Abstract: Methods for drying a substrate. The methods include the following steps: (a) emitting infrared radiation towards a substrate moving through a process space using an emitter unit comprising at least one inflated emitter, (b) generating at least two process gas streams of a process gas directed towards the substrate, (c) drying the substrate by the action of infrared radiation and process gas on the substrate, and (d) extracting moisture-laden process gas from the process space via an extraction duct, forming an exhaust air stream leading away from the substrate. To specify a drying method which is reproducible and effective and leads to an improved result, in particular in terms of homogeneity and speed of drying of the substrate, the at least two process gas streams are guided to the infrared emitter before they act on the substrate, and an exhaust air stream is spatially assigned to each process gas stream.

Abstract: A laundry treatment apparatus is disclosed. The laundry treatment apparatus includes a cabinet, a tub arranged in the cabinet, a drum arranged in the tub and formed of a metal material, and an induction module configured to inductively heat the drum, wherein the induction module includes a coil formed by winding a wire, and a base housing including a base body arranged on the tub, and a fixing rib arranged on the base body to fix the coil, wherein the wire is drawn into the base body in one direction, wound around the fixing rib, and drawn out of the base body in the same direction.

Abstract: An object treating apparatus includes a tub, a rotatable drum for receiving an object, an induction heater for heating an outer circumferential face of the drum, a motor for rotating the drum, an upper temperature sensor, a lower temperature sensor, and a processor. The upper temperature sensor detects a temperature of a space between the tub and the drum. The upper temperature sensor is disposed inside the tube at an upper portion of the tub. The lower temperature sensor detects a temperature around condensed water at a bottom of the tub. The lower temperature sensor is disposed inside the tub at a lower portion of the tub. The processor can determine a drying ending timing based on the temperatures detected by the upper and lower temperature sensors.

Abstract: A method for producing a wet-laid nonwoven fabric web includes the following steps: providing a fibrous web of industrially generated inorganic fibers, or fibers from synthetically generated polymers, and thermally drying the fibrous web in an alternating manner by infrared radiation and hot air, in order for the nonwoven fabric web to be generated.

Abstract: A method for coating and curing a material on a product having a plurality of edges and faces. More specifically, disclosed is an efficient method for coating and curing engineered wood products (EWP) in general, and the edges of EWP in particular.

Abstract: The installation of one or more prefabricated drains beneath the surface of sediment in a sediment pond utilizing suction or a vacuum to withdraw water from the sediment material to lower the water level down to the level of the prefabricated drains below the pond surface. Dewatering may be coupled with imparting vibrations to the material to further promote both additional dewatering and compaction of the sediment material in the pond. A suitably graded bottom ash, fly ash, sand or large-diameter-solid particle or sediment layer may be added on top of the horizontal drains to enhance dewatering of finer sediment material.

Abstract: Infrared air float bar for use in floating and drying a continuous planar web of a material in a dryer. Direct radiated or reflected infrared electromagnetic energy from an infrared light source in a removable channel assembly accelerates drying, or evaporation of solvents, or curing of web material passing in proximity to the bar, either by infrared electromagnetic energy, or in combination with convention airflow. The infrared source is cooled by pressurized air passing through an interior portion of the removable air bar channel assembly, and the air is further conducted into fluid contact with the web in an air gap between the emitter and web to promote convective heat transfer and to contribute to the air pressure field supporting web flotation. The removable channel assembly is configured for replacement of the infrared emitter and to allow the setting of the pressurized cooling air flow to the optimum level.

Abstract: Disclosed herein are roll fed air heated flotation ovens and related thermoforming systems, assemblies, and machines that enable the corrugation-free expansion of a gas impregnated thermoplastic web passing through an oven chamber (without use of a pin-chain assembly), as well as to related methods. In an embodiment, a gas impregnated thermoplastic web is conveyed and expanded through an elongated air heated oven chamber, wherein the elongated oven chamber includes a plurality of downwardly directed heated air nozzles positioned at regular intervals along and within the upper portion of the oven chamber, and a plurality of upwardly directed heated air nozzles positioned at regular intervals along and within the lower portion of the oven chamber, but staggered apart from the downwardly directed heated air nozzles such that the gas impregnated thermoplastic material web undulates in an up and down wavelike fashion, thereby minimizing sagging, bagging, puckering, and/or buckling of the web.

Abstract: A domestic appliance, which may be a tumble dryer, includes a thermoelectric heat pump; at least one series of Peltier elements operationally associated with the heat pump and driven by a supply voltage for producing heat during appliance operation wherein the resistance of the Peltier elements increases with increasing temperature and wherein a threshold temperature for the Peltier elements is defined; and a heat flow path for dissipating heat produced by the Peltier elements wherein at a maximum temperature of the Peltier elements above a normal operating temperature and below the threshold temperature the power of the heat dissipated through the heat flow path is substantially equal to the electrical power drawn by the Peltier elements from the supply voltage.

Abstract: A drying installation (1) and method for drying of products (3). More in particular, the invention relates to a drying installation (1) and a method for drying sludge or mud, as e.g. the drying of wastewater and industrial sludge possibly contaminated with toxic or corrosive components. The dryer installation (1) comprises infrared emitters (5) which are protected and/or insulated from the evaporation products (7) exiting the drying product (3).

Abstract: An improvement is described for the processing of biological material in a continuous stream by the application of radiant energy taken from the wavelengths from infrared to ultraviolet, and its absorption by a feedstock in a workspace of featuring controlled turbulence created by one or more counter-rotating disk impellers. The absorbed energy and the controlled turbulence patterns create a continuous process of productive change in a feed into the reactor, with separated light and heavy product output streams flowing both inward and outward from the axis in radial counterflow. The basic mechanism of processing can be applied to a wide range of feedstocks, from the promotion of the growth of algae to make biofuel or other forms of aquaculture, to a use in the controlled combustion of organic material to make biochar.

Abstract: An apparatus for detecting an organic compound and an apparatus for manufacturing a display device, the apparatus for detecting an organic compound including an infrared light emitting unit that irradiates infrared rays toward a gas-phase organic compound used as a process gas in an atmospheric pressure equipment; a first window that separates the organic compound from the infrared light emitting unit; an infrared detection unit that measures an infrared absorbance of the organic compound; and a second window that separates the organic compound from the infrared detection unit, wherein infrared absorption regions of the first window and the second window are different from an infrared absorption region of the organic compound.

Abstract: In a device or method to fix print images on a recording material, a printing fluid comprising a carrier fluid and chromophoric solid particles are applied to the recording material, the chromophoric solid particles being applied in a form of the print images to be fixed. Hot waste gas and infrared radiation are generated with aid of a porous burner. The infrared radiation is directed towards the recording material in a drying chamber such that the carrier fluid polymerizes or is vaporized, whereby a gaseous air/oil mixture arises in the drying chamber. The air/oil mixture is influenced with aid of the hot waste gas of the porous burner.

Abstract: Systems and methods provide enhanced radiant drying capabilities for a printing system utilizing temperature control of a thermally conductive drum. One embodiment comprises a radiant dryer and a control system. The radiant dryer includes a thermally conductive drum and a plurality of radiant energy sources disposed along an outside surface of the drum. The energy sources dry a colorant applied to a print medium in contact with the drum. The radiant dryer further includes a cooling system that applies a coolant to the drum to remove heat from the drum. The control system measures the temperature of the drum, determines a difference between the temperature of the drum and a target temperature, and directs the cooling system to vary an application of the coolant to the drum based on the difference to maintain the drum at the target temperature.

Abstract: Infrared air float bar for use in floating and drying a continuous planar web of a material in a dryer. Direct radiated or reflected infrared electromagnetic energy from an infrared light source in a removable channel assembly accelerates drying, or evaporation of solvents, or curing of web material passing in proximity to the bar, either by infrared electromagnetic energy, or in combination with convention airflow. The infrared source is cooled by pressurized air passing through an interior portion of the removable air bar channel assembly, and the air is further conducted into fluid contact with the web in an air gap between the emitter and web to promote convective heat transfer and to contribute to the air pressure field supporting web flotation. The removable channel assembly is configured for replacement of the infrared emitter and to allow the setting of the pressurized cooling air flow to the optimum level.

Abstract: Systems and methods provide targeted cooling for portions of print media during a radiant drying process. One embodiment comprises a radiant dryer and a control system. The radiant dryer includes a radiant energy source within an interior of the radiant dryer that dries a colorant onto a continuous-form medium. The radiant dryer further includes a plurality of independently actuated cooling jets within the interior that apply a cooling gas to the medium. The control system determines regions on the medium where the colorant is at risk of overheating, and directs the cooling jets to apply the cooling gas to the regions.

Abstract: An object of the present invention is a photomask drying device which includes: a sealed chamber containing at least one photomask, a pumping unit to set up and maintain vacuum within said chamber, a support for the photomask placed within said chamber, infrared radiation means placed within said chamber, a system for injecting gas into said chamber characterized in that the infrared radiation means comprise a plurality of infrared radiation sources distributed in a plane parallel to the plane of the photomask in such a way that the distance from the photomask to the infrared radiation means is given by the relationship: D=1.

Abstract: A sheet processing machine, in particular a sheet-fed printing press, includes a varnishing unit and at least one combination drier for applying radiation energy and heated air to a newly varnished sheet. The at least one combination drier includes a plurality of circular or polygonal air nozzles and narrow-band high-power infrared light sources disposed between the air nozzles. The infrared light sources apply radiation at a radiation density of at least 25 kW/m2 in total to the varnished sheet. The temperature of the heated air passing through the nozzles is below 100° C., preferably below 80° C. A method of drying sheets is also provided.

Abstract: Infrared air float bar for use in floating and drying a continuous planar web of a material in a dryer. Direct radiated or reflected infrared electromagnetic energy from an infrared light source in a removable channel assembly accelerates drying, or evaporation of solvents, or curing of web material passing in proximity to the bar, either by infrared electromagnetic energy, or in combination with convention airflow. The infrared source is cooled by pressurized air passing through an interior portion of the removable air bar channel assembly, and the air is further conducted into fluid contact with the web in an air gap between the emitter and web to promote convective heat transfer and to contribute to the air pressure field supporting web flotation. The removable channel assembly is configured for replacement of the infrared emitter and to allow the setting of the pressurized cooling air flow to the optimum level.

Abstract: A method of drying a coating film formed on a surface of a PET film includes radiating an infrared ray having a dominant wavelength of 3.5 ?m or less from an infrared heater onto a PET film on whose surface the coating film containing water or an organic solvent having an absorption spectrum of 3.5 ?m or less has been formed, where the infrared heater has a structure such that an outer circumference of a filament is covered with a protection tube, and a partition wall for forming a flow passageway of a cooling fluid that restrains rise in temperature of a heater surface is provided in a space surrounding this protection tube, and bringing cooling air into contact with the surface of the PET film/coating film has been formed, so as to dry the PET film at a temperature lower than a glass transition point of the PET film.

Abstract: A process for drying wet organic solids to below 10 percent by weight is disclosed wherein an infrared drying system having a housing, a conveyor extending through the housing, at least one infrared heater located within the housing, and a fan for moving an airflow stream through the at least one infrared heater and onto the conveyor. Another step in the process can be providing and feeding wet organic solids onto the conveyor at a metering rate. In one embodiment, the wet organic solids have a moisture content of about 80 percent by weight. Moisture is removed from the wet organic solids by exposing the wet organic solids to at least one infrared heating element within the drying system and an airflow stream that has been heated by the at least one infrared heating element.

Abstract: A curing apparatus for thermally processing thin films on low-temperature substrates at high speeds is disclosed. The curing apparatus includes a strobe head, a strobe control module and a conveyor control module. The strobe control module controls the power, duration and repetition rate of a set of pulses generated by a flash lamp on the strobe head. The conveyor control module along with the strobe control module provide real-time synchronization between the repetition rate of the set of pulses and the speed at which the substrate is being moved under the strobe head, according to the speed information.

Abstract: An apparatus is disclosed for drying grain in a storage bin as well as the method of drying the grain. The apparatus includes an air blower positioned outwardly of the storage bin which has an air inlet end and an air discharge end. The air discharge end of the air blower is in communication with the interior of the storage bin. A heat exchanger is positioned in a spaced relationship with respect to the air blower and has an air passageway with an inlet end and an outlet end. The outlet end of the heat exchanger is spaced from the inlet end of the air blower. An infrared heater is spaced from the inlet end of the heat exchanger so that infrared rays from the infrared heater will be directed into the air passageway of the heat exchanger so that the heat exchanger will heat the air being drawn through the heat exchanger by the air blower with the air blower sucking heated air from the air passageway and blowing the same into the storage bin to dry the grain therein.

Abstract: A drying furnace (20) for drying an object (11) by hot air is provided with a heater (36, 38, 43, 45) that applies radiant heat to a hard-heating region (35, 42) having a larger heat capacity than the other region (37, 44) in the object (11) so as to heat the hard-heating region (35, 42) to a temperature approximate to a temperature of the other region (37, 44).

Abstract: A drying device including: a travelling unit and a drying unit. The travelling unit transports a sheet-like substrate in a travelling direction. The sheet-like substrate includes a thin film body wherein at least one surface of the thin film body is coated with a coating material including an active material. The drying unit dries the thin film body. The drying unit includes a radiative heater and a first nozzle. The radiative heater irradiates an infrared ray to a to-be-dried surface of the thin film body. The first nozzle blows a dry air to the to-be-dried surface in a direction opposite to the travelling direction of the sheet-like substrate.

Abstract: An image forming system, a media drying device usable therewith and a method are disclosed. The image forming system, media drying device and method include application of heat in a form of heated air to liquid ink disposed on media to remove water from the liquid ink in a form of vapor. The image forming system, media drying device and method also include recovery of at least a portion of the heat from the media.

Abstract: An apparatus is disclosed for drying grain in a storage bin as well as the method of drying the grain. The apparatus includes an air blower positioned outwardly of the storage bin which has an air inlet end and an air discharge end. The air discharge end of the air blower is in communication with the interior of the storage bin. A heat exchanger is positioned in a spaced relationship with respect to the air blower and has an air passageway with an inlet end and an outlet end. The outlet end of the heat exchanger is spaced from the inlet end of the air blower. An infrared heater is spaced from the inlet end of the heat exchanger so that infrared rays from the infrared heater will be directed into the air passageway of the heat exchanger so that the heat exchanger will heat the air being drawn through the heat exchanger by the air blower with the air blower sucking heated air from the air passageway and blowing the same into the storage bin to dry the grain therein.

Abstract: A sheet processing machine, in particular a sheet-fed printing press, includes a varnishing unit and at least one combination drier for applying radiation energy and heated air to a newly varnished sheet. The at least one combination drier includes a plurality of circular or polygonal air nozzles and narrow-band high-power infrared light sources disposed between the air nozzles. The infrared light sources apply radiation at a radiation density of at least 25 kW/m2 in total to the varnished sheet. The temperature of the heated air passing through the nozzles is below 100° C., preferably below 80° C. A method of drying sheets is also provided.

Abstract: A drying apparatus includes a casing and a cavity formed in the casing for receiving an object to be dried. A fan is located in the casing so as to be capable of creating an airflow, and a motor is provided in the casing for driving the fan. Ducting is provided for carrying the airflow from the fan to at least one opening arranged to emit the airflow into the cavity (12). The ducting includes at least one air duct having a wall in which perforations are provided, and a layer of sound-absorbing material is located on the external surface of the wall so as to cover the perforations. The invention is particularly suitable for use in hand dryers.

Abstract: The present invention relates to a moist, layered bioadhesive patch comprising one or more polymers. Moreover, the invention relates to a method of producing a monolayered film and a method of drying said film. Additionally, the invention relates to methods of producing bioadhesive, layered patches by combining layers of the monolayered film to obtain a desired thickness of the patch. Patches according to the invention may be used as such, or for delivering pharmaceutically active compounds, such as in a drug delivery system.

Abstract: The method is for drying a material. A drying device is provided that has a heater disposed above a movable carrier and a fan device. The movable carrier carries the material to be dried. The material has a first temperature. A fluid, such as air is blown across the material by the fan device. The material is heated by the heater.

Abstract: An apparatus is disclosed for drying grain in a storage bin as well as the method of drying the grain. The apparatus includes an air blower positioned outwardly of the storage bin which has an air inlet end and an air discharge end. The air discharge end of the air blower is in communication with the interior of the storage bin. A heat exchanger is positioned in a spaced relationship with respect to the air blower and has an air passageway with an inlet end and an outlet end. The outlet end of the heat exchanger is spaced from the inlet end of the air blower. An infrared heater is spaced from the inlet end of the heat exchanger so that infrared rays from the infrared heater will be directed into the air passageway of the heat exchanger so that the heat exchanger will heat the air being drawn through the heat exchanger by the air blower with the air blower sucking heated air from the air passageway and blowing the same into the storage bin to dry the grain therein.

Abstract: An apparatus is disclosed for drying grain in a storage bin as well as the method of drying the grain. The apparatus includes an air blower positioned outwardly of the storage bin which has an air inlet end and an air discharge end. The air discharge end of the air blower is in communication with the interior of the storage bin. A heat exchanger is positioned in a spaced relationship with respect to the air blower and has an air passageway with an inlet end and an outlet end. The outlet end of the heat exchanger is spaced from the inlet end of the air blower. An infrared heater is spaced from the inlet end of the heat exchanger so that infrared rays from the infrared heater will be directed into the air passageway of the heat exchanger so that the heat exchanger will heat the air being drawn through the heat exchanger by the air blower with the air blower sucking heated air from the air passageway and blowing the same into the storage bin to dry the grain therein.

Abstract: A method for hardening a coating of an object, more particularly a car body. A conveyor system moves the object to the proximity of a radiator and moves it away from said radiator with at least one transport cart that can be translationally moved on at least one running surface. A support frame for the object is fixed to the transport cart in order to rotate or pivot the object about a rotational or pivoting axis extending crosswise relative to the translational movement and independently thereof so that all areas of the surface can be exposed to approximately the same amount of radiation.

Abstract: An appliance for providing air and gas to a gas burner includes a gas tube and an air tube. The gas tube comprises an aperture for providing gas inwards to the air tube. The air tube comprises a first aperture for receiving a back tube of the gas burner. The gas tube is provided with a first part of a detachable connection device, for receiving a second part of the detachable connection device provided on the back tube for allowing gas from the gas tube to enter the back tube. The back tube has an orifice for allowing air from the air tube to enter inside the back tube.

Abstract: The invention concerns an installation wherein is performed a crosslinking operation for a coating such as an ink or a varnish through ultraviolet radiation or electronic beam, in the presence of a gas mixture with controlled oxygen residual content. The installation comprises a chamber including one or more UV lamps or a source of accelerated electrons, required for performing the crosslinking operation, and is characterized in that it comprises an input device adjacent the chamber comprising at least the following three components, viewed successively by the product moving to be treated: a labyrinth system, means for injecting an inert gas forming a gas knife and a channel.

Abstract: A washing machine equipped with a radiation drying unit includes a rotary drum for accommodating laundry therein, a water tub for accommodating the rotary drum rotatably, a far infrared radiation generator for generating a radiant ray in a far infrared wavelength range, a radiation transmission portion for transmitting the radiant ray generated by the far infrared radiation generator to the rotary drum, a radiation controller for controlling an amount of the radiant ray transmitted from the far infrared radiation generator to the rotary drum, and a convection fan for circulating air by rotating in forward and reverse direction depending on an internal temperature of the rotary drum.

Abstract: The invention refers to a cover, comprising a fleece arranged between a top and a bottom layer which holds a super absorber. At least in one layer a permeability area which is permeable to moisture is provided through which the cover can be moistened in a controlled way.

Abstract: A radiant convection oven for baking a coating on an article which includes an oven enclosure receiving coating articles, a fan receiving fresh air and directing the fresh air to a burner or burners, a plurality of heat radiators each having an internal chamber receiving heated fresh air from the burner. The radiators are located within the oven opposite a coating article, radiating heat energy to the coated article, and a plurality of nozzles connected to the internal chamber of the radiators directing fresh heated onto the article, transferring convection heat energy to the coated article. In the disclosed embodiment, the radiators include radiating side and bottom walls having a relatively shallow depth, increasing the flow rate through the radiators, reducing the size and cost of the radiators and the fan.

Abstract: A clothes dryer includes a cabinet, a drum rotatably installed within the cabinet and a heating unit that heats the drum. Because the heating unit heats the drum itself, heat generated from the heating unit is transferred to the outer surface of the drum, passes through the interior of the drum according to thermal conduction and then heats the clothes, target items to be dried, so that temperature of the entire clothes are uniformly increased to accelerate evaporation of moisture of the target items to be dried.

Abstract: In a hand drying apparatus, an infrared light absorber absorbs infrared light, when a hand is not present, emitted from an infrared light emitter provided on an inner surface of a drying space.

Abstract: A personal drying apparatus comprises a casing, an air heater in the casing, two fans, one to each side of the casing, for blowing two parallel streams of air heated by the air heater onto the person to be dried from two heated air outlets located in the front of the casing, an air intake located in the casing between the heated air outlets and an infra-red source for directing the infra-red rays onto the person being dried to supplement the drying achieved by the heated air flow.

Abstract: The present invention provides an electromagnetic energy spot curing method and system which integrates the UV radiation with an inert gas to disperse the gas and the radiation energy simultaneously to cure an adhesive surface on a target or work piece. The system provides a means to cure the adhesive surface during photoinitiation to expel the atmospheric oxygen which otherwise would interfere with the curing cycle.

Abstract: This invention resides in an apparatus and related method for rapidly curing thin film sol-gel coatings, particularly such coatings adhered to low melting temperature plastic substrates, whether rigid or flexible, without deforming the substrate. The curing is achieved using IR heating lamps and dry or humid hot gas flow. This curing densities the sol-gel coating and provides desired optical and mechanical properties. The use of IR lamps and hot-gas nozzles, either singularly or in combination, produces a rapid cure by effectively heating the thin film coating layer. In this manner, a sufficiently high temperature can be attained in the film layer, to densify the sol-gel coating, but for a sufficiently short time duration to avoid melting or otherwise deforming the substrate. The sol-gel coatings can be cured two to three orders of magnitude faster than with conventional oven curing, leading to significant cost reductions and manufacturing efficiency.

Abstract: An apparatus of drying semiconductor substrate using azeotrope effect and a drying method using the apparatus are provided. The apparatus includes a bath for storing a fluid, a chamber located above the bath and an apparatus for supplying an organic solvent onto the surface of the fluid in the bath for forming an azeotrope layer at the surface of the fluid and for forming an organic solvent layer over the azeotrope layer. The organic solvent layer and the atmosphere thereon are heated by a heater. The apparatus may further include a drying gas conduit for introducing a drying gas into the chamber.

Abstract: A drier for commercial printers comprises an air receiving and directing member having end walls, side walls, and a bottom wall and characterized by air receiving slots formed in the side walls and air discharging slots formed at the intersections between the side walls and the bottom wall. A lamp support frame having an imperforate top wall is positioned within the air receiving and directing member. A fan support plate positions a fan above the top plate of the lamp frame for directing air onto the top plate thereof then downwardly along the side walls of the air receiving and directing member and out through the air discharging slots thereof.

Abstract: Known gas-heated infrared radiators for infrared drying units have a radiator housing (1) that is subdivided by a gas-permeable burner plate (5) in a distribution chamber (6) for the gas-air mixture and a combustion chamber (7), the front side of which emits the radiation. The radiator is held by mixing tube (9) that is affixed to the rear side. A gas-air mixture is supplied to the distribution chamber (6) via said mixing tube (9). The mixing tube (9) has a gas nozzle (11) with a gas inlet (12) and an air inlet (17) on the end opposite the radiator housing (1). The mixing tube is affixed to a holding frame of the drying unit. In order to disassemble the infrared radiator from the infrared drying unit and to mount said radiator on said unit as rapidly as possible, the rear side of the radiator housing (1) is connected to the holding frame by releasable fixing means (20, 33-36) that can be released manually from the front side.

Abstract: A drier unit (10) for drying printed products has a plurality of drier rails (12), which comprise in each case a supporting body (14) manufactured from a hollow section (16). The clear outer contour of the cross-sectional area of the supporting bodies (14) is a rectangle. The drier rails (12) have in each case two resistance heating units (60) and additionally carry an infrared radiator (164).

Abstract: A drier for commercial printers comprises an air receiving and discharging member having end walls, side walls, and a bottom wall and characterized by air receiving slots formed in the side walls and air discharging slots formed at the intersections between the side walls and the bottom wall. A lamp support frame having an imperforate top wall is positioned within the air receiving and discharging member. A fan support plate positions a fan above the top plate of the lamp frame for directing air onto the top plate thereof then downwardly along the side walls of the air receiving and discharging member and out through the air discharging slots thereof.

Abstract: A method and apparatus for heat-treating a semiconductor substrate to heat different areas of the substrate at different temperatures. The method includes using an apparatus having a chamber of a refractory material; a support plate located at a lower side in the chamber for supporting the semiconductor substrate; a heating device disposed at an upper side in the chamber; and, a heat resistance mask provided between the support plate and fabricated to have different heat transmission rates therein.