Of Gas Or Vapor Pressure In Treating Enclosure Patents (Class 34/558)
  • Publication number: 20150024117
    Abstract: A vacuum drying apparatus and a method of manufacturing a display apparatus by using the same. A vacuum drying apparatus according to embodiments of the present invention includes a chamber having a space formed therein, a support unit that is installed in the chamber and on which a substrate coated with a treatment solution is stably placed, a gas injection unit that is connected to the chamber to inject a treatment gas into the chamber, a decompression unit that is connected to the chamber to decompress the chamber, and a gas sensing unit that is installed with at least one of the chamber and the decompression unit to detect gas generated during drying of the treatment solution.
    Type: Application
    Filed: November 11, 2013
    Publication date: January 22, 2015
    Applicant: Samsung Display Co., Ltd.
    Inventor: Yong-Il Kim
  • Patent number: 8826564
    Abstract: An apparatus and method for quickly drying porous materials. A sealable chamber is connected to a cold trap which is connected to a vacuum pump. A sample is placed inside the sealable chamber. The vacuum pump is turned on and air is evacuated through the cold trap to the vacuum pump. An infrared lamp may be used to heat the chamber and sample therein directly or heated air may be allowed to enter the sealable chamber. Air may be drawn directly from the sealable chamber to the vacuum pump bypassing the cold trap. Various parameters may be used to determine if the drying process is complete, including the degree of vacuum achieved in the chamber.
    Type: Grant
    Filed: June 26, 2012
    Date of Patent: September 9, 2014
    Assignee: InstroTek, Inc.
    Inventors: Tianqing He, Ali Regimand, Lawrence H. James, Peter D. Muse
  • Patent number: 8786454
    Abstract: A device for identifying the air flow condition within a clothes dryer having a lint filter, an exhaust passage, and a blower is disclosed. The device includes a sensor, an input having a first end connected to the sensor and a free second end, wherein the free second end is adapted to be disposed within the clothes dryer, upstream from a filter, and wherein the sensor detects a differential between an operating pressure at the free second end of input versus a reference pressure to thereby determine whether a sufficient vacuum is present within the clothes dryer, and an output that provides an output characteristic based on the differential, wherein the output characteristic changes from a first characteristic to a second characteristic when the differential surpasses a differential threshold.
    Type: Grant
    Filed: August 19, 2009
    Date of Patent: July 22, 2014
    Assignee: World Magnetics Company
    Inventor: John Siddall
  • Publication number: 20140130368
    Abstract: An apparatus for drying wood veneer includes an elongate drying chamber including a conveyor for conveying material to be dried from an input end to an output end; and a cooling section for cooling veneer leaving the output end of the drying chamber, the cooling section including a pressure controller for maintaining a pressure in the cooling section that is slightly higher than pressure in the drying chamber while maintaining a near-zero pressure differential between the drying chamber and the cooling section.
    Type: Application
    Filed: January 23, 2014
    Publication date: May 15, 2014
    Applicant: U.S. Natural Resources, Inc,
    Inventors: Irven McMahon, Bryan J. Wolowiecki
  • Patent number: 8465845
    Abstract: An apparatus for preserving wood product comprising, in one embodiment, a treatment space sealable in medium-tight manner; a vacuum pump connected to the treatment space; a steam source connected to the treatment space; a heating device which is in thermal contact with the treatment space; a dispenser for adding predetermined amounts of either a base or an acid to the treatment space; pH measuring device for determining the pH value of steam in the treatment space; and measuring and control equipment adapted to monitor at least the pH temperature and pressure inside the treatment space and to control the vacuum pump, the steam source and the heat source, and the pH by dispensing either a base or an acid. Also disclosed is a method for preserving wood. The preservation process has a relatively short process time, wherein a good preservation is realized while the mechanical strength of the wood is largely retained. The amount of waste wood material is greatly reduced.
    Type: Grant
    Filed: December 20, 2007
    Date of Patent: June 18, 2013
    Assignee: Firmowood Nederland B.V.
    Inventor: Wilhelmus Petrus Martinus Willems
  • Patent number: 8434241
    Abstract: A method for drying a wet material, which comprises a liquid Fd to be distilled, uses a gas-tight container system resistant to excess and/or negative pressure and a drying container, a condenser and a vapor chamber connecting the drying container and condenser. The temperature adjustable drying container contains the wet material. The liquid Fd is turned to vapor in the temperature adjustable vapor chamber. The condenser condenses the vapor to give the condensation product. The pressure in the vapor chamber is monitored and controlled so that drying and distillation are always carried out in a range close to the saturation vapor pressure of the liquid Fd to be distilled. The pressure and the temperature in the vapor chamber are continuously determined. If the pressure goes above the upper limit of the range, the pressure is reduced in such a manner that especially foreign gas is removed.
    Type: Grant
    Filed: April 1, 2008
    Date of Patent: May 7, 2013
    Assignee: Markus Lehmann
    Inventors: Markus Lehmann, Markus Braendli
  • Patent number: 8429833
    Abstract: A restriction sensor system for identifying the existence of blockages in exhaust conduits of clothes dryers. The restriction sensor system may be used as a retrofit system that is capable of being installed on existing clothes dryers. The restriction sensor system may include a fitting configured to be coupled to an exhaust conduit of a clothes dryer and a blockage indicator housing positioned remote from a clothes dryer. The pressure sensing device may be capable of determining changes in air pressure in the exhaust conduit. Once the air pressure present in the exhaust conduit exceeds a threshold air pressure, the pressure sensing device may send a signal to an indicator to generate an alarm, which may be a visual alarm or audible alarm, or both.
    Type: Grant
    Filed: November 15, 2011
    Date of Patent: April 30, 2013
    Inventor: Richard J. Harpenau
  • Publication number: 20120216420
    Abstract: An apparatus for drying wood veneer includes an elongate drying chamber including a conveyor for conveying material to be dried from an input end to an output end; and a cooling section for cooling veneer leaving the output end of the drying chamber, the cooling section including a pressure controller for maintaining a pressure in the cooling section that is slightly higher than pressure in the drying chamber while maintaining a near-zero pressure differential between the drying chamber and the cooling section.
    Type: Application
    Filed: May 11, 2012
    Publication date: August 30, 2012
    Applicant: USNR/Kockums Cancar Company
    Inventors: Irven J. McMahon, Bryan J. Wolowiecki
  • Patent number: 8240065
    Abstract: A freeze-dryer and method of controlling the same is provided. The disclosed freeze-dryer includes a chamber adapted to hold material or product to be freeze-dried; one or more depressurization orifices; a gas pressurization circuit having a source of gas to pressurize the chamber to a prescribed pressure; a depressurization circuit coupled to the chamber via the one or more orifices and having a depressurizing control valve; and a control unit adapted to pressurize the chamber with the source of gas and actuate the depressurizing control valve to depressurize the chamber upon command. The ratio of total depressurization orifice area to the chamber volume is preferably between about 6×10?2 and about 4×10?4 m2/m3.
    Type: Grant
    Filed: March 31, 2009
    Date of Patent: August 14, 2012
    Assignee: Praxair Technology, Inc.
    Inventors: Bryce Mark Rampersad, Robert Rex Sever, Balazs Hunek, Theodore Hall Gasteyer, III
  • Patent number: 8176655
    Abstract: A vapor atmosphere spray dryer can include a closed-loop circuit having a dryer, a bag house filter system, a fan, and a heater system which are fluidly connected together for circulating a mass of superheated vapor therethrough. A centrifugal atomizer is disposed within the dryer. A feed system delivers a supply of feed slurry to the centrifugal atomizer which discharges a supply of atomized feed slurry in the dryer for combination with the circulated mass of superheated vapor within the dryer. The closed loop circuit is constructed such that the circulated mass of superheated vapor has an operating pressure of at least 1 psi which is generated by the evaporation of the fluid in the atomized feed slurry in the dryer resulting from the combination of the supply of atomized feed slurry and the circulated mass of superheated vapor.
    Type: Grant
    Filed: December 16, 2008
    Date of Patent: May 15, 2012
    Assignee: SPX Flow Technology Danmark A/S
    Inventor: Stewart Gibson
  • Patent number: 8061058
    Abstract: A restriction sensor system for identifying the existence of blockages in exhaust conduits of clothes dryers. The restriction sensor system may be used as a retrofit system that is capable of being installed on existing clothes dryers. The restriction sensor system may include a fitting configured to be coupled to an exhaust conduit of a clothes dryer and a blockage indicator housing positioned remote from a clothes dryer. The pressure sensing device may be capable of determining changes in air pressure in the exhaust conduit. Once the air pressure present in the exhaust conduit exceeds a threshold air pressure, the pressure sensing device may send a signal to an indicator to generate an alarm, which may be a visual alarm or audible alarm, or both.
    Type: Grant
    Filed: April 8, 2008
    Date of Patent: November 22, 2011
    Inventor: Richard J. Harpenau
  • Patent number: 7571554
    Abstract: According to one embodiment, a ventilation system includes a heat-recovery device for pre-heating make-up air with exhaust air from multiple drying chambers (e.g., dry kilns for drying lumber). The ventilation system includes ductwork connecting the drying chambers to the heat-recovery device in a parallel arrangement. Supply ductwork for supplying pre-heated make-up air from the heat-recovery device to the drying chambers includes a main supply duct, or conduit, in fluid communication with the heat-recovery device and plural branch supply conduits, each of which establishes fluid communication with the main supply conduit and a respective drying chamber. Return ductwork for delivering exhaust air from the drying chambers to the heat-recovery device includes a main exhaust duct, or conduit, in fluid communication with the heat-recovery device and plural branch exhaust conduits, each of which establishes fluid communication with the main exhaust conduit and a respective drying chamber.
    Type: Grant
    Filed: December 6, 2005
    Date of Patent: August 11, 2009
    Inventor: Michael M. Sprague
  • Patent number: 7404264
    Abstract: The invention relates to covers for seats used in transport vehicles, especially motor vehicles. The covers of the seats are automatically finished as the manufactured seats are transported by a conveyor through at least one treating chamber of a tunnel finisher. All of the seats are treated in the treating chamber at least with steam which smoothes the covers thereof. The inventive finishing treatment results in an even smoothness of said covers, even in areas which are difficult to reach manually.
    Type: Grant
    Filed: June 13, 2002
    Date of Patent: July 29, 2008
    Assignee: Johnson Controls GmbH
    Inventors: Engelbert Heinz, Wilfried Dreischmeier, Henry Wurm
  • Patent number: 6883247
    Abstract: A submersible gas compressor is described which has a ceramic high pressure piston in contact with a ceramic sleeve, a drive piston mounted to the ceramic high pressure piston and a crank in mechanical connection with the drive piston. The submersible gas compressor can be used as a second stage compressor in a gas delivery system that includes a first stage low pressure compressor, an absorption bed containing molecular sieve material, a second stage compressor to pressurize a gas stream to a pressure between 5000 and 10,000 psig, a cascade system for storing the pressurized gas stream between 3500 and 5000 psig, a control system, and an outlet for delivering the pressurized gas stream.
    Type: Grant
    Filed: October 23, 2003
    Date of Patent: April 26, 2005
    Inventor: John F. Barrett
  • Publication number: 20040194336
    Abstract: Apparatus and processes are presented to contact a dry, preferably high purity inert gas with a chemical composition in a pressure vessel, or a wetting composition, to form a wet inert gas, which is then used to pressurize the chemical composition out of the pressure vessel. No additional space is needed for an external humidifier. Since a very small amount of vapor is needed to form a wet inert gas, the composition of chemical composition will not be significantly affected.
    Type: Application
    Filed: April 23, 2004
    Publication date: October 7, 2004
    Inventors: Mindi Xu, Hwa-chi Wang, Herve E. Dulphy
  • Patent number: 6785981
    Abstract: A restriction sensor system for identifying the existence of blockages in exhaust conduits of clothes dryers. The restriction sensor system may include a pressure sensing device having a body configured to be coupled to an exhaust conduit of a clothes dryer. The pressure sensing device may be capable of determining changes in air pressure in the exhaust conduit. Once the air pressure present in the exhaust conduit exceeds a threshold air pressure, the pressure sensing device may send a signal to an indicator to generate an alarm, which may be a visual alarm or audible alarm, or both.
    Type: Grant
    Filed: February 19, 2003
    Date of Patent: September 7, 2004
    Assignee: In-O-Vate Technologies
    Inventor: Richard John Harpenau
  • Patent number: 6745495
    Abstract: A dryer tumble drying articles includes a drum including a cavity configured to hold articles to be dried, a first motor drivingly coupled to the drum to rotate the drum, a heat source in flow communication with the cavity, and a variable speed motor drivingly coupled to a blower positioned to deliver heated air from the heat source to the cavity.
    Type: Grant
    Filed: June 27, 2003
    Date of Patent: June 8, 2004
    Assignee: General Electric Company
    Inventors: Douglas Allen Riddle, Jeremy Michael Green, James Alan Meyer, Emile Edward Abi-Habib, Zubair Hameed
  • Patent number: 6729041
    Abstract: This substrate processing apparatus supplies wafers W accommodated in a closed processing container 10 with ozone gas and steam for processing the wafers W. The apparatus includes an ozone-gas generator 40 for supplying the ozone gas into the processing container 10, a steam generator 30 for supplying the steam into the processing container 10 and a steam nozzle 35 arranged in the processing container 10 and connected to the steam generator 30. The steam nozzle 35 is equipped with a nozzle body 35a having a plurality of steam ejecting orifices 35f formed at appropriate intervals and a heater 35h for preventing dewdrops of the steam from being produced in the nozzle body 35a. Consequently, it is possible to prevent the formation of dewdrops of solvent steam, which may produce origins of particles in the closed processing container, unevenness in cleaning (etching), etc., and also possible to improve the processing efficiency.
    Type: Grant
    Filed: December 28, 2001
    Date of Patent: May 4, 2004
    Assignee: Tokyo Electron Limited
    Inventors: Naoki Shindo, Tadashi Iino
  • Patent number: 6688020
    Abstract: A substrate processing apparatus and method which can prevent accidents in advance so as to ensure safety against interruption of operations of the apparatus and leakage of processing substances. In a substrate processing method in which wafers W are processed are processed by feeding an ozone gas 5 to the wafers W loaded in a processing vessel 2 while an interior atmosphere in the processing vessel is being exhausted to be passed through an ozone killer 10, the ozone gas 5 is fed under the conditions that the processing vessel 2 is tightly closed, and the ozone killer in its normal state. When the processing is interrupted, an interior atmosphere in the processing vessel 2 is forcedly exhausted. When the gas leaks, the interior atmosphere and a peripheral atmosphere of the processing vessel 2 are forcedly exhausted while the feed of the ozone gas 5 is paused.
    Type: Grant
    Filed: April 20, 2001
    Date of Patent: February 10, 2004
    Assignee: Tokyo Electron Limited
    Inventors: Takayuki Toshima, Tadashi Iino
  • Patent number: 6678968
    Abstract: A critical point drying apparatus for sample preparation in electron microscopy and semiconductor wafer production includes a computer system to automate the operational modes in drying the specimen. These operational modes controlled by the computer system are: cooling, in which a drying chamber is cooled; starting, in which the specimen chamber is filled with a transitional fluid; purging, in which the transitional fluid purges an intermediary fluid from the drying chamber and the purged intermediary fluid is collected by a collector condenser; heating, in which the drying chamber is heated to elevate the transitional fluid to its critical point temperature and pressure; and bleeding, in which the drying chamber is depressurized to atmospheric pressure at a very slow rate until the drying chamber is completely vented, which signals the end of the drying operation. The computer system interfaces with a remote client terminal to update the status of the operation of the critical point drying apparatus.
    Type: Grant
    Filed: November 19, 2001
    Date of Patent: January 20, 2004
    Assignee: Tousimis Research Corporation
    Inventors: Anastasios J. Tousimis, Chris Tousimis
  • Patent number: 6640463
    Abstract: A vehicle air supply system having a compressor, an air dryer, a reservoir adapted to receive air from the compressor via the air dryer, and control means operable to cause a standard regeneration of the air dryer when a predetermined system condition is met, the control means being further operable to cause an intermediate regeneration of the air dryer in advance of said predetermined system condition being met.
    Type: Grant
    Filed: July 1, 2002
    Date of Patent: November 4, 2003
    Assignee: Wabco Automotive UK Limited
    Inventors: Andrew Howard Beck, David Townsend
  • Patent number: 6598316
    Abstract: A line for processing semiconductor wafers into integrated circuits (ICs) is provided with an input-output (I-O) chamber to help purge residual contamination from the wafers before they are transferred into a processing line. After a cassette containing semiconductor wafers is placed in the chamber, it is sealed from the line and from the atmosphere. Then a dry inert gas such as nitrogen is dispersed into the top of the chamber to form a covering blanket around the wafers to displace and sweep away contaminants such as air-borne particles, moisture and organic vapors. While the purge gas is flowing, gasses and residual contamination are exhausted from the bottom of the chamber at a relatively slow rate until an intermediate pressure level is reached at which pressure droplets of liquid from residual moisture and vapor can no longer condense. Then the flow of purge gas is stopped and the pressure within the chamber is relatively quickly reduced to a base operating value (e.g.
    Type: Grant
    Filed: May 2, 2002
    Date of Patent: July 29, 2003
    Assignee: Applied Materials, Inc.
    Inventor: Alan Hiroshi Ouye
  • Patent number: 6493964
    Abstract: A critical point drying apparatus for sample preparation in electron microscopy and semiconductor wafer production includes a computer system to automate the operational modes in drying the specimen. These operational modes controlled by the computer system are: cooling, in which a drying chamber is cooled; starting, in which the specimen chamber is filled with a transitional fluid; purging, in which the transitional fluid purges an intermediary fluid from the drying chamber and the purged intermediary fluid is collected by a collector condenser; heating, in which the drying chamber is heated to elevate the transitional fluid to its critical point temperature and pressure; and bleeding, in which the drying chamber is depressurized to atmospheric pressure at a very slow rate until the drying chamber is completely vented, which signals the end of the drying operation. The drying chamber incorporates concave surfaces for pressure dispersal and to facilitate purging the intermediary fluid completely.
    Type: Grant
    Filed: September 8, 2000
    Date of Patent: December 17, 2002
    Assignee: Tousimis Research Corp.
    Inventors: Anastasios J. Tousimis, Chris Tousimis
  • Patent number: 6487788
    Abstract: A continuous process for the drying and gel formation of solvent-containing gel-forming polymers, in particular polysaccharide derivatives, by flash cooling of suspensions of the polymers, and an apparatus for the drying of solvent-containing products are described. The process comprises the steps: metering the solvent-containing polymer having a solids content of 1 to 65% by weight and at a pressure of in particular ambient pressure to 6000 hPa, at a polymer temperature of 20 to 100° C. into an evaporation zone (1), the evaporation zone (1) having a pressure of 0.1 hPa to 800 hPa, cooling the polymer, in particular to a temperature of <93° C.
    Type: Grant
    Filed: February 28, 2002
    Date of Patent: December 3, 2002
    Assignee: Bayer Aktiengesellschaft
    Inventors: Dietrich Gehrmann, Hartwig Kempkes
  • Publication number: 20020112361
    Abstract: A continuous process for the drying and gel formation of solvent-containing gel-forming polymers, in particular polysaccharide derivatives, by flash cooling of suspensions of the polymers, and an apparatus for the drying of solvent-containing products are described. The process comprises the steps: metering the solvent-containing polymer having a solids content of 1 to 65% by weight and at a pressure of in particular ambient pressure to 6000 hPa, at a polymer temperature of 20 to 100° C. into an evaporation zone (1), the evaporation zone (1) having a pressure of 0.1 hPa to 800 hPa, cooling the polymer, in particular to a temperature of <93° C.
    Type: Application
    Filed: February 28, 2002
    Publication date: August 22, 2002
    Inventors: Dietrich Gehrmann, Hartwig Kempkes
  • Patent number: 6415528
    Abstract: A drying device for drying bulk material has one or more storage containers for the bulk material and a heating device for heating the drying air for drying the bulk material. A drying air conduit is connected to the heating device and the storage containers and guides the drying air to the storage containers. One or more first mixing valves are arranged in the drying air conduit upstream of the storage containers, wherein the first mixing valves are used to adjust the temperature of the drying air before the drying air enters the storage containers. The heating device has also the function of regenerating the drying units provided for removing the moisture from the drying air.
    Type: Grant
    Filed: June 14, 2001
    Date of Patent: July 9, 2002
    Assignee: Motan Holding GmbH
    Inventors: Klaus Höller, Holger Kühnau, Frank Fischer, Carl Litherland
  • Patent number: 6401361
    Abstract: An apparatus for drying semiconductor wafers in a solvent drying chamber and a method for drying are disclosed. The apparatus is equipped with an alarm/interlocking system such that when a flow of the solvent vapor into the drying chamber is stopped, the alarm is triggered and the interlocking system is activated to stop the further loading of wafers into the drying chamber and thus preventing the outputting of undried wafers from the chamber. The apparatus is used to prevent any malfunction in the flow control valves or in any other flow control system that stops the flow of solvent vapor into the drying chamber.
    Type: Grant
    Filed: November 15, 2000
    Date of Patent: June 11, 2002
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd
    Inventors: Cho-Ching Chen, Shin-Shing Yang, Jenn-Wei Ju, Liang-Yi Chou, Chih-Hong Cheng
  • Patent number: 6401359
    Abstract: A semiconductor wafer (W) is mounted on top of a mounting stand (3) within a vacuum vessel of a vacuum processing apparatus such as a vacuum film-formation apparatus or an etching apparatus for semiconductor wafers. A heat-transfer gas such as helium is supplied to a gap between the wafer and the mounting stand, and film-formation or etching is performed while the wafer is held at a predetermined temperature. To ensure a simple and reliable detection of any leakage of the helium from between the wafer and the mounting stand during this process because of an abnormal state, the surface of a dielectric material such as aluminum nitride that configures the mounting stand (3) is given a mirror finish and the wafer (W) is attracted to the surface of the mounting stand (3) by an attractive force of at least 1 kg/cm2, whereby the helium from the gas supply path (5) is sealed in on the rear surface side of the wafer (W).
    Type: Grant
    Filed: September 5, 2000
    Date of Patent: June 11, 2002
    Assignee: Tokyo Electron Limited
    Inventor: Hideaki Amano
  • Patent number: 6381866
    Abstract: A continuous process for the drying and gel formation of solvent-containing gel-forming polymers, in particular polysaccharide derivatives, by flash cooling of suspensions of the polymers, and an apparatus for the drying of solvent-containing products are described. The process comprises the steps: metering the solvent-containing polymer having a solids content of 1 to 65% by weight and at a pressure of in particular ambient pressure to 6000 hPa, at a polymer temperature of 20 to 100° C. into an evaporation zone (1), the evaporation zone (1) having a pressure of 0.1 hPa to 800 hPa, cooling the polymer, in particular to a temperature of <93° C.
    Type: Grant
    Filed: January 5, 2001
    Date of Patent: May 7, 2002
    Assignee: Bayer Aktiengesellschaft
    Inventors: Dietrich Gehrmann, Hartwig Kempkes
  • Patent number: 6357142
    Abstract: A system for high-pressure drying of semiconductor wafers includes the insertion of a wafer into an open vessel, the immersion of the wafer in a liquid, pressure-sealing of the vessel, pressurization of the vessel with an inert gas, and then the controlled draining of the liquid using a moveable drain that extracts water from a depth maintained just below the gas-liquid interface. Thereafter, the pressure may be reduced in the vessel and the dry and clean wafer may be removed. The high pressure suppresses the boiling point of liquids, thus allowing higher temperatures to be used to optimize reactivity. Megasonic waves are used with pressurized fluid to enhance cleaning performance. Supercritical substances are provided in a sealed vessel containing a wafer to promote cleaning and other treatment.
    Type: Grant
    Filed: August 7, 2001
    Date of Patent: March 19, 2002
    Assignee: Semitool, Inc.
    Inventors: Eric J. Bergman, Ian Sharp, Craig P. Meuchel, H. Frederick Woods
  • Patent number: 6286231
    Abstract: A method and apparatus for high-pressure drying of semiconductor wafers includes the insertion of a wafer into an open vessel, the immersion of the wafer in a liquid, pressure-sealing of the vessel, pressurization of the vessel with an inert gas, and then the controlled draining of the liquid using a moveable drain that extracts water from a depth maintained just below the gas-liquid interface. Thereafter, the pressure may be reduced in the vessel and the dry and clean wafer may be removed. The high pressure suppresses the boiling point of liquids, thus allowing higher temperatures to be used to optimize reactivity. Megasonic waves are used with pressurized fluid to enhance cleaning performance. Supercritical substances are provided in a sealed vessel containing a wafer to promote cleaning and other treatment.
    Type: Grant
    Filed: January 12, 2000
    Date of Patent: September 11, 2001
    Assignee: Semitool, Inc.
    Inventors: Eric J. Bergman, Ian Sharp, Craig P. Meuchel, H. Frederick Woods
  • Patent number: 6192601
    Abstract: The present invention provides method and apparatus for reducing particulate contamination during the processing of a substrate. In one embodiment, the step of preheating a substrate in a preheater to a desired temperature. The preheated substrate is transferred from the preheater to a buffer region having a pressure therein that is between about two (2) Torr and about seven hundred and sixty (760) Torr. The preheated substrate is transferred from the buffer region to a reaction chamber. Thermophoretic forces help repel particles away from the substrate surface during substrate transfer.
    Type: Grant
    Filed: May 30, 2000
    Date of Patent: February 27, 2001
    Assignee: Applied Materials, Inc.
    Inventors: Steve G. Ghanayem, Madhavi Chandrachood
  • Patent number: 5722183
    Abstract: A method and apparatus for drying a fiber web is provided by pressing the web, preferably by impulse drying and then introducing the web into a gas pressurized zone followed by reducing the pressure in the zone, the reduction preferably being effected with cooling of the fiber web.
    Type: Grant
    Filed: June 26, 1996
    Date of Patent: March 3, 1998
    Assignee: Institute of Paper Science and Technology, Inc.
    Inventors: David I. Orloff, Timothy F. Patterson, Andrew M. Krause
  • Patent number: 5709039
    Abstract: The dryer for a motor vehicle washing and drying system includes three downwardly-facing nozzles. The nozzles oscillate in a synchronized manner, with two side nozzles oscillating over a limited range only. A center nozzle, disposed between the two side nozzles, oscillates over a wider range to drive water on the upper surface of the vehicle towards the side nozzles. The side nozzles then drive the water along the contours of the vehicle surface down the sides of the vehicle using the Coanda effect. One of the side nozzles as well as the center nozzle is moved in an inward or outward direction depending upon the sensed width of the vehicle. The center nozzle is rotated in a forward or rearward direction as the vehicle moves underneath the dryer. Each nozzle contains a unique ovoid-shaped member disposed in the nozzle to accelerate and concentrate the output of the nozzles.
    Type: Grant
    Filed: December 4, 1996
    Date of Patent: January 20, 1998
    Assignee: PDQ Manufacturing, Inc.
    Inventor: Allen Jones
  • Patent number: 5644855
    Abstract: A portable contamination-sensitive component transport container provides a continuously purged environment for the components. The container includes an attached cryogenically liquefied inert gas insulated storage vessel from which vaporized liquefied inert gas is used to generate a gaseous nitrogen purge to the container.
    Type: Grant
    Filed: April 6, 1995
    Date of Patent: July 8, 1997
    Assignee: Air Products and Chemicals, Inc.
    Inventors: Wayne Thomas McDermott, Richard Carl Ockovic, Robert William Wimmer, II