Abstract: A tool for placing an identifying mark on a semiconductor wafer has a bundle of optical fibers that can be illuminated in a pattern representing an identifying character. Light from the fibers is focused on a photoresist layer during wafer manufacture and a pattern of dots is etched into the wafer to represent the character. The dots are too small to be seen with the human eye but the character can be read by a human or by a machine. The character is etched as part of a conventional etch step in manufacturing the wafer and it is easily repeated as a series of manufacturing steps obscure the original mark.

Abstract: An exposure apparatus comprises a light source section, which is constituted of a plurality of arrayed light source units, each of the light source units comprising multiple kinds of light emitting devices, which produce light beams having wavelengths falling within different wavelength ranges, and an optical system for combining the light beams, which have been radiated out from the multiple kinds of the light emitting devices, with one another to form a combined light beam, and converging the combined light beam onto one end of an optical fiber. An exposure head is located so as to stand facing a photosensitive surface of a photosensitive material capable of being conveyed. The other end of the optical fiber is connected to the exposure head. A driving mechanism moves the exposure head in a straight line along a direction, which is normal to the direction of conveyance of the photosensitive material.

Abstract: A lithographic projection apparatus includes an illumination system for supplying a projection beam of electromagnetic radiation having a wavelength less than or equal to 50 nm, a mask table provided with a mask holder for holding a mask, a substrate table provided with a substrate holder for holding a substrate, a projection system for imaging an irradiated portion of the mask onto a target portion of the substrate, wherein the radiation system comprises an integrating element disposed in the path of the radiation, the integrating element comprising a hollow waveguide.

Abstract: A tool for placing an identifying mark on a semiconductor wafer has a bundle of optical fibers that can be illuminated in a pattern representing an identifying character. Light from the fibers is focused on a photoresist layer during wafer manufacture and a pattern of dots is etched into the wafer to represent the character. The dots are too small to be seen with the human eye but the character can be read by a human or by a machine. The character is etched as part of a conventional etch step in manufacturing the wafer and it is easily repeated as a series of manufacturing steps obscure the original mark.

Abstract: A rod lens array, used in an image sensor, is configured by sandwiching a plurality of rod lenses with two side plates. Among the two side plates, the one which is on the side of the illumination device is made thinner than the other side plate.

Abstract: A microscopy and/or lithography system uses a comparatively low-resolution image projection system, which has a very small numerical aperture but large image field, in conjunction with a microlens array comprising miniature lens elements, each of which has a large numerical aperture but very small field. The projection system contains a small aperture stop which is imaged by the microlenses onto an array of diffraction-limited microspots on the microscope sample or printing surface at the microlens focal point positions, and the surface is scanned to build up a complete raster image from the focal point array. The system design thus circumvents the tradeoff between image resolution and field size which is the source of much of the complexity and expense of conventional wide-field, high-NA microscopy and microlithography systems.

Abstract: A dual drum rotary image scanner has a headstock and a tailstock between which may be mounted drums of different diameter. The tailstock has substantially annular surfaces which contact corresponding surfaces on the different diameter drums. The different drums, when held in the scanner, each create a different separation between the headstock and tailstock. These different separations are detected by photodetectors, the outputs of which are received by a system controller. The controller uses the photodetector signals to control motors that position the scanning head and the transmittance illuminator relative to the surface of the particular drum mounted in the scanner. The motors turn pinions which, in turn, move racks to which are attached the scanning head and the transmittance illuminator, respectively. The movement of the scanning head also results in the modification of the optical path within the optics box of the scanner.

Abstract: A filmstrip consisting of a series of coherent frames is passed through a copying station where images of the frames are projected onto an elongated band of copying paper to make proofs of the frames. The images are projected in such a manner that the relative orientations of the images are the same as the relative orientations of the frames.

Abstract: An imaging apparatus modulates or gates pluralities of light beams through individual light valves, thereby providing a greater number and finer resolution of modulated light beams without increasing the number of light valves or decreasing the spacing between adjacent light valves. A two-step modulation process is used, the first step being performed by a light generator incorporating a polygon mirror that selectively illuminates selected bundles of fiber optic strands. One strand from each bundle is routed to illuminate one of the cells in a light valve array, such that when a bundle is illuminated, every cell is illuminated by a strand from the illuminated bundle. The second step of the modulation process involves controlling the light valve array to modulate the light beams formed by the illuminated strands at each cell.

Abstract: This specification discloses a lens array having a lens element body having a plurality of lens elements arranged, and an overlap limiting member provided between the lens elements of the lens element body for limiting the overlap of images by the plurality of lens elements. The specification also discusses a close contact type image sensor which uses the lens array as an optical element array for directing reflected light from an original and which has a transparent member for supporting the original, a light source for illuminating the original, and a sensor array for photoelectrically converting the image of the original.

Abstract: An image recording apparatus having a light source which illuminates light to one of a reflection original image and a transparency original image, and an imaging lens system which uses the light reflected or transmitted from the original image after being emitted from the light source to form an image on a photosensitive surface of a photosensitive material. A plurality of light emitting diodes are used as the light source. Accordingly, controlling the current to the diodes allows control of a quantity of light without changing the color. It therefore becomes unnecessary to provide a diaphragm mechanism for the imaging lens system. As a result, the apparatus can be made small.

Abstract: Fine, sub-micron line features and patterns are created in a sensitized layer on a semiconductor wafer by a beam of low wavelength radiation, such as X-rays or Gamma-rays. A stream of such radiation is concentrated and collimated by a concentrator, the output of which is disposed in close proximity to the sensitized surface of the wafer. In this manner, the sensitized surface can be converted from one chemical state to another chemical state, essentially point-by-point. By moving one or the other of the beam or the wafer, line features can be converted in the sensitized surface. Typically, non-converted areas of the sensitized surface are removed, for further processing a layer underlying the sensitized surface.

Abstract: An imaging system is disclosed which incorporates a gradient index lens array to transmit focused light onto an image medium with increased Depth of Focus (DOF) and no loss of radiometric efficiency. The lens array is first constructed so that its exit pupil is generally symmetrical. This first step increases the radiometric efficiency of the lens array relative to prior art lens arrays. In a second step, the DOF is increased by reducing a quantity n.sub.o .sqroot.AR which is associated with the lens, n.sub.o being the axial refractive index of the fibers comprising the lens array, .sqroot.A being the gradient index constant of the material comprising the lens array and R being the radius of the individual optical rods, As this quantity is reduced, the DOF increases consistent with a trade off of reduced radiometric efficiency. Since the efficiency was initially increased from some optimum value, the DOF can be increased until the desired radiometric efficiency level is reached.

Abstract: An exposure apparatus having a transparent base member opposed to a photosensitive drum and forming part of a vacuum chamber, an electrode formed in the vacuum chamber for discharging thermoelectrons, a fluorescent member formed on the base member for emitting light when receiving the thermoelectrons, an anode for supplying the fluorescent member with a potential for colliding the thermoelectrons against the fluorescent member, the anode shaping the configuration of light emitted from the fluorescent member, and a microlens formed in the base member in contact with the fluorescent member, for converging onto the photosensitive drum the light emitted from the fluorescent member. When thermoelectrons are discharged from the electrode, the fluorescent member emits light, which has a configuration limited by the anode and is efficiently converged onto the photosensitive drum through the microlens formed in the base member in contact with the fluorescent member, to perform exposure.

Abstract: A media spacing system for a fiber optic CRT printer. The system has a film coating over the fiber optic portion of the CRT, outside the phosphor display area, which keeps the media a fixed distance from the display area to provide for a uniform display of data on the media. The film may be applied in multiple layers, with each successive layer having a larger size, to create a rounded edge for the coating. A pressure plate is placed on the opposite side of the media from the film coating to keep the media firmly against the film coating. A compliant element, such as foam rubber, attaches the pressure plate to a fixed bracket to allow the pressure plate to adjust for bow and twist of the CRT, while maintaining pressure against the media.

Abstract: An elongated light source of the type employed in a document scanner for forming a line of uniform intensity, diffuse illumination at a document scanning plane. The light source has a longitudinally extending aperture for generating a line of light aligned with the light entrance end face of a generally planar, light conducting pipe. The light conducting pipe conducts light through its length and emits the light at a light exiting end face in proximity to a document scanning plane. The emitted light is spectrally filtered within the light pipe by the selected colored material thereof for absorbing unwanted wavelengths and/or by shaping the light pipe and/or by use of dichroic filter coatings for reflecting unwanted light wavelengths.

Abstract: A photolithographic system wherein optical fiber routing is used to combine two or more ultraviolet light sources for reticle illumination.

Abstract: Disclosed are an exposure apparatus and process, including a holding unit for holding first and second objects such as a mask and a substrate, a first illumination system for illuminating the first object with an exposure light, a projection optical system for forming an image of a portion such as a pattern portion of the first object illuminated with the exposure light onto the second object and a second illumination system for illuminating a portion such as peripheral portion of the second object held by the holding unit outside of a portion of the second object illuminated with the exposure light from the first illumination system.

Abstract: Scanners for use in photofinishing operations are well-known. However, many known devices suffer from the problem of being bulky and/or having a limited range of functions. Described herein is a scanner (10) formed by a bundle of optical fibres which enables information on a film (12) to be determined. The bundle of optical fibres is divided into two sets, one which scans the film (12) through slit 1 for information relating to frame (20), and a second set which scans the film (12) through slits (2, 3, 4, 5) for other information such as DX codes (24), frame numbers or sprocket holes (26) contained in the edge (22) of the film (12). Information from the film (12) is passed to a computer (30) via an interface (28) and the information derived is used to actuate means (32).

Abstract: A fiber optic data transmission system and method are provided comprising a laser diode, an attenuating and focusing lens, and an optical fiber. The method of operating the system attenuates laser diode radiation outputted during operation. The system operates by application of the input driving current to the laser diode in a manner which increases the laser diode extinction ratio. The increased laser diode power output associated with operation at a higher extinction ratio is attenuated by the lens to a safe operating level. Increasing the laser diode extinction ratio significantly increases the system's signal-to-noise ratio and thereby reduces the bit error rate associated with the data transmitted over the optical fiber, while the attenuation of the laser diode output radiation allows operation within prescribed safety limits.

Abstract: An illumination system for use in a unit magnification optical projection system (such as a Half-Field Dyson system) is provided. In a Half-Field Dyson system, a reticle and a wafer are parallel to each other with a window being provided on the reticle to allow for projection of the reticle pattern onto the wafer. The present invention provides uniform bright illumination over the reticle pattern with little or no spill over through the reticle window.

Abstract: A projection exposure apparatus comprises a light source for emitting a light beam for exposure; an illumination optical system comprising optical fiber bundle portion including a plurality of bundled optical fibers having an entrance plane to which a light beam exiting from the exposing light source is incident, and a little optical fiber bundle portion including a plurality of little optical fiber bundles respectively having an outgoing plane; and an projection exposure system for projecting a light beam passing through the illumination optical system and transmitting a mask or a reticle onto an object to be exposed as a pattern image of the mask or the reticle.

Abstract: Strips of coherent, exposed and developed film frames are advanced past, and discrete frames are placed onto, a window at a monitoring station where successive increments of the film frames are monitored by a device having photocells forming at least one row which extends transversely of the path of advancement of strips. The monitoring device is at a standstill during advancement of strips but is transported past a discrete frame at the monitoring station. Such monitoring device can ascertain the density of film frames, and its photocells generate signals which are used to image the frames onto photographic paper.

Abstract: A photographic copier includes a rod lens array held to a carrier and moved parallel to an original picture by a motor. Limit switches sense whether the array is in either stop position at both ends of the range of movement During movement, if the array is found to reach either stop position, then a control circuit stops the operation of the motor. When the rod lens array is started, if the limit switches sense that the rod lens array is not in either stop position, then the control circuit operates the motor to return the array to either stop position.

Abstract: An imaging optical system using index distribution type optical elements comprises an imaging optical system for forming the image of an object on a light receiving surface, is formed by a plurality of optical elements of erect one-to-one magnification having a radial index distribution arranged in a row and satisfies the following relations: ##EQU1## D is the effective diameter of each optical element, Xo is the field radius of each optical element, and P is the arrangement interval of the optical elements.

Abstract: An image transmitting element is disclosed, which comprises: a transparent substrate; photo-transmissible holes one-dimensionally or two-dimensionally formed as an array in the substrate, each of the holes having a substantially cylindrical side surface and at least two substantially semi-spherical surfaces; a photo-absorptive surface formed on at least a part of the cylindrical side surface of the photo-transmissible holes; and a transparent material with which the photo-transmissible holes are filled, the transparent material having a refractive index higher than that of the substrate.

Abstract: A cathode ray tube provides a two-dimensional sequential scan pattern on which dots for scanning or printing are presented as spots of light provided in sequence. A single multi-scan linear raster sweep of the cathode ray tube electron beam produces a single line of dots on the scanned image or photosensitive medium. A fiber optics array with one end facing the cathode ray tube, is configured two-dimensionally in a pattern that corresponds to the sequential sweep pattern of the cathode ray tube. The trace of dots on the cathode ray tube has sufficient length to accommodate the number of dots required for the width of the finished product or scanned image. A lens positioned between the cathode ray tube and optical fiber array, focuses the cathode ray tube image onto the fiber ends with a reduction in size. At the other end of the fiber optics array, the fibers are abutted together linearly to form the desired final output line width with coherence of the fibers from input to output.

Abstract: An electronic scanner or printer using a fiber optic bundle and employing an initialization procedure is rendered more reliable, less expensive and provides a relatively easy path to gray scale and high resolution performance by using a unique fiber optic bundle. The bundle comprises ribbons of square fibers where the ribbons are set side by side at one end of the bundle and stacked at the other. Each square fiber of each ribbon comprises multiple rows and columns of (core) fibers each with a cladding to ensure total internal reflection of light. Gray scale is achieved by varying the exposure time and consequently the energy per pixel on a treated media or by statistically changing the amount of toner on an OPC drum creating limited apparent shades of black spots on a developed page.

Abstract: A film editing table includes a light source mounted away from the editor's sitting position, with a light guide transmitting the light to the film editing table's optics to produce images on the table's rear projection screen with a brightness and color temperature substantially the same as the images displayed in commercial theatres such that accurate color judgments can be made for animation film. The editing table can also be used to edit dailies of live action motion picture films. The light source is preferably a Xenon light source and the light guide is preferably a liquid light guide. The end of the guide from which the light emanates is movable along three axes, producing the brightest image possible.

Abstract: Voidable articles are made with an identification code and a radiant energy responsive material coated over said code. The material is invisible and remains unactivated in ambient light but obscures the identification code upon being exposed to radiant energies such as heat or light from within a particular wavelength range. Printing can be accomplished by imaging light onto a substrate coated with photosensitive material including an infrared absorbing dye. A cancellation device for voiding documents of the present invention is made with a scanner, a comparator and a radiant energy source for exposing the document to activate the energy responsive material on the document.

Abstract: A fiber optic scanner includes two fiber bundles, each transforming a linear array into a circular one. The circularly arranged bundle ends cooperate with synchronously rotating deflectors which, in conjunction with single line fiber optics couple a deflector to a light source, provided the linear ends of the two bundles are positioned to be coupled to each other through a field of view.

Abstract: An optical fiber array is disclosed that is useful in a print head of a thermal printer. The array is comprised of materials that hold a collection of output ends of optical fibers in precise alignment to each other and to a well defined plane. The materials of the array are selected so that each material has a polishing rate that is substantially the same. This selection of materials facilitates efficient fabrication of the arrays. Additionally, a fixture that facilitates ease of assembly and finishing of the array is disclosed.

Abstract: A process for producing micropatterns on large-area substrates, especially liquid crystal displays, in which patterns are transferred from at least one mask onto a substrate by optical means which contain lens or mirror systems. Patterns are sensed continuously from the mask in small areas and transferred by an optical system to the substrate. The transfer system, the mask, and the substrate are positionable relative to one another. The process enables large-area displays having side lengths of at least 10 centimeters to be manufactured reliably and in large quantities. Apparatus for carrying out the process is also disclosed.

Abstract: An apparatus for marking data on photographic prints being made in a photographic printing machine comprises an LED/fiber optic dot-matrix printing device mounted within the printing machine. Data corresponding to the prints being made is entered via a keyboard and converted into a series of dot-matrix light patterns on said LED array, which patterns are then transmitted to a marking head mounted adjacent the path of the printing paper through the machine by way of a plurality of optical fibers.

Abstract: The light emitted by a source of light is passed by means of optical fibers or bundles of optical fibers in lines over a master to be scanned. In the process, an orifice of a disk rotated by a motor sequentially projects the light onto one optical fiber or bundle of fibers leading to the master. The light exiting from the light emitting end of the optical fiber or bundle of optical fiber illuminates the master. On the other side of the master a corresponding optical fiber or bundle of fibers receives the light coming from the master and conducts it to a receiver.

Abstract: Radiant energy is directed from a source (14,16) to an illumination plane (28) where the light receiving ends of groups (36) of optic fibers are arranged in coplanar striations (100), after which the radiant energy passes through the groups of optic fibers into individual exposure columns (40) and on to an exposure plane (42) where a radiation sensitive sample is exposed in individual areas to different, readily adjustable levels of illuminance from each of the groups of optic fibers.

Abstract: Full pages of books may be photocopied without damage to the book bindings by placing the open book on a wedge of fiber optics perpendicularly aligned to the copier platen to optically couple the photocopier to the book pages.

Abstract: The invention provides a color copying machine or apparatus for forming chromatic images which irradiates an original with rays from a light source, focuses the reflection from the original as latent images on a photosensitive recording medium, and forms chromatic images corresponding to the latent images on a copy sheet. The apparatus includes supplementary exposing means for irradiating a specified region on the photosensitive recording medium with desirable chromatic light. Thus the color of images on the region is desirably changed to make the region conspicuous or inconspicuous.

Abstract: An optical waveguide array comprises a base plate provided with a plurality of channels and a cover covering an open side of the base. The channels are filled with core members. The base plate and the cover are made by an injection molding method. At least one of the opposing surfaces of the plate and the cover are formed of a material having a refractive index of n.sub.1 which is smaller than a refractive index n.sub.2 of material forming the core.

Abstract: An optical waveguide and an image sensor using the same, the optical waveguide comprising a plurality of bar-shaped cores that are aligned in a proper manner, the cores being made of transparent materials with a large refractive index, and a cladding that is disposed around the cores, the cladding being made of materials with a small refractive index that are capable of absorbing or scattering light, wherein part of each of said cores on which irradiated light is incident is uncovered, or part of said cladding on which irradiated light is incident is transparent.

Abstract: An image transmitting element and a process for producing the same are disclosed, which image transmitting element comprises: a transparent substrate; photo-transmissible holes one-dimensionally or two-dimensionally formed as an array in the transparent substrate, each of the holes having one end opened at one surface of the substrate and the other end made blind and provided with a substantially spherical top end within a thickness of the substrate; a photo-absorptive surface formed on at least a part of an inner surface of each of the photo-transmissible holes except the surface of the spherical top end thereof; and a transparent material with which the photo-transmissible holes are filled, the transparent material having a refractive index higher than that of the substrate.

Abstract: The invention is directed to a lens screen wherein lens elements are inserted into discrete openings of a carrier. The openings are defined by a plurality of interconnected struts so that a strut is disposed between each two mutually adjacent ones of the openings. The lens elements have two optically effective surfaces which are dissimilar in size and the lens elements are tapered in the region of the lens material which is not optically utilized on at least two opposite-lying faces. The struts of the carrier support the lens elements at these tapered regions and provide support from below as well as laterally. The width of the struts is dimensioned so that they do not project beyond the free space formed by the tapers. In this way, the condition is obtained that the lens elements are arranged so as to lie tightly against each other with an optically effective surface and yet receive mechanical support from the struts of the carrier.

Abstract: A photographic printing enlarger apparatus and method in which the enlarger head receives lights passing through a fiber optic light bundle. This light passes through a color filter system, negative, or transparency, supported by a negative carrier, and the lens. The beam of light projects the image on the surface of an exposure correction easel. A mechanical arm scans the beam of light passing through the negative in small sections, and senses the density of the negative, registering the information into a computer memory. The mechanical arm is driven to expose the light-sensitive photographic material in small sections in cooperation with a shutter system and in accordance with the information stored in computer memory. The mechanical arm is comprised of a row of several image sensors which read the wavelength of light passing through.

Abstract: An original photographic image (5) is interrupted by a controlled shutter (10) and simultaneously scanned by a light collector (21) over a planar reference frame by relative movement between the image and the collector (21) along a series of linear side-by-side scanning paths. A light emitter (22) which emits light corresponding to that collected scans a similar planar frame of unexposed film (6) by relative movement between the film and the emitter along a series of linear side-by-side scanning paths. A computer (8) controls the scanning operations and the shutter (10) to cause the image reproduced on the film by exposure to the light emitter to differ to that of the original image.

Abstract: An electronic printer employing a bundle of optical fibers organizes the fiber ends in first and second faces of the bundle in a linear array and in an annulus or ring array respectively. A spinning prism is operative to image a linear array of light sources onto a segment of the annulus and move the image through a succession of positions to cover the entire area of the annulus in one revolution providing the pixels for a linear segment of a photosensitive medium optically coupled to the first face of the bundle.

Abstract: In a preferred embodiment of the present invention there is provided a substrate having formed therein a plurality of optical waveguides. The waveguides are formed in a fanned out pattern with each alternate waveguide having a different width. At the fanned out ends of each of the waveguides there is coupled an optical fiber for transmitting light to the optical waveguide. In another embodiment of the invention, a substrate block is formed of glass, plastic, or X-cut LiNbO.sub.3 material and each waveguide in LiNbO.sub.3 is formed by diffusing strips of Ti or other suitable optical waveguide material into the substrate in a desired fan pattern and by forming an overcoat with a material, such as MgO for LiNbO.sub.3, which has an index of refraction that causes the output beam to be symmetrically formed.

Abstract: An exposure device used in an image forming apparatus for exposing a photosensitive recording medium carrying microcapsules on one surface thereof to color image lights produced in accordance with color image data representing an original image to form a latent image corresponding to the original image, includes a fiber optics tube (FOT) having an optical fiber array serving an exposing surface for producing the color image lights in accordance with the color image data and selectively exposing the photosensitive recording medium to the color image lights to form the latent image on the photosensitive recording medium, the exposing surface being disposed in such a manner as to confront the other surface of the photosensitive recording medium, a FOT driving circuit for driving the FOT, and a control unit for controlling the FOT driving circuit so that the color image lights are selectively produced in accordance with the image data inputted thereto and the color image lights thus produced are irradiated to the

Abstract: There is disclosed an electrophotographic printer for projecting light from light source emitted according to image data onto a photoconductive body performing a mechanical scan operation in a subscan direction so as to form an image of the image data thereon, and for printing the image on a piece of printing paper using the electrophotographic process. In the electrophotographic printer, the light source comprises plural light emitting devices such as LEDs aligned in a main scan direction perpendicular to the subscan direction, and each light emitting device has a light output opening elongated in the subscan direction. Image data received from an external unit are once stored in an image memory, and the image data read therefrom are Fourier transformed.

Abstract: A portable and highly compact copier for photographically copying a selected portion of an illuminated image. The copier includes a lighttight housing having an opening therein and having a support for temporarily maintaining photosensitive material at a focal plane within the copier housing. An array of image-transferring cylindrical microlenses, each microlens having an image end and an object end, is slidably mounted in the housing opening with the image ends adjacent the focal plane and with the object ends facing outwardly of the copier housing opening. An electrical drive motor is provided which is mechanically coupled to the microlens array. A self-retracting shade arrangement forms a slidable lighttight seal between the microlens array and structure forming the housing opening such that all of the light passing though the housing opening and to the copier housing focal plane must pass through the microlens array.

Abstract: The present invention is directed to optical imaging systems which utilize linear lens arrays and particularly gradient index lens arrays as the means for projecting light images onto a photosensitive image member. Exposure modulation at the image plane is reduced by oscillating the lens array during an exposure interval, the oscillating period and excursion distance being dependent upon the type of imaging environment the lens is used in. For document copying applications, the requirement for a two-row array to provide minimum exposure modulation is reduced so that a one-row lens array is enabled. For printer and RIS scanning functions, oscillation of a two-row array enables improved system efficiency and hence greater image irradiance and exposure.