Continuous Processing Patents (Class 34/313)
  • Patent number: 11955365
    Abstract: A substrate processing apparatus includes a holder for holding a substrate horizontally, a rotator for rotating the holder, a liquid supplier for supplying liquid to the substrate, and a controller for controlling the holder, the rotator, and the liquid supplier. The holder includes a turntable configured to be rotated by the rotator, at least one first clamper configured to be rotated together with the turntable and moved between a clamping position and a releasing position, and at least one second clamper configured to be rotated with the turntable and moved between the clamping and releasing positions independently of the at least one first clamper. The controller controls the at least one first clamper and the at least one second clamper to alternately clamp the peripheral edge of the substrate while the holder is being rotated by the rotator and the liquid is being supplied to the substrate.
    Type: Grant
    Filed: July 23, 2021
    Date of Patent: April 9, 2024
    Assignee: Tokyo Electron Limited
    Inventors: Yoshinori Ikeda, Toru Hirata
  • Patent number: 11776839
    Abstract: A substrate holding device is provided. The substrate holding device includes a substrate holder, a shaft attached to the substrate holder, a motor attached to the shaft, lifting pins, and a transmission assembly. The lifting pins are movable between a retracted position below a surface of the substrate holder, and a protruded position protruding from the surface. The transmission assembly is provided between the shaft and lifting pins and switches the substrate holding device between a transmittable state in which a driving force from the motor is transmitted to the lifting pins to move the lifting pins between the retracted position and the protruded position, and a non-transmittable state in which the driving force from the motor is not transmitted to the lifting pins but rotates the substrate holder.
    Type: Grant
    Filed: August 23, 2019
    Date of Patent: October 3, 2023
    Assignee: NISSIN ION EQUIPMENT CO., LTD.
    Inventors: Ippei Nishimura, Masatoshi Onoda
  • Patent number: 11396026
    Abstract: The invention relates to a centrifugal separator comprising a casing which delimits and seals off a space in which a rotor is arranged. The rotor forms a separation space which is sealed or isolated from the space, and in which separation space centrifugal separation of a higher density and a lower density component from a fluid takes place. An inlet extends into the rotor for introducing fluid to the separation space, and a first outlet extends from the rotor for discharge of a component separated from the fluid. The space is connected to a pump device which is arranged to remove gas, thereby maintaining negative pressure in said space. The rotor comprises at least one second outlet extending from the separation space to the space for discharge of at least one higher density component separated from the fluid. The invention also relates to a method in such a centrifugal separator.
    Type: Grant
    Filed: September 26, 2019
    Date of Patent: July 26, 2022
    Assignee: Alfa Laval Corporate AB
    Inventors: Peter Thorwid, Roland Isaksson, Peter Hagqvist, Carl Häggmark, Lars Hillström
  • Patent number: 6658761
    Abstract: In a method for centrifugally dehydrating a pallet or the like, the pallet or the like is held on a diagonal line thereof, and is rotated in a state where the diagonal line is substantially aligned with an axis of rotation, thereby removing a liquid adhered thereto.
    Type: Grant
    Filed: July 26, 2002
    Date of Patent: December 9, 2003
    Assignee: Shibuya Machinery Co., Ltd.
    Inventors: Kazuo Kishimoto, Hiroyuki Nakano
  • Patent number: 6408536
    Abstract: The present invention relates to a process for drying protein crystals starting from an aqueous protein crystal suspension, which comprises drying the protein crystal suspension in a centrifugal dryer, where the protein crystals, after they have been filtered off from the protein crystal suspension, are brought into contact with a drying medium which consists of a mixture of water and a nonaqueous solvent which is miscible with water in any ratio and which has a lower vapor pressure than water. In the process, a drying gas which has been moistened with water is advantageously used. The protein crystal suspension is advantageously converted into a fluidized bed for the purpose of drying.
    Type: Grant
    Filed: January 13, 2000
    Date of Patent: June 25, 2002
    Assignee: Aventis Pharma Deutschland GmbH
    Inventors: Rolf Deusser, Peter Kraemer, Horst Thurow
  • Publication number: 20020000049
    Abstract: A method and apparatus for controlling the drying cycle of a dryer by utilizing fuzzy logic control. Control is accomplished by first monitoring the moisture level of a clothes load in the dryer. From the monitored moisture information, variables such as the elapsed time from the start of the drying cycle to a point when no significant moisture is detected for a specified time period and the number of times higher moisture registrations occur during another specified time period are determined. Based on the determined variables, fuzzy logic is used to determine characteristics particular to the clothes load being dried, such as size of the load. Using the determined characteristics in conjunction with user settings more accurate control of the time of drying heat application, reduced drying heat application and cool down time can be accomplished.
    Type: Application
    Filed: June 21, 2001
    Publication date: January 3, 2002
    Inventors: Christopher J. Woerdehoff, Patrick J. Glotzbach, Andrew C. Reck, Joseph M. Szynal, Beth A. Maddix
  • Patent number: 6298575
    Abstract: A centrifugal dryer (10) has a plurality of conveyors (12) that are arranged inside a pair of trunnion rings (36) such that the conveyors (12) are shingled to form a polygon shaped cylinder (14) that rotates about the central axis (A—A) of the trunnion rings to create centrifugal forces on produce, or other material conveyed on the conveyors. Each conveyor (12) has an elongated endless porous belt (18) driven in one direction by a one-way bearing to convey material from the inlet end to the outlet end of the conveyor. A crank arm (56) extends from each one-way bearing and rides in a gimbal ring (50) which causes reciprocating motion of the crank arm (56) to intermittenly advance the conveyors (12) as they rotate. The gimbal ring (50) can be positionally adjusted to vary the amount each conveyor (12) advances per revolution, or it can be set in a neutral position where no movement is imparted to the crank arms (56), thereby allowing the dryer to process in a batch mode.
    Type: Grant
    Filed: November 17, 2000
    Date of Patent: October 9, 2001
    Inventors: James Edward Aikins, Warren Ahlson Aikins
  • Patent number: 6170170
    Abstract: A leafed vegetable dryer includes an entrance for products, an exit for the products and one or more transporters for transporting the products between the entrance and the exit. The transporters have the form of a centrifuge. A transport driver is utilized to drive the transporters and a centrifuge driver is utilized to drive the centrifuge.
    Type: Grant
    Filed: March 23, 1999
    Date of Patent: January 9, 2001
    Assignee: Felcon Engineering B.V.
    Inventor: Jan Van Felius