Abstract: A closed variable-frequency heat pump drying device with a heat regenerator includes a variable-frequency compressor, a condenser, a throttling valve, an evaporator, a heat regenerator, a three-way valve, a variable-frequency fan, an air inlet temperature sensor, an air inlet humidity sensor, a drying bin, an air outlet temperature sensor, an air outlet humidity sensor and a controller. The controller regulates frequency of the variable-frequency compressor by comparing magnitudes of actual and set air inlet temperatures; a ratio of a straight-through air volume to a regenerated air volume of the three-way valve by comparing magnitudes of actual and set air inlet humidity; and frequency of the variable-frequency fan by comparing magnitudes of actual and set air humidity difference and magnitudes of actual and set air temperature difference of medium air entering and exiting the drying bin.

Abstract: A laundry treating appliance comprising a combination washer/dryer having a cabinet defining an interior, a tub located within the interior with a first access opening, a rotatable drum located within the tub interior and defining a treating chamber with a second access opening, aligned with the first access opening, an air recirculation conduit, and a condenser fluidly coupled to the recirculation conduit and having at least two fluidly connected condensing chambers.

Abstract: A laundry processing apparatus include a washing unit provided in an installation space of a cabinet, which corresponds to an upper portion of a heat exchanger and has the installation space therein, to spray washing water to a front surface of an evaporator. The washing unit has a nozzle part provided at the upper portion of the heat exchanger in an inclined direction to guide the washing water toward the heat exchanger and a front guide part provided at an opposite side of the nozzle part while being space apart therefrom, with the front surface of the evaporator that is the heat exchanger interposed between the front guide part, guiding the washing water discharged from the nozzle part toward the front surface of the evaporator.

Abstract: The present invention relates drying clothes and other fabrics. The present invention further relates to a cold-air system for removing moisture from fabric. The present invention even further relates to a system for drying fabrics in a closed, non-exhausted system. The present invention even further relates to a free-standing, low energy appliance for drying fabrics.

Abstract: An apparatus and method for a low pressure laundry treating appliance having a cabinet defining an interior, and a drum provided within the interior, the drum including at least an inner wall and an outer wall. Pressure differentiations and flash evaporation can enable drying without excess use of conventional heating methods.

Abstract: A combined washing and drying machine is disclosed, including a roller, a condenser, a drying duct, a water inlet device and a drainage device. Hot and humid air inlet of the condenser is connected with the roller, dry air outlet of the condenser is connected with air inlet of the drying duct, and air outlet of the drying duct is connected with the roller to form a cycle wind path. The condenser inputs condensed water through the water inlet device, and discharges the condensed water after heat exchange through the drainage device, and a plurality of water outlet holes are distributed in the water inlet device. The combined washing and drying machine is capable of cleaning clothing and drying clothing, thereby avoiding the need of manually and repeatedly accessing the clothing, and it is thus very convenient.

Abstract: A dryer appliance includes a cabinet. A drum is disposed within the cabinet. The drum is mounted such that the drum is fixed relative to the cabinet. The drum defines a length between a first end portion of the drum and a second end portion of the drum. The dryer appliance also includes an air duct and a fan. The air duct is coupled to the fan. The air duct has an outlet positioned at a bottom portion of the drum. The fan is operable to urge a flow of air through the air duct and into the drum at the outlet of the air duct.

Abstract: A method for regulating a quantity of a condensing medium according to change in air temperature at an outlet of a barrel of the dryer comprises the following steps: Step 1, Starting drying, detecting an air temperature at the outlet of a barrel of a dryer, and determining that the air temperature at the outlet of the barrel reaches a set temperature; Step 2, calculating the time value from the start of drying to the temperature at the outlet of the barrel reaching the set temperature; Step 3, determining the supplying tempo of the condensing medium at least according to the time value calculated in step 2; and Step 4, supplying the condensing medium with the supplying tempo of the condensing medium determined in step 3.

Abstract: A laundry treating appliance comprising a combination washer/dryer having a cabinet defining an interior, a tub located within the interior with a first access opening, and a rotatable drum located within the tub interior and defining a treating chamber with a second access opening, aligned with the first access opening, and an air recirculation conduit.

Abstract: An induction dryer appliance includes a cabinet. A drum is positioned within the cabinet. The drum is rotatable about an axis within the cabinet. The induction dryer appliance also includes an induction heating element and a support assembly. The support assembly is positioned within the cabinet adjacent the drum. The support assembly includes a plate. The induction heating element is positioned on the plate. A bearing is mounted to the plate. The bearing contacts the drum as the drum rotates about the axis such that the bearing spaces the plate from the drum along a radial direction that is perpendicular to the axis.

Abstract: Disclosed are a thermal desorption system for oil-contaminated soil and gravel, using a microwave indirect irradiation method and including a microwave emission prevention device and a preheating device using waste heat, and a thermal desorption method for oil-contaminated soil and gravel, using the same. In addition, it is disclosed that an outer tube encompassing an inner tube extends to both sides and a plurality of ring-shaped microwave attenuation units are arranged on the inner circumferential surface of the outer tube, such that microwaves are prevented from leaking between the inner tube and the outer tube, thereby enabling eco-friendliness, and even the waste heat generated during a pollutant desorption process is utilized in the system itself, thereby enabling economic feasibility to increase further.

Abstract: A lint retention apparatus for a laundry drying appliance has a lint separator, upstream of which a lint wetter is connected. A laundry drying appliance has a laundry drum and a process air condenser, which are connected by way of a process air channel conducting process air. It also has a lint separator disposed in the process air channel for flow purposes downstream of the laundry drum and upstream of the process air condenser, wherein a lint wetter is disposed for flow purposes downstream of the laundry drum and upstream of the lint separator.

Abstract: An apparatus for the evacuation of warm, moist air or vapor from a dishwasher cabinet or other washing machine interior. A centrifugal fan draws the hot air and water vapor out of the washing cavity through a flue riser and discharges it into a cooling chamber with one or more cooling spray nozzles. The cooling spray nozzles spray a fine mist of cold water into the stream of heated air and vapor, and may spray at angle to the flow of the stream of heated air and vapor. As the heated air and vapor from the dishwasher and the cooling spray mix, heat is transferred from the heated air and vapor to the cold water or mist being sprayed into the air stream. This reduces the temperature of the vapors and air that was extracted from the dishwasher. As the temperature is reduced, the water vapors condense and form droplets which accumulate on the sides and bottom of the cooling flue.

Abstract: A method for constructing a heat pipe, comprising the steps of providing a tube having an open end and a opposite closed end; filling a tube with a predetermined volume of working fluid; connecting a vapor trap to the open end of the pipe; evacuating the tube for a predetermined period of time to remove non-condensable gases from the tube; and sealing the tube wherein the step of evacuating the tube includes the steps of applying a vacuum to the open end of the pipe.

Abstract: A compact and portable liquid concentrator includes a gas inlet, a gas exit and a flow corridor connecting the gas inlet and the gas exit, wherein the flow corridor includes a narrowed portion that accelerates the gas through the flow corridor. A liquid inlet injects liquid into the gas stream at a point prior to the narrowed portion so that the gas-liquid mixture is thoroughly mixed within the flow corridor, causing a portion of the liquid to be evaporated. A demister or fluid scrubber downstream of the narrowed portion removes entrained liquid droplets from the gas stream and re-circulates the removed liquid to the liquid inlet through a re-circulating circuit. The compact and portable liquid concentrator is mountable on a truck bed or skid for easy transportation to remote sites.

Abstract: The present invention relates to a laundry machine having a drying function for drying an object to be dried, especially clothes. In the laundry machine according to one embodiment of the present invention, lint and the like that may be contained in the hot air are removed by the filter, whereby the lint and the like can be prevented from being piled on the duct. Also, the filter is placed in a way that it is exposed into the tub, whereby the filter can be cleaned automatically while it is being driven.

Abstract: The present subject matter provides a dryer appliance. The dryer appliance includes an impeller assembly. The impeller assembly is rotatable about an axis of rotation in order to urge a flow of air through a drum of the dryer appliance. The impeller assembly includes a base plate and an annular front plate spaced apart from the base plate. A plurality of blades extends between the base plate and the annular front plate. The size and position of the base plate, the annular front plate and the plurality of blades relative to one another can assist with urging the flow of air through the drum of the dryer appliance.

Abstract: A method for removal and condensation of vapors from within an enclosed space is disclosed. An enclosed space containing hydrocarbonaceous material is surrounded by an insulative permeable layer having a lowering temperature gradient between the inner surface and the outer surfaces. The insulative layer may also be covered by an impermeable layer. Heating the material in the enclosed space causes the formation of vapors at a positive pressure within the enclosed space. Vapors pass through the inner surface of the insulative permeable layer and contact the permeable materials and are condensed by the lowering temperature within the insulative layer. The condensate liquid passes downwardly through the insulative layer and is then collected.

Abstract: Disclosed is a clothes dryer including a heat exchanger for condensing air discharged from a drum to remove moisture from the air, a collector for collecting condensed water produced in the heat exchanger, a first pump for pumping the condensed water from the collector to a water tank, and a discharge unit for selectively discharging the condensed water from the water tank, to wash the heat exchanger using the condensed water.

Abstract: A washing machine is disclosed. A washing machine includes a cabinet configured to define an exterior appearance thereof; a tub installed in the cabinet to hold wash water therein; a drum rotatably installed in the tub to accommodate laundry therein; at least one venting portion provided in an upper portion of the tub to communicate with an outside of the tub; and a ventilation part (300) provided in a lower portion of the tub to communicate with an inside of the tub. The above configuration enables convection current of internal air of the tub generated via the venting portion and the ventilation part (300).

Abstract: An apparatus for drying wood veneer includes an elongate drying chamber including a conveyor for conveying material to be dried from an input end to an output end; and a cooling section for cooling veneer leaving the output end of the drying chamber, the cooling section including a pressure controller for maintaining a pressure in the cooling section that is slightly higher than pressure in the drying chamber while maintaining a near-zero pressure differential between the drying chamber and the cooling section.

Abstract: A laundry dryer includes a heat-pump assembly configured to cool airflow coming from a laundry container and then to heat airflow returning to the laundry container. The heat-pump assembly has a first heat exchanger configured to transfer heat from the airflow arriving from the laundry container to a low-pressure refrigerant, and a second heat exchanger configured to transfer heat from a high-pressure refrigerant to the airflow directed back into the laundry container. The heat pump assembly has a refrigerant cooler or refrigerant flow-rate adjuster which are configured to adjust, respectively, the temperature or the pressure of the low-pressure refrigerant, and a detector configured to measure one physical quantity of the laundry dryer. The heat pump assembly also includes an auxiliary heat exchanger which transfers heat from the high-pressure refrigerant to the low-pressure refrigerant.

Abstract: A covered sample plate with wells holding samples to be dried. The cover has through holes that communicate with only a portion of each well. The covered plate is inserted into a cradle of an assembly of cradles that is rotated. The cradle assembly fits into a tub and when rotated the cradles present a sold wall that functions as a centrifugal fan that drives air out through an opening in the tub. The air is dried of solvent and re-circulated back through the through holes in the cover to the sample wells.

Abstract: To prevent evaporated flux from being attached to rotation axes of motors which rotate fans positioned in a preheating zone, a main heating zone and a cooling zone and being solidified, the evaporated flux is efficiently and surely collected with the flux liquefying before the flux is solidified and having fluidity. A drain portion 20 constituting a flux collection apparatus 10A is formed at a side of a motor base 16 opposed to the fan and at a circumferential portion of the rotation axis 14. A surface of the drain portion 20 opposed to the fan is formed as an inclined surface 20A which is inclined from a level position of the motor base 16 to a discharge port 46 provided at a back side of the motor base 16.

Abstract: Disclosed herein is a system for purifying contaminated soil, which restores soil contaminated by a variety of pollutants to the condition before the contamination, and which itself provides the driving source required for the purification. The system includes: a dryer which dries contaminated soil, separates waste gas generated during the drying from the contaminated soil, and discharges the waste gas; a pyrolysis apparatus which indirectly heats the dried contaminated soil in a hermetic condition to divide the contaminated soil into purified soil and pyrolysis gas, and separately discharges the purified soil and the pyrolysis gas; a transfer fan for forcibly transferring the discharged pyrolysis gas; a burner for oxidizing the waste gas discharged from the dryer and the pyrolysis gas forcibly transferred by the transfer fan, to heat the pyrolysis apparatus; and a cooling facility for directly spraying cooling water on the discharged purified soil to cool the purified soil.

Abstract: One type of dryer, namely a laundry dryer (1), comprises a water tank (20) and a drum (30). At the time of drying laundry, the interior of the drum (30) functions as a hermetically closed drying chamber (170). The air in the closed drying chamber (170) is sucked into a circulation duct (171) and heated by means of a heater (173) to a hot air before being blown into the closed drying chamber (170). The hot air having absorbed moisture from the laundry comes into contact with dehumidification water in a cooling chamber (174) within the circulation duct (171), thereby being dehumidified. The dehumidification water is sprayed by a mist generator (180). In the drying process, the mist generator (180) generates mist of metal ion water which has passed through an ion dissolving unit (100) and sprays the mist to the laundry.

Abstract: A condensation dryer is provided that includes a drying chamber for articles to be dried and a process air circuit in which a heater for heating the process air is located. The heated process air can be guided across the articles to be dried along a circulation route that includes a blower, an air/air heat exchanger, and a heat pump circuit having an evaporator, a compressor and a condenser. An additional heat exchanger is arranged in the heat pump circuit between the condenser and the evaporator, the additional heat exchanger being functionally coupled to the air/air heat exchanger.

Abstract: This disclosure describes a sample drying system and method that provides a high rates of evaporation and sublimation that is commonly employed in compound processing procedures. The drying increases the sample-solute concentration and removes the solvent completely to produce the dried sample as a non-volatile solute precipitate. Re-circulating of drying gas is disclosed along with a solvent cold trap.

Abstract: The dehumidifier clothes dryer apparatus provides for drying clothes with a closed loop air system. The system does not require an external air source, nor does the system require an exhaust, the apparatus thereby not constrained as to location. The compressor system provides for condensing moisture from air passed through the clothes within the drug, the moisture collected in a sump tank for removal, optionally with a float controlled sump pump. Dual lint traps with optional removable filters insure proper operation. An optional accessory heating coil is provided. Relatively low energy requirements allow 110 volt operation.

Abstract: A self-contained dehydration toilet having an odor-capturing steam and water recovery system. The dehydration toilet comprises a toilet bowl, a dehydration engine connected to the toilet bowl, a steam, gas and vapor conduit from the dehydrating engine, a water supply infusion tank which receives steam, gases and vapor from the dehydration engine to the infusion water tank, an ozone generator which supplies ozone to the water supply, a vacuum pump connected to the infusion water tank, and a power source supplying power to the dehydrating engine, the ozone generator, a control circuit and the vacuum pump. The dehydrating engine has a heating device and helical paddles to aid in the dehydration process. The dehydrating toilet reuses steam and captures odors and vapors with diffusion chambers in the infusion water tank.

Abstract: A drying device for drying a gas comprises parallel cooling branches, at least one of which is in its active state at any given time. A gas-coolant heat exchanger arranged in each of the cooling branches has a first channel through which the gas to be dried flows in the active state of this cooling branch and a second channel which, in the active state of this cooling branch, forms an evaporator for a coolant circulating in at least one coolant circuit. The drying device further comprises an ambient-air input line, an ambient-air output line and an ambient-air conveyor. In the passive state of a respective cooling branch, the ambient-air input line and the ambient-air output line are connected, at least for a time, with this cooling branch by the switching device and the ambient-air conveyor conveys ambient air through the first channel of the gas-coolant heat exchanger arranged in this cooling branch.

Abstract: A method of cleaning air, including a humidifying operation for humidifying the air containing chemical contaminants by a humidifier and taking a part of the gaseous contaminants in the air into excessive moisture to remove the contaminants from the air, and a dehumidifying operation for dehumidifying the humidified air by a condenser and taking the gaseous chemical contaminants remaining, without being removed, in the humidifying operation into condensed water for removal. By using an oblique honeycomb having both front and rear faces and both upper and lower faces disposed in open state, air is led from the front opening part of the oblique honeycomb and water is fed from the upper opening part thereof to one or both of the humidifier and condenser.

Abstract: The invention relates to a method for regulating a compressor installation with at least one compressor element (6) driven by a motor and, in the pressure conduit (11) thereof, a dryer (2) of the type comprising a pressure vessel (24) with a drying zone (3) and a regeneration zone (4), and a rotor (25) continuously rotated in this pressure vessel (24) by a motor (33), which rotor is filled with a regenerable drying agent. A portion of the compressed air is supplied, by means of a branch (15), to the regeneration zone (4) and, after cooling down and separation of the condensed water, is fed back to the pressure conduit (11). The speed of both motors (9, 33) is regulated by a regulation device (13) in function of the pressure in the pressure conduit (11).

Abstract: A washing-drying machine includes an inner tub having a rotating shaft and sustained rotatably in an outer tub suspended elastically in a cabinet, where an agitator disposed rotatably on an inner bottom of the inner tub. The washing-drying machine also includes a motor for driving the inner tub or the agitator and a warm-air-circulating pass having a heat exchanger cooled by a cooling section. The washing-drying machine further includes a controller for controlling processes including washing, rinsing, dehydrating and drying. The cooling section is formed of a water-cooling-section for cooling warm-air in the heat exchanger by supplying water, and an air-cooling-section for cooling an outer wall of the heat exchanger by blowing air. As a result, high dehumidification rate by improving heat-exchange efficiency of the heat can be obtained, and clothes are hardly damaged and electric power and the amount of water consumption can be saved.

Abstract: A drum washing machine, which has a clothes-drying unit with a plurality of heat pipes. The heat pipes recover, during a drying-mode operation of the drum washing machine, heat from high temperature humid air flowing from a water tub, and combine the recovered heat with low temperature dry air flowing from an area around a condensing nozzle, thus saving time and electricity during the drying-mode operation. In the clothes-drying unit, an air duct includes first and second duct parts, having a condensing nozzle installed in the first duct part, and a blower fan and a heater installed in the second duct part. A lower end of the heat pipe is arranged in a lower end of the first duct part, and an upper end of the heat pipe is arranged in an upper end of the first duct part. The heat pipe thus recovers the heat from the air, which flows in the lower end of the first duct part, and combines the recovered heat with the air, which flows in the upper end of the first duct part.

Abstract: A drying unit for removing solvent from moist material, and a method for drying moist material with the drying unit. The unit comprises at least one drying chamber (23) having at least one stand plate (2) for holding vessels (3), which are filled with moist material, or flat layers of moist material, the drying chamber (23) being connected to a condenser (22) via a vapor passage (15), in which sublimed solvent can be separated out, the stand plates (2) being connected to a temperature-controlled heating/cooling circuit, the chamber (23) having heating/cooling plates (4) or (4?) which are connected to a second heat-transfer circuit, wherein the heating/cooling plates (4) or (4?) are substantially thermally isolated from the chamber wall (6).

Abstract: A device for rapidly cooling a semiconductor wafer test/transfer machine and which includes a body which is provided with an interior gas passage one end of which is connected to a source of clean, dry air or other gas by a tubing. In typical application, the body is rested on the cover of a semiconductor wafer test or transfer machine, typically above or adjacent to the chuck or other wafer holder of the machine, with the other end of the gas passage in contact with the cover. The air or gas flowing through the gas passage impinges against the machine cover and rapidly cools the chuck or other wafer holder.

Abstract: A system for separating hydrocarbons from a material which includes a process chamber, a process pan operatively connected to the process chamber and removable therefrom, a blower operatively connected to the process chamber and to a heat source, the blower adapted to force heated air into the process chamber through the material disposed on the process pan, the forced heated air adapted to vaporize hydrocarbons and other contaminants disposed on the material, and at least one condenser operatively connected to the process chamber and adapted to condense the vaporized hydrocarbons and other contaminants is disclosed. Further, a method for separating hydrocarbons from a material which includes passing a stream of heated air over the material to volatilize the hydrocarbons, passing the stream of heated air containing the hydrocarbons through at least one condenser to form liquid hydrocarbons, collecting the liquid hydrocarbons, and recirculating the heated air is disclosed.

Abstract: Heat transfer fluid mixtures and methods of making and using same are presented. The inventive heat transfer fluid mixtures consist essentially of at least one light gas, such as hydrogen, and at least one heavy fluid, such as helium wherein the mixture will not be capable of mixing with air in any proportions to produce a self-sustaining flammable or combustible mixture, or wherein a concentration of hydrogen is sufficient to reduce cost of the mixture to an amount substantially less than cost of pure helium.

Abstract: An aeration apparatus for a combination drier and washer is disclosed, which comprises an air circulation duct connected from one portion of a tub to the other portion for circulating air in the tub; and an aeration means provided in the middle of the air circulation duct for preventing exterior air being introduced to the tub in a drying process, and for aerating exterior air in the tub in an opened state when the drying process is finished. Therefore, in a drying process, a drying space is closed, and when the drying process is finished, exterior air is introduced in a drum, thereby improving a drying efficiency and preventing accidents.

Abstract: A combination closed-circuit washer and drier apparatus having a washing cycle and a drying cycle. The apparatus comprises a unitary housing having a tub and a tumbler within the tub, the tub also having an air inlet and air outlet which allows air to flow through the tub, wherein air flowing from the air inlet is in communication with the tumbler. The apparatus also includes a desiccant recharging system located within the unitary housing having a entrance and an exit, the entrance coupled to the air outlet and the exit coupled to the air entrance, thus allowing a continuous flow of air through the system. The desiccant recharging system also includes a diverting valve that directs the flow of air primarily through the desiccant system in a closed-loop during the wash cycle. The diverting valve alters the air flow between the washing cycle (desiccant regeneration) to the drying cycle (desiccant water adsorption).

Abstract: Apparatus and method for condensing moisture from an air stream. The condensing comprises concentric cylinders having a common wall. The outer cylinder contains a cooling material, such as water, and upon contact therewith, the air stream is cooled and moisture contained therein is condensed.

Abstract: In a washer dryer in which a drum supported by a spider is rotatable in a tub, the rear wall of the tub is contoured such as by providing castellation-like recesses, and water may be fed over this rear wall via a water inlet so that, in a drying mode, when the drum is rotated and moist air is drawn from the drum, the moist air is agitated by being dragged by the rotation of the drum past the tortuous profile over which water is trickled, to promote efficient condensation before the air is heated and returned to the drum in a recirculating path.

Abstract: A vacuum apparatus for industrial hide driers with multiple beds (2) includes a circuit with an open end (17) having arranged in a series: a vapor manifold (7) for each bed; a first condenser (8) inserted in each manifold; a first condensate separator (10) at the output of the various condensers (8); a main vacuum pump (16) to gradually reduce the absolute pressure in the circuit to a first upper value (Ps). A particular feature of the system consists of the fact that it has a secondary aspiration device (19) which is arranged upstream of the main vacuum pump (16) to operate in series to this pump when the first value of the absolute pressure (Ps) is reached, so as to further reduce the pressure of the circuit to a second lower value (Pi). The upper value (Ps) of the absolute pressure is 40 to 100 mbar; the second lower value (P1) of the absolute pressure is 15 to 1 mbar. The device (19) is a high-capacity, low-head blower.

Abstract: This Document is a Continuation in Part of U.S. patent application Ser. No. 09/093,029 filed on Jun. 8, 1998, said invention comprising an apparatus for evaporating water in a mixture of water and solids derived from the organic output of a waste water treatment plant. A low cost source of gaseous heat (as the exhaust from a gas turbine driver in combination with/or alternatively from a stand alone combustor) is used for evaporating said water and safe conditioning said evaporated water vapor after being combined with a portion of the exhaust from said gaseous heat source. The solids portion of said organic output from said waste water treatment plant is segregated and safe conditioned separately. This continuation in part filing supplements said basic reference patent filing by defining a specific heat exchange surface configuration for heat exchanger 17 which minimizes radiation heat losses to atmosphere.

Abstract: A thermal compression plant with heat recovery for vacuum dryers of industrial leathers and similar products with one or more drying chambers (4) each one composed of a heated table (2), on which the products to be dried are laid, and a hermetic cover (3). A circulating fluid in a first closed circuit (6, 7) heats each table and each drying chamber (4) is connected to a second open circuit (14) for the suction and the condensation of the steam generated by the products. The second steam circuit (14) includes at least one vacuum pump (16) of relatively low capacity placed downstream from a condenser and compression means made up by at least one blower (19) with a higher capacity of the one of the vacuum pump (16) able to compress and superheat the steam to a higher temperature to that of the heating fluid of the working tables at continuous running. The condenser (21) uses for refrigeration the heating fluid circulating in the first circuit.

Abstract: A drying apparatus and method of drying is provided for drying a semiconductor member mounted in a carrier that is placed in a processing tank through contact with isopropyl alcohol. An isopropyl alcohol liquid is vaporized in a bottom portion of the processing tank, and the resulting vapor is condensed in its top portion. A heater is disposed so as to heat the inside of the processing tank to keep the inside at a predetermined temperature range in a middle-layer portion, i.e., a drying portion, of the processing tank. The heater is covered with a heat insulating member.

Abstract: A refrigerant is directly contacted to a substrate to be processed that was heated so as to quickly cool the substrate. Thus, the temperature of the substrate is dropped to a predetermined temperature level. The substrate is cooled by a cooling device and cooling water. Thus, the cooling temperature can be accurately controlled. In addition, the substrate can be effectively cooled.

Abstract: An apparatus for drying semiconductor wafers using IPA (Isopropyl Alcohol) vapor includes a first chamber for producing the IPA vapor, and a second chamber connected to the first chamber through an IPA supply line, for receiving the IPA vapor and drying semiconductor wafers using the IPA vapor. With the drying apparatus, the first and second chambers are separated from each other, which allows the process steps of producing the IPA vapor and the drying the wafers to be separately performed. The drying apparatus thus prevents particles from being generated in the second chamber during the drying process. The wafers can be dried without a variation in temperature in the second chamber. The IPA vapor is exhausted from the second chamber by introducing nitrogen into the second chamber. As a result, the IPA vapor in the second chamber is not liquified and thereby leaves no substance to adhere to a contact portion between a wafer carrier and each wafer.

Abstract: A processing apparatus, conveyor and method for processing products or materials, such as food processing equipment or methods, is configured such that the conveyor travels in a generally helical path within a processing chamber to expose products on the conveyor to a gaseous processing media such as heated or cooled air. The conveyor includes gas flow compensation including a plurality of gas flow compensation members which partially block a portion of the surface of the conveyor, preferably toward the exterior of the conveyor in the helical path, to deflect or direct more of the gaseous food processing media away from the less densely distributed products or materials at the exterior of the conveyor caused when the conveyor follows the helical path. The processing media is thus preferably forced in the direction of the more densely distributed products toward the interior of conveyor to uniformly expose product on the conveyor to the processing media.