Plural Diverse Discharge Device Loads Patents (Class 315/183)
  • Patent number: 11569067
    Abstract: Systems and methods for increasing peak ion energy with a low angular spread of ions are described. In one of the systems, multiple radio frequency (RF) generators that are coupled to an upper electrode associated with a plasma chamber are operated in two different states, such as two different frequency levels, for pulsing of the RF generators. The pulsing of the RF generators facilitates a transfer of ion energy during one of the states to another one of the states for increasing ion energy during the other state to further increase a rate of processing a substrate.
    Type: Grant
    Filed: June 14, 2021
    Date of Patent: January 31, 2023
    Assignee: Lam Research Corporation
    Inventors: Juline Shoeb, Ying Wu, Alex Paterson
  • Patent number: 11462390
    Abstract: Systems and methods for multi-level pulsing of a parameter and multi-level pulsing of a frequency of a radio frequency (RF) signal are described. The parameter is pulsed from a low level to a high level while the frequency is pulsed from a low level to a high level. The parameter and the frequency are simultaneously pulsed to increase a rate of processing a wafer, to increase mask selectivity, and to reduce angular spread of ions within a plasma chamber.
    Type: Grant
    Filed: February 6, 2020
    Date of Patent: October 4, 2022
    Assignee: Lam Research Corporation
    Inventors: Juline Shoeb, Alex Paterson, Ying Wu
  • Patent number: 10978274
    Abstract: The plasma processing apparatus according to an exemplary embodiment includes a chamber, a radio-frequency power supply, and a correction signal generator. The radio-frequency power supply outputs a pulsed radio-frequency power in a first period. The radio-frequency power supply outputs a pulsed radio-frequency power in one or more second periods after the first period. The correction signal generator generates a correction signal that oscillates in a reverse phase with respect to a reflected wave monitor signal in the first period. The radio-frequency power supply generates a combined radio-frequency power using the correction signal. The power supply is configured to alternately repeat output of the pulsed radio-frequency power in the first period and output of the combined radio-frequency power in the one or more second periods.
    Type: Grant
    Filed: June 10, 2019
    Date of Patent: April 13, 2021
    Assignee: TOKYO ELECTRON LIMITED
    Inventor: Shinji Kubota
  • Patent number: 10304660
    Abstract: Systems and methods for multi-level pulsing of a parameter and multi-level pulsing of a frequency of a radio frequency (RF) signal are described. The RF signal is applied to a substrate support via a match. The parameter is pulsed from a low level to a high level while the frequency is pulsed from a low level to a high level. In addition, a direct current (DC) parameter is applied to the substrate support or another RF signal is applied to an upper electrode. The parameter and the frequency of the RF signal applied to the substrate support are simultaneously pulsed with the DC parameter or the RF signal applied to the upper electrode to increase a rate of processing a wafer, to increase mask selectivity, and to reduce angular spread of ions within a plasma chamber.
    Type: Grant
    Filed: March 21, 2018
    Date of Patent: May 28, 2019
    Assignee: Lam Research Corporation
    Inventors: Juline Shoeb, Alex Paterson, Ying Wu
  • Patent number: 10188446
    Abstract: The present disclosure is directed to an electrosurgical generator including a resonant inverter having an H-bridge and a tank. The tank includes a transformer including a first core half, a second core half, a primary winding, and a secondary winding having a number of turns, wherein each turn is separated by a gap. The transformer is configured to provide a parallel capacitance based on the gap.
    Type: Grant
    Filed: July 30, 2014
    Date of Patent: January 29, 2019
    Assignee: COVIDIEN LP
    Inventors: Joshua H. Johnson, James A. Gilbert
  • Patent number: 8878463
    Abstract: An LED lamp control circuit comprises a rectifier circuit, an LED light source load, a constant current circuit, and a first temperature detect switch circuit. The LED light source load comprises at least one group of LEDs. The constant current circuit comprises at least one group of constant current source components, each of which is connected to at least one group of LEDs in the LED light source load and comprises a depletion mode field effect transistor. The first temperature detect switch circuit is connected to an input end of a power source, and comprises a first normally closed temperature detect switch mounted on a radiator. When the temperature of the radiator exceeds the disconnection temperature of the first normally closed temperature detect switch, the first normally closed temperature detect switch is disconnected, so as to cut off the power supply of the LED light source load.
    Type: Grant
    Filed: May 8, 2012
    Date of Patent: November 4, 2014
    Assignee: Nanker (Guang Zhou) Semiconductor Manufacturing Corp.
    Inventor: Chun-wei Wu
  • Publication number: 20140009073
    Abstract: Systems and methods for adjusting power and frequency based on three or more states are described. One of the methods includes receiving a pulsed signal having multiple states. The pulsed signal is received by multiple radio frequency (RF) generators. When the pulsed signal having a first state is received, an RF signal having a pre-set power level is generated by a first RF generator and an RF signal having a pre-set power level is generated by a second RF generator. Moreover, when the pulsed signal having a second state is received, RF signals having pre-set power levels are generated by the first and second RF generators. Furthermore, when the pulsed signal having a third state is received, RF signals having pre-set power levels are generated by the first and second RF generators.
    Type: Application
    Filed: September 3, 2013
    Publication date: January 9, 2014
    Applicant: Lam Research Corporation
    Inventors: John C. Valcore, JR., Bradford J. Lyndaker
  • Publication number: 20130099679
    Abstract: A high pressure discharge lamp with auxiliary lamp comprises: a high pressure discharge lamp having an arc tube and at least one sealing portion, a pair of main electrodes, and a pair of feeders supplying power to the main electrodes; an auxiliary lamp having an airtight case, an inner electrode, and an outer electrode, wherein the inner electrode is arranged at a position so as to part the inner space to large and small spaces, the outer electrode is arranged at a position so as to face the large space, the auxiliary lamp as arranged as the large space faces the sealing portion.
    Type: Application
    Filed: February 15, 2012
    Publication date: April 25, 2013
    Applicant: PHOENIX ELECTRIC CO., LTD.,
    Inventors: Tomihiko IKEDA, Hiroshi TAKAHASHI, Shinichi USHIJIMA, Tetsuya GOUDA, Kei SHIMADA
  • Publication number: 20110266960
    Abstract: System and method for driving a plurality of cold-cathode fluorescent lamps. The system includes a subsystem configured to receive at least a DC voltage and generate a first AC voltage in response to at least the DC voltage, a power converter configured to receive the first AC voltage and convert the first AC voltage to at least a second AC voltage, and a plurality of current balancing devices. Each of the plurality of current balancing devices is configured to receive two currents and balance the two currents. The power converter and the plurality of current balancing devices are capable of being directly or indirectly coupled to a plurality of cold-cathode fluorescent lamps.
    Type: Application
    Filed: December 1, 2010
    Publication date: November 3, 2011
    Applicant: ON-BRIGHT ELECTRONICS (SHANGHAI) CO., LTD.
    Inventors: Lieyi Fang, Changshan Zhang, Zhiliang Chen, Shifeng Zhao
  • Patent number: 7626509
    Abstract: An easily deployable miniature, LED light unit specifically for home security yard signs that is rechargeable by means of a solar cell array having a light sensor which automatically activates the light at dusk and deactivates it at dawn. The solar light unit is contained in a unique compact molded housing that positions the components and also includes an integral clamp-mount specifically for slide-on mounting to the stakes of typical home security signs.
    Type: Grant
    Filed: March 5, 2007
    Date of Patent: December 1, 2009
    Inventor: Lance Dean
  • Patent number: 6570341
    Abstract: Apparatus for sequentially igniting and serially operating a pair of high output rapid start fluorescent lamps from a source of AC voltage. The apparatus includes a transformer with a primary winding that may be subdivided in two sections, a principal secondary winding connected in series aiding with one section of the primary and in opposition with the other primary section. This arrangement provides the advantage of developing a comparatively high open circuit voltage for starting the lamps without exceeding lamp holder voltage ratings.
    Type: Grant
    Filed: July 25, 2001
    Date of Patent: May 27, 2003
    Assignee: Koninklijke Philips Electronics N.V.
    Inventor: Luis Alfonso Padilla
  • Patent number: 6566824
    Abstract: An illumination apparatus comprises a lighting segment that includes a plurality of lighting sections. Each of the sections comprises a printed circuit board having a solid state optical emitter mounted thereon. The sections are interconnected by printed circuit board connectors, which serially position the printed circuit boards with edges of adjacent printed circuit boards proximate to each other. The connectors are deformable to alter the orientation in response to an applied force. The sections are electrically connected to each other such that the solid state optical emitters are electrically connected in series. The segment has a current regulator that controls current through the solid state optical emitter.
    Type: Grant
    Filed: October 16, 2001
    Date of Patent: May 20, 2003
    Assignee: Teledyne Lighting and Display Products, Inc.
    Inventors: George W. Panagotacos, David G. Pelka
  • Patent number: 6155694
    Abstract: A multi-flash strobe light pattern is superimposed on each individual light pulse produced by an incandescent lamp to provide a warning signal of enhanced visibility in a particulate laden ambient environment. The first pulse of each multi-flash strobe pattern is delayed for a time period, subsequent to energization of the incandescent lamp, which is equal to at least 80% of the time required for the incandescent lamp to achieve its maximum light output intensity.
    Type: Grant
    Filed: September 10, 1998
    Date of Patent: December 5, 2000
    Assignee: Whelen Engineering Company, Inc.
    Inventors: H. Wayne Lyons, James L. Stopa
  • Patent number: 5661347
    Abstract: In accordance with the invention the circuitry arrangement comprises a central unit (5) and a plurality of peripheral units, such as control apparatuses for lamps, connected with the central unit via a data bus. These peripheral units are each connected with the data bus (1) via a coupling unit (3), each coupling unit (3) having a receiving branch for the transfer of information from the central unit (5) to the peripheral unit, and a transmission branch for the transfer of information from the peripheral unit to the central unit (5). Here, the central unit (5) sends out information in the form of a modulated a.c or pulse voltage onto the data bus. The transmission branch applies information to the data bus (1) in that the output resistance of the transmission branch is varied. Because the receiving branch in the coupling unit (3) is continuously active and the transmission branch is inactive in the case of non-sending operation, at most a very small return current is consumed in the coupling unit (3).
    Type: Grant
    Filed: July 13, 1995
    Date of Patent: August 26, 1997
    Assignee: Tridonic Bauelemente GmbH
    Inventors: Siegfried Luger, Walter Werner
  • Patent number: 5489771
    Abstract: The invention relates to a light calibration system consisting of a compact LED source with feedback control of intensity. The source is positioned in the focal plane of the microscope objective and produces flat-field illumination of up to 31 microwatts. The source can be easily used to determine the performance of microscope optics and camera response. It can also be used as a standard light source for calibration of experimental systems. Selectable light intensities are produced by controlling the LED input power via a feedback circuit consisting of a photodiode that detects output light intensity. Spectral coverage extends between 550 nm and 670 nm using green, yellow and red LEDS mounted side-by-side and which are individually selected. The LED chips are encapsulated in plastic diffusers which homogenize the light, and a flat field of illumination is obtained through a thin 1 mm diameter aperture positioned directly over each chip.
    Type: Grant
    Filed: October 15, 1993
    Date of Patent: February 6, 1996
    Assignee: University of Virginia Patent Foundation
    Inventors: James M. Beach, Brian R. Duling
  • Patent number: 5008595
    Abstract: Ornamental and decorative light display utilizing LEDs constructed of two or more individual diodes. Each diode or portion of a diode is alternately selected and energized at a sufficient frequency that colors can blend to produce another color. The system provides for an extremely large configuration of LEDs to be driven at a low average power and at the same time to allow the user to select individual lights to be constantly illuminated or flash in response on oscillating voltage source or allow multicolored patterns to be generated using bicolor LEDs.
    Type: Grant
    Filed: February 23, 1989
    Date of Patent: April 16, 1991
    Assignees: Laser Link, Inc., William K. Wells, Jr.
    Inventor: Dennis M. Kazar
  • Patent number: 4788475
    Abstract: A high intensity discharge lamp having a plurality of discharge device, and a starting aid for preferentially starting one of the discharge devices. Upon initial application of power to the lamp the preferentially started discharge device will start first, and the other discharge devices will not start. A power interruption during lamp operation will cause an interruption in the operation of the discharge device started first, upon reapplication of lamp power one of the other discharge devices that had not been operating will start without a hot restart delay.
    Type: Grant
    Filed: March 31, 1986
    Date of Patent: November 29, 1988
    Assignee: North American Philips Corporation
    Inventor: Cornelis A. Jacobs
  • Patent number: 4751434
    Abstract: The invention comprises a fluid-tight light box containing a cold cathode light source activated by a high frequency ballast circuit small enough to be contained in the box.At least the box bottom interior is coated with a crinkle or matte finish to cause uniform brightness at or adjacent to a window in the upper side of the box. The ballast circuit is preferably also coated to avoid shadow effects.A milky element may comprise the window or be positioned adjacent thereto to comprise a light diffuser for a transparency adjacent thereto or the transparency may be coated on its reverse side with a diffuser coating.This display or portrait exhibitor may measure less than 2 inches thick and this is the reason the light reflective path and materials are so critical.
    Type: Grant
    Filed: July 28, 1986
    Date of Patent: June 14, 1988
    Inventors: James C. Helling, Anders V. Beckrot
  • Patent number: 4390814
    Abstract: Lighting apparatus for independently controlling the lighting level in several areas or zones. For example, each zone has two fluorescent lamp units, one connected between the power lines through the contacts of a first low voltage AC latching relay, and the other which produces about half the light of the first connected between the power lines through the contacts of a second relay. Each relay has three terminals. When a low voltage AC signal is applied between a first terminal and a common terminal, the relay is latched closed; and when a low voltage AC signal is applied between a second terminal and a common terminal the relay is latched open. The common terminals of the two relays of each zone are connected together to provide enable connections identifying each zone.
    Type: Grant
    Filed: May 7, 1981
    Date of Patent: June 28, 1983
    Assignee: GTE Laboratories Incorporated
    Inventor: Sanford C. Peek
  • Patent number: 4321506
    Abstract: A discharge lamp comprises a high pressure arc tube for high pressure and a low pressure arc tube for low pressure which is electrically connected in parallel to said high pressure arc tube in an outer tube.A lighting equipment comprises a high pressure arc tube for high pressure discharge and a low pressure arc tube for low pressure which is electrically connected in parallel to said high pressure arc tube; and a high frequency lighting starter having 1 KHz to 100 KHz for starting the discharge of said high pressure arc tube.
    Type: Grant
    Filed: December 18, 1979
    Date of Patent: March 23, 1982
    Assignee: Mitsubishi Denki Kabushiki Kaisha
    Inventors: Michihiro Tsuchihashi, Ryohei Itatani, Masatoshi Ryohko, Yutaka Murai
  • Patent number: 4287454
    Abstract: A light source including two high intensity discharge devices, such as metal vapor discharge tubes, electrically coupled in parallel to provide fast restart and immediate illumination after a momentary power interruption. Upon application of power, one of the discharge devices starts and operates while the other discharge device remains below its maximum starting temperature and in readiness for immediate restart. The discharge devices can be enclosed by a common outer envelope. The discharge devices can alternatively be high pressure electrodeless lamps coupled in parallel to provide fast restart.
    Type: Grant
    Filed: December 17, 1979
    Date of Patent: September 1, 1981
    Assignee: GTE Laboratories Incorporated
    Inventors: Alfred E. Feuersanger, Leslie A. Riseberg, William H. McNeill
  • Patent number: 4177782
    Abstract: Two ignition plugs are provided for each cylinder of an engine. Since it is desirable that these two plugs be sparked by one ignition coil, separate output terminal of a secondary coil of the ignition coil are respectively connected to each of the two plugs. An impedance circuit element is provided between one terminal of the secondary coil and ground to disturb a balance of the output voltages from the secondary coil terminals. The voltage of the other terminal of the secondary coil then reaches the break-down voltage between the air gap of its respective ignition plug first due to this imbalance of terminal voltages. The voltage of the one terminal then reaches the break-down voltage between the air gap of its respective ignition plug after the breaking-down of the other ignition plug. The two ignition plugs of each cylinder can thus be sparked at approximately the same time by providing the impedance circuit element between one output terminal of the ignition coil and ground.
    Type: Grant
    Filed: October 31, 1977
    Date of Patent: December 11, 1979
    Assignee: Hitachi, Ltd.
    Inventors: Takashi Yoshinari, Terumi Ookado
  • Patent number: 3931543
    Abstract: Circuits are disclosed for starting and operating a high pressure sodium vapor lamp in combination with another gaseous discharge lamp of low voltage breakdown characteristics. The sodium vapor lamp is connected in series with a ballast induction coil, while the low voltage breakdown lamp, a portion of the ballast coil at its input side, and a capacitor are connected in a series discharge loop to produce high frequency, high voltage pulses for starting the sodium vapor lamp, and providing for operation of both lamps. A ballast capacitor is connected in series with the low voltage lamp to provide a lead ballast circuit therefor.
    Type: Grant
    Filed: September 30, 1974
    Date of Patent: January 6, 1976
    Assignee: General Electric Company
    Inventor: Joe A. Nuckolls