Abstract: A method and apparatus for drying a room within a building by sealing the room from outside ambient air ingress, heating the room internally, sensing humidity levels within the room, exhausting the air from within the room and drawing in outside ambient air, sensing water content within the room, and repeating the sequence until a dry status indication is received that the water content within the room has been reduced a predetermined level.

Abstract: A substrate processing apparatus which holds and rotates a substrate substantially horizontally; having a control unit which controls a rinsing liquid supply mechanism for supplying a rinsing liquid onto the substrate; a gas knife mechanism that sprays gas onto the substrate to form a gas spraying zone and scans the entire substrate without rotating the substrate; a rinsing liquid mechanism for supplying a rinsing liquid onto the substrate at its area downstream from the gas spraying zone; and a drying unit for drying the substrate by rotating the substrate.

Abstract: A substrate processing method comprising: holding a substrate substantially horizontally by a rotatable substrate holding mechanism; supplying a rinsing liquid onto the top of the substrate held by the substrate holding mechanism at the substrate holding step; after the rinsing liquid supply step, spraying a gas onto the top of the substrate held by the substrate holding mechanism, by a gas knife mechanism, to form a gas spraying zone on the substrate top, and unidirectionally scanning the substrate top in its entirety by this gas spraying zone, without rotating the substrate; replenishing the rinsing liquid by supplying, in parallel to the gas knife spraying step, a rinsing liquid onto the substrate top at its area downstream in the gas-spraying-zone scanning direction rather than the gas spraying zone formed by the gas knife mechanism; and drying the substrate surface after the gas knife spraying step and the rinsing liquid replenishing step.

Abstract: Disclosed is a method for drying a plate-like article; the method including rinsing with an aqueous rinsing liquid with subsequent rinsing with an organic solvent, wherein the organic solvent has a water content of below 20 mass-% wherein the organic solvent is supplied at a solvent temperature, which is at least 30° C. and not higher than 60° C.

Abstract: A method of decontamination includes generating a decontamination gas by evaporating an aqueous solution in which the decontamination gas with a higher boiling point than water is dissolved. The decontamination gas is charged into a hermetically sealed decontamination chamber, and then condensed therein. A condensed liquid layer is formed in a form of a thin film on an outer surface of a decontamination subject in the hermetically sealed decontamination chamber. The condensed liquid layer is evaporated at least partially by supplying unsaturated gas into the hermetically sealed decontamination chamber. The unsaturated gas does not saturate in the hermetically sealed decontamination chamber. The decontamination gas is re-condensed after the evaporating step to re-form the condensed liquid layer, by closing supply of the unsaturated gas and re-charging the decontamination gas into the hermetically sealed decontamination chamber.

Abstract: A combined fluidized bed dryer and absorption bed allows an absorbant to be dried to remove any moisture therefrom immediately followed by treating a product material with the dried absorbant, all in the same vessel, such that the absorbant is at its optimum dryness prior to treating the product material therewith The invention has particular application in the ophthalmic lens production where the absorbant is alumina and is used to remove methacrylic acid from liquid monomer prior to using the monomer in producing lenses.

Abstract: A highly moisture-sensitive element and method of making such element includes an encapsulation enclosure encapsulating all of the highly moisture-sensitive electronic devices on a substrate and a sealing material positioned between the substrate and the encapsulation enclosure to form a complete seal between the substrate and the encapsulation enclosure around each highly moisture-sensitive electronic device or around groups of highly moisture-sensitive electronic devices, wherein the substrate or encapsulation enclosure, or both, contain vent holes and vent hole seal material or wherein the seal material contains gaps prior to spacing the substrate and the encapsulation enclosure within a predetermined range and the gaps are filled in by spreading the sealing material.

Abstract: An apparatus and method for drying single or multiple parts or objects wherein the apparatus uses a drying chamber for containing said object or objects, said drying chamber having a closeable entryway for providing access to said drying chamber, the use of a sonic head disposed in said drying chamber attached to a source of drying liquid and an adjustable supply and drain attached to said drying chamber for introducing and removing said drying fluid to and from said drying chamber.