Valve Controlled Patents (Class 315/110)
  • Publication number: 20150145413
    Abstract: Process chamber gas flow control apparatus may include, or be included in, a process chamber configured to process a substrate therein. The gas flow control apparatus may include a valve configured to seal an exhaust port in the process chamber. The valve may be moveable in the X, Y, and Z directions relative to the exhaust port to adjust a gas flow pattern (including, e.g., flow rate and/or flow uniformity) within the process chamber. Methods of adjusting a flow of a process gas within a process chamber are also provided, as are other aspects.
    Type: Application
    Filed: November 26, 2013
    Publication date: May 28, 2015
    Inventors: Nir Merry, Chandrakant M. Sapkale, Izya Kremerman, Jeffrey C. Hudgens
  • Publication number: 20140251954
    Abstract: A system and method for providing pulsed excited species from a remote plasma unit to a reaction chamber are disclosed. The system includes a pressure control device to control a pressure at the remote plasma unit as reactive species from the remote plasma unit are pulsed to the reaction chamber.
    Type: Application
    Filed: March 8, 2013
    Publication date: September 11, 2014
    Applicant: ASM IP Holding B.V.
    Inventor: Jereld Lee Winkler
  • Publication number: 20130175927
    Abstract: Provided is a plasma treatment apparatus using a leakage current transformer, the apparatus, including: a chamber which provides a closed space in which plasma is formed, and receives a treated sample in an inner part thereof; an exhaust unit for forming the inner part of the chamber in a vacuum state; plasma generation electrodes fixed in the chamber, positive and negative poles of which are installed to be opposed to each other; a variable power supply which is installed in an outer part of the chamber and supplies a power source to the plasma generation electrodes; and a leakage current transformer which is installed between the variable power supply and the plasma generation electrodes and adjusts voltage and current applied to the plasma generation electrodes.
    Type: Application
    Filed: September 16, 2011
    Publication date: July 11, 2013
    Inventor: Je Won Lee
  • Patent number: 8373117
    Abstract: A gas delivery system for a cell-based mass spectrometer includes a mass flow controller having an input coupled to a gas source. A three-way valve includes an input coupled to an output of the mass flow controller, a first output coupled to a vacuum system, and a second output normally coupled to a reaction or collision cell. A cell is positioned inside a vacuum chamber of the mass spectrometer where the second output of the three-way valve is coupled to an inlet of the cell and the mass flow controller provides a gas to the cell that increases a pressure inside the cell relative to the pressure in the vacuum chamber.
    Type: Grant
    Filed: February 22, 2011
    Date of Patent: February 12, 2013
    Assignee: DH Technologies Development PTE. Ltd.
    Inventors: Hamid R. Badiei, Kaveh Kahen
  • Patent number: 6429595
    Abstract: A treater system includes a conductive roller electrode that supports a moving web that is to be treated. One or more active electrode assemblies mounted to support headers have a pair of active electrodes that are positioned to treat one surface of the web as the web passes over the roller electrode. Air or a gas/gas mixture can be selectively piped to a chamber adjacent the active electrodes and diffused along the length of the discharge surfaces to allow the treater to operate in three distinct modes: corona, chemical corona and atmospheric plasma. The active electrodes are cooled by passing air into and through tubular bodies of the active electrodes.
    Type: Grant
    Filed: February 14, 2001
    Date of Patent: August 6, 2002
    Assignee: Enercon Industries Corporation
    Inventors: Richard R. Hammen, Donald V. Rundberg
  • Patent number: 6377004
    Abstract: A thin vacuum valve for particle accelerator beam lines comprising of a frame, a slide, a shaft, a first clamp, and preferably a second clamp, which is easily constructed from highly electrically conductive material and presents substantially smooth, flat surfaces towards adjacent particle accelerator component. The frame has first and second surfaces respectively facing toward the two adjacent particle accelerator system components, the first surface including a slide slot. A frame orifice extends through the frame between the first and second surfaces, preferably at the slide slot, and is positioned and sized on the frame to permit passage of a particle beam generated by the particle accelerator system along a beam line The slide is housed substantially within the slide slot and is movable between a first position and a second position along a slide axis. In the first position, the slide permits a particle beam to pass through the slide orifice and through the frame orifice along the beam line.
    Type: Grant
    Filed: November 2, 1999
    Date of Patent: April 23, 2002
    Assignee: International Isotopes, Inc.
    Inventors: Floyd Del McDaniel, James M. Potter, Gan Li
  • Patent number: 5537009
    Abstract: A material such as a gas at an initial pressure below atmospheric is treated with RF energy at a frequency greater than 1 MHz to transition to a glow discharge state and then at increased pressure to a new state at which the average internal temperature is at least an order of magnitude higher than in the glow discharge state but the rate or radiating heat is at least an order of magnitude lower than in the glow discharge state. The new state can be maintained for a period of the order of at least tens of seconds and energy can be extracted through contacting the gas in the new state with a heat conducting body. In variations, the gas pressure need not be below atmospheric, materials in liquid and solid phases can be used in place of the gas, and energizers other than RF energy can be used, such as high-voltage discharges and high-energy particle beams.
    Type: Grant
    Filed: June 15, 1994
    Date of Patent: July 16, 1996
    Inventor: Kiril B. Chukanov
  • Patent number: 5127016
    Abstract: The life expectancy of a ring laser gyroscope has been greatly extended by the addition of a gas capsule (24) which holds a large quantity of lasing gas at high pressure in a very small volume. The gas is selectively admitted to the triangular tunnel (12) through a membrane (32). In a preferred embodiment, permeability of the membrane (32) varies with temperature and a platinum heating element (36) is deposited on the membrane (32) for the purpose of regulating the diffusion of the lasing gas through the membrane. A pressure sensor (44) is connected to the triangular tunnel (12) for sensing a decrease in lasing gas pressure therein. A servo control (46) utilizes information supplied by the pressure sensor (44) to regulate the energization of the heating element (36). In one arrangement, a silicon substrate (50) is common to both the pressure sensor (46) and the gas capsule (24).
    Type: Grant
    Filed: October 27, 1989
    Date of Patent: June 30, 1992
    Assignee: Honeywell Inc.
    Inventor: Theodore J. Podgorski
  • Patent number: 4990831
    Abstract: A spark gap switch system is disclosed which is capable of operating at a high pulse rate comprising an insulated switch housing having a purging gas entrance port and a gas exit port, a pair of spaced apart electrodes each having one end thereof within the housing and defining a spark gap therebetween, an easily condensable and preferably low molecular weight insulating gas flowing through the switch housing from the housing, a heat exchanger/condenser for condensing the insulating gas after it exits from the housing, a pump for recirculating the condensed insulating gas as a liquid back to the housing, and a heater exchanger/evaporator to vaporize at least a portion of the condensed insulating gas back into a vapor prior to flowing the insulating gas back into the housing.
    Type: Grant
    Filed: October 12, 1988
    Date of Patent: February 5, 1991
    Assignee: The United States of America as represented by the United States Department of Energy
    Inventor: William J. Thayer, III
  • Patent number: 4983888
    Abstract: In a fluorescent lamp device, a discharge tube is made by arranging electrodes at the ends of a glass tube, sealing mercury and a rare gas into the glass tube and coating the inner surface of the glass tube with a phosphor, and an amalgam forming material is disposed close to one or the other of the ends of the discharge tube. This fluorescent lamp is operated with a d.c. current using as the anode the electrode arranged on the discharge tube end side where the amalgam forming material is located.
    Type: Grant
    Filed: February 5, 1985
    Date of Patent: January 8, 1991
    Assignee: Matsushita Electronics Corporation
    Inventors: Hidezoh Akutsu, Haruo Yamazaki
  • Patent number: 4980609
    Abstract: A spark channel purge system for high pulse repetition frequency spark gap switches. A purge fluid having a liquid state and a gaseous state is caused to flow through a spark gap channel, at least a portion of the purge fluid passing through the spark channel being in the gaseous state. The purge fluid is supplied in its liquid state by a purge fluid source. In some embodiments, the purge fluid source is a recirculating flow loop which includes a heat exchanger, while in another embodiment, the purge fluid source is a low-pressure liquid storage vessel. The heat exchanger transfers waste heat from the spark gap switch via the purge fluid flowing from the spark channel into the purge fluid supplied by the purge fluid source. This causes at least a portion of the liquid purge fluid to change to the gaseous state. In some embodiments, the spark channel purge system is suitable for a closed loop system, while other embodiments are suitable for an open loop system.
    Type: Grant
    Filed: October 12, 1988
    Date of Patent: December 25, 1990
    Assignee: Amoco Corporation
    Inventor: William J. Thayer, III
  • Patent number: 4524303
    Abstract: A glow discharge tube for emission spectral analysis is disclosed. The tube includes an anode cavity which is connected on one side to a carrier gas source and is connected on the other side to a first vacuum pump. The anode cavity is in communication, by way of a restrictor, with a cathode cavity which is connected to a second vacuum pump. The second pump produces a vacuum that is greater than that produced by the first pump. To reduce the margin of error in the accuracy of spectral-analytical tests, the gas pressure in the main cavity is maintained at a constant value by an electronic control which regulates the amount of carrier gas being fed to the anode cavity.
    Type: Grant
    Filed: June 3, 1983
    Date of Patent: June 18, 1985
    Inventor: Hermann Ritzl
  • Patent number: 4019091
    Abstract: A gas discharge electron gun for generating an electron beam by means of a glow discharge. A rapid control (.apprxeq.1 msec) is possible by admitting the gas to the gun through at least one aperture in the inner wall of a tubular positive electrode.
    Type: Grant
    Filed: April 9, 1976
    Date of Patent: April 19, 1977
    Assignee: U.S. Philips Corporation
    Inventor: Theodorus Maria Berendina Schoenmakers