Abstract: In the present disclosure, when a supply flow rate of an inert gas is changed, a pressure fluctuation in a circulation path is suppressed. An EFEM includes a supply valve configured to be capable of changing a supply flow rate of the inert gas supplied to the circulation path, a discharge valve configured to be capable of changing a discharge flow rate of a gas discharged from the circulation path, a concentration detection part configured to detect a change in an atmosphere inside the circulation path, a pressure detection part configured to detect a pressure in the circulation path, and a control part configured to control the supply valve and the discharge valve. The control part is configured to determine an opening degree of the discharge valve to a predetermined value based on a detection result obtained by the concentration detection part.

Abstract: Air rinsing apparatus and systems for rinsing containers are disclosed. An example air rinsing apparatus includes: a first enclosure having a first inlet port and a first output port; a second enclosure within the first enclosure, the second enclosure comprising a second inlet port and a second output port, the second output port disposed on a same face of the first enclosure as the first inlet port; and one or more air movers configured to: urge first air into the second inlet port, the second enclosure configured to direct the first air from the second inlet port to the second output port; and pull second air from the first output port, the first enclosure configured to direct the second air from the first inlet port to the first output port.

Abstract: A method for transporting a cassette pod for containing semiconductor waters is provided. The method includes transporting a cassette pod configured to receive a semiconductor wafer with a transporting apparatus. The method further includes supplying a gas from a cylinder into a housing of the cassette pod. The cylinder is externally positioned on the housing. The method also includes detecting a gas pressure in the cylinder with a detection element. In addition, the method includes issuing a signal to the transporting apparatus when the gas pressure in the cylinder is lower than a predetermined limit.

Abstract: Methods and apparatus for changing the temperature of a substrate are provided. In some embodiments, a method includes: placing a substrate onto a support surface of a substrate support disposed within an inner volume of a cooling chamber; moving at least one of the substrate support or a plate disposed in the cooling chamber opposite the substrate support from a first position, in which the substrate is placed onto the support surface, to a second position, in which a second volume is created between the support surface and the plate, the second volume being smaller than and substantially sealed off from a remaining portion of the inner volume; flowing a gas into the second volume to increase a pressure within the second volume; and flowing a coolant through a plurality of channels disposed in at least one of the substrate support or the plate to cool the substrate.

Abstract: Substrate support assemblies for a semiconductor processing apparatus are described. The assemblies may include a pedestal and a stem coupled with the pedestal. The pedestal may be configured to provide multiple regions having independently controlled temperatures. Each region may include a fluid channel to provide a substantially uniform temperature control within the region, by circulating a temperature controlled fluid that is received from and delivered to internal channels in the stem. The fluid channels may include multiple portions configured in a parallel-reverse flow arrangement. The pedestal may also include fluid purge channels that may be configured to provide thermal isolation between the regions of the pedestal.

Abstract: A skate dryer assembly. The assembly has a skate, a dryer module, and a device for blowing or sucking air through or from the module. The skate includes a boot and a blade. The dryer module defines a slot therein adapted to receiving and retaining the blade therein.

Abstract: The mitten and boot dryer for use with a residential furnace includes a vent plate made of a ferrous material, which is mounted either one a forced air residential furnace or down line therefrom. The vent plate features a plurality of holes upon which a vent may be attached via an angled base support. The angled base support features a magnet embedded therein, which attaches itself onto the hole of the vent plate, and can rotate there about. Alternatively, the angled base support may feature a winged end that slides into a winged hole on the vent plate, and is rotated therein so as to lock into the vent plate. The vent has a cap on a farthest distal end and features a plurality of holes along the length. The angled base support includes a friction hinge to enable rotation of the vent with respect to the vent plate. The vents are ideally oriented at angles to enable a boot or mitten to rest thereon.

Abstract: A dryer system for a firefighting ensemble comprising a housing having an air intake port and an air outlet port, a forced air assembly including a heater and a blower accommodated within the housing, a plurality of flexible porous hose segments coupled to the air outlet port operable to receive and conduct forced air therefrom, and the plurality of flexible porous hose segments are operable to conduct forced heated air into elements of the firefighting ensemble to speed drying.

Abstract: A skate dryer assembly. The assembly has a skate, a dryer module, and a device for blowing or sucking air through or from the module. The skate includes a boot and a blade. The dryer module defines a slot therein adapted to receiving and retaining the blade therein.

Abstract: A method of drying sticks, a related apparatus, resultant product and its uses where the method involves presenting a plurality of sticks in parallel as a single layer, pressing each stick with a bank of pressing members on and/or into at least one face of the sticks, each with plurality of protuberances, thereby to constrain the sticks against crook, and drying the sticks when so constrained. Preferably each bank of pressing members is an underside of a frame or lattice of a stack of such frames or lattices able to receive such a single layer of sticks between adjacent overlying/underlying frames or lattices, the protuberances preferably being only downwardly directed.

Abstract: In one aspect, a substrate processing apparatus is provided. The apparatus comprises a mechanism for forming a meniscus on a surface of a substrate by moving the substrate through a fluid; an air knife apparatus positioned to apply an air knife to shorten the meniscus formed on the surface of the substrate; and a drying vapor nozzle positioned to direct a drying vapor to the meniscus shortened by the air knife. Numerous other aspects are provided.

Abstract: An air wiping device for drying an elongated product that passes through the air wiping device. The air wiping device includes a housing having an internal elongated tubular passage through which the elongated product extends and including opposite one and other ends with the housing tubular passage having an inlet end and an outlet end for respectively receiving and passing the elongated product; a first set of nozzles mounted at the one end of the housing for communicating a compressed gas stream to the internal elongated tubular passage and second set of nozzles mounted at the other end of the housing for communicating a compressed gas to the internal elongated tubular passage. The first and second sets of nozzles are mounted for directing the respective gas streams obliquely to the internal elongated tubular passage.

Abstract: A low pressure blow-off assembly provides converging airflow around a length of material moving through the assembly. The assembly generally includes a body having an interior wall and an exterior wall. The interior wall defines a bore extending through the body for receiving the material through the body, and the exterior wall surrounds the interior wall and defines an air reservoir within the body generally between the exterior wall and interior wall. A cap is configured to be coupled to the body to cover at least part of the air reservoir. The bore includes a generally tapered end and the cap includes a generally tapered inner lip, where the tapered end of the bore and the tapered inner lip of the cap define an opening therebetween for discharging air from the air reservoir through the opening in a generally converging airflow pattern around the material passing through the body.

Abstract: A small, portable electric shoe dryer that includes an elongated, narrow outer housing with three longitudinally aligned heating elements and a fan and motor assembly mounted on one end. Formed on the outer housing and around the fan and motor assembly is a fan vent opening. Formed on the opposite, distal end of the outer housing is a plurality of front and side body vent openings. In one embodiment, a three pole manual switch is mounted inside the outer housing that connects to the fan and motor assembly which draws dry air into the shoe from the top opening or forces moist air out of the shoe. In another embodiment, a pair of longitudinally aligned, upward extending wing elements are formed on the top surface which maintains air space when the inside of the shoe is adjacent to the top surface.

Abstract: An apparatus for removing water from an unfurled umbrella having a member with bristles to receive the axial length of an unfurled umbrella such that the at least one bristle support member surrounds the umbrella by at least 180 degrees, so the plurality of bristles compress the umbrella and remove water from the umbrella as the umbrella passes through the member with bristles.

Abstract: A golf club grip warning and drying apparatus includes a housing that has a bottom wall and a peripheral wall which is attached to and extending upwardly from the bottom wall. The peripheral wall has an upper edge defines an access opening extending into the housing. A heating assembly is positioned in the housing. The heating assembly provides warm air for an interior of the housing when the heating assembly is turned on. A securing assembly is attached to the housing. The securing assembly is configured to releasably secure the housing to the golf bag. A golf club grip is removably extendable into the housing and heated by the heating assembly.

Abstract: Disclosed is a system to dry the hands of individuals. The system may include a pedestal, an air pedal and powder pedal hinged to the pedestal, a chamber having a dome connected to a shroud to define a chamber interior. The chamber interior may be divided into a first divided area, a second divided, and an overhead area that connects the first divided area to the second divided area. Each dived area may include a perforated tube to deliver pressurized air and powder into the chamber interior. An air compressor may be connected directly to the perforated tubes and connected to a powder chamber. In addition to pressurized air being delivered to the chamber interior, powder optionally may be delivered to the chamber interior.

Abstract: An umbrella and shoe drying device, for use removing moisture, dirt, and debris from shoes and umbrellas, having a mat portion, a blower housing, and an umbrella holder. The mat portion has a substantially flat top surface having a grating upon which shoes are placed. The blower housing is mounted upon the flat top surface of the mat portion, supports the umbrella holder, and contains a blower. The umbrella housing has a main bore for accommodating umbrellas. The blower is in communication with the main bore and grating, and generates suction that removes moisture, dirt, and debris from umbrellas in the main bore and from shoes positioned upon the grating.

Abstract: An apparatus and a process of removing moisture in situ from a generally tubular outer insulation jacket about an underground electrical power distribution cable having opposite end zones in combination with a mating terminator in fluid sealing relation on one of the end zones of the cable, the cable including an inner core including a bundle of longitudinal strands of electrically conductive material defining longitudinally extending interstices between the strands, and the core and interstices extending axially through the jacket and having end zones extending axially from the insulation jacket which includes introducing gas at an elevated low pressure relative to ambient pressure directly into the interstices between said conductive strands at one end zone to flow through the interstices within the core without being in direct contact with the outer insulation jacket and out the other end zone of the cable to withdraw moisture and dry the insulation jacket about the core to retard and reduce tree formation

Abstract: The device for removing water drops from an umbrella is constituted such that a number of water absorption members with elastic property are disposed at certain intervals radially in the inserting opening for an umbrella of the device body, the inserting space for the umbrella is in the central part of a number of water absorption members, thereby a closed rainy umbrella is inserted into the inserting space, the umbrella cloth is inserted into the clearance between the each adjacent water absorption member, then water drops on the umbrella cloth can be absorbed and removed by sliding the inserted umbrella in the direction of insertion of the umbrella, the device does not need such energy as electric energy, and water absorption is performed certainly and within only short time.

Abstract: A low-pressure dryer dries a substrate applied a coating solution thereon at low pressure. The dryer includes an airtight chamber installing a substrate table to place the substrate thereon; a diffuser plate, provided as facing the substrate placed on the substrate table with a gap, for discharging gas existing in the gap toward outside, the diffuser plate having a size almost the same as or larger than the substrate; a substrate-temperature adjuster, installed in the substrate table, for adjusting a temperature of the substrate; and a decompression mechanism for decompressing the airtight chamber. The diffuser plate has a temperature adjuster for making temperature adjustments to have a temperature difference between a first region and a second region of the diffuser plate, the first region facing a center region of the substrate, the second region being outside the first region and including a region facing an outer region of the substrate.

Abstract: A reactor defines a reaction chamber for processing a substrate. The reactor comprises a first inlet for providing a first reactant and to the reaction chamber and a second inlet for a second reactant to the reaction chamber. A first exhaust outlet removes gases from the reaction chamber. A second exhaust outlet removes gases from the reaction chamber. A flow control system is configured to alternately constrict flow through the first and second exhaust outlets. The reactor chamber is configured to for a diffusion barrier within the reaction chamber.

Abstract: A low-pressure dryer dries a substrate applied a coating solution thereon at low pressure. The dryer includes an airtight chamber installing a substrate table to place the substrate thereon; a diffuser plate, provided as facing the substrate placed on the substrate table with a gap, for discharging gas existing in the gap toward outside, the diffuser plate having a size almost the same as or larger than the substrate; a substrate-temperature adjuster, installed in the substrate table, for adjusting a temperature of the substrate; and a decompression mechanism for decompressing the airtight chamber. The diffuser plate has a temperature adjuster for making temperature adjustments to have a temperature difference between a first region and a second region of the diffuser plate, the first region facing a center region of the substrate, the second region being outside the first region and including a region facing an outer region of the substrate.

Abstract: An apparatus and corresponding method for heating a wafer during processing. The apparatus includes a process chamber enclosing a processing tube defining a processing area. The processing tube includes a first wall and a second wall which define a hollow cavity or passageway therebetween. The second wall includes a plurality of holes or outlets formed thereon which allow environmental communication between the hollow cavity and the processing area. The apparatus also includes a plurality of resistive heating elements positioned adjacent to the processing tube. A thermal energy output from the resistive heating elements is configured to heat a gas flowing through the hollow cavity. The gas flowing through the hollow cavity exits the hollow cavity through the plurality of holes and convectively change the temperature of the wafer disposed in the processing tube.

Abstract: A toothbrush dryer includes a housing formed as a heating chamber for storing toothbrush in the housing, and a heating device provided in the housing preferably at a bottom portion of the housing for warming the toothbrush for keeping a dried toothbrush for preventing bacteria, fungi or algae infection or contamination.

Abstract: A low-pressure dryer dries a substrate applied a coating solution thereon at low pressure. The dryer includes an airtight chamber installing a substrate table to place the substrate thereon; a diffuser plate, provided as facing the substrate placed on the substrate table with a gap, for discharging gas existing in the gap toward outside, the diffuser plate having a size almost the same as or larger than the substrate; a substrate-temperature adjuster, installed in the substrate table, for adjusting a temperature of the substrate; and a decompression mechanism for decompressing the airtight chamber. The diffuser plate has a temperature adjuster for making temperature adjustments to have a temperature difference between a first region and a second region of the diffuser plate, the first region facing a center region of the substrate, the second region being outside the first region and including a region facing an outer region of the substrate.

Abstract: A wafer dryer system which is suitable for drying rinse water from substrates in the event of a system malfunction or failure during or after rinsing of the substrates. The wafer dryer system typically includes a pair of drying chambers, each of which is fitted with at least one nitrogen gas inlet, at least one IPA gas inlet and an exhaust opening. A wafer boat which holds multiple wet wafers from an interrupted rinsing process typically in a wet bench system is placed in one of the chambers, after which the chamber is filled with hot nitrogen gas and mixed IPA gas to dry the wafers in the wafer boat. Upon resumption of operation of the wet bench system from which the wafers were taken or upon availability of a second wet bench system, the dried wafers are removed from the chamber for continued rinsing, as necessary.

Abstract: An apparatus (1) for drying solvent-based ink is described, in which the ink is applied onto plastic cassettes for histological preparations and/or on glass specimen slides (17) for microscopic thin sections. The apparatus (1) comprises a hot-air blower (2) and/or a flash device (3) for drying the ink.

Abstract: An apparatus for drying a semiconductor substrate includes a chamber having a processing bath and a cover, a liquid flow system for supplying a liquid flow into the processing bath so as to clean the substrate and for draining a liquid from the processing bath, a gas distributor for spraying a gas for drying the substrate, and decompression means for exhausting air in the chamber.

Abstract: An apparatus and corresponding method for heating a wafer during processing. The apparatus includes a process chamber enclosing a processing tube defining a processing area. The processing tube includes a first wall and a second wall which define a hollow cavity or passageway therebetween. The second wall includes a plurality of holes or outlets formed thereon which allow environmental communication between the hollow cavity and the processing area. The apparatus also includes a plurality of resistive heating elements positioned adjacent to the processing tube. A thermal energy output from the resistive heating elements is configured to heat a gas flowing through the hollow cavity. The gas flowing through the hollow cavity exits the hollow cavity through the plurality of holes and convectively change the temperature of the wafer disposed in the processing tube.

Abstract: A dryer lid for a substrate dryer such as a Marangoni-type substrate drying system. The dryer lid includes a lid panel which is mounted on a substrate cleaning tank and has a gasket slot that extends into the bottom surface of the lid panel, around the perimeter thereof. A sealing gasket is seated in the gasket slot. The gasket slot receives the upper edge of a lid frame, the bottom edge of which typically supports a gas shower panel fitted with multiple gas nozzles inside the substrate cleaning tank. Accordingly, the sealing gasket is interposed between the lid frame and the lid panel and seals the junction between those elements to prevent leakage of vaporized IPA and nitrogen drying gases from the cleaning tank during drying of substrates in the cleaning tank.

Abstract: A wafer dryer system which is suitable for drying rinse water from substrates in the event of a system malfunction or failure during or after rinsing of the substrates. The wafer dryer system typically includes a pair of drying chambers, each of which is fitted with at least one nitrogen gas inlet, at least one IPA gas inlet and an exhaust opening. A wafer boat which holds multiple wet wafers from an interrupted rinsing process typically in a wet bench system is placed in one of the chambers, after which the chamber is filled with hot nitrogen gas and mixed IPA gas to dry the wafers in the wafer boat. Upon resumption of operation of the wet bench system from which the wafers were taken or upon availability of a second wet bench system, the dried wafers are removed from the chamber for continued rinsing, as necessary.

Abstract: The invention is concerned with the problem of ensuring optimum drying of contact lenses on a gripper, while at the same time minimizing interruptions in operations. This is achieved by a convex shape of the end face of the blast nozzle.

Abstract: Liquid for prevention of substrate drying is supplied into a processing chamber so that a pool of the liquid is created as an anti-drying atmosphere in advance inside a processing chamber, and substrates, as they are dipped in the pool, are kept on stand-by in a substrate board. In this manner, air drying of the substrates which are kept on stand-by is prevented. When the number of the substrates in the substrate board reaches a certain number, the anti-drying atmosphere is removed from the processing chamber, which is followed by introduction of an SCF into the processing chamber and supercritical drying (high pressure drying) of all of the plurality of substrates inside the processing chamber, namely, batch supercritical drying.

Abstract: An apparatus for hardening a sealant on a substrate is disclosed in the present invention. The apparatus includes a chamber receiving at least a pair of bonded substrates, and at least one supporting unit supporting the bonded substrates, attached to inner side surfaces of the chamber, and having a substantially flat contact surface contacting the bonded substrates.

Abstract: The object of this invention is to realize a heat exchanger which efficiently and uniformly cools or heats portions to be controlled to a prescribed temperature, and then to provide a surface processing apparatus which makes it possible to continuously carry out stable processing.

Abstract: An apparatus for manufacturing a semiconductor device having a process chamber comprises a lower process chamber wall, a quartz dome over the lower process chamber wall, a pumping mean for making an interior of the process chamber vacuous, a bell-jar over the quartz dome, a bell-jar heater built in a side of the bell-jar, a susceptor on which a wafer is loaded, a susceptor heater built in the susceptor, and a wafer temperature compensator having a reflector plate and supporting elements, the reflector plate being spaced apart a certain distance from the wafer and having a larger area than that of the wafer, the supporting elements being connected to the wafer and supporting edges of a bottom surface of the wafer.

Abstract: In a first aspect, a module is provided that is adapted to process a wafer. The module includes a processing portion having one or more features such as (1) a rotatable wafer support for rotating an input wafer from a first orientation wherein the wafer is in line with a load port to a second orientation wherein the wafer is in line with an unload port; (2) a catcher adapted to contact and travel passively with a wafer as it is unloaded from the processing portion; (3) an enclosed output portion adapted to create a laminar air flow from one side thereof to the other; (4) an output portion having a plurality of wafer receivers; (5) submerged fluid nozzles; and/or (6) drying gas flow deflectors, etc. Other aspects include methods of wafer processing.

Abstract: A device for performing surface treatment on semiconductor wafers has a cassette (1) for accommodating a plurality of wafers (5) in its interior (3); the wafers (5) are aligned in a first row. The wafer surfaces (51) are essentially in parallel with each other. The cassette (1) has a side-wall (10) which can be arranged essentially perpendicular with respect to the wafer surfaces (51); the side-wall (10) has openings (111′-145′) on its face (101) which is directed to the wafers (5), the openings (111′-145′) are aligned in second rows, the second rows are essentially parallel to the first row; the openings (111′-114′) are connected to respective supply channels (11′, 12′, 13′, 14′, 15′) for transporting a surface treatment medium which is fed to one (15′) of these supply channels via a feeding point (FP). The cross-section of the openings (111′-145′) is variable.

Abstract: The invention provides a wafer pad assembly for use in an ion implanter for mounting and cooling a wafer. The wafer pad assembly comprises a wafer support pad having an upper surface for mounting the wafer and a lower surface. The lower surface of the wafer support pad is connected to a coolant passage having an inlet section and an outlet section arranged in an opposed configuration, wherein said inlet section is counterbalanced by said outlet section. The lower surface is connected to a frame having an outer curved surface in mating engagement with a complementary shaped bearing surface of a housing wherein said wafer can be tilted or rotated about an axis.

Abstract: A golf club grip drying device includes one chamber for receipt of a golf club grip and an adjacent chamber for receipt of an aerosol gas dispenser with a transfer tube conveying gas from the aerosol gas dispenser chamber to the golf club grip chamber. An actuator is provided which is responsive to movement of the golf club grip within its chamber so that when the golf club grip is so inserted, it engages the actuator which in turn engages the aerosol gas dispenser to open a valve contained within the aerosol gas dispenser and cause dispensing of aerosol gas within the golf club grip chamber to remove moisture from the surface of the golf club grip and therefore dry it.

Abstract: Apparatus to transport and cool rolled products such as bars, round pieces, rods or similar, arrangable downstream of a coil-forming head, comprising a plurality of transport rollers, at least partly motorized and parallel to each other to define a substantially horizontal transport plane on which the rolled products arranged in coils are able to lie, ventilator in correspondence with the transport rollers to blow air towards the rolled products and a conveyor to convey more air towards the lateral edges of the coils than towards the central zone of the coils, the conveyor comprising a plurality of elements, arranged at intervals between the transport rollers. Each of the elements shaped to define transit channels having a first transverse section greater in correspondence with the ends of the transport rollers and a second transverse section less in correspondence with the median zone of the transport rollers.

Abstract: Holders (20) for articles such as newly-formed packets or groups of cigarettes are used to constrain and protect the articles while being conveyed by handling apparatus (22), e.g. in a packing machine (10). Holders (20) of similar external shape, adapted to interface with the handling apparatus, may be provided with differing internal features (28), adapted for receiving different articles, so that the articles may be readily conveyed by the same apparatus. The apparatus may be employed at the exit end of a cigarette packing machine to maintain the shape of newly-formed packets in a packet stabilising region. This region may comprise a reservoir including a series of compartmented drums (24,26) in which each compartment receives a line of abutting holders which is indexed in an axial direction during rotation of the drums.

Abstract: A portable and collapsible sports dryer for drying wearing apparel has at least one rigid air supply tube with an open end for being placed within a clothing article for supporting it above the dryer. An electric blower communicates with the tube for circulating air to dry the clothing article, and a removable drip shield is provided between the open end of the tube and the electric blower for deflecting moisture that drips from the clothing article away from the electric blower. A carrying case containing the air blower serves as a supporting base for the dryer when the dryer is placed on the floor or on a table. The air supply tube is adapted to be stored in a storage plenum within the case and is removed and then connected during use to the blower. The tube is positioned while in operation to extend upwardly from the case for forcing a current of air through an article of wearing apparel supported upon an upper free end of the rigid air supply tube.

Abstract: A batch process for making galvanized steel products with a low lead or no lead zinc coating is described. Metal parts are cleaned, rinsed, pickled and rinsed and are immersed in a hot, pre-flux solution and thoroughly dried before they are immersed in a molten zinc bath. The dryer system includes a mechanism for rotating the batch of parts as they are dried. In one embodiment of the invention, a batch of steel pipe is dried by hot air having a maximum temperature of 125° C. The descrambler system rotates the pipe and moves the pipe in contact with the divider apparatus to separate the pipe in the dryer. The pipe, thoroughly dried, is immersed into a molten zinc bath having less than 0.05% by weight lead, and the use of a top-flux on the molten zinc bath is optional.

Abstract: A dryer module for drying filter supports in DNA preparation comprises a receiving member for receiving the filter support and at least one blower member, the blower member being arranged below the receiving member for receiving the filter support so that the filter support is blown on an dried from below. The dryer module also has a heating system for warming the air blown from below against the filter support, the heating system being arranged above the blower member, of which there is at least one. The dryer module is electronically controlled by a control means as a function of the measured temperature of the drying air. The dryer module can be used as a stand-along apparatus or in an automated environment.

Abstract: An apparatus and method are presented for drying and storing laboratory containers which significantly reduce the introduction of contaminants into the containers. A laboratory container system includes one or more containers and a rack for holding the containers in an inverted position. Each container has a base portion, a column portion, and a receptacle portion. A lateral dimension of the base portion is greater than that of the column portion. During use, a container is inverted, and the column portion is inserted between sides of a slot in a flat member of the rack. The spacing between the sides of the slot is sufficient to allow the column portion to pass therebetween, but not the base portion. As a result, the base portion of the container contacts an upper portion of both sides of the slot, and the container is suspended from the rack by the base portion in an inverted position.

Abstract: Wafer rack consisting of a carrier frame provided with accommodations for at least two wafers. To provide uniform distribution of gas over said wafers a gas distribution device is fitted at least above each wafer, which gas distribution device is connected to the gas supply for the reactor in which the wafer rack is placed. Connection to such a gas supply can be via coupling of the wafer rack to a part of said reactor.

Abstract: An apparatus for drying and storing an article, such as a baby bottle, after washing and rinsing includes a tray having a bottom face that is adapted to be supported by an underlying surface such as a counter-top, and an upper face. A plurality of pegs extend out from the upper face, and each peg is sized and arranged so as to be able to support an article, such as a baby bottle, after washing and rinsing. Each peg is mounted to the tray in such a manner as to be movable between a first storage position, wherein the entire peg is positioned relatively close to the upper face for storage and packaging, and a second, operative position. This permits the apparatus to be conveniently folded for packaging and storage purposes. Another aspect of the apparatus involves disk holding structure, connected to the upper face of the tray, for holding baby bottle disks in a location that is isolated from areas of the tray in which liquid may collect.

Abstract: An apparatus for drying and storing an article, such as a baby bottle, after washing and rinsing includes a tray having a bottom face that is adapted to be supported by an underlying surface such as a counter-top, and an upper face. A plurality of pegs extend out from the upper face, and each peg is sized and arranged so as to be able to support an article, such as a baby bottle, after washing and rinsing. Each peg is mounted to the tray in such a manner as to be movable between a first storage position, wherein the entire peg is positioned relatively close to the upper face for storage and packaging, and a second, operative position. This permits the apparatus to be conveniently folded for packaging and storage purposes. Another aspect of the apparatus involves disk holding structure, connected to the upper face of the tray, for holding baby bottle disks in a location that is isolated from areas of the tray in which liquid may collect.