Recirculation Of Treating Gas Or Vapor Patents (Class 34/77)
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Patent number: 6709499Abstract: An air-routing household appliance includes an improved removable and washable filter in that the filter is of a flexible fiber material and is finished such that it can bind and/or decompose odorous substances. Such a filter can be disposed, in particular, in the closed process-air circuit of a condensation laundry dryer to free laundry of unpleasant odorous substances. The odor filter is produced, in particular, from a textile material and can, therefore, advantageously be cleaned in a washing machine. For the binding of odorous substances, the fibers of the filter can be treated with particles that can bind odorous substances and from which the odorous substances can also be washed out again to regenerate the filter.Type: GrantFiled: December 16, 2002Date of Patent: March 23, 2004Assignee: BSH Bosch und Siemens Hausgeraete GmbHInventor: Harald Moschütz
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Patent number: 6675495Abstract: The invention relates to a process for drying wood, characterized in that it comprises a pressurizing step to place a sealed chamber (1) under a predetermined pressure by injecting or generating saturating steam and maintaining this pressure for a predetermined time interval, while ensuring a forced circulation of air and saturating steam within the chamber, a heating step to heat the wood core and central zone of the wood pieces by emitting microwaves at frequencies ranging between 400 and 2450 MHz, an evacuation step to carry away the liquid exudates from the wood when run down to the bottom of the chamber (1) where they are collected.Type: GrantFiled: August 9, 2002Date of Patent: January 13, 2004Assignee: Valeurs Bois IndustrieInventors: Bernard Dedieu, Abdelaâziz Bouirdéne
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Patent number: 6651357Abstract: Integrated web dryer and regenerative heat exchanger, as well as a method of drying a web of material using the same. The apparatus and method of the present invention provides for the heating of air and the converting of VOCs to harmless gases in a fully integrated manner via the inclusion of a regenerative combustion device as an integral element of the drying apparatus.Type: GrantFiled: January 12, 2001Date of Patent: November 25, 2003Assignee: Megtec Systems, Inc.Inventors: Michael P. Bria, Alan D. Fiers, Andreas C. H. Rühl
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Publication number: 20030200773Abstract: An aeration apparatus for a combination drier and washer is disclosed, which comprises an air circulation duct connected from one portion of a tub to the other portion for circulating air in the tub; and an aeration means provided in the middle of the air circulation duct for preventing exterior air being introduced to the tub in a drying process, and for aerating exterior air in the tub in an opened state when the drying process is finished. Therefore, in a drying process, a drying space is closed, and when the drying process is finished, exterior air is introduced in a drum, thereby improving a drying efficiency and preventing accidents.Type: ApplicationFiled: September 23, 2002Publication date: October 30, 2003Applicant: LG Electronics Inc.Inventors: Kyung-Seop Hong, Young-Hwan Park, Choon-Myun Chung
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Publication number: 20030154622Abstract: A lumber sticker for separating lumber, comprised of an elongated rectangular shaped block with generally rounded-off sides. The lumber sticker has channels cut into the top and bottom surfaces, traversing the width at substantially a diagonal. The channels are cut in an arcuate concave shape or a V-shape, and in one embodiment, the channels are cut at 45 degree angles relative to the lengths of the surfaces such that the channels of the top surface are perpendicular to the channels of the bottom surface. In yet another embodiment, the deepest point of each channel is at the midpoint of each channel. The point of contact between the lumber sticker and the wood panels is a substantially flat plateau between each channel.Type: ApplicationFiled: February 18, 2003Publication date: August 21, 2003Inventor: James F. Aaron
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Publication number: 20030115771Abstract: There is provided a method for drying wood which is capable of efficiently drying wood in a shorter period of time, by maintaining the concentration of a combustion gas contained in a drying room atmosphere for use in drying the wood to a high value and by maintaining the pressure of the drying room atmosphere to a high value. According to the method, wood fuels such as waste wood are put into a combustion chamber 4a provided in a lower area of a combustion gas generating furnace 4 and then the wood fuels are burned, followed by introducing the high-temperature combustion gas generated by the burning into an upper area of the drying room 1 housing the green wood, to thereby thermally dry the wood by the combustion gas. In this method, the thermal drying of the wood is carried out by maintaining the concentration of the combustion gas present in the drying room atmosphere to the high value and by maintaining the pressure of the drying room atmosphere to the high value.Type: ApplicationFiled: October 21, 2002Publication date: June 26, 2003Inventor: Sachio Ishii
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Patent number: 6578591Abstract: The present invention relates to a dishwasher with enhanced drying performance without using a fan. Water contained in the dishwasher is circulated preferably by means of one of the pumps in the machine (circulation or discharge pump) and through a jet pump placed in the dishwasher in such a manner that the air intake opening is in communication with one of the wash tub surfaces. Water within the dishwasher accelerates due to the kinetic energy acquired during this circulation and its pressure drops locally to a value below the atmospheric pressure. Due to this reduced pressure, water vapour and air from the washtub is suctioned from the tub.Type: GrantFiled: June 4, 2001Date of Patent: June 17, 2003Inventors: Semsettin Eksert, Gökhan Özgürel, Ufuk Askin
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Publication number: 20030089138Abstract: To provide a user-friendly drum type washing/drying machine with which loading/unloading of laundry is easy, in which a large outer tub and a housing regulated in size are realized by using a space in the housing effectively. In the drum type washing/drying machine, a drum 23, which rotates about an axis C extending along the lateral direction, is enclosed in the outer tub 20 disposed in the housing. The housing has an opening formed on the top and leads to a throw-in opening for loading the laundry in the drum 23, the throw-in opening formed on the peripheral wall of the drum 23. A main shaft 24 positioned on the axis C is supported by a first bearing and driven by a direct drive type motor 30. A heat exchanger 42 to which a water pipe for supplying cooling water is connected and a drying air channel including a heater 48 are disposed on the side of the outer tub 20 opposite to the side on which the main shaft 24 and the motor are disposed.Type: ApplicationFiled: November 4, 2002Publication date: May 15, 2003Applicant: SANYO ELECTRIC CO., LTD.Inventors: Tamotsu Kawamura, Yorihisa Funada, Harumi Takeuchi, Kenji Nakagawa, Satoshi Nakamura, Takashi Fukui
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Publication number: 20020178604Abstract: The apparatus serves for drying solid insulation of an electrical device (40) by means of the heat of condensation emitted by the vapor of a solvent. It has an evacuable autoclave (10) accommodating the solid insulation, as well as an evaporator (20) producing solvent vapor, an evacuable condenser (50), connected to the autoclave (10), for condensing a solvent led out of the autoclave (10) and a vapor mixture containing water, and a heat recuperator (30). In the heat recuperator (30), the solvent acts as heat-absorbing medium and the vapor mixture as heat-emitting medium.Type: ApplicationFiled: March 27, 2002Publication date: December 5, 2002Inventors: Paul Gmeiner, Peter Keller
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Patent number: 6434857Abstract: A combination closed-circuit washer and drier apparatus having a washing cycle and a drying cycle. The apparatus comprises a unitary housing having a tub and a tumbler within the tub, the tub also having an air inlet and air outlet which allows air to flow through the tub, wherein air flowing from the air inlet is in communication with the tumbler. The apparatus also includes a desiccant recharging system located within the unitary housing having a entrance and an exit, the entrance coupled to the air outlet and the exit coupled to the air entrance, thus allowing a continuous flow of air through the system. The desiccant recharging system also includes a diverting valve that directs the flow of air primarily through the desiccant system in a closed-loop during the wash cycle. The diverting valve alters the air flow between the washing cycle (desiccant regeneration) to the drying cycle (desiccant water adsorption).Type: GrantFiled: July 5, 2000Date of Patent: August 20, 2002Assignee: SmartClean JVInventors: Robert David Anderson, Matthew David Anderson
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Publication number: 20020100298Abstract: A pulsator type washing machine having a washing function and a drying function in one unit, includes a first tub, a second tub disposed in the first tub, and a structure operatively coupled with at least one of the first and second tubs to receive air from the second tub, dehumidify the air and recirculate the dehumidified air back into the second tub to dry laundry in the second tub during a drying operation of the washing machine.Type: ApplicationFiled: January 23, 2002Publication date: August 1, 2002Inventors: In Chul Jeong, Mu Yong Choi, Kyeong Hwan Kim, Bo Young Chang
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Patent number: 6393727Abstract: A system for drying wood particles and a method of operation wherein the wood particles are introduced into a dryer and contacted directly with a combustion system exhaust stream. VOC's emitted from the wood particles during drying are recycled to the combustion system for destruction. In one method according to the invention, a portion of the VOC-laden dryer exhaust stream is recycled to the dryer.Type: GrantFiled: September 29, 2000Date of Patent: May 28, 2002Assignee: Louisiana-Pacific CorporationInventors: Keith David Seelig, Robert Carl Middlesforf, Wu-Hsiung Ernest Hsu, Jim Evensen
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Patent number: 6389772Abstract: A universal building unit comprising a plurality of members connected to each other by at least one adjustable plate. There is also at least one panel connected to the plurality of members. In this case, the plurality of members, the adjustable plate, and the panels all connect together to form a universal building unit that can be repeatedly constructed and combined with adjacent building units to form a building structure. These building units also contain a heating and cooling system for heating and cooling each unit within the structure. In addition, these units can be combined in any manner to create stairs, walls, doors, fixed and movable partitions, windows, roofs, or any other type of building component. These building units comprise a series of simple, easy to install fittings and steel profiles to create framing for any type of building.Type: GrantFiled: May 3, 2001Date of Patent: May 21, 2002Inventors: William B. Gleckman, Jacques Racine
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Publication number: 20020038521Abstract: A method and an appliance are disclosed for the non-thermal drying of articles, in particular motor vehicle bodies, freshly painted with a water-based paint. The articles to be dried are subjected to dry air by forced convection in a drying tunnel and the moisture-laden air is dried in an air drying device by condensation to a specific target value of absolute residual moisture. So that fluctuations in the incidence of moisture can be leveled out with a low degree of inertia, with the high condensation performance remaining unchanged, only a fraction of the circulated air which is adapted in size, as required, is dried in the air drying device to a residual moisture markedly below the circulating-air target moisture, and the remaining untreated part of the circulated air is led back into the drier housing after being intermixed with the dried part-air stream.Type: ApplicationFiled: June 21, 2001Publication date: April 4, 2002Inventor: Hans-Joachim Speck
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Patent number: 6321460Abstract: A drying apparatus is disclosed. The drying apparatus comprises a drying housing, a heat pump unit and a heat pump piping. The interior of the drying housing is divided into a drying chamber and a circulation passage by a partition wall. The circulation passage is divided into upper and lower passages by a partition plate. Dampers are respectively mounted on the partition plate and the upper and lower portions of the outside wall of the circulation passage, and a heated air inlet and an air outlet are respectively formed on the upper and lower portions of the partition wall. The heat pump unit is disposed with its condenser situated in the heated air inlet and its evaporator situated in the atmosphere. The heat piping is disposed with its condensing portion situated in front of the sucking side of the evaporator and its evaporating portion situated in front of the heated air outlet in the drying chamber.Type: GrantFiled: August 9, 2000Date of Patent: November 27, 2001Inventor: Keum Su Jin
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Patent number: 6279357Abstract: In a washer dryer in which a drum supported by a spider is rotatable in a tub, the rear wall of the tub is contoured such as by providing castellation-like recesses, and water may be fed over this rear wall via a water inlet so that, in a drying mode, when the drum is rotated and moist air is drawn from the drum, the moist air is agitated by being dragged by the rotation of the drum past the tortuous profile over which water is trickled, to promote efficient condensation before the air is heated and returned to the drum in a recirculating path.Type: GrantFiled: June 16, 1999Date of Patent: August 28, 2001Assignee: General Domestic Appliances LimitedInventors: Laurence P Didlick, David Cupit
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Patent number: 6212789Abstract: There is provided a semiconductor device manufacturing system capable of carrying out resist stripping or surface pre-treatment of a substrate by use of a gas such as chlorosulfuric acid with high reactivity The manufacturing system comprises a process vessel 101 formed integrally of a process chamber 1 for treating respective surfaces of substrates 202 with a chemical vapor and a chemical storage chamber 2 for storing chemical for generating the chemical vapor, and a chemical heating means 5 for heating the chemicals stored in the chemical storage chamber 2 to evaporation.Type: GrantFiled: August 11, 1998Date of Patent: April 10, 2001Assignees: Canon Sales Co., Inc., Semiconductor Process Laboratory Co., Ltd.Inventors: Toshio Kato, Noboru Tokumasu, Takayoshi Azumi
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Patent number: 6193774Abstract: A reflow solder convection oven with a passive gas decontamination subsystem. This subsystem includes an intake duct in fluid communication with the gas outtake of a heating zone of the oven, at least one decontamination duct connected on one end to the intake duct, the decontamination duct including a plurality of collision baffles therein for collecting contaminants from the gas in the oven, and an outtake duct connected to the decontamination duct on an end opposite the intake duct and in fluid communication on an opposite end with the gas intake of the heating zone.Type: GrantFiled: February 19, 1999Date of Patent: February 27, 2001Assignee: Conceptronic, Inc.Inventors: Kerem Durdag, Tom Sherwin, Robert Silveri
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Patent number: 6178659Abstract: A vacuum apparatus for industrial hide driers with multiple beds (2) includes a circuit with an open end (17) having arranged in a series: a vapor manifold (7) for each bed; a first condenser (8) inserted in each manifold; a first condensate separator (10) at the output of the various condensers (8); a main vacuum pump (16) to gradually reduce the absolute pressure in the circuit to a first upper value (Ps). A particular feature of the system consists of the fact that it has a secondary aspiration device (19) which is arranged upstream of the main vacuum pump (16) to operate in series to this pump when the first value of the absolute pressure (Ps) is reached, so as to further reduce the pressure of the circuit to a second lower value (Pi). The upper value (Ps) of the absolute pressure is 40 to 100 mbar; the second lower value (P1) of the absolute pressure is 15 to 1 mbar. The device (19) is a high-capacity, low-head blower.Type: GrantFiled: August 20, 1997Date of Patent: January 30, 2001Assignee: Officine di Cartigliano S.p.A.Inventor: Antonio Corner
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Patent number: 6165277Abstract: A method for rinsing and drying semiconductor wafers. The method includes placing a semiconductor wafer into a chamber of a rinse/dry apparatus, directing rinse liquid over the semiconductor wafer, and moving a portion of the chamber, such as a portion of a wall of the chamber, substantially vertically relative to the remainder of the chamber to remove rinse liquid therefrom. The method may also include directing a drying fluid onto a surface of the rinse liquid to facilitate drying of the rinsed semiconductor wafers as rinse liquid is being removed from the chamber.Type: GrantFiled: August 13, 1999Date of Patent: December 26, 2000Assignee: Micron Technology, Inc.Inventor: Barry K. Florez
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Patent number: 6161312Abstract: A drying machine includes a first chamber, a second chamber, a first control device mounted in the first chamber and including a first main condenser, a first secondary condenser, a first main evaporator, and a first secondary evaporator, a second control device mounted in the second chamber and including a second main condenser, a second secondary condenser, a second main evaporator, and a second secondary evaporator, and a common compressor supplying a refrigerant to the first control device and to the second control device. In such a manner, when the first control device performs a cycle to increase the temperature in the first chamber, the second control device performs a cycle to decrease the temperature in the second chamber, and when the first control device performs a cycle to decrease the temperature in the first chamber, the second control device performs a cycle to increase the temperature in the second chamber.Type: GrantFiled: June 1, 1999Date of Patent: December 19, 2000Inventor: Pen-Ta Yang
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Patent number: 6158141Abstract: An apparatus and method for drying semiconductor substrates to dry about 50 semiconductor wafers by evaporating an organic solvent and blowing the evaporated organic solvent onto these semiconductor wafers through a nozzle, comprises the evaporate organic solvent being blown onto the semiconductor wafers from a direction aslant by an angle from 20.degree. to 50.degree. from a vertical direction toward the semiconductor wafers. At this time, the initial spray amount of the evaporated organic solvent is not less than 0.8 cc/second and not more than 1.5 cc/second, additionally, the amount of the organic solvent used for drying is not less than 70 cc/batch and not more than 200 cc/batch.Type: GrantFiled: May 4, 1999Date of Patent: December 12, 2000Assignees: Sony Corporation, Tokyo Electron LimitedInventors: Kazumi Asada, Hayato Iwamoto, Teruomi Minami
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Patent number: 6142743Abstract: A wet gas compression device combining the following stages: a separation stage providing a gas phase and a liquid phase; a conversion stage for converting a gas phase and a liquid phase; a conversion stage for converting the liquid phase provided by the separation stage to a vapor phase by heat exchange; a compression stage for compressing the gases from the separation stage and the conversion stage and for providing a portion of gas for use in the heat exchange of the compression stage.Type: GrantFiled: January 28, 1999Date of Patent: November 7, 2000Assignee: Institut Francais du PetroleInventor: Yves Charron
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Patent number: 6141518Abstract: A carrier recovery apparatus of a liquid electrophotographic printer includes a drying roller rotating in contact with a photoreceptor belt, for absorbing a liquid carrier from the photoreceptor belt, a heating roller for heating the drying roller, in contact therewith, and evaporating the absorbed liquid carrier, a manifold surrounding the drying roller and the heating roller, for accommodating the evaporated gas carrier, a sealing blade disposed in a gap between the drying roller and the manifold, a condenser for receiving the gas carrier from the manifold and condensing the same, a supply line for supplying the gas carrier in the manifold to the condenser, and a return line for supplying again residual gas carrier which is not condensed in the condenser to the manifold, wherein the gas carrier is condensed while circulating in a closed loop formed by the manifold, the supply line, the condenser and the return line.Type: GrantFiled: May 12, 1999Date of Patent: October 31, 2000Assignee: Samsung Electronics Co., Ltd.Inventors: Seong-soo Shin, Un-ho Paik
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Patent number: 6134807Abstract: A drying processing apparatus for supplying a dry gas to a processing chamber 35, which houses therein semiconductor wafers W, to dry the semiconductor wafers W, including a heater 32 for heating N.sub.2 gas serving as a carrier gas; a vapor generator 34 for making IPA misty by using the N.sub.2 gas heated by the heater 32 and for heating the IPA to produce the dry gas; and a flow control element 36 for supplying a predetermined rate of N.sub.2 gas to the processing chamber 35. Thus, it is possible to improve the efficiency of heat transfer of N.sub.2 gas, and it is possible to increase the amount of produced IPA gas and decrease the time to produce IPA gas. In addition, it is possible to prevent the turbulence of atmosphere in the processing chamber 35 after the drying processing is completed.Type: GrantFiled: May 15, 1998Date of Patent: October 24, 2000Assignees: Tokyo Electron Limited, Motoyama Eng. Works, Ltd.Inventors: Mitsuaki Komino, Osamu Uchisawa
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Patent number: 6128830Abstract: Disclosed herein is an apparatus and method for drying solid articles such as semiconductor wafers. In one embodiment, the dryer comprises a process tank and a drying fluid supply system. The process tank includes a plurality spray nozzles to spray a non-flammable drying fluid to wet surfaces of the article for drying without the necessity of heat or other external means. The drying fluid comprises a non-flammable, environmentally compatible, and a non-hazardous fluid including a drying agent of (hydrofluoroether) HFE and a surfactant of isopropyl alcohol (IPA). Even without the benefit of heating, little if any solution or static charge remains after drying. The drying apparatus includes a drying fluid supply system for providing the drying fluid to the plurality of spray nozzles.Type: GrantFiled: May 15, 1999Date of Patent: October 10, 2000Assignees: Dean Bettcher, Christopher KubinskiInventors: Dean Bettcher, Christopher Kubinski
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Patent number: 6108928Abstract: A vacuum dryer and a method of drying a semiconductor device using the same are provided. In the present invention, a vacuum dryer using isopropyl alcohol vapor, including an outer bath, an inner bath, a main water supply line, a supplementary water supply line, an inner bath drain line, and an outer bath drain line, is provided. After cleaning the inside of the vacuum dryer, the inner bath is filled with the supplied deionized water and the deionized water is continuously overflowed. Then, the semiconductor substrate is loaded into the inner bath of the vacuum dryer to which the deionized is continuously overflowed. The loaded semiconductor substrate is dried by supplying the isopropyl alcohol vapor to the inner bath into which the semiconductor substrate is loaded.Type: GrantFiled: July 14, 1998Date of Patent: August 29, 2000Assignee: Samsung Electronics Co., Ltd.Inventors: Chan-geun Park, Jong-jae Lee
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Patent number: 6094835Abstract: A method and apparatus for enhancing the evaporation and moisture removal from moisture laden products in a dryer. The invention combines the inventor's prior U.S. Pat. No. 4,719,761, with a rotating drying drum having filters at the output area, and a separate pump for allowing condensation from a chilled coil to drain off, while a desiccant formed from pads or a rotatable wheel is part of a continuous feedback loop for recycling moisture. A condenser is positioned between the desiccant and the drying drum and is used as a heat exchanger for both the air inlet to the drum and the air outlet from the drum. Additionally, the evaporator drain pipe can form an additional heat exchanger when the pipe is used in the pathway of air passing from the desiccant to the evaporator coil. The invention is useful for drying various items such as clothes, agricultural products, wood, vegetables, fruit and electric components such as wafers.Type: GrantFiled: December 14, 1998Date of Patent: August 1, 2000Assignee: University of Central FloridaInventor: Charles J. Cromer
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Patent number: 6095167Abstract: An apparatus for rinsing and drying semiconductor wafers. The apparatus includes side walls, end walls and a base. One embodiment of the apparatus includes a rigid side and end walls. In another embodiment of the apparatus, at least a portion of the side wall is collapsible. In yet another embodiment of the apparatus, at least a portion of the wall has a tambour configuration, facilitating bending or rolling of the wall beneath the base. The apparatus includes an assembly for injecting a rinse liquid into the chamber. The side walls, end walls, and base form a chamber configured to receive at least one semiconductor wafer. Rinse liquid can be directed into the chamber, over each semiconductor wafer therein to rinse each semiconductor wafer. At least a portion of a side wall can be lowered substantially vertically to permit rinse liquid to flow out of the chamber. The apparatus also includes an assembly for injecting a drying fluid into the chamber.Type: GrantFiled: July 21, 1999Date of Patent: August 1, 2000Assignee: Micron Technology, Inc.Inventor: Barry K. Florez
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Patent number: 6076271Abstract: A garbage disposer for deodorizing and drying of garbage. A processing tank containing garbage is heated through the implementation of a heater, and thereby the temperatures in the processing tank and the heating chamber are raised and the water contained in the garbage is evaporated. When a predetermined period of time has passed, from the start of the heating of the processing tank, a fan and heater are prompted into operation and the gas in the heating chamber, which contains a large quantity of steam, flows into a condensing section where the gas is cooled as it flows through the fin tube and the dew point of the gas is lowered; and the steam contained in the gas is condensed into water. The remaining gas is then returned to the heating chamber through a returning pipe, where the gas is heated to a high temperature. The condensed water is collected in a condensing section and the collected water flows into a discharge pipe whereby the water is discharged to the outside of the garbage disposal.Type: GrantFiled: December 9, 1998Date of Patent: June 20, 2000Assignee: Paloma Industries, Ltd.Inventors: Toshihiro Kobayashi, Katsusuke Ishiguro
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Patent number: 6026588Abstract: In a vapor drying system, solvents such as isopropyl alcohol (IPA) are boiled and condensed to provide a means of removing water and other contamination from process parts loaded into the equipment. The parts enter the apparatus via an automated lift assembly. Upon entering the vapor zone, solvent condenses on the parts and fixtures due to a temperature differential, displacing the contaminants. This condensate/contaminant waste stream gravity drains to a buffer tank below via a sloped, temperature-controlled drip tray. After vapor condensation on the parts ceases, drying is accomplished using superheated vapors formed in a stabilized zone generated by one or more offset boil sumps and separate vapor heat exchangers. Any liquid solvent remaining on the parts is flash-dried in the vapor zone, so that parts emerge clean and dry. The invention incorporates a computer-implemented PLC to control process parameters, cover mechanism, transport mechanism, safety features during operating, idle and standby conditions.Type: GrantFiled: August 14, 1997Date of Patent: February 22, 2000Assignee: Forward Technology Industries, Inc.Inventors: Robert H. Clark, Anthony K. Green, Steven E. Sykes
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Patent number: 5993500Abstract: Volatile organic components are controlled in electronic component assembly processes to prevent deposits on finished circuit boards and the like. The method of controlling the components in a machine having a plurality of enclosed heating zones followed by at least one cooling zone containing gas, and a conveyor for passing circuit boards therethrough on a conveyor path, comprises the steps of removing a portion of gas from at least one of the heating zones, cooling and filtering the portion of gas remote from the heating zones and the cooling zone to condense at least some of the volatile components in the portion of gas, and returning the cooled and filtered portion of gas to at least one other zone of the heating zones and the cooling zone.Type: GrantFiled: October 16, 1997Date of Patent: November 30, 1999Assignee: Speedline Technololies, Inc.Inventors: Joel Brad Bailey, Donald P. Cudmore, Tadeusz Formella, Sabi Avramescu, Anthony Prem
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Patent number: 5985041Abstract: A method for rinsing and drying semiconductor wafers. The method includes placing a semiconductor wafer into a rinse/dry apparatus, directing rinse liquid over the semiconductor wafer, and lowering at least a portion of a side wall of the rinse/dry apparatus to remove rinse liquid therefrom.Type: GrantFiled: April 26, 1999Date of Patent: November 16, 1999Assignee: Micron Technology, Inc.Inventor: Barry K. Florez
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Patent number: 5966837Abstract: The device relates to a wood drying plant comprising a wood drying device and a purifying device which is arranged to receive a drying gas from the wood drying device, the drying gas comprising water steam and volatilized organic components such as terpenes, and to purify the drying gas from organic components and to recover the latter. The purifying device comprises at least one condenser which is arranged to separate relatively difficultly volatilized components containing organic components and relatively easily volatilized components. The purifying device also comprises a separating device which is arranged to separate said organic components and a rest material from the relatively difficultly volatilized components. The purifying device also comprises a transferring device which is arranged to transfer organic components present in the rest material to the drying gas introduced in the purifying device.Type: GrantFiled: May 6, 1997Date of Patent: October 19, 1999Assignee: ABB Flakt ABInventors: Stefan Backa, Ulf Persson
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Patent number: 5960558Abstract: A in-bin grain drying system is the subject of the present invention. A boiler having a variable capacity Btu output heats an ethylene glycol/water heating fluid which is circulated through hydronic coils. Fans move ambient air through the hydronic coils and the dry heated air is circulated to the plenum of the grain bin. The air which enters the bin is less moisture laden than in other drying systems, particularly those which are heated by propane flame. The temperature of the returning fluid is sensed and a fuel supply controller adjusts the amount of fuel supplied to the boiler and thus the Btu output. Accordingly the desired temperature of the air entering the plenum chamber is constant regardless of ambient outside temperature or relative humidity.Type: GrantFiled: June 19, 1998Date of Patent: October 5, 1999Inventor: Pierre Bourgault
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Patent number: 5943880Abstract: A refrigerant is directly contacted to a substrate to be processed that was heated so as to quickly cool the substrate. Thus, the temperature of the substrate is dropped to a predetermined temperature level. The substrate is cooled by a cooling device and cooling water. Thus, the cooling temperature can be accurately controlled. In addition, the substrate can be effectively cooled.Type: GrantFiled: February 13, 1998Date of Patent: August 31, 1999Assignee: Tokyo Electron LimitedInventor: Kiyohisa Tateyama
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Patent number: 5937535Abstract: A dryer (10) for printed textiles and substrates is disclosed having a plurality of infrared-based sensors (60) therein for monitoring the temperature of the products as opposed to the ambient environment. Each sensor (60) is positioned within a projecting sensor housing (55,58). The sensor housing (55,58) has an annular chamber (70) to protect and cool the sensor (60). A chilling/dehumidifying system (100) is also disclosed that incorporates a dehumidifier (110) and, humidity monitors (160).Type: GrantFiled: October 15, 1996Date of Patent: August 17, 1999Assignee: M&R Printing Equipment, Inc.Inventors: Richard C. Hoffman, Jr., Laurence A. Iaccino, Mariusz Switalski
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Patent number: 5926968Abstract: A wood drying system to eliminate the discharge of liquid kiln water includes a kiln which is heated to dry a batch of wood, a basin to collect the water driven from the wood, and an evaporator in which the collected water is converted into steam. The steam is provided to the kiln to balance the drying and alleviate the splitting, warping, etc. caused by over drying. The steam is ultimately vented harmlessly into the atmosphere to effectively eliminate any discharge of the kiln water as a liquid.Type: GrantFiled: April 17, 1998Date of Patent: July 27, 1999Assignee: Georgia-Pacific CorporationInventor: George E. Gipson
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Patent number: 5913981Abstract: A method and apparatus for rinsing and drying semiconductor wafers. The apparatus includes side walls, end walls and a base. At least a portion of the wall descends relative to the base to facilitate the flow of liquid from the chamber. One embodiment of the apparatus includes a rigid side and end walls. In another embodiment of the apparatus, at least a portion of the side wall is collapsible. In yet another embodiment of the apparatus, at least a portion of the wall has a tambour configuration, facilitating bending or rolling of the wall beneath the base. The apparatus includes an assembly for injecting a rinse liquid into the chamber. The apparatus also includes an assembly for injecting a drying fluid into the chamber. The method includes placing a semiconductor wafer into the rinse/dry apparatus, directing rinse liquid over the semiconductor wafer, and lowering a side wall of the rinse/dry apparatus to remove rinse liquid therefrom.Type: GrantFiled: March 5, 1998Date of Patent: June 22, 1999Assignee: Micron Technology, Inc.Inventor: Barry K. Florez
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Patent number: 5911486Abstract: A combination product cooling and flux management apparatus is mounted above a reflow soldering oven. The apparatus has a sealed housing with four openings: an ambient air inlet, an ambient air outlet, a recirculating gas inlet and a recirculating gas outlet. The recirculating gas blower is mounted in a first end of the housing and draws air into the recirculating gas inlet, through a recirculating gas side of a gas-to-gas heat exchanger and out the recirculating gas outlet, where it is recirculated through a product cooling chamber and back into the recirculating gas inlet. The ambient air blower is mounted in a second end of the housing and draws air into the ambient air inlet, through an ambient air side of the gas-to-gas heat exchanger and out the ambient air outlet to the surrounding atmosphere.Type: GrantFiled: February 26, 1997Date of Patent: June 15, 1999Assignee: Conceptronic, Inc.Inventors: Stephen J. Dow, Robert S. Silveri, Omer Kerem Durdag, Thomas A. Sherwin, Mark O. Beaupre
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Patent number: 5899001Abstract: A system adapted to dry microelectronic, optical or other critical parts which in the course of their processing are rendered wet and become contaminated unless fully dried. The system includes an upright drying chamber having an inlet at its lower end and an outlet at its upper end, the parts to be dried being supported in a work zone between the inlet and outlet. Coupled to the inlet of the drying chamber is an input chamber having a blower therein which blows heated gas into the drying chamber through a filter unit covering the inlet thereto The blower creates a negative pressure in the input chamber and a positive pressure in the drying chamber in which the filtered heated gas acts to evaporate moisture from the parts in the work zone.Type: GrantFiled: May 19, 1997Date of Patent: May 4, 1999Inventor: Howard M. Layton
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Patent number: 5884640Abstract: A drying apparatus 20 for removing residual liquid from a substrate surface comprises a vapor chamber 25 having a vapor distributor 30 for introducing vapor into the chamber. The drying apparatus 20 further comprises a fluid system 35 comprising (i) a reservoir 40, (ii) a fluid dispenser 45 for introducing fluid into the reservoir, and (iii) a fluid level adjuster 50 for lowering a fluid surface level in the reservoir 40. A multi-point holder 62 is used for holding the substrate 55 at different holding points 63 on the substrate, while the fluid surface level is lowered relative to the substrate, so that residual liquid flows off the substrate surface without intersection of the lowering fluid surface level with holding points 63 on the substrate. The drying apparatus 20 dries substrates 55 substantially without forming stains or streaks, or causing contamination or liquid residue to remain on the substrate 55.Type: GrantFiled: August 7, 1997Date of Patent: March 23, 1999Assignee: Applied Materials, Inc.Inventors: Boris Fishkin, John S. Hearne, Robert B. Lowrance
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Patent number: 5864964Abstract: A longitudinal continuous kiln (1) for drying and vulcanizing rubber profiles includes a lower chamber (3), provided with a conveying belt (11), and an upper chamber (2), carrying hot air. A plurality of convectors (8) heated by the hot air of the upper chamber (2) are arranged aligned inside the upper chamber (2), each of the plurality of convectors furnished with a diffusing nozzle (9). A conduit with a plurality of unitary derivations (7) branched from the conduit (6) are connected to each of the plurality of convectors (8). Pressurized hot air, heated in the plurality of convectors, is delivered through the conduit (6) and is directed toward the lower chamber (3) for purposes of drying and vulcanizing rubber profiles (10).Type: GrantFiled: March 17, 1997Date of Patent: February 2, 1999Inventor: Amelia Gomez Barragan
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Patent number: 5862605Abstract: Heat can be supplied effectively to a porous member of a vaporizer apparatus so that a vaporizing operation can be carried out smoothly and efficiently. The vaporizer apparatus includes a vaporizer section having a porous member including a liquid receiving surface and a vapor discharge surface. A feed supply section supplies a liquid feed material to the liquid receiving surface of the porous member. A heating medium passage is in thermal contact with the porous member. A heating medium supply system flows a heating medium of a temperature higher than a vaporization temperature of the liquid feed material through the heating medium passage.Type: GrantFiled: May 22, 1997Date of Patent: January 26, 1999Assignee: Ebara CorporationInventors: Kuniaki Horie, Naoaki Ogure, Yukio Fukunaga, Akihisa Hongo
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Patent number: 5852880Abstract: A method for drying wood by placing the wood in a dehydration chamber in which the temperature, humidity and pressure are controlled. Air and or gasses are circulated in the chamber to wick away moisture while the wood remains frozen. Both the internal temperature and the circulating air are kept below freezing during the drying process. Atmospheric pressure is manipulated to enhance drying and may be either increased or reduced. Exposure to the volume of dry air (air with zero percent humidity) varies with the drying process and depends on the species, the quantity of wood to be dried and the initial moisture content of the material.Type: GrantFiled: May 7, 1997Date of Patent: December 29, 1998Inventor: Jack B. Harrison
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Patent number: 5752326Abstract: Apparatus for drying articles, particularly people, comprises a cubicle defining a drying space and one or more air impellers arranged to produce an air flow within the drying space having a swirling or vortex motion. Preferably the air is recirculated, and the recirculated air is treated, for example, heated, dried and cleaned.Type: GrantFiled: September 25, 1996Date of Patent: May 19, 1998Inventor: Brian Trim
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Patent number: 5752532Abstract: This invention pertains to a substrate cleaner and dryer or a dryer alone, and in particular, to an improved method of isopropyl alcohol (IPA) vapor drying having "closed loop" processing and capability to process extremely large substrates. The invention uses an inert gas, typically nitrogen (N.sub.2) or argon (Ar), as a process gas for carrying the vapor of a drying fluid in a "closed loop" cycle through a process vessel. The carrier gas and is pumped through a vapor generator and the process vessel in a rapid "closed loop" manner with extremely pure IPA vapor. Various embodiments employ the invention including two different vapor drying methods, a water rinse and vapor dry method and a solvent clean and vapor dry method. In either the water rinse and vapor dry method and a solvent clean and vapor dry method rinse water or cleaning fluid is rapidly drained in an unimpeded manner from the vessel while the process vessel is vented.Type: GrantFiled: September 26, 1996Date of Patent: May 19, 1998Inventor: Robert S. Schwenkler
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Patent number: 5711086Abstract: Apparatus for continuous drying of moist materials in superheated steam comprises a drying enclosure 10, open-ended inlet and outlet ducts 11, 12 communicating with the enclosure, and conveyors 13, 14, 15 for conveying the material to be dried along the inlet duct, through the enclosure and along the outlet duct. Superheated steam is generated in the enclosure from the moisture in the material 19 being dried by circulating the initial gas within the enclosure between a heat source 23 and the material, and/or by the injection into the enclosure of superheated steam from an external source. The inlet duct 11 and outlet duct 12 both extend downwardly from the enclosure 10 and a vent duct 22 from the enclosure has an outlet 26 normally at a level midway along the two ducts. In use, superheated steam tending to pass downwardly along the ducts meets external air tending to pass upwardly along the ducts and forms within each duct a temperature and density differential stratification layer 21.Type: GrantFiled: February 21, 1996Date of Patent: January 27, 1998Assignee: Heat-Win LimitedInventor: Thomas John Stubbing
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Patent number: 5687490Abstract: A method for drying wood by placing the wood in a dehydration chamber in which the temperature, humidity and pressure are controlled. Air and or gasses are circulated in the chamber to wick away moisture while the wood remains frozen. Both the internal temperature and the circulating air are kept below freezing during the drying process. Atmospheric pressure is manipulated to enhance drying and may be either increased or reduced. Exposure to the volume of dry air (air with zero percent humidity) varies with the drying process and depends on the species, the quantity of wood to be dried and the initial moisture content of the material.Type: GrantFiled: August 1, 1996Date of Patent: November 18, 1997Inventor: Jack B. Harrison
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Patent number: 5680711Abstract: A system wherein air moves in a primary path over materials to be processed and wherein at least a portion of the air moves in a supplemental path for processing the air. Such system comprises a primary chamber of air for receiving material to be processed by a flow of air. The primary chamber has an air supply opening and an air return opening. A secondary chamber is provided for receiving air to be processed in a flow of air. The secondary chamber has an air supply opening and an air return opening. The air supply openings of the primary chamber are in flow communication with the air return opening of the secondary chamber and with the air return opening of the primary chamber being in flow communication with the air supply opening of the secondary chamber. The secondary chamber has a first path and a second path. A heat exchanger extends between the first path and the second path.Type: GrantFiled: March 1, 1996Date of Patent: October 28, 1997Inventor: Jose Moratalla