With Optical Elements Moving Relative To Fixed Housing To Follow Or Align Patents (Class 356/139.05)
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Patent number: 12261406Abstract: An apparatus includes an auto-alignment laser configured to generate an auto-alignment laser beam. The apparatus also includes a spectral beam combiner having a diffraction grating. The diffraction grating is configured to diffract multiple input laser beams to produce a combined beam having a higher power or energy compared to the individual input laser beams. The diffraction grating is also configured to diffract the auto-alignment laser beam so that a portion of the auto-alignment laser beam co-propagates in a common direction with the combined beam. Wavelengths of the input laser beams and the auto-alignment laser beam may be selected such that portions of the input laser beams and the portion of the auto-alignment laser beam diffract from the diffraction grating in the common direction. The portion of the auto-alignment laser beam that co-propagates with the combined beam may include a higher-order diffraction of the auto-alignment laser beam from the diffraction grating.Type: GrantFiled: November 19, 2019Date of Patent: March 25, 2025Assignee: Raytheon CompanyInventors: Justin R. Paul, David R. McCormick, Justin O. Compton
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Patent number: 12210166Abstract: The invention provides a beam optical axis self-stabilizing device and method based on reflection mechanical modulation. The device includes a polarized beam splitter, a quarter-wave plate, a structural reflecting element, and a driving source. The quarter-wave plate is located at an output end of the polarized beam splitter. The reflecting element is located at a side of the quarter-wave plate away from the polarized beam splitter. The driving source drives the structural reflecting element to rotate at a uniform speed with an optical axis as an axis. Incident light passes through the polarized beam splitter to obtain split light. The split light passes through the quarter-wave plate to enter the structural reflecting element. The structural reflecting element rotates so that the phase of reflected light varies with time. The reflected light is modulated by the quarter-wave plate and emitted through the polarized beam splitter, and a target beam is obtained.Type: GrantFiled: January 22, 2021Date of Patent: January 28, 2025Assignee: SOOCHOW UNIVERSITYInventors: Xiang Zhang, Fan Gao, Nian Zhang, Xiao Yuan, Baoxing Xiong
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Patent number: 11828931Abstract: Provided is a scanner system includes a laser scanner and a remote controller thereof. The remote controller includes a guide light transmitting unit. The laser scanner includes a guide light receiving unit for detecting the guide light transmitting unit. The laser scanner directs the optical axis of distance-measuring light to the guide light transmitting unit based on a light reception signal and set a data exclusion range with reference to the direction of the guide light transmitting unit. The laser scanner re-measures point cloud data of the data exclusion range in accordance with a measurement permission from the remote controller upon measuring point cloud data of an entire measurement range, and deletes the point cloud data of the data exclusion range from the point cloud data of an entire measurement range, and replacing the deleted data with remeasured point cloud data to acquire entire point cloud data.Type: GrantFiled: October 13, 2020Date of Patent: November 28, 2023Assignee: TOPCON CORPORATIONInventor: Satoshi Yasutomi
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Patent number: 11586037Abstract: An optical element includes a plate portion including a reflecting surface on an upper surface in a direction of a vertically extending central axis, a shaft that extends in a direction of a first axis intersecting with the central axis and is fixed to a lower surface of the plate portion, a magnet below the shaft in the direction of the central axis, and a holder below the plate portion to hold the magnet, the holder including a magnet accommodating portion in which the magnet is accommodated, the magnet accommodating portion including a magnet pressing portion that covers at least a portion of a lower surface of the accommodated magnet.Type: GrantFiled: September 9, 2020Date of Patent: February 21, 2023Assignee: NIDEC CORPORATIONInventor: Takuro Iguchi
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Patent number: 11307367Abstract: A method of calibrating a collimating lens system includes transmitting, using an optical transmitter, a beam out of an optical fiber and through a collimating lens of the collimating lens system. The beam is reflected off a perfect flat mirror positioned at an output of the collimating lens and back towards the collimating lens, and received, via the collimating lens, at a power meter connected to the optical fiber. The method also includes adjusting a position of a tip of the optical fiber proximal to the collimating lens while tracking a power reading using the power meter, selecting a calibration position of the optical fiber corresponding to a highest power reading, and securing the optical fiber relative to the collimating lens using the calibration position.Type: GrantFiled: August 17, 2020Date of Patent: April 19, 2022Assignee: X Development LLCInventors: Nam-hyong Kim, Andrei Kazmierski, Paul Epp
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Patent number: 11086005Abstract: A system for tracking multiple projectiles includes a first radar device aimed so that a field of view of the first radar device covers at least a portion of a target area into which projectiles are to be launched from a plurality of launch locations and a processor receiving data from the radar and identifying from the data tracks of a plurality of projectiles. The processor determines for each projectile track identified a specific one of the launch locations from which the projectile was launched and provides to the launch location associated with each projectile data corresponding to a trajectory of the projectile.Type: GrantFiled: July 17, 2019Date of Patent: August 10, 2021Assignee: TRACKMAN A/SInventor: Fredrik Tuxen
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Patent number: 10838064Abstract: Provided is a system for optical sensing. The system may include a linear motor, which may include a first member and a second member. The second member may be movable relative to the first member. At least one optical sensor may be disposed with the first member. A target may be disposed with the second member. The target may include at least one pattern of alternating first areas and second areas. The first areas may include a first color. The second areas may include a second color different than the first areas. The target may be positioned to overlap with an optical path of the at least one optical sensor as the second member moves relative to the first member. A method for optical sensing and a method for making a system for optical sensing are also disclosed.Type: GrantFiled: September 10, 2018Date of Patent: November 17, 2020Assignee: Velocity Magnetics, Inc.Inventor: Domenic P. Marzano
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Patent number: 10637574Abstract: A method and system for optical communication between a transmitter and receiver, using a video camera to image the location of the remote transmitter. The comparatively slow frame rate of conventional detector arrays, which would limit communication rate, is overcome by reading only pixels in a region of interest around the transmission source image, and these pixels can then be read out and the communication information on them retrieved, at a frame rate much faster than that of the conventional full frame read-out. Custom wiring of the array can be used to enable implementation of this increased frame rate. Other methods of increasing communication speed using a video camera array detector include spreading the optical signal spatially along a row of pixels, and reading those pixels simultaneously in one frame, or wavelength multiplexing the optical information, and dispersing the different wavelengths onto successive pixels of the array.Type: GrantFiled: March 5, 2014Date of Patent: April 28, 2020Assignee: SHILAT OPTRONICS LTD.Inventor: Avishay Guetta
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Patent number: 10379214Abstract: A system for tracking multiple projectiles includes a first radar device aimed so that a field of view of the first radar device covers at least a portion of a target area into which projectiles are to be launched from a plurality of launch locations and a processor receiving data from the radar and identifying from the data tracks of a plurality of projectiles. The processor determines for each projectile track identified a specific one of the launch locations from which the projectile was launched and provides to the launch location associated with each projectile data corresponding to a trajectory of the projectile.Type: GrantFiled: July 11, 2016Date of Patent: August 13, 2019Assignee: Trackman A/SInventor: Fredrik Tuxen
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Patent number: 10330921Abstract: A scanning device includes a base containing one or more rotational bearings disposed along a gimbal axis. A gimbal includes a shaft that fits into the rotational bearings so that the gimbal rotates about the gimbal axis relative to the base. A mirror assembly includes a semiconductor substrate, which has been etched and coated to define a support, which is fixed to the gimbal, at least one mirror, contained within the support, and a connecting member connecting the at least one mirror to the support and defining at least one mirror axis, about which the at least one mirror rotates relative to the support.Type: GrantFiled: June 14, 2017Date of Patent: June 25, 2019Assignee: APPLE INC.Inventors: Raviv Erlich, Alexander Shpunt, Yuval Gerson
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Patent number: 10240900Abstract: Systems and methods that can be used in lightweight vehicles, such as lightweight small Armed Aerial Scout (AAS) vehicles, and can provide small, lightweight weapons capable of “Fire and Forget” type performance to defeat the next generation “Swarm Weapon Systems”, such as, groups of high speed attack boats armed with anti ship weapons, are disclosed.Type: GrantFiled: February 4, 2016Date of Patent: March 26, 2019Assignee: Raytheon CompanyInventors: John L. Tomich, William M. Casey, Colin M. Johnston, Raymond Samaniego, David Fluckiger, Terry McLean
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Patent number: 10154177Abstract: The present disclosure provides a vision system camera, and associated methods of operation, having a multi-core processor, high-speed, high-resolution imager, FOVE, auto-focus lens and imager-connected pre-processor to pre-process image data provides the acquisition and processing speed, as well as the image resolution that are highly desirable in a wide range of applications. This arrangement effectively scans objects that require a wide field of view, vary in size and move relatively quickly with respect to the system field of view. This vision system provides a physical package with a wide variety of physical interconnections to support various options and control functions. The package effectively dissipates internally generated heat by arranging components to optimize heat transfer to the ambient environment and includes dissipating structure (e.g. fins) to facilitate such transfer.Type: GrantFiled: October 4, 2012Date of Patent: December 11, 2018Assignee: COGNEX CORPORATIONInventors: Laurens Nunnink, Richard Reuter, Frank Winzen, Mario Joussen, Joerg Kesten, James A. Negro
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Patent number: 10078137Abstract: A LIDAR system that can accommodate both a clear atmosphere and be adaptable to environments in which smoke, dust or other particulates (i.e., a degraded environment) exist in the atmosphere around the target is described. The system operates in two fields of regard: clear view mode (wide field of regard) and a degraded view mode (narrow field of regard). The wide field of regard allows the output laser energy to be concentrated over a large number of detector pixels and thus resulting in high scene scan rate. The narrow field of regard allows concentrating the laser output energy on fewer pixels to compensate for the loss of laser energy due to atmospheric degradation. The combination of the ROIC and LIDAR modes of operation result in a system that is capable of operation under clear and degraded environments.Type: GrantFiled: June 21, 2014Date of Patent: September 18, 2018Assignee: Irvine Sensors Corp.Inventors: David Ludwig, Alan C. Rogers, Medhat Azzazy, James W. Justice
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Patent number: 10006981Abstract: According to examples of the presently disclosed subject matter, there is provided a system for estimating a source location of a projectile, comprising an optics an optics subsystem, a radar subsystem and a processor. The processor is adapted to use range and velocity measurements obtained from data provided by the radar subsystem, a source direction and an event start time obtained from data provided by the optical subsystem and a predefined kinematic model for the projectile for estimating a range to a source location of the projectile.Type: GrantFiled: April 25, 2013Date of Patent: June 26, 2018Assignee: ELTA SYSTEMS LTD.Inventor: Gil Tidhar
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Patent number: 9964745Abstract: Focus assemblies for laser radar are situated to receive a measurement beam that is focused at or in the focus assemblies. In some examples, focus assemblies include a corner cube and a return reflector, and the measurement beam is focused on, at, or within the corner cube or return reflector. A polarizing beam splitter and a quarter wave plate can be situated so that an input measurement beam and an output measurement beam can be separated.Type: GrantFiled: March 14, 2013Date of Patent: May 8, 2018Assignee: Nikon CorporationInventor: Daniel G. Smith
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Patent number: 9207045Abstract: An optical device for guiding radiation from an object scene to a detector contains an alignment device for pivoting a field of view of the detector relative to a predetermined direction, a detector optical unit and an optical articulation for guiding the beam path from the pivoted field of view into the detector optical unit. In order to achieve a compact configuration of the device, the optical articulation has a reversing prism, in which beams running in the optical axis of the articulation are refracted towards a mirror surface of the reversing prism and are reflected by the reflection surface.Type: GrantFiled: June 11, 2012Date of Patent: December 8, 2015Assignee: DIEHL BGT DEFENCE GMBH & CO. KGInventors: Reiner Eckhardt, Joachim Barenz, Hubert Kuppel
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Patent number: 8848180Abstract: A reference system configured in accordance with a particular embodiment includes a light-emitting device having a first light emitter, a second light emitter, and a housing. The housing includes a base operably connected to the first and second light emitters. The first light emitter is configured to emit a planar light region having a vertical orientation. The second light emitter is configured to emit an indicator light beam. A slope of the indicator light beam is adjustable to change a position of the indicator light beam within a vertical adjustment field. The system further includes a controller configured to cause the first and second light emitters to rotate in concert relative to the base about a vertical axis so as to rotationally reposition the planar light region and the indicator light beam in response to a detected misalignment of the planar light region.Type: GrantFiled: September 5, 2013Date of Patent: September 30, 2014Assignee: Laserline Mfg., Inc.Inventors: Robert W. Vanneman, Timothy A. Treichler
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Patent number: 8752969Abstract: The mirror has a base, inner stage, reflector, controller, and mechanical subsystems pivotally supporting stage and reflector: subsystem #1, the stage (about one rotation axis, relative to the base); subsystem #2, the reflector (about another axis, relative to the stage). Stage and reflector each rotate on respective jewel, ceramic or other refractory bearings. Controller establishes stage/base and reflector/stage angles. Subsystems include respective bearings. The method includes (1) using the two-axis mechanism to receive, and measure an incident angle of, incident rays from an external object; (2) then using that mechanism to direct a radiation beam from a laser source toward the external object, responsive to incident rays. Optionally step (1) operates the mirror at peak acceleration, or minimum response time, as function of mirror thickness; and provides two- to three-millimeter mirror thickness. Optionally step (2) directs the beam to disrupt object function or impair object structure.Type: GrantFiled: October 14, 2008Date of Patent: June 17, 2014Assignee: Arete AssociatesInventors: David M. Kane, Kelly Hillman, Christopher Hornberg, John Hunt, Andrew E. Paul
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Patent number: 8717552Abstract: Methods and apparatuses are provided that can be utilized for accurate pre-aiming and installation of devices. The devices are pre-set to an aiming orientation relative to a universal reference plane. The reference plane is then correlated to a feature of a pole, tower, or other structure that will be used to elevate or suspend the devices. A position sensing subsystem is utilized to inform a worker when each device is correctly angularly oriented to the reference plane. The worker simply moves the mounting structure for the device to the correct three-dimensional angular orientation, uses the position sensor to confirm the correct orientation to within a highly accurate margin of error, and either locks the device in that orientation or marks the orientation. The pole, tower, or other elevating structure is preliminarily erected at its pre-designed location and pre-designed rotational orientation with the pre-aimed devices.Type: GrantFiled: September 14, 2012Date of Patent: May 6, 2014Assignee: Musco CorporationInventors: Myron Gordin, David L. Barker, Timothy J. Boyle, Christopher T. Chantos, Philip D. Hol, Darrell D. Rogers, Kenneth G. Lewis, Timothy D. McGill
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Patent number: 8547543Abstract: An angle-measuring device includes a first group of components and a second group of components that are rotatable relative to each other about an axis. The first group includes a carrier element for enclosing a shaft and on which a graduation disk is secured, a connecting element, and a device for affixing the connecting element relative to the carrier element. The second group includes a sensor element for scanning the graduation disk. The carrier element and the connecting element are arranged such that the connecting element is able to be brought into operative connection with the carrier element so that torque is transmittable with positive locking between the connecting element and the carrier element about the axis. The connecting element is able to be brought into a positive-locking position by axial displacement by the device for affixing the connecting element, and is able to be prestressed radially against the shaft.Type: GrantFiled: January 25, 2012Date of Patent: October 1, 2013Assignee: Dr. Johannes Heidenhain GmbHInventor: Johann Mitterreiter
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Patent number: 8393900Abstract: A system for aligning a simulator arranged for firing a mounted on a weapon. The simulator has a radiation source arranged so as to emit a beam along a simulation axis, and for adjusting the simulation axis so that it is aligned with the weapon sight. The system includes a sighting mark at which the weapon sight is to be aimed during alignment, and a device arranged in connection with the sighting mark to emit beam along an axis representing an aligned simulation axis. The system further includes an aligning unit that is deployable at the simulator and in which at least a first part of the beam from the element is reflected along an axis representing the current position of the simulation axis.Type: GrantFiled: February 7, 2002Date of Patent: March 12, 2013Assignee: Saab ABInventor: Per Renntoft
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Patent number: 8325332Abstract: Start-up methods for frequency converted light sources and projector systems comprising frequency converted light sources are described herein. The start-up methods generally comprise modulating the frequency converted light source over three degrees of freedom (two spatial dimensions and one wavelength dimension). Specifically, fast oscillation of an axis of an adjustable optical component is performed simultaneously with fast oscillation of a wavelength of the semiconductor laser while a second axis of the adjustable optical component is incrementally stepped and the output intensity of the frequency converted light source is monitored for each step. This start-up method allows for three linear searches to be used to rapidly locate the appropriate control settings for the frequency converted light source.Type: GrantFiled: October 20, 2010Date of Patent: December 4, 2012Assignee: Corning IncorporatedInventors: Garrett Andrew Piech, Dragan Pikula, Daniel Ohen Ricketts
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Patent number: 8300219Abstract: Methods and apparatuses are provided that can be utilized for accurate pre-aiming and installation of devices. The devices are pre-set to an aiming orientation relative to a universal reference plane. The reference plane is then correlated to a feature of a pole, tower, or other structure that will be used to elevate or suspend the devices. A position sensing subsystem is utilized to inform a worker when each device is correctly angularly oriented to the reference plane. The worker simply moves the mounting structure for the device to the correct three-dimensional angular orientation, uses the position sensor to confirm the correct orientation to within a highly accurate margin of error, and either locks the device in that orientation or marks the orientation. The pole, tower, or other elevating structure is then preliminarily erected at its pre-designed location and pre-designed rotational orientation with the pre-aimed devices.Type: GrantFiled: August 3, 2009Date of Patent: October 30, 2012Assignee: Musco CorporationInventors: Myron Gordin, David L. Barker, Timothy J. Boyle, Christopher T. Chantos, Philip D. Hol, Darrell D. Rogers, Kenneth G. Lewis, Jr., Timothy D. McGill
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Patent number: 8279430Abstract: A measuring system includes a laser tracker (10), a target point marked by a reflector (12), a surveying apparatus (13), and an arithmetic and control unit (14). The laser tracker emits a measuring beam (M) which is reflected by the reflector, a process that is used for determining the distance between the laser tracker (10) and the reflector (12). The surveying apparatus has a known position and orientation relative to the measuring beam (M) while preferably being embodied as a survey camera. The inventive measuring system is designed so as to track the reflector (12) via the measuring beam (M). In a normal tracking mode (A), a measured value for controlling the orientation of the measuring beam (M) is derived from the detection of the measuring beam reflected by the reflector (12).Type: GrantFiled: January 24, 2012Date of Patent: October 2, 2012Assignee: Leica Geosystems AGInventors: Jurgen Dold, Daniel Moser, Roland Zumbrunn
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Patent number: 8203702Abstract: Method/system locate external articles using source, detector (PSD), entrance aperture, and magnifying/reducing afocal element—expanding FOR>90°, or refining precision. Between (1) source or detector and (2) aperture, at least one plural-axis-rotatable mirror addresses source/detector throughout FOR. ½- to 15-centimeter mirror enables ˜25 to ˜45 ?radian beam divergence. Aperture, afocal element, and mirror(s) define source-detector path. Mirror(s) rotate in refractory- (or air/magnetic-) bearing mount; or mirror array. Auxiliary optics illuminate mirror back, monitoring return to measure (null-balance feedback) angle. To optimize imaging, auxiliary radiation propagates via splitters toward array (paralleling measurement paths), then focusing on imaging detector. Focal quality is developed as a PSF, optimized vs. angle; stored results later recover optima. Mirror drive uses magnet(s) on mirror(s). “Piston” motion yields in-phase wavefronts, so array dimensions set diffraction limit.Type: GrantFiled: October 14, 2008Date of Patent: June 19, 2012Assignee: Areté AssociatesInventors: David M. Kane, Kelly Hillman, Christopher Hornberg, John Hunt, Andrew E. Paul
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Patent number: 8120764Abstract: A tilt sensor with power-saving mechanism is provided. The tilt sensor includes a light-emitting element, a blocking object displaceable in an accommodating space on a baseboard, at least two first light sensors, a second light sensor and a control module. The first and the second light sensors respectively sense a light amount and a light amount variation according to the relative position of the light-emitting element and the blocking object. During a power-saving mode, when the light amount variation is larger than a specific value, the control module makes the light-emitting element work in a working mode to emit light according to a first current. During the work mode, when the light amount does not change or the light amount variation is smaller than a threshold value, the control module makes the light-emitting element work in the power-saving mode to emit light according to a second current.Type: GrantFiled: July 20, 2010Date of Patent: February 21, 2012Assignee: Edison Opto CorporationInventors: Chung-Ping Feng, Peng-Yu Chen
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Publication number: 20120026488Abstract: Start-up methods for frequency converted light sources and projector systems comprising frequency converted light sources are described herein. The start-up methods generally comprise modulating the frequency converted light source over three degrees of freedom (two spatial dimensions and one wavelength dimension). Specifically, fast oscillation of an axis of an adjustable optical component is performed simultaneously with fast oscillation of a wavelength of the semiconductor laser while a second axis of the adjustable optical component is incrementally stepped and the output intensity of the frequency converted light source is monitored for each step. This start-up method allows for three linear searches to be used to rapidly locate the appropriate control settings for the frequency converted light source.Type: ApplicationFiled: October 20, 2010Publication date: February 2, 2012Inventors: Garrett Andrew Piech, Dragan Pikula, Daniel Ohen Ricketts
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Patent number: 8049875Abstract: One embodiment of an instrument for setting the angle between two work pieces. In operation, the instrument is placed on one of the work pieces at a user determined distance from the apex of the angle being set. The instrument projects a light beam creating a light spot on the other work piece. When the light spot is aligned with a user mark on the other work piece the work pieces are aligned at the correct angle. Use of this instrument provides a positive and accurate indication that the work pieces are aligned at the desired angle.Type: GrantFiled: April 18, 2009Date of Patent: November 1, 2011Inventor: Lan Elliot Brooks
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Patent number: 7880872Abstract: The present invention features a method to determine relative spatial parameters between two coordinate systems, which may be a mold and a region of a substrate in which mold is employed to generate a pattern. The method includes sensing relative alignment between the two coordinate systems at multiple points and determines relative spatial parameters therebetween. The relative spatial parameters include a relative area and a relative shape.Type: GrantFiled: October 8, 2009Date of Patent: February 1, 2011Assignee: Molecular Imprints, Inc.Inventors: Pawan Kumar Nimmakayala, Tom H. Rafferty, Alireza Aghili, Byung-Jin Choi, Philip D. Schumaker, Daniel A. Babbs, Van Nguyen Truskett
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Patent number: 7821625Abstract: Angular deviation of illumination beam is measured with high accuracy for an expanded continuous range of angles using grating sensors that are configured to exhibit Surface Plasmon Resonance effects at actinic wavelengths. The beam deviation measurement systems and procedures are applicable to both mask-based and maskless lithography tools. A control system adopts an appropriate calibration algorithm based on whether the SPR effect is detected or not. Relative intensity shift in an SPR-affected diffractive order, and/or relative position and slope change in non-SPR-affected diffractive orders are used as a basis of the adopted calibration algorithm.Type: GrantFiled: December 22, 2008Date of Patent: October 26, 2010Assignee: ASML Holding N.V.Inventor: Todd R. Downey
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Patent number: 7768631Abstract: Method for providing a known reference point for an airborne imaging system, the method including providing at measured earth co-ordinates a camera/mirror assembly having a camera and a mirror mounted in fixed mutual spatial relationship and capable of tilting about two mutually orthogonal axes. Using the camera to track the sun and produce at least two or more different measured times respective time tagged camera images. Using the time tagged camera images to obtain a transformation of mirror axes relative to axes of the earth at a mirror location on the earth where the mirror is mounted. During a time window when the mirror is within a line of sight of the airborne imaging system and the sun, adjusting the azimuth and elevation of the mirror so that the sun is reflected by the mirror toward the airborne imaging system thereby capturing an image of the mirror in an aerial image produced by the airborne imaging system.Type: GrantFiled: March 7, 2008Date of Patent: August 3, 2010Assignee: Israel Aerospace Industries Ltd.Inventor: Jacob Rovinsky
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Patent number: 7587803Abstract: A process for assembling a camera module comprises the following steps:—placing the substrate (10) on a positioning die (70);—irradiating the lens assembly (30) with parallel rays of light (90);—displacing a lens assembly (30) comprising the convex lens (33) in an axial direction;—measuring the light intensity of light passing through a spot hole (75) by means of a light sensor (80) being accommodated in the positioning die (70);—determining an optimal axial position of the lens assembly (30) on the basis of an obtained light intensity curve;—bringing the lens assembly (30) to the optimal axial position;—removing the positioning die (70); and—attaching an image sensor chip to a bottom surface (12) of the substrate (10).Type: GrantFiled: September 26, 2003Date of Patent: September 15, 2009Assignee: TPO Displays Corp.Inventors: Vincent Johannes Jacobus Montfort, Fransiscus Gerardus Coenradus Verweg
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Publication number: 20090161093Abstract: Angular deviation of illumination beam is measured with high accuracy for an expanded continuous range of angles using grating sensors that are configured to exhibit Surface Plasmon Resonance effects at actinic wavelengths. The beam deviation measurement systems and procedures are applicable to both mask-based and maskless lithography tools. A control system adopts an appropriate calibration algorithm based on whether the SPR effect is detected or not. Relative intensity shift in an SPR-affected diffractive order, and/or relative position and slope change in non-SPR-affected diffractive orders are used as a basis of the adopted calibration algorithm.Type: ApplicationFiled: December 22, 2008Publication date: June 25, 2009Applicant: ASML Holding N.V.Inventor: Todd R. DOWNEY
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Patent number: 7548306Abstract: An optical encoder including a sensor module including a light emitting member, a light receiving member opposite to the light emitting member to receive the emitted light, and at least one boss extending in a first direction; a shade member located between the light emitting member and the light receiving member and having a shading pattern; a first support supporting the sensor module and including at least one recessed portion engaged with the boss, and a groove connected with the recessed portion and extending in a second direction, wherein the sensor module is attached to the first support by being moved in the second direction while the boss is guided by the groove, and wherein the recessed portion has a depth greater than the height of the boss, and a portion of the groove adjacent to the recessed portion has a depth less than the height of the boss.Type: GrantFiled: June 24, 2008Date of Patent: June 16, 2009Assignee: Ricoh Company, Ltd.Inventor: Koichi Hasegawa
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Patent number: 7385684Abstract: A head tracking system combines a plurality of sources of radiant energy, a plurality of sensors and at least one reflective element. As the reflective element moves, various radiant energy beams become incident thereon. The incident beams are reflected to respective sensors thereby providing head position signals.Type: GrantFiled: September 21, 2004Date of Patent: June 10, 2008Assignee: Lockheed Martin CorporationInventors: C. Gilbert Young, Victor Tisdel
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Patent number: 7349085Abstract: Carbon nanotube orientation may be detected by exposing the carbon nanotube to a pair of laser beams oriented transversely to one another. By observing the effect on the intensity of transmitted light from a first laser beam when the polarization of the second laser beam is changed, the carbon nanotube orientation can be derived.Type: GrantFiled: March 10, 2004Date of Patent: March 25, 2008Assignee: Intel CorporationInventors: Shida Tan, Yuegang Zhang
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Patent number: 7345748Abstract: In a survey system in which guide light is emitted from the side of a target, and, on the side of a surveying instrument, a telescope is directed roughly toward the target by receiving the guide light so as to shorten the time required for automatic collimation, the automatic collimation of the surveying instrument can be reliably performed by removing guide light reflected by reflective objects such as windowpanes. The target has a guide light remitter that emits guide light The guide light transmitter includes a light source, a polarizing plate that changes light emitted from this light source into linearly polarized light, and a quarter-wave plate that changes this nearly polarized light into circularly polarized guide light The surveying instrument includes a direction detector and a collimation preparing means. The direction detector includes a quarter-wave plate and a polarizing plate.Type: GrantFiled: May 13, 2005Date of Patent: March 18, 2008Assignee: Sokkia Co. Ltd.Inventors: Akinobu Sugiura, Minoru Chiba, Masaru Muraki, Masataka Kawakami
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Publication number: 20080055596Abstract: Carbon nanotube orientation may be detected by exposing the carbon nanotube to a pair of laser beams oriented transversely to one another. By observing the effect on the intensity of transmitted light from a first laser beam when the polarization of the second laser beam is changed, the carbon nanotube orientation can be derived.Type: ApplicationFiled: March 10, 2004Publication date: March 6, 2008Inventors: Shida Tan, Yuegang Zhang
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Patent number: 7196784Abstract: A laser beam transmitter and a method of calibrating such a transmitter result in a beam of laser light that is projected in a desired direction with respect to a transmitter body. The transmitter and a beam target are positioned such that a properly calibrated beam will illuminate a desired point on the target, such as for example the target center. The transmitter is activated and the offset of the point illuminated on the target from the target center measured. A plurality of optical wedge correction elements having varying wedge angles is provided, and the appropriate one of these optical wedge correction elements that will correct for the measured offset is selected. The selected optical wedge correction element is positioned in the transmitter body in the path of the beam. The optical wedge correction element is rotated until the beam is substantially aligned to illuminate the target center. The optical wedge element is then affixed in place in the transmitter body.Type: GrantFiled: May 10, 2005Date of Patent: March 27, 2007Assignee: Trimble Navigation LimitedInventors: Kevin Marc Morrissey, Michael A. Stickelman
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Patent number: 7120524Abstract: A carriage moves back and forth under a vehicle and three cameras or laser fixed along one axis pivot in a common plane, utilizing two cameras at time to locate a target fixed to a reference point on the undercarriage of the vehicle. Triangulation calculations, combined with the location of the cameras provide the location of the reference point in space in a three-dimensional coordinate system and compare that location with a stored designed location of the reference point prior to the crash, allowing the vehicle structure to be returned to its designed shape by other equipment.Type: GrantFiled: October 27, 2004Date of Patent: October 10, 2006Assignee: Matrix Electronic Measuring, L.P.Inventors: Robert W. Srack, Dwight Day
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Patent number: 7113269Abstract: A cemented optical element is disposed on a test sample and a laser light which is emitted from a laser light source section is incident into a prismatic plane so as to separate the laser light into a reflected light on the separating plane and a transmitted light on the separating plane on a light path separating plane. The reflected light on the separating plane passes through a prismatic plane so as to be condensed on a light receiving plane. The transmitted light on the separating plane is reflected on a reflecting plane having power so as to be condensed. Spots are formed on the light receiving planes which came through the prismatic plane. Sensitiveness for measuring angles can be changed while changing the length of the light path and the power.Type: GrantFiled: December 22, 2003Date of Patent: September 26, 2006Assignee: Olympus CorporationInventors: Junko Takahashi, Koichi Takahashi
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Patent number: 7038770Abstract: A virtual-tight-wire system is provided for determining a centerline in a large rotary machine (10). The virtual-tight-wire system includes a columnar light source (30) that is positioned at one end of the rotary machine (10). A columnar beam of light (32) is emitted from the light source (30) toward light receivers (26) in a first and second centering tool (24). The beam of light (32) is adjusted to impact the center of the light receivers (26). Once the beam (32) has been aligned, the beam acts as a virtual tight-wire for identifying a centerline of the rotary machine (10).Type: GrantFiled: September 25, 2003Date of Patent: May 2, 2006Assignee: Siemens Power Generation, Inc.Inventors: Waheed A. Abbasi, Wilbert B. Rethage
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Patent number: 6851870Abstract: In measuring and assembling a transceiver optical sub-assembly that includes a one-piece or two-piece housing having two opposite apertures separately for an optical fiber and a functional element to assemble thereto, and a lens located between the fiber and the functional element, an image sensor is aligned with the fiber aperture to set a focus on a fiber coupling plane in the housing, and a light spot presented on the fiber coupling plane by a laser beam emitted from the functional element through the lens, or an image of a light-emitting area or a receiving area of the functional element presented on the fiber coupling plane via the lens, is measured to adjust size and/or position thereof, so as to precisely align and fix the functional element to the housing.Type: GrantFiled: December 22, 2003Date of Patent: February 8, 2005Assignee: E-Pin Optical Industry Co., Ltd.Inventors: Jau-Jan Deng, I-Lin Chu, Guo-Zen Chen
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Patent number: 6646732Abstract: A position determining system is disclosed, which has a simplified configuration capable of producing a plurality of phantom planes simultaneously. The improved system according to the present invention consists of a light receiving and sensing device that includes a body having means for sending data on elevation- and depression-angles and horizontal angles, and a phantom plane determining function for determining phantom planes, so as to display or output differential angles of elevations and depressions in relation with the phantom surfaces produced from the data received from the body.Type: GrantFiled: July 19, 2001Date of Patent: November 11, 2003Assignee: Kabushiki Kaisha TopconInventors: Fumio Ohtomo, Kunihiro Hayashi, Jun-ichi Kodaira, Kazuki Osaragi
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Patent number: 6611323Abstract: An adapter for a laser gyro which acts at the same time as an impact shield. To do this, a laser gyro device is provided with a stable housing which has a jacket of elastic material. There is at least one reflecting element on the outer skin of the jacket. The reflecting element is optically connected to an optical transmitter and receiver which is securely attached in the stable housing. This optical transmitter and receiver determines the relative angular position of the reflecting element relative to the housing and thus relative to the laser gyro device. In this way, the orientation of large-volume articles to be measured, such as rollers, can be determined very accurately relative to the laser gyro device and hazard to the device by impacts is significantly reduced.Type: GrantFiled: June 5, 2000Date of Patent: August 26, 2003Assignee: Pruftechnik Dieter Busch AGInventor: Heinrich Lysen
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Publication number: 20020186366Abstract: An optical bench for processing laser light in a laser system, including an optical bench housing, steering optics mounted within the optical bench housing for directing the laser light in a path from a laser light input to an output, and a first mechanism for monitoring power output of the laser light regardless of shifts in wavelength of the laser light. The steering optics includes a sampling filter mounted to the optical bench housing and positioned in the path of the laser light, wherein a first portion of the laser light is reflected to the output and a second portion of the laser light is transmitted to the first mechanism.Type: ApplicationFiled: June 8, 2001Publication date: December 12, 2002Inventors: Robert M. Trusty, Scott Allen Nield, William Conrad Stenton, John W. Bowron, John Robert Pursel
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Patent number: 6469783Abstract: A system (16) for tracking a missile (22) in flight, the missile (22) having an optical beacon generator (32) that outputs a modulated signal (26) having a predetermined frequency, including an optical system (50, 52, 54) for transmitting image data along an optical path (68) onto an array of detectors (55), such that each detector in the array (55) receives substantially simultaneously the image data from the optical system (50, 52, 54). The system (16) further includes means for processing (46) the image data transmitted onto the array of detectors (55) in order to locate the optical beacon (32).Type: GrantFiled: April 19, 2001Date of Patent: October 22, 2002Assignee: Raytheon CompanyInventors: Michael L. Wells, John A. Tyson
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Patent number: 6421627Abstract: The invention relates to a device and to a method for determining the position for a working part of a tool on a working machine. A position determining apparatus is placed in a defined position on the working machine in order to determine the position of this place in a coordinate system fixed in space. The position-determining apparatus comprises partly a relatively slow determining device (1, 4; 1, 4a, 4b; 53, 50, 51), which at time intervals measures the actual position of the machine , and partly a relatively fast determining device (6; ACC1, ACC2) which reacts on position changes of the machine in order to calculate and up date the determination between the said time intervals.Type: GrantFiled: August 18, 1999Date of Patent: July 16, 2002Assignee: Spectra Precision ABInventor: Lars Ericsson
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Patent number: 6410897Abstract: A two-color infrared warning device, having both wide-angle and narrow-angle search capabilities, and a directional countermeasure device are mounted on a gimbal pointing in the same direction. The warning device and gimbal are initially operated in a wide-angle, step-stare mode to search for threats. When a potential hostile target is found, the warning device changes to a narrow-angle mode to determine whether the potential target is hostile. When a hostile target is identified, the directional countermeasure device, which is pointed at the target by virtue of its mounting with the warning device on the gimbal, is activated.Type: GrantFiled: September 27, 2000Date of Patent: June 25, 2002Assignee: Raytheon CompanyInventor: Mary Dominique O'Neill