Abstract: A drying apparatus according to the present invention and a laundry drying machine including the same circulate only some of humid air introduced from a drum and discharge the remaining humid air through a discharge port, and then introduce mixed air, in which external air introduced through an introduction port and circulated humid air are mixed, into the drying duct to supply the air to the drum. Accordingly, since air in which there is little moisture may be circulated, drying performance of the drying apparatus may be improved. Further, by disposing an introduction fan or a discharge fan adjacent to the discharge port and mixing the humid air with the external air, since the air of which the moisture amount is little may be discharged to the outside of a cabinet, or the air discharged through the discharge port may be quickly discharged to the outside of the cabinet by the discharge fan, occurrence of dew condensation in the cabinet may be prevented.

Abstract: An apparatus includes a gas input and a cooling plate. A groove surrounds the gas input and less than one hundred percent of the cooling plate. An inflatable seal is in the groove.

Abstract: Methods and systems for freeze-drying injectable compositions, in particular pharmaceutical compositions, are provided whereby a freeze-dried composition may thus obtained by the method and systems. The systems for freeze-drying injectable compositions, in particular pharmaceutical compositions, make use of the method as described by storing a quantity of a dispersion of an injectable composition in an aqueous dispersion medium in at least one ready-to-use vial, cooling the vial to form ice crystals, applying a vacuum, and applying thermal heat to the dispersion while rotating the vial to homogeneously supply heat to the vial. The condition of the drying dispersion in the rotating vial is measured using an optical sensor using electromagnetic detection and adaptively controlling the amount of thermal heat.

Abstract: The present invention relates to a washing machine which can reduce energy required for a washing cycle and a drying cycle. The washing machine includes a moisture absorption element containing porous aluminosilicate, in which the porous aluminosilicate has a Si/Al atomic ratio of 15 or less and a total specific volume (Vtotal) of pores of 0.3 cm3/g, the Vtotal of pores being defined as sum of Vmeso and Vmicro.

Abstract: The present invention relates to a method for heat-treating water-absorbing polymeric particles at a temperature in the range of from 100 to 250° C. in a fluidized bed dryer under specifically adapted apparatus and method conditions, the use of a fluidized bed dryer for heat-treating water-absorbing polymeric particles in continuous or batch mode as well as to the heat-treated polymeric particles obtained by the method of the present invention.

Abstract: Disclosed is a substrate processing apparatus capable of drying a substrate to be processed while suppressing the pattern collapse or the occurrence of contamination. A substrate is held in a liquid bath while being immersed in a liquid, and the liquid bath is disposed in a processing space of a processing vessel. A processing of drying the substrate is performed by replacing the liquid in the liquid bath with a supercritical-state fluid. A predetermined mechanism moves liquid bath between a processing location in the processing case and a stand-by location outside the processing case. A heater installed in the processing case changes the fluid to a supercritical state or maintains the supercritical state while cooling mechanisms cool down the liquid bath moved to the stand-by location outside the processing vessel.

Abstract: A system and method is provided for vapor smoothing a rapid manufactured three-dimensional object. A cabinet housing has a sealable interior. A heated vapor chamber in the interior of the cabinet housing contains solvent that is vaporizable to fill the vapor chamber with vapor for smoothing the object when the object is placed in the vapor chamber. A drying chamber is also provided in the interior of the cabinet housing that is separate from the vapor chamber for drying the object when the object is moved from the vapor chamber to the drying chamber.

Abstract: A device for supporting at least one vessel containing a target material to be lyophilized generally includes a support panel, a central region, a perimeter region, a thermal shield, and at least one shielding cavity. The support panel has a support surface. The central region is defined by the support panel for supporting the at least one vessel. The perimeter region is also defined by the support panel and surrounding the central region. The thermal shield is positioned about the perimeter region and extends transverse to the support surface of the support panel such that the thermal shield and the support panel define a storage space for accommodating the at least one vessel. The at least one shielding cavity is defined by the thermal shield and contains a shielding material during a lyophilization process. The shielding material is distinct from the target material.

Abstract: This consists of the preparation of powdered still slops from concentrated liquid still slops dried and converted into a powder in a conventional dryer (1) and then fed to a powder collecting cyclone (4), featuring at the lower outlet aperture of the collecting cyclone (4) a circular or snail-shaped or logarithmic spiral-shaped device (7) fed with a cool, dry air draught which generates a downward suction effect counter to the upward suction effect of the collecting cyclone (4), bringing about the falling and separation of the powder from the draught of hot air which carries the same. The cool, dry air carries the powder to the exterior for bagging, and the hot air exits upwards via the collecting cyclone (4) towards the flue (6), using a device for the recovery of the heat which it still bears as much as possible.

Abstract: An apparatus for cooling bulk material with a grate flowed through by cooling gas. The apparatus comprises a plurality of planks configured to move forward and back in the direction of conveyance and, between the planks, a sealing device having spatially separate outer and inner sealing elements. The sealing device has between the sealing elements a conveying duct, which runs along the length of the planks and on which a gas supply is configured to produce a gas stream along the length of the conveying duct. Bulk material which has infiltrated through the outer sealing element can be transported away before it can reach and migrate through the inner sealing element. The accompanying sealing effect can considerably reduce the undesirable material through-fall, while enabling the use of low-wearing seals, which provide excellent wear resistance.

Abstract: The group of inventions relates to a method and a device for wood heat treatment and can be used for building and in the wood work and timber and furniture industries. The inventive method consists in controlling a heat-treatment process by forming control actions corresponding to parameters of current information inputted in the form of control signals into a computer system for determining the optimal values of the process parameters. The inventive device comprises a control cabinet which is provided with a computer system for controlling and programming a process and is connected to electrically driven shutters. Said invention makes it possible to improve the quality of treatable wood.

Abstract: The present invention relates to dry particles and methods of preparing the same, in particular to methods of producing dry particles comprising a thermally labile component such as a colloidal system or a thermally labile biopharmaceutical compound, to the use of such dry particles, and to pharmaceutical compositions comprising the same.

Abstract: A heating apparatus 2 comprises a housing 20; a flat heating chamber 4 which is provided in the housing 2 and adapted to heat a wafer W used as a substrate, with one side of the heating chamber 4 opening for carrying in and carrying out the wafer; and a heating plates 44, 45 provided in the heating chamber 4 such that the wafer W can be heated from both above and below. A cooling plate 3 is provided in the housing 20 located in the vicinity of the opening of the heating chamber 4, for cooling the wafer W after being heated by the heating plates 44, 45. Additionally, a carrying means is provided in the housing 20 for carrying the wafer W between an upper position of the cooling plate 3 and the interior of the heating chamber 4 such that a heat treatment for the wafer W can be performed with the wafer W being held in the heating chamber 4.

Abstract: The invention relates to a process for processing wet material, in particular sewage sludge, having a plurality of drying stages. At least one high-temperature drying stage 2 and at least one low-temperature drying stage 10 are provided, wherein the waste heat of the at least one high-temperature drying stage 2 is used for heating the at least one low-temperature drying stage 10. Great savings in energy and economic efficiency can thereby be achieved. In addition, the invention relates to a plant for carrying out the process.

Abstract: A method for controlling the operation of a dryer comprising dispensing a treating chemistry from a dispensing system into a treating chamber of the dryer based on an output from the environmental drying sensor.

Abstract: A hybrid thermal management system for providing simultaneous spray cooling and dry cooling for a plurality of cards. The hybrid thermal management system includes a chassis having a global spray chamber, a hybrid chamber, a first opening within a rear portion of the chassis extending into the global spray chamber, a second opening within the rear portion of the chassis extending into the hybrid chamber, and a backplane secured and sealed to the rear portion of the chassis. A dry chamber may be attached to the chassis for air cooling electrical components. The cards within the global spray chamber are typically high heat flux components with increased cooling requirements and the cards in the hybrid chamber are comprised of dry/air cooling and zone cooling components.

Abstract: A dry-wet thermal management system for providing simultaneous spray cooling and dry cooling for a plurality of cards. The dry-wet thermal management system includes a chassis having a dry chamber and a spray chamber, a first opening within a rear portion of the chassis extending into the spray chamber, a second opening within the rear portion of the chassis extending into the dry chamber, and a main backplane secured and sealed to the rear portion of the chassis. Electronic cards may be electrically coupled within sockets of the main backplane within both the dry chamber and the spray chamber. The cards within the spray chamber are typically high heat flux components with increased cooling requirements and the cards within the dry chamber are typically low heat flux components with reduced cooling requirements. A spray cool system is within the spray chamber and a dry cool system is within the dry chamber.

Abstract: A mechanized vent for a dishwasher employs a vent plate moving about a hinge axis as driven by a cam mechanism at a surface of the vent plate removed from the hinge axis.

Abstract: The present invention provides a method and apparatus for curing a coated fiber, comprising either two fiber coating curing stages separated by a cooling stage, or two fiber coating curing stages separated by a distinct time interval, or both. One of the two fiber coating curing stages responds to the coated fiber, and provides a partially cured fiber coating. The other of the two fiber coating curing stages responds to the partially cured coated fiber for further curing the coating of the fiber. In one embodiment of the invention, a cooling stage is placed between the two curing stages, while in the other the curing stages are placed a set distance apart such that polymerization of the coating initiated by the first curing stage has time to complete prior to the coating being irradiated by the second curing stage.

Abstract: A drum dryer provided with a liquid splash and scatter preventing equipment, which enables continuous operation by preventing a scattering liquid from making dry powder in the case in which the equipment is provided above a neighborhood of a liquid concentration section. A double drum type drum dryer including a liquid splash and scatter preventing equipment is provided in a horizontal above a neighborhood of a liquid concentration section between drums and has a cooling function.

Abstract: Disclosed is a method and apparatus for drying a wet cake in a carboxylic acid production process. The method comprises employing a contact dryer for drying solid particles of carboxylic acid, where the solid particles can have a residence time of less than about 7 minutes in the dryer and an exit temperature of less than about 250° C. upon exiting the dryer.

Abstract: A laundry dryer having a tumbler with airflow openings of generally triangular shape with rounded transverse sides and opposed ends configured to permit passage of round heads of standard drywall screws when oriented parallel to the long dimension of the opening, while preventing the passage of standard collar buttons having a diameter no greater than the diameter of the drywall screw heads. Loose drywall screws within the tumbler are thereby permitted to pass harmlessly through the air flow openings in the rotating drum into the lint filter of the dryer without damage to the dryer nor interruption of the dryer operation.

Abstract: A dry-wet thermal management system for providing simultaneous spray cooling and dry cooling for a plurality of cards. The dry-wet thermal management system includes a chassis having a dry chamber and a spray chamber, a first opening within a rear portion of the chassis extending into the spray chamber, a second opening within the rear portion of the chassis extending into the dry chamber, and a main backplane secured and sealed to the rear portion of the chassis. Electronic cards may be electrically coupled within sockets of the main backplane within both the dry chamber and the spray chamber. The cards within the spray chamber are typically high heat flux components with increased cooling requirements and the cards within the dry chamber are typically low heat flux components with reduced cooling requirements. A spray cool system is within the spray chamber and a dry cool system is within the dry chamber.

Abstract: The present invention provides method and apparatus for surface treatment which, when employed in process steps of manufacturing semiconductor devices, can result in the final products having enhanced reliability. According to the surface processing method, an obeject to be processed W is introduced in a processing vessel 10, which is then supplied with ClF3 gas serving as cleaning gas from a supply unit 26. The ClF3 gas is bound to the surface of the object to be processed W, and although the supply of the gas to the processing vessel is interrupted, the ClF3 gas bound to the surface of the object to be processed W serves to clean the surface of the object to be processed. Next, reducing gas is introduced into the processing vessel W to remove chlorine from the object to be processed W, the chlorine being derived from the ClF3 gas. After that, the introduction of the reducing gas is interrupted, and the cleaned object to be processed W is exported from the processing vessel 10.

Abstract: A drying unit for removing solvent from moist material, and a method for drying moist material with the drying unit. The unit comprises at least one drying chamber (23) having at least one stand plate (2) for holding vessels (3), which are filled with moist material, or flat layers of moist material, the drying chamber (23) being connected to a condenser (22) via a vapor passage (15), in which sublimed solvent can be separated out, the stand plates (2) being connected to a temperature-controlled heating/cooling circuit, the chamber (23) having heating/cooling plates (4) or (4?) which are connected to a second heat-transfer circuit, wherein the heating/cooling plates (4) or (4?) are substantially thermally isolated from the chamber wall (6).

Abstract: The object of the present invention is to provide a microstructure drying treatment method by which a substrate having a microstructure has a fine pattern of less than 30 nm and a large-caliber substrate of 100 mm or more can be dried uniformly and in a short time without generating pattern collapse, and its apparatus and its high pressure vessel. The present invention is a microstructure drying treatment method of introducing a fluid that is gas at normal temperature and pressure and is liquid under high pressure inside a high pressure vessel in which a substrate having a microstructure in a state immersed in or wet with a rinsing liquid in a liquid or supercritical state. The method forms a specific gravity difference between the rinsing liquid and fluid inside the high pressure vessel and collects the rinsing liquid to the upper side or lower side of the high pressure vessel by changing at least one side of the temperature and pressure of the fluid and changing the specific gravity of the fluid.

Abstract: A cooling grate for bulk material, having a carrying plate for accommodating a layer of the material for cooling, and having conveying elements by means of which the material for cooling is conveyed in a conveying direction on the resting carrying plate and which comprise pushers, which are arranged in a movable manner on that side of the carrying plate which is subjected to the action of material for cooling, and a drive, which is arranged on the other side of the carrying plate and is intended for executing a lifting movement, each pusher being assigned an opening in the carrying plate and a transmission member, which is guided thereby and connects the pusher to the drive. The carrying plate is provided, at the openings, with in each case one collar, which at least at the front and rear, as seen in the conveying direction, has a seal acting between the transmission member and collar.

Abstract: A method for comletely drying polished nails without any smudging or nicking. The method utilizes first warm air and then very cold air followed by a brief return to warm air. The warm air of the initial step uses air at a temperature of approximately eighty-five degrees Fahrenheit for approximately four minutes. The very cold air has a temperature of approximately thirty-five degrees and is blown for approximately two minutes. The last step utilizes the initial heating temperature of eighty-five degrees Farenheit but for only fifteen seconds.

Abstract: Treatment apparatus and a process for thermal desorption of hydrocarbon contaminants from excavated soil provides efficient contaminant removal by handling the soil in a thermally conductive treatment vessel that fits within an insulated treatment chamber. The soil is treated in this chamber with fresh air that is dried and electrically heated prior to contacting the treatment vessel. The dry air passes through the soil and the air mixed with contaminants is withdrawn from the chamber through piping in the treatment vessel. Excavating the soil directly into the treatment vessel allows the treated soil to be returned to the final disposition site in the same vessel, minimizing soil handling.

Abstract: A method and apparatus for completely drying polished nails without any smudging or nicking. The method utilizes first warm air and then very cold air preferably followed by a brief return to warm air. The apparatus for performing the method includes a temperature controller for setting the temperature and timers for controlling the duration of each heating and cooling period. By means of an air heater and a cooler connected to a temperature controller, heats and cools the air which is forced upon the nails by a motor and fan.

Abstract: A cooling grate for bulk material, having a carrying plate (2) for accommodating a layer (8) of the material for cooling, and having conveying elements by means of which the material for cooling (8) is conveyed in a conveying direction (81) on the resting carrying plate (2) and which comprise pushers (5), which are arranged in a movable manner on that side of the carrying plate (2) which is subjected to the action of material for cooling (8), and a drive (3), which is arranged on the other side of the carrying plate (2) and is intended for executing a lifting movement (9), each pusher (5) being assigned an opening (22) in the carrying plate (2) and a transmission member (4), which is guided thereby and connects the pusher (5) to the drive (3), it being the case that the carrying plate (2) is provided, at the openings (22), with in each case one collar (23), which at least at the front and rear, as seen in the conveying direction (81), has a seal (7) acting between the transmission member (4) and collar (23).

Abstract: A device for heat treating metallic webs in-line, in particular for operation with a low-density protective gas, comprises stabilising nozzle systems which stabilise the course of the web and effect heat transfer, primarily by forced convection, in the heating portion and at least in the first portion of cooling. The web is guided in a non-contact process in the treatment portion localised by rollers. The course of the web exhibits a concave curvature (as viewed from above), at least in a partial area in the treatment portion. The area of said concave curvature can be in a fluid which is different from the fluid with which the web is blown in the heating portion and at least in the first portion of the cooling area.

Abstract: A clothes dryer and a cooling passage structure for cooling a condenser thereof is disclosed, which includes front and rear inhalation holes provided at a cabinet of the clothes dryer; and a guide duct provided to connect a condenser to a cooling fan, for forming a flow passage of an external air flown through the front and rear inhalation holes. At this time, the guide duct is provided such that an outlet side of the condenser exhausting the external air is connected to an inlet side of the cooling, fan inhaling the external air after passing through the condenser. The outlet side of the condenser exhausting the external air after passing through the condenser is opposite to the inlet side of the cooling fan inhaling the external air. Also, if the cooling fan is composed of a sirocco fan, which is provided such that the external air passing through the cooling fan is discharged to the rear side of the cabinet.

Abstract: A method and an apparatus for controlling airflow in a desiccant drying system having two desiccant beds (10, 12). A first diverter valve (14) communicates with each of the desiccant beds, a regeneration air inlet (22), and a press air outlet (20). A second diverter valve (16) communicates with each of the desiccant beds, a process air inlet (18), and a regeneration air outlet (28). First and second regeneration air control valves (24, 30) are also provided which during a cooling phase of the regeneration cycle admit a cooling bleed stream of process air to the desiccant bed being regenerated and then convey the cooling air bleed stream from the desiccant bed and through a heat exchanger (42) back to the process air inlet.

Abstract: A drying unit for removing solvent from moist material, and a method for drying moist material with the drying unit. The unit comprises at least one drying chamber (23) having at least one stand plate (2) for holding vessels (3), which are filled with moist material, or flat layers of moist material, the drying chamber (23) being connected to a condenser (22) via a vapor passage (15), in which sublimed solvent can be separated out, the stand plates (2) being connected to a temperature-controlled heating/cooling circuit, the chamber (23) having heating/cooling plates (4) or (4′) which are connected to a second heat-transfer circuit, wherein the heating/cooling plates (4) or (4′) are substantially thermally isolated from the chamber wall (6).

Abstract: An exposure apparatus is provided for performing exposure processes with high accuracy by accurately performing pressure control inside a chamber having a plurality of air-conditioning chambers. The inside of the main chamber which accommodates the exposure apparatus is divided into a plurality of air-conditioning chambers, and a pressure detection device which detects the pressure is provided with each of the plurality of air-conditioning chambers. Also, among the plurality of the air-conditioning chambers, the pressure inside a main column which accommodates an exposure stage on which a wafer in mounted and subjected to an exposure process, is set to be higher than the pressure of the other air-conditioning chambers based on detection results obtained from the pressure detection devices.

Abstract: A separator for removing contaminants from compressed air, the separator including an elongate enclosure having an inlet end and an opposite outlet end, the inlet end of the separator being in flow communication with a source of compressed air, the separator defining a first air flow path between the inlet and outlet ends of the separator and a second air flow path between the outlet end of the separator and a wall member positioned adjacent outlet end of the separator for being contacted by air exiting the outlet end of the separator, wherein air traveling in the first flow path undergoes a volumetric expansion and substantial change of direction as it exits the separator and enters the second air flow path and further undergoes a change of direction as it impacts the wall member.

Abstract: A process for drying/heat-treating nonwoven webs in which the web is partially dried under tension in a first drying zone and further heat treated under low tension or in a substantially tensionless state a second drying zone. The process significantly reduces the occurrence of stretch-type defects in the nonwoven webs.

Abstract: A device for rapidly cooling a semiconductor wafer test/transfer machine. The device includes a body which is provided with an interior gas passage one end of which is connected to a source of clean, dry air or other gas by a tubing. In typical application, the body is rested on the cover of a semiconductor wafer test or transfer machine, typically above or adjacent to the chuck or other wafer holder of the machine, with the other end of the gas passage in contact with the cover. The air or gas flowing through the gas passage impinges against the machine cover and rapidly cools the chuck or other wafer holder.

Abstract: A printing machine with several printing units (10), which are arranged in a row and through which a printing carrier sheet (12) passes and downstream from each of which a drying station is disposed, wherein the drying station (22) in each case is disposed at the periphery of an individual tempering roller (26), which supports the printing carrier sheet (12).

Abstract: A method and apparatus is disclosed for staging or cooling a substrate between high temperature thermal processing steps. In the disclosed embodiment, one or more cooling stations are located off-line within a wafer handling chamber, outside the thermal processing chamber. After thermal processing, a hot wafer can be loaded on to one station, where the wafer is subjected to forced convection cooling. In particular, the wafer is subjected to cooling gas from above and below through perforated upper and lower showerhead assemblies. The wafer can thus be cooled rapidly on a station while other wafers are transferred into and out of the processing chamber. Desirably, the wafer is cooled on the station to a point at which it can be handled by a low temperature wafer handler and stored in a low temperature cassette.

Abstract: An automatic clothes dryer has a drying cycle followed by a cool down cycle where the cool down cycle is terminated when the sensed output temperature of the dryer drum falls below a default temperature value preselected or altered by user. This permits the user to adjust the termination cool down cycle temperature to the user's preference and touch sensitivity to the warmth of clothing removed from the dryer. The user adjusts the setting of a user variable selection device on the dryer control panel to a preferred temperature signal representing the desired temperature of articles in the dryer when the cool down cycle is terminated. The dryer has a comparator that is connected to the outlet thermistor for receiving the sensed signal representing the temperature of the air leaving the drum and that is connected to the user variable selection device for receiving the user preferred temperature signal.

Abstract: Apparatus, method and system for the treatment of a wafer. After a treatment at elevated temperature, a wafer is taken out of the reactor in question with the help of a mechanical transport apparatus which preferably grips the wafer around the circumference and on the under side and consists of a wafer surrounding ring. The wafer is then placed in a floating wafer reactor where it is cooled in a controlled manner. Transport for further action or treatment then takes place.

Abstract: A method and apparatus for drying long fibre hay. A first step involves providing round bales of long fibre hay. A second step involves separating the bales to form a loose mass of long fibre hay. A third step involves feeding the loose mass of long fibre hay into a rotary dehydration drum. A fourth step involves separating the loose mass of long fibre hay from air containing entrained moisture by passing the long fibre hay through a cyclone separator with a first stream of air passing to an exhaust and a second stream of the loose mass of long fibre hay passing into an air lock. A fifth step involves cooling the loose mass of long fibre hay. A sixth step involves passing the loose mass of long fibre hay through a hay baler, whereby the loose mass of long fibre hay is formed back into bales.

Abstract: An apparatus (1) is proposed for drying and heat-treating pellets with a stream of inert gas, wherein the apparatus has a cuboid base unit (2) with a feed (3) for the pellets in its upper part and an outlet (4) in its lower part, with a feed (5) on one lateral surface and with an exhaust base (6) on the opposite lateral surface of the cuboid base unit (2) for the stream of inert gas, and also with distribution and retention equipment (7, 8) in the region of the feed (5) and, respectively, of the exhaust (6) for the stream of inert gas, where each of these extends essentially over the entire vertical cross section of the cuboid base unit (2).

Abstract: A continuous process for the drying and gel formation of solvent-containing gel-forming polymers, in particular polysaccharide derivatives, by flash cooling of suspensions of the polymers, and an apparatus for the drying of solvent-containing products are described. The process comprises the steps: metering the solvent-containing polymer having a solids content of 1 to 65% by weight and at a pressure of in particular ambient pressure to 6000 hPa, at a polymer temperature of 20 to 100° C. into an evaporation zone (1), the evaporation zone (1) having a pressure of 0.1 hPa to 800 hPa, cooling the polymer, in particular to a temperature of <93° C.

Abstract: A method and apparatus for heating and cooling a substrate are provided. A chamber is provided that comprises a heating mechanism adapted to heat a substrate positioned proximate the heating mechanism, a cooling mechanism spaced from the heating mechanism and adapted to cool a substrate positioned proximate the cooling mechanism, and a transfer mechanism adapted to transfer a substrate between the position proximate the heating mechanism and the position proximate the cooling mechanism.

Abstract: A continuous process for the drying and gel formation of solvent-containing gel-forming polymers, in particular polysaccharide derivatives, by flash cooling of suspensions of the polymers, and an apparatus for the drying of solvent-containing products are described. The process comprises the steps: metering the solvent-containing polymer having a solids content of 1 to 65% by weight and at a pressure of in particular ambient pressure to 6000 hPa, at a polymer temperature of 20 to 100° C. into an evaporation zone (1), the evaporation zone (1) having a pressure of 0.1 hPa to 800 hPa, cooling the polymer, in particular to a temperature of <93° C.

Abstract: A method and apparatus is disclosed for staging or cooling a substrate between high temperature thermal processing steps. In the disclosed embodiment, one or more cooling stations are located off-line within a wafer handling chamber, outside the thermal processing chamber. After thermal processing, a hot wafer can be loaded on to one station, where the wafer is subjected to forced convection cooling. In particular, the wafer is subjected to cooling gas from above and below through perforated upper and lower showerhead assemblies. The wafer can thus be cooled rapidly on a station while other wafers are transferred into and out of the processing chamber, Desirably, the wafer is cooled on the station to a point at which it can be handled by a low temperature wafer handler and stored in a low temperature cassette.

Abstract: A water-driven jet or venturi extraction means is used to remove, capture and cool the hot, highly humid air created within commercial dishwashers during a wash rinse or sanitization cycle. A cold water spray is used to create a pressure reduction zone which serves to draw in hot, highly humid air from the dishwasher. Water vapor cools and condenses on contact with the cold water spray within the venturi. The invention also serves to help vent the dishwasher. Cool, fresh air is drawn into the dishwasher while the hot air is drawn into the venturi.