Abstract: In accordance with principles of the present invention, a two or more pole dielectric resonator circuit is provided with resonators that are elliptical in cross section orthogonal to the longitudinal axis. The resonators are mounted so that they are rotatable about their longitudinal axes, such that the straight line distance between two adjacent resonators measured in a straight line between orthogonal to and intersecting the longitudinal axes of the two resonators is a function of the orientation of the resonators about their longitudinal axes. The resonators can be oriented about their longitudinal axes in any orientation to adjust their spacing, which is directly proportional to their coupling magnitude, which, in turn, is proportional to the bandwidth of the circuit.

Abstract: A resonator pattern made of superconductive material is disposed over a first surface of a base substrate made of dielectric. An adjustment substrate made of dielectric is disposed facing the first surface at a distance from the first surface. The adjustment substrate is supported by a support mechanism for supporting the adjustment substrate in such a manner capable of changing an angle between the first surface and a surface of the adjustment substrate facing the base substrate. A superconductive filter is provided which can shift a center frequency of a filter band and suppress disturbance of a waveform of a filter characteristic, with a simple method.

Abstract: A low noise block converter feedhorn (LNBF) is disclosed. The LNBF comprises a PCB, a dielectric resonator oscillator (DRO), a chamber, a tuning screw, and a cover. The DRO is placed on the PCB. The chamber has a first partition, and the first partition is used to cover up the DRO. The chamber further comprises a round hole. The tuning screw passes through the round hole and is then used to adjust the oscillating frequency of the DRO. The cover is used to cover up the tuning screw in order to restrain the DRO from power leakage through the gap in between the round hole and the tuning screw.

Abstract: Disclosed is an apparatus for use in wireless energy transfer, which includes a first resonator structure configured for energy transfer with a second resonator structure over a distance D larger than characteristic sizes, L1 and L2, of the first and second resonator structures. A power generator is coupled to the first structure and configured to drive the first resonator structure or the second resonator structure at an angular frequency away from the resonance angular frequencies and shifted towards a frequency corresponding to an odd normal mode for the resonator structures to reduce radiation from the resonator structures by destructive far-field interference.

Abstract: A quasi-lumped resonator apparatus that makes use of an inductive portion having a plurality of spines extending therefrom along at least a portion of a length thereof, and a capacitive portion electrically and physically coupled to an end of the inductive portion. The capacitive portion has a plurality of spaced apart capacitive fringe plates extending therefrom. A housing is included for enclosing the inductive and capacitive portions. In another aspect a method is disclosed for forming a quasi-lumped resonator.

Abstract: What is disclosed is a resonant element that causes a signal input from an input terminal to resonate at a predetermined resonance frequency and outputs it to an output terminal.

Abstract: One inventive aspect relates to a reconfigurable cavity resonator. The resonator comprises a cavity delimited by metallic walls. The resonator further comprises a coupling device for coupling an electromagnetic wave into the cavity. The resonator further comprises a tuning element for tuning a resonance frequency at which the electromagnetic wave resonates in the cavity. The tuning element comprises one or more movable micro-electromechanical elements with an associated actuation element located in their vicinity for actuating each of them between an up state and a down state. The movable micro-electromechanical elements at least partially have a conductive surface and are mounted within the cavity.

Abstract: Provided is an Electromagnetic Bandgap (EBG) structure, particularly, a resonator and a bandpass filter having an overlay EBG structure, and a method of manufacturing the resonator. The resonator is manufactured by forming a transmission line and ground plates on a substrate, arranging a plurality of reflector units at regular intervals along the longitudinal direction of the transmission line, and removing at least one reflector among the plurality of reflectors, thus forming a common resonating mode. Therefore, since reflector units constructing capacitance components are separated from a substrate, it is possible to prevent electromagnetic waves from leaking out of the substrate and ensure a high Q characteristic in a high frequency environment due to a resonating unit formed between the reflector units.

Abstract: A tunable filter wherein coupling sections (51, 52, 53) are formed in an input/output line along its lengthwise direction, each coupling section including a gap (G51, G52, G53) formed in the input/output line and coupling electrodes (E5a1, E5b1, E5c1) arranged in the gap in the longitudinal direction of the input/output line; and resonators (41, 42) capable of varying the resonance frequency are connected to the input/output line at the positions between adjacent ones of the coupling sections. Switch means (71, 72, 73) are provided for selectively grounding the coupling electrodes of the coupling sections or selectively short-circuiting the coupling electrodes and the input/output line, and resonance frequency varying means (4m1, 4m2) are provided for varying the resonance frequency of the one or more resonators in association with the switch means.

Abstract: The present invention relates to a tunable microwave arrangement (10) comprising a microwave/integrated circuit device (11) and a substrate (6). It comprises a layered structure disposed between said microwave/integrated circuit device and said substrate (5), said layered structure acting as a ground plane and it comprises at least one regularly or irregularly patterned first metal layer (1), at least one second metal layer (3), at least one tunable ferroelectric film layer (2), whereby said layers are so arranged that the ferroelectric film layers) (2) is/are provided between the/a first metal layer (1) and the/a second metal layer (3).

Abstract: A ferroelectric loaded waveguide resonator capable of operation at microwave, millimeter-wave and higher frequencies and suitable for integration into a three-dimensional monolithic microwave integrated circuit (3D MMIC) is disclosed. The resonator includes a resonator cavity, which, in one form of the invention, is formed by two parallel metal layers and a metallized wall structure extending between the metal layers. The cavity is filled with dielectric material and includes a layer of ferroelectric material, which is used to control the resonant frequency by varying a voltage bias applied to the ferroelectric layer. The cavity includes a slot in one of the metal layers and a coupling strip formed adjacent to the slot to provide electromagnetic coupling to other components, such as a voltage controlled oscillator (VCO). The invention can also be applied to other multi-metal semiconductor or wafer level packaging technologies.

Abstract: The invention discloses a tuneable resonator (100, 200, 300, 500, 600, 700, 900) with a substrate layer (140, 260, 360, 560, 660, 960), which substrate layer supports a structure with a first electrode (130, 240, 350, 550, 650). In connection to the first electrode there is arranged a layer (120, 230, 330, 530, 630, 930) of a material which can be brought to resonate. The resonator further comprises a second electrode (110, 210, 310, 510, 610, 710, 910) arranged in connection to said material which can be brought to resonate, and the material which can be brought to resonate is a ferroelectric material. The ferroelectric material is brought into resonance by applying an electrical field (DC, AC) between the first and the second electrode, the tuning being achieved by varying the electrical field.

Abstract: Methods and apparatus for controlling characteristics of a plasma, such as the spatial distribution of RF power and plasma uniformity, are provided herein. In some embodiments, an apparatus for controlling characteristics of a plasma includes a resonator for use in conjunction with a plasma reactor, the resonator including a source resonator for receiving an RF signal having a first frequency; a return path resonator disposed substantially coaxially with, and at least partially within, the source resonator; and an outer conductor having the source resonator and the return path resonator disposed substantially coaxially with, and at least partially within, the outer conductor, the outer conductor for providing an RF ground connection.

Abstract: A tunable filter is provided which includes a filter unit comprising a pair of microstrips which are disposed facing each other, a capacitor unit connected to one side of the filter unit, and an adjustment unit for regulating the length of each of the pair of microstrips to adjust inductance of the filter unit, the adjustment unit being connected to the opposite side of the filter unit. The length of the microstrips may thereby be regulated in order to vary the frequency band.

Abstract: In one general aspect, a tunable electromagnetic metamaterial as described herein includes a substrate and an array of split ring resonators formed on the substrate. At least one of the split ring resonators is a capacitively tuned split ring resonator. The capacitively tuned split ring resonator includes a structure having a gap and is formed of an electrically conductive material. The capacitively tuned split ring resonator also includes a region of photo-capacitive material formed in close proximity to the structure such that the capacitance of the metamaterial is changed when illuminated by controlling electromagnetic radiation having a selected range of wavelengths.

Abstract: A geometrically modifiable resonator is comprised of a resonator disposed on a substrate, and a means for geometrically modifying the resonator. The geometrically modifiable resonator can achieve active optical and/or electronic control of the frequency response in metamaterials and/or frequency selective surfaces, potentially with sub-picosecond response times. Additionally, the methods taught here can be applied to discrete geometrically modifiable circuit components such as inductors and capacitors. Principally, controlled conductivity regions, using either reversible photodoping or voltage induced depletion activation, are used to modify the geometries of circuit components, thus allowing frequency tuning of resonators without otherwise affecting the bulk substrate electrical properties. The concept is valid over any frequency range in which metamaterials are designed to operate.

Abstract: A tuning assembly for a radio frequency is disclosed. The tuning assembly includes: a tuning screw grasping unit integrally formed with a main body of the filter, which includes a tuning screw receiving unit and a fastening member for grasping a tuning screw; and a tuning screw inserted into the filter through the tuning screw receiving unit, wherein the filter is finely tuned by inserting the tuning screw into the filter through the tuning screw receiving unit and a female screw unit formed at the filter.

Abstract: A resonator, a band-pass filter, and a duplexer are provided. In the resonator, a first electrode is formed of a nonmagnetic conductive material. A ferromagnetic fixed layer is disposed on the first electrode and has a magnetization direction which is fixed. A nonmagnetic conductive layer is disposed on the ferromagnetic fixed layer. A ferromagnetic free layer is disposed on the nonmagnetic conductive layer and has a magnetization direction which varies depending on an external magnetic field. A second electrode is disposed on the ferromagnetic free layer and comprises a nonmagnetic conductive material. The band-pass filter and the duplexer are configured using the resonator. The band-pass filter and the duplexer can operate in a high-frequency range and be miniaturized. The bandwidth of the band-pass filter and the duplexer can be adjusted and the band-pass filter and the duplexer can be formed in one body with an integrated circuit.

Abstract: The invention is an apparatus and technique for tuning the cross coupling of resonators in a dielectric resonator circuit. A cross coupling element such as a coaxial cable having a first end positioned adjacent a first resonator in the circuit and a second end position adjacent a second resonator is supported on the housing of the circuit intermediate its first and second ends. At least one end of the cross coupling element is in contact with a cross coupling tuning element that extends through an external wall of the housing so that it can be manipulated from outside of the housing to move the corresponding end of the cross coupling element relative to the adjacent resonator inside the housing without opening the housing.

Abstract: An apparatus and a method are provided for electronically tuning cavity filters. A tunable cavity comprises at least two pieces of material, such as metal plates or metal traces, and MEMS circuitry interconnecting the pieces of material. Multiple tunable cavities can be combined to create a tunable cavity filter. In one embodiment, a waveguide cavity filter comprises a metal insert attached to a substrate. At least two pieces of material and MEMS circuitry reside within the cavities produced by the metal insert. The MEMS circuitry can be controlled to connect or disconnect the pieces of material, which alters the electric and magnetic fields inside the cavities. In another embodiment, a MEMS positioner inside the cavity filter can physically deform or move a piece of material within the cavity. By altering the electric and magnetic fields within the cavities the resonant frequency of the cavity filter can be tuned.

Abstract: A voltage tunable resonator is provided, including a dielectric base made of a dielectric material having at least one of a voltage dependent dielectric constant and piezoelectric characteristics. A metal contact having a predetermined area is provided on an outer surface of the dielectric base at a predetermined location to provide a predetermined loaded Q for the resonator, and a metal ground coating is provided on the remaining exposed surfaces of the dielectric base, and an isolation region having a sufficient area to prevent significant coupling between the metal contact and the metal ground coating. A control voltage applied between the metal contact and the metal ground coating provides at least one of (i) a variable electric field to control the dielectric constant and a resonant frequency of the resonator and (ii) a piezoelectric response causing a dimensional change in the resonator to control the resonant frequency of the resonator.

Abstract: A dielectric resonator circuit is provided that is tunable over a broad frequency range and/or a broad bandwidth range. The center frequency is made tunable over a broad range by use of a dielectric tuning plug that is positioned in a through hole within the resonator. The bandwidth is made tunable over a broad range by tilting the resonators relative to the enclosure to increase the effective height of the cavity as seen by the resonator.

Abstract: The invention is an apparatus and technique for tuning the cross coupling of resonators in a dielectric resonator circuit. A cross coupling element such as a coaxial cable having a first end positioned adjacent a first resonator in the circuit and a second end position adjacent a second resonator is supported on the housing of the circuit intermediate its first and second ends. At least one end of the cross coupling element is in contact with a cross coupling tuning element that extends through an external wall of the housing so that it can be manipulated from outside of the housing to move the corresponding end of the cross coupling element relative to the adjacent resonator inside the housing without opening the housing.

Abstract: A miniature tunable filter comprising filter poles disposed with a filter substrate. A moveable electrically conductive membrane is disposed above each filter pole and is spaced from the filter pole by an air or vacuum gap. The gap spacing is changed by deflecting the membrane with an electrostatic voltage. The change in gap spacing varies the capacitive loading at the pole, thus providing tuning of the filter. The electrically conductive membrane is preferably manufactured on a separate substrate that is bonded to the filter body containing the filter substrate.

Abstract: The present invention relates to a DC extracting arrangement in a RF filter used for extracting a DC voltage and/or a low frequency signal (DC/Com. signal) superimposed on a RF signal. The DC/Com. signal is extracted using a low pass filter which is arranged inside the first resonator inside the filter. Preferably, the low pass filter is a tubular filter. The invention also relates to a filter housing made from Zinc or Zinc alloy.

Abstract: In order to permit electronic tuning of the frequency of a circuit including dielectric resonators, such as a dielectric resonator filter, tuning plates are employed adjacent the individual dielectric resonators. The tuning plates comprises two separate conductive portions and an electronically tunable element electrically coupled therebetween. The electronically tunable element can be any electronic component that will permit changing the capacitance between the two separate conductive portions of the tuning plates by altering the current or voltage supplied to the electronically tunable element. Such components include virtually any two or three terminal semiconductor device. However, preferable devices include varactor diodes and PIN diodes.

Abstract: A variable resonator includes a ring-shaped conductor line (2) which is provided on a dielectric substrate (5) and has a circumferential length of a wavelength at a resonance frequency or an integral multiple of the wavelength, and at least two circuit switches (31, 32), wherein the circuit switches (31, 32) have one ends (31) electrically connected to the ring-shaped conductor line (2) and the other ends (32) electrically connected to a ground conductor (4) formed on the dielectric substrate (5), electrical connection/disconnection between the ground conductor (4) and ring-shaped conductor line (2) can be switched, and the one ends (31) of the circuit switches (31, 32) are connected to the ring-shaped conductor line (2) on different portions.

Abstract: According to an embodiment of the present invention, a microelectromechanical system (MEMS) element tunes a resonator to a frequency.

Abstract: A dual mode ceramic filter has an enclosure with two cavities separated by a wall, and two TM dual-mode resonators, each TM dual-mode resonator positioned in a corresponding cavity. Each TM dual-mode resonator has first and second modes, and a body having a central portion with a plurality of arms extending outwardly from the central portion. The filter also has two input conductive members, each input conductive members positioned in a corresponding cavity. Each input conductive member is disposed proximate a corresponding TM dual-mode resonator for coupling between the input conductive member and the TM dual-mode resonator.

Abstract: The present invention relates to an electrically controllable/tunable microwave device comprising a ferroelectric substrate with a variable dielectric permitivity and conducting electrodes, arranged on said substrate, and the capacitance of which depends on applied voltage C/V), the microwave device comprises at least two sections or parts of the substrate/electrodes for each of which different electrical field strengths are generated upon voltage application. Said generated electrical field strengths are controlled by means of the design of the device and/or the voltage application such that the slope (dC(dV) of the voltage dependence of the capacitance (C(V) of the microwave device can be controlled.

Abstract: The present invention relates to an improved tuning arrangement to linearise the sensitivity to frequency changes within a certain frequency range in response to tuner displacements relative to a resonator body. The tuning arrangement comprises a tuner and/or resonator having a non-uniform distribution of the effective dielectric permittivity along the axis of tuner displacement. The non-uniform distribution of the effective dielectric permittivity is realised by subdividing the tuner into an arbitrary number of sections, each of which distinguishable at least by their geometrical shape and the value and distribution of the dielectric coefficient ?r.

Abstract: The present invention relates to a tuning screw assembly comprising a sleeve (100) with internal threads for engaging a tuning screw (200) having external threads. The sleeve comprises a first threaded portion (32) which is axially displaced in relation to a second threaded portion (34) for frictionally locking said screw body in said sleeve. The invention also relates to a method of manufacturing said friction locking sleeve and to a resonator comprising said friction locking sleeve.

Abstract: A cross-coupled dielectric resonator circuit. Resonator circuits in accordance with the invention may be used to build low-loss compact filters, oscillators, and other circuits, particularly microwave circuits. The resonators are arranged relatively to each other within an enclosure in a very efficient and compact design that enhances adjustability and coupling between adjacent resonators and the cross-coupling of alternate resonators.

Abstract: A resonator assembly is provided. The resonator assembly includes a conductive housing defining a cavity, and a resonator. The resonator is disposed within the cavity and has a longitudinal bore. A first tuning assembly has a longitudinal bore and is movably disposed along the bore of the resonator. A second tuning assembly is movably disposed along the bore of the first tuning assembly.

Abstract: A tunable bandpass filter includes at least one resonator having a reactance with a resonant frequency, a ferroelectric film having a dielectric constant with a value that changes with an applied electric field, and an electric field generating device for generating relatively constant electric fields of different strengths. The ferroelectric film is electrically coupled to the resonator so that the reactance of the resonator and therefore the resonant frequency of the resonator and the passband of the filter depends on the dielectric constant of the ferroelectric film. The electric field generating device is constructed and arranged to generate relatively constant electric fields within the ferroelectric film, thereby making the resonant frequency of the resonator and the passband of the filter a function of the strength of the relatively constant electric field.

Abstract: A method of tuning a dielectric resonator uses a ferroelectric element to change the dielectric resonator electric field and hence the resonance frequency of the dielectric resonator.

Abstract: A frequency-variable high frequency filter comprises: a substrate; a ground conductor having an opening provided on one principal surface of the substrate; a center conductor provided in the opening to make up a coplanar line resonator with the substrate and the ground conductor; an input line and an output line provided on the other principal surface of the substrate and electromagnetically coupled with the center conductor; and a variable reactance element. The center conductor is divided into two conductor section at the position of the null point of the voltage displacement of a standing wave created in the coplanar line resonator so that the two conductor sections are separated in the longitudinal direction of the center conductor. The variable reactance element is inserted in the center conductor to connect the two conductor sections of the center conductor.

Abstract: A tunable RF cavity resonator having reduced generation of passive inter-modulation, the tunable RF cavity resonator including a cavity body, a fixed tuning post at a first end of the cavity body, a dielectric rod in the fixed tuning post interior space with a first spatial gap between the dielectric rod outer surface and the fixed tuning post inner wall, a tuning screw connected to a first end of the dielectric rod, and a tuning element disposed on a second end of the dielectric rod so that the tuning element moves within the interior space of the fixed tuning post while maintaining a second spatial gap between the tuning element outer surface and the fixed tuning post inner wall. Accordingly, the tuning element forms a short section of very low RF impedance transmission line thereby preventing RF signal leakage through the interior space of the fixed tuning post.

Abstract: The present invention incorporates triple-mode, mono-block resonators that are tunable. Four novel and unobvious methods of tuning are disclosed. The first tuning method is to mechanically grind areas on three orthogonal faces of the mono-block in order to change the resonant frequencies of the three modes in each block. Another method of tuning frequency is to cut a slot within a face of the resonator. A third method of tuning the mono-block is to tune the resonant frequency of a particular mode by removing small circular areas of the conductive surface from a particular face of the mono-block. The fourth, tuning method is the use of discrete tuning elements, with 3 elements distributed among three orthogonal faces of the mono-block, to affect the necessary change of the resonant frequencies.

Abstract: The present invention relates to a tunable resonating arrangement comprising a resonator apparatus (10), input/output coupling (4) means for coupling electromagnetic energy into/out of the resonator apparatus, and a tuning device (3) for application of a biasing voltage/electric field to the resonator apparatus. The resonator apparatus comprises a first resonator (1) and a second resonator (2). Said first resonator is non-tunable and said second resonator is tunable and comprises a ferroelectric substrate (21). Said first and second resonators are separated by a ground plane (13) which is common for said first and second resonators, and coupling means (5) are provided for providing coupling between said first and second resonators. For tuning of the resonator apparatus, the biasing voltage/electric field is applied to the second resonator (2).

Abstract: A cross-coupled dielectric resonator circuit. Resonator circuits in accordance with the invention may be used to build low-loss compact filters, oscillators, and other circuits, particularly microwave circuits. The resonators are arranged relatively to each other within an enclosure in a very efficient and compact design that enhances adjustability and coupling between adjacent resonators and the cross-coupling of alternate resonators.

Abstract: A system and method for a plunger assembly includes a tuning slug with a bore in the stem, a tuning screw rotatably disposed in the stem, and a coupling assembly to rotatably secure the tuning screw to the slug. The system and method may also include a locking assembly to secure the postion of the assembly.

Abstract: A screw-fixing implement which is low in cost and has a high reliability, a resonator device having the screw-fixing implement and having a characteristic adjusting function, a filter, an oscillator, and a communication device each containing the resonator device, and a method of adjusting a characteristic of the resonator device are provided. A nut 2 for fixing a characteristic-adjusting screw 1 is provided with a concave portion d in the vicinity to the axis of the fixing nut 2 and concaved in the thickness direction. A spring-washer 3 is provided with a convex portion p which is engaged with the concave portion d of the screw-fixing nut 2. The spring-washer 3 is sandwiched between a panel 4 and the screw-fixing nut 2. Then, the characteristic adjusting screw 1 is turned under an appropriate load. After the characteristic is adjusted, the screw-fixing nut 2 is tightened till the spring washer 3 is completely broken. Thus, these members are locked.

Abstract: A circuit board having a VCO that can be adjusted during manufacturing is disclosed. The VCO has a resonating circuit, a coupling circuit, and an oscillating circuit. The coupling circuit and the oscillating circuit have adjustable capacitors composed of micro-strips on two conductive layers of the circuit board with an insulation layer between the two conductive layers. The micro-strips are cut in different directions by laser beams to adjust the capacity of the capacitors or to make the capacitor react as inductance so that the output frequency and the phase noise of the VCO is accurate or good enough to improve the production's yield rate.

Abstract: A production method for a band-pass micro-strip filter which need not conduct an adjusting process on the central frequency in a pass band based on the frequency characteristics of a filter that have been previously measured and inspected after the filter is produced. The production method for a micro-strip filter includes the step of adjusting, in the production process, a resonator length according to the thickness and capacitance of a substrate that have been measured in advance.

Abstract: The present invention relates to an electrically controllable/tunable microwave device comprising a ferroelectric substrate with a variable dielectric permitivity and conducting electrodes, arranged on said substrate, and the capacitance of which depends on applied voltage C/V), the microwave device comprises at least two sections or parts of the substrate/electrodes for each of which different electrical field strengths are generated upon voltage application. Said generated electrical field strengths are controlled by means of the design of the device and/or the voltage application such that the slope (dC(dV) of the voltage dependence of the capacitance (C(V) of the microwave device can be controlled.

Abstract: A system and method for a plunger assembly includes a tuning slug with a bore in the stem, a tuning screw rotatably disposed in the stem, and a coupling assembly to rotatably secure the tuning screw to the slug. The system and method may also include a locking assembly to secure the postion of the assembly.

Abstract: A tunable resonant system (100) and a method for a varying the resonant characteristics of a resonant cavity (102). The resonant cavity is enclosed by a conductive material that has at least one aperture (104) for coupling the resonant cavity to an RF signal propagating in a circuit device (160). A conductive fluid (108) having a permeability is at least partially disposed within the resonant cavity (102) or a plurality of subcavities (250, 252) within the resonant cavity (202). A dielectric barrier (105) can be provided within the aperture to prevent the conductive fluid from escaping the resonant cavity. A composition processor (101) is adapted for dynamically changing a composition or volume of the conductive fluid to vary or maintain constant a center frequency, a bandwidth, a quality factor (Q) or an impedance of the resonant cavity.

Abstract: The present invention provides a small, thin filter circuit showing a desired filter characteristic which is highly accurate, and producible with a high efficiency. The filter circuit includes a pair of dielectric insulating layers 2 and 3, upper and lower, each having a ground pattern 11 (16) formed on the main side thereof, and an inner wiring layer 4 formed between the dielectric insulating layers 2 and 3 and having capacitively coupled resonator conductive patterns 6 and 7 each connected at one end thereof to the ground patterns 11 and 16 via inter-layer connecting vias 12 and open-circuited at the other end.

Abstract: A high-frequency module includes a dielectric plate in which a resonator is formed and a cover for covering the dielectric plate. A hole is provided in the cover. A laser beam for laser trimming passes through the hole. The area of opening and the depth of the hole are defined so that electromagnetic waves in a usable frequency band are cut off in the hole. An electrical characteristic is measured in a state where all components including the cover are assembled, and laser trimming is performed through the hole so as to obtain a desired characteristic.