Abstract: Methods and apparatus disclosed herein generally relate to lamp heating of process chambers used to process semiconductor substrates. More specifically, implementations disclosed herein relate to arrangement and control of lamps for heating of semiconductor substrates. In some implementations of the present disclosure, fine-tuning of temperature control is achieved by dividing different lamps within an array of lamps into various subgroups or lamp assemblies defined by a specific characteristic. These various subgroups may be based on characteristics such as lamp design and/or lamp positioning within the processing chamber.

Abstract: Embodiments relate to a hallow cathode with integral layers of radiation shielding. The hollow cathode includes an inner cathode tube that forms a gas feed to direct gas toward a downstream end, where the directed gas forms plasma. A heater element is positioned at the downstream end of the inner cathode tube, the heater element to heat the plasma. The hollow cathode further includes an outer cathode tube with a keeper electrode to sustain a bias voltage across a gap at a downstream end of the outer cathode tube for igniting the plasma. The integral layers of radiation shielding are connected by offset radial supports and are incorporated as a single element with either the inner or outer cathode tube, where the integral layers are nested with torturous conductive paths to reduce radiation and conduction losses from the downstream end of the inner cathode tube.

Abstract: A liquid crystal display device is provided which includes a liquid crystal panel, a light guide plate having a plurality of side surfaces, a plurality of light emitting elements; a light source substrate having a mounting surface on which the plurality of the light emitting elements are mounted, a light source support member made of metal, including a substrate support plate portion supporting the light source substrate, with the substrate support plate portion coming into contact with a rear surface of the mounting surface, a first surface and a second surface different from the first surface, and a metal frame accommodating the liquid crystal panel and the light guide plate, and including a first contact portion that comes into contact with the first surface and a second contact portion that comes into contact with the second surface.

Abstract: A high-pressure discharge lamp comprising two electrodes (16, 18), which are arranged facing each other in a discharge vessel (6) and are each in electric contact via a current feed system (20, 24, 26, 28, 30), wherein each current feed system penetrates a piston shaft (9,10) arranged in a gastight manner on the discharge vessel (6), wherein in the region of the outer current feed (28, 30) of at least one piston shaft (9) a cooling element (12) is arranged, and wherein the outer current feed (28, 30) and the cooling element (12) are in direct thermal and electric contact.

Abstract: A light-emitting diode (LED) lamp device includes at least one light-emitting module and a heat-dissipation module. The heat-dissipation module includes a plurality of cooling fins arranged in a radial pattern and connected annularly at intervals around the light-emitting module. Each of the cooling fins has an outer rim folded back a predetermined distance toward the light-emitting module to form a bent edge. The bent edges are formed with arcuate folded-back portions so that the cooling fins have rib-like outer perimeters after the bent edges are formed. Thus, the LED lamp device is allowed to be held safely by the folded-back portions while the cooling fins are structurally strengthened.

Abstract: A discharge lamp of the short arc type has a bulb with an arc tube and sealing tubes extending at opposite sides of the arc tube and which contains a discharge gas and a pair of opposed electrodes supported on lead pins which protrude from the outer end of the sealing tubes, the lead pins being affixed to graded glass in the sealing tube. A cooling fin surrounds the outer surface of one of the sealing tubes; and is formed of a pair of plate-shaped bodies each of which has a curved portion that contacts an outer surface of the sealing tube a strip-shaped portion extending radially from each of opposite edges of the curved portion. The strip-shaped portions of the plate-shaped bodies positionally overlap, and cooling openings are formed in the strip-shaped portions of only one of the plate-shaped bodies. Preferably, a gap is formed between the plate-shaped bodies.

Abstract: An illuminating device is disclosed which comprises a light source (5) for generating light and an after-glowing material (for example a luminescent pigment), especially for emitting light after the light source is switched off or has extinguished. The after-glowing material is applied onto a carrier (1), which has a predetermined thermal isolation from the light source (5). By this, the duration of the after-glowing can be extended.

Abstract: A method of making an HID lamp and an HID lamp that includes a ceramic envelope with a ceramic capillary, wherein the capillary has an electrode feed-through therein that is sealed inside the capillary by a frit seal that extends inside the capillary a first distance from a distal end of the capillary, and a ceramic heat sink around at least half an external diameter of the capillary, wherein the heat sink is separated from the envelope and from the distal end of the capillary and the heat sink is in thermally conductive contact with the capillary and has an external diameter at least 1.5 times the external diameter of the capillary. In one preferred embodiment, the heat sink does not overlap the frit seal.

Abstract: A fluorescent lamp (10) includes a bulb (2) provided with a pair of electrode coils (3) at both ends thereof. Each of the electrode coils (3) is mounted between two lead wires (4a, 4b) held by a bulb-end glass (5). A means for preventing overheating (20) of the bulb-end glass is mounted between the lead wires (4a, 4b) located between the electrode coil (3) and the bulb-end glass (5). The means for preventing overheating (20) includes a glass member (20) and a first and a second metallic pin (22a, 22b) for supporting the glass member (20). One end of each of the metallic pins (22a, 22b) is connected to the lead wires (4a, 4b), respectively. Both metallic pins (22a, 22b) are provided not in contact with each other. Before the electrode coil (3) in the last period of the life, in which an emissive coating has been dissipated, is disconnected, the glass member (20) is heated by a conductive heat, a radiant heat, and intermittent pulse discharge.

Abstract: A metal vapor discharge lamp having a highly reliable sealed portion. The lamp has an arc tube including a discharge portion of translucent ceramic in which a discharge metal is filled and a pair of electrodes is disposed; small tubular portions coupled to both ends of the discharge portion; feeder bodies inserted into the small tubular portions; and a sealing material sealing the gap between the feeder body and the small tubular portion at the end portion opposite to the discharge portion. The end of the small tubular portions and the inner surface of the discharge portion define a discharge space. The feeder bodies are composed of a conductive cermet and connected to the electrodes. The ends of the feeder bodies extend at least to the ends of the small tubular portions. The temperature of the end of the sealing material on the discharge space side during the lamp operation is not more than 800° C.

Abstract: A flat fluorescent lamp is provided with one or more protrusions at the periphery thereof, which protrusion(s) extends outwardly beyond the edges of the two glass plates. A lamp holder receives the protrusion of the flat fluorescent lamp so as to hold the same in a manner that no edges of the two parallel glass plates touch or come into contact with the lamp holder.

Abstract: A low pressure mercury vapor discharge lamp including a discharge tube filled with rare gas and mercury, a base provided at the both ends of the discharge tube and surrounding an electrode sealing portion, and a caulking terminal planted in the base and having a tip inside the base, wherein the base includes electric wiring and at least one of the electric wiring is connected to the caulking terminal to provide an electric connection inside the base. Thus, the position of the caulking terminal is fixed and the automation in the caulking connecting process is realized. Furthermore, after caulking connection, adhesives for adhering the caulking terminal to the inside of the base are not required, thus improving the operation property and productivity by reducing the number of steps and the material cost.

Abstract: The invention relates to a single-ended discharge lamp the light source of which is a discharge tube consisting of at least two tube legs, the said single-ended discharge lamp has a cap part for mechanical and electrical connection to a lampholder, the cap part is, on its side being closer to the discharge tubes, bordered by a separator wall separating it from the space of the light source. According to the invention, cavities (24) accepting the ends of the tube legs are formed in the separator wall (20), and openings (26) for passing inleads are formed at the bottom of the cavities (24) at the places of current feedthroughs.

Abstract: The electric lamp has a vacuumtight seal (4) on the longitudinal axis (2) of a glass lamp vessel (1). An internal (12) and an external conductor (13) each have an end (14) inside the seal (4) and extend through a common axial region (5) of the seal (4) in a spaced apart manner. Several metal foils (11) arranged in a flat plane of the seal (4) extend parallel one to the other, in a transversal direction thereof. They have knife-shaped transversal edges (15) and are welded to the internal (12) and the external (13) conductors. The current conductors (10) constituted by the foils (11), the internal (12) and the external (13) conductors are able to conduct rather high currents. The lamp, nevertheless, is of a simple, strong and reliable construction.

Abstract: A reflector/lamp assembly employs a heat-sink component that includes a rigid, elongate, relatively wide and thin conductor element which is disposed forwardly of the reflector rim and extends radially to a distal point lying substantially beyond the axial projection of the rim. The heat-sink component efficiently dissipates thermal energy without attenuating the reflected radiation and without imposing physical constraints or stresses.

Abstract: A novel design for a compact fluorescent lamp, including a lamp geometry which will increase light output and efficacy of the lamp in a base down operating position by providing horizontal and vertical insulating septums positioned in the ballast compartment of the lamp to provide a cooler coldspot. Selective convective venting provides additional cooling of the ballast compartment.

Abstract: A fluorescent lamp includes a lamp tube having first and second ends and containing fill materials for causing light generation when provided with electrical power. The lamp further includes first and second power-transferring means at the first and second ends of the lamp tube, respectively, for providing the fill materials in the lamp tube with electrical power. Also included is a thermal heat shield separating the first power-transferring means from ballast circuitry which supplies power to the first power-transferring means and which has a lifetime that becomes substantially less as its operating temperature increases. The thermal heat shield is constructed so that it reflects back to the first power-transferring means and any adjacent portion of the lamp tube sufficient radiant energy to reduce the operating temperature of the ballast circuitry by more than about one degree Celsius compared with the absence of the heat shield.

Abstract: The low pressure sodium discharge lamp has an outer envelope (1) in which a U-shaped discharge tube (10) is accommodated. A mica disk (20) having holes (21 ) through which pinches (11) of the discharge tube extend, keeps the discharge tube centered. The mica disk (20) has teeth (22) at its periphery, which are bent towards the lamp base (5) and clampingly engage the outer envelope. The disk allows for the outer envelope to be fused to a flared tube (3) in a drop-seal process and provides several additional features.

Abstract: The electrodeless low pressure discharge lamp has a lamp vessel (1) which is fused to the flared portion (6) of a flared tube (5) which extends into the lamp vessel. A power coupler (20) is demountably secured to the lamp vessel and comprises a soft magnetic core (21), surrounded by an electric coil (22), and a heat conducting element (23) in the core. This element is a solid rod, the coil (22) is present in a region (8) adjacent the flared portion (6) of the flared tube (5), and an elastic material couples the rod (23) laterally to the core (21). The construction of the lamp avoids the use of an expensive heat pipe as a heat conducting element.

Abstract: To prevent corrosion of molybdenum connecting pins or wires extending from elt-sealed ends of high-power lamps, the region immediately adjacent the exit points from the melt-sealed end are cooled by a cooling gas, for example air or an inert gas such as nitrogen. The cooling gas is applied by cooling ducts which are made of metal and, simultaneously, provide for electrical connection of electrical energy to the connecting leads. Cooling gas can be introduced either through terminal pins or rods into the tubular elements, or the tubular elements can be connected, as usual, to the part-solid terminal pins or rods and additional gas connections are passed through the base through the tubular elements to supply cooling gas.

Abstract: To provide a high-pressure lamp capable of carrying lamp currents of 100 eres and higher, an essentially rotation-symmetrical discharge space (2) has two cylindrical necks (3, 4) melt-sealed thereto. Each one of the necks is formed of at least two telescoped hollow cylindrical quartz glass tubes (19, 27) which, with sealing foils circumferentially located within the neck, are all gas-tightly melt-sealed together. The sealing foils, typically of molybdenum, are electrically connected to a molybdenum disk (7, 8), for example by being welded to the circumference thereof which, in turn, is soldered to an end portion of an electrode shaft (5, 6), typically of tungsten, which extends into the discharge space of the discharge vessel.

Abstract: The electric lamp has a lamp vessel (1) which is fixed by means of cement (6) in a lamp cap (3) of synthetic material. A metal ring (7) in contact with the cement (6) is present in the lamp cap (3), as a result of which the cement (6) can be secured by inductive heating of the metal ring (7). The lamp cap (3) has ribs (10,11) on the inside surface of the lamp cap (3), by which the metal ring (7) is radially and axially separated from the lamp cap (3).

Abstract: A power electron tube cooled by the circulation of a fluid is disclosed. This tube comprises a hollow, cylindrical anode mounted coaxially around a hollow, cylindrical grid, itself surrounding a cathode. The interior of the anode is hermetically closed. A cooler with forced fluid circulation is formed by two coaxial, cylindrical jackets mounted around the anode. It defines a closed chamber connected to an inlet conduit and a removal conduit for the fluid. An electrical connection part for the anode is brazed, by one side, to the base of the anode and, by the other side, to a part that is solidly joined to the outer jacket of the cooler. This anode connection part forms an impervious wall closing the chamber of the cooler, and is in contact with the cooling fluid.

Abstract: A double-ended miniature lamp comprises a filament enclosed in a hollow bulb. Lamp lead wires are connected with both the ends of the filament and emerge from closed ends of the bulb. Square-shaped supporting portions of a lamp base consisting of a heat resistant plastic material shape-matingly support at least those closed ends.

Abstract: A halogen lamp having a translucent glass envelope containing a halogen-containing gas sealed therein and including an outer surface and a connection end. The lamp further has a tungsten filament sealed within the envelope for generating light containing visible light and infrared rays, lead-in conductors for connecting the lamp to a source of electricity, molybdenum foils embedded within the connection end of the envelope for electrically connecting the filament to the lead-in conductors and an optical film coated on at least a portion of the envelope for reflecting the infrared rays and transmitting the visible light, the reflected infrared rays generating heat within the envelope which is transmitted by conduction through the envelope, the envelope also including a roughened area free from the optical film on the outer surface between the optical film and the connection end for interrupting the transmission of the heat through the envelope to the molybdenum foils.

Abstract: To improve the heat distribution of the electrodes within a high-pressure discharge vessel, particularly a vehicle (1) of quartz glass having a fill of mercury, a noble gas, and an additive which includes a metal or metal halide, especially, for good color rendition, tin which attacks the electrodes, the electrodes (4, 5) are pinch-sealed through the quartz glass envelope and include a parallel shaft portion (15, 17, 21) to which pin elements (16, 18, 19) are attached, for example by welding, which have a cross-sectional area larger, preferably by a factor of between 1.5 to 3, than the cross-sectional area of the shaft portion, to obtain high heat capacity of the electrodes while minimizing heat transfer to the pinch or press seal of the electrodes through the quartz glass vessel (2) via the shaft portions.

Abstract: In a high-pressure gas discharge lamp having a discharge vessel containing an ionizable gas filling, consisting of translucent material and surrounded by a translucent outer envelope, which is adjoined at an end thereof by a lamp cap, the space between the discharge vessel and the said end of the outer envelope accomodates a thermally insulating porous translucent element consisting of a microporous aerogel.

Abstract: The low-pressure sodium discharge lamp according to the invention has a U-shaped discharge tube (1) with seals (4, 5), through which current-supply conductors (6, 7) extend to electrodes (8, 9). A supporting member (14) fixes the discharge tube (1) in an outer bulb (10). Upright collars (18, 19) at the supporting member (14), which surround the seals (4, 5) throughout their lengths, prevent the discharge tube from becoming leaky at high-frequency operation and the lamp from reaching the end of its life prematurely.

Abstract: To provide for preheating of a high-pressure discharge lamp (6) having a charge vessel (7) closed off by a pinch or press seal (8), a ceramic holder (1), typically a ceramic tube with multiple capillary openings therein, has a heating wire threaded through the capillary openings, and the ceramic holder is located in intimate thermal transfer with respect to the lamp, for example by being placed and cemented in the transition zone between the discharge vessel (7) and the pinch or press seal. Heater power of about 10 W applied to two such ceramic capillary heaters located adjacent both sides of the pinch or press seal permits preheating the fill of the lamp so that 40% of rated light output can be obtained within several seconds after energization of the electrodes. The lamp is suitable as a headlamp for vehicular use and can be constructed in miniature size, with a discharge vessel volume in the range of 100ths cm.sup.3.

Abstract: A ceramic base for a tungsten halogen lamp has a bottom wall for supporting contact pins connected to respective lead-in wires sealed in the press-sealed end of the lamp. The base furthermore has a side wall integral with the bottom wall and at least one hole therein for receiving the press-sealed end of the envelope. The ceramic base side wall has convective vent passages including at least a first vent passage for inlet of cool air to the air space about the press-sealed end of the lamp, and at least a second vent passage for outlet of warmed air therefrom to thereby provide convective air cooling of the envelope press-sealed end.

Abstract: The bulb (1) of an incandescent lamp, such as a vehicular headlight, is mted on a base structure (3) without cementing, by means of a securing element (2) having two shell-shaped halves (4). Each half (4) has a lug (5) on one side and bent tabs (6) on its other side which engage the lug (5) of the other half (4) to form a cuff around the pinch seal of the lamp and to connect the lamp to the base structure (3), which may be made of plastic. Each half (4) has a flange (8) with a projecting rim (10) whose curvature matches that of a tubular base structure (3). The projecting rim (10) has perforations (9) so that, if a plastic base structure (3) is used, the rim (10) can be connected to the base structure (3) by high-frequency heating, which causes the plastic to permeate the perforations (9) and harden therein.

Abstract: An electric lamp having a glass lamp vessel 1 with a seal 7 coated with an intermediate coating layer of zirconium oxide 8. Lamp vessel 1 is connected at its seal 7 by a sealing cement 9 to a lamp cap 2. Zirconium oxide coating 8 completely separates seal 7 from sealing cement 9 and reduces mutual adherence therebetween. During operation of the lamp, zirconium oxide coating 8 reduces the thermal load and prevents cracking of seal 7 of lamp vessel 1.

Abstract: An electric lamp designed to operate in air and of the type incorporating at least one current-supply foil embedded within and extending along a light transmitting stem and welded at its inner and outer ends to an inner conductor and a terminal conductor respectively, in which the end face of the stem is unenclosed and is such that a proportion of radiation which is incident upon it from the lamp in use thereof is directed away from the foil and adjacent region of the terminal conductor. The invention is especially applicable to high power lamps and has the effect of reducing the temperature of the outer ends of the current-supply foils, which are vulnerable to oxidation.

Abstract: The pinch seal (12) of an electric lamp (11) is kept during operation at a lower temperature by a metal envelope (10), space between this metal envelope (10) and faces of the pinch seal (12) being filled with a heat-conducting mass comprising metal fibers. A considerable temperature decrease is obtained when the spaces between the oppositely arranged major surfaces (13) of the pinch seal (12) and the metal envelope (10) are filled with metal fibers.

Abstract: In a lamp having at least one seal of solid light-transmitting material, in which is embedded at least one current-supply foil, visible, I.R. and U.V. radiations which would otherwise be internally reflected from the seal surface are dispersed by providing on the seal either a non-uniform surface region or a light-dispersive coating, thus reducing the temperature of the outer ends of the foil and thereby reducing the risk of failure caused by oxidation. The seal may be formed with ribs or sand blasted or it may be provided with a coating of glass containing reflective particles or gas bubbles.

Abstract: A heater/emitter for a rocket engine assembly utilizes a resistance heated wire coil or coils which may also function as a cathode emitter or as a thermal driver for an auxiliary emitter. This heater/emitter may if desired be formed into a bifilar and may be supported by the wire lead itself or by isolated supports. The power leads are located in a lead channel and feature an overwrapping of similar wire material which reduces the internal resistance heating of the lead to increase the electrical conductivity of the supporting lead and increase the thermal conduction thereof to establish a cooler and structurally-stronger lead. A plurality of radiation discs or shields are spaced along the leads to further minimize energy losses from the heater out of the lead channel. The heater/emitter itself is enclosed, except for the lead channel, by a heat exchanger housing.

Abstract: A metal vapor arc lamp comprises an alumina ceramic arc tube having an end sealed by an apertured ceramic plug. A metal lead wire extending through the aperture is sealed therein, and supports an electrode within the arc tube. Thermal isolation of the lead wire seal from the electrode is necessary and is achieved by providing a loop in the supporting conductor intervening between the electrode and the lead wire seal region.

Abstract: A mercury vapor lamp is rendered substantially independent of the thermal environment by connecting each sealed end to a heat sink which is maintained at below 100.degree.C and located sufficiently close to the sealed ends to hold the seal temperature to below 400.degree.C.

Abstract: A high intensity sodium vapor lamp comprises a tubular envelope of alumina ceramic provided with end closures and containing a charge of sodium mercury amalgam in excess of that vaporized during operation. One closure includes a refractory metal tube sealed off at its tip and wherein unvaporized excess of amalgam collects as a liquid pool. In order to have a sufficiently high temperature at the amalgam pool, a metal slug of high heat conductivity such as molybdenum is placed in it and extends from the seal region towards the tip. Such slug also prevents overheating the seal between the ceramic tube and the end cap.

Abstract: A heater/emitter for a rocket engine assembly utilizes a resistance heated wire coil or coils which may also function as a cathode emitter or as a thermal driver for an auxiliary emitter. This heater/emitter may if desired be formed into a bifilar and may be supported by the wire lead itself or by isolated supports. The power leads are located in a lead channel and feature an overwrapping of similar wire material which reduces the internal resistance heating of the lead to increase the electrical conductivity of the supporting lead and increase the thermal conduction thereof to establish a cooler and structurally-stronger lead. A plurality of radiation discs or shields are spaced along the leads to further minimize energy losses from the heater out of the lead channel. The heater/emitter itself is enclosed, except for the lead channel, by a heat exchanger housing.