waber
  • Publication number: 20130094993
    Abstract: An assembly of a support plate and an exit window foil for use in an electron beam generating device. The support plate is designed to reduce wrinkles in the foil. The foil is bonded to the support plate along a closed bonding line bounding an area in which the support plate is provided with a pattern of apertures and foil support portions alternately. When vacuum is created in the housing the pattern is adapted to form a topographical profile of the foil substantially absorbing any surplus foil. Another aspect involves a method in a filling machine for sterilizing a packaging material web.
    Type: Application
    Filed: February 1, 2011
    Publication date: April 18, 2013
    Applicant: TETRA LAVAL HOLDINGS & FINANCE S.A.
    Inventors: Ulrika Linné, Werner Haag, Toni Waber, Mattias Henriksson, Kurt Holm, Krister Kristiansson
  • Patent number: 8421042
    Abstract: An exit window for an electron beam emitter through which electrons pass in an electron beam includes a structural foil for metal to metal bonding with the electron beam emitter. The structural foil has a central opening formed therethrough. A window layer of high thermal conductivity extends over the central opening of the structural foil and provides a high thermal conductivity region through which the electrons can pass.
    Type: Grant
    Filed: September 14, 2012
    Date of Patent: April 16, 2013
    Assignee: Hitachi Zosen Corporation
    Inventors: Tzvi Avnery, Kenneth P. Felis
  • Publication number: 20130009540
    Abstract: An exit window for an electron beam emitter through which electrons pass in an electron beam includes a structural foil for metal to metal bonding with the electron beam emitter. The structural foil has a central opening formed therethrough. A window layer of high thermal conductivity extends over the central opening of the structural foil and provides a high thermal conductivity region through which the electrons can pass.
    Type: Application
    Filed: September 14, 2012
    Publication date: January 10, 2013
    Applicant: HITACHI ZOSEN CORPORATION
    Inventors: Tzvi Avnery, Kenneth P. Felis
  • Patent number: 8339024
    Abstract: An exit window can include an exit window foil, and a support grid contacting and supporting the exit window foil. The support grid can have first and second grids, each having respective first and second grid portions that are positioned in an alignment and thermally isolated from each other. The first and second grid portions can each have a series of apertures that are aligned for allowing the passage of a beam therethrough to reach and pass through the exit window foil. The second grid portion can contact the exit window foil. The first grid portion can mask the second grid portion and the exit window foil from heat caused by the beam striking the first grid portion.
    Type: Grant
    Filed: July 16, 2010
    Date of Patent: December 25, 2012
    Assignee: Hitachi Zosen Corporation
    Inventors: Steven R. Walther, Gerald M. Friedman, Michael L. Bufano
  • Patent number: 8338807
    Abstract: An exit window for an electron beam emitter through which electrons pass in an electron beam includes a structural foil for metal to metal bonding with the electron beam emitter. The structural foil has a central opening formed therethrough. A window layer of high thermal conductivity extends over the central opening of the structural foil and provides a high thermal conductivity region through which the electrons can pass.
    Type: Grant
    Filed: April 4, 2011
    Date of Patent: December 25, 2012
    Assignee: Hitachi Zosen Corporation
    Inventors: Tzvi Avnery, Kenneth P. Felis
  • Patent number: 8338796
    Abstract: An electron beam emitter includes an electron generator for generating electrons. The electron generator can have a housing containing at least one electron source for generating the electrons. The at least one electron source has a width. The electron generator housing can have an electron permeable region spaced from the at least one electron source for allowing extraction of the electrons from the electron generator housing. The electron permeable region can include a series of narrow elongate slots and ribs formed in the electron generator housing and extending laterally beyond the width of the at least one electron source. The electron permeable region can be configured and positioned relative to the at least one electron source for laterally spreading the electrons that are generated by the at least one electron source.
    Type: Grant
    Filed: May 20, 2009
    Date of Patent: December 25, 2012
    Assignee: Hitachi Zosen Corporation
    Inventors: Steven Raymond Walther, Michael L. Bufano, Gerald M. Friedman
  • Publication number: 20120175532
    Abstract: In an Ebeam system, the cathode assembly and/or the window assembly can be simply and quickly replaced or exchanged as required by conditions of use, without replacing the vacuum chamber, or other component systems. In some cases, replacement may be made without removing the vacuum chamber from its installed position. As a result, the cathode assembly and the window assembly can be readily changed over for maintenance. In addition, modular replacement cathode assemblies and window assemblies having varying characteristics may be selected to match a specific desired application, and then installed into the system. The system may be designed as a compact and lightweight portable device.
    Type: Application
    Filed: June 1, 2011
    Publication date: July 12, 2012
    Applicant: USHIO AMERICA, INC.
    Inventors: Mark W. Victor, David E. Cooper, Maria C. Samayoa, Terry Lee Kover, Max Dell Miller, JR., Martin Brown, Thomas R. Duran, JR.
  • Patent number: 8110974
    Abstract: An electron beam generating apparatus (1a) includes an electron gun (2), a vacuum container (3), a frame material (11), and a window material (13). The electron gun (2) has a filament (7) from which an electron beam (EB) is emitted. The vacuum container (3) holds the filament (7). The frame material (11) has an electron passing hole (11c) through which the electron beam (EB) passes, and is detachably attached to the vacuum container (3). The window material (13) is bonded (brazed) to the frame material (11) so as to airtightly stop up the electron passing hole (11c), and allows the electron beam (EB) to penetrate therethrough.
    Type: Grant
    Filed: February 8, 2007
    Date of Patent: February 7, 2012
    Assignee: Hamamatsu Photonics K.K.
    Inventor: Tatsuya Matsumura
  • Publication number: 20110266942
    Abstract: An exit window for an electron beam emitter through which electrons pass in an electron beam includes a structural foil for metal to metal bonding with the electron beam emitter. The structural foil has a central opening formed therethrough. A window layer of high thermal conductivity extends over the central opening of the structural foil and provides a high thermal conductivity region through which the electrons can pass.
    Type: Application
    Filed: April 4, 2011
    Publication date: November 3, 2011
    Applicant: Advanced Electron Beams, Inc.
    Inventors: Tzvi Avnery, Kenneth P. Felis
  • Patent number: 7919763
    Abstract: An exit window for an electron beam emitter through which electrons pass in an electron beam includes a structural foil for metal to metal bonding with the electron beam emitter. The structural foil has a central opening formed therethrough. A window layer of high thermal conductivity extends over the central opening of the structural foil and provides a high thermal conductivity region through which the electrons can pass.
    Type: Grant
    Filed: December 26, 2007
    Date of Patent: April 5, 2011
    Assignee: Advanced Electron Beams, Inc.
    Inventors: Tzvi Avnery, Kenneth P. Felis
  • Publication number: 20110012495
    Abstract: An exit window can include an exit window foil, and a support grid contacting and supporting the exit window foil. The support grid can have first and second grids, each having respective first and second grid portions that are positioned in an alignment and thermally isolated from each other. The first and second grid portions can each have a series of apertures that are aligned for allowing the passage of a beam therethrough to reach and pass through the exit window foil. The second grid portion can contact the exit window foil. The first grid portion can mask the second grid portion and the exit window foil from heat caused by the beam striking the first grid portion.
    Type: Application
    Filed: July 16, 2010
    Publication date: January 20, 2011
    Applicant: Advanced Electron Beams, Inc.
    Inventors: Steven R. Walther, Gerald M. Friedman, Michael L. Bufano
  • Patent number: 7737422
    Abstract: A particle-beam projection processing apparatus for irradiating a target, with an illumination system for forming a wide-area illuminating beam of energetic electrically charged particles; a pattern definition means for positioning an aperture pattern in the path of the illuminating beam; and a projection system for projecting the beam thus patterned onto a target to be positioned after the projection system. A foil located across the path of the patterned beam is positioned between the pattern definition means and the position of the target at a location close to an image of the aperture pattern formed by the projection system.
    Type: Grant
    Filed: February 16, 2006
    Date of Patent: June 15, 2010
    Assignee: IMS Nanofabrication AG
    Inventors: Elmar Platzgummer, Stefan Cernusca, Gerhard Stengl
  • Patent number: 7671522
    Abstract: An electron beam irradiator capable of performing electron beam irradiation in a wide area at a high current density with a field emitter tip. The electron beam irradiator comprises: a vacuum chamber having a beam irradiation window formed longitudinally in an outer periphery of the vacuum chamber; a cathode placed centrally and longitudinally inside the vacuum chamber, and having a field emitter tip formed on the cathode, corresponding to the beam irradiation window; and a high voltage supply placed at one end of the vacuum chamber, and adapted to apply high voltage toward the cathode. The electron beam irradiation can be made in a wide area without using an electromagnet as well as in a high current density without using a heater such as a filament or an additional power supply, thereby to ensure a simplified structure as well as a reduced size.
    Type: Grant
    Filed: March 9, 2005
    Date of Patent: March 2, 2010
    Assignee: Korea Atomic Energy Research Institute
    Inventors: Byung-Cheol Lee, Young-Kyung Lim, Young-Hwan Han, Young-Uk Jung, Seong-Hee Park, Cheol-Jin Lee, Tae-Jae Lee
  • Publication number: 20090224650
    Abstract: Disclosed is a device for sustaining different vacuum degrees for an electron column, including an electron emitter, a lens part, and a housing for securing them, to maintain the electron column and a sample under different vacuum degrees. The device comprises a column housing coupling part coupled to the housing to isolate a vacuum; a hollow part defined through the center portion of the device to allow an electron beam emitted from the electron column to pass therethrough; and a vacuum isolation part having a structure of a gasket for vacuum coupling, wherein a difference of no less than 10 torr in a vacuum degree is maintained between both sides of the device by selecting an appropriate diameter of a lens electrode layer which is finally positioned in a path along which the electron beam is emitted or by using the hollow part.
    Type: Application
    Filed: February 2, 2007
    Publication date: September 10, 2009
    Inventor: Ho Seob Kim
  • Publication number: 20090212681
    Abstract: An electron beam generating apparatus (1a) includes an electron gun (2), a vacuum container (3), a frame material (11), and a window material (13). The electron gun (2) has a filament (7) from which an electron beam (EB) is emitted. The vacuum container (3) holds the filament (7). The frame material (11) has an electron passing hole (11c) through which the electron beam (EB) passes, and is detachably attached to the vacuum container (3). The window material (13) is bonded (brazed) to the frame material (11) so as to airtightly stop up the electron passing hole (11c), and allows the electron beam (EB) to penetrate therethrough.
    Type: Application
    Filed: February 8, 2007
    Publication date: August 27, 2009
    Applicant: Hamamatsu Photonics K.K.
    Inventor: Tatsuya Matsumura
  • Publication number: 20090160309
    Abstract: A process for producing an electron beam exit window for an electron beam accelerator is described. The process comprises reducing the thickness of a foil made of titanium or glass by etching the foil using an etching solution.
    Type: Application
    Filed: October 13, 2006
    Publication date: June 25, 2009
    Inventors: Dirk Burth, Iris Burth
  • Publication number: 20080143235
    Abstract: An exit window for an electron beam emitter through which electrons pass in an electron beam includes a structural foil for metal to metal bonding with the electron beam emitter. The structural foil has a central opening formed therethrough. A window layer of high thermal conductivity extends over the central opening of the structural foil and provides a high thermal conductivity region through which the electrons can pass.
    Type: Application
    Filed: December 26, 2007
    Publication date: June 19, 2008
    Inventors: Tzvi Avnery, Kenneth P. Felis
  • Patent number: 7329885
    Abstract: An exit window for an electron beam emitter through which electrons pass in an electron beam includes a structural foil for metal to metal bonding with the electron beam emitter. The structural foil has a central opening formed therethrough. A window layer of high thermal conductivity extends over the central opening of the structural foil and provides a high thermal conductivity region through which the electrons can pass.
    Type: Grant
    Filed: July 18, 2007
    Date of Patent: February 12, 2008
    Assignee: Advanced Electron Beams, Inc.
    Inventors: Tzvi Avnery, Kenneth P. Felis
  • Patent number: 7265367
    Abstract: An exit window for an electron beam emitter through which electrons pass in an electron beam includes a structural foil for metal to metal bonding with the electron beam emitter. The structural foil has a central opening formed therethrough. A window layer of high thermal conductivity extends over the central opening of the structural foil and provides a high thermal conductivity region through which the electrons can pass.
    Type: Grant
    Filed: January 5, 2004
    Date of Patent: September 4, 2007
    Assignee: Advanced Electron Beams, Inc.
    Inventors: Tzvi Avnery, Kenneth P. Felis
  • Patent number: 7026635
    Abstract: Methods, and materials made by the methods, are provided herein for treating materials with a particle beam processing device. According to one illustrative embodiment, a method for treating a material with a particle beam processing device is provided that includes: providing a particle beam generating assembly including at least one filament for creating a plurality of particles; applying an operating voltage greater than about 110 kV to the filament to create the plurality of particles; causing the plurality of particles to pass through a thin foil having a thickness of about 10 microns or less; and treating a material with the plurality of particles.
    Type: Grant
    Filed: July 31, 2003
    Date of Patent: April 11, 2006
    Assignee: Energy Sciences
    Inventors: Imtiaz Rangwalla, Harvey Clough, George Hannafin
  • Patent number: 6870174
    Abstract: An object of the present invention is to provide to an electron beam tube and electron beam extraction window capable of generating high output electron beam by effectively releasing heat generated when an electron beam passes through a window whereby temperature rise of the window is controlled and breakage of the window is prevented. The electron beam tube comprises first projections continuously provided on a first surface of the window, and second projections which are continuously formed on a second surface of the window and are located in positions corresponding to areas between the first projections wherein a projection height of the second projection, a projection width of the second projection and a distance between the adjacent second projections are smaller than those of the first projections, respectively.
    Type: Grant
    Filed: June 10, 2004
    Date of Patent: March 22, 2005
    Assignees: Ushio Denki Kabushiki Kaisha, Octec, Inc.
    Inventors: Masanori Yamaguchi, Katsuya Okumura
  • Publication number: 20040251431
    Abstract: An object of the present invention is to provide to an electron beam tube and electron beam extraction window capable of generating high output electron beam by effectively releasing heat generated when an electron beam passes through a window whereby temperature rise of the window is controlled and breakage of the window is prevented.
    Type: Application
    Filed: June 10, 2004
    Publication date: December 16, 2004
    Inventors: Masanori Yamaguchi, Katsuya Okumura
  • Patent number: 6824625
    Abstract: The invention relates to a magnetostriction control alloy sheet advantageously used as a high resolution shadow mask having a low coefficient of thermal expansion, superior magnetic properties and a high Young's modulus after a blackening process, a manufacturing process for the same, and a part for a color Braun tube such as a shadow mask. The magnetostriction control alloy sheet comprises C at 0.01 wt. % or less, Ni at 30 to 36 wt. %, Co at 1 to 5.0 wt. %, and Cr at 0.1 to 2 wt. %, the remainder Fe and unavoidable impurities, and having a magnetostriction &lgr; after the softening and annealing of (−15×10−6) to (25×10−6).
    Type: Grant
    Filed: July 19, 2001
    Date of Patent: November 30, 2004
    Assignee: Dai Nippon Printing Co., Ltd.
    Inventors: Norio Fukuda, Shinya Nakamura, Hiroyuki Yamada, Akira Makita, Tsutomu Hatano, Nobuaki Kanayama, Takahito Aoki
  • Patent number: 6803570
    Abstract: A vacuum window transmitting keV electrons and usable for high-pressure electron analysis such as XPS and AES in which the sample is positioned outside the UHV analyzer chamber, possibly in a controlled gas environment, relatively close to the window. The window includes a grid formed from a support layer and a thin window layer supported between the ribs and having a thickness preferably of 2 to 3 nm. The window and support layers may be deposited on a silicon wafer and the support layer is lithographically defined into the grid. The wafer is backside etched to expose the back of the grid and its supported window layer. Such a window enables compact and easily used electron analyzers and further allows control of the gas environment at the sample surface during analysis.
    Type: Grant
    Filed: July 11, 2003
    Date of Patent: October 12, 2004
    Inventors: Charles E. Bryson, III, Frank J. Grunthaner, Paula J. Grunthaner
  • Patent number: 6724003
    Abstract: The present invention relates to an electron beam-irradiating reaction apparatus for irradiating a desired object to be treated, such as an exhaust gas, with an electron beam. Conventionally, a scanning tube of an electron beam irradiation device and a reaction device-for receiving the electron beam are rigidly connected. Therefore, excessive stress is applied to a connecting portion between the scanning tube and the reaction device and not only leakage of gas from the connecting portion, but also breakage of a metal window foil provided at an end portion of the scanning tube are likely to occur. In the present invention, to solve such problems, a flexible hermetic sealing member 23 is provided between a portion around the end portion of the scanning tube 12 and a peripheral edge 18a of an electron beam receiving window in a side wall of an electron beam reaction device 18.
    Type: Grant
    Filed: July 10, 2001
    Date of Patent: April 20, 2004
    Assignee: Ebara Corporation
    Inventors: Yoshitaka Doi, Masao Nomoto, Kazuaki Hayashi, Masahiro Izutsu, Yoshiharu Kageyama, Kyoichi Okamoto
  • Patent number: 6674229
    Abstract: An exit window for an electron beam emitter through which electrons pass in an electron beam includes an exit window foil having an interior and an exterior surface with a series of holes formed therethrough. A corrosion resistant layer having high thermal conductivity extends over the exterior surface and the holes of the exit window foil for resisting corrosion and increasing thermal conductivity. The layer extending over the holes of the exit window foil provide thinner window regions which allow easier passage of the electrons through the exit window.
    Type: Grant
    Filed: March 20, 2002
    Date of Patent: January 6, 2004
    Assignee: Advanced Electron Beams, Inc.
    Inventors: Tzvi Avnery, Kenneth P. Felis
  • Patent number: 6614037
    Abstract: Disclosed is an electron beam irradiating apparatus including an electron beam source; an accelerating unit for accelerating electrons emitted from the electron beam source; a deflecting unit for deflecting a highly energized electron beam generated by the accelerating unit in a scanning direction; a vacuum vessel accommodating the electron beam source, the accelerating unit, and the deflecting unit in a vacuum environment; a window foil for ejecting the electron beam from the vacuum environment into a gas environment; a crosspiece for adhering to and supporting the window foil; and a cooling block for shielding the crosspiece from the electron beam in areas that the electron beam intersects the crosspiece.
    Type: Grant
    Filed: February 6, 2001
    Date of Patent: September 2, 2003
    Assignee: Ebara Corporation
    Inventor: Yoshihiko Naito
  • Patent number: 6552484
    Abstract: Apparatus for displaying video images including a vacuum envelope which includes a neck portion and a display screen and an electron gun system. The electron gun system producing at least one electron beam, which in response to a magnetic field converges the at least one electron beam onto the display screen causing video images corresponding to the at least one electron beam to be displayed thereon.
    Type: Grant
    Filed: June 26, 2000
    Date of Patent: April 22, 2003
    Assignees: Sony Corporation, Sony Electronics Inc.
    Inventor: Basab Bijay Dasgupta
  • Publication number: 20020135290
    Abstract: An exit window for an electron beam emitter through which electrons pass in an electron beam includes an exit window foil having an interior and an exterior surface. A corrosion resistant layer having high thermal conductivity is formed over the exterior surface of the exit window foil for resisting corrosion and increasing thermal conductivity.
    Type: Application
    Filed: March 21, 2001
    Publication date: September 26, 2002
    Applicant: Advanced electron Beams, Inc.
    Inventor: Tzvi Avnery
  • Patent number: 6407492
    Abstract: An electron accelerator includes a vacuum chamber having an electron beam exit window. The exit window is formed of metallic foil bonded in metal to metal contact with the vacuum chamber to provide a gas tight seal therebetween. The exit window is less than about 12.5 microns thick. The vacuum chamber is hermetically sealed to preserve a permanent self-sustained vacuum therein. An electron generator is positioned within the vacuum chamber for generating electrons. A housing surrounds the electron generator. The housing has an electron permeable region formed in the housing between the electron generator and the exit window for allowing electrons to accelerate from the electron generator out the exit window in an electron beam when a voltage potential is applied between the housing and the exit window.
    Type: Grant
    Filed: July 9, 1999
    Date of Patent: June 18, 2002
    Assignee: Advanced Electron Beams, Inc.
    Inventors: Tzvi Avnery, Kenneth P. Felis
  • Patent number: 6239543
    Abstract: One or more electron beam tubes are arranged to direct electron beams in air or other ambient gas toward a target object. The electron beams ionize air producing a plasma or glow discharge. An electric or magnetic field in the beam trajectory sustains the plasma by trapping secondary electrons formed by collisions of beam electrons with the ambient atmosphere. Target objects may be placed in the field for surface treatment, such as sterilization, or for thin film growth. In the latter case, the apparatus is enclosed in a housing and a reactive gas is introduced into the beam trajectory. The gas is one which is crackable by the electron beam or plasma, such as an organic silicon compound which would liberate silicon for combination with ionized oxygen to form silicon dioxide layers on a substrate.
    Type: Grant
    Filed: August 23, 1999
    Date of Patent: May 29, 2001
    Assignee: American International Technologies, Inc.
    Inventor: George Wakalopulos
  • Patent number: 6140755
    Abstract: An actinic radiation source (20) includes an anode (36) upon which an electron beam from a cathode ray gun (24) impinges. The anode (36) includes a window area (52) formed by a silicon membrane. The electron beam upon striking the anode (36) permeates the window area (52) to penetrate into medium surrounding actinic radiation source (20). A method for making an anode (36) uses a substrate having both a thin first layer (44) and a thicker second layer (46) of single crystal silicon material between which is interposed a layer of etch stop material (48). The second layer (46) is anisotropically etched to the etch stop material (48) to define the electron beam window area (52) on the first layer (44). That portion of the etch stop layer (48) exposed by etching through the second layer (46) is then removed. The anode (36) thus fabricated has a thin, monolithic, low-stress and defect-free silicon membrane electron beam window area (52) provided by the first layer of the substrate.
    Type: Grant
    Filed: June 11, 1997
    Date of Patent: October 31, 2000
    Assignee: American International Technologies, Inc.
    Inventors: Armand P. Neukermans, Timothy G. Slater
  • Patent number: 6072269
    Abstract: A ceramic member has a flat or curved ceramic plate having a plurality of minute through holes of a maximum pore diameter of 150 .mu.m or less, and having electrodes installed on one surface of the plate. The ceramic member controls the ejection of ions carrying either positive or negative charge from the minute through holes by switching the sign of charge carried by the electrodes. The minute through holes are tapered toward the side where ions are ejected. The ceramic member gives an improved property of ejecting charged particle from minute through holes while maintaining high mechanical strength and productivity.
    Type: Grant
    Filed: July 15, 1997
    Date of Patent: June 6, 2000
    Assignee: NGK Insulators, Ltd.
    Inventors: Yukihisa Takeuchi, Tsutomu Nanataki, Hisanori Yamamoto, Takashi Oguchi
  • Patent number: 6002202
    Abstract: A thin window that stands off atmospheric pressure is fabricated using photolithographic and wet chemical etching techniques and comprises at least two layers: an etch stop layer and a protective barrier layer. The window structure also comprises a series of support ribs running the width of the window. The windows are typically made of boron-doped silicon and silicon nitride and are useful in instruments such as electron beam guns and x-ray detectors. In an electron beam gun, the window does not impede the electrons and has demonstrated outstanding gun performance and survivability during the gun tube manufacturing process.
    Type: Grant
    Filed: July 19, 1996
    Date of Patent: December 14, 1999
    Assignee: The Regents of the University of California
    Inventors: Glenn Allyn Meyer, Dino R. Ciarlo, Booth Richard Myers, Hao-Lin Chen, George Wakalopulos
  • Patent number: 5962995
    Abstract: An electron accelerator includes a vacuum chamber having an electron beam exit window. An electron generator is positioned within the vacuum chamber for generating electrons. A housing surrounds the electron generator and has a first series of openings formed in the housing between the electron generator and the exit window for allowing electrons to accelerate from the electron generator out the exit window in an electron beam when a voltage potential is applied between the housing and the exit window. The housing also has a second series and third series of openings formed in the housing on opposite sides of the electron generator for causing electrons to be uniformly distributed across the electron beam by flattening electrical field lines between the electron generator and the exit window.
    Type: Grant
    Filed: January 2, 1997
    Date of Patent: October 5, 1999
    Assignee: Applied Advanced Technologies, Inc.
    Inventor: Tzvi Avnery
  • Patent number: 5909032
    Abstract: A modular electron beam device is disclosed, the device being housed in a modular enclosure containing a power supply subsystem coupled to provide power to an electron beam tube. The enclosure is shaped to permit stacking of plural such modular units in a way that the stripe-shaped beam emitted from each of the units completely irradiates a surface to be treated. Beams may lie on different lines but the combined beams sweep out a width on a surface which is a continuous span. In an alternate embodiment of the invention, the modular unit comprises a plurality of electron beam units, each comprising an electron tube and a filament and bias supply to power the tube. A single high voltage stack is common to the plural tube/filament/bias sub-units. A daisy-chain arrangement allows for the single high voltage stack to power all of the tube units. In yet another embodiment, the modular unit comprises a plurality of electron tubes powered by a single power supply.
    Type: Grant
    Filed: April 24, 1997
    Date of Patent: June 1, 1999
    Assignee: American International Technologies, Inc.
    Inventor: George Wakalopulos
  • Patent number: 5898261
    Abstract: High fluence charged-particle beams are generated in a vacuum or near vacuum environment. To use these beams in an atmospheric pressure environment, they must pass through some form of transmission window between the two environments. To date, thin single metal foils have been used for these transmission windows. The total practical fluence of such transmitted beams is limited by the ability of the window to dissipate the excess heat deposited in it by the transiting beam. Existing windows have relied only on simple radial heat conduction through the thin foil, radiative cooling from the foil faces, and/or flowing cooling fluids on the high-pressure face of the foil. The present invention, however, proposes to enclose one or more channels within a double foil window and to flow a cooling fluid through such channel(s). The window cooling rate is thus significantly improved over air convection because of fully-developed turbulent flow and a higher cooling mass transport through such channels(s).
    Type: Grant
    Filed: January 31, 1996
    Date of Patent: April 27, 1999
    Assignee: The United States of America as represented by the Secretary of the Air Force
    Inventor: Robert J. Barker