Congealing Or Thickening Patents (Class 34/302)
  • Patent number: 6960372
    Abstract: The present invention uniformly dries, in a clean room in which down flow is constituted, a coated film formed on a surface of a substrate held in a state that the coated surface faces down. In a coating apparatus including an absorption board holding a substrate in a state that its surface to be coated looks down, and a coating mechanism that coats with coating liquid the surface to be coated of the substrate held by this absorption board, there is provided an air current generating apparatus which supplies clean gas toward the surface to be coated.
    Type: Grant
    Filed: October 1, 2002
    Date of Patent: November 1, 2005
    Assignee: Hoya Corporation
    Inventor: Shuho Motomura