Abstract: A baking device including a body having an access port, through which a baked object is allowed to be placed into or taken out of the body. The access door is mounted at the body and is configured to open and close the access port. An inner side surface of the access door defines therein grooves configured to receive condensate.

Abstract: A maximum height, that corresponds to a width of a pattern formed on a front surface of a substrate to be processed, is searched among a plurality of maximum heights each being a maximum value of a height of a pattern having a particular width when pattern collapse does not occur. Thereafter, it is determined that whether or not a height of the pattern is greater than the maximum height. In a case where the height of the pattern is greater than the maximum height, a hydrophobizing agent is supplied to the substrate such that a hydrophobized region is formed on a whole tip-side region in a lateral surface of the pattern, and a non-hydrophobized region remains on at least a portion of a root-side region in the lateral surface of the pattern. Thereafter the substrate is dried.

Abstract: A top adapted to match and close from above a cabinet of a laundry drying appliance is provided. The top is formed as a ready-to-mount part ready to be mounted to the cabinet and forming a moisture condensing module for dehydrating drying air used to dry laundry within a drying drum of the laundry drying appliance. The top has a drying air inlet for receiving moisture-laden drying air, a drying air outlet for delivering demoisturized drying air, fluid passageways defined thereinside from the drying air inlet to the drying air outlet for the passage of the drying air to be dehydrated and a moisture condenser arranged inside the fluid passageways.

Abstract: Provide is an apparatus for thermal melting processes that is capable of directly cooling the process object without requiring a separate cooling plate. The apparatus for thermal melting process according to the present invention is an apparatus 1 for thermal melting process that thermally melts objects 100 including solder in an atmosphere containing carbonic acid vapor, and the hand part 4 for carrying and transferring the thermally melted process objects 100 is used as a cooling plate as well.

Abstract: Disclosed are an evaporator, an evaporation method, and a substrate processing apparatus, which can increase the concentration of generated vapor of an organic solvent and efficiently heat the organic solvent. The evaporator includes a fluid tube, a liquid organic solvent supply device for supplying the organic solvent liquid to one end of the fluid tube, and heating units for heating the fluid tube. The fluid tube has a cross section that increases from the one end to the other end. When the organic solvent liquid supplied to one end of the fluid tube is heated, the organic solvent vapor is discharged from the other end of the fluid tube. The substrate processing apparatus includes the above-described evaporator.

Abstract: A system and method for solvent recovery in a batch fluidized bed process is provided. The disclosed embodiment of the fluidized bed system includes a fluidized bed vessel adapted to contain a batch of solvent-containing product; an influent or intake circuit adapted to supply an inert fluidizing gas to the fluidized bed vessel; an effluent circuit adapted to remove the solvent containing inert fluidizing gas from the fluidized bed vessel; a first recycle circuit coupling the effluent circuit to a solvent recovery means; a second recycle circuit directly coupling the effluent circuit to the intake circuit and a flow control valve operatively disposed to divide the effluent between the first recycle circuit and the second recycle circuit based on the operating regime of the fluidized bed process.

Abstract: A system, method and configuration for recovering turpentine during the manufacturing of wood chips, wood pellets or other substances that may include turpentine. In general, a turpentine recovery system is used to capture turpentine from exhaust of a dryer as wood chips are being dried. Advantageously, application of the various techniques disclosed herein can result in the recovery of turpentine that can then be sold to generate revenue and, may contribute to a reduction in the capital and operation costs for emission controls for the dryer exhaust.

Abstract: A drying machine includes a clothes holding unit for holding clothes therein, a drying passage including a heater to supply heated air to the clothes holding unit, a dehumidification passage for removing moisture from the air exhausted from the clothes holding unit to supply dehumidified air to the drying passage, a circulation fan provided in the drying passage or the dehumidification passage to circulate air, a moisture absorption unit for absorbing moisture from the air exhausted from the clothes holding unit, a renewable passage for supplying the heat absorbed by the dehumidified passage to the moisture absorption unit to renew the moisture absorption unit, and a controller for controlling the circulation fan to circulate the air exhausted from the clothes holding unit for a preset time period.

Abstract: A clothes dryer is provided. In the dryer, air flowing into a drying container is provided with heat from heat pump. The clothes dryer comprises a cabinet, a drying container rotationally mounted in the cabinet, a motor providing the container with rotational force, a first air path connected to a side of the container, a second air path connected to another side of the container and to the outside of the cabinet, a first heat exchanging member for the first air path, and a second heat exchanging member for the second air path. The first air path and the second air path are on the lower part of the cabinet.

Abstract: An external air-cooled heat exchanger includes two air channels going towards different directions and not connecting with each other, a condensing wind channel and an external air channel. Each air channel has a plurality of air chambers that are alternately arranged so that between each two neighboring air chambers of the same air channel is an air chamber of the other air channel change to a period; A clothes dryer includes an air outlet connected to the heat exchanger. The heat exchanger is connected to a water collection box, the water collection box is connected to an air inlet, a filter is arranged between the air outlet and the heat exchanger, and a drying fan and the heating unit are arranged between the water collection box and the air inlet.

Abstract: A clothes dryer is provided. In the dryer, air flowing into a drying container is provided with heat from heat pump. The clothes dryer comprises a cabinet, a drying container rotationally mounted in the cabinet, a motor providing the container with rotational force, a first air path connected to a side of the container, a second air path connected to another side of the container and to the outside of the cabinet, a first heat exchanging member for the first air path, and a second heat exchanging member for the second air path. The first air path and the second air path are on the lower part of the cabinet.

Abstract: A housing for modularizing a heat pump system of a clothes dryer and a clothes dryer having the same are disclosed. The heat pump system modularized housing of the clothes collectively modularizes a condenser, a compressor, an evaporator and an expansion valve that constitute the heat pump system of the clothes dryer. Not only does the heat pump system is stably mounted in the clothes dryer but also components of the heat pump system can be effectively protected. In addition, the fastening procedures of each component can be unified to simplify an assembling process of the clothes dryer, and thus, the productivity can be improved. Moreover, a structure of an internal flow path of the clothes dryer can be simplified to thus improve efficiency of the heat pump system.

Abstract: Provided is substrate processing apparatus including processing chamber that dries substrate W using high temperature and high pressure fluid, raw material accommodating unit that accommodates raw material in liquid state, and supplying unit that supplies the high temperature and high pressure fluid to the processing chamber. The supplying unit includes sealable outer vessel connected to the processing chamber and the raw material accommodating unit, and inner vessel provided within the outer vessel and configured to receive the raw material. The inner vessel is provided with opened holes portions configured to drop down the raw material toward a portion of the outer vessel to be heated. After the raw material is accommodated in the inner vessel, the raw material is contacted with the portion to be heated and then heated. A high temperature and high pressure fluid is then obtained and supplied to the processing chamber.

Abstract: Disclosed are an evaporator, an evaporation method, and a substrate processing apparatus, which can increase the concentration of generated vapor of an organic solvent and efficiently heat the organic solvent. The evaporator includes a fluid tube, a liquid organic solvent supply device for supplying the organic solvent liquid to one end of the fluid tube, and heating units for heating the fluid tube. The fluid tube has a cross section that increases from the one end to the other end. When the organic solvent liquid supplied to one end of the fluid tube is heated, the organic solvent vapor is discharged from the other end of the fluid tube. The substrate processing apparatus includes the above-described evaporator.

Abstract: Disclosed are an evaporator, an evaporation method, and a substrate processing apparatus, which can increase the concentration of generated vapor of an organic solvent and efficiently heat the organic solvent. The evaporator includes a fluid tube, a liquid organic solvent supply device for supplying the organic solvent liquid to one end of the fluid tube, and heating units for heating the fluid tube. The fluid tube has a cross section that increases from the one end to the other end. When the organic solvent liquid supplied to one end of the fluid tube is heated, the organic solvent vapor is discharged from the other end of the fluid tube. The substrate processing apparatus includes the above-described evaporator.

Abstract: A method and a device for rapidly drying ware shell, and a ware shell, are provided, in the field of precision casting technology. Conventionally, the ware shell drying process fails to ensure high quality of a ware shell and rapid drying simultaneously when the ware shell has a complex structure. The method includes the following steps: a. putting a ware shell to be dried in a sealed chamber; b. vacuuming the sealed chamber under the premise condition of controlling the ware shell in a constant temperature state, and cooling the gas in the sealed chamber in a predetermined time period to condense the moisture in the sealed chamber; c. vacuum injecting gas to the sealed vacuum chamber to make the chamber return to normal atmosphere pressure; d. determining whether the ware shell is dry. If result is YES, then end, otherwise back to step b.

Abstract: A top (119) is adapted to match and close from above a cabinet (110) of a laundry drying appliance (100). The top is formed as a ready-to-mount part ready to be mounted to the cabinet and forms a moisture condensing module for dehydrating drying air used to dry laundry within a drying drum of the laundry drying appliance. The top has a drying air inlet (510), a drying air outlet (515), fluid passageways defined thereinside from said drying air inlet to said drying air outlet for the passage of the drying air to be dehydrated, and moisture condensing means arranged inside the fluid passageways.

Abstract: A drying system includes a fluidized bed dryer and fluidizing gas loop. The system is a closed loop so that fluidizing gas used to dry particulate matter can be reconditioned and recycled to fluidize and dry additional particulate matter. The fluidizing gas is reconditioned by removing fine particulates and water vapor. The drying system includes oxygen control features to prevent oxygen from entering the system. A method for drying particulate matter includes fluidizing the particulate matter in a dryer with a fluidizing gas, heating the particulate matter to remove water, removing water vapor and fluidizing gas from the dryer, removing fines and water vapor from the fluidizing gas, recirculating the fluidizing gas to the dryer to fluidize additional particulate matter and removing dried particulate matter from the dryer. A modular drying system reduces the amount of construction necessary at the installation site.

Abstract: A material drying apparatus for removing moisture from material positioned in an envelope interior. The apparatus comprises an inlet structure, an air removal assembly to remove air from the interior, and a moisture removal assembly for removing moisture from gases from the interior. The assembly comprises a first moisture removal structure, a second moisture removal structure, and a heat pump for transferring heat in a selected direction between the first and second moisture removal structures. The heat pump alternately heats a heat exchanger of one moisture removal structure and cooling a heat exchanger of the other moisture removal structures. The apparatus comprises a control apparatus for controlling operation of the first and second moisture removal assemblies and the heat pump. The control apparatus is configured to sense a condition of the apparatus and reverse operation of the heat pump upon detecting that the condition has passed a predetermined level.

Abstract: A modular lint collection system for a fabric dryer, comprising a lint collection frame having a plurality of lint screen retaining members associated therewith, and a plurality of lint collection screens connected to respective lint screen retaining members and arranged in a zigzag pattern. The lint collection screens are oriented in respective vertical planes with adjacent screens lying in intersecting relation to one another, such that the air flow being drawn through the dryer generally impinges the screens at an oblique angle.

Abstract: A domestic appliance for the care of washed articles having with a container for receiving washed articles; a process air supply which is operationally connected to the container in fluid communication therewith whereby process air flows through the container during appliance operation; and a first heat exchanger which is in fluid communication with the process air supply for dehumidifying the process air exiting the container, the domestic appliance comprising a supplementary heat exchanger for lint filtering operationally disposed in the process air supply in fluid communication with the heat exchanger and the container.

Abstract: A cleaning/drying apparatus including a vapor area where vapor of an organic solvent inside the cleaning/drying apparatus is generated, an ejecting part configured to eject the organic solvent onto a cleaning/drying target, a first detecting part configured to determine whether the temperature of the cleaning/drying target is a first temperature equivalent to a temperature of the vapor in the vapor area, a second detecting part configured to determine whether the temperature of the cleaning/drying target is a second temperature enabling the organic solvent to condense on a surface of the cleaning/drying target, and a cleaning/drying control part configured to drive the ejecting part to eject the organic solvent when the first detecting part detects that the temperature of the cleaning/drying target is the first temperature and stop the ejection when the second detecting part detects that the temperature of the cleaning/drying target is the second temperature.

Abstract: A laundry dryer includes a drying chamber, a process air channel having a supply air opening for drawing in process air, an exhaust air opening for expelling process air, an exhaust air channel through which process air is conducted to the exhaust air opening, and a nebulizer that distributes condensate in process air. The dryer further includes a fan in the process air channel for driving process air through the drying chamber, and a heat exchanger that extracts heat from process air flowing out from the drying chamber, supplies heat to process air flowing into the drying chamber, and separates the condensate from the process air for the nebulizer.

Abstract: Gas drying device, consisting of a desiccant dryer (2) which makes use of a pressure tank (4) with a drying zone (5) and a regeneration zone (6), with an adsorption and/or absorption medium (7) which is alternately guided through the drying zone (5) and the regeneration zone (6); a primary circuit (8) in which the abovementioned desiccant dryer (2) is included, which makes it possible to guide the gas to be dried through the drying zone (5) of the desiccant dryer (2); a secondary circuit (9) which makes it possible for a part of the gas to be dried to be guided through the regeneration zone (6) of the desiccant dryer (2) and to absorb moisture there, characterized in that the device also contains a cooling dryer (1) which is inserted upstream the abovementioned desiccant dryer (2) in the primary circuit (8).

Abstract: A system and method for preparing a container holding high level radioactive waste for dry storage.

Abstract: A clothes drier comprises: a body; a drum rotatably installed at the body; a hot air supply unit configured to supply hot air into the drum; a heat exchanger configured to dehumidify air exhausted from the drum; a pipe unit configured to supply water to the heat exchanger and collect water from the heat exchanger; and a freeze damage preventing unit installed on the pipe unit. The clothes drier is provided with the freeze damage preventing unit configured to partially or completely discharge out water remaining in the heat exchanger after the clothes drier is stopped. Accordingly, freeze damage of the heat exchanger during winter time is prevented.

Abstract: A housing for modularizing a heat pump system of a clothes dryer and a clothes dryer having the same are disclosed. The heat pump system modularized housing of the clothes collectively modularizes a condenser, a compressor, an evaporator and an expansion valve that constitute the heat pump system of the clothes dryer. Not only does the heat pump system is stably mounted in the clothes dryer but also components of the heat pump system can be effectively protected. In addition, the fastening procedures of each component can be unified to simplify an assembling process of the clothes dryer, and thus, the productivity can be improved. Moreover, a structure of an internal flow path of the clothes dryer can be simplified to thus improve efficiency of the heat pump system.

Abstract: A method of cleaning air, including a humidifying operation for humidifying the air containing chemical contaminants by a humidifier and taking a part of the gaseous contaminants in the air into excessive moisture to remove the contaminants from the air, and a dehumidifying operation for dehumidifying the humidified air by a condenser and taking the gaseous chemical contaminants remaining, without being removed, in the humidifying operation into condensed water for removal. By using an oblique honeycomb having both front and rear faces and both upper and lower faces disposed in open state, air is led from the front opening part of the oblique honeycomb and water is fed from the upper opening part thereof to one or both of the humidifier and condenser.

Abstract: Disclosed is a high-speed drying apparatus for drying objects which are rinsed with non-volatile or volatile liquid. The drying apparatus is capable of quickly drying such objects at a reduced cost, not permitting their oxidation. First, the rinsing liquid remaining on objects is substantially removed, still allowing small quantities of rinse to remain thereon. The substantial removal step is immediately followed by the complete removal of the still remaining liquid in the super dry atmosphere.

Abstract: The substrate drying apparatus has a substrate processing vessel 1, a substrate supporting section for supporting plural substrates 2 in a standing condition and lined up condition in the interior of the substrate processing vessel 1, fluid reservoir section 3 for drying provided at an upward predetermined position of the substrate processing vessel 1, a first inert gas supplying section 4 for blowing inert gas against the drying fluid 6 pooled in the fluid reservoir section 3 for drying so as to generate droplet of the drying fluid, and for guiding the droplet towards the center of the substrate processing vessel 1, and a second inert gas supplying section 5 for supplying inert gas vertically and downwardly so as to supply the generated droplet of the drying fluid towards the substrates 2, consequently safety is improved without providing special safety device, and sufficient amount of drying fluid is supplied to the dipping boundary face of the substrate and the cleaning liquid.

Abstract: A heat treatment apparatus for preventing quality defects of an object to be heat-treated even when sublimating components produced in heat treatment become solids and drop down in the heat treatment apparatus, wherein a gas generated when heating an object to be heat-treated, coated with a coating solution and placed on a stage is passed through a trap made of a permeable porous film and is exhausted from an exhaust port of a cover and wherein solids produced and dropping down when gas passed through the trap of the permeable porous film solidifies at a top plate of the cover are trapped by the trap.

Abstract: This substrate processing apparatus supplies wafers W accommodated in a closed processing container 10 with ozone gas and steam for processing the wafers W. The apparatus includes an ozone-gas generator 40 for supplying the ozone gas into the processing container 10, a steam generator 30 for supplying the steam into the processing container 10 and a steam nozzle 35 arranged in the processing container 10 and connected to the steam generator 30. The steam nozzle 35 is equipped with a nozzle body 35a having a plurality of steam ejecting orifices 35f formed at appropriate intervals and a heater 35h for preventing dewdrops of the steam from being produced in the nozzle body 35a. Consequently, it is possible to prevent the formation of dewdrops of solvent steam, which may produce origins of particles in the closed processing container, unevenness in cleaning (etching), etc., and also possible to improve the processing efficiency.

Abstract: Integrated web dryer and regenerative heat exchanger, as well as a method of drying a web of material using the same. The apparatus and method of the present invention provides for the heating of air and the converting of VOCs to harmless gases in a fully integrated manner via the inclusion of a regenerative combustion device as an integral element of the drying apparatus.

Abstract: The invention relates to a method for regulating a compressor installation with at least one compressor element (6) driven by a motor and, in the pressure conduit (11) thereof, a dryer (2) of the type comprising a pressure vessel (24) with a drying zone (3) and a regeneration zone (4), and a rotor (25) continuously rotated in this pressure vessel (24) by a motor (33), which rotor is filled with a regenerable drying agent. A portion of the compressed air is supplied, by means of a branch (15), to the regeneration zone (4) and, after cooling down and separation of the condensed water, is fed back to the pressure conduit (11). The speed of both motors (9, 33) is regulated by a regulation device (13) in function of the pressure in the pressure conduit (11).

Abstract: A drum dryer comprises a drying drum which is arranged for a gas to flow through it to be dried from a first end of the drum to its opposite second end, and a housing in which the drum is located with a space around the drum between the internal wall of the housing and the external surface of the drum. Gas can be directed into the space through a housing inlet, to flow in the space to the first end of the drum where it can be admitted into the drum for drying.

Abstract: A method and an apparatus for drying semiconductor wafers by using an IPA drying apparatus. The present invention uses a vapor generator to generate an IPA vapor. The IPA vapor is generated and saved in a closed surrounding and then transferred in a porous hollow plate in the dryer tank by using a quartz pipe. The IPA vapor is diffused evenly from the porous hollow plate. Furthermore, the present invention increases the safety of the process and can easily control the input amount of the IPA vapor.

Abstract: A combination closed-circuit washer and drier apparatus having a washing cycle and a drying cycle. The apparatus comprises a unitary housing having a tub and a tumbler within the tub, the tub also having an air inlet and air outlet which allows air to flow through the tub, wherein air flowing from the air inlet is in communication with the tumbler. The apparatus also includes a desiccant recharging system located within the unitary housing having a entrance and an exit, the entrance coupled to the air outlet and the exit coupled to the air entrance, thus allowing a continuous flow of air through the system. The desiccant recharging system also includes a diverting valve that directs the flow of air primarily through the desiccant system in a closed-loop during the wash cycle. The diverting valve alters the air flow between the washing cycle (desiccant regeneration) to the drying cycle (desiccant water adsorption).

Abstract: Thermally controlled apparatus 1 for actuating a valve opening 2, in particular a fluid valve, in particular a drip-stop valve in a steam iron, the apparatus having a bimetallic spring disc 3 fastened to a carrier element 4, the edge 5 or edge region of which disc opens or closes the valve opening depending on the curvature position of the bimetallic spring disc 3. The valve opening is formed through a cross-sectionally variable segment 6 of a tube- or pipe-like flow-through element 7, and the edge 5 or edge region of the bimetallic spring disc 3 acts directly on the cross-sectionally variable segment 6.

Abstract: A method of and an apparatus for drying a wafer using the Marangoni effect quickly forms an isopropyl alcohol layer on a cleaning liquid in which the wafer is submerged. The isopropyl alcohol is first heated and then supplied in a fluid state onto the cleaning liquid. The isopropyl alcohol liquid thus diffuses rapidly to form the isopropyl alcohol layer. The wafer is thoroughly dried by removing it from the cleaning liquid through the isopropyl alcohol while only supplying more of the heated nitrogen gas into the ambient above the cleaning liquid.

Abstract: Thin substrate plates are transferred in a horizontal or tilted posture on and by a substrate transfer means. Provided by a substrate transfer path is an air knife nozzle for scraping and drying off a liquid successively from surfaces of the substrates on the substrate transfer means. The air knife nozzle is located substantially at a uniform distance across a drying surface of a substrate plate on the transfer means. The air knife nozzle is provided with a slit-like nozzle hole to spurt jet air to the drying surface from an angular direction relative to a direction perpendicular to the substrate transfer direction and to sweep the substrate across the entire width of the drying surface and with a predetermined angle of incidence relative to the substrate transfer direction.

Abstract: An apparatus for drying the air inside of hermetically sealed electronic devices. The apparatus includes a desiccant part and an activation piece that is attached to the desiccant part. The desiccant part and activation piece are attached together and then covered, except for the portions where the two pieces are attached, with a polymer that has a low moisture vapor transmission rate, such as parylene. The apparatus may be added into an electronic device during assembly. The desiccant, or drying agent, is not activated, by removal of the activation piece, until prior to closure of the hermetically sealed electronic device.

Abstract: A mixture of lower alcohols whose mean molecular weight is 46 or less is supplied onto a surface of a semiconductor wafer cleansed with water. With this supply, the amount of alcohols left on the semiconductor wafer which has been dried can be suppressed to 2 ng/cm2 or less, and thus a gate oxide film formed on the semiconductor wafer is prevented from deterioration. As a result, a high yield of semiconductor products can be realized.

Abstract: Apparatus and method for condensing moisture from an air stream. The condensing comprises concentric cylinders having a common wall. The outer cylinder contains a cooling material, such as water, and upon contact therewith, the air stream is cooled and moisture contained therein is condensed.

Abstract: A method of transporting a reticle is disclosed. The reticle is placed in a reticle carrier that has an ionizer. Moreover, the reticle may be attached with a pellicle. The pellicle consists of a pellicle frame and a pellicle film stretched over the pellicle frame. The pellicle frame has included within an absorbent material.

Abstract: An alcohol vapor dryer system includes a vapor generating chamber, a heater, a process chamber, a gas supplier, a drain vessel, and a suction device. The vapor generating chamber of cylindrical shape contains liquid alcohol supplied from an outer source and includes a fan installed above the surface of the liquid alcohol. The heater installed below the vapor generating chamber heats the liquid alcohol contained in the vapor generating chamber at a temperature lower than the boiling point of the liquid alcohol. The process chamber communicates with the vapor generating chamber through a plurality of fluid ducts and includes a body and a cover plate for covering the body. The gas supplier generates heated nitrogen gas and supplies the gas in order to transfer the heated nitrogen gas and the alcohol vapors to the fluid ducts which are connected to the process chamber. The drain vessel communicates with the bottom of the body of the process chamber and also with the bottom of the vapor generating chamber.

Abstract: An apparatus and method for drying semiconductor substrates to dry about 50 semiconductor wafers by evaporating an organic solvent and blowing the evaporated organic solvent onto these semiconductor wafers through a nozzle, comprises the evaporate organic solvent being blown onto the semiconductor wafers from a direction aslant by an angle from 20.degree. to 50.degree. from a vertical direction toward the semiconductor wafers. At this time, the initial spray amount of the evaporated organic solvent is not less than 0.8 cc/second and not more than 1.5 cc/second, additionally, the amount of the organic solvent used for drying is not less than 70 cc/batch and not more than 200 cc/batch.

Abstract: Disclosed herein is an apparatus and method for drying solid articles such as semiconductor wafers. In one embodiment, the dryer comprises a process tank and a drying fluid supply system. The process tank includes a plurality spray nozzles to spray a non-flammable drying fluid to wet surfaces of the article for drying without the necessity of heat or other external means. The drying fluid comprises a non-flammable, environmentally compatible, and a non-hazardous fluid including a drying agent of (hydrofluoroether) HFE and a surfactant of isopropyl alcohol (IPA). Even without the benefit of heating, little if any solution or static charge remains after drying. The drying apparatus includes a drying fluid supply system for providing the drying fluid to the plurality of spray nozzles.

Abstract: When drying of garbage is started, the opening and closing valve 61 is opened, and at the same time the processing tank 21 is heated by the heater 31. Due to the foregoing, temperatures in the processing tank 21 and the heating chamber 30 are raised and water contained in garbage in the processing tank 21 starts evaporating. At a point of time when the heating chamber 30 and the condensing chamber 40 are filled with this steam, the opening and closing valve 61 is closed, and the fan 50 is operated, so that steam in the condensing chamber 40 is cooled and condensed. Therefore, steam generated in the heating chamber 30 flows into the condensing chamber 40, and pressure in the heating chamber 30 becomes negative and the boiling point is lowered. Accordingly, it is possible to evaporate water at a low temperature.

Abstract: A drying apparatus for processing a surface of a substrate wherein, when a nitrogen gas is fed to a nozzle, a jet of the nitrogen gas spouted through a jet hole is generated. The jet becomes film-shaped and is projected upwardly along an inner surface of a side wall of a processing vessel. Then, the jet is collected into an outside through a suction port formed in an upper portion of the processing vessel. The inner surface of the side wall of the processing vessel is covered with the jet. Therefore, an IPA vapor can be prevented from condensing uselessly on the inner surface. As a result, the IPA vapor is effectively utilized for condensation on a surface of the object to be processed which is mounted on a pan. Thus, defective dryness of the object can be prevented.

Abstract: An apparatus for removing oxide from a silicon substrate having a silicon substrate temperature including an evaporation chamber having at least one inlet and at least one outlet, whereby a carrier gas can be passed through the evaporation chamber from the inlet to the outlet, means for introducing a preselected charge of a hydrous cleaning solution into the evaporation chamber, means for heating the preselected charge of the liquid cleaning solution to evaporate the charge completely and thereby form a mixture of vapors with the carrier gas flowing through the evaporation chamber, a heat exchanger connected to the outlet of the evaporation chamber for lowering the temperature or the mixture to below the silicon substrate temperature, a process chamber for holding the silicon substrate, the process chamber having an inlet connected to the heat exchanger and an outlet and an exhaust controller connected to the outlet of the process chamber for removing gas mixture from the process chamber.