Abstract: A mask, a device and method for exposure are provided. The mask of the present disclosure includes: a first transparent region configured to allow light of a first wavelength to pass therethrough and filter out light of a second wavelength; and a second transparent region configured to allow the light of the second wavelength to pass therethrough, wherein the light of the second wavelength is light for exposure.

Abstract: An inspection device calibration method includes mounting a laser-operated calibration device to a calibration fixture including an adjustable target having alignment indicia; illuminating the adjustable target with laser light from the calibration device; adjusting the adjustable target to operatively align the alignment indicia with the laser light; removing the calibration device from the calibration fixture; mounting to the calibration fixture, an inspection device including one or more adjustable features; and operating the optical inspection device, including adjusting the inspection device to operatively align the inspection device with the adjustable target.

Abstract: An optical axis adjustment method for an X-ray analyzer. In a 2?-adjustment step, a 0° position of the rotation of a receiving-side arm and a 0° position of the angle of diffraction 2? are aligned. In a Zs-axis adjustment step, the position of an incident-side slit along a direction orthogonal to the centerline of the X-rays incident upon a sample from an X-ray source is adjusted. In a ?-adjustment step, the centerline of X-rays incident upon the sample from the X-ray source and the surface of the sample are adjusted so as to be parallel. In the 2?-adjustment step, the Zs-axis adjustment step, and the ?-adjustment step, the capability for X-ray intensity positional resolution upon a straight line possessed by a one-dimensional X-ray detector is used to perform 2?-adjustment, Zs-axis adjustment, and ?-adjustment.

Abstract: First and second positioning devices disposed at first and second stationary locations transmit first and second pilot signals, respectively. Transmission coverages of the first and second pilot signals have an area of overlap. When a mobile robot moves to the area of overlap, the mobile robot determines first angular orientation information between the mobile robot and the first positioning device, and second angular orientation information between the mobile robot and the second positioning device. The mobile robot then determines an initial position of the mobile robot based on the first stationary location, the second stationary location, the first angular orientation information, and the second angular orientation information.

Abstract: Microlithographic illumination system includes individually drivable elements to variably illuminate a pupil surface of the system. Each element deviates an incident light beam based on a control signal applied to the element. The system also includes an instrument to provide a measurement signal, and a model-based state estimator configured to compute, for each element, an estimated state vector based on the measurement signal. The estimated state vector represents: a deviation of a light beam caused by the element; and a time derivative of the deviation. The illumination system further includes a regulator configured to receive, for each element: a) the estimated state vector; and b) target values for: i) the deviation of the light beam caused by the deviating element; and ii) the time derivative of the deviation.

Abstract: A compact shock sensing system and method that employ a light sheet generator that can be used either as a solo aerodynamic shock detector or in a combination with a scanning mode shock sensor is disclosed. This shock sensing system and method can be used to detect and track unstable and travelling shocks in high speed aerodynamic flows, such as those found in supersonic inlets.

Abstract: Precision approach path indicator (PAPI) measurement systems and methods are described herein. One system includes a number of light sensor modules, wherein each light sensor module is configured to determine an intensity of a beam of light from a PAPI unit, a memory, and a processor configured to execute executable instructions stored in the memory to determine a transition angle of the beam of light from the PAPI unit, an elevation angle of the beam of light with respect to horizontal, and a width of a transition region of the beam of light, based, at least in part, on the intensity of the beam of light determined by each light sensor module.

Abstract: A calibrating method of calibrating a measured distance of a measured object measured by a distance-measuring device according to an ambient temperature includes providing a temperature sensor for measuring the ambient temperature of the distance-measuring device, calculating a calibrated imaging location of the measured object according to the ambient temperature and an imaging location of the measured object, and calibrating the measured distance according to the calibrated imaging location. In this way, when the distance-measuring device measures the measured object, the error due to the variation of the ambient temperature is avoided according to the calibrating method.

Abstract: A method for determining when a laser tracker is stable includes performing a plurality of first frontsight measurements and a plurality of first backsight measurements on a first target with the laser tracker, wherein the plurality of first frontsight measurements and the plurality of first backsight measurements are alternated in time, calculating a plurality of first two-face errors based on the plurality of first frontsight measurements and the plurality of first backsight measurements, determining at least one first stability metric based at least in part on the plurality of first two-face errors, the at least one first stability metric being a value defined by a rule, determining whether the laser tracker is stable based at least in part on the at least one first stability metric and a first termination criterion and generating an indication whether the laser tracker is stable or not stable.

Abstract: Light sensors (1) are used in lighting applications, especially in combination with LEDs, to control and/or adapt the color point of light sources. Costs and/or performance of the light sensor (1) are essential in order to guarantee cost-effective light sources with reproducible color points. This aim is achieved by a light sensor (1) comprising a light diffuser (10), an optical non-transparent housing (11) having at least one window (12), at least one interference filter (13) and at least two photo sensors (14). The light diffuser (10) is arranged in such a way that light from outside the optical non-transparent housing (11) has to pass the light diffuser (10) so as to enter the interior of the optical non-transparent housing (11) via the window (12). The interference filter (13) and the at least two photo sensors (14) are arranged in the interior of the optical non-transparent housing (11), which interference filter (13) is arranged between the window (12) and the at least two photo sensors (14).

Abstract: A system for measuring movement of an object includes a source of light for emitting a beam; an object for receiving the beam from the source and reflecting the beam; and a reflective optic for receiving the beam reflected from the object and again reflecting the beam at a first angle. The system also includes a receiver for receiving the reflected beam from the reflective optic. When the object moves in distance, the reflective optic reflects the beam at a second angle. The reflective optic may be replaced by an equivalent refractive optic(s). The receiver measures movement of the object, based on a difference between the first angle and the second angle. The reflective optic may include a cylindrical reflective optic, or a spherical reflective optic. The refractive optic(s) may include a plano hemispheric refractive optic, or a meniscus refractive optic. The receiver may include a quad-cell imaging system, or a focal plane array (FPA). The source of light may include a laser, or any collimated beam source.

Abstract: A light emitter 320 is so mounted to a mounting portion 170 provided at a predetermined position of the tool mounting rotation arm 160 that a light beam LB is emitted toward a swing arm 150, the light beam LB is caused to be emitted from the light emitter 320, and the swing arm 150 and the tool mounting rotation arm 160 are so positioned that the light beam LB from the light emitter 320 is irradiated to an allowable range of a light receiving portion 410 for receiving the light beam LB from the light emitter 320.

Abstract: Methods and apparatuses are provided that can be utilized for accurate pre-aiming and installation of devices. The devices are pre-set to an aiming orientation relative to a universal reference plane. The reference plane is then correlated to a feature of a pole, tower, or other structure that will be used to elevate or suspend the devices. A position sensing subsystem is utilized to inform a worker when each device is correctly angularly oriented to the reference plane. The worker simply moves the mounting structure for the device to the correct three-dimensional angular orientation, uses the position sensor to confirm the correct orientation to within a highly accurate margin of error, and either locks the device in that orientation or marks the orientation. The pole, tower, or other elevating structure is then preliminarily erected at its pre-designed location and pre-designed rotational orientation with the pre-aimed devices.

Abstract: A measuring system includes a laser tracker (10), a target point marked by a reflector (12), a surveying apparatus (13), and an arithmetic and control unit (14). The laser tracker emits a measuring beam (M) which is reflected by the reflector, a process that is used for determining the distance between the laser tracker (10) and the reflector (12). The surveying apparatus has a known position and orientation relative to the measuring beam (M) while preferably being embodied as a survey camera. The inventive measuring system is designed so as to track the reflector (12) via the measuring beam (M). In a normal tracking mode (A), a measured value for controlling the orientation of the measuring beam (M) is derived from the detection of the measuring beam reflected by the reflector (12).

Abstract: A system for measuring deflection in a structure. The novel system includes a detector array for measuring a position of a spot of light and a light source configured to form a spot of light at a position that is dependent on a deflection in the structure. In an illustrative embodiment, the system includes a corner reflector adapted to reflect a beam of light from the light source to the detector array such that a vertical position of the reflected beam is dependent on a total bending in the structure. In an alternate embodiment, the system includes a mirror for reflecting a beam of light from the light source to the detector array such that a vertical position of the reflected beam at the detector array is dependent on a deflection angle between two adjacent panels in the structure.

Abstract: A tilt sensor with power-saving mechanism is provided. The tilt sensor includes a light-emitting element, a blocking object displaceable in an accommodating space on a baseboard, at least two first light sensors, a second light sensor and a control module. The first and the second light sensors respectively sense a light amount and a light amount variation according to the relative position of the light-emitting element and the blocking object. During a power-saving mode, when the light amount variation is larger than a specific value, the control module makes the light-emitting element work in a working mode to emit light according to a first current. During the work mode, when the light amount does not change or the light amount variation is smaller than a threshold value, the control module makes the light-emitting element work in the power-saving mode to emit light according to a second current.

Abstract: Improvements to the art of orientation measurement are disclosed whereby the phase angle of each of the plurality of orientation dependent radiation patterns is measured at a single common and unique point of measurement on the observation surface and correspondingly in the image of the observation surface, and whereby a central landmark is located at the point of measurement without loss of accuracy in the determination of the plurality of phase angles of orientation dependent radiation so that the precise point of measurement can be determined in the image without errors introduced by an offset between the positions of landmarks and the position of phase angle measurement.

Abstract: The present invention features a method to determine relative spatial parameters between two coordinate systems, which may be a mold and a region of a substrate in which mold is employed to generate a pattern. The method includes sensing relative alignment between the two coordinate systems at multiple points and determines relative spatial parameters therebetween. The relative spatial parameters include a relative area and a relative shape.

Abstract: A surveying method using a the video total station comprises placing the video total station on a first platform, recording a first image of scenery, placing the video total solution on a second platform disposed at a distance from the first platform, measuring the distance from the first platform and recording a second image of the scenery. Three-dimensional coordinates of objects contained in the images are determined by a photogrammetric analysis of the images based on the measured distance. Further, orientations of the video total station can be recorded when taking the images and when measuring the distance.

Abstract: A laser target reflector assembly for mounting upon spacecraft having a long-range reflector array formed from a plurality of unfiltered light reflectors embedded in an array pattern upon a hemispherical reflector disposed upon a mounting plate. The reflector assembly also includes a short-range reflector array positioned upon the mounting body proximate to the long-range reflector array. The short-range reflector array includes three filtered light reflectors positioned upon extensions from the mounting body. The three filtered light reflectors retro-reflect substantially all incident light rays that are transmissive by their monochromatic filters and received by the three filtered light reflectors. In one embodiment the short-range reflector array is embedded within the hemispherical reflector.

Abstract: In three-dimensional measurement where circular polarized light or elliptical polarized light is projected as measurement light, correct measurement results can be obtained irrespective of the difference in intensity between primary reflected light and secondary reflected light.

Abstract: There are provided an autonomous vehicle, and an apparatus and method for estimating the motion of the autonomous vehicle and detecting three-dimensional (3D) information of an object appearing in front of the moving autonomous vehicle. The autonomous vehicle measures its orientation using an acceleration sensor and a magnetic flux sensor, and extracts epipolar geometry information using the measured orientation information. Since the corresponding points between images required for extracting the epipolar geometry information can be reduced to two, it is possible to more easily and correctly obtain motion information of the autonomous vehicle and 3D information of an object in front of the autonomous vehicle.

Abstract: A head tracking system combines a plurality of sources of radiant energy, a plurality of sensors and at least one reflective element. As the reflective element moves, various radiant energy beams become incident thereon. The incident beams are reflected to respective sensors thereby providing head position signals.

Abstract: An optical position-tracking system comprises a first light beam steering device for sweeping a first light beam through a first angular range to cause a reflection of the first light beam by a target. Additionally, the optical position-tracking system further comprises a second light beam steering device for sweeping a second light beam through a second angular range to cause a reflection of the second light beam by the target. Moreover, the optical position-tracking system enables determination of a position of the target using a triangulation technique utilizing a first angular value of the first light beam and a second angular value of the second light beam. The first angular value and the second angular value depend on the existence of the respective reflection.

Abstract: Described is a tilt meter for monitoring angle shift in an incident signal. The tilt meter includes a resonator for receiving an incident signal from a signal transmitter and outputting a resonated signal. An incident angle exists between a plane normal to the resonator and the incident signal. A sensor is included for sensing the resonated signal. A processor is connected with the sensor and is configured to compare intensities of the incident signal and the resonated signal. Based upon the comparison, the processor determines if and by how much the incident angle has changed.

Abstract: A method of level assist feature OPC layout is described using frequency model-based approach. Through low-pass spatial frequency filtering of a mask function, the local influence of zero diffraction energy can be determined. By determining isofocal intensity threshold requirements of an imaging process, a mask equalizing function can be designed. This provides the basis for frequency model-based assist feature layout. By choosing assist feature parameters that meet the requirements of the equalizing function, through-pitch focus and dose matching is possible for large two dimensional mask fields. The concepts introduced also lead to additional assist feature options and design flexibility.

Abstract: A method and arrangement for determining the level of at least two measurement points with a light beam direct along a first direction and being deflected through 90° with respect to the first direction to a second direction, the second direction being rotated through a rotation angle corresponding to the position of the measurement point about an axis which is formed by the first direction. The light beam has a cross-sectional intensity distribution with a preferred direction, and after being deflected to the second direction, falls on a detector surface which is positioned successively at each measurement point, the incidence level of the light beam and the orientation of the preferred direction of the cross-section intensity distribution of the light beam on the detector surface being determined for each measurement point, and the rotation angle for each measurement point being determined from the respective orientation of the preferred direction on the detector surface.

Abstract: The invention relates to a system for monitoring the movements, if any, of construction work parts. It comprises: a plurality of measurement taking stations (S1, S2 . . . ) able to sight targets; a plurality of reference targets (c?i) linked to at least one station; a plurality of monitoring targets (ci) mounted on the said construction work parts, at least one of the said monitoring targets (ki) being associated with at least two stations; means of control (30) of each station for measuring at successive instants the coordinates of the reference targets and of the monitoring targets which are associated therewith with respect to the said station; and means of processing (34) the coordinates of the reference targets and of the monitoring targets computed by the said stations at the said successive instants so as to deduce therefrom a displacement, if any, of a monitoring target between two measurement instants.

Abstract: Methods for measuring the low spatial reflectivity uniformity of a DMD spatial light modulator. These methods are unique since they compensate for the non-uniformities introduced by the tilt angle of the DMD mirrors in addition to the normal system non-uniformities introduced by the illumination source and optics. These methods flatten the image and remove all but the low spatial non-uniformities from the DMD mirrors.

Abstract: An observation system includes an observation device, an image pickup device, a display device, and at least one holding device. The observation device includes an optical objective system for observing an object. The image pickup device is capable of picking up an optical image incident upon the optical objective system of the observation device. The display device is capable of displaying the image picked up by the image pickup device. The holding device includes a moving mechanism which holds the observation device and the display device and which moves one of the observation device and the display device in conjunction with movement of the other device, and a switching mechanism capable of switching the observation device and the display device to a state in which the devices are movable by the moving mechanism and a state in which the devices are fixable in positions moved by the moving mechanism.

Abstract: The present invention is directed to a deviation detecting device that detects a deviation angle of a rotary unit of a laser light projector relative to a projector body. The deviation detecting device (190) includes a light emitter (193) attached to the projector body of the laser light projector for emitting laser light, a reflector (195) attached to the rotary unit of the laser light projector for reflecting light emitted from the light emitter, and a light receiving unit (194) attached to the projector body of the laser light projector for receiving the light reflected by the reflector. In the deviation detecting device, a position at which the light reflected by the reflector is incident upon the light receiving unit is utilized to determine a deviation angle of the rotary unit relative to the projector body.

Abstract: A dual mode seeker for intercepting a reentry vehicle or other target is disclosed. In one embodiment, the seeker is configured with an onboard 3D ladar system coordinated with an onboard IR detection system, where both systems utilize a common aperture. The IR and ladar systems cooperate with a ground based reentry vehicle detection/tracking system for defining a primary target area coordinate and focusing the IR FOV thereon. The IR system obtains IR image data in the IR FOV. The ladar system initially transmits with a smaller laser FOV to illuminate possible targets, rapidly interrogating the IR FOV. The ladar system obtains data on each possible target to perform primary discrimination assessments. Data fusion is employed to resolve the possible targets as between decoys/clutter and a reentry vehicle. The laser FOV is expandable to the IR FOV. Robust and reliable discrimination is obtained at high altitudes.

Abstract: A light path deviation detecting apparatus has a diverging element for diverging a detection target light path into two light paths, and detects light receiving position on light receiving surfaces disposed spaced light path lengths different from each other in the diverged light paths. A tilt of the detection target light path is detected from the light receiving positions detected respectively.

Abstract: An apparatus for measuring six-degree-of-freedom motions by using three-facet reflector, the six-degree-of-freedom motions of an object being measured by using the laser beam proceeding from a laser light source, comprising: a multiple facet reflector in the form of a trigonal pyramid, the multiple facet reflector being fixed on the object for measurement and able to reflect the laser beam in three directions; three position-sensitive detectors for measuring the position and intensity of the laser light points formed on their surfaces, with the movement of the multiple facet reflector, and then providing output signals; and a controlling section for analyzing six-degree-of-freedom motions of the multiple facet reflector by using the position and intensity of the laser light points output from the three position-sensitive detectors. (FIG. 4).

Abstract: A method for boresighting of a designation system, including a tracker responsive to a detector with reference to an indicator, including the step of directing a beam of light at a target, using a light source, so that the beam of light is reflected from a spot on the target while a temperature of the spot remains substantially constant. The method further includes focusing at least part of the reflected light as an image on the detector and determining a misalignment of the indicator and the image.

Abstract: An optical bench for processing laser light in a laser system, including an optical bench housing, steering optics mounted within the optical bench housing for directing the laser light in a path from a laser light input to an output, and a first mechanism for monitoring power output of the laser light regardless of shifts in wavelength of the laser light. The steering optics includes a sampling filter mounted to the optical bench housing and positioned in the path of the laser light, wherein a first portion of the laser light is reflected to the output and a second portion of the laser light is transmitted to the first mechanism.

Abstract: A photodetecting system for an automatic surveying instrument equipped with an automatic tracking system is capable of controlling the automatic surveying instrument by simple photodetecting means. A collimating optical system collimates the surveying instrument with respect to an object, a splitting optical device splits incident light rays received from the collimating optical system into light rays that travel toward first and second photodetecting devices, respectively, a first light condensing device disposed on an optical path between the first photodetecting device and the splitting optical device gathers the light rays in a first direction, and a second light condensing device disposed on an optical path between the second photodetecting device and the splitting optical device gathers the light rays in a second direction perpendicular to the first direction.

Abstract: A device for detecting optical position, comprising a photodetection unit 40 having a photodetection optical axis 37 and for outputting a photodetection signal corresponding to a light receiving position of a projected light beam, and a modulation grid 42 arranged on said photodetection optical axis and for equalizing distribution of light quantity of a received light beam, wherein a position of the light beam projected on the photodetection unit is detected based on said photodetection signal.

Abstract: The present invention is related to an apparatus and a non-destructive method for determining the porosity of an element, particularly a thin film, formed on a substrate, said substrate being positioned in a pressurized chamber, said chamber being at a predetermined pressure and at a predetermined temperature. According to this method a gaseous substance like e.g. toluene vapour is admitted in said chamber and after a predetermined period of time the porosity of the thin film is determined by means of at least on ellipsometric measurement. Particularly, the optical characteristics resulting from this in-situ ellipsometry are used to determine the amount of gaseous substance condensed in the pores of the film. These amounts are used to calculate the porosity of the film.

Abstract: Method for calibrating the deviation of a received beam in a terminal from its desired position. The received beam reaches a receiving sensor, and an acquisition beam an acquisition sensor of the terminal. The detection range of the acquisition sensor is greater than that of the receiving sensor. A portion of a transmitted beam emitted by the terminal to the partner terminal is guided as an incident beam on the reflecting surface, where it is reflected as an outgoing beam. A portion of the outgoing beam is respectively brought to the acquisition sensor and the receiving sensor. A respective measurement for the acquisition sensor and the receiving sensor is performed at least approximately isochronously; the measured results are compared for determining the deviation of the received beam from its desired position. Also a device for calibrating the deviation of a received beam in a terminal from its desired position.

Abstract: The invention provides a method and apparatus for guiding a weapon to a target using an optical seeker having dual semi-active laser (SAL) and laser radar (LADAR) modes of operation. The dual mode seeker incorporates a laser light source, an optical package including a quadrant detector for operating in SAL mode and a LADAR receiver for operating in LADAR mode. The seeker further includes a high speed scanning mirror for switching between modes to guide the weapon to the target. The method for guiding a weapon to a target includes receiving radiation from the target and tracking the radiation to guide the weapon; monitoring the detected radiation such that if the radiation falls below a predetermined level, a laser system on-board the weapon continues guiding the weapon by generating a laser beam; reflecting the laser beam off the target so that the reflected laser radiation is received from the target to track the radiation and guide the weapon to the target.

Abstract: A laser survey instrument, which comprises at least a main unit for emitting a laser beam and an object reflector for reflecting the laser beam from the main unit toward the main unit, whereby said main unit comprises an emitter for emitting the laser beam, a rotating unit for rotating and scanning the laser beam, a tilting mechanism for tilting the laser beam at an arbitrary angle at least in one direction with respect to a horizontal plane, a rotating angle detector interlocked with the rotating unit and for detecting irradiating direction of the laser beam, a reflection light detector for detecting reflection light from the object reflector, and an alignment display unit for detecting a deviation of direction with respect to the object reflector and a deviation of tilt angle based on a signal from the reflection light detector and for obtaining information on the deviation of direction or the tilt angle, the laser beam emitted from the main unit is irradiated to scan, the center of the object reflector is