Means To Preheat Slides Or Film Patents (Class 353/53)
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Patent number: 11598916Abstract: An optical light package includes an optical output lens, an optical filter located thereunder and between the output lens and LEDS, a tray of LEDs arrayed on a stage mounted on a linear comb based MEMS device that is distributed in such a way that the stage is movable, and a driver that controls movement of the stage.Type: GrantFiled: August 25, 2020Date of Patent: March 7, 2023Inventor: Matthew E. Ward
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Patent number: 10234091Abstract: A ceiling mountable LED light fixture is described and wherein at least two sets of LED's of different correlated color temperatures (CCT) are mounted in its housing. The LED light fixture is adapted to be removably secured in a housing mounting hole in a ceiling sheeting material. A cable is secured to the light fixture to supply drive current to the LED sets. A toggle switch is mounted in the cable in close proximity to the light fixture. The cable also has a predetermined length and is also secured at a far end to a driver circuit mounted in a driver housing. The driver housing is positioned behind the ceiling sheeting material spaced from the housing mounting hole.Type: GrantFiled: April 27, 2018Date of Patent: March 19, 2019Inventor: Adam Chaimberg
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Patent number: 10054849Abstract: A light source device includes: a base substrate; a plurality of light emitting elements disposed on the base substrate along each of an X-direction and a Y-direction crossing the X-direction; and a first polarity terminal and a second polarity terminal for supplying power to the plurality of light emitting elements. The first polarity terminal and the second polarity terminal project from one side of the base substrate in the X-direction as viewed in a Z-direction orthogonal to the X-direction and the Y-direction.Type: GrantFiled: May 9, 2017Date of Patent: August 21, 2018Assignee: SEIKO EPSON CORPORATIONInventor: Chigusa Takagi
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Patent number: 9829714Abstract: An illumination module for a display device is disclosed. The illumination module has a principal optical axis. The illumination module includes a light source, an image unit, a beam splitting unit, a first relaying unit and a second relaying unit. The beam splitting unit has a transmitting surface, a first reflective surface and a second reflective surface. The first reflective surface and the second reflective surface are disposed correspondingly to each other. The light source provides light to pass through the image unit and the beam splitting unit in sequence, one portion of the light forms a first light beam, one portion of the light forms a second light beam. The optical axes of the first and second light beams each has an offset with respect to the principal optical axis, and the first offset and the second offset have equivalent scalars and opposite offset directions.Type: GrantFiled: July 14, 2015Date of Patent: November 28, 2017Assignee: DELTA ELECTRONICS, INC.Inventor: June-Jei Huang
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Patent number: 9459520Abstract: Provided is a light source unit that includes: one or more kinds of phosphor; a substrate, on which the one or more kinds of phosphor is applied; a plurality of semiconductor laser elements arrayed at a predetermined interval in a package, wherein each of the semiconductor laser elements emits a laser light beam through a light emission region; and a first optical system that comprises a first lens system, a multiplexing optical member having a light entering surface and a light exiting surface, and a second lens system, wherein the first optical system directs the laser light beams emitted from the respective semiconductor laser elements toward the substrate, the first lens system receives the laser light beams emitted from the respective semiconductor laser elements directly without substantial parallelization of the respective received laser light beams, and condenses the received laser light beams on the light entering surface of the multiplexing optical member, the multiplexing optical member multiplexesType: GrantFiled: July 31, 2014Date of Patent: October 4, 2016Assignee: NICHIA CORPORATIONInventors: Seiji Nagahara, Takashi Sasamuro, Eiichiro Okahisa
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Patent number: 8792191Abstract: A two-axis, optical mount provides two flexural elements monolithically and homogeneously formed of a single material with, and interconnecting, three rigid segments. Between each pair of rigid segments, beginning with the first and second, a set of extensions is formed to have a cross section that permits simple, easy, independent adjustment therebetween. Likewise, a flexural element exists between the second and third rigid elements. Meanwhile, the rigid elements have section moduli sufficiently great as to be orders of magnitude larger than the flexural stiffness or section modulus of the flexural elements, thus providing flexures that operate in the elastic mode and introduce no joint type accuracy errors in adjustment.Type: GrantFiled: May 10, 2013Date of Patent: July 29, 2014Assignee: Utah State University Research FoundationInventors: Gregory Hopkins, Blake Crowther, Kendall Johnson, Vaughn A. Griffiths
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Patent number: 8591041Abstract: A method for driving a high-pressure gas discharge lamp of a projector system, which is suitable to produce and to supply to a light valve device during a projection interval (4) a light beam of a basic color which is selected from several basic colors (G, R, B). The lamp is driven by a lamp current. During said projection interval light valves of the light valve device are controlled in a pulse width modulation manner to have each valve provide a respective wanted light integral over said projection interval. During at least one of a number of successive projection intervals associated with one basic color a magnitude of the lamp current is temporarily reduced for at least a time that all light valves can be controlled for said one basic color.Type: GrantFiled: March 3, 2011Date of Patent: November 26, 2013Assignee: Koninklijke Philips N. V.Inventors: Carsten Deppe, Holger Moench, Tom Munters, Christofher Daniel Charles Hooijer
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Patent number: 8542450Abstract: A two-axis, optical mount provides two sets of flexural elements monolithically and homogeneously formed of a single material with, and interconnecting, three rigid segments. Between each pair of rigid segments, beginning with the first and second, a set of extensions is formed to have a cross section that permits simple, easy, independent adjustment therebetween. Likewise, a flexural set exists between the second and third rigid elements. Meanwhile, the rigid elements have section moduli sufficiently great as to be orders of magnitude larger than the flexural stiffness or section modulus of the flexures, thus providing flexures that operate in the elastic mode and introduce no joint type accuracy errors in adjustment.Type: GrantFiled: February 8, 2011Date of Patent: September 24, 2013Assignee: Utah State University Research FoundationInventors: Gregory Hopkins, Blake Crowther, Kendall Johnson, Vaughn A. Griffiths
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Patent number: 8253900Abstract: An image display apparatus includes: a light source; a light modulator that modulates the light flux emitted from the light source, the light modulator including a liquid crystal panel in which liquid crystal molecules are sealed, the liquid crystal panel having a modulation area where an incident light flux is modulated, and a pair of polarizing elements disposed on opposite sides of the liquid crystal panel, on the light flux incident side and the light flux exiting side thereof; and a compensating element disposed between at least one of the pair of polarizing elements and the modulation area, the compensating element compensating an optical phase difference resulting from birefringence associated with the liquid crystal molecules, wherein the compensating element is sized to be smaller than the modulation area and disposed based on the viewing angle characteristics of the modulation area.Type: GrantFiled: March 24, 2010Date of Patent: August 28, 2012Assignee: Seiko Epson CorporationInventor: Makoto Fuse
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Patent number: 8251522Abstract: A light modulator includes: a holding member having a frame disposed around an opening; and a light modulation panel formed in such a way that the edge thereof is held by the frame and the outer surface of the portion corresponding to the opening is flush with the outer surface of the frame or positioned outside the outer surface of the frame.Type: GrantFiled: January 29, 2010Date of Patent: August 28, 2012Assignee: Sony CorporationInventor: Atsushi Oda
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Patent number: 8231229Abstract: A mounting structure for a temperature sensor, which detects the temperature of a wall surface. The mounting structure includes a groove formed in the wall surface and having an inlet from which the temperature sensor is inserted. The temperature sensor includes a main body, which has a temperature detection surface that detects the temperature of the wall surface, and a lead wire connected to the main body. A support supports the main body. A wire bender bends the lead wire of the temperature sensor extending out of the inlet to press the temperature detection surface of the temperature sensor against the wall surface with an elastic force of the lead wire that is produced when the lead wire is bent. A stopper restricts movement of the main body of the temperature sensor.Type: GrantFiled: December 3, 2009Date of Patent: July 31, 2012Assignee: SANYO Electric Co., Ltd.Inventors: Toshimasa Kanbara, Taichi Yoshimura
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Patent number: 8128236Abstract: Disclosed is an image projecting apparatus having a cooling device, which cools heat generated from a plurality of light sources respectively emitting light of different colors and heat generated from a display device simultaneously, while effectively dispersing the heat. The image projecting apparatus includes a projecting system which projects light; a display device disposed in series with the projecting system; an optical system disposed in parallel with the projecting system, and including a plurality of light sources which transmit the light to the display device and generate heat when the light is transmitted to the display device; a heat dissipation device disposed at an outer edge of the optical system which dissipates the heat generated from the plurality of light sources; and a cooling fan disposed opposite to the display device, which inhales air and discharges the air to the heat dissipation device.Type: GrantFiled: February 6, 2009Date of Patent: March 6, 2012Assignee: Samsung Electronics Co., Ltd.Inventors: Jin Sub Kim, Sang Jun Choi, Byung Jo Kang
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Patent number: 8092027Abstract: A portable electronic device with micro-projecting module includes a shell body, a micro-projecting module, a heat-conducting plate and a supporting stand. The shell body has a front lateral plate and a bottom lateral plate adjoining the front lateral plate. The front lateral plate has a front through hole, while the bottom lateral plate has a bottom through hole. The micro-projecting module is arranged in the shell body and has a lens exposing to an outside of the shell body from the front through hole. The heat-conducting plate is arranged in the shell body and is positioned between the micro-projecting module and the bottom through hole. In the meantime, the heat-conducting plate has a heat-absorbing face contacting the micro-projecting module and a heat-dissipating face abutted against the bottom through hole.Type: GrantFiled: April 6, 2009Date of Patent: January 10, 2012Inventor: Yi-Fang Chuang
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Patent number: 8083355Abstract: A projector, includes: a light source device; an optical device that modulates a light beam irradiated from the light source device in accordance with image information; and a projection optical device that projects the light beam modulated by the optical device. The optical device includes: an optical element optically converting the light beam incident thereon and emitting the converted light beam; and a heat-conducting member that is connected with the optical element in a heat transferable manner to cool the optical element. The heat-conducting member includes a heat pipe having: a tube; a capillary structure provided in the tube; and a coolant housed in the tube, the coolant circulating in the tube to transfer heat in the heat-conducting member.Type: GrantFiled: September 24, 2007Date of Patent: December 27, 2011Assignee: Seiko Epson CorporationInventors: Yoshiyuki Yanagisawa, Yasunaga Momose, Motoyuki Fujimori
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Patent number: 8052282Abstract: An electronic device includes a heat dissipation system and an operating system. The heat dissipation system includes a housing, a first heat dissipation module received in the housing, heat pipes extending from the first heat dissipation module through the housing. The operating system includes a dust-proof housing, a heat source and a heat dissipation device. The heat source is received in the dust-proof housing and generates heat. The cooling module is adhered to an outer surface of the dust-proof housing to be cooled and attaches the heat pipes to the first heat dissipation module. The outer surface of the dust-proof housing is adjacent to the housing. The heat pipes transfer heat from the operating system into the first heat dissipation module.Type: GrantFiled: March 18, 2009Date of Patent: November 8, 2011Assignee: Hon Hai Precision Industry Co., Ltd.Inventors: Chien-Fu Chen, Yi-Ping Hsieh, Chung-Chen Chen
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Patent number: 7993008Abstract: An optical element is used for an exposure apparatus which is configured to illuminate a mask with an exposure light beam for transferring a pattern on the mask onto a substrate through a projection optical system and to interpose a given liquid in a space between a surface of the substrate and the projection optical system. The optical element includes a first anti-dissolution member provided on a surface of a transmissive optical element on the substrate's side of the projection optical system.Type: GrantFiled: November 14, 2008Date of Patent: August 9, 2011Assignee: Nikon CorporationInventors: Takeshi Shirai, Takao Kokubun, Hitoshi Ishizawa, Atsunobu Murakami
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Patent number: 7909467Abstract: A beam combiner for combining a first color beam, a second color beam, and a third color beam is provided. The beam combiner has a transparent substrate with a first optical surface on which a first reflective film reflecting the first color beam is disposed, and a second optical surface on which a second reflective film reflecting the second color beam is disposed. The first optical surface and the second optical surface are parallel. The second color beam entering the transparent substrate is reflected by the second reflective film and leaves the transparent substrate by passing through the first optical surface, while the third color beam enters the transparent substrate from the second optical surface and leaves the transparent substrate by passing through the first optical surface. The optical paths of the first, the second, and the third color beam are substantially coincident after emerging from the first optical surface.Type: GrantFiled: March 26, 2008Date of Patent: March 22, 2011Assignee: Young Optics Inc.Inventors: Chia-Chang Lee, Wan-Chiang Wang
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Patent number: 7878665Abstract: A holding apparatus adapted to hold an optical element above a base includes at least two held members provided at different positions on an outer periphery of the optical element; and holding members provided above the base for respective held members, the holding members being supported above the base by flexure members. Each held member is held by the corresponding holding member in a kinematic coupling.Type: GrantFiled: February 18, 2008Date of Patent: February 1, 2011Assignee: Canon Kabushiki KaishaInventor: Kouhei Imoto
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Patent number: 7852329Abstract: An image display apparatus includes a light source that generates light-source light of a plurality of colors, at least one optical modulator that corresponds to the light source and modulates image light of each of the light-source light of the plurality of colors, a display drive unit that controls the operation of the optical modulator according to an input image signal to perform display, a signal determining unit that determines whether the image signal has been input and whether the image signal can be processed by the display drive unit, and determines that a display state is non-normal when the image signal has not been input or when the image signal cannot be processed by the display drive unit, and a controller that, when the signal determining unit determines that the display state is non-normal, generates only at least one specific color light of the light-source light of the plurality of colors and simultaneously transmits a display image signal for non-normal display to the optical modulator.Type: GrantFiled: March 20, 2007Date of Patent: December 14, 2010Assignee: Seiko Epson CorporationInventor: Takeshi Hosokawa
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Patent number: 7806531Abstract: A projector includes: a casing having a surface; a cooling medium flowpath provided inside the casing, through which a cooling medium is allowed to flow; and a radiator in which a part of the cooling medium flowpath is arranged, the radiator being deployable by rotating with respect to the casing, and adapted to be accommodated in the casing and along the surface of the casing.Type: GrantFiled: October 20, 2006Date of Patent: October 5, 2010Assignee: Seiko Epson CorporationInventors: Makoto Zakoji, Takeshi Seto, Akira Egawa, Kunihiko Takagi
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Patent number: 7384149Abstract: A lithographic projection apparatus includes a support configured to support a patterning device, the patterning device configure to pattern the projection beam according to a desired patter. The apparatus has a substrate table configure to hold a substrate, a projection system configured to project the patterned beam onto a target portion of the substrate. The apparatus also has a purge gas supply system configured to provide a purge gas near a surface of a component of the lithographic projection apparatus. The purge gas supply system includes a purge gas mixture generator configured to generate a purge gas mixture which includes at least one purging gas and a moisture. The purge gas mixture generator has a moisturizer configured to add the moisture to the purge gas and a purge gas mixture outlet connected to the purge gas mixture generator configured to supply the purge gas mixture near the surface.Type: GrantFiled: July 21, 2003Date of Patent: June 10, 2008Assignees: ASML Netherlands B.V., Entegris, Inc.Inventors: Antonius Johannes Van Der Net, Jeffrey J. Spiegelman, Johannus Josephus Van Bragt
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Publication number: 20070229775Abstract: An object of the present invention is to provide a projector in which the fixing of a lamp door is prevented from being hindered by heat of a lamp, and the attachment and detachment of the lamp door can be easily performed. In a projector in which the lamp door covering an opening for lamp exchange formed in a housing is attached detachably, the lamp door includes first, second and third projected parts. The first projected part has a hook formed on the lower side of a tip end portion thereof. The housing includes a first receiving part receiving the first projected part and a second receiving part receiving the second projected part. In a state where the lamp door is attached to the housing, the first projected part of the lamp door is received by an upper surface of the first receiving part of the housing, and the hook formed in this first projected part is engaged with the first receiving part.Type: ApplicationFiled: April 2, 2007Publication date: October 4, 2007Applicant: Funai Electric Co., Ltd.Inventor: Hideo Yonezawa
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Publication number: 20070229774Abstract: An image display apparatus includes a light source that generates light-source light of a plurality of colors, at least one optical modulator that corresponds to the light source and modulates image light of each of the light-source light of the plurality of colors, a display drive unit that controls the operation of the optical modulator according to an input image signal to perform display, a signal determining unit that determines whether the image signal has been input and whether the image signal can be processed by the display drive unit, and determines that a display state is non-normal when the image signal has not been input or when the image signal cannot be processed by the display drive unit, and a controller that, when the signal determining unit determines that the display state is non-normal, generates only at least one specific color light of the light-source light of the plurality of colors and simultaneously transmits a display image signal for non-normal display to the optical modulator.Type: ApplicationFiled: March 20, 2007Publication date: October 4, 2007Applicant: SEIKO EPSON CORPORATIONInventor: Takeshi HOSOKAWA
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Publication number: 20070216873Abstract: There is provided a projection apparatus in which a cover glass can be attached to a light source unit easily and with a low cost, and breaking or dropping-off of the cover glass when an impact is applied, and a short circuit or electric leak when the light source is damaged can be prevented. In a front case made of metal that covers a front of a lamp of the light source unit, and an insulating member having an insulating property, impact absorbing property and heat resistance that is attached to an inside of the front case, openings allowing light emitted from the lamp to exit are provided so as to be communicatively connected, and fitting portions into which the cover glass having an ultraviolet removing function is fitted are provided around the openings in opposed surfaces of both the members.Type: ApplicationFiled: March 12, 2007Publication date: September 20, 2007Applicant: Funai Electric Co., Ltd.Inventor: Naohito Doi
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Publication number: 20040252281Abstract: A compact work light that generates a light beam having high brightness and high illumination uniformity is disclosed. The work light includes a housing that houses a light source, a light homogenizer and an imaging lens in an operational relationship. The housing is attached to an adjustable mount, which can be attached to a fixed region such as wall, or to a movable support member such as a lamp base. The light source generates light that is uniformized by the light homogenizer. The homogenized light is then imaged by the imaging lens as a highly uniform, bright beam spot having a sharp boundary. The beam spot is formed at a selectable distance from the work light by varying the imaging lens and/or the adjustable mount. The work light is useful for a variety of industrial, professional and personal applications, including but not limited to a reading light, a dentist light, a head lamp, a head light and an optical projector.Type: ApplicationFiled: July 1, 2004Publication date: December 16, 2004Inventors: Robert E. Fischer, Joseph E. Gortych
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Publication number: 20040051858Abstract: An illumination system for a microlithographic exposure apparatus comprises an adjustable axicon, a variable zoom element, and a multipole illumination mode generating element. By controlling the optical components, the illumination mode can be varied continuously between conventional, annular, and multipole.Type: ApplicationFiled: August 15, 2003Publication date: March 18, 2004Applicant: ASML Netherlands B.V.Inventors: Johannesq Catharinus Hubertus Mulkens, Gavin Charles Rider, Jan Wietse Ricolt Ten Cate
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Illumination optical unit liquid crystal projector and production method of liquid crystal projector
Publication number: 20040046942Abstract: A lighting optical unit having an optical system 13 to 16 for irradiating light from a light-source lamp 11 on a predetermined object 22 in a uniform and/or convergent manner includes a reflector 1 for reflecting light from the light-source lamp 11 to provide converged light and an optical assembly 2 for collimating this converged light to provide a bundle of approximately parallel rays, wherein the bundle of approximately parallel rays is made to enter the optical system 13 to 16. Thus, in a liquid-crystal projector using a transmission type liquid-crystal panel with micro-lens, while a demand for increasing a quantity of light incident on an effective area of pixel of a liquid-crystal panel is being satisfied, the lighting optical unit can be made compact in size.Type: ApplicationFiled: October 3, 2003Publication date: March 11, 2004Inventors: Masao Katsumata, Tetsuro Okamura -
Publication number: 20030128341Abstract: An illumination engine for a projection display using light emitting diodes (LEDs) that includes a reflector having a first and second focal points, a source of electro-luminescence located proximate to the first focal point to emit rays of radiation in a first range of wavelengths that reflect from the reflector and converge substantially at the second focal point, and a light pipe having an first input end and a first output end, the first input end being located proximate to the second focal point to collect substantially all of the radiation and wherein the first output end transmits substantially all of the radiation.Type: ApplicationFiled: August 23, 2002Publication date: July 10, 2003Inventor: Kenneth K. Li
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Publication number: 20020176057Abstract: The present invention provides overhead having (a) a main body having a stage area, (b) a head assembly, and (c) a post suspending the inverted head assembly over the stage area.Type: ApplicationFiled: March 18, 2002Publication date: November 28, 2002Applicant: 3M Innovative Properties CompanyInventors: Dwight G. Baldwin, James E. Peterson
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Publication number: 20020063852Abstract: A projection system includes a total reflection element, an image reader, an analysis system and a server device. The image reader reads a projective image guided by the optical projection device and the total reflection element and outputs a read signal. The analysis system analyzes the read image by an evaluation function and determines the clearest image on the projective plane so as to output an adjustment signal. The server device automatically performs the focal adjustment to the optical projection device based on the adjustment signal.Type: ApplicationFiled: October 23, 2001Publication date: May 30, 2002Applicant: Acer Communications and Multimedia Inc.Inventor: Don Liang
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Publication number: 20020063853Abstract: An analyzing-synthesizing optical system has the structure in which for each of the three primary colors of R, G, and B, there are provided a light valve for modulating incident light and a polarization beam splitter for guiding specific polarized light to this light valve and extracting only modulated light coming from the light valve to output it, wherein these light valves and polarization beam splitters are fixed as integrated with a synthesizing optical system comprising a cross dichroic prism and wherein optical path lengths of optical paths of the respective colors are adjusted to be almost equal to each other. A projection image display apparatus comprises the analyzing-synthesizing optical unit.Type: ApplicationFiled: January 11, 2002Publication date: May 30, 2002Inventors: Hiroshi Maki, Kiyoshi Numazaki, Masaaki Kusano, Tetsuo Hattori, Atsushi Sekine
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Publication number: 20020060780Abstract: To provide a projector which, by a simple method, makes it possible to eliminate the chances of incident light directly striking a drive element.Type: ApplicationFiled: October 15, 2001Publication date: May 23, 2002Applicant: Seiko Epson CorporationInventors: Takeshi Takezawa, Toshiaki Hashizume
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Publication number: 20020057419Abstract: To provide a technology for mounting a prism which is used for a projector, such as a crossed dichroic prism, accurately in a predetermined position of a base frame.Type: ApplicationFiled: October 25, 2001Publication date: May 16, 2002Applicant: SEIKO EPSON CORPORATIONInventors: Motoyuki Fujimori, Takeshi Takezawa, Hisamaro Kato
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Publication number: 20020057420Abstract: A projection-type display apparatus (1) is comprised of an illumination optical system (2A), a color separating system (4) for separating a white beam (W) from the illumination optical system into color beams (R, G, B), three liquid crystal panels (5R, 5G, 5B) for modulating the separated color beams, a light guide system (9) located on an optical path of the beam (G) having the longest optical path among the separated color beams respectively incident on the three light valves, a dichroic prism (6) for synthesizing the beams modulated through the liquid crystal panels, and a projection lens (7) for projecting the synthesized and modulated beam onto a screen (8). The illumination optical system (2A) is provided with a uniform illumination optical device (3) for converting the white beam into a uniform rectangular beam.Type: ApplicationFiled: October 30, 2001Publication date: May 16, 2002Applicant: SEIKO EPSON CORPORATIONInventors: Tadaaki Nakayama, Yoshitaka Itoh, Akitaka Yajima
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Publication number: 20020057418Abstract: A method for use in a projection display to prevent ghost images on or near a projected image, wherein the projection display comprises an illumination system and an imaging system, the illumination system including a light source; an illumination module; a field lens; and a reflection device. The imaging system includes the field lens; an imaging module including a stop; and a screen. The method comprises changing the surface profile of the surface zone, which would otherwise involves generation of a ghost image, of the surface S1 of the field lens so that the ghost image is reflected to the area outside of the stop or is scattered and the effect of reducing or preventing ghost images can thereby be achieved.Type: ApplicationFiled: January 25, 2002Publication date: May 16, 2002Inventor: Sze-Ke Wang
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Publication number: 20020027641Abstract: A rear-type projection display device is provided, in which even a liquid crystal panel having several point defects is used, the point defects are hardly recognized. According to the present invention, in order not to display the display defects (the bright spots or unlit defects) that take place when a light from a light source transmits a liquid crystal panel having the point defects, means for correcting the display defects is provided on the liquid crystal panel side of a screen.Type: ApplicationFiled: August 10, 2001Publication date: March 7, 2002Applicant: Semiconductor Energy Laboratory Co., Ltd.Inventor: Yoshiharu Hirakata
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Publication number: 20020027642Abstract: The invention concerns achieving an increase in illumination efficiency of an illumination optical system in a projector using an optical modulation device. A projector may include an optical modulation device for controlling a direction of emission of illumination light applied to a substantially rectangular light application surface, including a plurality of pixels, for each pixel according to image information to thereby emit image light representing an image, an illuminating optical system for emitting the illumination light so that the central axis of the illumination light applied to the light application surface enters the light application surface at a predetermined angle, and a projection optical system for projecting the image light emitted from the optical modulation device. The illuminating optical system may include a light source, and a light-transmitting rod through which the light emitted from the light source passes.Type: ApplicationFiled: October 19, 2001Publication date: March 7, 2002Applicant: Seiko Epson CorporationInventors: Kazuhiro Nishida, Tomiyoshi Ushiyama
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Patent number: 5231471Abstract: An alignment mark detecting device usable with an exposure apparatus for transferring a pattern of an original onto a workpiece having a radiation-sensitive layer, includes a holder for holding the workpiece, a radiation energy source for irradiating the workpiece held by the holder with radiation energy to remove a portion of the radiation-sensitive layer adjacent to an alignment mark formed on the workpiece, and a holder for detecting the alignment mark of the workpiece held by the holder.Type: GrantFiled: November 19, 1991Date of Patent: July 27, 1993Assignee: Canon Kabushiki KaishaInventor: Makoto Torigoe
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Patent number: 5161059Abstract: A high-efficiency, diffractive optical element having at least one surface including multilevel steps, the steps determined by calculating equiphase boundaries utilizing a disclosed equation and algorithm. The optical element can be adapted to correct for chromatic and/or spherical aberration, and can be used in UV lithographic apparatus.Type: GrantFiled: August 29, 1989Date of Patent: November 3, 1992Assignee: Massachusetts Institute of TechnologyInventors: Gary J. Swanson, Wilfrid B. Veldkamp
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Patent number: 5120134Abstract: An exposure system for exposing a wafer coated with a resist to a mask is disclosed. The system includes a photoelectric converting device for photoelectrically converting, through a detection optical system, an alignment mark formed on the wafer; an analyzing device for analyzing an affect of the resist on the wafer to a mark signal from the photoelectric converting device; and a control device for controlling the position of the wafer in relation to the mask, by using the mark signal from the photoelectric converting device and a result of analysis by the analyzing device.Type: GrantFiled: March 26, 1991Date of Patent: June 9, 1992Assignee: Canon Kabushiki KaishaInventor: Masao Kosugi
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Patent number: 4851924Abstract: An overhead projector having scanning device for scanning an original image thereby generating electric signals corresponding to the original image, selecting device for selecting one of a thermochromic film and a thermographic paper, a first heating device for heating the film thereby erasing an image formed formerly in the film, a second heating device for heating the film in accordance with the electric signals transmitted from the scanning device to form an image corresponding to the original image in the film when the film is selected by the selecting device and for jheating the thermographic paper in accordance with the electric signals transmitted from the scanning device to print an image corresponding to the original image in the thermographic paper when the thermographic paper is selected by the selecting device, andprojecting device for projecting the image formed in the film on a given screen.Type: GrantFiled: July 18, 1988Date of Patent: July 25, 1989Assignee: Ricoh Company, Ltd.Inventors: Takuma Nakamura, Yasuhiko Saka
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Patent number: 4368963Abstract: A large image or picture system includes a flat screen, on which is projected pictures from three small liquid crystal display panels behind or in front of which are disposed respectively three filters of the colors red, green and blue. Three light sources are provided behind the respective liquid crystal panels, while three lenses are provided respectively in front of the liquid crystal panels. The lenses project three partial pictures in three different colors onto a single screen, creating a complete multicolored picture. For high capability of information of the pictures, large liquid crystal panels are proposed, which are assembled from many small liquid crystal cells, allowing rapid switching and multiplexing. Changing the frequency of the voltage applied to the liquid crystal cells results in a modulation of the light intensity of the individual parts of the picture, resulting in artistic pictures, like photographs.Type: GrantFiled: May 14, 1979Date of Patent: January 18, 1983Inventor: Michael Stolov